CN104533762B - A kind of piezoelectric film pump and preparation method thereof - Google Patents
A kind of piezoelectric film pump and preparation method thereof Download PDFInfo
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- CN104533762B CN104533762B CN201410787635.0A CN201410787635A CN104533762B CN 104533762 B CN104533762 B CN 104533762B CN 201410787635 A CN201410787635 A CN 201410787635A CN 104533762 B CN104533762 B CN 104533762B
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- piezoelectric film
- pump
- cover plate
- channel layer
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Abstract
The invention discloses a kind of piezoelectric film pump and preparation method thereof, include cover plate, piezoelectric film, channel layer and substrate from top to bottom, fixing connection between cover plate, piezoelectric film, channel layer and substrate, the upper surface of piezoelectric film and lower surface correspondence are coated with conducting film district, working area electrode that conducting film district includes piezoelectric film pump and the conducting region being connected with the working area electrode of piezoelectric film pump.The first through hole is offered on cover plate, first through hole is just to the working area electrode of the piezoelectric film pump of correspondence on piezoelectric film, fluid passage is offered on channel layer, one end of fluid passage is connected with the external world, fluid passage includes the second through hole, liquid storage tank through hole, receives liquid pool through hole and passage slotted eye, described second through hole is just to the first through hole, and the second through hole is all connected by passage slotted eye between liquid pool through hole and liquid storage tank through hole with receiving.Manufacture method is simple and convenient, can need not the equipment of costliness completely, can be widely popularized completely in whole manufacturing process, practical.
Description
Technical field
The present invention relates to a kind of piezoelectric pump and preparation method thereof, be specifically related to a kind of piezoelectric film pump and
Its manufacture method.
Background technology
Microfluid detection chip extensively should because having the features such as volume is little, easy of integration, save time
For fields such as biological detection, medical diagnosis, biochemical analysises.One is had in the use of microfluid
Indispensable parts, here it is miniflow pump.Microfluidic chip channel the least (micron order), nothing
Legal person is for going operation, so the work of all conveying liquid will have been gone by pump.Research is micro-at present
The pump that fluid is used has two kinds, and one is syringe pump, and one is peristaltic pump.Both pumps are
Commercially produce, the demand of various flow velocity can be met.But a problem is that, this pump
Bulky, external external at micro-fluid chip, it is connected with micro-fluid chip by conveying pipe.So,
Maximum impact limits the integrated of micro-fluid chip exactly, and the device of bulky complex also affects core
Being widely used of sheet.
Use the example being integrated on micro-fluid chip by pump quite a few, but all exist such-and-such
Shortcoming.Such as fluid flowing is discontinuous, flow rates is narrow, complex manufacturing technology, difficulty are integrated.
Summary of the invention
It is an object of the invention to the shortcoming overcoming above-mentioned prior art, it is provided that a kind of piezoelectric membrane
Pump and preparation method thereof, this piezoelectric pump can be integrated in microfluidic channel and serve as conduit wall, not exist
Own vol, it is possible to drive fluid to flow continuously, flow rates wide, and easy to make simply.
For reaching above-mentioned purpose, piezoelectric film pump piezoelectric film pump of the present invention depends on from top to bottom
Secondary include cover plate, piezoelectric film, for providing the channel layer of passage and substrate for fluid flowing,
It is connected with each other between cover plate, piezoelectric film, channel layer and substrate；
The upper surface of described piezoelectric film and lower surface correspondence are coated with conducting film district, and conducting film district includes pressure
The working area electrode of conductive film pump and the conducting district being connected with the working area electrode of piezoelectric film pump
Territory；
Offering the first through hole on described cover plate, the first through hole is just thin to piezoelectricity corresponding on piezoelectric film
The working area electrode of membrane pump, channel layer offers fluid passage, and one end of fluid passage is with extraneous
Being connected, fluid passage includes the second through hole, liquid storage tank through hole, receives liquid pool through hole and passage slotted eye,
Described second through hole is just to the first through hole, between the second through hole and receipts liquid pool through hole and liquid storage tank through hole
All it is connected by passage slotted eye.
Described piezoelectric film is to have polarized and without the piezoelectric membrane with piezoelectric effect of electrode layer.
Described cover plate, channel layer and substrate are by glass, silicon, silicon dioxide, pottery, organic glass
In glass, polypropylene, polyimides, politef, organosilan, paper, nylon and rubber one
Kind or it is modified or the material that is composited is made.
Liquid in described liquid storage tank through hole flow in the second through hole during resistance with receive liquid pool
Resistance during liquid in through hole flows in the second through hole is different；
Resistance and second during liquid in described second through hole flows in liquid storage tank through hole leads to
Liquid in hole is different to the resistance received during flowing in liquid pool through hole.
Described passage slotted eye is trapezium structure or y-type structure.
The manufacture method of piezoelectric film pump of the present invention comprises the following steps:
1) take the piezoelectric film of definite shape, piezoelectric film is fixed on fixture according to polarised direction, and
Upper surface and lower surface at described piezoelectric film plate conducting film respectively, make piezoelectric film upper surface and under
Surface is respectively formed plated film district, and described plated film district includes working area electrode and and the piezoelectricity of piezoelectric film pump
The conducting region that the working area electrode of membrane pump is connected；
2) take cover plate, channel layer and substrate, more on the cover board offer the first through hole, and at channel layer
On offer liquid storage tank through hole, receive liquid pool through hole, passage slotted eye and just to the first through hole second
Through hole, the first through hole just to the working area electrode of piezoelectric film pump on piezoelectric film, the most again by cover plate,
Piezoelectric film, channel layer and substrate are fixing from top to bottom to be connected, finally to connecting test on conducting region
Lead-in wire, obtains piezoelectric film pump.
The method have the advantages that
Piezoelectric film pump of the present invention include the most successively cover plate, piezoelectric film, channel layer and
Substrate, is connected with each other between cover plate, piezoelectric film, channel layer and substrate, the upper surface of piezoelectric film and
Lower surface correspondence is coated with conducting film district, conducting film district include piezoelectric film pump working area electrode and
The conducting region being connected with the working area electrode of piezoelectric film pump, the effect of conducting region is simply drawn
Go out electrode in order to convenient test.Offering the first through hole on cover plate, the first through hole is just on piezoelectric film
The working area electrode of corresponding piezoelectric film pump, channel layer offers fluid passage, fluid passage
One end be connected with the external world, fluid passage include the second through hole, liquid storage tank through hole, receive liquid pool lead to
Hole and passage slotted eye, described second through hole just to the first through hole, the second through hole with receive liquid pool through hole and
All it is connected by passage slotted eye between liquid storage tank through hole；First through hole and the second through hole be all in order to
There is provided oscillation space to piezoelectric film pump, be also that piezoelectric film pump applies to drive to the fluid in passage
The position of power, and manufacture method is simple and convenient, can need not completely in whole manufacturing process
The equipment of costliness, material, can be widely popularized completely, practical.
Accompanying drawing explanation
Fig. 1 is the structural representation of cover plate 2 of the present invention；
Fig. 2 is the structural representation of piezoelectric film 1 in the present invention；
Fig. 3 is the structural representation of channel layer 3 in the present invention；
Fig. 4 is the profile of heretofore described piezoelectric film pump；
Fig. 5 is the flow velocity test result of the piezoelectric film pump of embodiment one preparation in the present invention；
Fig. 6 be in the present invention embodiment one preparation piezoelectric film pump flow velocity with added amplitude and frequency
The situation of change of rate；
Fig. 7 is the passage of the microfluid system generated for microdroplet of embodiment two preparation in the present invention
The structural representation of layer 3.
Wherein, 1 it is piezoelectric film, 2 is cover plate, 3 is channel layer, 4 is working area electrode, 5 leads
Logical region, 6 first through holes, 7 be the second through hole, 8 be liquid storage tank, 9 for receiving liquid pool, 10 being logical
Road slotted eye.
Detailed description of the invention
Below in conjunction with the accompanying drawings the present invention is described in further detail:
With reference to Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5, Fig. 6 and Fig. 7, piezoelectricity of the present invention
Membrane pump includes cover plate 2, piezoelectric film 1, channel layer 3 and substrate the most successively, cover plate 2,
Piezoelectric film 1, it is connected with each other between channel layer 3 and substrate；The upper surface of piezoelectric film 1 and lower surface
Correspondence is coated with conducting film district, and conducting film district includes the working area electrode 4 of piezoelectric film pump, Yi Jiyu
The conducting region 5 that the working area electrode of piezoelectric film pump is connected.The effect of conducting region is simply drawn
Go out electrode in order to convenient test；Offering the first through hole 6 on described cover plate 2, the first through hole 6 is just
Working area electrode 4 to piezoelectric film pump corresponding on piezoelectric film 1, channel layer 3 offers stream
Body passage, one end of fluid passage is connected with the external world, and fluid passage includes the second through hole 7, storage
Liquid pool through hole 8, receipts liquid pool through hole 9 and passage slotted eye 10, described second through hole 7 just leads to first
Hole 6, all by passage slotted eye between the second through hole 7 and receipts liquid pool through hole 9 and liquid storage tank through hole 8
10 are connected.First through hole 6 and the second through hole 7 are all in order to provide vibration sky to piezoelectric film pump
Between, also it is that piezoelectric film pump applies the position of driving force to the fluid in passage.
Piezoelectric film 1 is to have polarized and without the piezoelectric membrane with piezoelectric effect of electrode layer；Lid
Plate 2, channel layer 3 and substrate are by glass, silicon, silicon dioxide, pottery, lucite, poly-
In propylene, polyimides, politef, organosilan, paper, nylon and rubber a kind of or
The material being modified it or be composited is made.The use of cover plate 2 and substrate is mainly
The border of fixing piezoelectric membrane working region, with guarantee the piezoelectric membrane of working region when working permissible
Free vibration；Channel layer is to provide passage for fluid flowing, and material therefor will not be led in passage
The situations such as fluid reacts, seepage.Such as, if the fluid aqueous solution in passage, then logical
Road layer material is not the most preferably hydrophilic material；Liquid in described liquid storage tank through hole 8 is to the second through hole
Resistance during flowing in 7 flowed in the second through hole 7 with the liquid received in liquid pool through hole 9
Resistance in journey is different；Liquid in described second through hole 7 flows into process in liquid storage tank through hole 8
In resistance and liquid in the second through hole 7 to the resistance received during flowing in liquid pool through hole 9 not
With；Circulation passage is trapezium structure or y-type structure.Be embodied in, fluid from liquid storage tank to pressure
The passage that the working area of conductive film pump flows through is trapezoidal, and concrete methods of realizing is, the opening of liquid storage tank
Bore d is inconsistent with the opening bore D numerical value of the working area of piezoelectric film pump, and d is more than D or d
Less than D, forming trapezium structure, premise is the opening working area with piezoelectric film pump of liquid storage tank
Opening is positioned on same centrage, and the different angles of trapezium structure can be by adjusting the numerical value of d and D
Realize；It addition, the passage that fluid flows through to receipts liquid pool from the working area of piezoelectric film pump is also trapezoidal,
Implementation is consistent with mentioned above.For Y-shaped, that described is when liquid storage tank flows out
Paths is split up into two-way in midway and flows into the working area of piezoelectric film pump, flows to from piezoelectric membrane district
The structure receiving liquid pool is same.Planform is similar to letter " Y ".
The manufacture method of piezoelectric film pump of the present invention comprises the following steps:
1) take the piezoelectric film 1 of definite shape, piezoelectric film 1 be fixed on fixture according to polarised direction,
And plate conducting film respectively in the upper and lower surface of described piezoelectric film 1, make piezoelectric film 1 upper surface and under
Surface is respectively formed plated film district, described plated film district include piezoelectric film pump working area electrode 4 and with pressure
The conducting region 5 that the working area electrode of conductive film pump is connected；
2) take cover plate 2, channel layer 3 and substrate, then on cover plate 2, offer the first through hole 6, and
Channel layer 3 is offered liquid storage tank through hole 8, receives liquid pool through hole 9, passage slotted eye 10, Yi Jizheng
The second through hole 7 to the first through hole 6, the first through hole 6 is just to piezoelectric film pump on piezoelectric film 1
Working area electrode 4, again that cover plate 2, piezoelectric film 1, channel layer 3 and substrate is the most solid from top to bottom
Fixed connection, finally gives connecting test lead-in wire on conducting region 5, obtains piezoelectric film pump.
Embodiment one
Piezoelectric film pump of the present invention and preparation method thereof comprises the following steps:
1) with sharp blade by the PVDF piezoelectricity without electrode polarized that thickness is 28 microns
Thin film is cut into the strip of 20 × 40 millimeters according to polarised direction, it is fixed along polarised direction
On fixture, installing the mask plate making patterned electrodes, this mask plate is to use 1 millimeters thick
Poly (methyl methacrylate) plate cut is made, and the piezoelectric film pump working area electrode on mask plate is that aperture is
The circle of 5 millimeters；
2) d.c. sputtering instrument is utilized to plate gold electrode respectively at piezoelectric membrane upper surface and lower surface, if
Putting sputtering current is 10 milliamperes, and the time is 25 minutes, PVDF piezoelectric membrane upper surface and under
Surface respectively deposits a layer thickness and is about the patterned gold electrode of 100 nanometers, after terminating, dismantles
Mask plate；
3) use laser cutting machine that the lucite that thickness is 500 microns is cut into one piece 45 × 10
The rectangle of millimeter；The rectangle of one piece 40 × 10 millimeters, and have the circle that diameter is identical with diaphragm diameter
Through hole；The lucite that thickness is 250 microns is cut into the rectangle of a piece 45 × 10 millimeters, and carves
Angled is the trapezoidal channel of 15 °, and liquid storage tank opening bore d is about 0.5 millimeter, working area
Opening bore D is about 2 millimeters；It is 50 micro-with thickness between PVDF thin film and three pieces of lucites
Rice double faced adhesive tape bonding, finally conducting region with room temperature silver slurry bonding filamentary silver as test lead,
So far, whole element manufacturing completes.
With reference to Fig. 5 and Fig. 6, when applying the square wave that amplitude is 3000 volts, fluid velocity be initially with
The increase of electric voltage frequency and increase, but after reaching peak frequency (110 hertz), flow velocity is opened
Begin to reduce rapidly.This situation is consistent with anticipation: when frequency is the biggest, and barrier film deformation is the least, right
The pressure of the fluid in passage is the least, so flow velocity can reduce.Test obtains Peak Flow Rate about
Being 300 mul/min, corresponding flow rates is exactly 0-300 mul/min.Driven by change
The parameter of galvanic electricity pressure i.e. can reach the effect changing flow velocity.
When applying the square wave of different amplitude, it can be seen that under same frequency, the biggest stream of voltage magnitude
Body speed is the biggest；Under different amplitudes, flow velocity is basically identical with the variation tendency of frequency, increases with frequency
Big flow velocity first increases and then decreases, Peak Flow Rate is between 100 hertz to 110 hertz.Amplitude exceedes
After 3000 volts, piezoelectric membrane is the most breakdown, is difficult to drive liquid flowing when amplitude is the lowest.
Embodiment two
Piezoelectric film pump of the present invention comprises the following steps for the manufacture method of microfluid system:
1) with sharp blade by the PVDF piezoelectricity without electrode polarized that thickness is 28 microns
Thin film is cut into the rectangle of 50 × 110 millimeters according to polarised direction, it is fixed along polarised direction
On fixture, installing the mask plate making patterned electrodes, this mask plate is to use 1 millimeters thick
Poly (methyl methacrylate) plate cut is made, and the piezoelectric film pump working area electrode on mask plate is that aperture is
The circle of 5 millimeters；
2) d.c. sputtering instrument is utilized to plate gold electrode respectively at piezoelectric membrane upper surface and lower surface, if
Putting sputtering current is 10 milliamperes, and the time is 25 minutes, PVDF piezoelectric membrane upper surface and under
Surface respectively deposits a layer thickness and is about the patterned gold electrode of 100 nanometers, after terminating, dismantles
Mask plate；
3) use laser cutting machine that the lucite that thickness is 1 millimeter is cut into one piece 50 × 110
The rectangle of millimeter, and the correspondence position in piezoelectric film pump working area is carved with the circle of same size
Shape through hole；The rectangle of one piece 50 × 110 millimeters, and be carved with and be positioned at liquid storage tank and receive entering on liquid pool
Sample hole and sample outlet hole；The double faced adhesive tape that thickness is 150 microns is cut into the square of a piece 50 × 110 millimeters
Shape, and it is carved with passage and other attached flow microchannel, the liquid storage of the trapezoidal pump that angle is 15 °
Pond opening bore d is about 0.5 millimeter, and the opening bore D of working area is about 2 millimeters；Each layer material
Material is fixing to be connected, and is finally boning filamentary silver as survey for the conducting district of connecting lead wire with room temperature silver slurry
Examination wire, so far, a microfluid system being applied to microdroplet generation completes.
Embodiment described above only have expressed the several embodiments of the present invention, and its description is the most concrete
In detail, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention.Should be understood that
It is, for the person of ordinary skill of the art, without departing from the inventive concept of the premise,
Can also make some deformation and improvement, these broadly fall into protection scope of the present invention.Therefore, originally
The protection domain of patent of invention should be as the criterion with claims.
Claims (5)
1. the manufacture method of a piezoelectric film pump, it is characterised in that described piezoelectric film pump is from upper
Include cover plate (2), piezoelectric film (1) under to successively, provide the channel layer of passage for flowing for fluid
(3) and substrate, cover plate (2), piezoelectric film (1), between channel layer (3) and substrate mutually
Connect；
The upper surface of described piezoelectric film (1) and lower surface are just to being coated with conducting film district, and conducting film district wraps
Include the working area electrode (4) of piezoelectric film pump and be connected with the working area electrode of piezoelectric film pump
Conducting region (5)；
Offering the first through hole (6) on described cover plate (2), the first through hole (6) is just to piezoelectric film (1)
The working area electrode (4) of the piezoelectric film pump of upper correspondence, channel layer offers fluid passage on (3),
One end of fluid passage is connected with the external world, and fluid passage includes the second through hole (7), liquid storage tank through hole
(8), receiving liquid pool through hole (9) and passage slotted eye (10), the second through hole (7) is just to the first through hole
(6), all pass through between the second through hole (7) and receipts liquid pool through hole (9) and liquid storage tank through hole (8)
Passage slotted eye (10) is connected；
Comprise the following steps:
1) take the piezoelectric film (1) of definite shape, piezoelectric film (1) is fixed on folder according to polarised direction
On tool, and plate conducting film respectively at upper surface and the lower surface of described piezoelectric film (1), make piezoelectric film
(1) upper surface and lower surface are respectively formed plated film district, and described plated film district includes the work of piezoelectric film pump
Make region electrode (4) and the conducting region (5) being connected with the working area electrode of piezoelectric film pump；
2) take cover plate (2), channel layer (3) and substrate, then it is logical to offer first on cover plate (2)
Hole (6), and on channel layer (3), offer liquid storage tank through hole (8), receipts liquid pool through hole (9), lead to
Road slotted eye (10) and just the second through hole (7) to the first through hole (6), the first through hole (6)
The working area electrode (4) of just upper to piezoelectric film (1) piezoelectric film pump, the most again by cover plate (2),
Piezoelectric film (1), channel layer (3) and substrate are fixedly connected sequentially from top to bottom, finally give conducting district
Territory (5) upper connecting test lead-in wire, obtains piezoelectric film pump.
The manufacture method of piezoelectric film pump the most according to claim 1, it is characterised in that institute
Stating piezoelectric film (1) is to have polarized and without the piezoelectric membrane with piezoelectric effect of electrode layer.
The manufacture method of piezoelectric film pump the most according to claim 1, it is characterised in that institute
State cover plate (2), channel layer (3) and substrate by glass, silicon, silicon dioxide, pottery, organic
In glass, polypropylene, polyimides, politef, organosilan, paper, nylon and rubber one
Kind or it is modified or the material that is composited is made.
The manufacture method of piezoelectric film pump the most according to claim 1, it is characterised in that institute
State the resistance during the liquid in liquid storage tank through hole (8) flows in the second through hole (7) and receipts liquid
Resistance during liquid in pond through hole (9) flows in the second through hole (7) is different；
The liquid in described second through hole (7) resistance during the middle inflow of liquid storage tank through hole (8)
Different to the resistance received during flowing in liquid pool through hole (9) from the liquid in the second through hole (7).
The manufacture method of piezoelectric film pump the most according to claim 1, it is characterised in that institute
Stating passage slotted eye (10) is trapezium structure or y-type structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201410787635.0A CN104533762B (en) | 2014-12-17 | 2014-12-17 | A kind of piezoelectric film pump and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410787635.0A CN104533762B (en) | 2014-12-17 | 2014-12-17 | A kind of piezoelectric film pump and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
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| CN104533762A CN104533762A (en) | 2015-04-22 |
| CN104533762B true CN104533762B (en) | 2017-01-04 |
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| CN201410787635.0A Expired - Fee Related CN104533762B (en) | 2014-12-17 | 2014-12-17 | A kind of piezoelectric film pump and preparation method thereof |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104998704B (en) * | 2015-07-29 | 2016-11-30 | 西安交通大学 | A kind of integrated drop formation chip based on piezoelectric film pump and preparation method thereof |
| CN106567820B (en) * | 2016-11-04 | 2018-09-04 | 西安交通大学 | One kind being based on P（VDF-TrFE）The preparation method of the transfer tube of piezoelectric membrane |
| CN107178488A (en) * | 2017-06-26 | 2017-09-19 | 西安交通大学 | A kind of two-way valve free miniflow pump based on PVDF piezoelectric membranes and preparation method thereof |
| CN110905789A (en) * | 2018-09-17 | 2020-03-24 | 研能科技股份有限公司 | MEMS pump |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| EP1686632B1 (en) * | 2003-09-25 | 2010-06-02 | Panasonic Corporation | Piezoelectric element, ink-jet head with same, and their manufacturing methods |
| CN200989293Y (en) * | 2006-10-19 | 2007-12-12 | 吉林大学 | Micro water spraying propulsion pump |
| CN101389200B (en) * | 2007-09-14 | 2011-08-31 | 富准精密工业(深圳)有限公司 | Miniature fluid cooling system and miniature fluid driving device |
| JP5234008B2 (en) * | 2008-04-17 | 2013-07-10 | 株式会社村田製作所 | Multilayer piezoelectric element and piezoelectric pump |
| JP2013538446A (en) * | 2010-07-26 | 2013-10-10 | 富士フイルム株式会社 | Formation of devices with curved piezoelectric films |
| CN102562540A (en) * | 2011-12-27 | 2012-07-11 | 太原理工大学 | Diaphragm compressed valve-less micropump |
| CN102691647B (en) * | 2012-05-02 | 2015-07-08 | 江苏大学 | Valveless piezoelectric pump with, axially symmetric elliptic tubes |
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