NL157355B - Een uit gesinterd, aluminiumnitridehoudend materiaal bestaande houder voor het daaruit in vacuuem verdampen van gesmolten metalen. - Google Patents

Een uit gesinterd, aluminiumnitridehoudend materiaal bestaande houder voor het daaruit in vacuuem verdampen van gesmolten metalen.

Info

Publication number
NL157355B
NL157355B NL6611199.A NL6611199A NL157355B NL 157355 B NL157355 B NL 157355B NL 6611199 A NL6611199 A NL 6611199A NL 157355 B NL157355 B NL 157355B
Authority
NL
Netherlands
Prior art keywords
evaporation
vacuum
aluminum nitride
nitride material
molten metals
Prior art date
Application number
NL6611199.A
Other languages
English (en)
Other versions
NL6611199A (nl
Original Assignee
Kempten Elektroschmelz Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kempten Elektroschmelz Gmbh filed Critical Kempten Elektroschmelz Gmbh
Publication of NL6611199A publication Critical patent/NL6611199A/xx
Publication of NL157355B publication Critical patent/NL157355B/nl

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/26Vacuum evaporation by resistance or inductive heating of the source
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/583Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on boron nitride
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/593Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Ceramic Products (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Physical Vapour Deposition (AREA)
NL6611199.A 1965-08-11 1966-08-09 Een uit gesinterd, aluminiumnitridehoudend materiaal bestaande houder voor het daaruit in vacuuem verdampen van gesmolten metalen. NL157355B (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1965E0029885 DE1289712C2 (de) 1965-08-11 1965-08-11 Verdampfer fuer das Vakuumaufdampfen von Metallschichten auf Werkstoffe

Publications (2)

Publication Number Publication Date
NL6611199A NL6611199A (nl) 1967-02-13
NL157355B true NL157355B (nl) 1978-07-17

Family

ID=7074173

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6611199.A NL157355B (nl) 1965-08-11 1966-08-09 Een uit gesinterd, aluminiumnitridehoudend materiaal bestaande houder voor het daaruit in vacuuem verdampen van gesmolten metalen.

Country Status (9)

Country Link
US (1) US3813252A (nl)
AT (1) AT272925B (nl)
BE (1) BE685355A (nl)
CH (1) CH477564A (nl)
DE (1) DE1289712C2 (nl)
ES (1) ES328790A1 (nl)
GB (1) GB1160755A (nl)
NL (1) NL157355B (nl)
SE (1) SE310468B (nl)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES417413A1 (es) * 1972-08-18 1976-03-01 Kempten Elektroschmelz Gmbh Perfeccionamientos introducidos en evaporadores a base de material refractario sinterizado.
JPS564509B2 (nl) * 1974-08-15 1981-01-30
US4017319A (en) * 1976-01-06 1977-04-12 General Electric Company Si3 N4 formed by nitridation of sintered silicon compact containing boron
US4199480A (en) * 1978-05-25 1980-04-22 Gte Sylvania Incorporated Electrically conductive boat for vacuum evaporation of metals
US4332755A (en) 1978-06-15 1982-06-01 Kennecott Corporation Sintered silicon carbide - aluminum nitride articles and method of making such articles
US4268314A (en) * 1979-12-21 1981-05-19 Union Carbide Corporation High density refractory composites and method of making
US4373952A (en) * 1981-10-19 1983-02-15 Gte Products Corporation Intermetallic composite
DE3247985C2 (de) * 1982-12-24 1992-04-16 W.C. Heraeus Gmbh, 6450 Hanau Keramischer Träger
DE3248103C1 (de) * 1982-12-24 1987-11-12 W.C. Heraeus Gmbh, 6450 Hanau Tiegel zum Ziehen von Einkristallen
JPS59152269A (ja) * 1983-02-08 1984-08-30 九州耐火煉瓦株式会社 窒化珪素系複合耐火物
JPS60195059A (ja) * 1984-03-15 1985-10-03 株式会社トクヤマ 複合焼結体
US5085804A (en) * 1984-11-08 1992-02-04 Norton Company Refractory electrical device
US5045237A (en) * 1984-11-08 1991-09-03 Norton Company Refractory electrical device
US5324694A (en) * 1985-06-26 1994-06-28 The Babcock & Wilcox Company Silicon nitride/boron nitride composite with enhanced fracture toughness
US5627542A (en) * 1985-12-23 1997-05-06 Loral Vought Systems Corporation Method of making a radar transparent window material operable above 2000° C.
JPS62202868A (ja) * 1986-02-27 1987-09-07 電気化学工業株式会社 導電性セラミツク及びその製造法
US4847031A (en) * 1987-12-16 1989-07-11 Gte Products Corporation Evaporating boats containing titanium diboride
JP2556888B2 (ja) * 1987-12-24 1996-11-27 日立金属株式会社 電気抵抗率バラツキの少ないセラミックス導電材料
GB8926164D0 (en) * 1989-11-20 1990-01-10 Rtz Chemicals Borides Limited Process for the production of refractory composite article
US5126284A (en) * 1991-10-25 1992-06-30 Curran Patrick A Method of inductively contacting semiconductor regions
DE4138481A1 (de) * 1991-11-22 1993-05-27 Kempten Elektroschmelz Gmbh Wiederaufarbeitung von gebrauchten verdampferschiffchen
US5604164A (en) * 1995-09-06 1997-02-18 Advanced Ceramics Corporation Refractory boat and method of manufacture
DE19720927A1 (de) * 1996-05-20 1997-11-27 Hasco Normalien Hasenclever Co Werkzeugform zum Druck- oder Spritzgießen von Metallen und/oder Kunststoffen
DE10015850A1 (de) * 2000-03-30 2001-10-18 Kempten Elektroschmelz Gmbh Material für alterungsbeständige keramische Verdampfer
KR100489304B1 (ko) * 2002-12-23 2005-05-17 재단법인 포항산업과학연구원 저항가열 보트 및 그 제조방법
DE102007004635A1 (de) * 2007-01-30 2008-07-31 Sintec Keramik Gmbh 2-Schicht-Verdampferkörper und Verfahren zur Herstellung desselben
CN115626828A (zh) * 2017-10-20 2023-01-20 飞罗得材料技术股份有限公司 陶瓷、探针引导构件、探针卡及封装检查用插座

Also Published As

Publication number Publication date
SE310468B (nl) 1969-04-28
AT272925B (de) 1969-07-25
ES328790A1 (es) 1967-08-16
NL6611199A (nl) 1967-02-13
CH477564A (de) 1969-08-31
US3813252A (en) 1974-05-28
DE1289712B (de) 1969-02-20
GB1160755A (en) 1969-08-06
DE1289712C2 (de) 1973-12-13
BE685355A (nl) 1967-02-10

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Legal Events

Date Code Title Description
V1 Lapsed because of non-payment of the annual fee
NL80 Abbreviated name of patent owner mentioned of already nullified patent

Owner name: ELEKTROSCHME