CN202305181U - Device for testing sampling rate of large-caliber sampling grating - Google Patents
Device for testing sampling rate of large-caliber sampling grating Download PDFInfo
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- CN202305181U CN202305181U CN2011204546774U CN201120454677U CN202305181U CN 202305181 U CN202305181 U CN 202305181U CN 2011204546774 U CN2011204546774 U CN 2011204546774U CN 201120454677 U CN201120454677 U CN 201120454677U CN 202305181 U CN202305181 U CN 202305181U
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Abstract
The utility model relates to a device for testing the sampling rate of a large-caliber sampling grating. The device comprises a laser, a beam splitter, a first integrating sphere power meter, a second integrating sphere power meter, a two-dimensional scanning mirror group which is used for scanning the large-caliber sampling grating, and a control and acquisition processing system, wherein the beam splitter is arranged on an emergent light path of the laser; the first integrating sphere power meter is arranged on a transmission light path which passes through the beam splitter; the two-dimensional scanning mirror group is arranged on a reflection light path which passes through the beam splitter; the second integrating sphere power meter is arranged on a -1-level diffraction light path which passes through the two-dimensional scanning mirror group and then penetrates through the tested sampling grating; and the first integrating sphere power meter and the second integrating sphere power meter are respectively connected with the control and acquisition processing system. By adoption of the device for testing the sampling rate of the large-caliber sampling grating provided by the utility model, the problem about testing of the sampling rate of the large-caliber sampling grating can be solved, and testing accuracy can be well guaranteed.
Description
Technical field
The utility model belongs to optical field, relates to a kind of proving installation of grating sampling rate, relates in particular to a kind of proving installation of heavy caliber sampled-grating sampling rate.
Background technology
In the subsystem of the target range, terminal of inertial confinement fusion system, before frequency tripled laser gets into the target range, terminal, need to adopt sampled-grating (BSG) that the frequency tripled laser of transmission is sampled to the laser parameter diagnostic system according to a certain percentage.Sampled-grating is the sampling element that is applicable to whole wavelength coverage, and it can be applicable to the sampling of heavy caliber light beam, is not influencing basically under the prerequisite of main beam, for the laser parameter diagnostic system provides sample beam.For the energy that guarantees that main beam is practiced shooting, the sampling efficiency of sample beam is generally below 5 ‰.Be subject to grating process equipment and manufacture craft, the heavy caliber sampled-grating sampling rate that often processes is general to exist deviation with design load, and therefore, it is important that the sampling rate of heavy caliber sampled-grating is accurately demarcated ten minutes.
Conventional test methodologies commonly used at present has following two kinds:
Method 1: laser is collimated into the parallel beam that is complementary with the effective clear aperture of sampled-grating through parallel light tube; By two power meter testing laser power (or energy meter Laser Measurement energy), calculate the sampling coefficient of sampled-grating at sampled-grating main beam and-1 order diffraction place.This method shortcoming is: need use heavy caliber parallel light tube and heavy caliber power meter (energy meter) during test, and testing apparatus development processing charges high (millions of at least), less economical.All do not adopt the method at present.
Method 2: small-bore laser beam zones of different on the heavy caliber sampled-grating got at random what time test; The shortcoming of this method: can not the unified grating sampling rate of the whole sampled-grating of quantitative response; When zones of different is tested; All need adjust the angle of incident laser and tested grating, consuming time longer relatively.
The utility model content
In order to solve the above-mentioned technical matters that exists in the background technology, the utility model provides a kind of test problem that solves heavy caliber sampled-grating sampling rate, and has well guaranteed the proving installation of the heavy caliber sampled-grating sampling rate of measuring accuracy.
The technical solution of the utility model is: the utility model provides a kind of proving installation of heavy caliber sampled-grating sampling rate, and its special character is: the proving installation of said heavy caliber sampled-grating sampling rate comprises laser instrument, beam splitter, first integral ball power meter, second integral ball power meter, be used for two-dimensional scan mirror group and control and acquisition processing system that the heavy caliber sampled-grating is scanned; Said beam splitter is arranged on the emitting light path of laser instrument; Said first integral ball power meter places on the transmitted light path of beam splitter; Said two-dimensional scan mirror group places on the reflected light path of beam splitter; Said second integral ball power meter places through seeing through after the two-dimensional scan mirror group on-1 order diffraction light path of tested sampled-grating; Said first integral ball power meter and second integral ball power meter link to each other with acquisition processing system with control respectively.
The proving installation of above-mentioned heavy caliber sampled-grating sampling rate also comprises the parallel light tube that is arranged between laser instrument and the beam splitter.
The proving installation of above-mentioned heavy caliber sampled-grating sampling rate also comprises the coupling mechanism that is arranged between laser instrument and the parallel light tube.
The proving installation of above-mentioned heavy caliber sampled-grating sampling rate also comprises the diaphragm that is arranged at parallel light tube emergent pupil mouth.
Above-mentioned parallel light tube is a broadband off-axis reflection parallel light tube.
Above-mentioned diaphragm is the soft change diaphragm that is used to reduce the laser diffraction effect.
The proving installation of above-mentioned heavy caliber sampled-grating sampling rate also comprise be used to control two-dimensional scan mirror group and with the rigidly connected electronic control translation stage of two-dimensional scan mirror group.
The advantage of the utility model is:
1, can solve the test problem of heavy caliber sampled-grating sampling rate.The utility model replaces with scanister with traditional random a little the mode of adopting and lines by line scan; Can test the heavy caliber sampled-grating by small-bore parallel light tube; Testing cost is low, simultaneously, utilizes this scanister to test heavy caliber sampled-grating zones of different; Can measure its sampling rate homogeneity, preparing grating technology is made scientific evaluation.The 3rd, test weak point consuming time, owing to adopt electronic control translation stage scanning, after scanning puts in place, trigger laser powermeter synchronous acquisition laser power value, and storage.The storage back is by the sweep test of regulation scanning pattern.To the grating measuring of the effective clear aperture of bore 400mm * 400mm, consuming time less than 3 minutes.
2, measuring accuracy is high.First integral ball power meter that the utility model adopted and second integral ball power meter synchronous acquisition; Reduce of the influence of laser power instability to test; Stability is strong, and simultaneously, first integral ball power meter adopts different ranges with second integral ball power meter; Can effectively solve low sampling rate (sampling rate less than below 5 ‰ even lower) test, its measuring accuracy is high.The utility model can be realized quantitative unified test to the heavy caliber sampled-grating, and the relative measurement error is less than 1%.
3, applied range.The utility model adopts broadband off-axis reflection parallel light tube, can satisfy from the work down of different laser wavelengths such as ultraviolet, visible light near infrared, and is applied widely.
Description of drawings
Fig. 1 is the structural representation of the proving installation that provides of the utility model.
Embodiment
Referring to Fig. 1; The utility model provides a kind of proving installation of heavy caliber sampled-grating sampling rate, and this device comprises laser instrument 1, coupling mechanism 2, off-axis reflection parallel light tube 3, soft change diaphragm 4, beam splitter 5, the automatically controlled scanning mirror group of bidimensional (directions X scanning mirror 7 and Y scanning direction mirror 8), Integrating Sphere Laser Power (first integral ball power meter 6 and second integral ball power meter 10) and control and acquisition processing system 11.
Beam splitter 5 places on the emitting light path of laser instrument 1; First integral ball power meter 6 places on the transmitted light path of beam splitter 5; Two-dimensional scan mirror group places on the reflected light path of beam splitter 5; Second integral ball power meter 10 places on the light path of-1 order diffraction that sees through tested sampled-grating 9 after the two-dimensional scan mirror group; First integral ball power meter 6 and second integral ball power meter 10 link to each other with acquisition processing system 11 with control respectively.
Simultaneously, the proving installation of heavy caliber sampled-grating sampling rate also comprise place the parallel light tube 3 between laser instrument 1 and the beam splitter 5 and place laser instrument 1 and parallel light tube 3 between coupling mechanism 2.
Proving installation in heavy caliber sampled-grating sampling rate also comprises the diaphragm that is arranged at parallel light tube emergent pupil mouth.
Parallel light tube is a broadband off-axis reflection parallel light tube.
Diaphragm is the soft change diaphragm that is used to reduce the laser diffraction effect.
The proving installation of heavy caliber sampled-grating sampling rate also comprise be used to control two-dimensional scan mirror group and with the rigidly connected electronic control translation stage of two-dimensional scan mirror group.
During the utility model work, laser instrument 1 is coupled to parallel light tube 3 through coupling mechanism 2, is collimated into directional light output.Place soft change diaphragm 4 at parallel light tube emergent pupil mouth.Soft change diaphragm bore is L * Lmm; Heavy caliber sampled-grating 9 is held on the station; Control two-dimentional automatically controlled scanning mirror group; Make laser beam perpendicular to sampled-grating 9 scannings, first integral ball power meter 6 receives through the laser power behind the beam splitter 5, the sampling laser power that second integral ball power meter 10 receives through tested grating (BSG) 9-1 order diffraction place.By first integral ball power meter 6 monitoring laser devices 1 output power; Simultaneously by beam splitter 5 and scanning mirror group; Can keep watch on the realtime power that is injected into heavy caliber sampled-grating 9 places; First integral ball power meter 6 the laser power of surveying be 1 with the laser power ratio that incides sampled-grating (BSG) 9: ρ (splitting ratio can be demarcated in advance), first integral ball power meter 6 is respectively W1 and W2 with the laser power value of second integral ball power meter 10, then sampled-grating sampling rate herein is:
Concrete scan operation step: 1) control two-dimensional scan mirror group makes scanning light beam incide the sampled-grating lower right corner.2) on directions X, press step-length Lmm scanning, whenever sweep a step, after scanning puts in place, produce trigger pip, by the also storage of laser power of first integral ball power meter 6 with second integral ball power meter 10 synchronous acquisition.3) after directions X scanning is accomplished,, along directions X scanning, gather laser power simultaneously again along one step of scanning on the Y direction.4) by that analogy, up to the unified been scanned of whole sampled-grating.
When n step scanning, synchronous acquisition first integral ball power meter 6 power are W
1n, second integral ball power meter 10 power are W
2n, then herein grating sampling rate is:
If the m step can be swept complete grating effective aperture, then the sampling rate of grating is:
The sampling rate homogeneity is:
Claims (7)
1. the proving installation of a heavy caliber sampled-grating sampling rate is characterized in that: the proving installation of said heavy caliber sampled-grating sampling rate comprises laser instrument, beam splitter, first integral ball power meter, second integral ball power meter, be used for two-dimensional scan mirror group and control and acquisition processing system that the heavy caliber sampled-grating is scanned; Said beam splitter is arranged on the emitting light path of laser instrument; Said first integral ball power meter places on the transmitted light path of beam splitter; Said two-dimensional scan mirror group places on the reflected light path of beam splitter; Said second integral ball power meter places through seeing through after the two-dimensional scan mirror group on-1 order diffraction light path of tested sampled-grating; Said first integral ball power meter and second integral ball power meter link to each other with acquisition processing system with control respectively.
2. the proving installation of heavy caliber sampled-grating sampling rate according to claim 1 is characterized in that: the proving installation of said heavy caliber sampled-grating sampling rate also comprises the parallel light tube that is arranged between laser instrument and the beam splitter.
3. the proving installation of heavy caliber sampled-grating sampling rate according to claim 2 is characterized in that: the proving installation of said heavy caliber sampled-grating sampling rate also comprises the coupling mechanism that is arranged between laser instrument and the parallel light tube.
4. the proving installation of heavy caliber sampled-grating sampling rate according to claim 3 is characterized in that: the proving installation of said heavy caliber sampled-grating sampling rate also comprises the diaphragm that is arranged at parallel light tube emergent pupil mouth.
5. according to the proving installation of claim 2 or 3 or 4 described heavy caliber sampled-grating sampling rates, it is characterized in that: said parallel light tube is a broadband off-axis reflection parallel light tube.
6. the proving installation of heavy caliber sampled-grating sampling rate according to claim 5 is characterized in that: said diaphragm is the soft change diaphragm that is used to reduce the laser diffraction effect.
7. the proving installation of heavy caliber sampled-grating sampling rate according to claim 6 is characterized in that: the proving installation of said heavy caliber sampled-grating sampling rate also comprise be used to control two-dimensional scan mirror group and with the rigidly connected electronic control translation stage of two-dimensional scan mirror group.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204546774U CN202305181U (en) | 2011-09-28 | 2011-09-28 | Device for testing sampling rate of large-caliber sampling grating |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204546774U CN202305181U (en) | 2011-09-28 | 2011-09-28 | Device for testing sampling rate of large-caliber sampling grating |
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| Publication Number | Publication Date |
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| CN202305181U true CN202305181U (en) | 2012-07-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2011204546774U Expired - Fee Related CN202305181U (en) | 2011-09-28 | 2011-09-28 | Device for testing sampling rate of large-caliber sampling grating |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103033340A (en) * | 2011-09-28 | 2013-04-10 | 中国科学院西安光学精密机械研究所 | Testing device and testing method of big diameter sampling grating sampling rate |
| CN103604496A (en) * | 2013-11-29 | 2014-02-26 | 中国科学院西安光学精密机械研究所 | Method for calibrating response inconsistency of double-integrating-sphere power meter |
| CN104359550A (en) * | 2014-11-13 | 2015-02-18 | 中国科学院西安光学精密机械研究所 | Conical laser intensity testing device and testing method |
| CN105588709A (en) * | 2015-12-24 | 2016-05-18 | 深圳市杰普特电子技术有限公司 | Free space isolator isolation testing device and method |
-
2011
- 2011-09-28 CN CN2011204546774U patent/CN202305181U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103033340A (en) * | 2011-09-28 | 2013-04-10 | 中国科学院西安光学精密机械研究所 | Testing device and testing method of big diameter sampling grating sampling rate |
| CN103033340B (en) * | 2011-09-28 | 2016-06-08 | 中国科学院西安光学精密机械研究所 | The test device of heavy caliber sampled-grating sampling rate and method of testing |
| CN103604496A (en) * | 2013-11-29 | 2014-02-26 | 中国科学院西安光学精密机械研究所 | Method for calibrating response inconsistency of double-integrating-sphere power meter |
| CN103604496B (en) * | 2013-11-29 | 2015-09-02 | 中国科学院西安光学精密机械研究所 | Bi-integrated sphere power meter response nonuniformity scaling method |
| CN104359550A (en) * | 2014-11-13 | 2015-02-18 | 中国科学院西安光学精密机械研究所 | Conical laser intensity testing device and testing method |
| CN105588709A (en) * | 2015-12-24 | 2016-05-18 | 深圳市杰普特电子技术有限公司 | Free space isolator isolation testing device and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120704 Termination date: 20150928 |
|
| EXPY | Termination of patent right or utility model |