ID16958A - Barisan cermin-cermin yang digerakan lapisan tipis dan metode pembuatannya - Google Patents

Barisan cermin-cermin yang digerakan lapisan tipis dan metode pembuatannya

Info

Publication number
ID16958A
ID16958A IDP971711A ID971711A ID16958A ID 16958 A ID16958 A ID 16958A ID P971711 A IDP971711 A ID P971711A ID 971711 A ID971711 A ID 971711A ID 16958 A ID16958 A ID 16958A
Authority
ID
Indonesia
Prior art keywords
lines
production method
thin layers
mirrors moved
mirrors
Prior art date
Application number
IDP971711A
Other languages
English (en)
Inventor
Yong-Ki Min
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1019960018393A external-priority patent/KR100243859B1/ko
Priority claimed from KR1019960018392A external-priority patent/KR100220585B1/ko
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of ID16958A publication Critical patent/ID16958A/id

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
    • H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mirrors, Picture Frames, Photograph Stands, And Related Fastening Devices (AREA)
IDP971711A 1996-05-29 1997-05-23 Barisan cermin-cermin yang digerakan lapisan tipis dan metode pembuatannya ID16958A (id)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019960018393A KR100243859B1 (ko) 1996-05-29 1996-05-29 광로 조절 장치의 제조 방법
KR1019960018392A KR100220585B1 (ko) 1996-05-29 1996-05-29 광로 조절 장치의 제조 방법

Publications (1)

Publication Number Publication Date
ID16958A true ID16958A (id) 1997-11-27

Family

ID=26631868

Family Applications (1)

Application Number Title Priority Date Filing Date
IDP971711A ID16958A (id) 1996-05-29 1997-05-23 Barisan cermin-cermin yang digerakan lapisan tipis dan metode pembuatannya

Country Status (8)

Country Link
US (1) US5930025A (id)
JP (1) JP3881697B2 (id)
CN (1) CN1220067A (id)
AR (1) AR007778A1 (id)
AU (1) AU716242B2 (id)
DE (1) DE69706762T2 (id)
ID (1) ID16958A (id)
WO (1) WO1997046025A1 (id)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ290728B6 (cs) * 1993-11-09 2002-10-16 Daewoo Electronics Co., Ltd. Pole tenkofilmových řízených zrcadel a způsob jeho přípravy
PE18996A1 (es) * 1994-03-09 1996-08-11 Daewoo Electronics Co Ltd Disposicion de espejos compuestos por peliculas delgadas accionadas para uso en un conjunto de proyeccion optica y metodo para fabricar la misma
KR100213281B1 (ko) * 1994-10-31 1999-08-02 전주범 광로조절장치
KR0149215B1 (ko) * 1994-11-11 1998-10-15 배순훈 픽셀 구동 회로
KR960018646A (ko) * 1994-11-14 1996-06-17 배순훈 광로조절장치의 제조방법
US5808782A (en) * 1995-07-31 1998-09-15 Daewoo Electronics, Co., Ltd. Thin film actuated mirror array having spacing member
FR2770905A1 (fr) * 1997-11-10 1999-05-14 France Marcelle Pauline Engels Appareil de mesure pour le thermodiagnostic differentiel a usage humain ou veterinaire

Also Published As

Publication number Publication date
JP2000511294A (ja) 2000-08-29
WO1997046025A1 (en) 1997-12-04
AR007778A1 (es) 1999-11-24
CN1220067A (zh) 1999-06-16
US5930025A (en) 1999-07-27
JP3881697B2 (ja) 2007-02-14
DE69706762D1 (de) 2001-10-25
AU2793597A (en) 1998-01-05
AU716242B2 (en) 2000-02-24
DE69706762T2 (de) 2002-07-04

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