AR007778A1 - Conjunta de m x n espejos accionados de pelicula delgada y metodo para la fabricacion del mismo - Google Patents

Conjunta de m x n espejos accionados de pelicula delgada y metodo para la fabricacion del mismo

Info

Publication number
AR007778A1
AR007778A1 ARP970102296A ARP970102296A AR007778A1 AR 007778 A1 AR007778 A1 AR 007778A1 AR P970102296 A ARP970102296 A AR P970102296A AR P970102296 A ARP970102296 A AR P970102296A AR 007778 A1 AR007778 A1 AR 007778A1
Authority
AR
Argentina
Prior art keywords
thin film
same
manufacture
film driven
driven mirrors
Prior art date
Application number
ARP970102296A
Other languages
English (en)
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1019960018392A external-priority patent/KR100220585B1/ko
Priority claimed from KR1019960018393A external-priority patent/KR100243859B1/ko
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of AR007778A1 publication Critical patent/AR007778A1/es

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00Details of television systems
    • H04N5/74Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7416Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
    • H04N5/7458Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mirrors, Picture Frames, Photograph Stands, And Related Fastening Devices (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

Un conjunto de M x N espejos accionados de película delgada y método para la fabricación del mismo, donde el conjunto incluye una matriz activa y unconjunto de M x N estructuras accionadoras. Cada una de las estructuras accionadoras incluyeun primer electrodo de película delgada, un miembroelectromovible de película delgada, un segundo electrodo de película delgada, un miembro elástico, un conducto y un miembro elástico. En el conjunto, elmiembro aislante está hecho de un material aislante, por ejemplo óxido o nitruro, y está formado entre la parte superior del conducto y el fondo delprimer electrodo de película delgada, de manera de reducir la posibilidad de un contacto eléctrico formado entre el primer y el segundoelectrodos depelícula delgada.
ARP970102296A 1996-05-29 1997-05-29 Conjunta de m x n espejos accionados de pelicula delgada y metodo para la fabricacion del mismo AR007778A1 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019960018392A KR100220585B1 (ko) 1996-05-29 1996-05-29 광로 조절 장치의 제조 방법
KR1019960018393A KR100243859B1 (ko) 1996-05-29 1996-05-29 광로 조절 장치의 제조 방법

Publications (1)

Publication Number Publication Date
AR007778A1 true AR007778A1 (es) 1999-11-24

Family

ID=26631868

Family Applications (1)

Application Number Title Priority Date Filing Date
ARP970102296A AR007778A1 (es) 1996-05-29 1997-05-29 Conjunta de m x n espejos accionados de pelicula delgada y metodo para la fabricacion del mismo

Country Status (8)

Country Link
US (1) US5930025A (es)
JP (1) JP3881697B2 (es)
CN (1) CN1220067A (es)
AR (1) AR007778A1 (es)
AU (1) AU716242B2 (es)
DE (1) DE69706762T2 (es)
ID (1) ID16958A (es)
WO (1) WO1997046025A1 (es)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2176111A1 (en) * 1993-11-09 1995-05-18 Jeong Beom Ji Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
PE18996A1 (es) * 1994-03-09 1996-08-11 Daewoo Electronics Co Ltd Disposicion de espejos compuestos por peliculas delgadas accionadas para uso en un conjunto de proyeccion optica y metodo para fabricar la misma
KR100213281B1 (ko) * 1994-10-31 1999-08-02 전주범 광로조절장치
KR0149215B1 (ko) * 1994-11-11 1998-10-15 배순훈 픽셀 구동 회로
KR960018646A (ko) * 1994-11-14 1996-06-17 배순훈 광로조절장치의 제조방법
US5808782A (en) * 1995-07-31 1998-09-15 Daewoo Electronics, Co., Ltd. Thin film actuated mirror array having spacing member
FR2770905A1 (fr) * 1997-11-10 1999-05-14 France Marcelle Pauline Engels Appareil de mesure pour le thermodiagnostic differentiel a usage humain ou veterinaire

Also Published As

Publication number Publication date
AU716242B2 (en) 2000-02-24
JP3881697B2 (ja) 2007-02-14
JP2000511294A (ja) 2000-08-29
AU2793597A (en) 1998-01-05
ID16958A (id) 1997-11-27
DE69706762D1 (de) 2001-10-25
DE69706762T2 (de) 2002-07-04
CN1220067A (zh) 1999-06-16
US5930025A (en) 1999-07-27
WO1997046025A1 (en) 1997-12-04

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