CN101301990A - Sonic surface wave microfluid driver for chip lab and manufacturing method thereof - Google Patents
Sonic surface wave microfluid driver for chip lab and manufacturing method thereof Download PDFInfo
- Publication number
- CN101301990A CN101301990A CNA2008100327501A CN200810032750A CN101301990A CN 101301990 A CN101301990 A CN 101301990A CN A2008100327501 A CNA2008100327501 A CN A2008100327501A CN 200810032750 A CN200810032750 A CN 200810032750A CN 101301990 A CN101301990 A CN 101301990A
- Authority
- CN
- China
- Prior art keywords
- microfluid
- surface wave
- micro
- raceway groove
- floating electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Micromachines (AREA)
Abstract
The invention relates to a surface acoustic wave micro-fluidic drive for a chip lab pertaining to the technical field of micro-electro-mechanical system and a manufacture method thereof. The drive of the invention comprises a base, an interdigital transducer and a micro-fluidic channel, wherein the base is a 128 degrees Y-X lithium niobate single crystal, an IDT formed by the intercrossed interdigital transducer is on the base, and the micro-fluidic channel is integrated with the base. The invention uses floating electrode type unidirectional transducer structure design to realize unidirectional driving of the micro fluid, the procedure of the method is: (1) processing of the floating electrode type unidirectional transducer; (2) micro-processing of the micro-fluidic channel; (3) integration of the base and the micro-fluidic channel. The whole processing procedure of the invention can be completely made by means of semiconductor material based micro-manufacture method, having characteristics of no moving micro-parts itself and no damage to the fluid dielectric etc., the processing has advantages of reliable operation, stabilization and long service life.
Description
Technical field
The present invention relates to a kind of driver and manufacture method thereof of micro-electromechanical system field, specifically is a kind of sonic surface wave microfluid driver and manufacture method thereof that is used for chip lab.
Background technology
In recent years, biochip technology has obtained more and more people's attention, and it has broad application prospects in fields such as biology, basic medical research, medical diagnosis on disease, new drug development, improved crop variety seed selection, judicial expertise, Food Hygiene Surveillance, environmental monitoring, national defence, space flight.On behalf of technology product, it be based on the micro-full analytical system of chip lab (Lab-on-chip), the feature of this system is to utilize microelectronics, micromechanics, chemistry, physics and computer technology, and the sample detection in the life science, analytic process are realized serialization, integrated, microminiaturized.These each parts that just especially needs to form system all will be simple small-sized as much as possible and be suitable for a large amount of integrated.Such as, on a very little chip, want many micro-structurals such as integrated filter, reative cell, Micropump, little valve.Simultaneously on the other hand, the MEMS that gets up based on micron, Nano-technology Development, owing to be highly integrated optical, mechanical and electronic integration system, driver is system's inalienable part, as the microfluid drive system, form by the intensive little raceway groove of circuitous type, microflow sensor, mini drive, little interface etc., and integrated/be assembled together.Whole system also will have special-purpose signal to handle and drive circuit, is used for microdrive is entered intelligent the driving, and this not only is easy to little equipment and realizes that micro-system is integrated, and is beneficial to the mobile index of regulating microfluid in wide region.
Micro-flow system is the important branch of MEMS, and Micropump is the important symbol of its development level as the performer of an important micro-flow system.Micropump has or not movable valve block to be divided into according to it valve type Micropump and valveless type Micropump.Valve type Micropump is arranged often based on Mechanical Driven, principle is simple, and the manufacturing process maturation is easy to control, is the main flow of using at present; The valveless type Micropump then usually utilizes the new features of fluid under minute yardstick, and principle is relatively more novel, is more suitable for microminiaturization, has bigger development prospect.
Find by prior art documents, " A novelmicromachined pump based on thick-film piezoelectric actuation " (" a kind of micropump based on the thick film Piezoelectric Driving ") that be published on Sensors and Actuators A 70 (1998) 98-103 (" sensor and driver " A in 1998 rolls up 70 phase 98-103 pages or leaves) proposed a kind of piezoelectric type micropump of thick film PZT as the Piezoelectric Driving layer of making on silicon base, its operation principle is to rely on the flexural piezoelectric deformation of PZT layer to drive.This drive membrane size is 8mm*4mm*70um, and Micropump is at 200HZ, under the sinusoidal voltage of 600V, and maximum stream flow 122 μ l/min.The shortcoming of this piezoelectric micropump is that operating voltage is higher, and operating frequency is low, is not suitable for accurate control, and is limited to the complicated manufacture craft of piezoelectric film, is not suitable for carrying out large-scale mass production.
Now, the application that is used to design microsensor and microdrive of surface acoustic wave (SAW) technology more and more obtains researcher's attention.The SAW device characteristics is that volume is little, in light weight; Flexible design is convenient.The amplitude of device and phase place can design respectively, and this has improved the flexibility of its design greatly; Semiconductor planar technology is adopted in the manufacturing of SAW device, is suitable for producing the cost performance height in batches; Good reproducibility, reliability height; The operating frequency height.But since not enough with combine of MEMS technology and Drive technology, also inreal so far convenient, practical, effective SAW microdrive.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, a kind of sonic surface wave microfluid driver and manufacture method thereof that is used for chip lab is provided, make its combining with surface acoustic wave techniques and MEMS technology and Drive technology, realize the microdrive that real convenient, practical, effective SAW drives, be applied to microfluid system.
The present invention is achieved by the following technical solutions:
The sonic surface wave microfluid driver that is used for chip lab involved in the present invention comprises: substrate, interdigital transducer (IDT) and microfluid raceway groove.Wherein, substrate is the lithium niobate monocrystal body of 128 ° of Y-X, is the interdigital transducer that cross one another interdigital electrode (IDE) forms on it, and the microfluid raceway groove that combines with substrate is by little the processing of PDMS (dimethyl silicone polymer) material.
Described interdigital transducer is a floating electrode type unilateral transducer, promptly is provided with stripe shape and U type floating electrode between existing interdigital transducer positive and negative electrode.
The above-mentioned drive operation principle of the present invention is: interdigital transducer converts the electrical signal to acoustic signals, and the surface acoustic wave that produces in the lithium niobate monocrystal surface is propagated along the surface, the fluid motion above driving afterwards.Interdigital transducer of the present invention adopts floating electrode type unilateral transducer structural design to realize that the folk prescription of microfluid is to driving.This transducer is different from general symmetrical expression interdigital transducer, between positive and negative electrode, be provided with stripe shape and U type floating electrode, thereby the surface acoustic wave left and right sides ripple that causes floating electrode type unilateral transducer electrode to produce does not wait by force, so this structure can show unidirectional drive after powering up, know from experience along with flowing in the strong direction of propagation of the higher ripple of surface acoustic wave at its upper reaches.
The manufacture method of the sonic surface wave microfluid driver that is used for chip lab involved in the present invention specifically comprises the steps:
1. the processing of floating electrode type unilateral transducer;
2. little processing of microfluid raceway groove;
3. substrate and microfluid raceway groove combines.
The processing of described floating electrode type unilateral transducer is specially: at first, and sputter one deck Al at the bottom of the lithium niobate base.Secondly, on the Al layer, apply photoresist, carry out photoetching and form the photoresist figure.Then, Al is carried out etching.Remove photoresist at last and obtain floating electrode type unilateral transducer structure, this structure is between positive and negative electrode, has disposed floating electrode, and it can show unidirectional drive after powering up, and know from experience along with flowing in the strong direction of propagation of the higher ripple of surface acoustic wave at its upper reaches.
Little processing of described microfluid raceway groove is specially: at first, and sputter one deck Al in the Si substrate.Secondly, form the mask pattern of ICP-RIE (ion etching of the induction coupled reaction) etching of Si with Al.Then, Si is carried out ICP-RIE (ion etching of induction coupled reaction) etching and Al is carried out the complementation model that etching obtains the microfluid raceway groove.Use PDMS (dimethyl silicone polymer) coating model to obtain PDMS (dimethyl silicone polymer) microfluid raceway groove at last.
Described substrate realizes with combining by adhesive of microfluid raceway groove.
Compared with prior art, the present invention is the sonic surface wave microfluid driver that can be used for chip lab, and its principle is to utilize the microfluid of surface acoustic wave in the suprabasil propagation driving of lithium niobate chip lab.Whole process can be made by the little manufacture method of based semiconductor material fully, owing to itself no activity microcomponent, characteristics such as fluid medium not damaged, make it have reliable operation, stable, advantage such as the life-span is long, the utmost point is suitable for the environment microfluid TT﹠C system of long-term work, drug-treated is in the systems such as chemical little dispensing.
Description of drawings
Fig. 1 is a structural representation of the present invention
Fig. 2 is a principle of the invention schematic diagram
Fig. 3 is a floating electrode type unilateral transducer structural representation among the present invention
The specific embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, be used for the sonic surface wave microfluid driver of chip lab in the present embodiment, comprise: substrate 1, interdigital transducer 2 and microfluid raceway groove 3.Wherein, substrate 1 is the lithium niobate monocrystal body of 128 ° of Y-X, is the interdigital transducer 2 that cross one another interdigital electrode forms on it, and the microfluid raceway groove 3 that combines with substrate 1 is by little the processing of PDMS (dimethyl silicone polymer) material.
As shown in Figure 2, interdigital transducer 2 in the present embodiment is a floating electrode type unilateral transducer, promptly between existing interdigital transducer 2 positive and negative electrodes, be provided with stripe shape and U type floating electrode simultaneously, their particular location relation is, each electrode cycle has comprised a U type floating electrode, and two stripe shape electrodes and align negative electrode; Wherein, stripe shape electrode and negative electrode are positioned at the U type zone of a U type floating electrode, and another one stripe shape electrode is positioned at outside the U type zone.Because surface acoustic wave 4 left and right sides ripples that the electrode of floating electrode type unilateral transducer produces do not wait by force, so this structure can show unidirectional drive after powering up, fluid 5 can flow along with the strong direction of propagation of the higher ripple of surface acoustic wave on it.Under the effect of interdigital transducer 2, produce flowing of direction as shown in the figure at the fluid in the substrate 15.
The manufacture method of the sonic surface wave microfluid driver that is used for chip lab that present embodiment relates to specifically comprises the steps:
1. the processing of floating electrode type unilateral transducer;
2. little processing of microfluid raceway groove;
3. substrate and microfluid raceway groove combines.
The processing of described floating electrode type unilateral transducer is specially: at first, sputter one deck Al at the bottom of the lithium niobate base, process conditions are sputters 40 minutes under the Ar of 0.6Pa gas condition, sputtering power is 600W.Secondly, 1000rpm (rev/min) changeed 5 seconds down, 3500rpm changes down under 25 seconds the condition, coating OFPR-800LB photoresist is 35mJ/cm in light exposure then on the Al layer
2Condition under carry out photoetching and form the photoresist figure.Once more, Al is carried out etching.Remove photoresist at last and obtain as shown in Figure 3 floating electrode type unilateral transducer structure, this structure is between positive and negative electrode 1,2, disposed floating electrode 3,4, it can show unidirectional drive after powering up, and know from experience along with flowing in the strong direction of propagation of the higher ripple of SAW at its upper reaches.
Little processing of described microfluid raceway groove is specially: at first, and sputter one deck Al in the Si substrate.Secondly, form the mask pattern of ICP-RIE (ion etching of the induction coupled reaction) etching of Si with Al.Then, Si is carried out ICP-RIE (ion etching of induction coupled reaction) etching and Al is carried out the complementation model that etching obtains the microfluid raceway groove.Obtain PDMS microfluid raceway groove with PDMS coating model at last.
Described substrate realizes with combining by adhesive of microfluid raceway groove.
The sonic surface wave microfluid driver physical dimension that present embodiment is made is 18*9mm
2, interdigital transducer interdigital transducer live width 8um, 40 pairs of logarithms when radio-frequency power supply is operated in 48.9MHz on being added in interdigital transducer, drives electric power and reach 6.2W, are 0.8*0.8mm for the cross section
2The microfluid raceway groove, the stream scooter 20mm/s of microfluid.
The sonic surface wave microfluid driver process that present embodiment is made can be made by the little manufacture method of based semiconductor material fully, owing to itself no activity microcomponent, characteristics such as fluid medium not damaged, make it have reliable operation, stable, advantage such as the life-span is long, the utmost point is suitable for the environment microfluid TT﹠C system of long-term work, drug-treated is in the systems such as chemical little dispensing.
Claims (10)
1. sonic surface wave microfluid driver that is used for chip lab, it is characterized in that, comprise: substrate, interdigital transducer and microfluid raceway groove, wherein, substrate is the lithium niobate monocrystal body of 128 ° of Y-X, be the interdigital transducer that cross one another interdigital electrode forms on it, the microfluid raceway groove combines with substrate.
2. the sonic surface wave microfluid driver that is used for chip lab according to claim 1, it is characterized in that, described interdigital transducer is a floating electrode type unilateral transducer, stripe shape and U type floating electrode promptly is set between existing interdigital transducer positive and negative electrode constitutes.
3. the sonic surface wave microfluid driver that is used for chip lab according to claim 1 and 2, it is characterized in that, described stripe shape and U type floating electrode, their particular location relation is: each electrode cycle has comprised a U type floating electrode, two stripe shape electrodes and pair of positive and negative, wherein, stripe shape electrode and negative electrode are positioned at the U type zone of a U type floating electrode, and another one stripe shape electrode is positioned at outside the U type zone.
4. the sonic surface wave microfluid driver that is used for chip lab according to claim 1 is characterized in that, described microfluid raceway groove, its material are dimethyl silicone polymer.
5. a manufacture method that is used for the sonic surface wave microfluid driver of chip lab is characterized in that, comprises the steps:
1. the processing of floating electrode type unilateral transducer;
2. little processing of microfluid raceway groove;
3. substrate and microfluid raceway groove combines;
The processing of described floating electrode type unilateral transducer is specially:
At first, secondly sputter one deck Al at the bottom of the lithium niobate base, applies photoresist on the Al layer, and carry out photoetching and form the photoresist figure,
Then, Al is carried out etching,
Remove photoresist at last and obtain floating electrode type unilateral transducer structure, this structure is between positive and negative electrode, has disposed floating electrode;
Little processing of described microfluid raceway groove is specially:
At first, sputter one deck Al in the Si substrate,
Secondly, form the mask pattern of the induction coupled reaction ion etching of Si with Al,
Then, Si is responded to coupled reaction ion etching and Al is carried out the complementation model that etching obtains the microfluid raceway groove,
Obtain dimethyl silicone polymer microfluid raceway groove with dimethyl silicone polymer coating model at last.
6. the manufacture method that is used for the sonic surface wave microfluid driver of chip lab according to claim 5, it is characterized in that, described coating photoresist, sputter one deck Al at the bottom of the lithium niobate base, process conditions are sputters 40 minutes under the Ar of 0.6Pa gas condition, sputtering power is 600W, applies photoresist on the Al layer.
7. the manufacture method that is used for the sonic surface wave microfluid driver of chip lab according to claim 5, it is characterized in that described coating photoresist, sputter one deck Al at the bottom of the lithium niobate base, process conditions are to change 5 seconds under 1000rpm, apply photoresist on the Al layer.
8. the manufacture method that is used for the sonic surface wave microfluid driver of chip lab according to claim 5, it is characterized in that described coating photoresist, sputter one deck Al at the bottom of the lithium niobate base, process conditions are under 25 seconds the condition of commentaries on classics, to apply photoresist on the Al layer under 3500rpm.
9. according to each the described manufacture method that is used for the sonic surface wave microfluid driver of chip lab among the claim 5-8, it is characterized in that described coating photoresist is 35mJ/cm in light exposure
2Condition under carry out photoetching and form the photoresist figure.
10. the manufacture method that is used for the sonic surface wave microfluid driver of chip lab according to claim 5 is characterized in that, described substrate realizes with combining by adhesive of microfluid raceway groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008100327501A CN101301990A (en) | 2008-01-17 | 2008-01-17 | Sonic surface wave microfluid driver for chip lab and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008100327501A CN101301990A (en) | 2008-01-17 | 2008-01-17 | Sonic surface wave microfluid driver for chip lab and manufacturing method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101301990A true CN101301990A (en) | 2008-11-12 |
Family
ID=40112128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008100327501A Pending CN101301990A (en) | 2008-01-17 | 2008-01-17 | Sonic surface wave microfluid driver for chip lab and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101301990A (en) |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101497006B (en) * | 2009-01-15 | 2011-04-20 | 宁波大学 | Digital microfluid micro-mixer and mixing method |
| CN101543757B (en) * | 2009-04-30 | 2011-05-04 | 上海交通大学 | Preparation method for realizing micro-encapsulation of core material by acoustic surface wave atomizer |
| CN103492078A (en) * | 2011-02-24 | 2014-01-01 | 格拉斯哥大学校董事会 | Fluidics apparatus for surface acoustic wave manipulation of fluid samples, use of fluidics apparatus and process for the manufacture of fluidics apparatus |
| CN103585943A (en) * | 2013-10-29 | 2014-02-19 | 西安交通大学 | Micro-reactor suitable for micro-liquid mixing and biochemical reaction and manufacturing method thereof |
| CN105435869A (en) * | 2015-11-06 | 2016-03-30 | 常州工学院 | Apparatus and method for micro-droplet split in microchannel |
| US9375690B2 (en) | 2009-08-24 | 2016-06-28 | The University Court Of The University Of Glasgow | Fluidics apparatus and fluidics substrate |
| CN106390306A (en) * | 2016-09-06 | 2017-02-15 | 深圳先进技术研究院 | Ultrasonic nerve regulation system |
| CN106824315A (en) * | 2017-02-24 | 2017-06-13 | 常州工学院 | The device and method of micro- liquid heating in a kind of detection zone of array chip |
| CN107102058A (en) * | 2017-05-05 | 2017-08-29 | 杭州电子科技大学 | It is a kind of to be imaged based on what surface acoustic wave drove without lens miniflow and its detecting system |
| CN108511600A (en) * | 2018-02-28 | 2018-09-07 | 云南中烟工业有限责任公司 | A kind of sound causes the preparation method of atomization chip |
| CN109507008A (en) * | 2018-10-24 | 2019-03-22 | 西安交通大学 | A kind of microlayer model snap cure device based on surface acoustic wave drop micro-fluidic chip |
| WO2019169573A1 (en) * | 2018-03-07 | 2019-09-12 | 中国科学院深圳先进技术研究院 | Surface acoustic wave microfluidic chip and method for forming micrometer-sized acoustic focal region |
| CN110314715A (en) * | 2019-07-17 | 2019-10-11 | 西安交通大学 | Micro-fluidic chip is enriched with based on focusing surface acoustic wave and the particle of microlayer model technology |
| WO2020093802A1 (en) * | 2018-11-06 | 2020-05-14 | 京东方科技集团股份有限公司 | Microfluidic channel structure and manufacturing method thereof, and microfluidic detection device and detection method thereof |
| CN111254076A (en) * | 2020-01-19 | 2020-06-09 | 武汉大学 | Hexagonal surface wave acoustic tweezers chip for cell arrangement and assembly |
| CN111389473A (en) * | 2020-03-25 | 2020-07-10 | 武汉大学 | Vertical channel tunable high-flux acoustic flow control sorting chip and preparation method thereof |
| CN112169852A (en) * | 2020-10-28 | 2021-01-05 | 南京大学 | Coupling resonance type surface acoustic wave micro-fluidic chip and manufacturing method thereof |
| US11311686B2 (en) | 2014-11-11 | 2022-04-26 | The University Court Of The University Of Glasgow | Surface acoustic wave device for the nebulisation of therapeutic liquids |
-
2008
- 2008-01-17 CN CNA2008100327501A patent/CN101301990A/en active Pending
Cited By (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101497006B (en) * | 2009-01-15 | 2011-04-20 | 宁波大学 | Digital microfluid micro-mixer and mixing method |
| CN101543757B (en) * | 2009-04-30 | 2011-05-04 | 上海交通大学 | Preparation method for realizing micro-encapsulation of core material by acoustic surface wave atomizer |
| US9375690B2 (en) | 2009-08-24 | 2016-06-28 | The University Court Of The University Of Glasgow | Fluidics apparatus and fluidics substrate |
| US9751057B2 (en) | 2009-08-24 | 2017-09-05 | The University Court Of The University Of Glasgow | Fluidics apparatus and fluidics substrate |
| US9410873B2 (en) | 2011-02-24 | 2016-08-09 | The University Court Of The University Of Glasgow | Fluidics apparatus for surface acoustic wave manipulation of fluid samples, use of fluidics apparatus and process for the manufacture of fluidics apparatus |
| CN103492078B (en) * | 2011-02-24 | 2016-10-19 | 格拉斯哥大学校董事会 | Mjector, the purposes of mjector and the method for manufacture mjector processed for the surface acoustic wave of fluid sample |
| CN103492078A (en) * | 2011-02-24 | 2014-01-01 | 格拉斯哥大学校董事会 | Fluidics apparatus for surface acoustic wave manipulation of fluid samples, use of fluidics apparatus and process for the manufacture of fluidics apparatus |
| CN103585943A (en) * | 2013-10-29 | 2014-02-19 | 西安交通大学 | Micro-reactor suitable for micro-liquid mixing and biochemical reaction and manufacturing method thereof |
| US11771846B2 (en) | 2014-11-11 | 2023-10-03 | The University Court Of The University Of Glasgow | Nebulisation of liquids |
| US11311686B2 (en) | 2014-11-11 | 2022-04-26 | The University Court Of The University Of Glasgow | Surface acoustic wave device for the nebulisation of therapeutic liquids |
| CN105435869B (en) * | 2015-11-06 | 2017-05-10 | 常州工学院 | Apparatus and method for micro-droplet split in microchannel |
| CN105435869A (en) * | 2015-11-06 | 2016-03-30 | 常州工学院 | Apparatus and method for micro-droplet split in microchannel |
| CN106390306B (en) * | 2016-09-06 | 2019-07-19 | 中科绿谷（深圳）医疗科技有限公司 | A kind of ultrasound neuromodulation system |
| CN106390306A (en) * | 2016-09-06 | 2017-02-15 | 深圳先进技术研究院 | Ultrasonic nerve regulation system |
| CN106824315A (en) * | 2017-02-24 | 2017-06-13 | 常州工学院 | The device and method of micro- liquid heating in a kind of detection zone of array chip |
| CN107102058A (en) * | 2017-05-05 | 2017-08-29 | 杭州电子科技大学 | It is a kind of to be imaged based on what surface acoustic wave drove without lens miniflow and its detecting system |
| CN108511600A (en) * | 2018-02-28 | 2018-09-07 | 云南中烟工业有限责任公司 | A kind of sound causes the preparation method of atomization chip |
| WO2019169573A1 (en) * | 2018-03-07 | 2019-09-12 | 中国科学院深圳先进技术研究院 | Surface acoustic wave microfluidic chip and method for forming micrometer-sized acoustic focal region |
| CN109507008A (en) * | 2018-10-24 | 2019-03-22 | 西安交通大学 | A kind of microlayer model snap cure device based on surface acoustic wave drop micro-fluidic chip |
| CN109507008B (en) * | 2018-10-24 | 2020-02-14 | 西安交通大学 | Micro-droplet rapid solidification device based on surface acoustic wave droplet micro-fluidic chip |
| WO2020093802A1 (en) * | 2018-11-06 | 2020-05-14 | 京东方科技集团股份有限公司 | Microfluidic channel structure and manufacturing method thereof, and microfluidic detection device and detection method thereof |
| US11219894B2 (en) | 2018-11-06 | 2022-01-11 | Boe Technology Group Co., Ltd. | Microfluidic channel structure and fabrication method thereof, microfluidic detecting device and detecting method thereof |
| CN110314715A (en) * | 2019-07-17 | 2019-10-11 | 西安交通大学 | Micro-fluidic chip is enriched with based on focusing surface acoustic wave and the particle of microlayer model technology |
| CN111254076A (en) * | 2020-01-19 | 2020-06-09 | 武汉大学 | Hexagonal surface wave acoustic tweezers chip for cell arrangement and assembly |
| CN111389473A (en) * | 2020-03-25 | 2020-07-10 | 武汉大学 | Vertical channel tunable high-flux acoustic flow control sorting chip and preparation method thereof |
| CN112169852A (en) * | 2020-10-28 | 2021-01-05 | 南京大学 | Coupling resonance type surface acoustic wave micro-fluidic chip and manufacturing method thereof |
| CN112169852B (en) * | 2020-10-28 | 2021-06-22 | 南京大学 | Coupling resonance type surface acoustic wave micro-fluidic chip and manufacturing method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101301990A (en) | Sonic surface wave microfluid driver for chip lab and manufacturing method thereof | |
| Le et al. | Piezoelectric MEMS—Evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era | |
| US8865003B2 (en) | Apparatus and method for separation of particles suspended in a liquid from the liquid in which they are suspended | |
| US9410873B2 (en) | Fluidics apparatus for surface acoustic wave manipulation of fluid samples, use of fluidics apparatus and process for the manufacture of fluidics apparatus | |
| CN103585943A (en) | Micro-reactor suitable for micro-liquid mixing and biochemical reaction and manufacturing method thereof | |
| CN109012771B (en) | Full-transparent microfluidic acoustic bulk wave chip and preparation method thereof | |
| CN104726331A (en) | Acoustic surface wave based microfluidic plasma separating chip and method | |
| CN102896007B (en) | Microfluidic control element and preparation method thereof | |
| EP2809428A1 (en) | Microfluidic manipulation and sorting of particles using tunable standing surface acoustic wave | |
| JP2003202321A (en) | Electrical detector for fine substance on chip | |
| CN106914288B (en) | A kind of micro-fluidic high frequency sound focusing chip and preparation method thereof | |
| CN102279255B (en) | Mechanical dynamic regulation and control chip for single cell total environment | |
| Samarasekera et al. | Trapping, separating, and palpating microbead clusters in droplets and flows using capacitive micromachined ultrasonic transducers (CMUTs) | |
| CN1603761A (en) | Flexible plate wave differential pressure type micro flow transducer and fabricating method thereof | |
| CN116656489B (en) | Standing wave acoustic fluid control device for sorting exosomes in body fluid and use method thereof | |
| EP3498373A1 (en) | Microfluidic device and manufacturing method therefor | |
| CN116393183A (en) | Microfluidic device for particle sorting based on phonon crystal structure | |
| US11213821B2 (en) | Microfluidic device and manufacturing method therefor | |
| CN2752730Y (en) | Flexible flat-plate wave differential type micro-flow sensor | |
| CN218393731U (en) | Microfluidic chip for controlling particles to realize static detection in flowing fluid | |
| CN117305102B (en) | Acoustic flow control device for sorting outer vesicles in plasma sample and use method thereof | |
| CN110523447A (en) | A kind of micro-fluidic chip and preparation method thereof of pair of cell multi-angle mechanical meaurement | |
| CN203241062U (en) | Piezoelectric film resonance sensor with half-oval micro channel | |
| CN113117766B (en) | Acoustic tweezers for micro-fluidic | |
| Koch | Silicon micromachined pumps employing piezoelectric membrane actuation for microfluidic systems |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20081112 |