AR007778A1 - Conjunta de m x n espejos accionados de pelicula delgada y metodo para la fabricacion del mismo - Google Patents
Conjunta de m x n espejos accionados de pelicula delgada y metodo para la fabricacion del mismoInfo
- Publication number
- AR007778A1 AR007778A1 ARP970102296A ARP970102296A AR007778A1 AR 007778 A1 AR007778 A1 AR 007778A1 AR P970102296 A ARP970102296 A AR P970102296A AR P970102296 A ARP970102296 A AR P970102296A AR 007778 A1 AR007778 A1 AR 007778A1
- Authority
- AR
- Argentina
- Prior art keywords
- thin film
- same
- manufacture
- film driven
- driven mirrors
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title abstract 7
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 239000011810 insulating material Substances 0.000 abstract 1
- 239000011159 matrix material Substances 0.000 abstract 1
- 150000004767 nitrides Chemical class 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N5/00—Details of television systems
- H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
- H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
- H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Elements Other Than Lenses (AREA)
- Mirrors, Picture Frames, Photograph Stands, And Related Fastening Devices (AREA)
Abstract
Un conjunto de M x N espejos accionados de película delgada y método para la fabricación del mismo, donde el conjunto incluye una matriz activa y unconjunto de M x N estructuras accionadoras. Cada una de las estructuras accionadoras incluyeun primer electrodo de película delgada, un miembroelectromovible de película delgada, un segundo electrodo de película delgada, un miembro elástico, un conducto y un miembro elástico. En el conjunto, elmiembro aislante está hecho de un material aislante, por ejemplo óxido o nitruro, y está formado entre la parte superior del conducto y el fondo delprimer electrodo de película delgada, de manera de reducir la posibilidad de un contacto eléctrico formado entre el primer y el segundoelectrodos depelícula delgada.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960018393A KR100243859B1 (ko) | 1996-05-29 | 1996-05-29 | 광로 조절 장치의 제조 방법 |
| KR1019960018392A KR100220585B1 (ko) | 1996-05-29 | 1996-05-29 | 광로 조절 장치의 제조 방법 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AR007778A1 true AR007778A1 (es) | 1999-11-24 |
Family
ID=26631868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ARP970102296A AR007778A1 (es) | 1996-05-29 | 1997-05-29 | Conjunta de m x n espejos accionados de pelicula delgada y metodo para la fabricacion del mismo |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US5930025A (es) |
| JP (1) | JP3881697B2 (es) |
| CN (1) | CN1220067A (es) |
| AR (1) | AR007778A1 (es) |
| AU (1) | AU716242B2 (es) |
| DE (1) | DE69706762T2 (es) |
| ID (1) | ID16958A (es) |
| WO (1) | WO1997046025A1 (es) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6969635B2 (en) * | 2000-12-07 | 2005-11-29 | Reflectivity, Inc. | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1047903C (zh) * | 1993-11-09 | 1999-12-29 | 大宇电子株式会社 | 用于一光学投影系统中的薄膜致动反射镜阵列及其制造方法 |
| PE18996A1 (es) * | 1994-03-09 | 1996-08-11 | Daewoo Electronics Co Ltd | Disposicion de espejos compuestos por peliculas delgadas accionadas para uso en un conjunto de proyeccion optica y metodo para fabricar la misma |
| KR100213281B1 (ko) * | 1994-10-31 | 1999-08-02 | 전주범 | 광로조절장치 |
| KR0149215B1 (ko) * | 1994-11-11 | 1998-10-15 | 배순훈 | 픽셀 구동 회로 |
| KR960018646A (ko) * | 1994-11-14 | 1996-06-17 | 배순훈 | 광로조절장치의 제조방법 |
| US5808782A (en) * | 1995-07-31 | 1998-09-15 | Daewoo Electronics, Co., Ltd. | Thin film actuated mirror array having spacing member |
| FR2770905A1 (fr) * | 1997-11-10 | 1999-05-14 | France Marcelle Pauline Engels | Appareil de mesure pour le thermodiagnostic differentiel a usage humain ou veterinaire |
-
1997
- 1997-05-19 US US08/858,885 patent/US5930025A/en not_active Expired - Fee Related
- 1997-05-20 JP JP54206197A patent/JP3881697B2/ja not_active Expired - Fee Related
- 1997-05-20 CN CN97195061A patent/CN1220067A/zh active Pending
- 1997-05-20 AU AU27935/97A patent/AU716242B2/en not_active Ceased
- 1997-05-20 DE DE69706762T patent/DE69706762T2/de not_active Expired - Fee Related
- 1997-05-20 WO PCT/KR1997/000089 patent/WO1997046025A1/en active Search and Examination
- 1997-05-23 ID IDP971711A patent/ID16958A/id unknown
- 1997-05-29 AR ARP970102296A patent/AR007778A1/es unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO1997046025A1 (en) | 1997-12-04 |
| JP2000511294A (ja) | 2000-08-29 |
| ID16958A (id) | 1997-11-27 |
| JP3881697B2 (ja) | 2007-02-14 |
| AU2793597A (en) | 1998-01-05 |
| DE69706762D1 (de) | 2001-10-25 |
| US5930025A (en) | 1999-07-27 |
| DE69706762T2 (de) | 2002-07-04 |
| CN1220067A (zh) | 1999-06-16 |
| AU716242B2 (en) | 2000-02-24 |
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