CN103033340B - The test device of heavy caliber sampled-grating sampling rate and method of testing - Google Patents
The test device of heavy caliber sampled-grating sampling rate and method of testing Download PDFInfo
- Publication number
- CN103033340B CN103033340B CN201110311551.6A CN201110311551A CN103033340B CN 103033340 B CN103033340 B CN 103033340B CN 201110311551 A CN201110311551 A CN 201110311551A CN 103033340 B CN103033340 B CN 103033340B
- Authority
- CN
- China
- Prior art keywords
- sampled
- grating
- heavy caliber
- sampling rate
- energy meter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The present invention relates to the test device of a kind of heavy caliber sampled-grating sampling rate and method of testing, the test device of this heavy caliber sampled-grating sampling rate include laser instrument, beam splitter, first integral ball energy meter, second integral ball energy meter, for the Scan mirror group that heavy caliber sampled-grating is scanned and control and acquisition processing system; Beam splitter is arranged on the emitting light path of laser instrument; First integral ball energy meter is placed on the transmitted light path of beam splitter; Scan mirror group is placed on the reflected light path of beam splitter; Second integral ball energy meter is placed in after Scan mirror group through in-1 order diffraction light path of tested sampled-grating; First integral ball energy meter and second integral ball energy meter are connected with acquisition processing system with control respectively. The invention provides a kind of test problem solving heavy caliber sampled-grating sampling rate, and well ensure that test device and the method for testing of the heavy caliber sampled-grating sampling rate of measuring accuracy.
Description
Technical field
The invention belongs to optical field, relate to test device and the method for testing of a kind of grating sampling rate, particularly relate to test device and the method for testing of a kind of heavy caliber sampled-grating sampling rate.
Background technology
In the terminal target range subsystem of inertial confinement fusion system, before frequency tripled laser enters terminal target range, it is necessary to adopt sampled-grating (BSG) that the frequency tripled laser of transmission is sampled to laser parameter diagnostic system according to a certain percentage. Sampled-grating applies to the sampling element of whole wave-length coverage, and it can be applicable to the sampling of heavy caliber light beam, under the premise having substantially no effect on main beam, provides sample beam for laser parameter diagnostic system. In order to ensure the energy that main beam is practiced shooting, the sampling efficiency of sample beam is typically in less than 5 ��. Being limited to grating process equipment and processing technology, the heavy caliber sampled-grating sampling rate often processed is general and design load exists deviation, and therefore, the sampling rate Accurate Calibration of heavy caliber sampled-grating is particularly significant.
Conventional test methodologies conventional at present has following two:
Method 1: laser is collimated into through collimator the collimated light beam matched with the effective clear aperture of sampled-grating, at sampled-grating main beam with-1 order diffraction place by two energy meter testing laser power (or energy meter Laser Measurement energy), calculate the sampling coefficient of sampled-grating. The method shortcoming is: need to use heavy caliber collimator and heavy caliber energy meter (energy meter) during test, tests equipment development processing charges high (at least millions of), less economical. All do not adopt the method at present.
Method 2: small-bore laser beam zones of different on heavy caliber sampled-grating is taken at random and what time tests, the shortcoming of the method: can not the unified grating sampling rate of the whole sampled-grating of quantitative response, when zones of different is tested, it is both needed to the angle adjusting incident laser with tested grating, consuming time relatively long.
Summary of the invention
In order to solve the above-mentioned technical problem existed in background technology, the invention provides a kind of test problem solving heavy caliber sampled-grating sampling rate, and well ensure that test device and the method for testing of the heavy caliber sampled-grating sampling rate of measuring accuracy.
The technical solution of the present invention is: the invention provides the test device of a kind of heavy caliber sampled-grating sampling rate, its be characterized in that the test device of described heavy caliber sampled-grating sampling rate include laser instrument, beam splitter, first integral ball energy meter, second integral ball energy meter, for the Scan mirror group that heavy caliber sampled-grating is scanned and control and acquisition processing system; Described beam splitter is arranged on the emitting light path of laser instrument; Described first integral ball energy meter is placed on the transmitted light path of beam splitter; Described Scan mirror group is placed on the reflected light path of beam splitter; Described second integral ball energy meter is placed in after Scan mirror group through in-1 order diffraction light path of tested sampled-grating; Described first integral ball energy meter and second integral ball energy meter are connected with acquisition processing system with control respectively.
The test device of above-mentioned heavy caliber sampled-grating sampling rate also includes the collimator being arranged between laser instrument and beam splitter.
The test device of above-mentioned heavy caliber sampled-grating sampling rate also includes the bonder being arranged between laser instrument and collimator.
The test device of above-mentioned heavy caliber sampled-grating sampling rate also includes the diaphragm being arranged at collimator emergent pupil mouth.
Above-mentioned collimator is broadband off-axis reflection collimator.
Above-mentioned diaphragm is for reducing the soft darkening of laser diffraction effect door screen.
The test device of above-mentioned heavy caliber sampled-grating sampling rate also includes for controlling Scan mirror group electronic control translation stage rigidly connected with Scan mirror group.
A kind of method of testing of the heavy caliber sampled-grating sampling rate of the test device for heavy caliber sampled-grating sampling rate, it is characterized in that the method for testing of described heavy caliber sampled-grating sampling rate comprises the following steps:
1) laser power inciding sampled-grating is obtained by first integral ball energy meter:
2) make laser instrument that heavy caliber sampled-grating to carry out vertical scanning by Scan mirror group, and obtained the realtime power at tested sampled-grating-1 order diffraction place by second integral ball energy meter;
3) step 2 is taken) laser power and the step 1 at obtained tested sampled-grating-1 order diffraction place) ratio of main beam laser power of sampled-grating of gained obtains heavy caliber sampled-grating sampling rate.
Above-mentioned steps 2) in be heavy caliber sampled-grating carries out S type carry out two-dimensional scan line by line when being scanned, and obtain m the laser power at-1 order diffraction place in each scanning bore of heavy caliber sampled-grating.
The method of testing of above-mentioned heavy caliber sampled-grating sampling rate is in step 3) after also include:
4) step 3 is taken) sampling rate in each scanning bore of obtained heavy caliber sampled-grating is averaged and obtains the average sample rate of heavy caliber sampled-grating.
It is an advantage of the current invention that:
1, the test problem of heavy caliber sampled-grating sampling rate can be solved. The mode of traditional random sampling site is replaced with scanning means and progressively scans by the present invention, by small-bore collimator, heavy caliber sampled-grating can be tested, testing cost is low, simultaneously, this scanning means is utilized can heavy caliber sampled-grating zones of different to be tested, its sampling rate uniformity can be measured, preparing grating technique is made scientific evaluation.3rd, test consuming time short, owing to adopting electronic control translation stage scanning, after scanning puts in place, triggering laser energy meter synchronous acquisition laser power value, and store. By regulation scanning pattern sweep test after storage. Grating measuring to bore 400mm �� effective clear aperture of 400mm, consuming time less than 3 minutes.
2, certainty of measurement is high. First integral ball energy meter of the present invention and second integral ball energy meter synchronous acquisition, reduce the unstable impact on test of laser power, stability is strong, simultaneously, first integral ball energy meter adopts different ranges from second integral ball energy meter, can effectively solving low sampling rate (sampling rate is even lower less than less than 5 ��) test, its certainty of measurement is high. Heavy caliber sampled-grating can be realized quantitative unified test by the present invention, and relative measurement error is less than 1%.
3, applied range. The present invention adopts broadband off-axis reflection collimator, can meet and work to the different laser wavelengths such as near-infrared from ultraviolet, visible ray, applied widely.
Accompanying drawing explanation
Fig. 1 is the structural representation of test device provided by the present invention.
Detailed description of the invention
Referring to Fig. 1, the invention provides the method for testing of a kind of heavy caliber sampled-grating sampling rate and device, this device includes laser instrument 1, bonder 2, off-axis reflection collimator 3, soft darkening door screen 4, beam splitter 5, the automatically controlled scanning mirror group of bidimensional (X-direction scanning mirror 7 and Y-direction scanning mirror 8), Integrating Sphere Laser Power (first integral ball energy meter 6 and second integral ball energy meter 10) and controls and acquisition processing system 11.
Beam splitter 5 is placed on the emitting light path of laser instrument 1; First integral ball energy meter 6 is placed on the transmitted light path of beam splitter 5; Scan mirror group is placed on the reflected light path of beam splitter 5; Second integral ball energy meter 10 is placed in after Scan mirror group through in the light path of-1 order diffraction of tested sampled-grating 9; First integral ball energy meter 6 and second integral ball energy meter 10 are connected with acquisition processing system 11 with control respectively.
Meanwhile, the test device of heavy caliber sampled-grating sampling rate also includes the collimator 3 being placed between laser instrument 1 and beam splitter 5 and the bonder 2 being placed between laser instrument 1 and collimator 3.
Test device in heavy caliber sampled-grating sampling rate also includes the diaphragm being arranged at collimator emergent pupil mouth.
Collimator is broadband off-axis reflection collimator.
Diaphragm is for reducing the soft darkening of laser diffraction effect door screen.
The test device of heavy caliber sampled-grating sampling rate also includes for controlling Scan mirror group electronic control translation stage rigidly connected with Scan mirror group.
The present invention additionally provides the method for testing of a kind of heavy caliber sampled-grating sampling rate while providing the test device of heavy caliber sampled-grating sampling rate, and the method comprises the following steps:
1) the laser power W inciding sampled-grating 9 (BSG) is obtained by first integral ball energy meter1;
2) make laser instrument that heavy caliber sampled-grating to carry out S type vertical scanning line by line by scanning mirror group, and obtained the realtime power W at m tested sampled-grating-1 order diffraction place by second integral ball energy meter2;
3) step 2 is taken) the realtime power W at obtained tested sampled-grating-1 order diffraction place2With step 1) the laser power W being injected into heavy caliber sampled-grating of gained1Ratio obtain heavy caliber sampled-grating and scan the sampling rate in bore at this.
4) step 3 is taken) sampling rate in each scanning bore of obtained heavy caliber sampled-grating is averaged and obtains the average sample rate of heavy caliber sampled-grating.
When the present invention works, laser instrument 1 is coupled to collimator 3 through bonder 2, is collimated into directional light output.Soft darkening door screen 4 is placed at collimator emergent pupil mouth. Soft darkening door screen bore is L �� Lmm, heavy caliber sampled-grating 9 is held on station, control two-dimentional automatically controlled scanning mirror group, make laser beam be perpendicular to sampled-grating 9 to scan, first integral ball energy meter 6 receives through the laser power after beam splitter 5, and second integral ball energy meter 10 receives the sampling laser power through tested grating (BSG) 9-1 order diffraction place. Laser instrument 1 output is monitored by first integral ball energy meter 6, simultaneously by beam splitter 5 and scanning mirror group, the realtime power being injected into heavy caliber sampled-grating 9 place can be monitored, the surveyed laser power of first integral ball energy meter 6 and the laser power ratio inciding sampled-grating (BSG) 9 are 1: �� (splitting ratio can be demarcated in advance), the laser power value respectively W of first integral ball energy meter 6 and second integral ball energy meter 101With W2, then the sampled-grating sampling rate herein is:
Concrete scan operation step: 1) control Scan mirror group, make scanning light beam incide the sampled-grating lower right corner. 2) in the X direction by step-length Lmm scanning, often sweep a step, after scanning puts in place, produce to trigger signal, by the first integral ball energy meter 6 laser power with second integral ball energy meter 10 synchronous acquisition and store. 3) after X-direction has scanned, in Y-direction, scan a step, then scan in X direction, gather laser power simultaneously. 4) by that analogy, until by unified for whole sampled-grating scanned.
When the n-th step scanning, synchronous acquisition first integral ball energy meter 6 power is W1n, second integral ball energy meter 10 power be W2n, then the grating sampling rate herein is:If m step can sweep a complete grating effective aperture, then the sampling rate of grating is:Sampling rate uniformity is:
Claims (3)
1. for realizing a method of testing for the heavy caliber sampled-grating sampling rate of the test device of heavy caliber sampled-grating sampling rate,
The test device of described heavy caliber sampled-grating sampling rate include laser instrument, beam splitter, first integral ball energy meter, second integral ball energy meter, for the Scan mirror group that heavy caliber sampled-grating is scanned and control and acquisition processing system; Described beam splitter is arranged on the emitting light path of laser instrument; Described first integral ball energy meter is placed on the transmitted light path of beam splitter; Described Scan mirror group is placed on the reflected light path of beam splitter; Described second integral ball energy meter is placed in after Scan mirror group through in-1 order diffraction light path of tested sampled-grating; Described first integral ball energy meter and second integral ball energy meter are connected with acquisition processing system with control respectively;
The test device of described heavy caliber sampled-grating sampling rate also includes the collimator being arranged between laser instrument and beam splitter;
The test device of described heavy caliber sampled-grating sampling rate also includes the bonder being arranged between laser instrument and collimator;
The test device of described heavy caliber sampled-grating sampling rate also includes the diaphragm being arranged at collimator emergent pupil mouth;
Described collimator is broadband off-axis reflection collimator;
Described diaphragm is for reducing the soft darkening of laser diffraction effect door screen;
The test device of described heavy caliber sampled-grating sampling rate also includes for controlling Scan mirror group electronic control translation stage rigidly connected with Scan mirror group;
It is characterized in that: the method for testing of described heavy caliber sampled-grating sampling rate comprises the following steps:
1) laser power inciding sampled-grating is obtained by first integral ball energy meter:
2) make laser instrument that heavy caliber sampled-grating to carry out vertical scanning by Scan mirror group, and obtained the realtime power at tested sampled-grating-1 order diffraction place by second integral ball energy meter;
3) step 2 is taken) laser power and the step 1 at obtained tested sampled-grating-1 order diffraction place) ratio of main beam laser power of sampled-grating of gained obtains heavy caliber sampled-grating sampling rate.
2. method according to claim 1, it is characterized in that: described step 2) in be heavy caliber sampled-grating carries out S type carry out two-dimensional scan line by line when being scanned, and obtain m the laser power at-1 order diffraction place in each scanning bore of heavy caliber sampled-grating.
3. method according to claim 2, it is characterised in that: the method for testing of described heavy caliber sampled-grating sampling rate is in step 3) after also include:
4) step 3 is taken) sampling rate in each scanning bore of obtained heavy caliber sampled-grating is averaged and obtains the average sample rate of heavy caliber sampled-grating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110311551.6A CN103033340B (en) | 2011-09-28 | 2011-09-28 | The test device of heavy caliber sampled-grating sampling rate and method of testing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110311551.6A CN103033340B (en) | 2011-09-28 | 2011-09-28 | The test device of heavy caliber sampled-grating sampling rate and method of testing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103033340A CN103033340A (en) | 2013-04-10 |
| CN103033340B true CN103033340B (en) | 2016-06-08 |
Family
ID=48020467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110311551.6A Expired - Fee Related CN103033340B (en) | 2011-09-28 | 2011-09-28 | The test device of heavy caliber sampled-grating sampling rate and method of testing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103033340B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103604496B (en) * | 2013-11-29 | 2015-09-02 | 中国科学院西安光学精密机械研究所 | Bi-integrated sphere power meter response nonuniformity scaling method |
| CN103674498B (en) * | 2014-01-08 | 2016-01-27 | 中国工程物理研究院激光聚变研究中心 | A kind of grating sampling parameter detection device |
| CN104155085B (en) * | 2014-07-07 | 2017-02-15 | 中国科学院西安光学精密机械研究所 | Device and method for testing sampling rate of large-diameter sampling chopping board |
| CN108548660B (en) * | 2018-03-26 | 2019-11-15 | 中国科学院西安光学精密机械研究所 | Sampling splits the sampling rate of plate and samples uniformity interferometer measuration system and method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3400299A1 (en) * | 1983-01-10 | 1984-07-12 | Hitachi, Ltd., Tokio/Tokyo | Spectrophotometer |
| CN101493375A (en) * | 2009-02-23 | 2009-07-29 | 中国科学院光电技术研究所 | Splicing detection device based on minor caliber circular Shack-Hartmann wavefront sensor |
| CN101545826A (en) * | 2009-04-30 | 2009-09-30 | 中国科学院上海光学精密机械研究所 | Measuring device and measuring method for diffraction efficiency of grating |
| CN101769819A (en) * | 2008-12-31 | 2010-07-07 | 中国科学院西安光学精密机械研究所 | Optical fiber dispersion measuring apparatus |
| CN101922974A (en) * | 2010-08-31 | 2010-12-22 | 中国科学院西安光学精密机械研究所 | Automatic calibration device and method for laser parameter performance test |
| CN202305181U (en) * | 2011-09-28 | 2012-07-04 | 中国科学院西安光学精密机械研究所 | Device for testing sampling rate of large-caliber sampling grating |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4804266A (en) * | 1985-07-26 | 1989-02-14 | Barspec Ltd. | Continuously rotating grating rapid-scan spectrophotometer |
-
2011
- 2011-09-28 CN CN201110311551.6A patent/CN103033340B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3400299A1 (en) * | 1983-01-10 | 1984-07-12 | Hitachi, Ltd., Tokio/Tokyo | Spectrophotometer |
| CN101769819A (en) * | 2008-12-31 | 2010-07-07 | 中国科学院西安光学精密机械研究所 | Optical fiber dispersion measuring apparatus |
| CN101493375A (en) * | 2009-02-23 | 2009-07-29 | 中国科学院光电技术研究所 | Splicing detection device based on minor caliber circular Shack-Hartmann wavefront sensor |
| CN101545826A (en) * | 2009-04-30 | 2009-09-30 | 中国科学院上海光学精密机械研究所 | Measuring device and measuring method for diffraction efficiency of grating |
| CN101922974A (en) * | 2010-08-31 | 2010-12-22 | 中国科学院西安光学精密机械研究所 | Automatic calibration device and method for laser parameter performance test |
| CN202305181U (en) * | 2011-09-28 | 2012-07-04 | 中国科学院西安光学精密机械研究所 | Device for testing sampling rate of large-caliber sampling grating |
Non-Patent Citations (1)
| Title |
|---|
| 大口径多层介质膜光栅衍射效率测量及其在制作工艺中的应用;周小为等;《物理学报》;20121117;全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103033340A (en) | 2013-04-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102230788B (en) | Self-calibration device and method for measuring parallelism of laser receiving and transmitting optical axes | |
| US9852518B2 (en) | Method and system for calculating laser beam spot size | |
| CN202133379U (en) | Self-calibration type device for measuring parallelism of laser receiving and transmitting optical axis | |
| CN105044704B (en) | The spaceborne laser transmitter integrated test system for performance of high accuracy | |
| CN102175594B (en) | Device for measuring damage threshold under combined action of three-wavelength pulse laser and debugging method | |
| CN110133626B (en) | Method and system for checking parallelism of receiving and transmitting optical axes of laser ranging system | |
| CN103033340B (en) | The test device of heavy caliber sampled-grating sampling rate and method of testing | |
| CN103399413B (en) | Double helix light beam-based sample axial drift detection and compensation method and device | |
| CN105444878A (en) | High-precision mass measurement device and high-precision mass measurement method of chemical oxygen iodine laser far-field beam | |
| CN106918310A (en) | Contactless electro-optic crystal light pass surface normal deviates angle measuring device and its measuring method with Z axis | |
| CN103076092A (en) | Interference imaging spectroscopy device and method for improving spectral resolution | |
| CN106918309A (en) | The measurement apparatus and its measuring method of electro-optic crystal light pass surface normal and Z axis deflecting angle | |
| CN202305181U (en) | Device for testing sampling rate of large-caliber sampling grating | |
| CN102252830A (en) | Detection device and detection method of optical ghost image | |
| CN104880258A (en) | Device and method for measuring near-field correlation pulse width of ultrashort optical pulses | |
| CN102508225A (en) | Double-shaft laser remote sensing instrument ground detection and calibration system and detection and calibration method | |
| CN107024284B (en) | A kind of the heavy caliber collimation wavefront error detection device and method of real-time compensation | |
| CN108107004B (en) | Narrow pulse laser target polarization reflection characteristic test method | |
| CN103278249A (en) | Quasi-near field picosecond pulse width diagnosis instrument | |
| CN104776983A (en) | Polarized laser auto-collimation tester | |
| CN104155085B (en) | Device and method for testing sampling rate of large-diameter sampling chopping board | |
| CN208443765U (en) | Semiconductor transient state X-ray nonlinear optical effect test device | |
| CN103226059A (en) | Wavefront measuring device and measuring method for optical system | |
| CN106289545B (en) | High-resolution femtosecond laser pulse width measuring instrument | |
| CN105424611A (en) | Comprehensive testing and verification system for atmospheric trace gas observation ground performance |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160608 Termination date: 20170928 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |