CN103033340A - Testing device and testing method of big diameter sampling grating sampling rate - Google Patents
Testing device and testing method of big diameter sampling grating sampling rate Download PDFInfo
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- CN103033340A CN103033340A CN2011103115516A CN201110311551A CN103033340A CN 103033340 A CN103033340 A CN 103033340A CN 2011103115516 A CN2011103115516 A CN 2011103115516A CN 201110311551 A CN201110311551 A CN 201110311551A CN 103033340 A CN103033340 A CN 103033340A
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Abstract
The invention relates to a testing device and a testing method of a big diameter sampling grating sampling rate, wherein the testing device of the big diameter sampling grating sampling rate comprises a laser device, a beam splitter, a first integral ball power meter, a second integral ball power meter, a two dimensional scan mirror group used for scanning a big diameter sampling grating and a controlling and collecting processing system. The beam splitter is arranged on an emergent light path of the laser device, the first integral ball power meter is arranged on a transmission light path which passes the beam splitter, the two dimensional scan mirror group is arranged on a reflected light path which passes the beam splitter, the second integral ball power meter is arranged on a -1 level diffraction light path which penetrates a tested sampling grating after passing the two dimensional scan mirror group, and the first integral ball power meter and the second integral ball power meter are respectively connected with the controlling and collecting processing system. According to the testing device and a testing method of a big diameter sampling grating sampling rate, testing problems of the big diameter sampling grating sampling rate are resolved and testing precision is well guaranteed.
Description
Technical field
The invention belongs to optical field, relate to a kind of proving installation and method of testing of grating sampling rate, relate in particular to a kind of proving installation and method of testing of heavy caliber sampled-grating sampling rate.
Background technology
In the subsystem of the terminal target range of inertial confinement fusion system, before frequency tripled laser enters the terminal target range, need to adopt sampled-grating (BSG) that the frequency tripled laser of transmission is sampled to the laser parameter diagnostic system according to a certain percentage.Sampled-grating is the sampling element that is applicable to whole wavelength coverage, and it can be applicable to the sampling of heavy caliber light beam, is not substantially affecting under the prerequisite of main beam, for the laser parameter diagnostic system provides sample beam.For the energy that guarantees that main beam is practiced shooting, the sampling efficiency of sample beam is generally below 5 ‰.Be subject to grating process equipment and manufacture craft, there is deviation in the general and design load of the heavy caliber sampled-grating sampling rate that often processes, and therefore, the sampling rate Accurate Calibration of heavy caliber sampled-grating is very important.
Conventional test methodologies commonly used has following two kinds at present:
Method 1: laser is collimated into the parallel beam that is complementary with the effective clear aperture of sampled-grating through parallel light tube, by two power meter testing laser power (or energy meter measurement laser energy), calculate the sampling coefficient of sampled-grating at sampled-grating main beam and-1 order diffraction place.The method shortcoming is: need use heavy caliber parallel light tube and heavy caliber power meter (energy meter) during test, and testing apparatus development processing charges high (millions of at least), less economical.All do not adopt at present the method.
Method 2: small-bore laser beam zones of different on the heavy caliber sampled-grating got at random what time test, the shortcoming of the method: can not the unified grating sampling rate of the whole sampled-grating of quantitative response, when zones of different is tested, all need adjust the angle of incident laser and tested grating, consuming time relatively long.
Summary of the invention
In order to solve the above-mentioned technical matters that exists in the background technology, the invention provides a kind of test problem that solves heavy caliber sampled-grating sampling rate, and well guaranteed proving installation and the method for testing of the heavy caliber sampled-grating sampling rate of measuring accuracy.
Technical solution of the present invention is: the invention provides a kind of proving installation of heavy caliber sampled-grating sampling rate, its special character is: the proving installation of described heavy caliber sampled-grating sampling rate comprises laser instrument, beam splitter, first integral ball power meter, second integral ball power meter, be used for two-dimensional scan mirror group and control and acquisition processing system that the heavy caliber sampled-grating is scanned; Described beam splitter is arranged on the emitting light path of laser instrument; Described first integral ball power meter places on the transmitted light path of beam splitter; Described two-dimensional scan mirror group places on the reflected light path of beam splitter; Described second integral ball power meter places through seeing through after the two-dimensional scan mirror group on-1 order diffraction light path of tested sampled-grating; Described first integral ball power meter and second integral ball power meter link to each other with acquisition processing system with control respectively.
The proving installation of above-mentioned heavy caliber sampled-grating sampling rate also comprises the parallel light tube that is arranged between laser instrument and the beam splitter.
The proving installation of above-mentioned heavy caliber sampled-grating sampling rate also comprises the coupling mechanism that is arranged between laser instrument and the parallel light tube.
The proving installation of above-mentioned heavy caliber sampled-grating sampling rate also comprises the diaphragm that is arranged at parallel light tube emergent pupil mouth.
Above-mentioned parallel light tube is broadband off-axis reflection parallel light tube.
Above-mentioned diaphragm is for the soft change diaphragm that reduces the laser diffraction effect.
The proving installation of above-mentioned heavy caliber sampled-grating sampling rate also comprise for control two-dimensional scan mirror group and with the rigidly connected electronic control translation stage of two-dimensional scan mirror group.
A kind of method of testing of heavy caliber sampled-grating sampling rate of the proving installation for heavy caliber sampled-grating sampling rate, its special character is: the method for testing of described heavy caliber sampled-grating sampling rate may further comprise the steps:
1) obtain the laser power that incides sampled-grating by first integral ball power meter:
2) make laser instrument carry out vertical scanning to the heavy caliber sampled-grating by two-dimensional scan mirror group, and obtain the realtime power at tested sampled-grating-1 order diffraction place by second integral ball power meter;
3) get step 2) laser power and the step 1 at resulting tested sampled-grating-1 order diffraction place) ratio of main beam laser power of sampled-grating of gained obtains heavy caliber sampled-grating sampling rate.
Be the heavy caliber sampled-grating to be carried out the S type carry out line by line two-dimensional scan when scanning above-mentioned steps 2), and obtain the laser power at m-1 order diffraction place in each scanning bore of heavy caliber sampled-grating.
The method of testing of above-mentioned heavy caliber sampled-grating sampling rate is in step 3) also comprise afterwards:
4) get step 3) each scanning of resulting heavy caliber sampled-grating sampling rate in bore averages the average sample rate that obtains the heavy caliber sampled-grating.
The invention has the advantages that:
1, can solve the test problem of heavy caliber sampled-grating sampling rate.The present invention replaces with scanister with traditional mode of adopting at random a little and lines by line scan, can test the heavy caliber sampled-grating by small-bore parallel light tube, testing cost is low, simultaneously, utilize this scanister to test heavy caliber sampled-grating zones of different, can measure its sampling rate homogeneity, preparing grating technique is made scientific evaluation.The 3rd, test consuming time shortly, owing to adopting electronic control translation stage scanning, after scanning puts in place, trigger laser powermeter synchronous acquisition laser power value, and storage.In accordance with regulations scanning pattern sweep test after the storage.To the grating measuring of the effective clear aperture of bore 400mm * 400mm, consuming time less than 3 minutes.
2, measuring accuracy is high.First integral ball power meter of the present invention and second integral ball power meter synchronous acquisition, reduce the unstable impact on test of laser power, stability is strong, simultaneously, first integral ball power meter adopts different ranges from second integral ball power meter, can effectively solve low sampling rate (sampling rate less than below 5 ‰ even lower) test, its measuring accuracy is high.The present invention can realize quantitative unified test to the heavy caliber sampled-grating, and relative measurement error is less than 1%.
3, applied range.The present invention adopts broadband off-axis reflection parallel light tube, can satisfy from ultraviolet, visible light and work to the different laser wavelengths such as near infrared, and is applied widely.
Description of drawings
Fig. 1 is the structural representation of proving installation provided by the present invention.
Embodiment
Referring to Fig. 1, the invention provides a kind of method of testing and device of heavy caliber sampled-grating sampling rate, this device comprises laser instrument 1, coupling mechanism 2, off-axis reflection parallel light tube 3, soft change diaphragm 4, beam splitter 5, the automatically controlled scanning mirror group of bidimensional (directions X scanning mirror 7 and Y-direction scanning mirror 8), Integrating Sphere Laser Power (first integral ball power meter 6 and second integral ball power meter 10) and control and acquisition processing system 11.
Beam splitter 5 places on the emitting light path of laser instrument 1; First integral ball power meter 6 places on the transmitted light path of beam splitter 5; Two-dimensional scan mirror group places on the reflected light path of beam splitter 5; Second integral ball power meter 10 places on the light path of-1 order diffraction through seeing through tested sampled-grating 9 after the two-dimensional scan mirror group; First integral ball power meter 6 and second integral ball power meter 10 link to each other with acquisition processing system 11 with control respectively.
Simultaneously, the proving installation of heavy caliber sampled-grating sampling rate also comprise place the parallel light tube 3 between laser instrument 1 and the beam splitter 5 and place laser instrument 1 and parallel light tube 3 between coupling mechanism 2.
Proving installation in heavy caliber sampled-grating sampling rate also comprises the diaphragm that is arranged at parallel light tube emergent pupil mouth.
Parallel light tube is broadband off-axis reflection parallel light tube.
Diaphragm is for the soft change diaphragm that reduces the laser diffraction effect.
The proving installation of heavy caliber sampled-grating sampling rate also comprise for control two-dimensional scan mirror group and with the rigidly connected electronic control translation stage of two-dimensional scan mirror group.
The present invention also provides a kind of method of testing of heavy caliber sampled-grating sampling rate in the proving installation that heavy caliber sampled-grating sampling rate is provided, the method may further comprise the steps:
1) obtains the laser power W that incides sampled-grating 9 (BSG) by first integral ball power meter
1
2) make laser instrument carry out line by line vertical scanning of S type to the heavy caliber sampled-grating by the scanning mirror group, and obtain the realtime power W at m tested sampled-grating-1 order diffraction place by second integral ball power meter
2
3) get step 2) the realtime power W at resulting tested sampled-grating-1 order diffraction place
2With step 1) the laser power W that is injected into the heavy caliber sampled-grating of gained
1Ratio obtain the heavy caliber sampled-grating in the sampling rate of this scanning in bore.
4) get step 3) each scanning of resulting heavy caliber sampled-grating sampling rate in bore averages the average sample rate that obtains the heavy caliber sampled-grating.
When the present invention works, laser instrument 1 is coupled to parallel light tube 3 through coupling mechanism 2, is collimated into directional light output.Place soft change diaphragm 4 at parallel light tube emergent pupil mouth.Soft change diaphragm bore is L * Lmm, heavy caliber sampled-grating 9 is held on the station, control two-dimentional automatically controlled scanning mirror group, make laser beam perpendicular to sampled-grating 9 scannings, first integral ball power meter 6 receives through the laser power behind the beam splitter 5, the sampling laser power that second integral ball power meter 10 receives through tested grating (BSG) 9-1 order diffraction place.By first integral ball power meter 6 monitoring laser devices 1 output power, simultaneously by beam splitter 5 and scanning mirror group, can monitor the realtime power that is injected into heavy caliber sampled-grating 9 places, first integral ball power meter 6 the laser power of surveying be 1 with the laser power ratio that incides sampled-grating (BSG) 9: ρ (splitting ratio can be demarcated in advance), first integral ball power meter 6 is respectively W with the laser power value of second integral ball power meter 10
1With W
2, then sampled-grating sampling rate herein is:
Concrete scan operation step: 1) control two-dimensional scan mirror group makes scanning light beam incide the sampled-grating lower right corner.2) press step-length Lmm scanning at directions X, whenever sweep a step, after scanning puts in place, produce trigger pip, by the laser power also storage of first integral ball power meter 6 with second integral ball power meter 10 synchronous acquisitions.3) after directions X scanning is finished, along one step of scanning on the Y-direction, along directions X scanning, gather simultaneously laser power again.4) by that analogy, until with the unified been scanned of whole sampled-grating.
When n step scanning, synchronous acquisition first integral ball power meter 6 power are W
1n, second integral ball power meter 10 power are W
2n, then herein grating sampling rate is:
If the m step can be swept complete grating effective aperture, then the sampling rate of grating is:
The sampling rate homogeneity is:
Claims (10)
1. the proving installation of a heavy caliber sampled-grating sampling rate is characterized in that: the proving installation of described heavy caliber sampled-grating sampling rate comprises laser instrument, beam splitter, first integral ball power meter, second integral ball power meter, be used for two-dimensional scan mirror group and control and acquisition processing system that the heavy caliber sampled-grating is scanned; Described beam splitter is arranged on the emitting light path of laser instrument; Described first integral ball power meter places on the transmitted light path of beam splitter; Described two-dimensional scan mirror group places on the reflected light path of beam splitter; Described second integral ball power meter places through seeing through after the two-dimensional scan mirror group on-1 order diffraction light path of tested sampled-grating; Described first integral ball power meter and second integral ball power meter link to each other with acquisition processing system with control respectively.
2. the proving installation of heavy caliber sampled-grating sampling rate according to claim 1, it is characterized in that: the proving installation of described heavy caliber sampled-grating sampling rate also comprises the parallel light tube that is arranged between laser instrument and the beam splitter.
3. the proving installation of heavy caliber sampled-grating sampling rate according to claim 2, it is characterized in that: the proving installation of described heavy caliber sampled-grating sampling rate also comprises the coupling mechanism that is arranged between laser instrument and the parallel light tube.
4. the proving installation of heavy caliber sampled-grating sampling rate according to claim 3, it is characterized in that: the proving installation of described heavy caliber sampled-grating sampling rate also comprises the diaphragm that is arranged at parallel light tube emergent pupil mouth.
5. according to claim 2 or the proving installation of 3 or 4 described heavy caliber sampled-grating sampling rates, it is characterized in that: described parallel light tube is broadband off-axis reflection parallel light tube.
6. the proving installation of heavy caliber sampled-grating sampling rate according to claim 5 is characterized in that: described diaphragm is for the soft change diaphragm that reduces the laser diffraction effect.
7. the proving installation of heavy caliber sampled-grating sampling rate according to claim 6 is characterized in that: the proving installation of described heavy caliber sampled-grating sampling rate also comprise for control two-dimensional scan mirror group and with the rigidly connected electronic control translation stage of two-dimensional scan mirror group.
8. the method for testing of the heavy caliber sampled-grating sampling rate of a proving installation that be used for to realize the described heavy caliber sampled-grating of claim 1-7 sampling rate, it is characterized in that: the method for testing of described heavy caliber sampled-grating sampling rate may further comprise the steps:
1) obtain the laser power that incides sampled-grating by first integral ball power meter:
2) make laser instrument carry out vertical scanning to the heavy caliber sampled-grating by two-dimensional scan mirror group, and obtain the realtime power at tested sampled-grating-1 order diffraction place by second integral ball power meter;
3) get step 2) laser power and the step 1 at resulting tested sampled-grating-1 order diffraction place) ratio of main beam laser power of sampled-grating of gained obtains heavy caliber sampled-grating sampling rate.
9. the method for testing of heavy caliber sampled-grating sampling rate according to claim 8, it is characterized in that: be the heavy caliber sampled-grating to be carried out the S type carry out line by line two-dimensional scan when scanning described step 2), and obtain the laser power at m-1 order diffraction place in each scanning bore of heavy caliber sampled-grating.
10. the method for testing of heavy caliber sampled-grating sampling rate according to claim 9, it is characterized in that: the method for testing of described heavy caliber sampled-grating sampling rate is in step 3) also comprise afterwards:
4) get step 3) each scanning of resulting heavy caliber sampled-grating sampling rate in bore averages the average sample rate that obtains the heavy caliber sampled-grating.
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Cited By (4)
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| CN103604496A (en) * | 2013-11-29 | 2014-02-26 | 中国科学院西安光学精密机械研究所 | Method for calibrating response inconsistency of double-integrating-sphere power meter |
| CN103674498A (en) * | 2014-01-08 | 2014-03-26 | 中国工程物理研究院激光聚变研究中心 | Grating sampling parameter detection device |
| CN104155085A (en) * | 2014-07-07 | 2014-11-19 | 中国科学院西安光学精密机械研究所 | Device and method for testing sampling rate of large-diameter sampling chopping board |
| CN108548660A (en) * | 2018-03-26 | 2018-09-18 | 中国科学院西安光学精密机械研究所 | Sampling splits the sampling rate of plate and samples uniformity interferometer measuration system and method |
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| CN103604496A (en) * | 2013-11-29 | 2014-02-26 | 中国科学院西安光学精密机械研究所 | Method for calibrating response inconsistency of double-integrating-sphere power meter |
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| CN104155085B (en) * | 2014-07-07 | 2017-02-15 | 中国科学院西安光学精密机械研究所 | Device and method for testing sampling rate of large-diameter sampling chopping board |
| CN108548660A (en) * | 2018-03-26 | 2018-09-18 | 中国科学院西安光学精密机械研究所 | Sampling splits the sampling rate of plate and samples uniformity interferometer measuration system and method |
| CN108548660B (en) * | 2018-03-26 | 2019-11-15 | 中国科学院西安光学精密机械研究所 | Sampling splits the sampling rate of plate and samples uniformity interferometer measuration system and method |
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