CN107178488A - A kind of two-way valve free miniflow pump based on PVDF piezoelectric membranes and preparation method thereof - Google Patents
A kind of two-way valve free miniflow pump based on PVDF piezoelectric membranes and preparation method thereof Download PDFInfo
- Publication number
- CN107178488A CN107178488A CN201710495956.7A CN201710495956A CN107178488A CN 107178488 A CN107178488 A CN 107178488A CN 201710495956 A CN201710495956 A CN 201710495956A CN 107178488 A CN107178488 A CN 107178488A
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- Prior art keywords
- pvdf piezoelectric
- piezoelectric membranes
- region electrode
- pvdf
- way valve
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- 239000002033 PVDF binder Substances 0.000 title claims abstract description 78
- 229920002981 polyvinylidene fluoride Polymers 0.000 title claims abstract description 78
- 239000012528 membrane Substances 0.000 title claims abstract description 75
- 238000002360 preparation method Methods 0.000 title claims abstract description 15
- 239000007788 liquid Substances 0.000 claims abstract description 33
- 239000012530 fluid Substances 0.000 claims abstract description 22
- 238000003860 storage Methods 0.000 claims abstract description 17
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 230000007613 environmental effect Effects 0.000 claims abstract description 4
- 239000000463 material Substances 0.000 claims description 9
- 229920005479 Lucite® Polymers 0.000 claims description 3
- 239000002390 adhesive tape Substances 0.000 claims description 3
- -1 and cover plate (1) Polymers 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 239000003292 glue Substances 0.000 claims description 3
- 230000010287 polarization Effects 0.000 claims description 3
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000005452 bending Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
The invention discloses a kind of two-way valve free miniflow pump based on PVDF piezoelectric membranes and preparation method thereof, including the cover plate being fixedly connected sequentially from top to bottom, PVDF piezoelectric membranes, channel layer and substrate, wherein, the upper surface of PVDF piezoelectric membranes and lower surface are equipped with some conducting film areas, each conducting film area includes work region electrode and the conducting region electrode for the region electrode that works to be connected with external voltage source, and a work region electrode on PVDF piezoelectric membranes upper surface is just to a work region electrode on PVDF piezoelectric membrane lower surfaces, through hole is offered on cover plate, fluid passage and two liquid storage tanks are offered on channel layer, wherein, the two ends of fluid passage are connected with two liquid storage tanks respectively, and each work region electrode on PVDF piezoelectric membranes upper surface is just to the through hole and the fluid passage, liquid storage tank is connected with environmental liquids source, the miniflow pump can realize valveless bi-directional drive, switching is relatively simple, and preparation method is easily achieved.
Description
Technical field
The present invention relates to a kind of two-way valve free miniflow pump and preparation method thereof, and in particular to one kind is based on PVDF piezoelectric membranes
Two-way valve free miniflow pump and preparation method thereof.
Background technology
Miniflow pump is the core component of micro-fluidic chip system, and the work that it is responsible for whole system provides fluid driving
Power, is mainly used in controlling the pumping and the discharge of waste material of sample and reagent, while controlling sample, the flow and flow velocity of reagent.
Tradition machinery formula has a valve miniflow pump manufacture craft comparative maturity, but due to there is the mechanical movable part such as micro-valve inside it, must
The limitation of technique and machining accuracy is so subject to processing, the trend of microfluidic system miniaturization is not met.Valve is frequent simultaneously
Switch, stability and service life are by a certain degree of influence.Currently reported most of miniflow pumps are unidirectional drive
It is dynamic, it is impossible to accomplish the simple switching of bi-directional drive, there is very big limitation on application scenarios.
The content of the invention
It is an object of the invention to the shortcoming for overcoming above-mentioned prior art, there is provided a kind of double based on PVDF piezoelectric membranes
To valveless miniflow pump and preparation method thereof, the miniflow pump can realize valveless bi-directional drive, and switching is relatively simple, and the side of preparation
Method is easily achieved.
To reach above-mentioned purpose, the two-way valve free miniflow pump of the present invention based on PVDF piezoelectric membranes include on to
Under the cover plate, PVDF piezoelectric membranes, channel layer and the substrate that are fixedly connected sequentially, wherein, the upper surface of PVDF piezoelectric membranes and under
Surface is equipped with some conducting film areas, and each conducting film area includes work region electrode and for by work region electrode and external voltage
A work region electrode on the conducting region electrode that source is connected, and PVDF piezoelectric membranes upper surface is just under PVDF piezoelectric membranes
Offered on a work region electrode on surface, cover plate and fluid passage and two liquid storage tanks are offered on through hole, channel layer, its
In, the two ends of fluid passage are connected with two liquid storage tanks respectively, and each work region electrode on PVDF piezoelectric membranes upper surface
Just to the through hole and the fluid passage, liquid storage tank is connected with environmental liquids source.
PVDF conductive films are for polarization and without the piezoelectric membrane with piezo-electric effect of electrode layer.
The material of cover plate, channel layer and substrate is lucite, and cover plate, PVDF piezoelectric membranes, channel layer and substrate
It is fixedly connected by jointing material, the jointing material is UV glue or double faced adhesive tape.
The through hole is strip through hole.
The preparation method of two-way valve free miniflow pump of the present invention based on PVDF piezoelectric membranes comprises the following steps：
1) PVDF piezoelectric membranes are chosen, then will be fixed on PVDF piezoelectric membranes according to polarised direction on fixture, and
Conducting film area is plated in the upper surfaces of PVDF piezoelectric membranes respectively with lower surface, wherein, the conducting film area include work region electrode and
For the conducting region electrode that the region electrode that works is connected with external voltage source；
2) cover plate, channel layer and substrate are taken, a through hole is opened up on the cover board, and open up on channel layer fluid passage and
Cover plate, PVDF piezoelectric membranes, channel layer and substrate, are then fixedly connected sequentially, finally exist by two liquid storage tanks from top to bottom again
Test lead is bonded on conducting region electrode, the two-way valve free miniflow pump based on PVDF piezoelectric membranes is obtained.
Conducting film area is coated with respectively in the upper surface of PVDF piezoelectric membranes and lower surface using d.c. sputtering instrument.
The thickness in conducting film area is 100 nanometers.
The invention has the advantages that：
Two-way valve free miniflow pump of the present invention based on PVDF piezoelectric membranes includes workspace successively just to distribution
Electrode, through hole and fluid passage, wherein, the two ends of fluid passage are communicated with liquid storage tank, operationally, by controlling PVDF to press
Worked on conductive film and apply the increase direction of square-wave potential phase on region electrode and realize to fluid flow direction in fluid passage
Control, so as to realize valveless bi-directional drive, switch it is relatively simple, efficiently solve tradition have valve miniflow pump service life it is short,
Response speed is slow and the problems such as complex manufacturing technology, simultaneously bi-directionally driving can greatly extend the usage scenario of miniflow pump, carry
Rise product cost.And the technology employed in preparation process is more ripe, preparation method is relatively simple, conveniently, be easy to
Realize.
Brief description of the drawings
Fig. 1 is side view of the invention；
Fig. 2 is the structural representation of cover plate 1 of the present invention；
Fig. 3 is the structural representation of PVDF piezoelectric membranes 2 in the present invention；
Fig. 4 is the structural representation of channel layer 3 in the present invention；
Fig. 5 is the structural representation of substrate 4 in the present invention；
Fig. 6 is added voltage signal schematic diagram in embodiment one；
Fig. 7 a are t in embodiment one1-t2Moment piezoelectric film Vibration Condition schematic diagram；
Fig. 7 b are t in embodiment one2-t3Moment piezoelectric film Vibration Condition schematic diagram；
Fig. 7 c are t in embodiment one3-t4Moment piezoelectric film Vibration Condition schematic diagram；
Fig. 7 d are t in embodiment one4-t5Moment piezoelectric film Vibration Condition schematic diagram.
Wherein, 1 it is cover plate, 2 be PVDF piezoelectric membranes, 3 be channel layer, 4 be substrate, 5 be work region electrode, 6 is conducting
Region electrode, 7 be through hole, 8 be fluid passage, 9 be liquid storage tank.
Embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings：
With reference to Fig. 1, the two-way valve free miniflow pump of the present invention based on PVDF piezoelectric membranes is included from top to bottom successively
Cover plate 1, PVDF piezoelectric membranes 2, channel layer 3 and the substrate 4 being fixedly connected, wherein, the upper surface of PVDF piezoelectric membranes 2 and following table
Face is equipped with some conducting film areas, and each conducting film area includes work region electrode 5 and for by work region electrode 5 and external voltage
A work region electrode 5 on the conducting region electrode 6 that source is connected, and the upper surface of PVDF piezoelectric membranes 2 is just thin to PVDF piezoelectricity
Offered on a work region electrode 5 on the lower surface of film 2, cover plate 1 and fluid passage 8 and two is offered on through hole 7, channel layer 3
Individual liquid storage tank 9, wherein, the two ends of fluid passage 8 are connected with two liquid storage tanks 9 respectively, and on the upper surface of PVDF piezoelectric membranes 2
Each work region electrode 5 just to the through hole 7 and the fluid passage 8, liquid storage tank 9 is connected with environmental liquids source.
PVDF conductive films are for polarization and without the piezoelectric membrane with piezo-electric effect of electrode layer；Cover plate 1, channel layer 3
And the material of substrate 4 is lucite, and cover plate 1, PVDF piezoelectric membranes 2, channel layer 3 and substrate 4 are solid by jointing material
Fixed connection, the jointing material is UV glue or double faced adhesive tape；Through hole 7 is strip through hole.
The preparation method of two-way valve free miniflow pump of the present invention based on PVDF piezoelectric membranes comprises the following steps：
1) PVDF piezoelectric membranes 2 are chosen, then will be fixed on PVDF piezoelectric membranes 2 according to polarised direction on fixture, and
Conducting film area is plated in the upper surface of PVDF piezoelectric membranes 2 respectively with lower surface, wherein, the conducting film area includes work region electrode 5
And the conducting region electrode 6 for the region electrode 5 that works to be connected with external voltage source；
2) cover plate 1, channel layer 3 and substrate 4 are taken, a through hole 7 is opened up on cover plate 1, and fluid is opened up on channel layer 3
Passage 8 and two liquid storage tanks 9, then again fix cover plate 1, PVDF piezoelectric membranes 2, channel layer 3 and substrate 4 successively from top to bottom
Connection, is finally bonded test lead on conducting region electrode 6, obtains the two-way valve free miniflow pump based on PVDF piezoelectric membranes.
Conducting film area is coated with respectively in the upper surface of PVDF piezoelectric membranes 2 and lower surface using d.c. sputtering instrument.
The thickness in conducting film area is 100 nanometers.
Operationally, the square-wave potential applied to each work region electrode 5 on the same surface of PVDF piezoelectric membranes 2 is not
Together, the electrical potential difference and between the two neighboring work region electrode 5 on the same surface of PVDF piezoelectric membranes 2 is 90 °.Pass through control simultaneously
Worked in PVDF piezoelectric membranes 2 processed and apply the increase direction of square-wave potential phase on region electrode 5 and realize to being flowed in fluid passage 8
The control of body flow direction.
The present invention specific control process be：
Describe for convenience, by four electrode blocks of the work region electrode 5 in Fig. 3 be from left to right respectively designated as A, B, C,
D。
With reference to Fig. 6, external voltage source output two-way phase difference is 90 °, peak value is that 2500V, dutycycle are that 50%, frequency is
2Hz square wave.1. signal is just being connected on to the two ends of electrode A, and 2. signal is just connected on electrode B by reversal connection at electrode C two ends
Two ends, reversal connection obtains tetra- electrodes of A, B, C, D that phase difference is 90 ° at electrode D two ends.When electrode both end voltage be timing,
The PVDF piezoelectric membranes 2 of electrode zone can be bent upwards, and when electrode both end voltage is bears, PVDF piezoelectric membranes 2 can be bent downwardly.
In order to realize that liquid flows from left to right, when signal is inputted, in t1-t2Period, with reference to Fig. 7 a, due to A electrode districts
Domain both end voltage makes liquid flow into A electrodes from A electrode zones left end for just, PVDF piezoelectric membranes 2 are bent upwards, and pressure diminishes
Region；
With reference to Fig. 7 b, in t2-t3Period, the PVDF piezoelectric membranes 2 of A electrode zones are still bent upwards, B electrode zones
Both end voltage is changed into just from negative, and the bending direction of PVDF piezoelectric membranes 2 is from being changed into downwards upward, and pressure diminishes, and liquid is from A electrodes
Region flows into B electrode zones；
With reference to Fig. 7 c, in t3-t4Period, B electrode zone both end voltages are constant, and the bending direction of PVDF piezoelectric membranes 2 is not
Become, C electrode zones both end voltage is changed into just from negative, the bending direction of PVDF piezoelectric membranes 2 is from being changed into downwards upward, and pressure becomes
Small, while A electrode zone both end voltages change from positive to bear, the bending directions of PVDF piezoelectric membranes 2 from being changed into downward upwards, pressure
Become big, liquid flows to A, C electrode zone simultaneously from B electrode zones, but A electrode zones pressure is more than C electrode zones, makes stream
The liquid for entering C electrode zones is more than A electrode zones, sees that liquid flows into C electrode zones on the whole；
With reference to Fig. 7 d, in t4-t5Period, C electrode zone both end voltages are constant, and the bending direction of PVDF piezoelectric membranes 2 is not
Become, D electrode zones both end voltage is changed into just from negative, the bending direction of PVDF piezoelectric membranes 2 is from being changed into downwards upward, and pressure becomes
Small, while B electrode zone both end voltages change from positive to bear, the bending directions of PVDF piezoelectric membranes 2 from being changed into downward upwards, pressure
Become big, liquid flows to B, D electrode zone simultaneously from C electrode zones, but B electrode zones pressure is more than D electrode zones, makes stream
The liquid for entering D electrode zones is more than B electrode zones, sees that liquid flows into B electrode zones on the whole；
This four time zones constitute a circulation so that liquid flows into D regions from a-quadrant via B, C region, realizes liquid
Driving of the body from the left end of miniflow pump to right-hand member.
1., 2. exchanged when by signal, you can the phase difference for realizing tetra- electrodes of A, B, C, D is -90 °, you can realize liquid
From the right-hand member of miniflow pump to the driving of left end.
Case study on implementation described above only expresses one embodiment of the present invention, and it describes more specific, detailed, but not
Therefore the limitation to the scope of the claims of the present invention can be interpreted as.It should be pointed out that coming for one of ordinary skill in the art
Say, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention
Scope.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (7)
1. a kind of two-way valve free miniflow pump based on PVDF piezoelectric membranes, it is characterised in that connect including fixed successively from top to bottom
Cover plate (1), PVDF piezoelectric membranes (2), channel layer (3) and the substrate (4) connect, wherein, the upper surface of PVDF piezoelectric membranes (2) and
Lower surface is equipped with some conducting film areas, each conducting film area include work region electrode (5) and for by work region electrode (5) with
A work region electrode (5) on the conducting region electrode (6) that external voltage source is connected, and PVDF piezoelectric membranes (2) upper surface
Just to a work region electrode (5) on PVDF piezoelectric membranes (2) lower surface, through hole (7), channel layer are offered on cover plate (1)
(3) fluid passage (8) and two liquid storage tanks (9) are offered on, wherein, the two ends of fluid passage (8) respectively with two liquid storage tanks
(9) it is connected, and each work region electrode (5) on PVDF piezoelectric membranes (2) upper surface is just to the through hole (7) and the fluid
Passage (8), liquid storage tank (9) is connected with environmental liquids source.
2. the two-way valve free miniflow pump according to claim 1 based on PVDF piezoelectric membranes, it is characterised in that PVDF is conductive
Film is for polarization and without the piezoelectric membrane with piezo-electric effect of electrode layer.
3. the two-way valve free miniflow pump according to claim 1 based on PVDF piezoelectric membranes, it is characterised in that cover plate (1),
The material of channel layer (3) and substrate (4) is lucite, and cover plate (1), PVDF piezoelectric membranes (2), channel layer (3) and base
Plate (4) is fixedly connected by jointing material, and the jointing material is UV glue or double faced adhesive tape.
4. the two-way valve free miniflow pump according to claim 1 based on PVDF piezoelectric membranes, it is characterised in that the through hole
(7) it is strip through hole.
5. a kind of preparation method of the two-way valve free miniflow pump based on PVDF piezoelectric membranes described in claim 1, its feature exists
In comprising the following steps：
1) PVDF piezoelectric membranes (2) are chosen, then will be fixed on PVDF piezoelectric membranes (2) according to polarised direction on fixture, and
Conducting film area is plated in the upper surface of PVDF piezoelectric membranes (2) respectively with lower surface, wherein, the conducting film area includes work region electrode
And the conducting region electrode (6) for work region electrode (5) to be connected with external voltage source (5)；
2) cover plate (1), channel layer (3) and substrate (4) are taken, a through hole (7) is opened up on cover plate (1), and on channel layer (3)
Fluid passage (8) and two liquid storage tanks (9) are opened up, then again by cover plate (1), PVDF piezoelectric membranes (2), channel layer (3) and base
Plate (4) is fixedly connected sequentially from top to bottom, is finally bonded test lead on conducting region electrode (6), obtains thin based on PVDF piezoelectricity
The two-way valve free miniflow pump of film.
6. the preparation method of the two-way valve free miniflow pump according to claim 5 based on PVDF piezoelectric membranes, its feature exists
In being coated with conducting film area respectively in the upper surface of PVDF piezoelectric membranes (2) and lower surface using d.c. sputtering instrument.
7. the preparation method of the two-way valve free miniflow pump according to claim 5 based on PVDF piezoelectric membranes, its feature exists
In the thickness in conducting film area is 100 nanometers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710495956.7A CN107178488A (en) | 2017-06-26 | 2017-06-26 | A kind of two-way valve free miniflow pump based on PVDF piezoelectric membranes and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710495956.7A CN107178488A (en) | 2017-06-26 | 2017-06-26 | A kind of two-way valve free miniflow pump based on PVDF piezoelectric membranes and preparation method thereof |
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| Publication Number | Publication Date |
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| CN107178488A true CN107178488A (en) | 2017-09-19 |
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ID=59844288
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710495956.7A Pending CN107178488A (en) | 2017-06-26 | 2017-06-26 | A kind of two-way valve free miniflow pump based on PVDF piezoelectric membranes and preparation method thereof |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5921757A (en) * | 1996-05-27 | 1999-07-13 | Honda Giken Kogyo Kabushiki Kaisha | Piezoelectric fan |
| CN1959109A (en) * | 2006-11-10 | 2007-05-09 | 南京航空航天大学 | Standing wave driven piezoelectric ceramic pump capable of realizing positive and negative directional flow of liquid |
| CN102312822A (en) * | 2011-03-24 | 2012-01-11 | 南京航空航天大学 | Rotary traveling wave valveless piezoelectric driving pump |
| CN102678526A (en) * | 2011-03-14 | 2012-09-19 | 南开大学 | Travelling-wave valveless piezoelectric micropump of multistage diffusion micro-flow pipeline |
| CN104533762A (en) * | 2014-12-17 | 2015-04-22 | 西安交通大学 | Piezoelectric membrane pump and manufacturing method thereof |
| CN105201796A (en) * | 2015-10-29 | 2015-12-30 | 宁波大学 | Piezoelectric peristaltic micropump |
| CN106567820A (en) * | 2016-11-04 | 2017-04-19 | 西安交通大学 | Preparation method of driving pump based on P(VDF-TrFE) piezoelectric film |
-
2017
- 2017-06-26 CN CN201710495956.7A patent/CN107178488A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5921757A (en) * | 1996-05-27 | 1999-07-13 | Honda Giken Kogyo Kabushiki Kaisha | Piezoelectric fan |
| CN1959109A (en) * | 2006-11-10 | 2007-05-09 | 南京航空航天大学 | Standing wave driven piezoelectric ceramic pump capable of realizing positive and negative directional flow of liquid |
| CN102678526A (en) * | 2011-03-14 | 2012-09-19 | 南开大学 | Travelling-wave valveless piezoelectric micropump of multistage diffusion micro-flow pipeline |
| CN102312822A (en) * | 2011-03-24 | 2012-01-11 | 南京航空航天大学 | Rotary traveling wave valveless piezoelectric driving pump |
| CN104533762A (en) * | 2014-12-17 | 2015-04-22 | 西安交通大学 | Piezoelectric membrane pump and manufacturing method thereof |
| CN105201796A (en) * | 2015-10-29 | 2015-12-30 | 宁波大学 | Piezoelectric peristaltic micropump |
| CN106567820A (en) * | 2016-11-04 | 2017-04-19 | 西安交通大学 | Preparation method of driving pump based on P(VDF-TrFE) piezoelectric film |
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Application publication date: 20170919 |