JP2008235220A - Image display apparatus and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an image display apparatus which can adsorb undesired gas molecules for a long period and has an inexpensive price and a favorable vacuum life, and its manufacturing method. <P>SOLUTION: The image display apparatus has an envelope 10 having a first substrate 11 and a second substrate 12 whose peripheries are joined, a display surface 16 disposed on the first substrate, a plurality of electron sources disposed on the second substrate, and as a getter box, a first getter box 50 joined to the envelope and defining a first getter chamber 54, and a second getter box 60 installed overlappingly on the first getter box and defining a second getter chamber 62. The fist getter chamber communicates with the envelope through a first opening 29 formed on the envelope; and the second getter chamber communicates with the first getter chamber through a second opening 63 formed on the first getter box; and the first and second openings are installed at positions different from each other in the plane direction of the envelope. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an image display device including an envelope provided with a display surface and a getter that adsorbs gas in the envelope.

  In recent years, as a lightweight and thin image display device, a liquid crystal display (hereinafter referred to as LCD) that controls the intensity of light using the orientation of liquid crystal, a plasma display panel (hereinafter referred to as LCD) that emits phosphors by ultraviolet rays of plasma discharge. (Referred to as PDP), field emission display (hereinafter referred to as FED) that emits a phosphor with an electron beam of a field emission electron emitter, and surface conduction electron that emits a phosphor with an electron beam of a surface conduction electron emitter. Emission displays (hereinafter referred to as SEDs) have been developed.

  For example, an FED generally has a front substrate and a rear substrate that are opposed to each other with a predetermined gap, and these substrates are surrounded by a vacuum by surrounding each other through a rectangular frame-shaped side wall. Make up the vessel. A phosphor screen is formed on the inner surface of the front substrate, and a number of electron-emitting devices are provided on the inner surface of the rear substrate as electron emission sources that excite the phosphor to emit light.

  In order to support an atmospheric pressure load applied to the back substrate and the front substrate, a plurality of support members are disposed between these substrates. The potential on the back substrate side is almost the ground potential, and 10 kV, for example, is applied as an anode voltage to the phosphor screen. An image is displayed by irradiating the phosphors of red, green, and blue constituting the phosphor screen with the electron beams emitted from the electron-emitting devices and causing the phosphors to emit light.

  In such an FED, it is important to maintain a high degree of vacuum inside the vacuum envelope. If the degree of vacuum is low, stable electron emission cannot be performed, and the life of the image display device is reduced.

Therefore, in order to maintain a high degree of vacuum inside the vacuum envelope for a long period of time, it is usual to provide a getter that adsorbs undesired gas molecules inside the vacuum envelope. As an arrangement configuration of such getters, for example, a configuration has been proposed in which a getter chamber is provided in the periphery of the envelope of a fluorescent display tube, and a getter is provided in the getter chamber (see, for example, Patent Document 1).
Utility Model Registration No. 2547509

  In the image display device described above, it is usual to use a non-evaporable getter whose main component is titanium or zirconium in order to reduce the getter chamber. However, non-evaporable getters mainly composed of titanium or zirconium have a small amount of adsorption of carbon monoxide and carbon dioxide, so that it is possible to sufficiently secure the amount of adsorption of undesired gas generated in the envelope. It becomes difficult.

  In this case, it can be considered that a barium getter having a large adsorption amount of carbon monoxide and carbon dioxide is used as an auxiliary. However, since gas molecules are not selectively adsorbed to the getter, the non-evaporable getter adsorbs carbon monoxide and carbon dioxide even when a barium getter is provided. Therefore, in order to increase the vacuum life, it is necessary to increase the amount of non-evaporable getter after all. Since non-evaporable getters are generally expensive, there is a problem that the cost of the image display device increases when the installation amount is increased.

  Usually, the non-evaporable getter needs to be activated before being operated to diffuse the surface oxide film to the inside and expose a clean metal surface. If this activation is performed in the exhaust process of exhausting an undesired gas inside the envelope in the manufacturing process of the device, there is a problem that the non-evaporable getter is contaminated by the gas and cannot be activated sufficiently. Therefore, it is conceivable to activate the non-evaporable getter by heating it from the outside after exhausting. As a method of heating from the outside, for example, heating by high frequency or heating by energization can be considered.

  However, in the case of heating by high frequency, since the materials constituting the image display device are also heated together, there is a risk that the front substrate and the rear substrate will rise in temperature and be destroyed. In heating by energization, it is necessary to provide a conducting wire in the getter chamber, but the conducting wire needs to be an iron-nickel alloy having a thermal expansion close to that of the glass constituting the getter box. Since such an alloy has a large electric resistance, heat generation due to energization increases and the getter box may be destroyed by thermal stress.

  The present invention has been made in view of the above points, and provides an image display device that can adsorb undesired gas molecules over a long period of time, is inexpensive and has a good vacuum life, and a manufacturing method thereof.

An image display device according to an aspect of the present invention includes an envelope having a first substrate and a second substrate whose peripheral portions are joined to each other, a display surface disposed on the first substrate, and the second substrate. A plurality of electron sources disposed in the envelope, a getter box which is joined to the envelope and defines a getter chamber communicating with the inside of the envelope, and a getter provided in the getter chamber,
The getter box includes a first getter box joined to the envelope and defining a first getter chamber, and a second getter box provided to overlap the first getter box and defining a second getter chamber. And the first getter chamber communicates with the envelope through a first opening formed in the envelope, and the second getter chamber includes the first getter box and the second getter chamber. The first opening and the second opening communicate with the first getter chamber through a second opening formed continuously in the box, and the first opening and the second opening are provided at different positions in the surface direction of the envelope.

An image display device manufacturing method according to another aspect of the present invention includes an envelope having a first substrate and a second substrate whose peripheral portions are bonded to each other, a display surface disposed on the first substrate, A plurality of electron sources disposed on the second substrate; a getter box which is joined to the envelope and defines a getter chamber communicating with the interior of the envelope; and a getter provided in the getter chamber; A method of manufacturing an image display device comprising:
A getter is disposed in each of the first getter box and the second getter box, the first getter box in which the getter is disposed is hermetically joined to the envelope, and the envelope is formed by the first getter box. A first getter chamber that communicates with the inside of the envelope through a first exhaust hole formed in the envelope, exhausts the first getter chamber that communicates with the inside of the envelope, and the second getter box. The interior is evacuated independently of the envelope, and after the evacuation is completed, the second getter box is defined by overlapping the second getter box over the first getter box and hermetically joining the second getter chamber, After the getter box is hermetically joined, the first getter chamber and the second getter chamber are communicated with each other.

  According to the aspects of the present invention, it is possible to provide an image display device that can adsorb undesired gas molecules over a long period of time, has a low vacuum, and has a good vacuum life, and a manufacturing method thereof.

Hereinafter, an embodiment in which an image display device of the present invention is applied to an FED will be described in detail with reference to the drawings.
As shown in FIGS. 1 and 2, the FED includes a front substrate 11 and a rear substrate 12 each made of a rectangular glass plate, and these substrates are arranged to face each other at a predetermined interval. The back substrate 12 as the second substrate is formed with a size larger than that of the front substrate 11 as the first substrate. The front substrate 11 and the back substrate 12 constitute a flat envelope 10 whose peripheral portions are joined to each other through a rectangular frame-shaped side wall 18 and the inside is maintained in a vacuum state. The side wall 18 functioning as a bonding member is sealed to the peripheral portion of the front substrate 11 and the peripheral portion of the back substrate 12 by sealing materials 19 and 23 such as low melting point glass and low melting point metal, for example. Are joined.

  A plurality of plate-like support members 14 are provided inside the envelope 10 in order to support an atmospheric pressure load applied to the front substrate 11 and the rear substrate 12. These support members 14 extend in a direction parallel to one side of the envelope 10 and are arranged at a predetermined interval along a direction orthogonal to the one side. Both ends in the longitudinal direction of each support member 14 are opposed to the side wall 18 with a gap. The support member is not limited to a plate shape, and may be a column shape.

  As shown in FIGS. 2 and 3, a phosphor screen 16 that functions as a display surface is formed on the inner surface of the front substrate 11. The phosphor screen 16 is configured by arranging red, green, and blue phosphor layers R, G, and B, and a black light-shielding layer 20 positioned between the phosphor layers. The phosphor layers R, G, and B of three colors of red, green, and blue are formed alternately with a gap in the first direction, and the phosphor layers of the same color are in the second direction orthogonal to the first direction. Are arranged with a gap in between. Each of the phosphor layers R, G, and B constitutes a subpixel with single colors of red, green, and blue, and constitutes one pixel by combining the subpixels of three colors.

  A metal back layer 17 made of an aluminum film or the like is formed on the phosphor screen 16. According to the present embodiment, the metal back layer 17 has a plurality of divided regions that are divided in the vertical direction and the horizontal direction and are electrically separated from each other. The electrically separated metal back layer 17 is provided so as to overlap the phosphor layers R, G, and B, respectively.

  As shown in FIG. 2, on the inner surface of the back substrate 12, a large number of electron-emitting devices 22 each emitting an electron beam are provided as electron sources for exciting the phosphor layers R, G, and B on the image display surface. ing. That is, a conductive cathode layer 24 is formed on the inner surface of the back substrate 12, and a silicon dioxide film 26 having a large number of cavities 25 is formed on the conductive cathode layer. On the silicon dioxide film 26, a gate electrode 28 made of molybdenum, niobium or the like is formed. A cone-shaped electron-emitting device 22 made of molybdenum or the like is provided in each cavity 25 on the inner surface of the back substrate 12. These electron-emitting devices 22 are arranged in a plurality of columns and a plurality of rows corresponding to the pixels.

  The conductive cathode layer 24 and the gate electrode 28 are formed in stripes in directions orthogonal to each other, and a large number of wirings 21 for supplying a potential to the conductive cathode layer and the gate electrode are provided on the periphery of the back substrate 12. Is formed.

  In such an FED, when displaying an image, an anode voltage is applied to the phosphor screen 16 and the metal back layer 17, and the electron beam emitted from the electron-emitting device 22 is accelerated by the anode voltage to the phosphor screen. Collide. Thereby, the phosphor layers R, G, and B of the phosphor screen 16 are excited to emit light, and a color image is displayed.

  As shown in FIG. 2, the FED includes a first getter box 50 attached to the outer peripheral surface of the envelope 10 and a second getter box 60 attached to the first getter box. The first getter box 50 is formed, for example, in a rectangular box shape using the same glass material as that of the front substrate 11 and the rear substrate 12, and is joined to a side edge portion of the outer surface of the rear substrate 12 by a sealing material 52. The first getter chamber 54 is defined by the first getter box 50 and the back substrate 12. The first getter chamber 54 communicates with the inside of the envelope 10 through a first exhaust hole (first opening) 29 formed in the back substrate 12.

  The second getter box 60 is formed, for example, in a rectangular box shape using the same glass as the front substrate 11 and the rear substrate 12, and is joined to the outer surface of the first getter box 50 by a sealing material 53. A second getter chamber 62 is defined by the bottom walls of the second getter box 60 and the first getter box 50. The second getter chamber 62 communicates with the first getter chamber 54 through a second exhaust hole (second opening) 64 formed in the bottom wall of the first getter box 50 and the upper surface of the second getter box 60. Thus, the first getter chamber 54 and the second getter chamber 62 constitute a vacuum space communicating with the inside of the envelope 10. A third exhaust hole 67 for exhausting the inside of the getter box is formed in the bottom wall of the second getter box 60. The third exhaust hole 67 is airtightly closed by the lid member 68.

  The first exhaust hole 29 and the second exhaust hole 64 are formed at different positions where the arrangement positions thereof are shifted from each other in the surface direction of the envelope 10. This is to prevent the scattering material of the first getter box 50 from entering the inside of the envelope 10 in the communication process of the getter chamber described later. In addition, a fourth exhaust hole 30 (see FIG. 4) for exhausting the inside of the envelope 10 in an exhaust process to be described later is provided at the end of the envelope 10 opposite to the first getter chamber 54. Yes.

  In the first getter chamber 54, an evaporation type getter 56 made of, for example, barium is formed on the inner surface of the getter box 50. Inside the second getter chamber 62, for example, a non-evaporable getter 66 mainly composed of zirconium is disposed.

  According to the FED configured as described above, the gas released into the envelope 10 during operation enters the first getter chamber 54 through the first exhaust hole 29, and further passes through the second exhaust hole 64 to the second exhaust port 64. It flows into the two getter chamber 62. Among the released gases, carbon monoxide and carbon dioxide are adsorbed by the evaporative getter 56 in the first getter chamber 54, and the gas mainly composed of hydrogen that has not been adsorbed by the evaporable getter 56 is the second getter chamber. 62 and is adsorbed by the non-evaporable getter 66. Thereby, the evaporative getter 56 and the non-evaporable getter 66 can selectively adsorb undesired gases. Therefore, the amount of the non-evaporable getter 66 that adsorbs carbon monoxide and carbon dioxide is reduced, and an FED with a long vacuum life can be obtained with a small amount of getter.

Next, the manufacturing method of FED which has the said structure is demonstrated in detail.
First, the phosphor screen 16 is formed on the plate glass to be the front substrate 11. In this method, a plate glass having the same size as the front substrate 11 is prepared, and a phosphor stripe pattern is formed on the plate glass by a plotter machine. The plate glass on which the phosphor stripe pattern is formed and the plate glass for the front substrate are placed on a positioning jig and set on an exposure table. In this state, the phosphor screen is formed on the glass plate which becomes the front substrate 11 by exposing and developing. Thereafter, a metal back layer 17 is formed on the phosphor screen 16.

  Subsequently, the electron-emitting device 22 is formed on the plate glass for the back substrate 12. First, a conductive cathode layer 24 is formed on a plate glass, and an insulating film of a silicon dioxide film is formed on the cathode layer by, for example, a thermal oxidation method, a CVD method or a sputtering method. Thereafter, a metal film for forming a gate electrode such as molybdenum or niobium is formed on the insulating film by, for example, sputtering or electron beam evaporation. Next, a resist pattern having a shape corresponding to the gate electrode to be formed is formed on the metal film by lithography. Using this resist pattern as a mask, the metal film is etched by wet etching or dry etching to form the gate electrode 28.

  After that, the cavity 25 is formed by etching the insulating film by wet etching or dry etching using the resist pattern and the gate electrode 28 as a mask. Then, after removing the resist pattern, a peeling layer made of, for example, aluminum or nickel is formed on the gate electrode 28 by performing electron beam evaporation from a direction inclined by a predetermined angle with respect to the back substrate surface. After that, for example, molybdenum is deposited by electron beam deposition as a material for forming the cathode from a direction perpendicular to the surface of the back substrate. As a result, the electron-emitting device 22 is formed inside the cavity 25. Next, the release layer is removed together with the metal film formed thereon by a lift-off method.

  Subsequently, a first getter box 50 having an upper surface opened and a sealed second getter box 60 are prepared. The wall of the portion of the first getter box 50 and the second getter box 60 that forms the second exhaust hole 64, here, a part of the bottom wall of the first getter box 50 and the ceiling wall 74 of the second getter box 60. Blast the part and keep it thinner than the surrounding wall. A third exhaust hole 67 is formed in advance in the bottom wall of the second getter box 60. An evaporable getter material mainly composed of barium is disposed in the first getter box 50, and a non-evaporable getter 66 mainly composed of at least one of zirconium and titanium is disposed in the second getter box 60 in the third exhaust. It is inserted from the hole 67 and arranged.

  Next, the support member 14 and the side wall 18 are attached to the rear substrate 12 using frit glass, and further, frit glass as a sealing material is applied on the side wall of the rear substrate and the outer periphery of the corresponding front substrate 11. And calcining. Further, frit glass as a sealing material is applied to the end portion of the first getter box 50 facing the back substrate 12 and the bottom portion facing the second getter box 60 and pre-baked.

  As shown in FIG. 4, the back substrate 12, the front substrate 11, and the first getter box 50 are respectively arranged at predetermined positions, installed in an exhaust cart, and put into an inline type continuous furnace. In addition, the second getter box 60 is installed in an exhaust cart independently of the rear substrate or the like and placed in an in-line continuous furnace. At this time, the wall surface breaking member 76 is introduced at a predetermined position in the second getter box 60. As the wall breaking member 76, for example, a needle-like metal member having a sharp point can be used.

  As shown in FIG. 4, the back substrate 12 is placed in a state of being connected to the exhaust line 70 of the exhaust cart in the fourth exhaust hole 30 for exhausting the inside of the envelope. The exhaust cart exhausts the inside of the envelope through the exhaust line 70 and the fourth exhaust hole 30 by the main pulling pump and the rough pulling pump. As those structures, known structures can be used, and detailed description thereof is omitted. Further, an exhaust line 72 different from the above is connected to the third exhaust hole 67 of the second getter box 60 so that the inside of the second getter box 60 can be exhausted separately from the envelope.

  Thereafter, the back substrate 12, the front substrate 11, and the first getter box 50 are heated to 450 ° C. while moving in the continuous furnace. At this time, in order to prevent oxidation of the electron-emitting device 22, the heating unit of the continuous furnace is controlled so that nitrogen is introduced and circulated to form a non-oxidizing atmosphere and the oxygen concentration becomes a predetermined ratio or less.

The second getter box 60 is heated to 450 ° C. while moving in the continuous furnace together with the envelope. The inside of the second getter box 60 is discarded immediately after the temperature rises, and the pressure inside the second getter box 60 becomes 10 ⁻² Pa or less at 300 ° C. or higher when the activation of the non-evaporable getter 66 starts. 66 is activated efficiently with little unwanted gas contamination.

  On the other hand, the frit glass is melted by heating, and the back substrate 12, the front substrate 11, the side wall 18, the support member 14, and the first getter box 50 are sealed to each other by the frit glass, and the enclosure having the first getter box. A vessel 10 is formed. After the frit glass is solidified, the exhaust inside the envelope 10 is started through the exhaust line 70.

  During exhaust, the heating temperature is set to 400 ° C., and exhaust is continued while moving the envelope 10 at a predetermined speed. As a result, gas components desorbed from the surfaces of the front substrate 11 and the back substrate 12 are discharged to the outside of the envelope 10. In addition, the activation of the non-evaporable getter 66 disposed in the second getter box 60 is continued, and a surface-clean metal surface is exposed.

  As shown in FIG. 5, after the inside of the envelope 10 is evacuated to a predetermined degree of vacuum, the fourth exhaust hole 30 is hermetically sealed by a lid member 80 previously installed in the exhaust line 70 of the exhaust cart. . Further, after the inside of the second getter box 60 is evacuated to a predetermined degree of vacuum, the third exhaust hole 67 is hermetically sealed by a lid member 68 that is also set in advance in another exhaust line 72.

  Next, as shown in FIG. 6, the second getter box 60 is disposed on the bottom surface of the first getter box 50 and is locally heated at 450 ° C. to be joined to the first getter box 50. Thereafter, the temperature of the entire envelope 10 is lowered, and when the temperature of the entire envelope is lowered to a desired temperature, the envelope is taken out from the continuous furnace. Thereby, an envelope including the first and second getter boxes 50 and 60 is formed.

  With the manufacturing method described above, the non-evaporable getter 66 can be activated simultaneously during the exhaust process, and an inexpensive process can be achieved, and the non-evaporable getter is heated and activated after exhaust. You can avoid troubles.

  After the envelope 10 is taken out, the evaporation type getter 56 disposed in the first getter box 50 is heated by high frequency heating to form a getter film on the inner surface of the getter box. Since this getter material is mainly composed of barium, the deposition temperature is relatively low and the heating time may be within 30 seconds. Therefore, the rate at which the constituent members of the FED are heated by the high-frequency heating is small, and the constituent members are not adversely affected.

  After the getter film is deposited, the wall of the first getter box 50 and the portion corresponding to the second exhaust hole 64 of the second getter box 60 is destroyed by the wall-breaking member 76 introduced in advance into the second getter box 60. Thus, the second exhaust hole is formed, and the second getter box 60 and the first getter box 50 are communicated with the same vacuum space. At this time, since the disposition positions of the first exhaust hole 29 and the second exhaust hole 64 are formed at different positions in the surface direction of the envelope 10, debris caused by the breakage of the first getter box wall is caused by the envelope. 10 does not enter inside, and problems such as deterioration of pressure resistance due to the scattering material can be prevented.

  From the above, according to the present embodiment, it is possible to provide an image display device that can adsorb undesired gas molecules over a long period of time, has a low vacuum, and has a good vacuum life, and a method for manufacturing the same.

  The present invention is not limited to the above-described embodiment, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. In addition, various inventions can be formed by appropriately combining a plurality of components disclosed in the embodiment. Some constituent elements may be deleted from all the constituent elements shown in the embodiments, or constituent elements over different embodiments may be appropriately combined.

  In the above-described embodiment, the FED having the front substrate having the phosphor screen on the inner surface has been described as an example. However, the present invention is not limited to this, and other devices such as SED, PDP, and fluorescent display tube are used. Even can be applied. Further, the getter is not limited to barium and zirconium, but can be variously selected according to the vacuum characteristics and emission gas characteristics of the device used.

  The size, shape, and number of getter chambers and getter boxes are not limited to the above embodiment, and can be changed. For example, the getter chamber is provided on the side surface of the vacuum envelope by cutting out a part of the side wall. May be. Needless to say, suitable shapes such as the shape, size, arrangement, and material of the structure constituting the FED can be selected.

FIG. 1 is a perspective view showing a partially broken FED according to an embodiment of the present invention. FIG. 2 is a cross-sectional view of the FED along line AA in FIG. FIG. 3 is an enlarged plan view showing a part of the front substrate and phosphor screen of the FED. FIG. 4 is a diagram schematically showing an exhaust process in manufacturing the FED. FIG. 5 is a diagram schematically showing a sealing step in manufacturing the FED. FIG. 6 is a diagram schematically showing a process of connecting the first getter chamber and the second getter chamber in the manufacture of the FED.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Envelope, 11 ... Front substrate, 12 ... Back substrate, 14 ... Support member,
16 ... phosphor screen, 17 ... metal back layer, 18 ... side wall,
22 ... Electron-emitting device, R, G, B ... Phosphor layer, 29 ... First exhaust hole,
50 ... first getter box, 54 ... first getter chamber, 56 ... evaporative getter,
60 ... second getter box, 62 ... second getter chamber, 64 ... second exhaust hole,
66 ... Non-evaporable getter, 67 ... Third exhaust hole

Claims (8)

An envelope having a first substrate and a second substrate joined together at the periphery;
A display surface disposed on the first substrate;
A plurality of electron sources disposed on the second substrate;
A getter box that is joined to the envelope and defines a getter chamber communicating with the inside of the envelope;
A getter provided in the getter chamber,
The getter box includes a first getter box joined to the envelope and defining a first getter chamber, and a second getter box provided to overlap the first getter box and defining a second getter chamber. And the first getter chamber communicates with the envelope through a first opening formed in the envelope, and the second getter chamber includes the first getter box and the second getter chamber. An image which communicates with the first getter chamber through a second opening formed continuously in the box, and the first opening and the second opening are provided at different positions in the surface direction of the envelope. Display device.   The getter has an evaporable getter containing barium disposed in the first getter chamber and a non-evaporable getter mainly composed of zirconium or titanium disposed in the second getter chamber. The image display device according to claim 1. An envelope having a first substrate and a second substrate bonded together at peripheral portions, a display surface disposed on the first substrate, a plurality of electron sources disposed on the second substrate, A getter box that defines a getter chamber that is joined to an envelope and communicates with the inside of the envelope, and a getter provided in the getter chamber.
Place getters in the first getter box and the second getter box,
A first getter box in which the getter is arranged is hermetically joined to the envelope, and the first getter box communicates with the inside of the envelope through a first exhaust hole formed in the envelope. Define a getter room,
Exhausting the first getter chamber communicating with the inside of the envelope and the envelope;
Exhausting the inside of the second getter box independently of the envelope;
After the exhaust is finished, the second getter box is defined by overlapping the second getter box on the first getter box and airtightly joining the two.
A method of manufacturing an image display device, wherein the first getter chamber and the second getter chamber are communicated after the second getter box is airtightly joined.   An evaporable getter is disposed in the first getter box, and after exhausting the envelope and the first getter chamber, the evaporative getter is heated to form a getter film in the first getter chamber. A method for manufacturing the image display device according to 3.   5. The image display device according to claim 3, wherein a non-evaporable getter is disposed in the second getter box, and the non-evaporable getter is heated and activated while exhausting the second getter box. Production method.   4. The method of manufacturing an image display device according to claim 3, wherein a second opening is formed in the first getter box and the second getter box so that the second getter chamber communicates with the first getter chamber.   The getter and the wall-breaking member are disposed in the second getter box, and the second getter box is hermetically joined to the first getter box, and then the first getter box and the second getter are joined by the wall-breaking member. The method for manufacturing an image display device according to claim 6, wherein a part of the box is broken to form the second opening.   The method for manufacturing an image display device according to claim 7, wherein the second opening formation scheduled portion of the wall surface of the first getter box and the second getter box is formed thinner than a peripheral wall thickness before the exhaust.

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