JP2000251652A - Image display device and manufacture thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent reduction in adsorptive performance of a non-evaporation type getter by bringing the envelope inside of each vessel member into direct contact with each other in its connection part, and airtightly adhering a sealant which faces the envelope outside in the connection part other than the contact part. SOLUTION: An image face plate 7 is a first vessel member constituting an envelope, a rare plate 1 which is consisted of an insulating substrate, an electrode 2, an insulating layer and an electron emitting element 4 is a second vessel member, and an outer frame member 5 is an intermediate vessel member connected to both the vessel members through a sealant (flit glass) 6. At this time, the outer frame member 5 is in direct contact with the image face plate 7 and the rear plate 1 in their connecting positions on the envelope inner surface, and the sealant 6 used in the connecting positions will not be exposed to the envelope inner surface. Accordingly, the gas released from the flit in panel sealing will not be brought into the panel inner part, and the deterioration of the getter arranged with the panel can be reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat (thin) image display device having a vacuum envelope for partially forming an image and a method of manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, a fluorescent display tube for forming an image, a plasma display, a display device using a field emission type Spindt type electron beam generator, and a display using a classical conventional surface conduction electron-emitting device. 2. Description of the Related Art An image display device, such as a device, which excites a phosphor and emits light for display has advantages such as being flat and bright and easy to see, and is actively applied and expected in industry.

Therefore, as a conventional example, FIG. 7 shows a fluorescent display tube, and FIG. 8 shows a plasma display. As a manufacturing method here, when the rear plate 24, the face plate 30, and the outer frame member 21 of the fluorescent display tube shown in FIG. 7 or the plasma display shown in FIG. 24 and / or the face plate 30 and the outer frame member 21 are joined via the sealing material 22. Specifically, for example, a paste-like sealing material mainly composed of low-melting frit glass is applied to a joint between the two plates by printing, spraying, or the like, and then the two plates and the outer frame are laminated. Then, pressure, heating and firing are performed. As a result, airtight sealing of the envelope by the rear plate 24, the face plate 30, the outer frame member 21, and the sealing material 22 is achieved, and then the inside of the envelope is evacuated.

Further, in a flat image display device having a structure in which a non-evaporable getter is included inside an envelope of the image display device, a getter material is arranged in the image display region to immediately generate generated gas. There is known a configuration of an envelope adapted to be adsorbed on a container. For example, Japanese Unexamined Patent Publication No. 4-12436 discloses a method of forming the gate electrode with a getter material in an electron source having a gate electrode for extracting an electron beam. And a semiconductor electron source having a pn junction. Further, JP-A-63-181248 discloses a flat display having a structure in which an electrode (grid or the like) for controlling an electron beam is arranged between a cathode (cathode) group and a face plate of a vacuum vessel. A method of forming a getter material film on the control electrode is disclosed.

Further, US Pat. No. 5,453,659 “Anode Plate”
for Flat Panel Display having Integrated Getter ",
Issured 26 Sept. 1995 to Wallace et al. discloses a structure in which a getter member is formed in a gap between stripe-shaped phosphors on an image display member (anode plate). In this example, in the getter material, the phosphor and the conductor electrically connected to the phosphor are electrically separated, and a proper potential is applied to the getter to irradiate and heat the electrons emitted from the electron source. This activates the getter.

On the other hand, it is needless to say that an electron-emitting device constituting an electron source used in a flat display is simple in structure and manufacturing method from the viewpoint of production technology and manufacturing cost. Therefore, the manufacturing process consists of thin film lamination and simple processing,
Alternatively, when manufacturing a large product, an excellent manufacturing technique that does not require a vacuum device such as a printing method is required.

[0007] In this respect, the electron source disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 4-12436, in which the gate electrode is made of a getter material, is used for manufacturing a conical cathode tip or manufacturing a semiconductor junction. This is a problem in that a complicated process in a vacuum apparatus is required, and the increase in size requires an increase in the size of the manufacturing apparatus, which is also limited.

Further, as disclosed in Japanese Patent Application Laid-Open No. 63-181248,
An apparatus in which a control electrode or the like is provided between the electron source and the face plate has a complicated structure, and the manufacturing process involves complicated steps such as alignment of these members.

Further, as an electron-emitting device having a structure capable of satisfying the above-mentioned requirement that the manufacturing process is easy,
A horizontal field emission electron-emitting device and a surface conduction electron-emitting device can be given. In particular, a horizontal field emission type electron-emitting device is formed by facing a cathode (gate) having a sharp electron-emitting portion on a flat substrate, and is usually formed by a thin film deposition method such as evaporation, sputtering, plating, and the like. Electrons are emitted by the photolithography technology described in, for example, Japanese Patent Application Laid-Open No. 7-235255 is mentioned as an example.

[0010]

However, as described above, the electron beam emitted from the electron source is applied to the phosphor, which is an image display member, to cause the phosphor to emit light.
In an apparatus for displaying an image, the inside of a vacuum envelope containing an electron source and an image forming member must be maintained at a high vacuum. The reason is that when gas is generated inside the vacuum envelope and the pressure rises, the degree of the effect depends on the type of gas, but it adversely affects the electron source, reduces the amount of electron emission, and displays a bright image. Because they may not be able to do so. Also, the generated gas is
The ions are ionized, accelerated by an electric field for accelerating the electrons, and collide with the electron source, possibly damaging the electron source. Further, in some cases, an internal discharge may occur, in which case,
It can also destroy equipment.

In the above-described image display device, the most contributing source of gas is an image display member such as a fluorescent film which is impacted by high-energy electrons. Of course, if the degassing process can be performed sufficiently, such as baking at a high temperature for a long time, the generation of gas can be reduced.
Since other members are thermally damaged, degassing may not be performed sufficiently. In such a case,
There is a high possibility that gas will be generated inside the envelope.

The gas adsorbs on the electron emission portion of the electron source to affect the characteristics. In addition, gas molecules ionized by the electrons emitted from the electron source form a gap between the image display member and the electron source or between the electron display and the electron source. When a voltage is applied between the positive electrode and the negative electrode of the electron source to generate an electric field, the electric field is accelerated, and the electron source may collide with and damage the positive electrode or the negative electrode of the electron source.

Further, when the gas pressure locally and instantaneously increases in the envelope, ions accelerated by the electric field collide with another gas molecule, and the ions are successively formed. There is a danger of generation and discharge. In this case, the electron source is partially destroyed, causing deterioration of the electron emission characteristics. In addition, the generation of gas from the image display member causes electrons to be emitted after the image display device is formed, thereby causing the phosphor to emit light when emitting H2O, H2, CH4, CO, CO contained in the phosphor.
Gases such as 2, O2 are released rapidly. This may cause a phenomenon such as a noticeable decrease in image brightness at the beginning of driving.

In order to solve such a problem, by merely providing a getter region outside the image display region as in the related art, gas generated near the center of the image display region reaches the outer getter region. By this time, not only does it take a considerable amount of time, but also before it is adsorbed by the getter, it is re-adsorbed by the electron source and the electron emission characteristics are degraded.

As described above, the getter layer provided on the outer periphery of the image display area cannot exert a sufficient effect to prevent the deterioration of the element. In particular, the brightness of the image is conspicuously reduced at the center of the image display area. There are cases. Therefore, in the flat plate image display device having no gate electrode or control electrode as described above, a novel structure in which a getter member can be arranged in the image display region so that generated gas can be quickly removed. It has been required to create such a device.

In order to solve the above problem, a method of forming a getter material on an anode plate is disclosed in US Pat.
Although disclosed in 5,453,659, here, the getter material is formed using a vacuum deposition technique such as electron beam evaporation or ion beam sputtering,
The formed getter layer is a thin film as an aggregate of fine particles and has a small surface area.

However, due to the property of a non-evaporable getter that absorbs gas by surface adsorption, a small surface area means that the properties (adsorption rate and total adsorption amount) of the getter deteriorate. In particular, at the time of panel sealing in which firing is performed at a high temperature, getter may be deteriorated when a large amount of gas is released from members. In addition, when a non-evaporable getter is arranged in the display area, the getter material receives a great deal of damage at the time of panel sealing, particularly in the sealing step in air, and performs vacuum evacuation after panel formation. When driving is performed, it is difficult to sufficiently retain the ability to effectively adsorb and exhaust gas released during driving.

Of course, if the non-evaporable getter itself arranged inside the image display device can be heated to the sealing temperature or higher in an atmosphere maintained at a high degree of vacuum, the getter can be activated to compensate for the deterioration at the time of sealing. However, it is practically difficult to heat the getter arranged in the image display area inside the panel to a temperature equal to or higher than the sealing temperature, since there is a high risk of breaking the panel.

In order to avoid the influence at the time of sealing, a method of performing the sealing step in an inert gas atmosphere is also conceivable.
Due to the structure of the thin panel, members used during sealing, especially
The gas released from the frit glass material tends to stay inside the panel, causing considerable damage to the getter.

Conventionally, a general flat image display device has
As shown in FIG. 4, the envelope includes a face plate as an image display surface, a rear plate for arranging devices, and a frame for arranging the two members at a fixed distance. The frame, the face plate, and the rear plate are joined via a sealing material such as frit glass as illustrated.

In the case of such a bonding mode, the sealing material is also exposed inside the hermetic envelope, so that the gas released from the sealing material also diffuses inside the envelope and is provided inside the envelope. Causes great damage to the non-evaporable getter.

Further, in order to prevent the getter from being deteriorated in the sealing step, and particularly to avoid the influence of the atmosphere deterioration due to the gas released from the member itself, sealing in a vacuum is considered.
When frit glass is melted in a vacuum, there is a fear that panel leakage may occur due to foaming when gas escapes from the frit glass.

As a result of extensive studies by the present inventors, the main emission source of the gas that damages the non-evaporable getter during sealing and joining of the image display device is a low melting point glass frit. When heated, hydrogen, oxygen,
It has been confirmed that water, carbon dioxide, carbon monoxide, and the like are generated. Under the sealing temperature of about 400 to 450 degrees, when the above gas is present, the adsorption characteristics of the non-evaporable getter significantly deteriorate, When passing through the sealing step under the gas generation, the gas adsorption speed indicating the performance of the getter,
It was confirmed that the adsorption speed of the original getter was reduced from a fraction of the original rate to a few tenths.

Accordingly, the present inventor has proposed a container member structure in which the frit, which is a main impurity gas emission source, is not exposed to the inner surface of the envelope at the time of sealing, so that the gas mixture into the envelope at the time of sealing is reduced. To reduce the deterioration of the non-evaporable getter provided inside.

The present invention has been made based on the above circumstances, and reduces the adsorbing ability of a non-evaporable getter inside an envelope when frit glass is melted to seal the envelope. It is an object of the present invention to provide an image display device and a method of manufacturing the same that are not feared.

[0026]

In order to achieve the above object, according to the present invention, there is provided a first container member having at least an image display surface, and a second container member arranged to face the container member. In an image display apparatus comprising an enclosure formed by joining an intermediate container member disposed between the two container members and including a non-evaporable getter in the outer container, the outer container of each container member is provided. The inside is in direct contact with each other at the joint, and the sealing material facing the outside of the envelope is hermetically bonded at the joint except for the contact portion.

Further, according to the present invention, a first container member having at least an image display surface, a second container member arranged to face the container member, and an intermediate container member arranged between the two container members To form an envelope, and in the image display device having a non-evaporable getter in the envelope,
A concave groove at the joint of the first and second container members,
The joint portion of the intermediate container member has a convex protrusion, and at the joint portion of each container member, they are directly in contact with each other, and the sealing material is hermetically bonded at the uneven portion. .

Further, according to the present invention, a first container member having at least an image display surface, a second container member arranged opposite to the container member, and an intermediate container member arranged between the two container members To form an envelope, and in the image display device having a non-evaporable getter in the envelope,
The joint portion of the first and second container members has a convex protrusion, and the joint portion of the intermediate container member has a concave groove portion. In a part, the sealing material is air-tightly bonded.

In this case, the container member forming the envelope is
The first container member has a face plate having an image display surface, the second container member has a rear plate arranged opposite to the face plate, and the intermediate container member has a peripheral edge between the face plate and the rear plate. A fluorescent member that emits light by excitation of an electron beam and voltage applying means are formed on an image display surface of the face plate; It is preferable that the above-mentioned electron beam source is formed.

The method for manufacturing an image display device according to the present invention includes a first container member having at least an image display surface, a second container member arranged to face the container member, and both container members. A step of joining an intermediate container member arranged therebetween to form an envelope, and a step of evacuating the space inside the envelope after the step, and The container members are brought into direct contact with each other at their joints, and the joints are hermetically sealed with a sealing material around the contact portions.

Further, in the manufacturing method of the present invention, the first container member having at least the image display surface, the second container member arranged to face the container member, and the second container member are arranged between the two container members. A step of joining the intermediate container member to form an envelope, and a step of evacuating the space inside the envelope after the step, and joining the first and second container members. A concave groove at the portion, and a convex protrusion facing the joint of the intermediate container member. At the joint of the container members, they are in direct contact with each other, and the sealing material is inserted into the concave groove at the joint. Are arranged and sealed between the projections.

Further, according to the manufacturing method of the present invention, the first container member having at least the image display surface, the second container member arranged to face the container member, and the second container member are arranged between the two container members. A step of joining the intermediate container member to form an envelope, and a step of evacuating the space inside the envelope after the step, and joining the first and second container members. A convex protrusion at the portion, and a concave groove at the joint of the intermediate container member, and at the joint of each container member, directly contact with each other, and a sealing material in the concave groove at the joint. Are arranged and sealed between the projections.

In this case, the container member constituting the envelope is
The first container member has a face plate having an image display surface, the second container member has a rear plate arranged to face the face plate, and the intermediate member has a peripheral portion between the face plate and the rear plate. A fluorescent member that emits light by excitation of an electron beam and voltage applying means are formed on the image display surface of the face plate; and the rear plate has at least one or more It is preferable that the electron beam generating source is formed.

According to an embodiment of the present invention, the sealing material is formed by melting and bonding with a low-melting glass frit, and the electron source of the image display device has a plurality of electron-emitting devices provided on a substrate. It is effective that the plurality of electron-emitting devices wired in a matrix form an electron source provided on a substrate.

The non-evaporable getter material contained in the envelope of the image display device contains Ti, Zr or at least one of them as a main component, and further contains Al,
It is preferable that the alloy contains at least one of V, Fe, and Mn as an auxiliary component.

Further, the non-evaporable getter contained in the envelope of the image display device is formed on the surface of the substrate on which the electron source is formed, or is formed on the surface of the image forming member.

[0037]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an image display device and a method of manufacturing the same according to the present invention will be described with reference to the drawings. FIG.
1 is a partial cross-sectional view showing an embodiment of the image display device of the present invention, wherein 1 is an insulating substrate, 2 is an electrode, 3
Is an insulating layer, 4 is an electron-emitting device, 5 is a frame member constituting a contour of the envelope, 6 is a frit glass material used at a joint portion, and 7 is an image face plate including an image display surface. . Here, the image face plate 7 is a first container member for forming the envelope, and the rear plate including the insulating substrate 1, the electrode 2, the insulating layer 3, and the electron-emitting device 4 is also A second container member, and a frame member 5
Is an intermediate container member joined to both container members by the frit glass material 6.

At this time, the frame member 5 and the face plate and the rear plate are in direct contact with each other at the joint thereof on the inner surface of the envelope, and the frit glass material used for the joint is used. 6 is not exposed on the inner surface of the envelope.

By using this structure, the gas released from the frit at the time of sealing the panel can be prevented from being carried into the panel, and the deterioration of the non-evaporable getter previously arranged in the panel can be reduced. Become.

The frame member 5 in the image display device of the present invention,
The face plate and the rear plate are formed of a blue base, a glass base such as quartz, a ceramic base such as Al2O3, or the like. The frame member and the face plate and the rear plate to be joined to the frame member can be formed into a desired shape by a method such as a chemical etching method or a mechanical grinding method.

The sealing material (frit glass material) 6 may be made of any material as long as the material allows the rear plate and the face plate to be hermetically sealed via the frame member 5. Among them, specific examples of the material include amorphous low-melting frit glass, crystalline low-melting frit glass, and the like, and mixing them with an organic solvent, a binder such as nitrocellulose, and the like. It is mixed with an organic solvent that dissolves the binder, and is mixed into a paste. At least at the application temperature of the sealing material 6, an adhesive material is used. Needless to say, a prepared sealing material suitable for the application method is used.

Also, a face plate, a rear plate,
It is preferable to select a material in which the thermal expansion coefficients of the frame member 5 and the sealing material 6 are substantially the same. Further, the sealing material can be fixed to a frame member, or one of a face plate and a rear plate, in advance, which is called temporary baking.

The method of applying the sealing material 6 may be any method such as a printing method, a spraying method, an injection method using a dispenser, or the like. It only needs to be able to apply and form.

Further, there is a configuration of an image display device having the structure shown in FIG. In the figure, 1 is an insulating substrate, 2 is an electrode, 3 is an insulating layer, 4 is an electron-emitting device, 5 is a frame member constituting an envelope, 6 is a frit material, and 7 is a face plate including an image display surface. It is.

In this embodiment, the outer frame (frame member), the face plate, and the rear plate are in direct contact with each other on the inner surface of the panel, and are frit-joined on the outer side of the panel. The method of getter protection here is the same as that of the above-described embodiment, but has a configuration that can be dealt with only by frame processing. Therefore, the sealing material 6 is fixed in advance to the panel outer concave portion on the outer frame member.

Further, as another embodiment, there is a structure shown in FIG. In the figure, 1 is an insulating substrate, 2 is an electrode, 4 is an electron-emitting device, 5 is a frame member constituting an envelope, 6 is a frit material, and 7 is a face plate including an image display surface.

In the present embodiment, the outer frame (frame member) and the rear plate are not directly bonded, but the bonding member 9 is fixed on the rear plate and the outer frame is fixed on the face plate in advance. Finally, the convex portion of the outer frame and the joining member 9
By frit bonding to prevent exposure of the frit to the inside of the envelope.

In this case, it is needless to say that the member to be fixed in advance is fixed by a fixing method that can withstand the heat step of final sealing. Specifically, a crystalline frit or a frit having a higher melting point is used. It is desirable to use.

Next, as shown in FIG. 5, a frame member 5 and a sealing material 6 are placed on the rear plate 1 on which the electron beam generator is formed.
Is disposed, and a face plate 7 is disposed above the outer frame. The temperature at which the low melting point frit glass used for the sealing material 6 melts, for example, about 350 ° C.
Heat and weld at a temperature in the range of 650 ° C. Note that pressure may be applied from the face plate or rear plate side as necessary.

As described above, according to the manufacturing method of the present invention, as in the image display device shown in FIG. 2, the inner surface of the envelope including the rear plate 1, the face plate 7, and the frame member 5 is sealed. Sealing with frit glass is performed without exposing the material.

Next, a non-evaporable getter provided inside the envelope, to which the present invention can be applied, and its proper location will be described. The present invention can exert its effects even if it is installed at any place as long as it is a non-evaporable getter installed inside an airtight container (envelope). For example, FIG.
When the non-evaporable getter is arranged in the peripheral portion inside the envelope as shown in FIG. 10 or when the getter is arranged in the image display area as shown in FIG. With such a structure that is not exposed to the outside, it is possible to suppress deterioration of the properties (adsorption ability) of the getter when the envelope is sealed. The installation location may be a desired position such as the face plate side, the rear plate side, or on the frame member.

Therefore, according to the present invention, when forming the envelope, it is not necessary to restrict the getter arrangement, and the intended usefulness can be exhibited for the getter arranged at any place.

However, as described above, the non-evaporable getter disposed inside the envelope has a larger vacuum maintaining effect when the apparatus is driven when disposed within the image display area. It goes without saying that it is advantageous.

The electron beam generators formed on the rear plate 1 are classified into a fluorescent display tube using a filament-shaped thermoelectron source, a plasma display using discharge, and a bulk type and a thin film type. And the like. For example, as an example of a bulk type, FE [W. P. D
yke & W. W. Dolan, "Field em
issue ", Advance in Electr
on Physics, 8, 89 (1956)] and A
Valanche type and NEA type semiconductors [J.
A. Burton, "Electron emissi
on from silicone ”, Phys. Re
v. , 108, 1342 (1957)] or MgO
["Tung-sol confirms cold"
cathode tube ", Electronics
News (26. Jan. 1959)], and a photocathode is also known.

On the other hand, as an example of a thin film type, MIM [C.
A. Mead, "The tunnel-emissi
on amplifier, J.M. Appl. Phys
s. , 32, 646 (1961)] and Spindt type [C. A. Spindt, "Physical pro
parties of thin-film field
demission cathodes with m
olybdenum cones ", J. Appl. P
hys. , 47, 5248 (1976)] or a surface conduction electron-emitting device [M. I. Elinson, Rad
io Eng. Electron Phys. , 10,
(1965)].

The surface conduction electron-emitting device utilizes the phenomenon that electron emission occurs when a current flows in a small-area thin film formed on a substrate in parallel with the film. Examples of the surface conduction electron-emitting device include a device using a SnO ₂ (Sb) thin film developed by Elinson and others, and a device using an Au thin film [G. Dittmer: "
Thin Solid Films ", 9, 317 (1
972)], an ITO thin film [M. Hartwe
ll and C.I. G. FIG. Fonstad: "IEEE
Trans. ED Conf. ", 519 (197
5)], and those based on carbon thin films [Hisashi Araki et al .: Vacuum, Vol. 26, No. 1, p. 22, p. 22 (1983)] and the like have been reported.

In JP-A-1-200532 and JP-A-2-56822, a fine particle film is arranged between electrodes, and an electron emission portion is provided by applying a current to the fine particle film to provide an electron emission portion. The elements are shown. The configuration of the present invention may be used for the envelope of any of these electron generating devices.

[0058]

EXAMPLES (Example 1) Next, FIGS. 5 and 6 showing a method for manufacturing an image display device of the present invention as process diagrams will be specifically described below. FIG. 2 is a cross-sectional view of the image display device manufactured by the method.

5, 6 and 2, 1 is an insulating substrate, 2 is an electrode, 3 is an insulating layer, 4 is an electron-emitting device, 5 is a frame member constituting an envelope, 6 is a frit material, 7 Is a face plate including an image display surface. The steps shown in FIGS. 5 and 6 are as follows. (1) A soda lime glass was used as the outer frame member 5, and cut into a predetermined size, and the exhaust hole 32 was formed by grinding (see FIG. 6A). (2) A predetermined portion of the outer frame member 5 was ground to form a sealing material storage portion (see FIG. 6B). (3) Low melting glass (Nippon Electric Glass Co., Ltd.) is injected into the sealing material storage portion of the outer frame member 5 by an injection method using a dispenser.
LS / 3081) and ethylcellulose dissolved in a solvent, and the resulting solution was applied to form an outer frame (FIG. 6).
c). (4) Next, a blue plate glass is used as the rear plate 1,
After sufficiently washing with an organic solvent, a control electrode 2 and an insulating layer 3 were formed by a vacuum deposition technique and a photolithography technique, and then a device electrode 10 made of Ni was formed.
At this time, the distance between the device electrodes is 3 μm, and the width of the device electrodes is 5 μm.
00 μm and its thickness was 1000 °. (5) Next, after applying a solution containing organic palladium (manufactured by Okuno Pharmaceutical Co., Ltd., ccp-4230) to a predetermined portion,
A heat treatment was performed at 300 ° C. for 10 minutes to form a fine particle film 11 composed of palladium oxide (PdO) fine particles (average particle diameter: 70 °). Its width (element width) W is 300 μm
And it was arranged at a substantially central portion of the device electrode 10. The film thickness was 100 ° and the sheet resistance was 5 × 10 4 Ω / □.

Here, the fine particle film described here is a film in which a plurality of fine particles are gathered, and has a fine structure not only in a state where the fine particles are individually dispersed and arranged, but also in a state where the fine particles are adjacent to each other or overlap each other ( (Including an island shape), and the particle diameter means a diameter in a state where the particle shape can be recognized in the above state. (6) Next, a voltage was applied between the device electrodes 10 and the fine particle film 11 was subjected to an energization process (forming process) to form an electron emission portion.

Further, the surface conduction electron-emitting device used in the present invention will be described in detail. As a fine particle film containing an electron-emitting material, a film of conductive fine particles having a particle size of tens to several μm or a particle size of Examples include a carbon thin film in which conductive fine particles are dispersed. Among them, Pd, Ag, Au, Ti, In, Cu, C
metals such as r, Fe, Zn, Sn, Ta, W, Pb;
_{dO, SnO 2, In 2 O} 3, PbO, oxide conductor, such as _{Sb 2 O 3; HfB 2,} ZrB 2, LaB 6, CeB 6, Y
Borides such as B ₄ and GdB ₄ ; TiC, ZnC, HfC,
Carbides such as TaC, SiC and WC; TiN, ZrN,
Nitrides such as HfN; semiconductors such as Si and Ge; carbon; AgMg; NiCu; PbSn. These films are formed by a vacuum evaporation method, a sputtering method, a chemical vapor deposition method, a dispersion coating method, a dipping method, a spinner method, or the like.

Further, as the structure of the control electrode 2, as described in the present embodiment, in addition to the structure formed and controlled on the back surface of the electron beam generator, an electron passage hole is provided above the electron beam generator. And a simple matrix structure. (7) Next, the rear plate 1, the outer frame 5, and the face plate 7 on which the electron beam generator is formed are arranged at predetermined positions.
The layers are laminated and pressurized with a 1 kg weight from above, and the sealing heat treatment temperature is 410 ° C. in the air, and the sealing heat treatment time is 60 min.
Was fired under the above conditions to form an image display device whose partial cross-sectional view is shown in FIG.

As described above, according to the present invention, a structure in which the sealing material 6 is not exposed on the inner surface of the envelope formed by the rear plate 1 or the face plate 7 and the outer frame member 5 can be provided. Deterioration of the non-evaporable getter previously arranged in the image display device in the sealing step was suppressed, and an image display device including a non-evaporable getter having good adsorption characteristics was obtained.

(Embodiment 2) FIG. 3 is a partial sectional view of an outer frame 5 having still another structure. In the figure, 1 is a rear plate, 2 is an electrode, 4 is an electron-emitting device, 5 is an outer frame member, 6 is a sealing material for bonding, 7 is a face plate, and 8 is an outer frame member 5 and a face plate 7. And a sealing material 9 for joining the rear plate 1 and the joining frame 9 in advance.
Is a joint frame.

In this embodiment, as shown in the figure, a groove for accommodating the sealing material 6 is formed in the outer frame member 5 in advance by a method such as cutting, and the outer frame member 5 is attached to the face plate 7 by frit or the like. To join. The frit used here is a material having a higher melting point than a frit used in a later step, or a crystallized frit. Next, the sealing material 6 to be finally used for forming the hermetic container is fixed in the groove for storing the sealing material provided in the previous step by a process called temporary baking.

Next, after fixing the joining frame 9 at a desired position on the rear plate, an electron-emitting device, a non-evaporable getter, and the like used for the image display device were arranged to form a rear plate.

Next, the face plate member and the rear plate were joined with a sealing material 6 to produce an airtight container. At this time, since the part to be finally joined is made of the sealing material in the groove arranged in the outer frame member, the sealing material is not exposed on the inner surface of the container. As a result, the same effect as in Example 1 was confirmed.

[0068]

As described above, according to the present invention,
In an image display device having a non-evaporable getter in an envelope, an outer frame structure in which a sealing material at a joint portion is not exposed to the inner surface of an airtight container is released from the sealing material at the time of sealing. It is possible to realize an image display device including a non-evaporable getter that suppresses deterioration of the non-evaporable getter due to gas and maintains good adsorption characteristics.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view showing one example of an image display device of the present invention.

FIG. 2 is a schematic sectional view showing another example of the image display device of the present invention.

FIG. 3 is a schematic sectional view showing another example of the image display device of the present invention.

FIG. 4 is a schematic partial sectional view of an example of a conventional image display device.

FIG. 5 is a process chart showing a joining step in one example of the production method of the present invention.

FIG. 6 is a process chart showing outer frame formation in one example of the production method of the present invention.

FIG. 7 is a schematic partial sectional view showing an example of a conventional fluorescent display tube.

FIG. 8 is a schematic partial sectional view showing one example of a conventional plasma display.

FIG. 9 is a partial cross-sectional view showing an example of an installation location of a non-evaporable getter.

FIG. 10 is a partial cross-sectional view showing another example of the installation location of the non-evaporable getter.

[Explanation of symbols]

 5, 21 Outer frame member 6, 22 Sealing material 3 Outer frame 1, 24 Rear plate (insulating substrate) 2, 15, 17, 23, 25, 32 Electrode 3, 33 Insulating layer 18 Fine particle film 9, 30 Glass substrate 10, 31 transparent conductive film 11, 26 phosphor 12 metal back 13 face plate 27 display unit 28 control electrode 29 filament 32 exhaust hole 50 non-evaporable getter

Claims (10)

[Claims] A first container member having at least an image display surface, a second container member arranged to face the container member, and an intermediate container member arranged between the two container members. In an image display device comprising an envelope and having a non-evaporable getter in the envelope, the inside of the envelope of each container member is in direct contact with each other at the joint thereof, and An image display device, characterized in that a sealing material facing the outside of the envelope is hermetically bonded at the joining portion other than the contact portion. A first container member having at least an image display surface, a second container member arranged opposite to the container member, and an intermediate container member arranged between the two container members. In an image display device comprising an envelope and having a non-evaporable getter in the envelope, a concave groove is formed at a joint between the first and second container members, and a joint is formed between the intermediate container member and the intermediate container member. An image display device comprising: a projection having a convex portion, wherein the sealing member is in direct contact with each other at a joint portion of each container member, and a sealing material is hermetically bonded at the uneven portion. 3. A first container member having at least an image display surface, a second container member arranged to face the container member, and an intermediate container member arranged between the two container members. In an image display device comprising an envelope and having a non-evaporable getter in the envelope, a convex projection is provided at a joint between the first and second container members, and an intermediate container member is provided. An image display device comprising: a concave groove portion at a joint portion of (a), wherein the joint portion of each container member is in direct contact with each other, and a sealing material is hermetically bonded at the uneven portion. 4. A container member constituting an envelope, the container member comprising:
A container plate having an image display surface, a second container member having a rear plate disposed opposite to the face plate, and an intermediate container member interposed at a peripheral portion between the face plate and the rear plate. The image display device according to claim 1, wherein the image display device is an outer frame member. 5. An image display surface of the face plate is provided with a fluorescent member and a voltage applying means for emitting light by excitation of an electron beam, and at least one or more electron beam sources are formed on the rear plate. The image display device according to claim 4, wherein: 6. A first container member having at least an image display surface, a second container member disposed opposite to the container member, and an intermediate container member disposed between the two container members. In a method for manufacturing an image display device, comprising: a step of forming an envelope; and a step of evacuating the space inside the envelope after the step. 3. The method for manufacturing an image display device according to claim 1, wherein the contact portions are directly contacted with each other, and then the joint is hermetically sealed around the contact portion with a sealing material. 7. A first container member having at least an image display surface, a second container member arranged to face the container member, and an intermediate container member arranged between the two container members. A method for manufacturing an image display device, comprising: a step of forming an envelope; and a step of evacuating a space inside the envelope after the step. A concave groove formed in a joint between the first and second container members. In addition, the convex protrusion is opposed to the joint portion of the intermediate container member, and at the joint portion of each container member, they are directly in contact with each other, and a sealing material is arranged in the concave groove portion at the joint portion, A method for manufacturing an image display device, wherein sealing is performed between a projection and a projection. 8. A first container member having at least an image display surface, a second container member arranged opposite to the container member, and an intermediate container member arranged between the two container members. In a method for manufacturing an image display device, comprising a step of forming an envelope and a step of evacuating a space inside the envelope after the step, a convex shape is formed at a joint between the first and second container members. Protrusions, also, facing the concave groove to the joint of the intermediate container member, at the joint of each container member, in direct contact with each other, and place a sealing material in the concave groove at the joint, A method for manufacturing an image display device, wherein sealing is performed between a projection and a projection. 9. The container member constituting the envelope includes a first member.
Is a face plate having an image display surface, a second container member is a rear plate arranged to face the face plate, and an intermediate member is interposed at a peripheral portion between the face plate and the rear plate. 9. The method according to claim 6, wherein the image display device is an outer frame member. 10. A fluorescent member which emits light by excitation of an electron beam and voltage applying means are formed on an image display surface of the face plate, and at least one or more electron beam generating sources are formed on the rear plate. The method for manufacturing an image display device according to claim 9, wherein: