CN104533762A - Piezoelectric membrane pump and manufacturing method thereof - Google Patents
Piezoelectric membrane pump and manufacturing method thereof Download PDFInfo
- Publication number
- CN104533762A CN104533762A CN201410787635.0A CN201410787635A CN104533762A CN 104533762 A CN104533762 A CN 104533762A CN 201410787635 A CN201410787635 A CN 201410787635A CN 104533762 A CN104533762 A CN 104533762A
- Authority
- CN
- China
- Prior art keywords
- hole
- piezoelectric film
- pump
- cover plate
- channel layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Reciprocating Pumps (AREA)
Abstract
The invention discloses a piezoelectric membrane pump and a manufacturing method of the piezoelectric membrane pump. The piezoelectric membrane pump comprises a cover plate, a piezoelectric membrane, a channel layer and a base plate from top to bottom. The cover plate, the piezoelectric membrane, the channel layer and the base plate are fixedly connected, the upper surface and the lower surface of the piezoelectric membrane are correspondingly plated with conductive film areas, and each conductive film area comprises a work area electrode of the piezoelectric membrane pump and a conducting region connected with the work area electrode of the piezoelectric membrane pump. The cover plate is provided with a first through hole, the first through hole is aligned to the corresponding work area electrode, on the piezoelectric membrane, of the corresponding piezoelectric membrane pump, the channel layer is provided with a fluid channel, one end of the fluid channel is communicated with the outside, the fluid channel comprises a second through hole, a liquid storage pool through hole, a liquid receiving pool through hole and channel groove holes, the second through hole is opposite to the first through hole, and the second through hole is communicated with the liquid receiving pool through hole and the liquid storage pool through hole through the channel groove holes. The manufacturing method is easy and convenient, expensive equipment is not needed at all in the whole manufacturing process, the manufacturing method can be definitely and widely popularized, and practicality is high.
Description
Technical field
The present invention relates to a kind of piezoelectric pump and preparation method thereof, be specifically related to a kind of piezoelectric film pump and preparation method thereof.
Background technique
Microfluid detection chip because have that volume is little, easy of integration, the feature such as to save time and be widely used in the fields such as biological detection, media coherence disturbance, biochemical analysis.Indispensable parts are had, Here it is miniflow pump in the use of microfluid.Microfluidic chip channel very little (micron order), cannot people operate for going, so the work of all conveying liquid all will have been gone by pump.The pump that current research microfluid uses has two kinds, and one is syringe pump, and one is peristaltic pump.These two kinds of pumps are commercially produced, and can meet the demand of various flow velocity.But there is a problem is exactly that this pump volume is huge, external external at micro-fluid chip, is connected with micro-fluid chip by delivery pipe.So, maximum impact is exactly the integrated of restriction micro-fluid chip, and the device of bulky complex also affects widely using of chip.
Adopt the example be integrated on micro-fluid chip by pump quite a few, but all there is such-and-such shortcoming.Such as fluid flowing is discontinuous, flow rates is narrow, complex manufacturing technology, difficulty are integrated.
Summary of the invention
The object of the invention is to the shortcoming overcoming above-mentioned prior art, provide a kind of piezoelectric film pump and preparation method thereof, this piezoelectric pump accessible site serves as conduit wall in microfluidic channel, there is not own vol, can driving fluid continuous-flow, flow rates wide, and simply easy to make.
For achieving the above object, piezoelectric film pump piezoelectric film pump of the present invention comprises cover plate, piezoelectric film from top to bottom successively, for providing channel layer and the substrate of passage for fluid flowing, is interconnected between cover plate, piezoelectric film, channel layer and substrate;
Upper surface and the lower surface correspondence of described piezoelectric film are coated with conductive film district, the working area electrode that conductive film district comprises piezoelectric film pump and the conducting region be connected with the working area electrode of piezoelectric film pump;
Described cover plate offers the first through hole, first through hole is just to the working area electrode of piezoelectric film pump corresponding on piezoelectric film, channel layer offers fluid passage, one end of fluid passage is connected with the external world, fluid passage comprises the second through hole, liquid storage tank through hole, receives liquid pool through hole and passage slotted eye, described second through hole is just to the first through hole, and the second through hole is all connected by passage slotted eye with between receipts liquid pool through hole and liquid storage tank through hole.
Described piezoelectric film is polarized and the piezoelectric film with piezoelectric effect of not belt electrode layer.
Described cover plate, channel layer and substrate are by a kind of in glass, silicon, silica, pottery, plexiglass, polypropylene, polyimide, teflon, organosilan, paper, nylon and rubber or carry out modification to it or the material that is composited is made.
Liquid in described liquid storage tank through hole is different to the resistance in inflow process in the second through hole from the liquid received in liquid pool through hole to the resistance in inflow process in the second through hole;
Liquid in described second through hole is different to the resistance received in liquid pool through hole in inflow process from the liquid in the second through hole to the resistance in inflow process in liquid storage tank through hole.
Described passage slotted eye is trapezium structure or y-type structure.
The making method of piezoelectric film pump of the present invention comprises the following steps:
1) piezoelectric film of definite shape is got, piezoelectric film is fixed on fixture according to polarised direction, and plate conductive film respectively at the upper surface of described piezoelectric film and lower surface, the upper surface of piezoelectric film and lower surface is made all to form plated film district, the working electrode district that described plated film district comprises piezoelectric film pump and the conducting region be connected with the working area electrode of piezoelectric film pump;
2) cover plate, channel layer and substrate is got, on the cover board offer the first through hole again, and on channel layer, offer liquid storage tank through hole, receive liquid pool through hole, passage slotted eye and just to the second through hole of the first through hole, first through hole is just to the working area electrode of piezoelectric film pump on piezoelectric film, and then cover plate, piezoelectric film, channel layer and substrate are fixedly connected with from top to bottom, finally to connecting test lead-in wire on conducting region, obtain piezoelectric film pump.
The present invention has following beneficial effect:
Piezoelectric film pump of the present invention comprises cover plate, piezoelectric film, channel layer and substrate from top to bottom successively, be interconnected between cover plate, piezoelectric film, channel layer and substrate, upper surface and the lower surface correspondence of piezoelectric film are coated with conductive film district, the working area electrode that conductive film district comprises piezoelectric film pump and the conducting region be connected with the working area electrode of piezoelectric film pump, the effect of conducting region is that extraction electrode is in order to convenient test.Cover plate offers the first through hole, first through hole is just to the working area electrode of piezoelectric film pump corresponding on piezoelectric film, channel layer offers fluid passage, one end of fluid passage is connected with the external world, fluid passage comprises the second through hole, liquid storage tank through hole, receives liquid pool through hole and passage slotted eye, described second through hole is just to the first through hole, and the second through hole is all connected by passage slotted eye with between receipts liquid pool through hole and liquid storage tank through hole; First through hole and the second through hole are all in order to provide oscillation space to piezoelectric film pump, also be that piezoelectric film pump applies the position of driving force to the fluid in passage, and making method is simple and convenient, expensive equipment, material can not be needed completely in whole working process, can extensively promote completely, practical.
Accompanying drawing explanation
Fig. 1 is the structural representation of cover plate 2 of the present invention;
Fig. 2 is the structural representation of piezoelectric film 1 in the present invention;
Fig. 3 is the structural representation of channel layer 3 in the present invention;
Fig. 4 is the sectional drawing of piezoelectric film pump described in the present invention;
Fig. 5 is the flow velocity test result of the piezoelectric film pump that in the present invention prepared by embodiment one;
Fig. 6 is the situation of change of flow velocity with added amplitude and frequency of the piezoelectric film pump that in the present invention prepared by embodiment one;
Fig. 7 is the structural representation of the channel layer 3 of the microfluid system for droplet generation that in the present invention prepared by embodiment two.
Wherein, 1 be piezoelectric film, 2 be cover plate, 3 be channel layer, 4 be barrier film working area electrode, 5 conducting regions, 6 first through holes, 7 be the second through hole, 8 are liquid storage tank, 9 be passage slotted eye for receiving liquid pool, 10.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail:
With reference to figure 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5, Fig. 6 and Fig. 7, piezoelectric film pump of the present invention comprises cover plate 2, piezoelectric film 1, channel layer 3 and substrate from top to bottom successively, is interconnected between cover plate 2, piezoelectric film 1, channel layer 3 and substrate; Upper surface and the lower surface correspondence of piezoelectric film 1 are coated with conductive film district, the working area electrode 4 that conductive film district comprises piezoelectric film pump and the conducting region 5 be connected with the working area electrode of piezoelectric film pump.The effect of conducting region is that extraction electrode is in order to convenient test; Described cover plate 2 offers the first through hole 6, first through hole 6 is just to the working area electrode 4 of piezoelectric film pump corresponding on piezoelectric film 1, channel layer 3 offers fluid passage, one end of fluid passage is connected with the external world, fluid passage comprises the second through hole 7, liquid storage tank through hole 8, receives liquid pool through hole 9 and passage slotted eye 10, described second through hole 7 is just all connected by passage slotted eye 10 with between receipts liquid pool through hole 9 and liquid storage tank through hole 8 to the first through hole 6, second through hole 7.First through hole 6 and the second through hole 7 are all in order to provide oscillation space to piezoelectric film pump, are also that piezoelectric film pump applies the position of driving force to the fluid in passage.
Piezoelectric film 1 is polarized and the piezoelectric film with piezoelectric effect of not belt electrode layer; Cover plate 2, channel layer 3 and substrate are by a kind of in glass, silicon, silica, pottery, plexiglass, polypropylene, polyimide, teflon, organosilan, paper, nylon and rubber or carry out modification to it or the material that is composited is made.The border of piezoelectric film working zone is mainly fixed in the use of cover plate 2 and substrate, can free vibration during to guarantee the piezoelectric film work of working zone; Channel layer is for fluid flowing provides passage, the situations such as material therefor can not react with through-flow body in passage, seepage.Such as, if the fluid aqueous solution in passage, so channel layer material is not then preferably hydrophilic material; Liquid in described liquid storage tank through hole 8 is different to the resistance in inflow process in the second through hole 7 from the liquid received in liquid pool through hole 9 to the resistance in inflow process in the second through hole 7; Liquid in described second through hole 7 is different to the resistance received in liquid pool through hole 9 in inflow process from the liquid in the second through hole 7 to the resistance in inflow process in liquid storage tank through hole 8; Circulation passage is trapezium structure or y-type structure.Be embodied in, the passage that fluid flows through from liquid storage tank to the working area of piezoelectric film pump is trapezoidal, concrete methods of realizing is, the opening bore D numerical value of the opening bore d of liquid storage tank and the working area of piezoelectric film pump is inconsistent, d is greater than D or d and is less than D, form trapezium structure, prerequisite is that the opening of the opening of liquid storage tank and the working area of piezoelectric film pump is positioned on same center line, and the different amount of trapezium structure are by adjusting the Numerical Implementation of d and D; In addition, the passage that fluid flows through from the working area of piezoelectric film pump to receipts liquid pool is also for trapezoidal, and implementation is consistent with mentioned above.For " Y " type, the a-road-through road that described is when flowing out from liquid storage tank is split up in midway the working area that two-way flows into piezoelectric film pump, flows to the structure receiving liquid pool identical with it from piezoelectric film district.Structure shape is similar to letter " Y ".
The making method of piezoelectric film pump of the present invention comprises the following steps:
1) piezoelectric film 1 of definite shape is got, piezoelectric film 1 is fixed on fixture according to polarised direction, and plate conductive film respectively in the upper and lower surface of described piezoelectric film 1, the upper surface of piezoelectric film 1 and lower surface is made all to form plated film district, the working electrode district 4 that described plated film district comprises piezoelectric film pump and the conducting region 5 be connected with the working area electrode of piezoelectric film pump;
2) cover plate 2, channel layer 3 and substrate is got, the first through hole 6 is offered again on cover plate 2, and on channel layer 3, offer liquid storage tank through hole 8, receive liquid pool through hole 9, passage slotted eye 10 and just to the second through hole 7 of the first through hole 6, first through hole 6 is just to the working area electrode 4 of piezoelectric film pump on piezoelectric film 1, and then cover plate 2, piezoelectric film 1, channel layer 3 and substrate are fixedly connected with from top to bottom, finally give connecting test lead-in wire on conducting region 5, obtain piezoelectric film pump.
Embodiment one
Piezoelectric film pump of the present invention and preparation method thereof comprises the following steps:
1) with sharp blade be that the not electroded PVDF piezoelectric film polarized of 28 microns is cut into 20 × 40 millimeters rectangular according to polarised direction by thickness, it is fixed on fixture along polarised direction, the mask plate making patterned electrodes is installed, this mask plate is that the poly (methyl methacrylate) plate laser beam cutting of use 1 millimeters thick is made, to be aperture the be circle of 5 millimeters of the piezoelectric film pump working area electrode on mask plate;
2) d.c. sputtering instrument is utilized to plate gold electrode respectively at piezoelectric film upper surface and lower surface, arranging sputtering current is 10 milliamperes, time is 25 minutes, the patterned gold electrode that a layer thickness is about 100 nanometers is respectively deposited at PVDF piezoelectric film upper surface and lower surface, after end, mask plate of dismantling;
3) laser beam cutting machine is used to be the rectangle that the plexiglass of 500 microns is cut into a piece 45 × 10 millimeters by thickness; The rectangle of one piece 40 × 10 millimeters, and the manhole having diameter identical with diaphragm diameter; Be the rectangle that the plexiglass of 250 microns is cut into a piece 45 × 10 millimeters by thickness, and be carved with the trapezoidal channel that angle is 15 °, liquid storage tank opening bore d is about 0.5 millimeter, and the opening bore D of working area is about 2 millimeters; Be the two sided plaster bonding of 50 microns with thickness between PVDF thin film and three blocks of plexiglass, finally at conducting region with room temperature silver slurry bonding filamentary silver as test lead, so far, whole element manufacturing completes °
With reference to figure 5 and Fig. 6, when applying amplitude is the square wave of 3000 volts, originally liquid speed is increase with the increase of electric voltage frequency, but after reaching peak frequency (110 hertz), flow velocity starts rapid reduction.This situation is consistent with anticipation: when frequency is too large, and barrier film deformation is very little, also less to the pressure of the fluid in passage, so flow velocity can reduce.Test obtains Peak Flow Rate and is approximately 300 mul/min, and corresponding flow rates is exactly 0-300 mul/min.The effect changing flow velocity can be reached by the parameter changing driving voltage.
When applying the square wave of different amplitude, can see, under same frequency, the larger liquid speed of voltage magnitude is larger; Under different amplitude, flow velocity is basically identical with the variation tendency of frequency, and increase flow velocity first increases and then decreases with frequency, Peak Flow Rate is between 100 hertz to 110 hertz.Amplitude more than 3000 volts after, piezoelectric film is easily breakdown, be difficult to when amplitude is too low drive flow of fluid.
Embodiment two
The making method that piezoelectric film pump of the present invention is used for microfluid system comprises the following steps:
1) be the not electroded PVDF piezoelectric film polarized of 28 microns to be cut into 50 × 110 millimeters rectangle according to polarised direction by thickness with sharp blade, it is fixed on fixture along polarised direction, the mask plate making patterned electrodes is installed, this mask plate is that the poly (methyl methacrylate) plate laser beam cutting of use 1 millimeters thick is made, to be aperture the be circle of 5 millimeters of the piezoelectric film pump working area electrode on mask plate;
2) d.c. sputtering instrument is utilized to plate gold electrode respectively at piezoelectric film upper surface and lower surface, arranging sputtering current is 10 milliamperes, time is 25 minutes, the patterned gold electrode that a layer thickness is about 100 nanometers is respectively deposited at PVDF piezoelectric film upper surface and lower surface, after end, mask plate of dismantling;
3) use laser beam cutting machine to be the rectangle that the plexiglass of 1 millimeter is cut into a piece 50 × 110 millimeters by thickness, and be carved with the manhole of same size with it at the corresponding position of piezoelectric film pump working area; The rectangle of one piece 50 × 110 millimeters, and be carved with and be positioned at liquid storage tank and the sample holes received on liquid pool and sample outlet hole; Be the rectangle that the two sided plaster of 150 microns is cut into a piece 50 × 110 millimeters by thickness, and be carved with the passage and other attached flow microchannel that angle is the trapezoidal pump of 15 °, liquid storage tank opening bore d is about 0.5 millimeter, and the opening bore D of working area is about 2 millimeters; Layers of material is fixedly connected with, and finally bonds filamentary silver as test lead in the conducting district for connecting lead wire with room temperature silver slurry, and so far, a microfluid system being applied to droplet generation completes.
The above embodiment only have expressed several mode of execution of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (6)
1. a piezoelectric film pump, it is characterized in that, comprise cover plate (2), piezoelectric film (1) from top to bottom successively, for providing channel layer (3) and the substrate of passage for fluid flowing, be interconnected between cover plate (2), piezoelectric film (1), channel layer (3) and substrate;
The upper surface of described piezoelectric film (1) and lower surface just to being coated with conductive film district, the working area electrode (4) that conductive film district comprises piezoelectric film pump and the conducting region (5) be connected with the working area electrode of piezoelectric film pump;
Described cover plate (2) offers the first through hole (6), first through hole (6) is just to the working area electrode (4) of the upper corresponding piezoelectric film pump of piezoelectric film (1), (3) offer fluid passage to channel layer, one end of fluid passage is connected with the external world, fluid passage comprises the second through hole (7), liquid storage tank through hole (8), receive liquid pool through hole (9) and passage slotted eye (10), second through hole (7) is just to the first through hole (6), second through hole (7) is all connected by passage slotted eye (10) with between receipts liquid pool through hole (9) and liquid storage tank through hole (8).
2. piezoelectric film pump according to claim 1, is characterized in that, described piezoelectric film (1) is polarized and the piezoelectric film with piezoelectric effect of not belt electrode layer.
3. piezoelectric film pump according to claim 1, it is characterized in that, described cover plate (2), channel layer (3) and substrate are by a kind of in glass, silicon, silica, pottery, plexiglass, polypropylene, polyimide, teflon, organosilan, paper, nylon and rubber or carry out modification to it or the material that is composited is made.
4. piezoelectric film pump according to claim 1, it is characterized in that, the liquid in described liquid storage tank through hole (8) is different to the resistance in inflow process in the second through hole (7) from the liquid received in liquid pool through hole (9) to the resistance in inflow process in the second through hole (7);
Liquid in described second through hole (7) is different to the resistance received in liquid pool through hole (9) in inflow process from the liquid in the second through hole (7) to the resistance in inflow process in liquid storage tank through hole (8).
5. piezoelectric film pump according to claim 1, is characterized in that, described passage slotted eye (10) is trapezium structure or y-type structure.
6. the making method of piezoelectric film pump according to claim 1, is characterized in that, based on piezoelectric film pump according to claim 1, comprises the following steps:
1) piezoelectric film (1) of definite shape is got, piezoelectric film (1) is fixed on fixture according to polarised direction, and plate conductive film respectively at the upper surface of described piezoelectric film (1) and lower surface, the upper surface of piezoelectric film (1) and lower surface is made all to form plated film district, the working electrode district (4) that described plated film district comprises piezoelectric film pump and the conducting region (5) be connected with the working area electrode of piezoelectric film pump;
2) cover plate (2) is got, channel layer (3) and substrate, the first through hole (6) is offered again on cover plate (2), and liquid storage tank through hole (8) is offered on channel layer (3), receive liquid pool through hole (9), passage slotted eye (10), and just to second through hole (7) of the first through hole (6), first through hole (6) is just to the working area electrode (4) of the upper piezoelectric film pump of piezoelectric film (1), and then by cover plate (2), piezoelectric film (1), channel layer (3) and substrate are fixedly connected sequentially from top to bottom, finally give conducting region (5) upper connecting test lead-in wire, obtain piezoelectric film pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410787635.0A CN104533762B (en) | 2014-12-17 | 2014-12-17 | A kind of piezoelectric film pump and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410787635.0A CN104533762B (en) | 2014-12-17 | 2014-12-17 | A kind of piezoelectric film pump and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104533762A true CN104533762A (en) | 2015-04-22 |
| CN104533762B CN104533762B (en) | 2017-01-04 |
Family
ID=52849352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410787635.0A Expired - Fee Related CN104533762B (en) | 2014-12-17 | 2014-12-17 | A kind of piezoelectric film pump and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104533762B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104998704A (en) * | 2015-07-29 | 2015-10-28 | 西安交通大学 | Integrated liquid drop generating chip based on piezoelectric film pumps and manufacturing method thereof |
| CN106567820A (en) * | 2016-11-04 | 2017-04-19 | 西安交通大学 | Preparation method of driving pump based on P(VDF-TrFE) piezoelectric film |
| CN107178488A (en) * | 2017-06-26 | 2017-09-19 | 西安交通大学 | A kind of two-way valve free miniflow pump based on PVDF piezoelectric membranes and preparation method thereof |
| CN110905789A (en) * | 2018-09-17 | 2020-03-24 | 研能科技股份有限公司 | MEMS pump |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005031886A1 (en) * | 2003-09-25 | 2005-04-07 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric element, ink-jet head with same, and their manufacturing methods |
| CN200989293Y (en) * | 2006-10-19 | 2007-12-12 | 吉林大学 | Micro water spraying propulsion pump |
| CN101389200A (en) * | 2007-09-14 | 2009-03-18 | 富准精密工业(深圳)有限公司 | Miniature fluid cooling system and miniature fluid driving device |
| WO2009128245A1 (en) * | 2008-04-17 | 2009-10-22 | 株式会社村田製作所 | Stacked piezoelectric element and piezoelectric pump |
| CN102562540A (en) * | 2011-12-27 | 2012-07-11 | 太原理工大学 | Diaphragm compressed valve-less micropump |
| CN102691647A (en) * | 2012-05-02 | 2012-09-26 | 江苏大学 | Valveless piezoelectric pump with, axially symmetric elliptic tubes |
| CN103026520A (en) * | 2010-07-26 | 2013-04-03 | 富士胶片株式会社 | Forming a device having a curved piezoelectric membrane |
-
2014
- 2014-12-17 CN CN201410787635.0A patent/CN104533762B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005031886A1 (en) * | 2003-09-25 | 2005-04-07 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric element, ink-jet head with same, and their manufacturing methods |
| CN200989293Y (en) * | 2006-10-19 | 2007-12-12 | 吉林大学 | Micro water spraying propulsion pump |
| CN101389200A (en) * | 2007-09-14 | 2009-03-18 | 富准精密工业(深圳)有限公司 | Miniature fluid cooling system and miniature fluid driving device |
| WO2009128245A1 (en) * | 2008-04-17 | 2009-10-22 | 株式会社村田製作所 | Stacked piezoelectric element and piezoelectric pump |
| CN103026520A (en) * | 2010-07-26 | 2013-04-03 | 富士胶片株式会社 | Forming a device having a curved piezoelectric membrane |
| CN102562540A (en) * | 2011-12-27 | 2012-07-11 | 太原理工大学 | Diaphragm compressed valve-less micropump |
| CN102691647A (en) * | 2012-05-02 | 2012-09-26 | 江苏大学 | Valveless piezoelectric pump with, axially symmetric elliptic tubes |
Non-Patent Citations (2)
| Title |
|---|
| 冯若等: "《超声手册》", 31 October 1999, 南京大学出版社 * |
| 陈开来: "《工程塑料手册》", 31 October 2004, 机械工业出版社 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104998704A (en) * | 2015-07-29 | 2015-10-28 | 西安交通大学 | Integrated liquid drop generating chip based on piezoelectric film pumps and manufacturing method thereof |
| CN106567820A (en) * | 2016-11-04 | 2017-04-19 | 西安交通大学 | Preparation method of driving pump based on P(VDF-TrFE) piezoelectric film |
| CN107178488A (en) * | 2017-06-26 | 2017-09-19 | 西安交通大学 | A kind of two-way valve free miniflow pump based on PVDF piezoelectric membranes and preparation method thereof |
| CN110905789A (en) * | 2018-09-17 | 2020-03-24 | 研能科技股份有限公司 | MEMS pump |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104533762B (en) | 2017-01-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Gao et al. | A handy liquid metal based electroosmotic flow pump | |
| CN109012769B (en) | Micro-fluidic liquid drop generation device and method based on surface acoustic wave | |
| CN104533762A (en) | Piezoelectric membrane pump and manufacturing method thereof | |
| Wu et al. | An alternating current electroosmotic pump based on conical nanopore membranes | |
| CN108854854B (en) | Functional fluid door control system | |
| US20040241004A1 (en) | Electroosmotic micropump with planar features | |
| CN109482248B (en) | Low-pressure electroosmosis pump based on nano porous film | |
| WO2000079131A1 (en) | Eliminating gas blocking in electrokinetic pumping systems | |
| US8425750B2 (en) | Fluid structure control device | |
| CN110052298A (en) | A method of vibration pipeline control micro-fluidic chip generates microlayer model | |
| CN104998704A (en) | Integrated liquid drop generating chip based on piezoelectric film pumps and manufacturing method thereof | |
| CN113333040B (en) | Micro-fluidic device for converging high-integration-degree micro-nano particles by utilizing oscillatory flow | |
| CN110624427A (en) | Bubble generation device and method based on surface acoustic wave micro-fluidic | |
| CN103170265B (en) | A kind of Piezoelectric micro-mixer | |
| CN105570531A (en) | Micro-fluidic chip flow adjusting system and method | |
| US20220331794A1 (en) | Electroosmotic Micropump Apparatus and Electroosmotic Micropump Apparatus Group | |
| CN105457692A (en) | Microfluidic separation device and method | |
| CN203248325U (en) | Piezoelectric micropump based on synthetic jet | |
| EP1465729A1 (en) | Microfluidic movement | |
| Muthu et al. | Enhanced electro-osmotic pumping with liquid bridge and field effect flow rectification | |
| CN103016296A (en) | Piezoelectric micropump based on synthetic jet | |
| CN1908432A (en) | Two-way valve free pump | |
| Islam et al. | MEMS microfluidics for Lab-on-a-Chip Applications | |
| US20190201890A1 (en) | Electrostatic pump | |
| Fuchsluger et al. | Acoustic Particle Manipulation Along Three Orthogonal Directions in Laser Engraved Microfluidic Channels |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170104 Termination date: 20191217 |