AR088019A1 - Metodo y aparato fototermico para la determinacion sin contacto de propiedades termicas y opticas de un material - Google Patents
Metodo y aparato fototermico para la determinacion sin contacto de propiedades termicas y opticas de un materialInfo
- Publication number
- AR088019A1 AR088019A1 ARP110102121A AR088019A1 AR 088019 A1 AR088019 A1 AR 088019A1 AR P110102121 A ARP110102121 A AR P110102121A AR 088019 A1 AR088019 A1 AR 088019A1
- Authority
- AR
- Argentina
- Prior art keywords
- protuberance
- heating
- curvature
- magnitude
- coefficient
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/171—Systems in which incident light is modified in accordance with the properties of the material investigated with calorimetric detection, e.g. with thermal lens detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/16—Investigating or analyzing materials by the use of thermal means by investigating thermal coefficient of expansion
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
Se irradia el material bajo ensayo con un haz de calentamiento de modo de deformar la superficie del material formando una protuberancia sobre la misma. Al mismo tiempo se hace incidir un haz de medición sobre la superficie de modo que es reflejada por la protuberancia, produciendo un haz dispersado por la curvatura de la protuberancia que es detectado mediante una abertura pequeña a modo de filtro espacial ubicada en un punto más cerca o más lejos que la distancia confocal. La transmisión del haz a través de la abertura disfocal varía en función de la curvatura de la protuberancia inducida por calentamiento. La señal de transmisión permite determinar la magnitud de la dilatación inducida. Dicha magnitud y su dependencia con la frecuencia de la modulación permite determinar propiedades físicas como el coeficiente de dilatación o el de difusividad térmica, el espesor de la película de recubrimiento o el coeficiente de absorción de la luz incidente en el haz de calentamiento. Variando la longitud de onda de la radiación incidente es posible determinar el espectro de absorción de la muestra aún para partículas de muy pequeño tamaño en que la fracción de energía absorbida es minúscula.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ARP110102121 AR088019A1 (es) | 2011-06-17 | 2011-06-17 | Metodo y aparato fototermico para la determinacion sin contacto de propiedades termicas y opticas de un material |
PCT/IB2012/053043 WO2012172524A1 (en) | 2011-06-17 | 2012-06-15 | Method and photothermal apparatus for contactless determination of thermal and optical properties of material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ARP110102121 AR088019A1 (es) | 2011-06-17 | 2011-06-17 | Metodo y aparato fototermico para la determinacion sin contacto de propiedades termicas y opticas de un material |
Publications (1)
Publication Number | Publication Date |
---|---|
AR088019A1 true AR088019A1 (es) | 2014-05-07 |
Family
ID=46601860
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ARP110102121 AR088019A1 (es) | 2011-06-17 | 2011-06-17 | Metodo y aparato fototermico para la determinacion sin contacto de propiedades termicas y opticas de un material |
Country Status (2)
Country | Link |
---|---|
AR (1) | AR088019A1 (es) |
WO (1) | WO2012172524A1 (es) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10751832B2 (en) * | 2017-07-18 | 2020-08-25 | Jtekt Corporation | Optical non-destructive inspection method and optical non-destructive inspection apparatus |
CN111818434B (zh) * | 2020-06-30 | 2022-03-25 | 歌尔微电子有限公司 | Mems传感器和电子设备 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4522510A (en) * | 1982-07-26 | 1985-06-11 | Therma-Wave, Inc. | Thin film thickness measurement with thermal waves |
US5377006A (en) * | 1991-05-20 | 1994-12-27 | Hitachi, Ltd. | Method and apparatus for detecting photoacoustic signal |
US5645351A (en) * | 1992-05-20 | 1997-07-08 | Hitachi, Ltd. | Temperature measuring method using thermal expansion and an apparatus for carrying out the same |
CA2126481C (en) | 1994-06-22 | 2001-03-27 | Andreas Mandelis | Non-contact photothermal method for measuring thermal diffusivity and electronic defect properties of solids |
DE10013172C2 (de) | 2000-03-17 | 2002-05-16 | Wagner Internat Ag Altstaetten | Verfahren und Vorrichtung zur photothermischen Analyse einer Materialschicht, insbesondere zur Schichtdickenmessung |
US20020011852A1 (en) | 2000-03-21 | 2002-01-31 | Andreas Mandelis | Non-contact photothermal radiometric metrologies and instrumentation for characterization of semiconductor wafers, devices and non electronic materials |
WO2002054046A1 (fr) | 2000-12-28 | 2002-07-11 | Dmitri Olegovich Lapotko | Procede et dispositif d'examen phototermique d'irregularites microscopique |
US20020094580A1 (en) | 2001-01-16 | 2002-07-18 | Jorgenson James W. | Photothermal absorbance detection apparatus and method of using same |
US6917039B2 (en) | 2002-02-13 | 2005-07-12 | Therma-Wave, Inc. | Method and system for combined photothermal modulated reflectance and photothermal IR radiometric system |
US6965434B2 (en) | 2002-09-13 | 2005-11-15 | Centre National De La Recherche Scientifiques (C.N.R.S.) | Method and device for photothermal imaging tiny metal particles immersed in a given medium |
US6756591B1 (en) | 2003-03-14 | 2004-06-29 | Centre National De La Recherche | Method and device for photothermal imaging tiny particles immersed in a given medium |
US7075058B2 (en) | 2003-03-28 | 2006-07-11 | The United States Of America As Represented By The United States Department Of Energy | Photothermal imaging scanning microscopy |
AR070418A1 (es) * | 2009-02-12 | 2010-04-07 | Consejo Nac Invest Cient Tec | Metodo y aparato para determinar la dilatacion de un material mediante un dispositivo sensor de error de foco |
-
2011
- 2011-06-17 AR ARP110102121 patent/AR088019A1/es not_active Application Discontinuation
-
2012
- 2012-06-15 WO PCT/IB2012/053043 patent/WO2012172524A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2012172524A1 (en) | 2012-12-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG | Grant, registration | ||
FD | Application declared void or lapsed, e.g., due to non-payment of fee |