JP3056941B2 - Method of manufacturing image display device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a flat type image display device, and more particularly to a method for manufacturing an image display device having a getter installed therein.

[0002]

2. Description of the Related Art Conventionally, an image display device that mainly excites a phosphor to emit light, such as a fluorescent display tube, a display device using a field emission type or a surface conduction type electron-emitting device, as an image display device, is a flat display device. It has advantages such as being bright and easy to see, and is actively applied in industry and expected.

[0003] The applicant of the present invention has filed a thin image display device that uses a surface conduction electron-emitting device as an electron beam generating source, accelerates an electron beam, irradiates a phosphor, emits light, and displays an image. JP-A-3-261024, etc.).

FIGS. 3 and 4 are a sectional view and a perspective view, respectively, of the image display device disclosed in the above publication. 3 and 4, reference numeral 300 denotes an exhaust pipe for exhausting the inside of the fluorescent display tube (the figure shows a state after the sealing is cut off); 301, a back plate made of blue plate glass constituting an electron-emitting device; 302 and 303 are electrodes provided at a fixed interval, and 304 is electrodes 302 and 303.
A thin film including an electron emitting portion provided therebetween, 306 is an electron passage hole, 307 is a grid, 308 is a metal back 309
A face plate 311 made of soda lime glass on which the phosphor 310 is formed, 311 is an outer frame, and 314 is a getter material container. The getter material container 314 is fixed to a getter material container fixing jig 313, and stores therein a general purpose evaporative getter material for maintaining a vacuum in the panel.
01 is deposited.

[0005] A method for manufacturing an image display device will be described with reference to FIGS.

[0006] The inside of the airtight container is evacuated through an exhaust pipe 300, and after degassing by baking, a part of the exhaust pipe is heated and melted and sealed (closed, cut). Finally, the getter material container 314 containing the normal target getter material installed at one end inside the airtight container is heated, and the stored evaporable getter material is transferred to the back plate 30.
1 to complete the image display device.

In general, a getter material container is a container in which an evaporable getter material containing Ba as a main component is housed in a metal tube which is partially open, and has a straight or ring shape.

Usually, the getter material is flashed by induction heating or electric heating, and the getter material is adhered to the inner surface of the image display device, adsorbs gas, and has a vacuum maintaining function in the panel.

On the other hand, non-evaporable getters are generally Zr, V,
When made of an Fe alloy or the like and heated to about 300 ° C. in a vacuum, it has a gas adsorbing ability and has a function of maintaining a vacuum in the panel.

Here, the surface conduction electron-emitting device will be described. FIG. 5 shows a schematic top view and a sectional view of the surface conduction electron-emitting device.

Referring to FIG. 1, reference numeral 501 denotes a back plate made of an insulating material such as soda lime glass; 502 and 503, electrodes provided at a predetermined interval; 504, a thin film including an electron emitting portion; It is. In this case, an organic Pd (CCP423) is used as the thin film 504 including the electron emitting portion.
0 Okuno Pharmaceutical Co., Ltd.), and after firing, the electrode 502,
A voltage is applied between the electrodes 503 to perform an energization process, and the electron-emitting portion 5
05 was formed.

The material of the thin film 504 including the electron emitting portion is Pd
Not limited to Ru, Ag, Au, Ti, In, C
u, Cr, Fe, Zn, Sn, Ta, W, and Pb, _{etc., PdO, SnO 2, In 2} O 3, PbO, oxides such as _{Sb 2 O 3, HfB 2,} ZrB 2, LaB 6, CeB ₆ , YB
₄ , borides such as GdB ₄ , TiC, ZrC, HfC, Ta
Carbides such as C, SiC, WC, TiN, ZrN, HfN
Such as nitride, semiconductor such as Si, Ge, carbon, AgM
g, NiCu, Pb, Sn or the like.

Further, as a method of forming the thin film 504 including the electron emitting portion, a vacuum evaporation method, a sputtering method, a chemical vapor deposition method, a dispersion coating method, a dipping method, a spinner method, and the like can be applied.
In short, there is no particular limitation as long as a thin film can be formed.

In addition, as a thin film of the surface conduction electron-emitting device, one using an SnO ₂ film, one using an Au thin film [G. Dittmer: “Thin Solid Fi
lms ", 9,317 (1972)] , In 2 0 3 / Sn
O ₂ due to the thin film [M. Hartwell and
C. G. FIG. Fonstad: "IEEE Trans. E
DConf. , 519 (1975)], using a carbon thin film [Hisashi Araki et al .: Vacuum, Vol. 26, No. 1, 2
2 (1983)].

As the electron source, a surface conduction electron-emitting device, a thermionic electron source using a thermal cathode, a field emission electron-emitting device (WP Dyke & WW Dolan, "F
field emission ", Advance in
Electron Physics, 8, 89 (19
56) and C.I. A. Spindt, "Physicalp
rightsies of thin-film fi
eld emission cathodes wit
h molybdenum cones ", J. App.
l. Phys. , 47, 5248 (1976)), metal / insulating layer / metal-type electron-emitting device (CAMead,
“The tunnel-emission ampl
ifier, J.M. Appl. Phys. , 32, 646
(1961)).

[0016]

However, the above-mentioned conventional method of manufacturing an image display device has the following problems.

That is, in the degassing process by baking in the above-mentioned conventional example, the baking temperature of the image display device including the exhaust pipe is baked while the exhaust is being performed.
As a matter of course, the temperature is lower than the heating temperature at the time of closing the exhaust pipe. Therefore, when closing the exhaust pipe,
New outgas is generated from the sealed portion, and when the sealed portion is melted and closed, the outgas is not exhausted by a vacuum pump or the like, but enters the inside of the image display device, and the degree of vacuum inside is reduced. The conventional image display device manufactured by such a manufacturing method has the following defects due to a decrease in the degree of vacuum inside.

(1) Since the degree of vacuum inside the image display device is reduced, the withstand voltage of the high voltage applied between the face plate and the rear plate is reduced, and a discharge or the like occurs inside the image display device. Will be degraded and, in the worst case, destroyed. In particular, such a problem is conspicuous in an extremely thin flat-type image forming apparatus in which the distance between the face plate and the rear plate is reduced, and in an image display apparatus in which a high voltage is applied to form a high-luminance light-emitting portion.

(2) Since the atmosphere inside the image display device changes, the driving start voltage of the device changes, and the durability deteriorates.

These drawbacks are remarkable when the baking temperature of an image display device including an exhaust pipe in which more outgas is generated is low or when the exhaust pipe is thick.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and has been made in view of the fact that the degree of vacuum inside the image display device is not reduced, and the image quality is stable.
An object of the present invention is to realize a method for manufacturing an image display device having excellent durability.

[0022]

Means for Solving the Problems The present inventors have conducted intensive studies to solve the above-mentioned problems in the conventional method of manufacturing an image display device and to achieve the object of the present invention, and have completed the present invention. The method for manufacturing the image display device provided by the present invention is as follows.

A method for manufacturing an image display device according to the present invention is a hermetic air conditioner comprising an electron source, a phosphor which emits light by an electron beam from the electron source, and first and second getter members. A second getter material is arranged on an inner wall of an exhaust pipe for exhausting the inside of the airtight container,
In the method for manufacturing an image display device, wherein the first getter material is disposed on the inner surface of the airtight container except for the inner wall of the exhaust pipe, before the step of sealing the exhaust pipe, the first getter material may be provided on an inner wall of the exhaust pipe. The step of providing the arranged second getter material with a gas adsorption capability is performed, and the step of providing the first getter material with a gas adsorption capability is performed after the step of sealing the exhaust pipe. Features.

In this case, prior to the step of providing the getter material disposed on the inner wall of the exhaust pipe with the gas adsorbing ability, a step of exhausting the inside of the airtight container and a baking step of heating the airtight container are provided. It may be that.

Further, the step of evacuating the airtight container and the baking step of heating the airtight container may be performed simultaneously.

In any of the above cases, the step of providing the getter material disposed on the inner wall of the exhaust pipe with the gas adsorbing capability is performed by removing the evaporable getter material contained in the getter material container disposed in the exhaust pipe. It may be performed by vapor deposition.

[0027] Further, the step of giving the getter material disposed on the inner wall of the exhaust pipe a gas adsorbing ability is performed by activating a non-evaporable getter material previously disposed on the inner wall of the exhaust pipe. It may be.

[0028]

[0029]

As described above, it is possible to provide a method of manufacturing an image display device which solves the above-mentioned problem by forming a getter material on the inner wall of the exhaust pipe.

That is, by depositing a getter material on the inner wall of the exhaust pipe before the step of closing the exhaust pipe, when the exhaust pipe is sealed, the sealed portion is melted, closed and exhausted by a vacuum pump or the like. Outgas that is newly generated from the seal-off portion when exhausted is absorbed by the getter material on the inner wall of the exhaust pipe, and the degree of vacuum inside the image display device does not decrease. For this reason, the disadvantages of the prior art can be solved. Further, if it has an adsorbing ability, it usually has a desired vacuum maintaining function.

The getter material can be formed using any of an evaporating type and a non-evaporating type.

An embodiment using the present invention in a display device using a fluorescent display tube and a surface conduction type electron-emitting device will be described below. An image display device using the present invention is provided through an exhaust pipe. It is not limited to these image display devices as long as the exhaust pipe is sealed after exhausting the airtight container .

[0033]

Next, embodiments of the present invention will be described with reference to the drawings.

Embodiment 1 As Embodiment 1, an example in which a surface conduction electron-emitting device is applied to a thin image display device for displaying an image by accelerating an electron beam, irradiating a phosphor to emit light, and displaying an image will be described.

FIG. 1 is a sectional view of the image display device of the present embodiment. In the figure, reference numeral 100 denotes an exhaust pipe for exhausting the inside of the image display apparatus (the figure shows a state after the seal is cut off). Reference numeral 112 denotes a getter material container for vapor deposition on the inner wall of the exhaust pipe 100, and the getter material container fixing jig 1
13 is attached. Reference numeral 101 denotes a back plate made of soda lime glass constituting an electron-emitting device;
03 is an electrode disposed at a fixed interval, 104 is a thin film including an electron emitting portion, 106 is an electron passage hole, 107 is a grid, 108 is a metal back 109 and a phosphor 110
Face plate made of soda lime glass with
11 is an outer frame, 114 is a getter material container for normal purpose (maintaining vacuum in the panel), and a getter material container fixing jig 113.
It is fixed to.

With reference to FIG. 1, a method of manufacturing the image display device of the present embodiment will be described.

The inside of the airtight container formed by the back plate 101, the face plate 108 and the outer frame 111 is evacuated through an exhaust pipe 100, and after degassing by baking, a getter material is formed on the inner wall of the exhaust pipe 100. After evaporating the evaporable getter material stored in the container 112, a part of the exhaust pipe is heated and melted, and sealed (closed, cut).

In this embodiment, when the exhaust pipe is sealed, the evaporable getter material accommodated in the getter material container 112 is deposited on the inner wall of the exhaust pipe 100. Outgas newly generated from the sealed portion is adsorbed by the getter material deposited on the inner wall of the exhaust pipe. In this manner, even when a new outgas is generated from the sealed portion in a state where the sealed portion is melted and clogged and is not exhausted by a vacuum pump or the like, the degree of vacuum inside the image display device is not reduced. Absent.

Finally, the normal target getter material container 114 installed at one end inside the hermetic container was heated to deposit the getter material on the back plate 101, thereby completing the image display device.

As described above, an image display device in which the degree of vacuum inside does not decrease even when outgassing occurs when the exhaust pipe is sealed off was manufactured. This image display device
Even when driving and operating by applying a high voltage between the back plate 101 and the face plate 108, no discharge occurred and the durability was excellent.

Embodiment 2 As Embodiment 2, an example in which the present invention is applied to a fluorescent display tube will be described.

FIG. 2 is a sectional view showing the structure of an image display device using a fluorescent display tube of this embodiment.

In FIG. 2, reference numeral 200 denotes an exhaust pipe for exhausting the inside of the fluorescent display tube (the figure shows a state after the sealing is cut off), and reference numeral 203 denotes Zr and V formed on the inner wall of the exhaust pipe 200 in advance. , A non-evaporable getter material made of an Fe three alloy. Reference numeral 201 denotes a face plate made of a transparent substrate such as a glass plate serving as a display surface, and reference numeral 202 denotes a cup-shaped back plate adhered to the periphery of the face plate 201. Face plate 201
Has an anode pattern 204 and a control grid 205
And a plurality of display units composed of a filament 206 and a getter material container 214 for a normal purpose (in-panel vacuum maintenance operation) are attached to the getter material container fixing jig 2.
13 is fixed. The filament 206 and the anode pattern 204 constitute high-voltage generating means. The high-voltage generating means includes a control grid 205 and a phosphor (not shown) provided corresponding to each of the anode electrodes forming the anode pattern 204. ) Together with the image display member.

With reference to FIG. 2, a method for manufacturing the image display device of the present embodiment will be described. After the inside of the airtight container is evacuated by a vacuum pump or the like through the exhaust pipe 200 and further degassed by baking, the Z formed on the inner wall of the exhaust pipe 200 is formed.
Non-evaporable getter material 203 made of three alloys of r, V and Fe
Is heated in a vacuum to about 300 ° C. for about 15 minutes to have a gas adsorbing ability, and then a part of the exhaust pipe is heated and melted, and sealed (closed, cut).

In this embodiment, a non-evaporable getter material is provided in the exhaust pipe, and the exhaust pipe itself has a gas absorbing ability, so that outgas newly generated from the sealed portion is deposited on the inner wall of the exhaust pipe. Adsorbed to the getter material. In this manner, even when a new outgas is generated from the sealed portion in a state where the sealed portion is melted and clogged and is not exhausted by a vacuum pump or the like, the degree of vacuum inside the image display device is not reduced. Absent.

Lastly, the image display device was completed by heating the normal-purpose getter material container 214 installed at one end inside the airtight container to deposit a non-evaporable getter material.

As described above, it was possible to manufacture an image display device in which the degree of vacuum inside did not decrease even when outgassing occurred when the exhaust pipe was closed. This image display device does not cause discharge as in the first embodiment,
Further, the durability was excellent.

[0048]

Since the present invention is configured as described above, it has the following effects.

In the method according to the first aspect of the present invention, when the exhaust pipe is sealed, even if the sealed portion is melted and clogged and cannot be evacuated by a vacuum pump or the like, a new outgas starts to be generated from the sealed portion. Is not adsorbed by the getter material on the inner wall of the exhaust pipe, and the degree of vacuum inside the image display device is not reduced, so that an image display device with no discharge and excellent durability can be obtained. There is.

[0050]

[0051]

[Brief description of the drawings]

FIG. 1 is a diagram of an image display device according to an embodiment of the present invention.

FIG. 2 is a diagram of an image display device according to an embodiment of the present invention.

FIG. 3 is a diagram of a conventional image display device.

FIG. 4 is a diagram of a conventional image display device.

FIG. 5 is a diagram of an electron-emitting device.

DESCRIPTION OF SYMBOLS 100, 200 Exhaust pipe 101, 202 Back plate 102, 103 Electrode 104 Thin film 106 Electron passing hole 107 Grid 108, 201 Face plate 109 Metal back 110 Phosphor 111 Outer frame 112, 114, 214 Getter material Containers 113, 115, 213 Getter material Container fixing jig 203 Getter material 204 Anode pattern 205 Control grid 206 Filament

Claims (5)

(57) [Claims] 1. An airtight container comprising an electron source, a phosphor that emits light by an electron beam from the electron source, and first and second getter materials, wherein Manufacturing of an image display device in which a getter material is disposed on an inner wall of an exhaust pipe for exhausting the inside of the airtight container, and wherein the first getter material is disposed on an inner surface of the airtight container except for an inner wall of the exhaust pipe. In the method, prior to the step of sealing the exhaust pipe, a step of imparting a gas adsorbing capability to a second getter material disposed on an inner wall of the exhaust pipe is performed, and a step of adsorbing gas to the first getter material. The process of giving the ability
A method for manufacturing an image display device, which is performed after the step of sealing the exhaust pipe. 2. The method of manufacturing an image display device according to claim 1, wherein the inside of the hermetic container is evacuated before the step of providing a getter material disposed on the inner wall of the exhaust pipe with a gas adsorption capability. And a baking step of heating the airtight container. 3. The method for manufacturing an image display device according to claim 2, wherein a step of exhausting the inside of the airtight container and a baking step of heating the airtight container are simultaneously performed. Production method. 4. The method for manufacturing an image display device according to claim 1, wherein the step of providing a getter material disposed on an inner wall of the exhaust pipe with a gas adsorption capability includes: A method for manufacturing an image display device, comprising: evaporating an evaporable getter material accommodated in a getter material container arranged in a container. 5. The method for manufacturing an image display device according to claim 1, wherein the step of causing the getter material disposed on the inner wall of the exhaust pipe to have a gas adsorption capability includes the step of: A method of activating a non-evaporable getter material previously disposed on the inner wall of the image display device.