CN106567820B - One kind being based on P（VDF-TrFE）The preparation method of the transfer tube of piezoelectric membrane - Google Patents
One kind being based on P（VDF-TrFE）The preparation method of the transfer tube of piezoelectric membrane Download PDFInfo
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- CN106567820B CN106567820B CN201610965047.0A CN201610965047A CN106567820B CN 106567820 B CN106567820 B CN 106567820B CN 201610965047 A CN201610965047 A CN 201610965047A CN 106567820 B CN106567820 B CN 106567820B
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- 239000012528 membrane Substances 0.000 title claims abstract description 51
- 238000012546 transfer Methods 0.000 title claims abstract description 40
- 238000002360 preparation method Methods 0.000 title claims abstract description 24
- 229920001166 Poly(vinylidene fluoride-co-trifluoroethylene) Polymers 0.000 title abstract description 3
- 239000010410 layer Substances 0.000 claims abstract description 60
- 239000012790 adhesive layer Substances 0.000 claims abstract description 35
- 238000012360 testing method Methods 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims abstract description 6
- 239000011521 glass Substances 0.000 claims description 43
- 239000000758 substrate Substances 0.000 claims description 19
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 claims description 11
- 239000012530 fluid Substances 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 9
- 238000004528 spin coating Methods 0.000 claims description 8
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- 238000010147 laser engraving Methods 0.000 claims description 5
- 239000000843 powder Substances 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 4
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 4
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 239000002904 solvent Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 238000002156 mixing Methods 0.000 claims 1
- 238000005516 engineering process Methods 0.000 description 4
- 239000005357 flat glass Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000002050 diffraction method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 238000003760 magnetic stirring Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000001225 therapeutic effect Effects 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Laminated Bodies (AREA)
Abstract
The invention discloses one kind being based on P（VDF‑TrFE）The preparation method of the transfer tube of piezoelectric membrane, includes the following steps：1) P (VDF TrFE) solution is prepared；2) P (VDF TrFE) piezoelectric membrane is prepared by P (VDF TrFE) solution；3) engraving prepares the first supporting layer, the second supporting layer and the channel layer needed for transfer tube；4) the first adhesive layer, the second adhesive layer and the third adhesive layer needed for transfer tube are graphically prepared；5) the preparation work electrode on P (VDF TrFE) piezoelectric membrane that step 2) obtains；6) the alignment connection successively from top to bottom by the first supporting layer, the first adhesive layer, P (VDF TrFE) piezoelectric membrane, the second adhesive layer, channel layer, third adhesive layer and the second supporting layer, then test lead is reconnected, obtain the transfer tube based on P (VDF TrFE) piezoelectric membrane, the driving voltage of transfer tube prepared by this method is smaller, and preparation process is relatively simple.
Description
Technical field
The present invention relates to a kind of production methods of piezoelectric pump, and in particular to one kind being based on P (VDF-TrFE) piezoelectric membrane
The preparation method of transfer tube.
Background technology
In recent years, it is not fresh topic that piezoelectric material, which is applied to biomedical aspect,.Some have been put into operation, than
Such as our common biosensors, pacemaker, phono-cardiograph, sphygmomanometer, ultrasonic detector, microfluid driver and its
Its " wearable technology " etc..
Wherein, micro-fluidic technologies are the use of biomedical aspect is very extensive and biological detection and therapeutic treatment etc.
The very important technology of aspect.So the research about microfluid driver is also extremely important.The piezoelectricity studied at present
Ceramic pump, magnetic drive pump, passive pump, the manufactured pump of siphon principle etc., all there is such as：Complex process, driving voltage are big etc.
Problem.
Invention content
It is an object of the invention to overcome the above-mentioned prior art, provide a kind of based on P (VDF-TrFE) piezoelectricity
The driving voltage of the preparation method of the transfer tube of film, transfer tube prepared by this method is smaller, and preparation process is simple.
In order to achieve the above objectives, the preparation method of the transfer tube of the present invention based on P (VDF-TrFE) piezoelectric membrane
Include the following steps：
1) P (VDF-TrFE) solution is prepared；
2) P (VDF-TrFE) piezoelectric membrane is prepared by P (VDF-TrFE) solution；
3) engraving prepares the first supporting layer, the second supporting layer and the channel layer needed for transfer tube；
4) the first adhesive layer, the second adhesive layer and the third adhesive layer needed for transfer tube are graphically prepared；
5) the preparation work electrode on P (VDF-TrFE) piezoelectric membrane that step 2) obtains；
6) by the first supporting layer, the first adhesive layer, P (VDF-TrFE) piezoelectric membrane, the second adhesive layer, channel layer, third
Adhesive layer and the alignment connection successively from top to bottom of the second supporting layer, are then reconnected test lead, obtain and pressed based on P (VDF-TrFE)
The transfer tube of conductive film.
A concentration of 5-35wt.% of P (VDF-TrFE) solution, the solute in P (VDF-TrFE) solution are P (VDF-TrFE)
Powder, the solvent in P (VDF-TrFE) solution are what one or both of acetone and dimethylformamide mixed in any proportion
Mixture.
The concrete operations of step 2) are：Using sol evenning machine by the spin coating of P (VDF-TrFE) solution on a glass substrate, then by glass
Constant temperature heating processing is carried out after the drying of glass substrate, then glass substrate is placed into water again and removes the film on glass substrate,
Obtain P (VDF-TrFE) piezoelectric membrane that thickness is 1-12 microns.
The spin speed of equal glue machine is 1000-4000 revs/min, and spin-coating time is 20-60 seconds.
It is by the concrete operations that glass substrate is dried：Glass substrate is placed into thermal station, and in 65-85 DEG C of constant temperature ring
It is placed 10 minutes under border.
Temperature in constant temperature heat treatment process is 130-150 DEG C, and the time of constant temperature heat treatment is 1-2 hours.
The concrete operations that engraving prepares the first supporting layer, the second supporting layer and channel layer needed for transfer tube are：Choose the
One organic glass and the second organic glass are carved on the first organic glass the through-hole above pump chamber by laser engraving machine, obtained
First supporting layer；Second supporting layer is the rectangle poly (methyl methacrylate) plate carved out using the first organic glass；Pass through laser engraving again
Machine carves fluid channel on the second organic glass, obtains channel layer.
The thickness of the thickness of first organic glass and the second organic glass is 0.4-3 millimeters.
The concrete operations of step 5) are：It is splashed by direct current in the upper surface and the lower surface of P (VDF-TrFE) piezoelectric membrane
It penetrates instrument and prepares the working electrode that thickness is 50-100 nanometers.
The invention has the advantages that：
The preparation method of transfer tube of the present invention based on P (VDF-TrFE) piezoelectric membrane is divided when specific operation
P (VDF-TrFE) piezoelectric membrane, the first supporting layer, the second supporting layer, channel layer, the first gluing needed for transfer tube are not prepared
Layer, the second adhesive layer and third adhesive layer, then by the first supporting layer, the first adhesive layer, P (VDF-TrFE) piezoelectric membrane, the
The alignment connection successively from top to bottom of two adhesive layers, channel layer, third adhesive layer and the second supporting layer, operation is relatively simple,
And time saving, cost is relatively low.In addition, the present invention prepares P (VDF-TrFE) piezoelectric membrane by raw material of P (VDF-TrFE) solution,
P (VDF-TrFE) piezoelectric membrane carries out XRD diffraction analysis discoveries, which has at 19.8 °
Very strong diffraction maximum, it was demonstrated that the crystalline phase of the film is the β phases for having piezoelectric property, when applying 50 volts of square wave, the drive
The fluid velocity of dynamic pump first increases with the increase of electric voltage frequency to be reduced afterwards, in 60Hz, the maximum of transfer tube prepared by the present invention
Flow velocity is more than 20 mul/min, can meet the use of micro-fluid chip, and so low driving voltage does not need complicated test
Equipment can be realized, and strong technical support is provided for wearable micro-fluid chip for micro-fluid pump.
Description of the drawings
Fig. 1 is the structural schematic diagram of the transfer tube based on P (VDF-TrFE) piezoelectric membrane 2 in the present invention；
Fig. 2 is the XRD schematic diagrames of P (VDF-TrFE) piezoelectric membrane 2 in the present invention；
Fig. 3 is the flow velocity test result figure of the transfer tube based on P (VDF-TrFE) piezoelectric membrane 2 in the present invention.
Wherein, 1 it is the first supporting layer, 2 be P (VDF-TrFE) piezoelectric membrane, 3 be channel layer, 4 is the second supporting layer, 5
It is the first adhesive layer for working electrode, 6,7 be the second adhesive layer, 8 is third adhesive layer.
Specific implementation mode
The present invention is described in further detail below in conjunction with the accompanying drawings：
With reference to figure 1, the preparation method of the transfer tube of the present invention based on P (VDF-TrFE) piezoelectric membrane includes following
Step：
1) P (VDF-TrFE) solution is prepared；
2) P (VDF-TrFE) piezoelectric membrane 2 is prepared by P (VDF-TrFE) solution；
3) engraving prepares the first supporting layer 1, the second supporting layer 4 and the channel layer 3 needed for transfer tube；
4) the first adhesive layer 6, the second adhesive layer 7 and the third adhesive layer 8 needed for transfer tube are graphically prepared；
5) the preparation work electrode 5 on P (VDF-TrFE) piezoelectric membrane 2 that step 2) obtains；
6) by the first supporting layer 1, the first adhesive layer 6, P (VDF-TrFE) piezoelectric membrane 2, the second adhesive layer 7, channel layer 3,
Third adhesive layer 8 and the alignment connection successively from top to bottom of the second supporting layer 4, then reconnect test lead, obtain based on P (VDF-
TrFE) the transfer tube of piezoelectric membrane.
A concentration of 5-35wt.% of P (VDF-TrFE) solution, the solute in P (VDF-TrFE) solution are P (VDF-TrFE)
Powder, the solvent in P (VDF-TrFE) solution are what one or both of acetone and dimethylformamide mixed in any proportion
Mixture.
The concrete operations of step 2) are：Using sol evenning machine by the spin coating of P (VDF-TrFE) solution on a glass substrate, then by glass
Constant temperature heating processing is carried out after the drying of glass substrate, then glass substrate is placed into water again and removes the film on glass substrate,
Obtain P (VDF-TrFE) piezoelectric membrane 2 that thickness is 1-12 microns.
The spin speed of sol evenning machine is 1000-4000 revs/min, and spin-coating time is 20-60 seconds.
It is by the concrete operations that glass substrate is dried：Glass substrate is placed into thermal station, and in 65-85 DEG C of constant temperature ring
It is placed 10 minutes under border.
Temperature in constant temperature heat treatment process is 130-150 DEG C, and the time of constant temperature heat treatment is 1-2 hours.
The concrete operations that engraving prepares the first supporting layer 1, the second supporting layer 4 and channel layer 3 needed for transfer tube are：It chooses
First organic glass and the second organic glass carve on the first organic glass the through-hole above pump chamber by laser engraving machine,
Obtain the first supporting layer 1；Second supporting layer 4 is the rectangle poly (methyl methacrylate) plate carved out using the first organic glass；Pass through laser again
Engraving machine carves fluid channel on the second organic glass, obtains channel layer 3.
The thickness of the thickness of first organic glass and the second organic glass is 0.4-3 millimeters.
The concrete operations of step 5) are：It is splashed by direct current in the upper surface and the lower surface of P (VDF-TrFE) piezoelectric membrane 2
It penetrates instrument and prepares the working electrode 5 that thickness is 50-100 nanometers.
Embodiment one
The preparation method of transfer tube of the present invention based on P (VDF-TrFE) piezoelectric membrane includes the following steps：
1) it takes 2 milligrams P (VDF-TrFE) powder to be put into wide-mouth bottle with electronic balance scale, then 10 millis is measured with pipettor
The DMF risen, is added in the wide-mouth bottle, then wide-mouth bottle is placed on magnetic stirring apparatus, is stirred at room temperature 3 hours to P (VDF-
TrFE) powder is completely dissolved, and solution is in colorless and transparent；
2) solution that step 1) obtains is filtered using the syringe filters that aperture is 5 microns and aperture is 1 micron,
It is then allowed to stand 24 hours；
3) using glass as substrate, solution is spin-coated on glass substrate surface using sol evenning machine, spin coating machine speed is 3000 turns/
Minute, spin coating time is 40 seconds；
4) sheet glass for being coated with P (VDF-TrFE) solution is placed in 75 ° of thermal station and is dried 10 minutes, solvent is made to wave
Hair；
5) sheet glass for being coated with P (VDF-TrFE) solution is placed in 135 degree of thermal station, is heat-treated 1.5 hours, then will be hot
Platform temperature rises to 145 degree, and then the sheet glass is placed in ultra-pure water and is removed, P (VDF-TrFE) piezoelectric membrane 2 is obtained；
6) engraving is carried out respectively to the PMMA plates that thickness is 0.8 millimeter and 250 microns using laser cutting machine and prepares P
(VDF-TrFE) the first supporting layer 1 of piezoelectric film pump, the second supporting layer 4 and channel layer 3, while carving corresponding double faced adhesive tape
Layer；
8) mask plate is installed in the upper surface and the lower surface of P (VDF-TrFE) piezoelectric membrane 2 stripped down, uses
D.c. sputtering instrument prepares the gold film layer that thickness is 75 nanometers as working electrode 5；
9) the first supporting layer 1, the first adhesive layer 6, P (VDF-TrFE) piezoelectric membrane 2, the second adhesive layer 7, channel layer 3,
Three adhesive layers 8 and the alignment connection successively from top to bottom of the second supporting layer 4, then reconnect test lead, obtain based on P (VDF-
TrFE) the transfer tube of piezoelectric membrane.
With reference to figure 2, XRD diffraction analysis discoveries are carried out to P (VDF-TrFE) piezoelectric membrane 2, which has at 19.8 ° or so
There are very strong diffraction maximum, verification documents and materials to confirm that it is the diffraction maximum of P (VDF-TrFE) β phases to change peak really, that is to say, that this
P (VDF-TrFE) piezoelectric membrane 2 prepared by invention is β phases P (VDF-TrFE) film with piezoelectric property.
With reference to figure 3, when applying the square wave that amplitude is 50 volts to transfer tube prepared by the present invention, fluid velocity is with electric voltage frequency
Increase and first increases and then decreases, maximum value appear in 60Hz or so, maximum flow rate can meet at 20 mul/min or more
The use of micro-fluid chip, so low driving voltage do not need complicated test equipment and can realize, are used for micro-fluid pump
Strong technical support is provided in wearable micro-fluid chip.
Embodiments of the present invention above described embodiment only expresses, the description thereof is more specific and detailed, but can not
Therefore it is interpreted as the limitation to the scope of the claims of the present invention.It should be pointed out that for those of ordinary skill in the art,
Without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection model of the present invention
It encloses.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (8)
1. the preparation method of transfer tube of the one kind based on P (VDF-TrFE) piezoelectric membrane, which is characterized in that include the following steps：
1) P (VDF-TrFE) solution is prepared；
2) P (VDF-TrFE) piezoelectric membrane (2) is prepared by P (VDF-TrFE) solution；
3) engraving prepares the first supporting layer (1), the second supporting layer (4) and the channel layer (3) needed for transfer tube；
4) the first adhesive layer (6), the second adhesive layer (7) and the third adhesive layer (8) needed for transfer tube are graphically prepared；
5) the preparation work electrode (5) on P (VDF-TrFE) piezoelectric membrane (2) that step 2) obtains；
6) by the first supporting layer (1), the first adhesive layer (6), P (VDF-TrFE) piezoelectric membrane (2), the second adhesive layer (7), channel
The alignment connection successively from top to bottom of layer (3), third adhesive layer (8) and the second supporting layer (4), then reconnects test lead, obtains
Transfer tube based on P (VDF-TrFE) piezoelectric membrane；
A concentration of 5-35wt.% of P (VDF-TrFE) solution, the solute in P (VDF-TrFE) solution are P (VDF-TrFE) powder, P
(VDF-TrFE) solvent in solution is the mixing that one or both of acetone and dimethylformamide mix in any proportion
Object.
2. the preparation method of the transfer tube according to claim 1 based on P (VDF-TrFE) piezoelectric membrane, feature exist
In the concrete operations of step 2) are：Using sol evenning machine by the spin coating of P (VDF-TrFE) solution on a glass substrate, then by glass base
Constant temperature heating processing is carried out after piece drying, then glass substrate is placed into water again and removes the film on glass substrate, is obtained thick
P (VDF-TrFE) piezoelectric membrane (2) that degree is 1-12 microns.
3. the preparation method of the transfer tube according to claim 2 based on P (VDF-TrFE) piezoelectric membrane, feature exist
In the spin speed of sol evenning machine is 1000-4000 revs/min, and spin-coating time is 20-60 seconds.
4. the preparation method of the transfer tube according to claim 2 based on P (VDF-TrFE) piezoelectric membrane, feature exist
In the concrete operations by glass substrate drying are：Glass substrate is placed into thermal station, and is transferred in 65-85 DEG C of isoperibol
It sets 10 minutes.
5. the preparation method of the transfer tube according to claim 2 based on P (VDF-TrFE) piezoelectric membrane, feature exist
In the temperature in constant temperature heat treatment process is 130-150 DEG C, and the time of constant temperature heat treatment is 1-2 hours.
6. the preparation method of the transfer tube according to claim 1 based on P (VDF-TrFE) piezoelectric membrane, feature exist
In the concrete operations of the first supporting layer (1), the second supporting layer (4) and channel layer (3) needed for engraving preparation transfer tube are：Choosing
The first organic glass and the second organic glass are taken, carves leading to above pump chamber on the first organic glass by laser engraving machine
Hole obtains the first supporting layer (1)；Second supporting layer (4) is the rectangle poly (methyl methacrylate) plate carved out using the first organic glass；Lead to again
It crosses laser engraving machine and carves fluid channel on the second organic glass, obtain channel layer (3).
7. the preparation method of the transfer tube according to claim 6 based on P (VDF-TrFE) piezoelectric membrane, feature exist
In the thickness of the thickness of the first organic glass and the second organic glass is 0.4-3 millimeters.
8. the preparation method of the transfer tube according to claim 1 based on P (VDF-TrFE) piezoelectric membrane, feature exist
In the concrete operations of step 5) are：Pass through d.c. sputtering in the upper surface and the lower surface of P (VDF-TrFE) piezoelectric membrane (2)
Instrument prepares the working electrode (5) that thickness is 50-100 nanometers.
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| CN102306703B (en) * | 2011-08-09 | 2013-05-22 | 上海交通大学 | Manufacturing method of minitype piezoelectric pump |
| JP2013207155A (en) * | 2012-03-29 | 2013-10-07 | Mitsubishi Materials Corp | Ferroelectric thin film manufacturing method |
| CN104533762B (en) * | 2014-12-17 | 2017-01-04 | 西安交通大学 | A kind of piezoelectric film pump and preparation method thereof |
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