Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
  • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
  • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
  • H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D99/00—Subject matter not provided for in other groups of this subclass

Landscapes

• Engineering & Computer Science (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Physics & Mathematics (AREA)
• Power Engineering (AREA)
• Light Receiving Elements (AREA)
• Electrodes Of Semiconductors (AREA)
• Solid-Sorbent Or Filter-Aiding Compositions (AREA)
• Conductive Materials (AREA)
• Laminated Bodies (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=19755085

Family Applications (1)

Country Status (12)

Families Citing this family (3)

Family Cites Families (2)

• 0
  • NL NL298353D patent/NL298353A/xx unknown
• 1963
  • 1963-09-25 NL NL63298353A patent/NL140655B/xx unknown
• 1964
  • 1964-02-20 US US346172A patent/US3343254A/en not_active Expired - Lifetime
  • 1964-09-21 DK DK463764AA patent/DK113658B/da unknown
  • 1964-09-22 SE SE11390/64A patent/SE317448B/xx unknown
  • 1964-09-22 AT AT810364A patent/AT250440B/de active
  • 1964-09-22 CH CH1229264A patent/CH454565A/de unknown
  • 1964-09-22 GB GB38575/64A patent/GB1078866A/en not_active Expired
  • 1964-09-23 BE BE653469A patent/BE653469A/xx unknown
  • 1964-09-23 FR FR988986A patent/FR1408613A/fr not_active Expired
  • 1964-09-23 DE DEN25560A patent/DE1298832B/de not_active Withdrawn
  • 1964-09-23 ES ES0304286A patent/ES304286A1/es not_active Expired
  • 1964-09-25 JP JP5495964A patent/JPS417175B1/ja active Pending

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