CN108548660B - Sampling splits the sampling rate of plate and samples uniformity interferometer measuration system and method - Google Patents
Sampling splits the sampling rate of plate and samples uniformity interferometer measuration system and method Download PDFInfo
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- CN108548660B CN108548660B CN201810253356.4A CN201810253356A CN108548660B CN 108548660 B CN108548660 B CN 108548660B CN 201810253356 A CN201810253356 A CN 201810253356A CN 108548660 B CN108548660 B CN 108548660B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
Abstract
The invention belongs to sample split plate sampling rate and sampling uniformity interferometer measuration system and method, system include the shrink beam telescope and autocollimatic reflecting mirror set gradually along optical path；Sampling to be measured splits plate between shrink beam telescope and autocollimatic reflecting mirror；Shrink beam telescope exports parallel laser, is projected to the sampling reflecting surface sampling to be measured for sampling and splitting plate, and fraction of laser light splits the sampling reflective surface of plate to shrink beam telescope by be measured sample；The sampling to be measured of another part laser light splits plate and is incident to autocollimatic reflecting mirror, splits plate through sampling to be measured after the reflection of autocollimatic reflecting mirror and enters shrink beam telescope.Solve the problems, such as that traditional measurement method is not easy to realize high measurement accuracy for small share sampling rate.
Description
Technical field
The present invention relates to a kind of samplings to split plate sampling rate and sampling homogeneity measuring systems and method.
Background technique
In high power laser system, in order to carry out the measurement of laser parameter, it is necessary first to the sampling of laser is carried out, wherein
A kind of common sampling method is to be split plate using sampling and be placed in laser optical path to carry out reflection sampling to laser, its main feature is that taking
Sample rate is small (general < 1%), to reduce the loss to laser output to the greatest extent, while having higher requirement to the uniformity of sampling,
Therefore the sampling rate of plate must be split to sampling and sampling uniformity gives precise measurement, and traditional measurement method is using double light path
Optical spectroscopy measures, and influences and small share sampling rate (< 5%) is difficult to realize high there are the inconsistency of double light path
Measurement accuracy.
Summary of the invention
It is an object of the present invention to provide a kind of sampling rate based on double light path principle of interference and sampling homogeneity measuring systems and
Method splits plate sampling rate and sampling uniformity, solution using shrink beam telescope+auto-collimation reflecting mirror+double light path principle of interference measurement
Traditional measurement method of having determined is not easy the problem of realizing high measurement accuracy for small share sampling rate.
The technical solution of the invention is as follows provide it is a kind of sampling split plate sampling rate and sampling uniformity interferometer measuration system,
It is characterized in that shrink beam telescope and autocollimatic reflecting mirror including setting gradually along optical path；
Sampling to be measured splits plate between shrink beam telescope and autocollimatic reflecting mirror；
Above-mentioned shrink beam telescope exports parallel laser, is projected to the sampling reflecting surface sampling to be measured for sampling and splitting plate, part is swashed
Light splits the sampling reflective surface of plate to shrink beam telescope by be measured sample；Plate incidence is split in the sampling to be measured of another part laser light
To autocollimatic reflecting mirror, plate is split through sampling to be measured after the reflection of autocollimatic reflecting mirror and enters shrink beam telescope.
Preferably, for reduction system volume, which further includes splitting between plate positioned at shrink beam telescope and sampling to be measured
Amici prism or reflecting mirror；Above-mentioned Amici prism or reflecting mirror reflex to the parallel laser that shrink beam telescope is emitted wait measure
Sample splits plate, at this point, the movement that plate is split in sampling to be measured can carry out in the horizontal plane.
Preferably, above-mentioned shrink beam telescope includes optical fiber point source, the semi-transparent semi-reflecting rib in optical fiber point source emitting light path
It mirror, the first collimating mirror in semi-transparent semi-reflecting prismatic reflection optical path and is sequentially located at small in semi-transparent semi-reflecting prism transmission optical path
Orifice plate, the second collimating mirror and CCD camera, above-mentioned aperture plate are located at the position of focal plane of CCD camera, split for filtering out sampling to be measured
The reflected light of plate non-reflecting surface passes through, and guarantees to receive the clean of signal.
Preferably, 2 θ of aperture plate hole diameter d < × f, wherein θ is to split plate angle degree, and f is the focal length of the telescope.
Preferably, in order to keep the two-way luminous intensity of interference close, increase the contrast of interference fringe, auto-collimation reflecting mirror is adopted
Your form is pinched with the phenanthrene of not plated film.
The method that the measurement sampling based on above system that the present invention also provides a kind of splits plate sampling rate and samples uniformity, packet
Include following steps:
Step 1: shrink beam telescope issues parallel laser, is projected to sampling to be measured and splits plate, and splits plate sampling through sampling to be measured
Rear portion is back to shrink beam telescope, remembers that the fraction of laser light intensity is I1；Plate is split in the sampling to be measured of another part laser light, is remembered
The laser intensity of the part is I2, sampling rate ρ=I1/I2；
Step 2: the laser for splitting plate through sampling to be measured is reflected through autocollimatic reflecting mirror, and the luminous intensity being reflected back is kI2,
Middle k is the reflectivity of autocollimatic reflecting mirror；
Step 3: the laser after the reflection of autocollimatic reflecting mirror is again passed through sampling to be measured and splits plate, transmitted intensity kI2
(1-ρ)；
Step 4: laser and step 3 that plate reflects are split through sampling to be measured in step 1 and splits swashing for plate transmission through sampling to be measured
Light enters shrink beam telescope simultaneously, is received by CCD camera, and the interference of two directional lights is formed, and wherein the spacing of interference fringe is
Δ d,
Step 5: interpretation image obtains the contrast γ of interference fringe；
Wherein ImaxAnd IminThe intensity value of bright rays and dark line respectively in image；
Step 6: the theoretical contrast of interference fringe is calculated by formula (2):
The contrast γ for the interference fringe that step 5 is obtained is calculated and takes in conjunction with the theoretical contrast of interference fringe
Sample rate ρ；
Step 7: control sampling to be measured splits plate and splits plate in sampling to be measured and planar move n times, and every movement is primary, repeatedly
Step 1 obtains the sampling rate ρ of n part to step 6i；
Step 8: sampling uniformity is obtained by the statistics of sampling rate:Wherein ρiIt is local
Sampling rate,For the average value that spot sampling leads, spot sampling leads number n a little and is set as needed.
Preferably, required fringe spacing Δ is obtained by adjusting orientation, the pitch angle of autocollimatic reflecting mirror in step 4
d。
The beneficial effects of the present invention are:
1, common sampling rate measurement is using double light path method, and the otherness of optical path each in this way will introduce mistake
Difference, such as the inconsistency of detector is exactly an important error source, and the method for the present invention unifies optical path, is visited using one
Device CCD is surveyed, there is no two optical path nonuniformities to introduce to obtain error, and precision is high；
2, principle of this method based on interferometry, interferometry have its specific theoretical model, and there is no model is not true
Surely the error introduced, while also not needing to carry out transmission of quantity value, therefore convenient for tracing to the source.Multiple interference items in image when measuring simultaneously
Line really passes through the I of multiple groups interference fringemaxAnd IminAverage computation solves sampling rate, and precision is high；
3, the present invention only includes an optical path, and device is simple.
Detailed description of the invention
Fig. 1 is the system schematic of one embodiment of the invention；
Fig. 2 is interference fringe example；
Appended drawing reference in figure are as follows: plate is split in 1- sampling to be measured, and 2- is to be measured to sample the sampling reflecting surface for splitting plate, and 3- is from quasi-reflection
Mirror, 4- shrink beam telescope, 5- Amici prism, 6- aperture plate, 7-CCD camera, 8- optical fiber point source.
Specific embodiment
Below in conjunction with drawings and the specific embodiments, the present invention will be further described.
It will be seen from figure 1 that system is made of autocollimatic reflecting mirror 3, shrink beam telescope 4, Amici prism 5 etc., sampling to be measured
Plate 1 is split between shrink beam telescope 4 and Amici prism 5；Sampling splits plate and is generally the plate wedge for having certain angle, wait measure
Sample split plate sampling reflecting surface 2 be tested surface, sampling split plate can sampling split plate planar move with realize scan survey
Amount；Shrink beam telescope reflexes to sampling to be measured through Amici prism 5 by the transmitting of optical fiber point source 8 output parallel laser and splits plate 1；Light splitting
The effect of prism 5 is turnover optical path, reduction system volume, while will split the movement turnover of plate in horizontal plane, can also be with complete
Reflecting mirror substitution；After the sampling of plate 1 is split in sampling to be measured, part light is returned, part light is penetrated to autocollimatic reflecting mirror 3, from quasi-reflection
Mirror 3 is used to will transmit through sampling to be measured and splits the light autocollimatic return of plate 1 to split the reflected light shape of the sampling reflecting surface 2 of plate with sampling to be measured
Interfere at double light path；The CCD camera 7 of shrink beam telescope receives the sampling reflecting surface and autocollimatic reflecting mirror 3 to be measured for sampling and splitting plate
Reflected light, and aperture plate 6 is set in its position of focal plane, 2 θ of hole diameter d < × f, wherein θ is to split plate angle degree, and f is that telescope is burnt
Away from splitting the second face of plate reflected light to filter out sampling, guarantee to receive signal clean；
It is measured especially by following methods:
1), shrink beam telescope 4 issues parallel laser, projects the sampling reflecting surface that plate is split in sampling to be measured through Amici prism 5
2, and through its sampling, a part of laser returns to shrink beam telescope 4, remembers that the fraction of laser light intensity is I1；Another part laser light
Plate 1 is split in sampling to be measured, and transmitted light splits plate 1 (the non-sampling reflecting surface that plate is split in sampling to be measured is coated with anti-reflection film) by sampling to be measured,
Remember that its intensity is I2, sampling rate to be measured is ρ=I1/I2；
2), through the transmitted light to be measured that split plate 1 that samples through the reflection of autocollimatic reflecting mirror 3, wherein autocollimatic reflecting mirror is used and is not plated
The phenanthrene of film pinches your form (purpose is to keep the two-way luminous intensity of interference close, increases the contrast of interference fringe), and reflectivity k can
Your formula is pinched by phenanthrene and accurately calculates acquisition, then the luminous intensity being reflected back is kI2；
3), reflected light kI2Again passing by the transmitted intensity to be measured sampled after splitting plate 1 is kI2(1-ρ)；
4), to be measured to sample the reflective light intensity I for splitting the sampling reflecting surface 2 of plate1The light intensity kI being reflected back with autocollimatic2(1- ρ) simultaneously
It into shrink beam telescope 1, is received by CCD camera 7, forms the interference of two directional lights, interference fringe such as Fig. 2 at this time；Interfere item
The spacing of line are as follows:Wherein λ is optical maser wavelength, and θ is the angle of two-way laser, can be by adjusting from quasi-reflection
The orientation of mirror 3, pitch angle obtain suitable fringe spacing, in favor of image interpretation, it is general require to have in whole image 6~
10 stripeds are conducive to interpretation；
5), by interpretation image, fringe contrast can be obtained,Wherein ImaxAnd IminRespectively scheme
The intensity value (button goes the value after background noise) of bright rays and dark line as in, and the theoretical contrast of interference fringe is by participating in interference
The decision of two-way luminous intensity, this example are as follows:K pinches your formula by phenanthrene and accurately calculates acquisition,
Sampling rate ρ can be calculated using the formula；
6) it controlling sampling to be measured and splits plate 1 and split plate in sampling to be measured and planar move n times, every movement is primary, and repeatedly one
Secondary step 1) -5), repeatedly n times, obtain the sampling rate ρ of n part in totali；
7), sampling uniformity is obtained by the statistics of sampling rate:Wherein ρiFor the sampling of part
Rate,For the average value that spot sampling leads, spot sampling leads number n a little and is set as needed, general unilateral according to splitting board foot
It chooses very little 1/10.
Claims (5)
1. plate sampling rate and sampling uniformity interferometer measuration system are split in a kind of sampling, it is characterised in that: including successively being set along optical path
The shrink beam telescope and autocollimatic reflecting mirror set；
Sampling to be measured splits plate between shrink beam telescope and autocollimatic reflecting mirror；
The shrink beam telescope exports parallel laser, is projected to the sampling reflecting surface sampling to be measured for sampling and splitting plate, fraction of laser light quilt
To be measured sample splits the sampling reflective surface of plate to shrink beam telescope；The sampling to be measured of another part laser light is split plate and is incident to certainly
Quasi-reflection mirror splits plate through sampling to be measured after the reflection of autocollimatic reflecting mirror and enters shrink beam telescope；It further include looking in the distance positioned at shrink beam
Amici prism or reflecting mirror between plate are split in mirror and sampling to be measured；What shrink beam telescope was emitted by the Amici prism or reflecting mirror
Parallel laser reflexes to sampling to be measured and splits plate；The shrink beam telescope includes optical fiber point source, is located in optical fiber point source emitting light path
Semi-transparent semi-reflecting prism, the first collimating mirror in semi-transparent semi-reflecting prismatic reflection optical path and to be sequentially located at semi-transparent semi-reflecting prism saturating
Aperture plate, the second collimating mirror and the CCD camera in optical path are penetrated, the aperture plate is located at the position of focal plane of CCD camera.
2. plate sampling rate and sampling uniformity interferometer measuration system are split in sampling according to claim 1, it is characterised in that: small
2 θ of orifice plate hole diameter d < × f, wherein θ is to split plate angle degree, and f is the focal length of the telescope.
3. plate sampling rate and sampling uniformity interferometer measuration system are split in sampling according to claim 2, it is characterised in that: from
Collimating mirror pinches your form using the phenanthrene of not plated film.
4. a kind of method split plate sampling rate based on any systematic survey sampling of claim 1-3 and sample uniformity,
Characterized by comprising the following steps:
Step 1: shrink beam telescope issues parallel laser, is projected to sampling to be measured and splits plate, and it is latter through sampling to be measured to split plate sampling
Part is back to shrink beam telescope, remembers that the fraction of laser light intensity is I1；Plate is split in the sampling to be measured of another part laser light, remembers the portion
The laser intensity divided is I2, sampling rate ρ=I1/I2；
Step 2: the laser for splitting plate through sampling to be measured is reflected through autocollimatic reflecting mirror, and the luminous intensity being reflected back is kI2, wherein k be
The reflectivity of autocollimatic reflecting mirror；
Step 3: the laser after the reflection of autocollimatic reflecting mirror is again passed through sampling to be measured and splits plate, transmitted intensity kI2(1-ρ)；
The laser that step 4: splitting the laser of plate reflection through sampling to be measured in step 1 and step 3 splits plate transmission through sampling to be measured is same
When enter shrink beam telescope, received by CCD camera, form the interference of two directional lights, wherein the spacing of interference fringe be Δ d,
Step 5: interpretation image obtains the contrast γ of interference fringe；
Wherein ImaxAnd IminThe intensity value of bright rays and dark line respectively in image；
Step 6: the theoretical contrast of interference fringe is calculated by formula (2):
Sampling rate is calculated in conjunction with the theoretical contrast of interference fringe in the contrast γ for the interference fringe that step 5 is obtained
ρ；
Step 7: control sampling to be measured splits plate and splits plate in sampling to be measured and planar move n times, and every movement is primary, is repeated once
Step 1 obtains the sampling rate ρ of n part to step 6i；
Step 8: sampling uniformity is obtained by the statistics of sampling rate:Wherein ρiFor the sampling of part
Rate,For the average value that spot sampling leads, spot sampling leads number n a little and is set as needed.
5. the method that measurement sampling splits plate sampling rate and samples uniformity according to requiring 4 in power, which is characterized in that step
By adjusting orientation, the pitch angle of autocollimatic reflecting mirror in four, required fringe spacing Δ d is obtained.
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