1317253 (1) 九、發明說明 【發明所屬之技術領域】 本發明係關於將與貼合基板相稱之大小的薄片狀薄膜 黏貼於基板之薄膜黏貼方法及該裝置° 【先前技術】 於液晶顯示器或電漿顯示器等之製造工程中，藉由將 i 倂同具有：明暗對比或顏色再現性之提升、從面板所放射 之電磁波或紅外線的截斷、周邊影像對畫面之映入防止、 面板的破壞防止等各種功能的功能性薄膜（以下，略記爲 薄膜）黏貼於黏貼有2片的玻璃板之狀態的液晶顯示面板 ' 或電漿顯示面板等（以下，略記爲基板）的表面，來實現 良好之畫像品質。 於薄膜之黏貼上，係使用：使基板的顯示面朝上，由 基板的上方供給作成與貼合基板相稱之大小的薄片狀薄膜 1 而予以黏貼之薄膜黏貼裝置。 於薄膜塗佈有黏著材，使用前爲了防止異物附著，或 防止黏著材的變形，或可以將薄膜彼此予以重疊，係以保 護薄膜來覆蓋黏著材表面。 此種薄膜，係使黏著材保護薄膜朝上而設置（裝著） 於吸附保持工作台，在黏貼前將黏著材保護薄膜予以剝離 ，使吸附保持工作台反轉，於薄膜的黏著材露出之狀態下 而配置於基板上方。 薄膜係爲了使黏貼之一端接近基板而使傾斜，以壓著 -5- (2) 1317253 輕輪予以按壓’進行前端黏貼，藉由使薄膜朝拉出薄膜之 方向移動來進行黏貼。 此時’薄膜在以壓著輥輪而依序被黏貼前，爲了不使 落於基板上面’以被吸附保持於吸附保持工作台面之狀態 而滑過吸附保持工作台面。 作爲表示此種技術者，有記載於日本專利特開2003-27609 1號公報者。 【發明內容】 爲了將薄膜黏貼於基板，需要保持薄膜，在黏著材面 " 向下之情形時，無法支持黏著面，需要藉由吸附構件來吸 • 附保持薄膜上面。 薄膜之黏貼係藉由壓著輥輪來夾入所被保持之薄膜與 基板，藉由壓著輥輪旋轉來進行黏貼，薄膜需要吸附保持 與在吸附保持狀態滑過吸附構件面。 • 吸附構件的薄膜吸附保持如使用高真空時，吸附保持 力雖可確保，但是，滑過吸附構件面時的阻力大，會使薄 . 膜表面產生擦傷。另一方面，於薄膜的吸附保持如使用低 . 真空時，阻力減少，薄膜表面的擦傷雖可減輕，但是，基 於薄膜的吸附保持力降低，薄膜若落下基板表面的危險性 變高。 另外，薄膜的黏貼一被開始時，藉由移動吸附構件面 ，隨著接近黏貼結束，吸附面積減少，薄膜從吸附構件面 剝離，有落下基板表面之情形。而且，薄膜一落下，與基 -6- (3) 1317253 板接觸，於薄膜與基板之間會有氣泡混入之問題。 進而，藉由薄膜與吸附構件摩擦，產生微小之磨耗粉 ，落下基板表面，而殘留於薄膜與基板之間。在此情形時 ，基於磨耗粉與周圍所產生的氣泡，導致透過之光的遮光 或散射，無法獲得所期望之畫像品質，而成爲畫像品質降 低或良率降低的原因。 因此，基於這些問題，需要薄膜的吸附保持力之微妙 且複雜的控制，要有效率地、於良好狀態下黏貼薄膜，有 其困難。 因此，本發明之目的，在於提供：於薄膜的黏貼上， 即使不需要吸附保持力的微妙且複雜的控制，薄膜也不會 落於基板上，能簡便且確實地將薄膜黏貼於基板之薄膜黏 貼方法及該裝置。 另外，本發明之其他目的在於提供：於薄膜之黏貼上 ，不會產生微小之磨耗粉，落下基板表面，良率不會降低 之薄膜黏貼方法及該裝置。 爲了達成前述目的之本發明薄膜黏貼方法，係將設置 於作成與基板相稱的大小的薄片狀薄膜的黏著面之保護薄 膜予以剝離，而將該薄膜黏貼於該基板之薄膜黏貼方法’ 其特徵爲：於水平保持之基板的上方’以對應該薄膜的一 邊前端部的前端吸附板，及對應該一邊前端部以外的該薄 膜的區域之吸附板，於與該保護薄膜相反面側吸附保持該 薄膜，於該吸附板與保持於該前端吸附板的該薄膜之該保 護薄膜黏貼與該薄膜的一邊前端部正交配置的黏著膠帶’ -7- (4) 1317253 以在該薄膜的一邊前端部反向前進之方式使該 動，將該薄膜的一邊前端部側中之該保護薄膜 離，解除對該前端吸附板的該薄膜之一邊前端 持’而使該前端吸附板從該薄膜的一邊前端部 應水平保持之基板的該薄膜的一邊前端部之處 離該保護薄膜的前端部之該薄膜的一邊前端部 輪來加壓該處所，解除藉由該吸附板之該薄膜 ，一面與該黏著膠帶的移動反向前進，對該基 薄膜，並且剝離該保護薄膜，一面以該薄膜的 爲前端使該基板水平移動，剝離該保護薄膜， 黏貼於該基板。 另外，達成前述目的之本發明薄膜黏貼裝 置於作成與基板相稱的大小的薄片狀薄膜的黏 薄膜予以剝離，而將該薄膜黏貼於該基板之薄 ，其特徵爲具備：基板保持移動機構，係將基 平，以該基板的一邊側爲前端使其移動、及前 吸附板，係於該基板保持移動機構的上方，於 膜相反面側將該薄膜對應該基板的一邊側之該 前端部與該一邊前端部以外的該薄膜的區域分 保持、及吸附板傾斜機構，係使該前端吸附板 傾斜，使該前端吸附板接近該基板的一邊側、 ，係以與該薄膜的一邊前端部正交之方式，而 由該吸附板傾斜機構而傾斜的該薄膜之該保護 著膠帶移動機構，係使該黏著膠帶移動至該薄 黏著膠帶移 的前端部剝 部之吸附保 脫離，於對 所配合已剝 ，以壓著輥 的吸附保持 板上供給該 一邊前端側 而將該薄膜 置，係將設 著面之保護 膜黏貼裝置 板保持爲水 端吸附保與 與該保護薄 薄膜的一邊 別予以吸附 與該吸附板 及黏著膠帶 被配置於藉 薄膜、及黏 膜的一邊前 -8- (5) 1317253 端部側，使黏著於該保護薄膜，而且於該薄膜的一邊前端 部側反向前進，使該保護薄膜由該薄膜的一邊前端部側剝 離、及前端吸附板解除脫離手段，係於該黏著膠帶從該薄 膜的一邊前端部側剝離該保護薄膜之狀態下，解除藉由該 前端吸附板之該薄膜的吸附保持，使由該薄膜的一邊前端 部脫離、及吸附板解除手段，係於該黏著膠帶將該保護薄 膜由該薄膜的一邊前端部側剝離之狀態下，解除藉由該吸 附板之該薄膜的吸附保持、及加壓機構，係於該前端吸附 板由該薄膜的一邊前端部脫離之狀態下，將該薄膜的一邊 前端部配合對應水平保持之基板的該薄膜之一邊前端部之 處所’以壓著輥輪加壓該配合之處所；與藉由該黏著膠帶 移動機構之該黏著膠帶的移動反向前進，對該基板上供給 該薄膜’而且，一面將該保護薄膜予以剝離，一面藉由該 基板保持移動機構，以該薄膜的一邊前端部側爲前端使該 基板水平移動，來將該保護薄膜予以剝離，藉由該加壓機 構，以壓著輥輪將該薄膜加壓黏貼於該基板。 依據本發明，於將薄膜黏貼於基板之情形時，將薄膜 之保持由吸附板移往黏著膠帶，黏著膠帶對基板搬運薄膜 ’不會有薄膜在吸附保持構件面摩擦而磨耗粉掉落，於磨 耗粉的周圍產生氣泡，不單可以高良率地將薄膜黏貼於基 板’也不需要吸附板中之吸附保持力的微妙且複雜之控制 ’能夠簡便而確實地將薄膜黏貼於基板。 【實施方式】 -9- (6) 1317253 以下’參照第1圖〜第9圖詳細說明本發明之一實施 形態。另外’在全部圖面中，對同一物體賦予相同引用符 號。 第1圖係適用本發明所構成之光學薄膜黏貼裝置的重 要部位槪略圖。 光學薄膜黏貼裝置係將光學薄膜（薄膜）1黏貼於顯 示面板（基板）2的畫像顯示面之裝置，大略分別時，係 由：面板移動機構（基板保持移動機構）、及包含：吸附 板與前端吸附板及吸附板傾斜機構與前端吸附板解除脫離 手段與吸附板解除手段之光學薄膜吸附搬運機構、及包含 :黏著膠帶及黏著膠帶移動機構之黏著材保護薄膜剝離機 構、及包含：壓著輥輪與加壓機構之加壓輥輪機構等所構 成。以下，依序說明各部的構成。 此處，光學薄膜黏貼裝置係對顯示面板2的種類或構 造、厚度並無特別限定者，例如可以使用於顯示PDP (電 漿顯示器）中之畫像的PDP顯示面板或與顯示面板獨立之 薄膜用單板玻璃基板或LCD (液晶顯示器）的顯示面板之 製造。 首先，說明光學薄膜1。光學薄膜1係一倂具有：明 暗對比或顏色再現性的提升、從面板所放射之電磁波或近 紅外線遮斷、周邊影像對畫面之映入防止、面板的破損防 止等之各種功能。 此種顯示面板2係如第2圖所示般，藉由：反射防止 薄膜3、著色薄膜4、電磁波遮斷薄膜5所構成。另外， -10- (7) 1317253 於電磁波遮斷薄膜5面塗佈有黏貼於顯示面板2用之黏著 材6,進而，黏貼有保護黏著材6之保護薄膜7’具備有 相當剛性。各層薄膜3〜5之厚度、材質、組合順序等’ 並無特別限定。 如此構成之光學薄膜1被黏貼於顯示面板2時’係將 保護薄膜7予以玻璃而使黏著材6露出。然後’將光學薄 膜1與顯示面板2予以正確地對位，藉由使黏著材6與顯 示面板2接觸而予以黏貼。 首先，說明面板移動機構（基板保持移動機構）。 面板移動機構係如第1圖所示般，具備：直線導軌底 座8、ΧΥΖ Θ工作台9、輸送帶10所構成。直線導軌底座 8係成爲光學薄膜黏貼裝置之底座者，作成平板狀。於直 線導軌底座8之上設置有第1圖中左右延伸之直線導軌1 2 ，於其上配置有XYZ 0工作台9、輸送帶10。 於配置在XYZ 0工作台9的最下面的支撐板13設置 有伺服電動機14，支撐板13係藉由使設置於伺服電動機 軸之小齒輪15旋轉，介由齒條（未圖示出）可以直線導 軌12上於第1圖中左右移動，能夠正確地使移動後的停 止位置再現。 於支撐板13設置有：第1圖中左右延伸之直線導軌 16與平板17，藉由設置於支撐板13之脈衝電動機（未圖 示出）可使平板17在第1圖中左右微調整移動。另外， 於平板17設置有於與支撐板13的移動方向正交之垂直第 1圖的紙面之方向延伸的直線導軌18，及與其上設置有平 -11 - (8) 1317253 板19，藉由設置於平板17之脈衝電動機（未圖不出）而 可以使平板19於與支撐板13的移動方向正交之垂直第1 圖的紙面之方向微調整移動。 進而，於平板19設置有旋轉軸承20與平板21，藉由 設置於平板19之脈衝電動機（未圖示出）可使平板21在 水平狀態於旋轉方向微調整移動。 於平板21設置有：使平板22昇降移動之昇降機構與 第1圖中左右延伸之直線導軌23。 昇降機構係由：與直線導軌23連接之平板24、及設 置於平板24之昇降導軌25、及追從設置於平板22之昇降 導軌25之凸輪從動件26，以及移動設置於平板21之平板 24之氣缸27所構成。 藉由氣缸27使平板24移動時，設置於平板24之昇 降導軌25也移動。此時，設置於平板22之凸輪從動件26 藉由昇降導軌25之傾斜而於第1圖之上下方向移動，平 板22係在被直線導軌23導引之狀態下可以昇降移動。 於平板22係設置有將用以固定裝著顯示面板2之面 板固定具11搬運於垂直於第1圖的紙面之方向的輸送帶 1〇。輸送帶10係以搬運輥輪28來接受固定裝著顯示面板 2之面板搬運具11，移動至特定位置後，可以藉由固定機 構（未圖示出）而從四方向固定面板搬運具11。 面板搬運具11於上面側裝著顯示面板2時，爲了於 顯示面板2的背面側也可在裝著有面板顯示用印刷基板等 之狀態下進行裝著，於沒有安裝面板顯示用印刷基板之位 -12- (9) 1317253 置設置有面板支撐構件。另外，設置於面板搬運具11之 定位導軌29係可以裝卸地設置於所期望之位置。 藉由如此地構成定位導軌29，可以對應種種形狀 '大 小的顯示面板2，本光學薄膜黏貼裝置之適用自由度變大 〇 另外，在以搬運輥輪28接受固定裝著顯示面板2之 面板搬運具1 1之第1圖的右側位置將顯示面板2移動至 黏貼光學薄膜1之第1圖的左側位置之中途，具備清掃面 板背面之面板清潔器75，前述昇降機構係利用於使顯示面 板2接近面板清潔器75，顯示面板2 —通過面板清潔器 75後，使顯示面板2下降而回到原來的位置。 面板清潔器75係旋轉刷方式，第1圖中，刷子的旋 轉方向係對顯示面板2從右往左進行而成爲反方向的反時 鐘旋轉，藉此，可以刮除顯示面板2表面的粉麈或磨耗粉 ’能以連接於面板清潔器75之集塵器來吸引去除。 此處所使用的旋轉刷係在顯示面板2表面擦過，藉由 選擇導電性的材質，可以防止顯示面板2帶電。面板清潔 器並不特別限定爲旋轉刷方式，可以考慮顯示面板2表面 的粉塵之大小、附著狀態而選擇任意的方式。例如可以選 擇黏著輥輪方式或超音波乾式清潔方式。 接著，說明光學薄膜吸附搬運機構。 光學薄膜吸附搬運機構係如第1圖所示般，被配置於 前述之面板移動機構的左側之上部。 光學薄膜吸附搬運機構係如第3(a)圖所示般，具備 -13- (10) 1317253 :直線導軌基座30、吸附板支撐構件32、吸附板33所構 成。直線導軌基座30係成爲光學薄膜黏貼裝置之上部基 座板。於直線導軌基座30的下方設置有直線導軌31，以 被吊於直線導軌31之形式而介由吸附板支撐構件32配置 有吸附板3 3。 直線導軌31係以在垂直於與面板搬運機構的左右移 動方向正交的第3圖之紙面的方向延伸之方式而設置有2 列，以吊於此直線導軌3 1之形式而設置有平板3 5。於平 板35安裝有由直線導軌基座30所支撐之滾珠導螺桿37 的滾珠導螺桿螺帽38。藉此，藉由安裝於滾珠導螺桿37 之伺服電動機（未圖示出）之旋轉，平板35沿著直線導 軌31可以在垂直於第3圖的紙面之方向移動，能夠正確 地再現移動後的停止位置。 介由設置於與直線導軌31正交之第3圖的左右方向 之直線導軌36，於平板35設置有吸附板支撐構件32，介 由設置於平板35之氣缸39的作用，可以在與直線導軌31 正交的第3圖之左右方向移動。 於吸附板支撐構件32設置有可以自由地旋轉之昇降 氣缸40、41，於昇降氣缸40、41的軸設置有可以自由旋 轉之吸附板33，昇降氣缸40、41係構成使吸附板33如第 3 ( a )圖般昇降、如第3 ( b )圖般可以傾斜之吸附板傾斜 機構。 吸附板3 3的一端係介由具備開關閥之吸引配管等而 連接於光學薄膜吸附固定用之送風機（未圖示出），於吸 -14- (11) (11)1317253 附板33的內部設置有吸引構造’通過以朝下貫穿吸附板 33之方式所設置的吸引孔’可以將載置於光學薄膜工作台 42上之光學薄膜1予以吸附保持而固定。 另外，關於光學薄膜工作台42之設置位置’以後敘 述。另外，吸附板3 3的大小並無特別限定’介由將因應 適合之大小的吸引孔予以區域分割，藉由選擇區域’能以 相同吸附板來適合複數的光學薄膜尺寸。 於吸附板33上，介由旋轉軸45而於光學薄膜1的黏 貼前端（薄膜之一邊前端部）設置有前端吸附板34。前端 吸附板34係具有與吸附板3 3相同的吸附保持功能，在吸 附保持載置於光學薄膜工作台42上之光學薄膜1時，被 定位於與吸附板3 3成爲同一面之位置，藉由前端吸附板 34以吸引來吸附保持光學薄膜丨的前端部側，藉由吸附板 3 3以吸引來吸附保持光學薄膜丨的前端部以外之區域。 另外’如之後敘述般，所被吸附保持之黏貼於光學薄 膜1的保護薄膜剝離後’於藉由壓著輥輪46 (參照第1圖 )來將光學薄膜1的前端黏貼於顯示面板2時，爲了確保 壓著輥輪46的按壓空間，如第3 ( c )圖所示般，前端吸 附板3 4係藉由關閉設置於吸引配管的中途之開關閥等來 解除藉由光學薄膜吸附固定用之送風機的吸附保持，藉由 m紅（未圖示出）以旋轉軸45爲中心旋轉退避，成爲可 以從光學薄膜1脫離，來構成前端吸附板解除脫離手段。 黏者薄片（黏著構件）43係與前端吸附板34同一面 地被埋入於前端吸附板34的光學薄膜丨吸附面。藉此， -15- (12) 1317253 於黏貼在後述之光學薄膜1的保護薄膜7的前端剝離時’ 光學薄膜1與黏著薄片43被按壓，可以防止光學薄膜1 由前端吸附板3 4的吸附面剝離’即保護薄膜7的剝離失 敗。 進而，於前端吸附板前端吸附板3 4設置有：吸附保 持光學薄膜1之狀態下，辨識設置於光學薄膜1之定位標 記（未圖示出）之CCD相機47 (參照第1圖）用對位標 記辨識孔44。藉此，可以辨識吸附板33與被前端吸附板 34所吸附之狀態的光學薄膜1的位置’藉由以前述面板移 動機構的XYZ 0工作台9來對整顯示面板2做位置調整’ 可以高精度地將光學薄膜1黏貼於所期望位置。 吸附板33係具備：可以解除藉由未圖示出之光學薄 膜吸附固定用之送風機所致之光學薄膜1的吸附保持之吸 附板解除手段。 接著，依據第4 ( a )圖，針對黏著材保護薄膜剝離機 構來說明進行光學薄膜1中之保護薄膜7的剝離之黏著膠 帶55與該黏著膠帶移動機構。 黏著材保護薄膜剝離機構係具備：與第1圖所示之面 板移動機構中之第1圖之左右延伸的直線導軌12平行的 第4(a)圖之左右延伸的直線導軌基座48、及膠帶捲出 捲取部5 0、以及光學薄膜承受部51所構成。直線導軌基 座48係成爲支撐黏著材保護薄膜剝離機構之基座板者。 於直線導軌基座48之上設置有第4(a)圖中左右延 伸之直線導軌49，於其上配置有膠帶捲出捲取部50及光 -16- (13) 1317253 學薄膜承受部51。 於直線導軌基座48設置有氣缸52，藉由氣丨 帶捲出捲取部5 0可以移動至傾斜的吸附板3 3與 附板34所吸附保持之光學薄膜1的附近。而且 帶5 5的一部份係具有保有使吸附板3 3及由前端 所吸附保持之光學薄膜1的傾斜角一致之傾斜角f 於膠帶捲出捲取部50設置有複數膠帶捲出_ 以於各膠帶捲出軸53安裝黏著膠帶55。另外， 帶捲出軸53的端部賦予張力，使膠帶拉出時不 ’於各膠帶捲出軸53設置有轉矩電動機56。 膠帶之捲取係藉由設置有捲取軸54，將由 5 5所被剝離之保護薄膜7黏貼於黏著膠帶5 5之 捲取。爲了控制此時之捲取速度與捲取量，設置 取軸徑之感測器57與伺服電動機58。 黏著膠帶55係與直線導軌49的延伸方向平 各膠帶捲出軸53捲出，朝光學薄膜丨的黏貼前 的一邊前端部）方向前進，於第4(b)圖所示之 輥輪59中’路徑折返，成爲反方向，反向前進 54所捲取。 黏著膠帶55的設置數目爲3，配合對光學薄 示面板2的寬度尺寸或黏著膠帶55的保護薄膜 力，可以設置適當之數目。 爲了合適地剝離保護薄膜7，以光學薄膜1 板2的寬度尺寸中央爲基準，以在其左右均等的 & 52，膠 由前端吸 ，黏著膠 吸附板3 4 β路徑。 油53，可 爲了於膠 產生鬆弛 黏著膠帶 狀態予以 有計測捲 行地被從 端（薄膜 前端剝離 被捲取軸 膜1或顯 7之接著 或顯示面 間隔來配 -17- (14) (14)1317253 (1) EMBODIMENT OF THE INVENTION [Technical Field] The present invention relates to a film bonding method for adhering a flaky film of a size commensurate with a bonded substrate to a substrate, and the device. [Prior Art] On a liquid crystal display or In the manufacturing process of plasma display, etc., by the combination of the brightness and darkness, the improvement of the color reproducibility, the interception of electromagnetic waves or infrared rays emitted from the panel, the reflection of the surrounding image on the screen, and the prevention of damage to the panel A functional film (hereinafter, abbreviated as a film) of various functions is adhered to the surface of a liquid crystal display panel or a plasma display panel (hereinafter, abbreviated as a substrate) in a state in which two glass plates are adhered, thereby achieving good results. Portrait quality. For the adhesion of the film, a film-adhesive device in which the display surface of the substrate is faced upward and a sheet-like film 1 having a size commensurate with the bonded substrate is supplied from the upper side of the substrate is attached. The film is coated with an adhesive material, and before use, in order to prevent foreign matter from adhering, or to prevent deformation of the adhesive material, or to overlap the films, the protective film is applied to cover the surface of the adhesive. The film is provided with the adhesive protection film facing upwards (mounted) on the adsorption holding table, and the adhesive protection film is peeled off before the adhesion, so that the adsorption holding table is reversed, and the adhesive material of the film is exposed. In the state, it is placed above the substrate. The film is adhered in such a manner that one end of the adhesive is brought close to the substrate, and pressed by a -5-(2) 1317253 light wheel to perform end-end adhesion, and the film is adhered by moving the film in the direction in which the film is pulled out. At this time, the film is slid over the adsorption holding table surface in order to prevent it from being adsorbed and held on the upper surface of the substrate before being adhered to the substrate by the pressing roller. As a person who has shown such a technique, it is described in Japanese Patent Laid-Open No. 2003-27609. SUMMARY OF THE INVENTION In order to adhere a film to a substrate, it is necessary to maintain the film. When the surface of the adhesive material is down, the adhesive surface cannot be supported, and the upper surface of the film needs to be absorbed by the adsorption member. The film is adhered by holding the film and the substrate held by the roller, and is adhered by the rotation of the roller, and the film needs to be adsorbed and held and slid over the surface of the adsorption member in the adsorption holding state. • When the film is adsorbed and held by the adsorption member, the adsorption holding force can be ensured. However, the resistance when sliding over the surface of the adsorption member is large, and the film surface is scratched. On the other hand, the adsorption of the film is kept as low as used. When the vacuum is applied, the resistance is reduced, and the scratch on the surface of the film can be alleviated. However, the adsorption holding force based on the film is lowered, and the risk of the film falling on the surface of the substrate becomes high. Further, when the adhesion of the film is started, by moving the surface of the adsorption member, as the adhesion is completed, the adsorption area is reduced, and the film is peeled off from the surface of the adsorption member, and the surface of the substrate is dropped. Further, as soon as the film is dropped, it is in contact with the base -6-(3) 1317253 plate, and there is a problem that air bubbles are mixed between the film and the substrate. Further, by rubbing the film with the adsorbing member, minute abrasion powder is generated, which falls on the surface of the substrate and remains between the film and the substrate. In this case, the abrasion of the transmitted light and the scattering of the light generated by the abrasion powder and the surroundings cause the desired image quality to be obtained, which causes the image quality to be lowered or the yield to be lowered. Therefore, based on these problems, it is necessary to control the subtle and complicated control of the adsorption holding force of the film, and it is difficult to adhere the film efficiently and in a good condition. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a film which adheres to a film without adhering to a substrate without the need for subtle and complicated control of the adsorption holding force, and which can be easily and surely adhered to the substrate. Adhesive method and the device. Further, another object of the present invention is to provide a film adhering method and apparatus which do not cause minute abrasion powder on a film to be adhered and which are dropped on the surface of the substrate without a decrease in yield. The film adhering method of the present invention for achieving the above object is a method of peeling a protective film provided on an adhesive surface of a sheet-like film of a size commensurate with a substrate, and adhering the film to the substrate. : above the substrate held horizontally, the adsorption plate on the tip end portion of the film corresponding to the tip end portion of the film, and the adsorption plate in the region corresponding to the film at the tip end portion are adsorbed and held on the side opposite to the protective film. Adhesive tape '-7-(4) 1317253 disposed on the protective film of the film held on the front end adsorption plate and perpendicular to the front end portion of the film to be opposite to the front end portion of the film In the forward direction, the protective film is separated from the front end side of the film, and the front end of the film of the front end suction plate is released, and the front end suction plate is from the front end of the film. The front end portion of the film of the substrate to be horizontally held is pressed from the front end portion of the film at the front end portion of the protective film. When the film of the adsorption plate is released, the movement of the adhesive tape is reversed, and the protective film is peeled off from the base film, and the substrate is horizontally moved at the front end of the film to peel off the protection. The film is adhered to the substrate. Further, the film adhering device of the present invention which achieves the above object is formed by peeling a film of a sheet-like film of a size commensurate with the substrate, and adhering the film to the substrate, and having a substrate holding moving mechanism The base is moved with the one side of the substrate as the front end, and the front suction plate is placed above the substrate holding and moving mechanism, and the front end portion of the film corresponding to the one side of the substrate is formed on the opposite side of the film. The area of the film other than the front end portion and the suction plate tilting mechanism are such that the front end suction plate is inclined so that the front end suction plate approaches the one side of the substrate, and the front end portion of the film is positive. In the manner of the intersection, the film protecting mechanism of the film inclined by the slanting mechanism of the absorbing plate moves the adhesive tape to the detachment of the peeling portion of the front end portion of the thin adhesive tape, and cooperates with After peeling, the film is placed on the adsorption holding plate of the pressure roller, and the film is placed on the front end side of the film. The side of the protective film and the adhesive tape are placed on the side of the front side of the film, and the side of the film is adhered to the side of the film, and the adhesive tape is adhered to the side of the film 8 and the front side of the film. The protective film is reversely advanced on one side of the front end side of the film, and the protective film is peeled off from the one end portion side of the film and the front end suction plate is released from the front end portion of the film from the front end portion of the film. When the protective film is peeled off from the side, the film is removed from the front end of the film by the adsorption and retention of the film, and the suction plate releasing means is attached to the adhesive tape. In a state in which one end of the film is peeled off, the film is sucked and held by the suction plate, and the pressurizing mechanism is released, and the film is peeled off from the front end portion of the film. The front end portion of the substrate is matched with the front end portion of one of the films of the corresponding horizontally held substrate to pressurize the fitting portion by pressing the roller; The movement of the adhesive tape of the tape moving mechanism proceeds in the reverse direction, and the film is supplied onto the substrate. Further, while the protective film is peeled off, the substrate is held by the substrate, and the front end side of the film is the front end side. The protective film is peeled off by horizontally moving the substrate, and the film is pressure-bonded to the substrate by a pressing roller by the pressing mechanism. According to the present invention, when the film is adhered to the substrate, the film is held by the adsorption plate to the adhesive tape, and the adhesive tape is applied to the substrate carrying film, and no film is rubbed against the surface of the adsorption holding member to abrade the powder. Air bubbles are generated around the abrasion powder, and the film can be adhered to the substrate at a high yield without the need for a subtle and complicated control of the adsorption holding force in the adsorption plate. [Embodiment] -9-(6) 1317253 Hereinafter, an embodiment of the present invention will be described in detail with reference to Figs. 1 to 9 . In addition, in the entire drawing, the same object is given the same reference symbol. Fig. 1 is a schematic view showing essential parts of an optical film adhering device to which the present invention is applied. The optical film bonding apparatus is a device for adhering an optical film (film) 1 to an image display surface of a display panel (substrate) 2, and is roughly composed of a panel moving mechanism (substrate holding moving mechanism) and an adsorption plate and An optical film adsorption transport mechanism for removing the front end suction plate and the suction plate tilting mechanism, the front end adsorption plate releasing means and the adsorption plate releasing means, and the adhesive material protective film peeling mechanism including the adhesive tape and the adhesive tape moving mechanism, and including: pressing The roller and the pressure roller mechanism of the pressurizing mechanism are configured. Hereinafter, the configuration of each unit will be described in order. Here, the optical film attaching device is not particularly limited in kind, structure, and thickness of the display panel 2. For example, it can be used for a PDP display panel that displays an image in a PDP (plasma display) or a film separate from the display panel. The manufacture of a single-panel glass substrate or a display panel of an LCD (Liquid Crystal Display). First, the optical film 1 will be described. The optical film 1 has various functions such as improvement in brightness contrast or color reproducibility, electromagnetic wave or near-infrared ray emission from a panel, prevention of reflection of a surrounding image on a screen, and prevention of breakage of a panel. Such a display panel 2 is composed of an antireflection film 3, a colored film 4, and an electromagnetic wave shielding film 5 as shown in Fig. 2 . Further, -10-(7) 1317253 is coated on the surface of the electromagnetic wave shielding film 5 with the adhesive material 6 adhered to the display panel 2, and further, the protective film 7' to which the protective adhesive 6 is adhered is provided with considerable rigidity. The thickness, material, combination order, and the like of the respective film layers 3 to 5 are not particularly limited. When the optical film 1 thus constituted is adhered to the display panel 2, the protective film 7 is made of glass and the adhesive 6 is exposed. Then, the optical film 1 and the display panel 2 are properly aligned, and the adhesive 6 is brought into contact with the display panel 2 to be adhered. First, the panel moving mechanism (substrate holding moving mechanism) will be described. As shown in Fig. 1, the panel moving mechanism includes a linear guide base 8, a weir table 9, and a conveyor belt 10. The linear guide base 8 is a base of an optical film bonding device, and is formed into a flat shape. On the linear guide base 8, a linear guide 1 2 extending left and right in Fig. 1 is disposed, and an XYZ 0 table 9 and a conveyor belt 10 are disposed thereon. A servo motor 14 is disposed on the lowermost support plate 13 disposed on the XYZ 0 table 9. The support plate 13 is rotated by a pinion 15 provided on the servo motor shaft through a rack (not shown). The linear guide 12 is moved left and right in the first drawing, and the stopped position after the movement can be accurately reproduced. The support plate 13 is provided with a linear guide 16 and a flat plate 17 extending left and right in FIG. 1 , and the flat plate 17 can be slightly adjusted to the left and right in FIG. 1 by a pulse motor (not shown) provided on the support plate 13 . . Further, the flat plate 17 is provided with a linear guide 18 extending in a direction perpendicular to the paper surface of the first drawing orthogonal to the moving direction of the support plate 13, and a flat -11 - (8) 1317253 plate 19 is provided thereon. The pulse motor (not shown) provided on the flat plate 17 can slightly adjust the movement of the flat plate 19 in the direction perpendicular to the moving direction of the support plate 13 in the plane of the first drawing. Further, the flat plate 19 is provided with a rotary bearing 20 and a flat plate 21, and the flat plate 21 can be finely adjusted and moved in the horizontal direction by a pulse motor (not shown) provided on the flat plate 19. The flat plate 21 is provided with a lifting mechanism for moving the flat plate 22 up and down and a linear guide 23 extending left and right in the first drawing. The lifting mechanism is composed of a flat plate 24 connected to the linear guide 23, a lifting rail 25 provided on the flat plate 24, a cam follower 26 following the lifting rail 25 provided on the flat plate 22, and a flat plate disposed on the flat plate 21. 24 cylinders 27 are formed. When the flat plate 24 is moved by the air cylinder 27, the lift rail 25 provided on the flat plate 24 also moves. At this time, the cam follower 26 provided on the flat plate 22 is moved downward in the first drawing by the inclination of the elevating rail 25, and the flat plate 22 can be moved up and down while being guided by the linear guide 23. The flat plate 22 is provided with a conveyor belt 1 for transporting the panel fixture 11 on which the display panel 2 is attached in a direction perpendicular to the plane of the paper of Fig. 1. The conveyor belt 10 receives the panel conveyer 11 to which the display panel 2 is fixed by the conveyance roller 28, and after moving to a specific position, the panel conveyance tool 11 can be fixed from four directions by a fixing mechanism (not shown). When the display panel 2 is mounted on the upper side of the panel transporter 11, the back surface side of the display panel 2 may be mounted in a state in which the printed circuit board for panel display is mounted, and the printed circuit board for panel display is not mounted. Bits 12- (9) 1317253 are provided with panel support members. Further, the positioning guide 29 provided on the panel carrier 11 is detachably provided at a desired position. By arranging the positioning guide rails 29 in this manner, it is possible to adapt the degree of freedom of application of the optical film bonding apparatus to the display panel 2 of various shapes and sizes, and to carry out panel transportation in which the display panel 2 is fixedly mounted by the transport roller 28 The right side position of the first figure of FIG. 1 moves the display panel 2 to the left side of the first image of the adhesive optical film 1 and includes a panel cleaner 75 for cleaning the back surface of the panel, and the lifting mechanism is used to make the display panel 2 Approaching the panel cleaner 75, the display panel 2, after passing through the panel cleaner 75, lowers the display panel 2 back to its original position. The panel cleaner 75 is a rotating brush system. In the first drawing, the rotation direction of the brush is reversed from the right to the left of the display panel 2, and the counterclockwise rotation in the opposite direction is performed, whereby the whitefly on the surface of the display panel 2 can be scraped off. Or the abrasion powder 'can be sucked and removed by a dust collector connected to the panel cleaner 75. The rotating brush used here is wiped on the surface of the display panel 2, and by selecting a conductive material, the display panel 2 can be prevented from being charged. The panel cleaner is not particularly limited to the rotary brush method, and any mode may be selected in consideration of the size of the dust on the surface of the display panel 2 and the state of adhesion. For example, an adhesive roller method or an ultrasonic dry cleaning method can be selected. Next, an optical film adsorption transport mechanism will be described. The optical film adsorption transport mechanism is disposed on the upper left side of the panel moving mechanism as shown in Fig. 1 . The optical film adsorption transport mechanism includes -13-(10) 1317253: a linear guide base 30, a suction plate supporting member 32, and an adsorption plate 33 as shown in Fig. 3(a). The linear guide base 30 serves as an upper base plate of the optical film attaching device. A linear guide 31 is provided below the linear guide base 30 to be suspended from the linear guide 31, and an adsorption plate 33 is disposed via the adsorption plate supporting member 32. The linear guide 31 is provided in two rows so as to extend in a direction perpendicular to the paper surface of the third figure orthogonal to the right and left moving direction of the panel transport mechanism, and is provided with the flat plate 3 in the form of the linear guide 31. 5. A ball lead screw nut 38 of the ball lead screw 37 supported by the linear guide base 30 is attached to the flat plate 35. Thereby, by the rotation of the servo motor (not shown) attached to the ball lead screw 37, the flat plate 35 can be moved along the linear guide 31 in the direction perpendicular to the plane of the paper of Fig. 3, and the reproduced state can be correctly reproduced. Stop position. The adsorption plate support member 32 is provided on the flat plate 35 via the linear guide 36 provided in the left-right direction of the third figure orthogonal to the linear guide 31, and can be applied to the linear guide via the cylinder 39 provided on the flat plate 35. 31 Orthogonal 3 moves in the left and right direction. The adsorption plate supporting member 32 is provided with lifting cylinders 40 and 41 which are freely rotatable. The shafts of the lifting cylinders 40 and 41 are provided with a freely rotatable adsorption plate 33, and the lifting cylinders 40 and 41 are configured to make the adsorption plate 33 3 ( a ) A lifting plate tilting mechanism that can be tilted as shown in Figure 3 (b). One end of the adsorption plate 3 3 is connected to a blower (not shown) for optical film adsorption and fixation via a suction pipe or the like having an on-off valve, and is inside the suction--14-(11) (11) 1317253 attachment plate 33. The optical film 1 placed on the optical film stage 42 can be adsorbed and fixed by the attraction structure 'the suction hole' provided by penetrating the adsorption plate 33 downward. Further, the installation position of the optical film stage 42 will be described later. Further, the size of the adsorption plate 33 is not particularly limited. The area can be divided by the suction holes of a suitable size, and the selected area can be adapted to a plurality of optical film sizes by the same adsorption plate. On the adsorption plate 33, a front end suction plate 34 is provided on the adhesion end of the optical film 1 via the rotating shaft 45 (the front end portion of one side of the film). The front end suction plate 34 has the same adsorption holding function as the adsorption plate 33, and is positioned at the same position as the adsorption plate 33 when adsorbing and holding the optical film 1 placed on the optical film stage 42. The tip end portion side of the optical film bundle is suction-held by suction by the distal end suction plate 34, and the region other than the tip end portion of the optical film bundle is suction-held by suction by the suction plate 33. In addition, as described later, after the protective film adhered to the optical film 1 is adsorbed and held, the front end of the optical film 1 is adhered to the display panel 2 by pressing the roller 46 (refer to FIG. 1). In order to secure the pressing space of the pressing roller 46, as shown in the third (c), the front end suction plate 34 is released by the optical film by the closing of the on-off valve or the like provided in the middle of the suction pipe. The suction holding by the blower is retracted by the m red (not shown) around the rotating shaft 45, and is detached from the optical film 1, thereby constituting the front end suction plate releasing means. The adhesive sheet (adhesive member) 43 is embedded in the optical film 丨 adsorption surface of the distal end adsorption plate 34 on the same surface as the distal end adsorption plate 34. Thereby, -15-(12) 1317253 is pressed when the tip end of the protective film 7 of the optical film 1 to be described later is peeled off. The optical film 1 and the adhesive sheet 43 are pressed, and the adsorption of the optical film 1 from the front end adsorption plate 34 can be prevented. The surface peeling 'is that the peeling of the protective film 7 failed. Further, the front end suction plate front end suction plate 34 is provided with a CCD camera 47 (see Fig. 1) for identifying the positioning mark (not shown) provided in the optical film 1 in a state where the optical film 1 is adsorbed and held. The bit marks the identification hole 44. Thereby, the position of the optical film 1 in the state in which the adsorption plate 33 is adsorbed by the front end suction plate 34 can be recognized, and the position of the entire display panel 2 can be adjusted by the XYZ 0 table 9 of the above-described panel moving mechanism. The optical film 1 is accurately adhered to a desired position. The adsorption plate 33 is provided with an adsorption plate releasing means capable of releasing the adsorption and holding of the optical film 1 by the air blower for fixing and fixing the optical film (not shown). Next, the adhesive tape 55 for peeling off the protective film 7 in the optical film 1 and the adhesive tape moving mechanism will be described with reference to Fig. 4(a) for the adhesive protective film peeling mechanism. The adhesive material protective film peeling mechanism includes a linear guide base 48 extending to the left and right of the fourth (a) drawing parallel to the linear guide 12 extending left and right in the first embodiment of the panel moving mechanism shown in Fig. 1, and The tape is wound up from the take-up portion 50 and the optical film receiving portion 51. The linear guide base 48 is a base plate that supports the adhesion preventing film peeling mechanism. A linear guide 49 extending left and right in the fourth (a) drawing is disposed on the linear guide base 48, and a tape take-up winding portion 50 and a light-16-(13) 1317253 film receiving portion 51 are disposed thereon. . The linear guide base 48 is provided with a cylinder 52 which can be moved to the vicinity of the optical film 1 which is held by the inclined suction plate 3 3 and the attachment plate 34 by the air-winding tape take-up and take-up portion 50. Further, a portion of the belt 5 5 has a tilt angle f which is such that the inclination angle of the optical film 1 which is adsorbed and held by the tip end is kept constant, and the tape unwinding portion 50 is provided with a plurality of tapes being unwound. Adhesive tape 55 is attached to each of the tape take-up shafts 53. Further, the end portion of the take-up/out shaft 53 is biased so that the torque motor 56 is not provided to each of the tape take-up shafts 53 when the tape is pulled out. The winding of the tape is performed by attaching the take-up shaft 54, and the protective film 7 peeled off from the adhesive tape 7 is adhered to the adhesive tape 5 5 . In order to control the winding speed and the winding amount at this time, the sensor 57 for taking the shaft diameter and the servo motor 58 are provided. The adhesive tape 55 is rolled up in the direction in which the linear guides 49 extend in the direction in which the tape winding shafts 53 are rolled out, and is advanced toward the front end portion before the adhesion of the optical film ,, in the roller 59 shown in FIG. 4(b). 'The path is folded back and becomes the opposite direction. The number of the adhesive tapes 55 is set to three, and the appropriate number can be set in conjunction with the width dimension of the optical thin panel 2 or the protective film force of the adhesive tape 55. In order to properly peel off the protective film 7, the center of the width dimension of the optical film 1 is used as a reference, and the glue is equalized on the left and right sides, and the glue is sucked by the front end, and the adhesive is adsorbed to the plate 4 4 β path. The oil 53 can be measured from the end of the tape in order to produce a slack adhesive tape state (the film front end peeling is taken up by the winding film 1 or the display 7 or the display surface spacing is used -17-(14) (14 )
1317253 置爲佳，最低可以設置2個。 光學薄膜承受部51係平板形狀，設置用於以裂 帶5 5進行保護薄膜7之前端剝離完畢後，由吸附板 前端吸附板3 4接受光學薄膜1，由下側予以支撐，公 光學薄膜1的折彎或位置偏差。因此，光學薄膜承受 係位於吸附板3 3側而非前端吸附板3 4側，具有與裂 帶5 5的一部份所具有的傾斜角相同的傾斜角。 依據第4(b)圖，說明被黏貼於光學薄膜1之保 膜7的剝離。 黏著膠帶55從各膠帶捲出軸53被捲出，如圖月 經過設置於特定位置的_輪類，在前端剝離輥輪59 向前進，被捲繞於捲取軸54。 在此狀態下，如使膠帶捲出捲取部5 0移動至31 膜1的附近時，前端剝離輥輪5 9係被配置於與光學； 的前端（第4 ( b )圖中，以虛線所示之傾斜的光學| 的下端部）一致之位置。 前端剝離輥輪59係介由導軌60而被支撐構件 支撐。於支撐構件61設置有氣缸62，前端剝離輥輪 藉由氣紅62的動作而往箭頭方向a方向移動，可》 著膠帶55按壓於保護薄膜7的前端位置，且予以接^ 另外，支撐構件61係被配合光學薄膜1的傾余 置的直線導軌63所支撐，設置有滾珠導螺桿65的吞 螺桿螺帽64。藉此，藉由安裝於滾珠導螺桿65之姐 動機66之旋轉，可以沿著光學薄膜1之傾斜而移震 S著膠 33與 (防止 部51 Ϊ著膠 ^護薄 t般， 中反 :學薄 _膜1 I膜1 61所 59係 1將黏 f ° [而設 [珠導 丨衝電 卜能 -18- (15) 1317253 夠正確地控制移動速度與移動距離。 藉此，在已按壓前端剝離輥輪5 9之狀態下，使朝箭 頭方向b方向移動時，前端剝離輥輪59 —面旋轉一面上 昇。此時，各黏著膠帶55藉由捲取軸54的捲取力而朝箭 頭方向e方向移動，捲取力也作用於被黏貼於各黏著膠帶 5 5之保護薄膜7，保護薄膜7由前端被依序剝離。 進而，說明加壓輥輪機構。 • 加壓輥輪機構係如第1圖所示般，藉由：壓著輥輪46 與連桿69與氣缸68所構成。加壓輥輪機構爲了作成可於 在第1圖之左右的水平方向移動，設置有：設置於基座架 • 72之上的直線導軌71與支柱67與氣缸70。光學薄膜1 • 與顯示面板2的黏貼，係藉由氣缸70的動作而移動後， 介由連桿69將壓著輥輪46轉換爲向下來進行氣缸68的 動作。 壓著輥輪46不具有旋轉驅動機構，係於夾入光學薄 ® 膜1與顯示面板2後，介由面板移動機構移動，使得壓著 輥輪46被帶動之構造。 . 壓著輥輪46的大小並無限定’可以考慮顯示面板2 . 的強度或光學薄膜1的必要按壓力來設定。 在顯示面板2的寬度大之情形或需要高按壓力之情形 時，壓著輥輪46變長’中央部的鬆弛量變大，無法在寬 度方向維持均等的按壓力。因此，爲了抑制此鬆弛量，將 中央部的直徑作成大少許之王冠形的輥輪當成支撐輥輪予 以組合，可以構成加壓輥輪機構。 -19- (16) 1317253 雖於壓著輥輪46的表面設置彈性橡膠，但是，其材 質並不特別限定，可以依據光學薄膜1而適當地選擇。以 PET薄膜與離形性良好之矽或導電性橡膠爲佳。另外，爲 了吸收顯示面板2的變形，橡膠硬度以柔軟者爲佳。 於加壓輥輪機構的上部設置CCD相機機構。CCD相 機機構由未圖示出之裝置架所支撐，藉由：C CD相機47 、水平移動機構73、上下移動機構74所構成。 φ CCD相機47設置有2台，藉由：水平移動機構73、 上下移動機構74可以同一相機來適用於顯示面板2與光 學薄膜1。 ' 顯示面板2係藉由XYZ 0工作台9而停止固定於第1 • 圖的左側以實線所示之位置後，藉由：水平移動機構73、 上下移動機構74而以CCD相機47來辨識設置於顯示面 板2之定位標記位置，並計測顯示面板2之XY各方向的 位置偏差或傾斜（水平面之旋轉偏差）。 # 另外，被吸附保持於吸附板33與前端吸附板34，且 以水平狀態被停止固定於光學薄膜黏貼位置之光學薄膜1 . ，也介由設置於前端吸附板34之對位標記辨識孔44而辨 識光學薄膜1的對位標記，並計測位置或傾斜。 所被計測之位置資料於裝置控制器被處理，藉由設置 於面板移動機構之XYZ 0工作台9而對顯示面板2進行位 置調整，進行光學薄膜1與顯示面板2之對位，可高精度 地將光學薄膜1黏貼於顯示面板2的所期望位置。 接著，說明將光學薄膜1黏貼於顯示面板2之前述構 -20- (17) 1317253 成的光學薄膜黏貼裝置的動作。 第5圖係表示光學薄膜黏貼裝置之整體的槪略構成平 面圖。 第5圖中，A係光學薄膜供給部、B係黏貼部、C係 顯示面板供給部、D係顯示面板搬運部、E係顯示面板清 潔部、F係加壓輥輪機構待機部、G係黏貼材保護薄膜剝 離機構待機部、Η係顯示面板回收部。 # 爲了將光學薄膜1黏貼於顯示面板2，在光學薄膜供 給部Α中，將光學薄膜1載置於光學薄膜工作台42，利 用未圖示出之對位導軌來正確地進行對位。 ' 接著，先將顯示面板2裝著於面板固定具11，利用搬 - 運台車77來設定於面板投入位置。搬運台車77的面板固 定具11接受面係自由輥輪構造。藉由以上，完成光學薄 膜1黏貼之運轉準備。 接著，藉由操作自動運轉啓動鈕，開始黏貼動作。第 # 3圖所示之光學薄膜吸附搬運機構的吸附板支撐構件3 2係 位於光學薄膜供給部A，光學薄膜工作台42上昇，如第3 (a)圖所示般，將光學薄膜1按壓於藉由昇降氣缸40、 41而下降之吸附板33與前端吸附板34’以吸附板33與 前端吸附板3 4予以吸附保持後’吸附板3 3與前端吸附板 3 4上昇，如第5圖之虛線所示般’藉由吸附板支撐構件 3 2移動至黏貼部B而待機。 另一方面，ΧΥΖ0工作台9係位於顯示面板搬運部D ，在顯示面板供給部C中’將搬運台車77上之已裝著顯 -21 - (18) 1317253 示面板2的面板固定具11押出顯示面板搬運部D。面板 固定具11藉由ΧΥΖΘ工作台9上的輸送帶10中之28而 被拉入對位後而被固定。 接著，XYZ 0工作台9上之顯示面板2被搬運至顯示 面板清潔部E，藉由ΧΥΖ0工作台9上之昇降導軌25與 凸輪從動件26而使顯示面板2少許上昇，藉由面板清潔 器75而清潔顯示面板2的表面後，利用昇降導軌25與凸 輪從動件26使顯示面板2恢復原來的高度。之後，XYZ 0工作台9通過加壓輥輪機構待機部F的下方而被定位於 黏貼部B。 然後，在黏貼部B中，藉由黏著材保護薄膜剝離機構 與加壓輥輪機構，如之後敘述般，進行光學薄膜1之保護 薄膜7的前端剝離，光學薄膜承受部51與黏著膠帶55從 吸附板3 3與前端吸附板3 4而接受光學薄膜1 ’從下側予 以支撐，利用壓著輥輪46按壓光學薄膜1，藉由ΧΥΖ0 工作台9使顯示面板2朝第5圖的右方向移動’一面將光 學薄膜1拉出一面完成黏貼於顯示面板2。 光學薄膜承受部51與對黏著膠帶55交付光學薄膜1 之吸附板33與前端吸附板34係藉由光學薄膜吸附搬運機 構的吸附板支撐構件3 2而回到光學薄膜供給部A。 黏貼有光學薄膜1之顯示面板2係藉由ΧΥΖΘ工作台 9而回到顯示面板搬運部D’解除面板固定具11的固定， 藉由輸送帶1〇而送出顯示面板回收部Η ’以搬運台車77 進行接取，完成一連串之黏貼運轉動作。 -22- (19) 1317253 以上之一連串的運轉動作所敘述之光學薄膜1的對光 學薄膜工作台之供給方法或使用供給顯示面板2之搬運台 車7 7的方法，並無特別限定，也可以使用自動供給機器 〇 接著，說明藉由黏著材保護薄膜剝離機構與加壓輥輪 機構的光學薄膜1之對顯示面板2的黏貼。 如第6圖所示般，在黏貼部B中，顯示面板2係藉由 XYZ 0工作台9而定位於黏貼光學薄膜1之位置結束後， 光學薄膜1係於吸附板33與前端吸附板34水平地被吸附 保持於顯示面板2上，膠帶捲出捲取部50於待機位置狀 態下，開始光學薄膜1的黏貼動作。 首先，光學薄膜1係於保持被吸附保持於吸附板3 3 與前端吸附板34之水平狀態的狀態下，從設置於前端吸 附板34之對位標記辨識孔44的上部以CCD相機47來計 測光學薄膜1中之對位標記的位置。接著，移動CCD相 機47，計測顯示面板2中之對位標記的位置。 之後，CCD相機47回到第1圖所示之原來位置（第 6圖中，以虛線所示位置），被計測之個別的位置資料被 以未圖示出之裝置控制器所處理，藉由XYZ 0工作台9而 進行顯示面板2之位置調整。 接著，如第7圖所示般，吸附板33係藉由昇降氣缸 40、4 1的動作，使光學薄膜1的黏貼前端側向下傾斜。此 時，吸附板33的傾斜角度可以設定成適當的角度，但是 傾斜角度大之情形，於將光學薄膜1以壓著輥輪46按壓 -23- (20) 1317253 於顯示面板2時，光學薄膜1之突出的前端長度需要設定 大些。另外，在傾斜角度小之情形時’設置進行黏貼於光 學薄膜1之保護薄膜7的前端剝離之前端剝離輥輪5 9等 之零件的空間變不見。 接著，藉由氣缸52使膠帶捲出捲取部50移動至光學 薄膜1附近。此時，設置於膠帶捲出捲取部50之黏著膠 帶55與被黏貼於光學薄膜1之保護薄膜7以不接觸方式 • ，被定位於保有少許之間隙。此係在以前端剝離輥輪59 來將黏著膠帶55按壓於保護薄膜7前已接觸之情形時， 保護薄膜7無法均勻地剝離的關係。 ' 接著，如第8(a)圖所示般，藉由氣缸62而以前端 — 剝離輥輪5 9將黏著膠帶5 5於箭頭方向a方向按壓於被黏 貼於光學薄膜1之保護薄膜7的前端位置，於保護薄膜7 的前端部接著黏著膠帶55。另外’光學薄膜1與黏著薄片 43係藉由前端剝離輥輪59而被按壓，兩者相互接著。 • 由此狀態起，如第8 ( a )圖所示般，藉由脈衝電動機 66使前端剝離輥輪59沿著保護薄膜7的傾斜而移動（往 吸附板33側移動）於箭頭方向b方向時，前端剝離輥輪 59 —面旋轉移面移動。 因此，黏著膠帶55係藉由捲取軸54的捲取力而朝箭 頭方向c方向移動，成爲在前端剝離輥輪59中折返而反 向前進之形式，捲取力也作用於被黏貼於黏著膠帶55之 保護薄膜7，保護薄膜7從前端依序只被剝離移動量之份 -24- (21) 1317253 此時，光學薄膜1的前端部係藉由前端剝離輥輪59 而被按壓於黏著薄片43，光學薄膜1的前端部不會從前端 吸附板34的面剝離，不會產生保護薄膜7之前端剝離失 敗。 接著，藉由關閉設置於吸引配管中途之開關閥等，開 放藉由前端吸附板3 4的吸引對光學薄膜1的前端部之吸 附，如第8 ( c )圖所示般，以旋轉軸45爲中心使被定位 於與吸附板3 3同一面之前端吸附板3 4旋轉退避，可以確 保將光學薄膜1的前端黏貼於顯示面板2之壓著輥輪46 的按壓空間。 在以壓著輥輪46將光學薄膜1的前端按壓於顯示面 板2時，藉由只使前端吸附板34退避脫離，可以保持以 CCD相機47來對光學薄膜1進行位置辨識之狀態。另外 ，依據吸附板33之光學薄膜吸附保持與光學薄膜1之剛 性，藉由箭頭方向c方向之膠帶捲取力，光學薄膜1不會 向下折彎，不會由前端吸附板34之旋轉退避所牽連而向 上折彎。 接著，如第9(a)圖所示般，光學薄膜1被吸附保持 於吸附板3 3，在已剝離前端部的保護薄膜7之狀態下，前 端部藉由壓著輥輪46而被黏貼於顯示面板2。 此時，壓著輥輪46係從第5圖所示之加壓輥輪機構 待機部F的位置，藉由氣缸7 0 (參照第1圖）的動作而 移動於黏貼部B的方向，藉由將光學薄膜1的前端位置按 壓於顯示面板2的前端部，可以防止氣泡的發生。 -25- (22) 1317253 在藉由壓著輥輪46而將光學薄膜1的前端黏貼於顯 示面板2的前端部後，吸附板33藉由設置於吸引配管中 途之開關閥被關閉等，開放光學薄膜1的吸附保持，藉由 昇降氣缸40、4 1使吸附板3 3與前端吸附板3 4恢復水平 而上昇後，光學薄膜供給部A往光學薄膜工作台42移動 ，準備下一黏貼動作。 藉由吸附板33而被開放之光學薄膜1係藉由光學薄 膜承受部51與黏著膠帶55而從下面側被支撐，於藉由吸 附板33來吸附保持光學薄膜1之狀態下，進行黏貼動作 之情形，光學薄膜1與吸附板33摩擦，於光學薄膜1的 表面產生擦傷或磨耗粉之情形不會發生。 接著，如第9(b)圖所示般，黏貼有光學薄膜1的前 端之顯示面板2，在被以壓著輥輪46按壓之狀態下，藉由 XYZ 0工作台9而朝箭頭方向e方向移動，光學薄膜1也 被拉出同一方向，壓著輥輪46也被帶動旋轉。另外，接 著於黏著膠帶55之保護薄膜7也同樣地被拉出，保護薄 膜7接著於黏著膠帶55之狀態下，從光學薄膜1被剝離 ，與黏著膠帶55 —同地被捲繞於捲取軸54。 此時，前端剝離輥輪59係於保護薄膜7之前端部剝 離時，沿著吸附板3 3的傾斜而朝吸附板3 3側移動，位於 從顯示面板2的上面稍微分離之位置，在接著黏著膠帶55 已剝離之保護薄膜7之狀態下，即使被捲繞於捲取軸54, 對顯示面板2也不會造成任何影響。 即光學薄膜1係藉由前端剝離輥輪59所形成之角度 -26-1317253 is better, and the minimum can be set to 2. The optical film receiving portion 51 is formed in a flat plate shape, and is provided for peeling off the front end of the protective film 7 by the split tape 55. Then, the optical film 1 is received by the suction plate front end suction plate 34, and supported by the lower side, and the optical optical film 1 is supported. Bend or positional deviation. Therefore, the optical film bearing is located on the side of the suction plate 3 3 instead of the side of the front suction plate 34, and has the same inclination angle as that of a portion of the split band 55. The peeling of the film 7 adhered to the optical film 1 will be described based on Fig. 4(b). The adhesive tape 55 is unwound from the respective tape take-up shafts 53 and passes through the _ wheel set at a specific position as shown in the figure, and the front end peeling roller 59 advances and is wound around the take-up shaft 54. In this state, when the tape is unwound from the take-up portion 50 to the vicinity of the film 1, the front end peeling roller 59 is disposed at the front end of the optical (Fig. 4 (b), with a broken line The position of the lower end of the tilted optics shown is consistent. The front end peeling roller 59 is supported by the support member via the guide rail 60. The support member 61 is provided with a cylinder 62, and the front end peeling roller is moved in the direction of the arrow direction a by the operation of the gas red 62, so that the tape 55 is pressed against the front end position of the protective film 7, and is connected, and the supporting member is attached. The 61-series is supported by the linear guide rail 63 that is disposed with the tilting of the optical film 1, and the swallowing screw nut 64 of the ball lead screw 65 is provided. Thereby, by the rotation of the sister motor 66 attached to the ball lead screw 65, the glue 33 can be moved along the inclination of the optical film 1 (the prevention portion 51 is licked by the glue, and the middle and the reverse are: Learning thin film 1 I film 1 61 59 series 1 will be sticky f ° [and set [bead guide 丨 电 电 -18 -18- (15) 1317253 enough to correctly control the moving speed and moving distance. When the front end peeling roller 5 9 is pressed and moved in the direction of the arrow b, the front end peeling roller 59 is raised while rotating in the surface. At this time, the adhesive tape 55 is caused by the take-up force of the take-up shaft 54. The direction of the arrow moves in the e direction, and the take-up force also acts on the protective film 7 adhered to each of the adhesive tapes 5 5 , and the protective film 7 is sequentially peeled off from the front end. Further, the pressure roller mechanism is explained. • The pressure roller mechanism is As shown in Fig. 1, the pressure roller 46 and the link 69 and the cylinder 68 are formed. The pressure roller mechanism is provided to be movable in the horizontal direction about the first figure. Linear guide 71 on the base frame 72 and the post 67 and the cylinder 70. Optical film 1 • Display surface The adhesion of the plate 2 is moved by the operation of the air cylinder 70, and the pressing roller 46 is switched downward by the link 69 to perform the operation of the cylinder 68. The pressing roller 46 does not have a rotation driving mechanism. After the optical thin film 1 and the display panel 2 are sandwiched, the panel moving mechanism is moved to cause the pressing roller 46 to be driven. The size of the pressing roller 46 is not limited to the display panel 2. The strength or the necessary pressing force of the optical film 1 is set. When the width of the display panel 2 is large or when a high pressing force is required, the pressing roller 46 becomes long, and the amount of slack in the center portion becomes large, and cannot be maintained in the width direction. The pressing force is equal. Therefore, in order to suppress the amount of slack, a roller having a large crown shape at the center portion can be combined as a supporting roller to constitute a pressure roller mechanism. -19- (16) 1317253 The elastic rubber is provided on the surface of the pressing roller 46. However, the material thereof is not particularly limited, and may be appropriately selected depending on the optical film 1. It is preferable to use a PET film and a conductive or rubber having a good release property. For Absorbing the deformation of the display panel 2, the rubber hardness is preferably soft. A CCD camera mechanism is disposed on the upper portion of the pressure roller mechanism. The CCD camera mechanism is supported by a device frame not shown by the C CD camera 47, The horizontal movement mechanism 73 and the vertical movement mechanism 74 are provided. Two φ CCD cameras 47 are provided, and the horizontal movement mechanism 73 and the vertical movement mechanism 74 can be applied to the display panel 2 and the optical film 1 by the same camera. 2 is stopped by the XYZ 0 table 9 and fixed at the position indicated by the solid line on the left side of the first figure, and then recognized by the CCD camera 47 by the horizontal movement mechanism 73 and the vertical movement mechanism 74. The position of the positioning mark of the panel 2 is measured, and the positional deviation or inclination (rotational deviation of the horizontal plane) of each of the XY directions of the display panel 2 is measured. # Further, the optical film 1 which is adsorbed and held by the adsorption plate 33 and the front end adsorption plate 34 and which is stopped and fixed to the position where the optical film is adhered in a horizontal state is also provided by the alignment mark identification hole 44 provided in the front end adsorption plate 34. The alignment mark of the optical film 1 is recognized, and the position or inclination is measured. The position data to be measured is processed by the device controller, and the position of the display panel 2 is adjusted by the XYZ 0 table 9 provided in the panel moving mechanism, and the alignment of the optical film 1 and the display panel 2 is performed. The optical film 1 is adhered to a desired position of the display panel 2. Next, the operation of the optical film adhering device in which the optical film 1 is adhered to the above-described structure -20-(17) 1317253 of the display panel 2 will be described. Fig. 5 is a schematic plan view showing the entirety of the optical film adhering device. In Fig. 5, the A-type optical film supply unit, the B-type adhesive unit, the C-based display panel supply unit, the D-based display panel transport unit, the E-based display panel cleaning unit, the F-system pressure roller mechanism standby unit, and the G system Adhesive material protection film peeling mechanism standby part, tethered display panel recovery part. # In order to adhere the optical film 1 to the display panel 2, the optical film 1 is placed on the optical film stage 42 in the optical film supply portion ,, and the alignment is accurately performed by using an alignment guide (not shown). Next, the display panel 2 is attached to the panel fixture 11 first, and is set to the panel insertion position by the transport truck 77. The panel fixing tool 11 of the transport carriage 77 receives the surface free roller structure. By the above, the operation preparation of the optical film 1 pasting is completed. Next, the paste operation is started by operating the automatic operation start button. The adsorption plate supporting member 32 of the optical film adsorption and transport mechanism shown in Fig. 3 is located in the optical film supply unit A, and the optical film stage 42 is raised, and the optical film 1 is pressed as shown in Fig. 3(a). After the adsorption plate 33 and the front end adsorption plate 34' which are lowered by the lifting cylinders 40, 41 are adsorbed and held by the adsorption plate 33 and the front end adsorption plate 34, the adsorption plate 3 3 and the front end adsorption plate 34 rise, as in the fifth. As shown by the broken line in the figure, the suction plate supporting member 32 moves to the pasting portion B and stands by. On the other hand, the ΧΥΖ0 table 9 is located in the display panel transport unit D, and in the display panel supply unit C, 'the panel fixture 11 on the transport carriage 77 that has the display panel 21 - (18) 1317253 display panel 2 is pushed out The panel transport unit D is displayed. The panel fixture 11 is fixed by being pulled into the alignment by 28 of the conveyor belts 10 on the table 9. Then, the display panel 2 on the XYZ 0 table 9 is transported to the display panel cleaning portion E, and the display panel 2 is slightly raised by the elevation rail 25 and the cam follower 26 on the 工作0 table 9, and is cleaned by the panel. After the surface of the display panel 2 is cleaned by the device 75, the display panel 2 is returned to the original height by the elevation rail 25 and the cam follower 26. Thereafter, the XYZ 0 table 9 is positioned on the bonding portion B by the lower side of the pressure roller mechanism standby portion F. Then, in the adhesive portion B, the front end of the protective film 7 of the optical film 1 is peeled off by the adhesive material protective film peeling mechanism and the pressure roller mechanism, and the optical film receiving portion 51 and the adhesive tape 55 are removed from the adhesive film 55. The adsorption plate 3 3 and the front end suction plate 34 receive the optical film 1 'supported from the lower side, and the optical film 1 is pressed by the pressing roller 46, and the display panel 2 is oriented in the right direction of FIG. 5 by the ΧΥΖ0 table 9. Moving the side of the optical film 1 is pulled out to the display panel 2. The optical film receiving portion 51 and the suction plate 33 and the leading end suction plate 34 for delivering the optical film 1 to the adhesive tape 55 are returned to the optical film supply portion A by the adsorption plate supporting member 32 of the optical film adsorption transport mechanism. The display panel 2 to which the optical film 1 is adhered is returned to the display panel transporting portion D' by the cymbal table 9 to release the fixing of the panel fixture 11, and the display panel recovery portion Η is sent by the conveyor belt 1 to transport the trolley 77 Pick up and complete a series of pasting operations. -22- (19) 1317253 The method of supplying the optical film stage of the optical film 1 described in the series of operation operations or the method of using the transport carriage 7 7 for supplying the display panel 2 is not particularly limited, and may be used. Automatic feeding machine Next, the adhesion of the optical film 1 to the display panel 2 by the adhesive material peeling mechanism and the pressure roller mechanism will be described. As shown in FIG. 6, in the pasting portion B, the display panel 2 is positioned at the position where the optical film 1 is adhered by the XYZ 0 table 9, and the optical film 1 is attached to the suction plate 33 and the front end suction plate 34. The film is horizontally adsorbed and held on the display panel 2, and the tape winding-out portion 50 is in the standby position, and the bonding operation of the optical film 1 is started. First, the optical film 1 is measured by the CCD camera 47 from the upper portion of the registration mark identification hole 44 provided in the front end adsorption plate 34 while being held in a state of being held by the adsorption plate 3 3 and the front end adsorption plate 34. The position of the alignment mark in the optical film 1. Next, the CCD camera 47 is moved to measure the position of the registration mark in the display panel 2. Thereafter, the CCD camera 47 returns to the original position shown in FIG. 1 (the position shown by the broken line in FIG. 6), and the measured individual position data is processed by the device controller not shown. The position of the display panel 2 is adjusted by the XYZ 0 table 9. Then, as shown in Fig. 7, the suction plate 33 is tilted toward the front end side of the optical film 1 by the operation of the lift cylinders 40 and 41. At this time, the inclination angle of the adsorption plate 33 can be set to an appropriate angle, but when the inclination angle is large, when the optical film 1 is pressed by the pressing roller 46 to -23-(20) 1317253 on the display panel 2, the optical film The protruding front end length of 1 needs to be set larger. Further, when the inclination angle is small, the space for the parts such as the end peeling roller 5 9 which is attached to the front end of the protective film 7 adhered to the optical film 1 is not changed. Next, the tape is taken up by the air cylinder 52 to be taken up by the winding portion 50 to the vicinity of the optical film 1. At this time, the adhesive tape 55 provided on the tape unwinding portion 50 and the protective film 7 adhered to the optical film 1 are positioned so as not to be in contact with each other, and are positioned to maintain a slight gap. When the adhesive tape 55 is brought into contact with the protective film 7 by the front end peeling roller 59, the protective film 7 cannot be uniformly peeled off. Then, as shown in Fig. 8(a), the adhesive tape 55 is pressed against the protective film 7 adhered to the optical film 1 in the direction of the arrow direction a by the front end-peeling roller 5 by the air cylinder 62. At the front end position, an adhesive tape 55 is adhered to the front end portion of the protective film 7. Further, the optical film 1 and the adhesive sheet 43 are pressed by the distal end peeling roller 59, and the two are followed by each other. In this state, as shown in Fig. 8(a), the tip end peeling roller 59 moves along the inclination of the protective film 7 (moves toward the suction plate 33 side) in the direction of the arrow direction b by the pulse motor 66. At the time, the front end peeling roller 59 moves in the surface rotation surface. Therefore, the adhesive tape 55 is moved in the direction of the arrow c by the take-up force of the take-up shaft 54, and is folded back in the front end peeling roller 59 to advance in the reverse direction, and the take-up force also acts on the adhesive tape. The protective film 7 of 55, the protective film 7 is only peeled off from the front end by a portion of the movement amount - 24 - (21) 1317253 At this time, the front end portion of the optical film 1 is pressed against the adhesive sheet by the front end peeling roller 59 43, the front end portion of the optical film 1 is not peeled off from the surface of the front end suction plate 34, and the peeling failure of the front end of the protective film 7 does not occur. Then, by closing the opening and closing valve or the like provided in the middle of the suction pipe, the suction of the tip end portion of the optical film 1 by the suction of the front end suction plate 34 is opened, and as shown in the eighth (c), the rotation axis 45 is used. For the center, the end suction plate 34 is rotated and retracted so as to be positioned on the same side as the suction plate 3 3, and the front end of the optical film 1 can be adhered to the pressing space of the pressing roller 46 of the display panel 2. When the tip end of the optical film 1 is pressed against the display panel 2 by the pressing roller 46, the position of the optical film 1 can be maintained by the CCD camera 47 by merely retracting the leading end suction plate 34. Further, the optical film according to the adsorption plate 33 is adsorbed and held to maintain rigidity with the optical film 1, and the optical film 1 is not bent downward by the tape winding force in the direction of the arrow c, and is not retracted by the rotation of the front end suction plate 34. Implicated and bent upwards. Then, as shown in Fig. 9(a), the optical film 1 is adsorbed and held by the adsorption plate 33, and the tip end portion is pasted by the pressure roller 46 while the protective film 7 at the distal end portion has been peeled off. On the display panel 2. At this time, the pressure roller 46 is moved from the position of the pressure roller mechanism standby portion F shown in FIG. 5 to the direction of the bonding portion B by the operation of the cylinder 70 (see FIG. 1). By pressing the front end position of the optical film 1 to the front end portion of the display panel 2, generation of air bubbles can be prevented. -25- (22) 1317253 After the tip end of the optical film 1 is adhered to the front end portion of the display panel 2 by the pressure roller 46, the suction plate 33 is opened by the opening and closing valve provided in the middle of the suction pipe. After the adsorption and retention of the optical film 1 is raised by the lift cylinders 40 and 41, the adsorption plate 3 3 and the front end suction plate 34 are raised to the level, and then the optical film supply unit A is moved to the optical film stage 42 to prepare for the next pasting operation. . The optical film 1 which is opened by the adsorption plate 33 is supported from the lower surface side by the optical film receiving portion 51 and the adhesive tape 55, and is adhered and held by the adsorption plate 33 to perform the pasting operation. In the case where the optical film 1 is rubbed against the adsorption plate 33, the occurrence of scratches or abrasion of the powder on the surface of the optical film 1 does not occur. Then, as shown in Fig. 9(b), the display panel 2 to which the tip end of the optical film 1 is adhered is pressed in the direction of the arrow by the XYZ 0 table 9 while being pressed by the pressing roller 46. When the direction is moved, the optical film 1 is also pulled out in the same direction, and the pressing roller 46 is also rotated. Further, the protective film 7 which is next to the adhesive tape 55 is similarly pulled out, and the protective film 7 is peeled off from the optical film 1 in the state of the adhesive tape 55, and is wound around the same in the same manner as the adhesive tape 55. Axis 54. At this time, when the tip end peeling roller 59 is peeled off before the protective film 7 is detached, it moves toward the suction plate 3 3 along the inclination of the suction plate 3 3 and is located slightly apart from the upper surface of the display panel 2, and then In the state where the protective film 7 of the adhesive tape 55 has been peeled off, even if it is wound around the take-up shaft 54, the display panel 2 does not have any influence. That is, the optical film 1 is formed by the front end peeling roller 59.