CN205580993U - Liquid drop produces device based on micro -fluidic chip and piezoceramics component - Google Patents
Liquid drop produces device based on micro -fluidic chip and piezoceramics component Download PDFInfo
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- CN205580993U CN205580993U CN201620330947.3U CN201620330947U CN205580993U CN 205580993 U CN205580993 U CN 205580993U CN 201620330947 U CN201620330947 U CN 201620330947U CN 205580993 U CN205580993 U CN 205580993U
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- fluidic chip
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- piezoelectric ceramic
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Abstract
The utility model discloses a liquid drop produces device based on micro -fluidic chip and piezoceramics component, the device is used for carrying out LIBS to the liquid sample and detects, and it includes: place the liquid sample that awaits measuring to make aforementioned liquid sample to flow and to produce the micro -fluidic chip that corresponding liquid drop flows out in its inside microchannel, and arrange in inside the micro -fluidic chip, can extrude flowing liquid sample in the microchannel to make the liquid sample receive the outflow of extrusion back micro -fluidic chip's piezoelectric ceramic actuator, the liquid sample is receiving the extrusion back certainly micro -fluidic chip flows, produces the liquid drop. The utility model discloses LIBS can be effectively improved and using stability and reducing detection limit of time measuring is examined to the liquid sample.
Description
Technical field
This utility model relates to LIBS detection technique, particularly relates to a kind of based on micro-fluidic chip and pressure
The method that the dropproducing devices of electroceramics element and realization carry out LIBS detection to fluid sample.
Background technology
LIBS (Laser Induced Breakdown Spectroscopy-LIBS) is base
Transient state plasma is produced with matter interaction, by analyzing plasma emission in high power pulsed laser
Spectrum Atom, ion characteristic spectral line, it is achieved a kind of spectral technique to determinand quantification and qualification.
LIBS detection has sample morphology non-selectivity, micro-damage and without sample pretreatment, multiple different elements
Simultaneously detection analyze and can be quick or real-time to features such as sample are analyzed.But laser is in a liquid
During induced plasma, affected by absorbing the problems such as scattering, fluctuation, pressure, conduction of heat, made LIBS
Fluid sample is existed the problem such as application poor stability and detectable limit height.
At present, the solution that fluid sample is detected by LIBS mainly has liquid surface to puncture, double-pulse laser,
Fluid sample changes into solid-state, fluid sample is attached on solid dielectric and particular form is by the mesh in liquid
Mark composition first enrichment etc..
Carrying out puncturing at liquid surface is considered as to avoid early stage communication process to be lost, and improves high detection spirit
The method of sensitivity.The method has certain reduction to detectable limit, but the method for surface breakdown is vulnerable to sputtering
Fluctuation with radiation limits.
DP-LIBS is considered as a kind of not only to have can guarantee that LIBS self character but also can improve a kind of new of signal quality
Method, to improve detection sensitivity also have bigger help.Double-pulse laser punctures at liquid internal, passes through
Optimize the parameter such as pulse energy and time delay, the detectable limit of various metals composition can be reduced.But dipulse system
The complexity of equipment, light path and the operation of system is higher, and dual pulse welding cost is the highest.
Liquid changes into the idea of solid-state and is proposed out subsequently.JO C á ceres et al. proposes fluid sample
Quick freezing Cheng Bing, then carries out LIBS experiment.Pace et al. then utilizes calcium oxide CaO by fluid sample
Solidification, then carries out LIBS detection.These methods detection limit improves, but its sample treatment mistake
Journey is complicated, and later approach also needs to add substantial amounts of additional chemical components.
Being attached to fluid sample on solid dielectric then carry out LIBS experiment is also a kind of raising detection sensitivity
One of method.It directly carries out LIBS experiment to the batten sample being soaked with fluid sample, or utilizes filter paper
Detect as substrate adsorptive liquid sample.These methods rely on substrate self character to a certain extent,
But sample pretreatment required time is longer, LIBS technology feature real-time, quick has and is difficult to be retained.
First being enriched with by target component in liquid by particular form, then carrying out LIBS detection is also one
Plant and carry highly sensitive effective ways.Its method utilizing guiding deposition or dialyser are by the metal unit in liquid
Element enrichment is got up, then carries out LIBS detection.The method has higher detection sensitivity, but generally requires number
Hour even sample preparation time of a few days, detection scene application quick for needs is the most inapplicable.
Summary of the invention
The defect existed in view of prior art, the purpose of this utility model is to provide for a kind of based on micro-fluidic core
Sheet and the dropproducing devices of piezo ceramic element, this device can be effectively improved LIBS to be carried out fluid sample
Application stability during detection also reduces detectable limit.
To achieve these goals, the technical solution of the utility model:
A kind of based on micro-fluidic chip with the dropproducing devices of piezo ceramic element, this device is for liquid
Sample carries out LIBS detection, it is characterised in that:
Described device includes
Place liquid sample, and make aforementioned liquids sample can flow in microchannel therein and produce
The micro-fluidic chip that raw corresponding drop flows out；
And be placed in inside described micro-fluidic chip, it is possible to extrude the fluid sample of flowing in described microchannel,
And make fluid sample flow out the piezoelectric ceramic actuator of described micro-fluidic chip after being squeezed；Described liquid
Body sample flows out from described micro-fluidic chip after being squeezed and i.e. produces drop, in order to LIBS detects laser
Focusing and excite.
Further, described micro-fluidic chip includes upper strata chip, lower layer chip and base the most successively
Plate；Two through holes being respectively used to as flow inlet and drop outlets are set on the chip of described upper strata；Described
Lower layer chip fovea superior is carved with the microchannel flowed therein for sample for liquid, this one end, microchannel and institute
Stating flow inlet to communicate, other end setting communicates with described drop outlets and aperture is more than described drop outlets aperture
Drop crush zone；Described substrate is positioned at drop crush zone position directly below to arrange and can accommodate described piezoelectricity
The shrinkage pool of ceramic driver.
Further, described substrate is made up of PMMA (polymethyl methacrylate) material；Described PMMA
I.e. lucite, this material transparent degree is excellent, has good insulating properties and mechanical strength, and its proportion is not
To the half of simple glass, shatter-resistant ability but exceeds several times.
Further, described upper strata chip, lower layer chip are made by PDMS material.PDMS (poly-two
Methylsiloxane) there is between material and PMMA material good adhesiveness, and it is lazy to have good chemistry
Property；Owing to the elastic modelling quantity of PDMS film is only 0.75MPa, therefore use the vibrating diaphragm that PDMS makes
Can suitably increase the thickness of vibrating diaphragm, generally use hundreds of microns of thick PDMS thick films not only may be used
To meet the requirement in terms of intensity, and bigger deformation quantity can be produced at drop crush zone；Additionally PDMS
Material has good extensibility, is hardly damaged when encapsulating and paste piezo ceramic element.
Further, described piezoelectric ceramic actuator includes drive power supply for piezoelectric ceramics and piezo ceramic element,
Described drive power supply for piezoelectric ceramics is connected with described piezo ceramic element, and executes described piezo ceramic element
Add driving power supply；Described piezo ceramic element includes that two panels is upper and lower symmetric arrays, and is rectangle lamellar
The piezoelectric ceramic wafer of structure, the most each self-corresponding through-thickness of each described piezoelectric ceramic wafer carries out pole
Change, and along with drive power supply for piezoelectric ceramics is applied to drive power supply to produce inverse piezoelectric effect so that each described pressure
Electroceramics wafer causes deformation along with the displacement of each self-corresponding charge-site, and then both act on generation jointly
Bending position can have the piezoelectric ceramic actuator of larger displacement to move formation.
Preferably, each described piezoelectric ceramic wafer is connected as one by sheet metal, and is driven by piezoelectric ceramics
Galvanic electricity source is pointed to the piezoelectric ceramic wafer on upper strata and applies reverse drive electric field, is pointed to the piezoelectric ceramics of lower floor
Wafer applies forward drive electric field；After applying driving electric field, due to the inverse piezoelectric effect of piezoelectric ceramic wafer,
The piezoelectric ceramic wafer being positioned at lower floor is shortened, is positioned at the piezoelectric ceramic wafer elongation on upper strata, and then both
Common effect produces bending displacement to form the piezoelectric ceramic actuator can with larger displacement.
Described drive power supply for piezoelectric ceramics uses HPV Series Piezoelectric ceramic driving power supply, including
The models such as HPV-3B0150A0500, HPV-1B0150A0300D.
This utility model provides the above-mentioned dropproducing devices of a kind of use and realizes fluid sample is carried out LIBS inspection
The method surveyed, it comprises the steps:
1) fluid sample is passed through the flow inlet of above-mentioned dropproducing devices, if carrying out on-line checking, by be checked
Survey liquid line and be passed through flow inlet；
2) after fluid sample is full of whole fluid channel and drop crush zone, by piezoelectric ceramic actuator
Drive power supply for piezoelectric ceramics applies driving voltage；
3) treat that fluid sample in drop crush zone is squeezed because of bending displacement produced by piezo ceramic element
Pressure is deformed, and after drop outlets flows out with drops；
4) utilize LIBS detecting system that at drop outlets, laser focusing is directly carried out LIBS detection.
Compared with prior art, this utility model has the advantages that
1, this utility model simple in construction, cheap, it is not necessary to professional operates, and is not asked by personal experience
The impact of topic；2, only need to design the microchip of suitable dimension, can be suitable in conjunction with LIBS detecting system
On-line checking in various fluid samples；3, fluid sample is without pretreatment, i.e. solves LIBS and detects liquid
Affected by absorbing the problems such as scattering, fluctuation, pressure, conduction of heat during body sample, and then improve LIBS
Stability to fluid sample detection, reduces detectable limit high.
Accompanying drawing explanation
Fig. 1 is the structural representation of device described in the utility model；
Fig. 2 is the side view of device described in the utility model；
Fig. 3 is piezo ceramic element circuit connection diagram described in the utility model.
In figure: 1, upper strata chip, 2, lower layer chip, 3, substrate, 4, fluid channel, 5, piezoelectric ceramics
Part, 51, piezoelectric ceramic wafer, 52, sheet metal, 6, drop crush zone, 7, drop outlets, 8, influent stream
Mouthful.
Detailed description of the invention
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing,
This utility model is further elaborated.
This utility model, for the LIBS problem to fluid sample detection difficult, devises a kind of based on miniflow
Control chip and the dropproducing devices of piezo ceramic element, it produces drop by making fluid sample, it is achieved liquid
Body sample detects without the LIBS of pretreatment, it is adaptable to fluid sample on-line analysis, especially for the ship of navigation
Oil liquid detection analysis on oceangoing ship, it is provided that the online inspection of a kind of novel inverse piezoelectric effect principle based on piezoelectric
Survey method.
As Figure 1-Figure 2, described device specifically includes two parts: microchip (liquid sample flow main body
Part) and for producing the piezoelectric ceramic actuator part of deformation extruding internal liquid；
Wherein, micro-fluidic chip is used for placing liquid sample, and makes the described fluid sample can be at it
Flow in internal microchannel and produce corresponding drop and flow out；Piezoelectric ceramic actuator or be only piezoelectric ceramics
Part is placed in inside described micro-fluidic chip, it is possible to extrudes the fluid sample of flowing in described microchannel, and makes
Fluid sample flows out described micro-fluidic chip after being squeezed；Described fluid sample after being squeezed from institute
State micro-fluidic chip outflow and i.e. produce drop, utilize LIBS detecting system that laser focusing is direct at drop outlets
Carry out LIBS detection.LIBS detecting system includes but not limited to existing any to carry out laser-induced breakdown light
The system of spectrum experiment or instrument, such as hand-held LIBS laser induced breakdown spectrograph (Sipes
And desk-top LIBS laser induced breakdown spectrograph etc. SCIAPSZ100).
Further, described micro-fluidic chip includes the inflow being mainly used in fluid sample the most successively,
And the upper strata chip of the outflow of drop, for realizing the flowing of fluid test sample and making it squeeze at drop
The lower layer chip collected of nip and substrate；Such as Fig. 1, described upper strata chip sets gradually two from right to left
Individual being respectively used to as flow inlet 8 and the through hole of drop outlets 7, it is to be measured that flow inlet 8 is mainly used in liquid
Sample enters microchip microchannel, and the size of drop outlets 7 is preferably devised to the condition in satisfied detection demand
Lower as far as possible less than the size of drop crush zone, it is beneficial to drop and produces and flow out；Intaglio in described lower layer chip
There are the microchannel flowed therein for sample for liquid, described microchannel size need to make according to actual
Micro-fluidic chip specification and use demand concrete configuration；This microchannel right-hand member communicates with described flow inlet,
Left end arranges and communicates with described drop outlets and aperture is more than the drop crush zone in described drop outlets aperture, institute
State drop crush zone and use the through hole of lower big little special construction, it is simple to coordinate the extruding of piezo ceramic element
Produce the drop of fluid sample；Described substrate is positioned at drop crush zone position directly below to arrange and can accommodate institute
State the shrinkage pool of piezo ceramic element.
Further, described substrate is made up of PMMA (polymethyl methacrylate) material；Described PMMA
I.e. lucite, this material transparent degree is excellent, has good insulating properties and mechanical strength, and its proportion is not
To the half of simple glass, shatter-resistant ability but exceeds several times.
Further, described upper strata chip, lower layer chip are made by PDMS material.PDMS (poly-two
Methylsiloxane) there is between material and PMMA material good adhesiveness, and it is lazy to have good chemistry
Property；Owing to the elastic modelling quantity of PDMS film is only 0.75MPa, therefore use the vibrating diaphragm that PDMS makes
Can suitably increase the thickness of vibrating diaphragm, generally use hundreds of microns of thick PDMS thick films not only may be used
To meet the requirement in terms of intensity, and bigger deformation quantity can be produced；Additionally PDMS material has good
Good extensibility, is hardly damaged when encapsulating and paste piezo ceramic element.
Described piezoelectric ceramic actuator includes drive power supply for piezoelectric ceramics and piezo ceramic element, and described piezoelectricity is made pottery
Porcelain drives power supply to be connected with described piezo ceramic element, and applies to drive power supply to described piezo ceramic element；
Described piezo ceramic element uses rectangle lamellar double wafer structure, i.e. includes that two panels is upper and lower symmetric arrays,
And it being the piezoelectric ceramic wafer of rectangle laminated structure, each described piezoelectric ceramic wafer is each the most self-corresponding
Through-thickness polarizes, and is imitated along with drive power supply for piezoelectric ceramics applies to drive power supply to produce inverse piezoelectricity
Should so that each described piezoelectric ceramic wafer causes deformation along with the displacement of each self-corresponding charge-site, and then
Both can have the piezoelectric ceramic actuator of larger displacement to move formation in effect generation bending positions jointly.Preferably
, described piezoelectric ceramic wafer uses PZT5 piezoceramic material to prepare.
Preferably, such as Fig. 3, each described piezoelectric ceramic wafer 51 is integrated by sheet metal 52 series connection, and logical
Cross drive power supply for piezoelectric ceramics and each described piezoelectric ceramic wafer is used the pressuring method of parallel form, and para-position
Piezoelectric ceramic wafer in upper strata applies reverse drive electric field, and the piezoelectric ceramic wafer being pointed to lower floor is just applying
To driving electric field；After applying driving voltage, due to the inverse piezoelectric effect of piezoelectric ceramic wafer so that under being positioned at
The piezoelectric ceramic wafer of layer shortens (and middle part is bent downwardly deformation), is positioned at the piezoelectric ceramic wafer elongation on upper strata
(middle part is bent upwards deformation), deforms both middle bent and is referred to as displacement outfan, and then pass through displacement
The bending displacement of outfan can have the piezoelectric ceramic actuator of larger displacement to be formed, and makes drop crush zone 6
In liquid be squeezed, flow out with the likeness in form of drop from the drop outlets 7 of top, now by peripheral hardware
The laser focusing of LIBS detecting system at drop outlets 7, then can directly carry out the detection of LIBS.
Described drive power supply for piezoelectric ceramics uses HPV Series Piezoelectric ceramic driving power supply, including
The models such as HPV-3B0150A0500, HPV-1B0150A0300D.
This utility model additionally provides the above-mentioned dropproducing devices of a kind of use and realizes fluid sample is carried out LIBS
The method of detection, it comprises the steps:
1) fluid sample is passed through the flow inlet of above-mentioned dropproducing devices, if carrying out on-line checking, by be checked
Survey liquid line and be passed through flow inlet；
2) after fluid sample is full of whole fluid channel and drop crush zone, by piezoelectric ceramic actuator
Drive power supply for piezoelectric ceramics applies driving voltage；
3) treat that fluid sample in drop crush zone is squeezed because of bending displacement produced by piezo ceramic element
Pressure is deformed, and after drop outlets flows out with drops；
4) utilize LIBS detecting system that at drop outlets, laser focusing is directly carried out LIBS detection.
This utility model is by solving the problem that fluid sample produces drop difficulty, it is achieved fluid sample is without in advance
The LIBS detection technique processed, it is applicable to fluid sample on-line analysis, and the boats and ships particularly navigated by water provide oil
Liquid detection analytical technology.
The above, only this utility model preferably detailed description of the invention, but protection model of the present utility model
Enclose and be not limited thereto, the technology model that any those familiar with the art discloses at this utility model
In enclosing, conceive in addition equivalent or change according to the technical solution of the utility model and utility model thereof, all
Should contain within protection domain of the present utility model.
Claims (6)
1., based on micro-fluidic chip and a dropproducing devices for piezo ceramic element, this device is for liquid
Body sample carries out LIBS detection, it is characterised in that:
Described device includes
Place liquid sample, and make aforementioned liquids sample can flow in microchannel therein and produce
The micro-fluidic chip that raw corresponding drop flows out；
And be placed in inside described micro-fluidic chip, it is possible to extrude the fluid sample of flowing in described microchannel,
And make fluid sample flow out the piezoelectric ceramic actuator of described micro-fluidic chip after being squeezed；Described liquid
Body sample flows out from described micro-fluidic chip after being squeezed, and produces drop.
Dropproducing devices the most according to claim 1, it is characterised in that:
Described micro-fluidic chip includes upper strata chip, lower layer chip and substrate the most successively；On described
On layer chip, two through holes being respectively used to as flow inlet and drop outlets are set；In described lower layer chip
Intaglio has the microchannel flowed therein for sample for liquid, this one end, microchannel and described flow inlet phase
Logical, other end setting communicates with described drop outlets and aperture extrudes more than the drop in described drop outlets aperture
District；Described substrate is positioned at drop crush zone position directly below to arrange and can accommodate described piezoelectric ceramic actuator
Shrinkage pool.
Dropproducing devices the most according to claim 2, it is characterised in that:
Described substrate is made up of PMMA material；Described upper strata chip, lower layer chip are by PDMS material system
Become.
Dropproducing devices the most according to claim 1, it is characterised in that:
Described piezoelectric ceramic actuator includes drive power supply for piezoelectric ceramics and piezo ceramic element, and described piezoelectricity is made pottery
Porcelain drives power supply to be connected with described piezo ceramic element, and applies to drive power supply to described piezo ceramic element；
Described piezo ceramic element includes that two panels is upper and lower symmetric arrays, and is the piezoelectricity pottery of rectangle laminated structure
Porcelain wafer, the most each self-corresponding through-thickness of each described piezoelectric ceramic wafer polarizes, and along with pressure
Electroceramics drives power supply to be applied to drive power supply to produce inverse piezoelectric effect.
Dropproducing devices the most according to claim 4, it is characterised in that:
Each described piezoelectric ceramic wafer is connected as one by sheet metal, and by drive power supply for piezoelectric ceramics pair
The piezoelectric ceramic wafer being positioned at upper strata applies reverse drive electric field, and the piezoelectric ceramic wafer being pointed to lower floor applies
Forward drive electric field.
Dropproducing devices the most according to claim 4, it is characterised in that:
Described drive power supply for piezoelectric ceramics uses HPV Series Piezoelectric ceramic driving power supply.
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| CN201620330947.3U CN205580993U (en) | 2016-04-19 | 2016-04-19 | Liquid drop produces device based on micro -fluidic chip and piezoceramics component |
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| CN201620330947.3U CN205580993U (en) | 2016-04-19 | 2016-04-19 | Liquid drop produces device based on micro -fluidic chip and piezoceramics component |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105911028A (en) * | 2016-04-19 | 2016-08-31 | 大连海事大学 | A liquid drop generation device based on a micro-fluidic chip and a piezoelectric ceramic element and an LIBS detecting method for a liquid sample |
| CN108624971A (en) * | 2018-05-07 | 2018-10-09 | 京东方科技集团股份有限公司 | Micro fluidic device and preparation method thereof |
| CN111389473A (en) * | 2020-03-25 | 2020-07-10 | 武汉大学 | Vertical channel tunable high-flux acoustic flow control sorting chip and preparation method thereof |
-
2016
- 2016-04-19 CN CN201620330947.3U patent/CN205580993U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105911028A (en) * | 2016-04-19 | 2016-08-31 | 大连海事大学 | A liquid drop generation device based on a micro-fluidic chip and a piezoelectric ceramic element and an LIBS detecting method for a liquid sample |
| CN108624971A (en) * | 2018-05-07 | 2018-10-09 | 京东方科技集团股份有限公司 | Micro fluidic device and preparation method thereof |
| CN108624971B (en) * | 2018-05-07 | 2020-04-24 | 京东方科技集团股份有限公司 | Microfluidic device and preparation method thereof |
| CN111389473A (en) * | 2020-03-25 | 2020-07-10 | 武汉大学 | Vertical channel tunable high-flux acoustic flow control sorting chip and preparation method thereof |
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