AT255225B - Verfahren und Einrichtung zum Vakuumüberziehen von Gegenständen durch Kathodenzerstäubung - Google Patents

Verfahren und Einrichtung zum Vakuumüberziehen von Gegenständen durch Kathodenzerstäubung

Info

Publication number
AT255225B
AT255225B AT12565A AT12565A AT255225B AT 255225 B AT255225 B AT 255225B AT 12565 A AT12565 A AT 12565A AT 12565 A AT12565 A AT 12565A AT 255225 B AT255225 B AT 255225B
Authority
AT
Austria
Prior art keywords
vacuum coating
cathodic sputtering
coating objects
objects
cathodic
Prior art date
Application number
AT12565A
Other languages
German (de)
English (en)
Inventor
Edgard Brichard
Original Assignee
Glaverbel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Glaverbel filed Critical Glaverbel
Application granted granted Critical
Publication of AT255225B publication Critical patent/AT255225B/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Surface Treatment Of Glass (AREA)
AT12565A 1964-03-12 1965-01-08 Verfahren und Einrichtung zum Vakuumüberziehen von Gegenständen durch Kathodenzerstäubung AT255225B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LU45647A LU45647A1 (fr) 1964-03-12 1964-03-12

Publications (1)

Publication Number Publication Date
AT255225B true AT255225B (de) 1967-06-26

Family

ID=19723710

Family Applications (1)

Application Number Title Priority Date Filing Date
AT12565A AT255225B (de) 1964-03-12 1965-01-08 Verfahren und Einrichtung zum Vakuumüberziehen von Gegenständen durch Kathodenzerstäubung

Country Status (13)

Country Link
US (1) US3414503A (fr)
AT (1) AT255225B (fr)
BE (1) BE658485A (fr)
CH (1) CH429363A (fr)
DE (1) DE1640604C3 (fr)
DK (1) DK130797B (fr)
ES (1) ES307466A1 (fr)
FI (1) FI45111C (fr)
FR (1) FR1425640A (fr)
GB (1) GB1058024A (fr)
LU (1) LU45647A1 (fr)
NL (1) NL132566C (fr)
SE (1) SE314268B (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2098563A5 (fr) * 1970-07-10 1972-03-10 Progil
US4094763A (en) * 1970-07-31 1978-06-13 Ppg Industries, Inc. Sputter coating of glass with an oxide of a metal having an atomic number between 48 and 51 and mixtures thereof
US3907660A (en) * 1970-07-31 1975-09-23 Ppg Industries Inc Apparatus for coating glass
GB1365492A (en) * 1971-02-05 1974-09-04 Triplex Safety Glass Co Metal oxide films
US4132624A (en) * 1971-02-05 1979-01-02 Triplex Safety Glass Company Limited Apparatus for producing metal oxide films
GB1381835A (en) * 1972-10-07 1975-01-29 Delog Detag Flachglas Ag Coating of large plates of glass ceramics plstics and the like by cathodic sputtering
US3904506A (en) * 1972-11-13 1975-09-09 Shatterproof Glass Corp Apparatus for continuous production of sputter-coated glass products
DE2844491C2 (de) * 1978-10-12 1983-04-14 Leybold-Heraeus GmbH, 5000 Köln Vakuum-Beschichtungsanlage mit einer Einrichtung zum kontinuierlichen Substrattransport
US4194962A (en) * 1978-12-20 1980-03-25 Advanced Coating Technology, Inc. Cathode for sputtering
US4285800A (en) * 1979-04-18 1981-08-25 Branson International Plasma Corp. Gas plasma reactor for circuit boards and the like
US4289598A (en) * 1980-05-03 1981-09-15 Technics, Inc. Plasma reactor and method therefor
US4399014A (en) * 1980-05-03 1983-08-16 Engle Frank W Plasma reactor and method therefor
DE3041551A1 (de) * 1980-11-04 1982-06-09 Siemens AG, 1000 Berlin und 8000 München Elektroden fuer plasma-aetzanlage
US4797317A (en) * 1984-09-27 1989-01-10 Gila River Products, Inc. Solar control window film
US4634637A (en) * 1985-11-22 1987-01-06 Gila River Products, Inc. Solar control film
US6309516B1 (en) 1999-05-07 2001-10-30 Seagate Technology Llc Method and apparatus for metal allot sputtering

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2043966A (en) * 1934-04-21 1936-06-09 Kathon Ltd Apparatus for depositing metal by electrode dispersion
US2435997A (en) * 1943-11-06 1948-02-17 American Optical Corp Apparatus for vapor coating of large surfaces
GB706003A (en) * 1949-05-18 1954-03-24 British American Res Ltd Improvements in the coating of articles by evaporation and/or sputtering in evacuated chambers
US2754227A (en) * 1951-11-30 1956-07-10 Ransburg Electro Coating Corp Method and apparatus for spray coating of articles
US2736671A (en) * 1952-03-19 1956-02-28 Ransburg Electro Coating Corp Method and apparatus for repositioning coating atomizer means
US2703549A (en) * 1952-03-27 1955-03-08 Ransburg Electro Coating Corp Apparatus for the electrostatic spray coating of articles
US2801607A (en) * 1952-08-06 1957-08-06 Centre Nat Rech Scient Apparatus for applying material by thermal vaporization in the manufacture of electrical resistors
US2716622A (en) * 1952-10-06 1955-08-30 Bell Telephone Labor Inc Method and apparatus for spray coating articles
LU34343A1 (fr) * 1955-05-10
GB830391A (en) * 1955-10-28 1960-03-16 Edwards High Vacuum Ltd Improvements in or relating to cathodic sputtering of metal and dielectric films
US3294670A (en) * 1963-10-07 1966-12-27 Western Electric Co Apparatus for processing materials in a controlled atmosphere
US3293168A (en) * 1964-05-22 1966-12-20 Werner P Schulz Apparatus for coating substrates by cathode sputtering

Also Published As

Publication number Publication date
GB1058024A (en) 1967-02-08
CH429363A (fr) 1967-01-31
DK130797B (da) 1975-04-14
FR1425640A (fr) 1966-01-24
DE1640604A1 (de) 1971-02-04
NL6503137A (fr) 1965-09-13
US3414503A (en) 1968-12-03
FI45111C (fi) 1972-03-10
DE1640604B2 (de) 1973-07-05
FI45111B (fr) 1971-11-30
NL132566C (fr) 1971-05-17
BE658485A (fr) 1965-05-17
SE314268B (fr) 1969-09-01
LU45647A1 (fr) 1965-09-13
DE1640604C3 (de) 1974-01-31
DK130797C (fr) 1975-09-15
ES307466A1 (es) 1965-07-01

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