CN201724738U - High-power laser near field tester - Google Patents
High-power laser near field tester Download PDFInfo
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- CN201724738U CN201724738U CN 201020143440 CN201020143440U CN201724738U CN 201724738 U CN201724738 U CN 201724738U CN 201020143440 CN201020143440 CN 201020143440 CN 201020143440 U CN201020143440 U CN 201020143440U CN 201724738 U CN201724738 U CN 201724738U
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Abstract
The utility model discloses a high-power laser near field tester. In a light path of the tester, a high-power laser beam is incident to a CCD sequentially through a first lens, a microhole filter, a second lens and an attenuator. The first lens and the second lens form a large-caliber beam contracting system. Collimation light after beam contracting passes through the attenuator and the tested beam is imaged on the CCD through the beam contracting system and the attenuator. The microhole filter is arranged on a public focus of the first lens and the second lens. The attenuator comprises combination constant attenuation panels and variable attenuation pieces. A first incident surface of each combination constant attenuation panel and each variable attenuation piece is plated with a reflecting film with different reflectivity. A second incident surface is plated with an antireflection film. The plurality of the constant attenuation panels and the variable attenuation pieces are combined to obtain various different attenuation multiplying power and the tested laser is ranged in the CCD linear response through attenuator signal. The high-power laser near field tester has the advantages of simple structure, convenient adjustment and high near field testing accuracy.
Description
Technical field
The utility model belongs to high power laser light parameter testing field, relates generally to a kind of high power laser light near-field test instrument.
Background technology
For device of high power laser, near field distribution is meant that the optical energy density on the particular spatial location lasing aperture distributes, because the nonlinear effect of device of high power laser makes the near field very strong modulation occur, expensive optical elements of large caliber generally is near field position, it is bigger to destroy risk, has greatly limited load ability of laser facility.The purpose of near-field test is to guarantee beam collimation, assessment light beam space quality, monitoring laser optical element damage situation, provides foundation by near-field test for device of high power laser operation and maintenance.
Summary of the invention
The utility model provides a kind of high power laser light near-field test instrument.
The technical scheme that its technical matters that solves the utility model adopts is: in the light path of the utility model high power laser light near-field test instrument, high-power laser beam through first lens, small filter, second lens and attenuator, incides CCD successively.First lens and second lens are formed the heavy caliber beam system that contracts, and the collimated light behind the bundle that contracts is by attenuator, and tested light beam is provided with a small filter through contracting beam system and attenuator imaging on CCD on the public focus of first lens and second lens.Attenuator is made up of the first fixed attenuation flat board, the second fixed attenuation flat board, the 3rd fixed attenuation flat board, the 4th fixed attenuation flat board and variable attenuation sheet, the reflectance coating of the first fixed attenuation flat board, the second fixed attenuation flat board, the 3rd fixed attenuation flat board, the 4th fixed attenuation flat board and variable attenuation sheet first incidence surface plating different reflectivity, second incidence surface plating antireflective film.
The beneficial effects of the utility model are that the fixed attenuation flat board of the high decay of employing multiplying power carries out the big multiplying power of transmission-type with the variable attenuation sheet to tested high power laser light and decays, and can obtain distortionless near field distribution.The utility model is simple in structure, and is easy to adjust, near-field test precision height.
Description of drawings
Below in conjunction with drawings and Examples the utility model is further specified.
Fig. 1 is the utility model high power laser light near-field test instrument light channel structure synoptic diagram.
Fig. 2 is the attenuator optical texture synoptic diagram in the utility model.
The dull and stereotyped 25. variable attenuation sheets of dull and stereotyped 24. the 4th fixed attenuation of dull and stereotyped 23. the 3rd fixed attenuation of dull and stereotyped 22. second fixed attenuation of 1. first lens, 2. small filters, 3. second lens, 4. attenuator 5.CCD, 21. first fixed attenuation among the figure.
Embodiment
Fig. 1 is the utility model high power laser light near-field test instrument light channel structure synoptic diagram.As shown in Figure 1, wavelength is 1.054 μ m, beam size is that the high power laser light of 70mm * 70mm is successively through first lens 1, small filter 2, second lens 3 and attenuator 4, enter CCD5, first lens 1 and second lens 3 are formed the heavy calibers beam system that contracts, for preventing that the environment parasitic light from entering contrast and sharpness that test macro influences elephant, on first lens 1 and second lens, 3 public focus, be provided with a small filter 2,10 mm * 10mm the collimated light that contracts after restrainting passes through attenuator 4, and tested light beam obtains near-field energy through contract beam system and attenuator 4 imaging and distributes on CCD5.Among Fig. 2, attenuator 4 is made up of the first fixed attenuation flat board 21, the second fixed attenuation flat board 22, the 3rd fixed attenuation flat board 23, the 4th fixed attenuation dull and stereotyped 24 and variable attenuation sheet 25, the first fixed attenuation flat board 21, the second fixed attenuation flat board 22, the 3rd fixed attenuation flat board 23, the 4th fixed attenuation flat board 24 carry out big multiplying power decay, and variable attenuation sheet 25 is used for little multiplying power decay.First incidence surface of the first fixed attenuation flat board 21, the second fixed attenuation flat board 22, the 3rd fixed attenuation flat board 23, the 4th fixed attenuation dull and stereotyped 24 and variable attenuation sheet 25 plates the reflectance coating of different reflectivity on request, second incidence surface plating antireflective film.By decay flat board and variable attenuation sheet incident beam is carried out the transmission decay, adopt different decay flat boards and attenuator combination to obtain various decay multiplying power, the signal of measured laser process attenuator 4 is in the linear response range of CCD5.
For guaranteeing the imaging relation, adopt the beam system that contracts that real focus is arranged that light beam is contracted from 70mm * 70mm bore and restraint 10mm * 10mm.Because the bundle large percentage that contracts, adopt the simple lens that constitutes by two lens beam system conjugate distance that contracts big, apparatus structure is huge, adopts the compound lens structure, and each surface reflection of compound lens is resembled all can not focus on other optical element.
For tested high power laser light, for making the signal that enters on the detector C CD5 unsaturated, need in light path, insert the attenuator 4 of high decay multiplying power, this attenuator 4 should have enough big decay multiplying power, and the wave aberration that attenuator 4 is introduced is as far as possible little.If attenuator 4 places first lens, 1 front, need bigbore decay dull and stereotyped, will increase cost like this, assemble in the light path if be placed on, will the very big additional aberration of generation, so attenuator 4 is placed in the directional light that contracts after restrainting.Attenuator 4 is made up of the first fixed attenuation flat board 21, the second fixed attenuation flat board 22, the 3rd fixed attenuation flat board 23, the 4th fixed attenuation dull and stereotyped 24 and variable attenuation sheet 25.The first fixed attenuation flat board 21, the second fixed attenuation flat board 22, the 3rd fixed attenuation flat board 23, the 4th fixed attenuation flat board 24 are used for big multiplying power decay.In order to reduce the interference that light beam forms between the first fixed attenuation flat board 21, the second fixed attenuation flat board 22, the 3rd fixed attenuation flat board 23, the dull and stereotyped 24 optical surface sheets of the 4th fixed attenuation, the flat board of will decaying is 45
0Place, the fixed attenuation flat board is made up of the K9 coating film on glass, first plane of incidence plating high-reflecting film, and reflectivity was 99%, the second plane of incidence plating antireflective film when 45 degree were placed, and reflectivity was less than 0.5% when 45 degree were placed, and the flatness of dull and stereotyped two faces of fixed attenuation is λ/10; The dull and stereotyped fixing peace of fixed attenuation frame is on traversing carriage separately, and this support can manual or automatic shift-in or shifted out light path, and has automatic positioning function.Place the variable attenuation sheet 25 behind the fixed attenuation flat board to be used for little multiplying power decay,, be 0 for ease of regulating
0Place, variable attenuation sheet 25 has six, is made up of the K9 coating film on glass for every, and first plane of incidence plates reflectance coating, and reflectivity is respectively 90%, 80%, 60%, 50%, 20%, 10%, the second plane of incidence plating antireflective film, reflectivity is less than 0.5%, and the flatness of two faces of variable attenuation sheet 25 is λ/10.Variable attenuation sheet 25 is positioned on the swing-arm type rotating disk, but this rotating disk hand rotation, have location, recognition function, rotate rotating disk and can obtain six different pad values easily, the regulative mode of variable attenuation sheet 25 also can be realized the conversion of six attenuators by translation.
For avoiding in the first fixed attenuation flat board 21, the second fixed attenuation flat board 22, the 3rd fixed attenuation flat board 23, the 4th fixed attenuation dull and stereotyped 24 and the variable attenuation sheet 25 multiple-beam interference taking place, above-mentioned decay flat board can be processed into and have the plate of splitting of necessarily carving the angle, as to carve the angle be 10 degree; The whole blackings of attenuator tube inwall are to absorb parasitic light.But CCD5 is two-dimensional adjustable in surface level, makes the measured object surface imaging on CCD5 by mobile CCD5, and CCD5 has real-time acquisition function, the whole instrument inwall adopts heat absorbing glass, all face coating black lusterless paints that are in the light with ABSORPTION AND SCATTERING light and reflected light, improve the signal to noise ratio (S/N ratio) that CCD5 gathers image.
Claims (3)
1. high power laser light near-field test instrument, it is characterized in that: high-power laser beams through first lens (1), small filter (2), second lens (3) and attenuator (4), incides CCD(5 successively); First lens (1) and second lens (3) are formed the heavy caliber beam system that contracts, the collimated light that contracts after restrainting passes through attenuator (4), tested light beam through contract beam system and attenuator (4) imaging in CCD(5) on, on the public focus of first lens (1) and second lens (3), be provided with a small filter (2), attenuator (4) is by the first fixed attenuation flat board (21), the second fixed attenuation flat board (22), the 3rd fixed attenuation flat board (23), the 4th fixed attenuation flat board (24) and variable attenuation sheet (25) are formed, the first fixed attenuation flat board (21), the second fixed attenuation flat board (22), the 3rd fixed attenuation flat board (23), the reflectance coating of the 4th fixed attenuation flat board (24) and variable attenuation sheet (25) first incidence surfaces plating different reflectivity, second incidence surface plating antireflective film.
2. high power laser light near-field test instrument according to claim 1, it is characterized in that: the described first fixed attenuation flat board (21), the second fixed attenuation flat board (22), the 3rd fixed attenuation flat board (23), the 4th fixed attenuation flat board (24) carry out the transmission decay to incident beam, and 45 degree are positioned in the light path; The dull and stereotyped peace of each fixed attenuation frame is on traversing carriage separately.
3. high power laser light near-field test instrument according to claim 1 is characterized in that: the described first fixed attenuation flat board (21), the second fixed attenuation flat board (22), the 3rd fixed attenuation flat board (23), the 4th fixed attenuation flat board (24) and variable attenuation sheet (25) are for having the plate of splitting of carving the angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201020143440 CN201724738U (en) | 2010-03-29 | 2010-03-29 | High-power laser near field tester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201020143440 CN201724738U (en) | 2010-03-29 | 2010-03-29 | High-power laser near field tester |
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| CN201724738U true CN201724738U (en) | 2011-01-26 |
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| CN 201020143440 Expired - Lifetime CN201724738U (en) | 2010-03-29 | 2010-03-29 | High-power laser near field tester |
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Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102175310A (en) * | 2011-03-07 | 2011-09-07 | 中国工程物理研究院应用电子学研究所 | Device for measuring laser light near field intensity distribution |
| CN102183299A (en) * | 2011-03-21 | 2011-09-14 | 中国科学院西安光学精密机械研究所 | 4f optical system for measuring laser near field distribution |
| CN102901620A (en) * | 2012-10-31 | 2013-01-30 | 中国科学院长春光学精密机械与物理研究所 | Universal high-precision adjusting and detection device for laser beam combining system and application thereof |
| CN102902032A (en) * | 2012-09-13 | 2013-01-30 | 北京国科世纪激光技术有限公司 | Attenuation slice placing device |
| CN102944302A (en) * | 2012-11-12 | 2013-02-27 | 中国科学院西安光学精密机械研究所 | Test device and test method for laser focal spot light intensity distribution |
| CN103148931A (en) * | 2013-01-18 | 2013-06-12 | 华北电力大学（保定） | Device of detecting large power laser beam by using small power detector and method |
| CN103196552A (en) * | 2013-03-28 | 2013-07-10 | 宁波高新区通尚光电技术有限公司 | Measuring device for light intensity of narrow-light-beam light-emitting diode (LED) lamp |
| CN103308278A (en) * | 2012-03-16 | 2013-09-18 | 山东华光光电子有限公司 | Method for measuring near-field nonlinear effect of semiconductor bar laser device |
| CN103616163A (en) * | 2013-11-25 | 2014-03-05 | 中国科学院长春光学精密机械与物理研究所 | Solar blind ultraviolet filter out-of-band cut-off depth testing method |
| CN104155085A (en) * | 2014-07-07 | 2014-11-19 | 中国科学院西安光学精密机械研究所 | Device and method for testing sampling rate of large-diameter sampling chopping board |
| CN104655408A (en) * | 2015-01-29 | 2015-05-27 | 大族激光科技产业集团股份有限公司 | Laser power monitoring device |
| CN105352596A (en) * | 2015-12-09 | 2016-02-24 | 广州江元医疗科技有限公司 | Monochromatic light collection device |
| CN105675265A (en) * | 2016-01-25 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | Large-aperture light beam collimating and measuring device |
| CN105842832A (en) * | 2016-04-24 | 2016-08-10 | 湖南戴斯光电有限公司 | Attenuation device for measuring distribution of high-power laser focused light beam |
| CN108548660A (en) * | 2018-03-26 | 2018-09-18 | 中国科学院西安光学精密机械研究所 | Sampling splits the sampling rate of plate and samples uniformity interferometer measuration system and method |
| CN113945276A (en) * | 2021-10-25 | 2022-01-18 | 中国科学院光电技术研究所 | Detector linearity calibration method |
-
2010
- 2010-03-29 CN CN 201020143440 patent/CN201724738U/en not_active Expired - Lifetime
Cited By (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102175310A (en) * | 2011-03-07 | 2011-09-07 | 中国工程物理研究院应用电子学研究所 | Device for measuring laser light near field intensity distribution |
| CN102183299A (en) * | 2011-03-21 | 2011-09-14 | 中国科学院西安光学精密机械研究所 | 4f optical system for measuring laser near field distribution |
| CN103308278A (en) * | 2012-03-16 | 2013-09-18 | 山东华光光电子有限公司 | Method for measuring near-field nonlinear effect of semiconductor bar laser device |
| CN103308278B (en) * | 2012-03-16 | 2015-08-19 | 山东华光光电子有限公司 | A kind of method measuring semiconductor bar bar laser instrument near field nonlinear effect |
| CN102902032A (en) * | 2012-09-13 | 2013-01-30 | 北京国科世纪激光技术有限公司 | Attenuation slice placing device |
| CN102902032B (en) * | 2012-09-13 | 2015-01-21 | 北京国科世纪激光技术有限公司 | Attenuation slice placing device |
| CN102901620A (en) * | 2012-10-31 | 2013-01-30 | 中国科学院长春光学精密机械与物理研究所 | Universal high-precision adjusting and detection device for laser beam combining system and application thereof |
| CN102901620B (en) * | 2012-10-31 | 2014-12-24 | 中国科学院长春光学精密机械与物理研究所 | Universal high-precision adjusting and detection device for laser beam combining system and application thereof |
| CN102944302A (en) * | 2012-11-12 | 2013-02-27 | 中国科学院西安光学精密机械研究所 | Test device and test method for laser focal spot light intensity distribution |
| CN102944302B (en) * | 2012-11-12 | 2015-07-29 | 中国科学院西安光学精密机械研究所 | Laser focal spot light distribution proving installation and method of testing |
| CN103148931B (en) * | 2013-01-18 | 2015-04-22 | 华北电力大学（保定） | Device of detecting large power laser beam by using small power detector and method |
| CN103148931A (en) * | 2013-01-18 | 2013-06-12 | 华北电力大学（保定） | Device of detecting large power laser beam by using small power detector and method |
| CN103196552A (en) * | 2013-03-28 | 2013-07-10 | 宁波高新区通尚光电技术有限公司 | Measuring device for light intensity of narrow-light-beam light-emitting diode (LED) lamp |
| CN103616163A (en) * | 2013-11-25 | 2014-03-05 | 中国科学院长春光学精密机械与物理研究所 | Solar blind ultraviolet filter out-of-band cut-off depth testing method |
| CN104155085A (en) * | 2014-07-07 | 2014-11-19 | 中国科学院西安光学精密机械研究所 | Device and method for testing sampling rate of large-diameter sampling chopping board |
| CN104155085B (en) * | 2014-07-07 | 2017-02-15 | 中国科学院西安光学精密机械研究所 | Device and method for testing sampling rate of large-diameter sampling chopping board |
| CN104655408A (en) * | 2015-01-29 | 2015-05-27 | 大族激光科技产业集团股份有限公司 | Laser power monitoring device |
| CN105352596A (en) * | 2015-12-09 | 2016-02-24 | 广州江元医疗科技有限公司 | Monochromatic light collection device |
| CN105675265A (en) * | 2016-01-25 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | Large-aperture light beam collimating and measuring device |
| CN105675265B (en) * | 2016-01-25 | 2018-03-20 | 中国科学院上海光学精密机械研究所 | Heavy caliber beam collimation measurement apparatus |
| CN105842832A (en) * | 2016-04-24 | 2016-08-10 | 湖南戴斯光电有限公司 | Attenuation device for measuring distribution of high-power laser focused light beam |
| CN108548660A (en) * | 2018-03-26 | 2018-09-18 | 中国科学院西安光学精密机械研究所 | Sampling splits the sampling rate of plate and samples uniformity interferometer measuration system and method |
| CN108548660B (en) * | 2018-03-26 | 2019-11-15 | 中国科学院西安光学精密机械研究所 | Sampling splits the sampling rate of plate and samples uniformity interferometer measuration system and method |
| CN113945276A (en) * | 2021-10-25 | 2022-01-18 | 中国科学院光电技术研究所 | Detector linearity calibration method |
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Legal Events
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Granted publication date: 20110126 |
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