CN110186653A - The light axis consistency of non-imaging system is calibrated and is split as fixed-focus debugging device and method - Google Patents
The light axis consistency of non-imaging system is calibrated and is split as fixed-focus debugging device and method Download PDFInfo
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- CN110186653A CN110186653A CN201910455989.8A CN201910455989A CN110186653A CN 110186653 A CN110186653 A CN 110186653A CN 201910455989 A CN201910455989 A CN 201910455989A CN 110186653 A CN110186653 A CN 110186653A
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract
The light axis consistency of non-imaging system is calibrated and is split as fixed-focus debugging device and method, in order to solve the light axis consistency calibration problem that the prior art can not be applied to high-precision non-imaging optical system, the device by attenuation factor, telescopic system, quarter-wave plate, polarization splitting prism, the polarizer, off-axis total-reflection type fiber optic collimator mirror, FC optical fiber interface, wide spectrum lighting source, all-dielectric interference filter, Polaroid object lens, split as pulling and pushing device, parallel flat, splitting as focusing screen, secondary imaging microscope group, near infrared detector and data processing system are constituted；Heavy caliber telescopic system ensure that the invention device and Devices to test posture are constant with optical path setting；Near infrared detector guarantees the consistency of measurement background；Wide spectrum lighting source set on basis can be emitted unified directional light via the invention device herein, and the light axis consistency measurement of the non-imaging optical system within the invention device bore is applicable in adjustment.
Description
Technical field
The invention belongs to field of optical detection, and in particular to the light axis consistency of non-imaging system is calibrated and split as fixed-focus fills
Adjust device and method.
Background technique
With the development of optical sensing technology, the optoelectronic device of current tip increasingly tends to complicate, general large size light
Electric equipment is often made of multiple optical subsystems.And equipment integrally substantially measures same target, therefore guarantees to set
It is the premise that optoelectronic device operates normally that the consistency and detector of standby each systematic optical axis, which are installed on optimal imaging face,.For
The non-imaging optical systems such as long distance laser range-measurement system, laser radar system and space optical communication system, receiving end utilize
Be all the non-imaged photodetector such as APD, no image-capable cannot achieve facula position and determine and alignment function, because
This is difficult to realize light axis consistency calibration.At present for the light axis consistency adjustment of such optical system, general detection method
It requires detection device and carries out multiple position adjusting with certain rule or step-length, pass through the energy response of detector, Lai Shixian
The determination of optical axis range, analysis multi-group data calculate the specific location of a certain imaging point, finally obtain receiving axis and guidance axis
Optical axis deviation.Therefore it is current urgent problem to be solved that error source, which increases the precision caused to reduce with detection process complexity,.
China Patent Publication No.: " CN108508432A ", patent name are " a kind of portable optical axis detector and method ",
The invention is as follows for the emission shaft of laser range finder, receiving axis, the detecting step of visible optical axis, one, visible optical axis and detection
Instrument alignment, two, emission shaft transmitting light be detected instrument ccd detector receive.Three, analog light source irradiates receiving end APD detector,
Its reflected light is detected instrument ccd detector and receives.Hot spot data are handled, obtain plain shaft parallelism deviation.The invention is to be measured
The step of being equipped with analog light source inside laser range finder, increasing repacking Devices to test, detection process is complicated.The mould of the device
The laser diode that quasi- light source is 1064nm, light source temporal coherence with higher and spatial coherence.And on APD detector
There is one layer of protection glass, protects the front and rear surfaces of glass that can generate interference fringe, influence interpretation of the CCD to the image position APD.The inspection
Survey device is short focus, in addition small-bore system uses rhombic prism, limited by machining accuracy, can further decrease survey
Accuracy of measurement.Therefore, which is not used to the light axis consistency detection of high-precision non-imaging optical system.
Defocusing amount is detected, it is currently used to have pin hole method, method of astigmatism, Foucault knife method and critical angle method etc..Its
The method of middle energy quantitative detection defocusing amount requires to build complicated optical system for testing, and adjustment is difficult, is not suitable for the online of product
Precise measurement.The method of the prior art can not also be merged with parallelism detection equipment, can not achieve parallel measurement and along axis amount
It detects simultaneously.
Summary of the invention
The light axis consistency that the present invention can not be applied to high-precision non-imaging optical system in order to solve the prior art is calibrated
Problem proposes that a kind of light axis consistency of non-imaging optical system is calibrated and split as fixed-focus debugging device and method.This hair simultaneously
The bright accurate on-line measurement that optical device defocusing amount may be implemented.
The technical scheme is that
The light axis consistency of non-imaging optical system is calibrated and is split as fixed-focus debugging device, characterized in that the device is by declining
Subtract system, telescopic system, quarter-wave plate, polarization splitting prism, the polarizer, off-axis total-reflection type fiber optic collimator mirror, FC light
Fine interface, all-dielectric interference filter, Polaroid object lens, is split as pulling and pushing device, parallel flat, splitting wide spectrum lighting source
As focusing screen, secondary imaging microscope group, near infrared detector and data processing system are constituted；The attenuation factor setting is set to be measured
Behind standby transmitting terminal, and in the front of telescopic system Receiver aperture；The telescopic system, quarter-wave plate, polarization spectro
Prism, Polaroid object lens, secondary imaging microscope group, near infrared detector are sequentially coaxially arranged；It parallel flat and splits as focusing screen
It is mounted on and splits as pulling and pushing on device；Described split is installed on Polaroid object lens image space position of focal plane as pulling and pushing device, is taking out, is being inserted through
Cheng Zhong, parallel flat and splits as focusing screen is located on above-mentioned coaxial optical axis；The polarizer, off-axis total-reflection type optical fiber
Collimating mirror is set in turn in the reflected light path of polarization splitting prism；The wide spectrum lighting source passes through multimode fibre and FC light
Fine interface is connected, and the all-dielectric interference filter is placed in lighting source front end, and FC optical fiber interface is set to off-axis total reflection
At the focal position of formula fiber optic collimator mirror；The data processing system is connected by data line near infrared detector；Near-infrared
Detector is located at the image space focal plane of secondary imaging microscope group；
When the transmitting terminal of Devices to test emits laser, light beam passes through attenuation factor, and the light beam after decaying enters telescopic system
Interior, by being emitted after its internal primary and secondary mirror reflection, emergent light passes through quarter-wave plate, becomes the linearly polarized light of P waveshape,
Then P light passes sequentially through polarization splitting prism, Polaroid object lens, splits as pulling and pushing device and secondary imaging microscope group, final to assemble
In near infrared detector；
When opening wide spectrum lighting source, light beam is emitted after all-dielectric interference filter from FC optical fiber interface, irradiation
Onto off-axis total-reflection type fiber optic collimator mirror, the directional light of reflection becomes S wave after the polarizer, and the S wave is in polarization spectro rib
It is reflected in mirror, circularly polarized light is then become by quarter-wave plate, be finally emitted from telescopic system, irradiate the mesh of Devices to test
APD detector depending on aiming at end and receiving end；
The irreflexive light of APD detector of the receiving end of Devices to test can again pass by telescopic system, the circularly polarized light again
It will become P light, P light-transmissive polarization splitting prism again after quarter-wave plate, then successively pass through Polaroid object lens, split
As pulling and pushing device, secondary imaging microscope group, finally received by near infrared detector.
The light axis consistency of non-imaging system is calibrated and is split as fixed-focus Method of Adjustment, comprising the following steps:
Step 1: first opening wide spectrum lighting source, all-dielectric interference filter is removed, it is preliminary to be directed at equipment under test and inspection
Device is surveyed, is observed at the visual sight end of equipment under test, the position of equipment under test is constantly regulate, until visual sight end can be seen
The light spot image that lighting source is launched is measured, and is adjusted to field of view center position, as the visual base in entire test process
Fiducial axis；
Step 2: closing wide spectrum lighting source, attenuation factor is placed after equipment under test transmitting terminal, opens equipment under test
Transmitting terminal, adjust attenuator group, guarantee that the hot spot that shows of data and image processing system is clear, light intensity is moderate；
Step 3: the laser of outgoing passes through attenuation factor, then is through looking in the distance after opening equipment under test transmitting end switch
Then system passes through quarter-wave plate, polarization splitting prism, Polaroid object lens, parallel flat, secondary imaging microscope group, light beam
Finally converge near infrared detector；Near infrared detector is connected by data line with computer, at the data image of computer
Reason program can show light spot image, and calculate transmitting terminal spot center position coordinates, the i.e. position coordinates of emission shaft, and
The deviation A of the facula position and visual benchmark；
Step 4: closing equipment under test emits end switch, wide spectrum lighting source switch is opened, is put in lighting source front end
Set all-dielectric interference filter；Light beam is emitted after all-dielectric interference filter filters from off-axis reflection optical fiber collimator, then
Become S light after the polarizer, after S light reflects in polarization splitting prism, circularly polarized light become by quarter-wave plate again,
It is finally emitted from telescopic system, illuminates the APD detector of system under test (SUT) receiving end, the light that diffusing reflection is returned enters to look in the distance again is
System, then by becoming P light after quarter-wave plate, P light enters subsequent optical system through PBS, and is ultimately imaged in near-infrared
Detector, data processing system handle the received light spot image of near infrared detector, and calculate image center location at this time and sit
Mark, i.e. the position coordinates of receiving axis, and the deviation B with visual benchmark, meanwhile, calculate receiving axis position coordinates and step 3
The deviation C of middle emission shaft position coordinates；To sum up, using transmitting terminal and the inconocenter position of receiving end deviation C and point
Not with deviation A, B of visual benchmark, in conjunction with system focal length, can calculate emission shaft, visual sight axis, receiving axis it
Between angular deviation, so far complete the detection process to each light axis consistency of equipment under test；
Step 5: the equipment under test transmitting terminal in step 4 is kept to close, wide spectrum lighting source is opened；It only adjusts and splits picture
Device is pulled and pushed, is made to split as focusing screen is in common optical axis state, when the APD detector diffusing reflection light echo of Devices to test receiving end,
As long as imaging has a defocusing amount, image can all be shown as being staggered round spot or the APD detector picture that is staggered in a computer, and calculate
Machine data processing system can be according to the deviation for the image center location that is staggered by splitting as defocus relational expression:
Δ1=0.02055D=0.000411S
Calculate the size delta of defocusing amount1；According to the size delta of defocusing amount1, it is moved forward and backward equipment under test receiving end APD and visits
Survey the position of device, it is ensured that Devices to test detector is installed on ideal image planes position, so far completes the mistake split as fixed-focus adjustment
Journey.
Beneficial effects of the present invention:
1, heavy caliber telescopic system of the invention and optical path setting ensure that is measuring Devices to test transmitting terminal and is connecing respectively
When the facula position of receiving end, the invention device and Devices to test posture are constant.Near infrared detector is equivalent to timesharing light spot received
Image guarantees the consistency of measurement background.Wide spectrum lighting source set on basis is via the invention device herein
It can be emitted unified directional light, realize and the near-infrared wavelength of non-imaging optical system is illuminated, just by near infrared detector reality
When light spot received image, and interference of the visible light to test result is avoided, therefore, within the invention device bore
Non-imaging optical system light axis consistency measurement with adjustment be applicable in.
The lighting source front end of wide spectrum of the present invention is provided with all-dielectric interference filter, penetrates band with certain
Width greatly reduces temporal coherence and spatial coherence, and light source can be made to become the quasi-monochromatic light of Devices to test applicable wavelengths, phase
The laser light source better than spatial coherence and temporal coherence can be eliminated in the protection glass front and rear surfaces formation of APD detector
Interference fringe improves the precision that computer judges image center.
The equipment uses heavy caliber, and long-focus telescopic system can be improved optical axis deviation sensitivity.
Furthermore all light beams of measurement process pass through same main channel, and data calculating also carries out under the same coordinate system,
The process for eliminating coordinate conversion, reduces error source.The accuracy test of single position measurement has finally been carried out to the device
Experiment, light axis consistency uncertainty of measurement are better than 1 ".Therefore, which realizes for non-imaging optical system light
The high-acruracy survey of axis consistency.
2, wide spectrum lighting source of the invention is mounted on inside detection device, is not needed device under test and is modified,
The equipment under test receiving end non-imaged detector of off working state can be illuminated and aim at end, the light beam of non-imaged detection reflection
Telescopic system can be passed through, receive and show non-imaged detector image by the device, therefore be suitable for non-imaging optical system
Light axis consistency detection.
After Devices to test aims at end completion alignment, light source switch only need to be controlled, can dynamically measure high precision apparatus
Light axis consistency, simple testing process.
The illumination path of the device and the same path of optical system for testing, have simplified the structure of device.
And the lighting source of device can not only illuminate reception end detector, be also used as light source target when test
To realize alignment function.
3, the device is mounted with to split as focusing screen at the focal plane of Polaroid object lens.
Using active light source illumination scheme, can also be detected in imaging or idle non-imaging optical system
The position from defocus of device.
Split as focusing screen alignment precision itself it is higher, in conjunction with the enlargement ratio relationship of system, it is known that, the device have compared with
High position from defocus precision.
It need to will only split on the basis of light axis consistency detects as focusing screen is adjusted to common optical axis state.It can show in real time
Show detector defocusing amount, to adjust and correct the axial position of reception end detector.Structural principle is simple, easy to operate.
Detailed description of the invention
Fig. 1 is that non-imaged multi-light axis consistency is calibrated and split as fixed-focus debugging device structural schematic diagram.
Wherein: 1, Devices to test, 1-1, transmitting terminal, 1-2, visual sight end, 1-3, receiving end, 2, attenuation factor, 3, prestige
Remote system, 4, quarter-wave plate, 5, polarization splitting prism (PBS), 6, the polarizer, 7, off-axis total-reflection type fiber optic collimator mirror,
8, FC optical fiber interface, 9, wide spectrum lighting source, 10, all-dielectric interference filter 11, Polaroid object lens, 12, split as pulling and pushing
Device, 13, parallel flat, 14, split as focusing screen, 15, secondary imaging microscope group, 16, near infrared detector, 17, data processing system
System.
Fig. 2 is the structural schematic diagram of the present invention split as focusing screen.
Fig. 3 is the hot spot display figure of the present invention split as focusing screen, in which: Fig. 3 a be not defocus when split as at focusing screen
Complete round spot, Fig. 3 b splits the round spot that is staggered at as focusing screen when being defocus.
Specific embodiment
Technical solution of the present invention is discussed in detail below in conjunction with attached drawing.
As shown in Figure 1, the light axis consistency of non-imaging optical system is calibrated and split as fixed-focus debugging device, the device is by declining
It is quasi- to subtract system 2, telescopic system 3, quarter-wave plate 4, polarization splitting prism (PBS) 5, the polarizer 6, off-axis total-reflection type optical fiber
Straight mirror 7, wide spectrum lighting source 9, all-dielectric interference filter 10, Polaroid object lens 11, is split as pulling and pushing FC optical fiber interface 8
Device 12, parallel flat 13 are split as focusing screen 14, secondary imaging microscope group 15, near infrared detector 16 and data processing system 17
It constitutes.Parallel flat 13 and splitting is split as focusing screen 14 is mounted on as pulling and pushing on device 12.
The attenuation factor 2 is arranged in behind the transmitting terminal of Devices to test 1, and in the front of 3 Receiver aperture of telescopic system.
It is the telescopic system 3, quarter-wave plate 4, polarization splitting prism 5, Polaroid object lens 11, secondary imaging microscope group 15, close red
External detector 16 is sequentially coaxially arranged.Described split is installed on Polaroid 11 image space position of focal plane of object lens as pulling and pushing device 12,
During taking out, inserting, parallel flat 13 and split as focusing screen 14 is located on above-mentioned optical axis.The polarizer 6, off-axis total reflection
Formula fiber optic collimator mirror 7 is all set in the reflected light path of polarization splitting prism 5.The wide spectrum lighting source 9 passes through multimode light
Fibre is connected with FC optical fiber interface 8, and the all-dielectric interference filter 10 is placed in 9 front end of lighting source, and FC optical fiber interface 8 is arranged
At the focal position of off-axis total-reflection type fiber optic collimator mirror 7.The data processing system 17 is visited by data line and near-infrared
Device 16 is surveyed to be connected.Near infrared detector 16 is located at the image space focal plane of secondary imaging microscope group 15.
When the transmitting terminal 1-1 of Devices to test 1 emits laser, light beam passes through attenuation factor 2, and the light beam after decaying, which enters, looks in the distance
In system 3, by being emitted after its internal primary and secondary mirror reflection, emergent light passes through quarter-wave plate 4, and the line for becoming P waveshape is inclined
Shake light, and then P light passes sequentially through polarization splitting prism 5, Polaroid object lens 11, splits as pulling and pushing device 12, secondary imaging microscope group
15, finally converge near infrared detector 16.
When opening wide spectrum lighting source 9, light beam is emitted after all-dielectric interference filter 10 from FC optical fiber interface 8,
It is irradiated in off-axis total-reflection type fiber optic collimator mirror 7, the directional light of reflection becomes S wave after the polarizer 6, which is polarizing
It is reflected in Amici prism 5, circularly polarized light is then become by quarter-wave plate 4, be finally emitted from telescopic system, irradiated to be measured
The APD detector of the visual sight end 1-2 and receiving end 1-3 of equipment 1.
And the irreflexive light of APD detector of the receiving end 1-3 of Devices to test 1 can again pass by telescopic system 3, the circle
Polarised light will become P light again after quarter-wave plate 4, P light-transmissive polarization splitting prism 5, then successively by once at
It as object lens 11, splits as pulling and pushing device 12, secondary imaging microscope group 15, is finally received by near infrared detector 16.
The attenuation factor 2 is adjustable attenuator group, and to be by decaying multiplying power be respectively, and three kinds of 10,100,1000 decline
Subtract piece composition.Their model is respectively OD1, OD2, OD3.To prevent, the laser intensity of 1 transmitting terminal of Devices to test is excessive and damages
Bad near infrared detector 16, first selection OD1, OD2, OD3 combination.If the received hot spot brightness of near infrared detector 16 is weaker,
It is appropriate to reduce attenuator, adjustment attenuator combination, until hot spot brightness is suitable.
The telescopic system 3 is the reflective telescopic system of Cassegrain, clear aperture 280mm, focal length 1500mm.
The transmitting terminal 1-1 for ensuring equipment under test 1, the optical axis for aiming at end 1-2 and receiving end 1-3 can be in same Receiver apertures, in this way
Three optical axises of equipment under test 1 are exactly to measure in the same context, convert bring error without data coordinates.Identical logical
Under optical port diameter, focal length is longer, and system coaxial detection accuracy is higher, and the optical system of focal length 1500mm belongs to focal length system.Cause
The light axis consistency that this device is suitable for high precision apparatus detects.
The all-dielectric interference filter 10 is ± 20nm through spectrum half-band width.Broad spectrum light source 9 can be issued
Light is filtered into quasi-monochromatic source, and light source coherence is low, has not only been able to satisfy the wavelength demands of Devices to test, but also can eliminate in non-imaged
The interference fringe that detector APD protects glass front and rear surfaces to generate.
It is described to split as pulling and pushing equipped with picture focusing screen 14 and parallel flat 13 is split on device 12, when parallel flat 13 is in common light
When on axis, without splitting as effect, near infrared detector 16 is received as keeping integrality, can measure the location information of picture at this time.It splits
Picture focusing screen 14 generates the picture of defocus and splits as effect, for measuring the defocusing amount information of picture in common optical axis.
As shown in Fig. 2, described split is formed as focusing screen 14 by the semi-circular plate wedge gluing of two panels same size, it is any
The inclined-plane inclination angle of plate is 12 °, diameter 20mm.
Two plate center point of intersection are with a thickness of 5mm.It splits as two plate center point of intersection of focusing screen 13 are optical system
Ideal focal position, when light beam convergent point is without defocus, the received hot spot of near infrared detector 16 is complete round spot, such as Fig. 3 a institute
Show.When light beam convergent point is there are when defocus, the received hot spot of near infrared detector 16 is two semicircle hot spots being staggered, that is, splits picture
Figure, as shown in Figure 3b.
The wave-length coverage of the near infrared detector 16 is 950~1700nm, and resolution ratio is 640 × 512 pixels.For connecing
Take in the laser image spot into reflective telescopic system 3.And data are transmitted to image processing system 17 by data line.
Described image processing system 17 is Computer Image Processing program.Handle the received image of near infrared detector 16.
Image processing system 17 can calculate the center deviation between the center position coordinates and different images of image, known
In the case where system focal length, to calculate the angular deviation of different optical axises.The processing system may recognize that when processing is split as figure
Splitting as deviation D between the center location and the two semicircular center of circle of independent semi-circular hot spot.From the APD detector of Devices to test to
It splits as screen focus, can be obtained according to along axis enlargement ratio formula:
Splitting the defocusing amount Δ at as focusing screen2And actually split the relationship as deviation y:
Y=2 Δ2(n-1)δ
From splitting as focusing screen focus near infrared detector, from the axis enlargement ratio formula that hangs down:
It is received near infrared detector to split the defocusing amount Δ as deviation D and Devices to test receiving end APD detector1's
Relationship are as follows:
Wherein, f1It is the focal length of system under test (SUT) receiving end 1-3, f2It is the focal length of telescopic system 3, n is to split as focusing screen 14
Refractive index, δ are the apex angle degree split as focusing screen inclined-plane, and β is the vertical axis enlargement ratio of secondary imaging microscope group 15, and D is near-infrared
The picture that detector 16 receives is split as deviation.
The grid deviation S that shows in conjunction with software and the actual parameter as the relationship of deviation D and the device is split, finally obtains S
With the receiving end the APD defocusing amount Δ of Devices to test receiving end 1-31Split as defocus relational expression, it is as follows:
Δ1=0.02055D=0.000411S
In practical calibration procedures, Devices to test APD defocusing amount can be calculated according to the grid deviation S that software is shown
Value, Δ1, with the axial position of the APD detector of this front and back fine tuning receiving end 1-3, until imaging point is located at ideal image planes
Place is, it can be achieved that assist the function of fixed-focus adjustment.
The light axis consistency of non-imaging system is calibrated and is split as fixed-focus Method of Adjustment, comprising the following steps:
Step 1: first opening wide spectrum lighting source 9, all-dielectric interference filter 10 is removed, it is preliminary to be directed at equipment under test 1
With detection device.It is observed in the visual sight end 1-2 of equipment under test, the position of equipment under test is constantly regulate, until visual sight
End 1-2 can observe the light spot image that lighting source is launched, and be adjusted to field of view center position, as entire test process
In visual reference axis.
Step 2: closing wide spectrum lighting source 9, places after equipment under test transmitting terminal 1-1 and combined by OD1, OD2, OD3
Attenuation factor 2, prevent transmitting light intensity it is excessive, damage near infrared detector 16.Open the transmitting terminal 1-1 of equipment under test 1.It adjusts
Whole attenuator group 2, the hot spot for guaranteeing that data and image processing system is shown is clear, and light intensity is moderate.
Step 3: the laser of outgoing passes through attenuation factor 2, then through looking in the distance after opening equipment under test transmitting terminal 1-1 switch
Then system 3 passes through quarter-wave plate 4, PBS5, Polaroid object lens 11, parallel flat 13, secondary imaging microscope group 15, note
Meaning at this time split as focusing screen 14 not in common optical axis.Light beam finally converges near infrared detector 16.Near infrared detector
16 are connected by data line with computer, and the data and image processing program 17 of computer can show light spot image.And it calculates
Transmitting terminal spot center position coordinates, the i.e. position coordinates of emission shaft, there are also the deviation A of the facula position and visual benchmark.
Step 4: closing equipment under test transmitting terminal 1-1 switch, opens wide spectrum lighting source 9 and switch, in lighting source 9
Place all-dielectric interference filter 10 in front end.Light beam is quasi- from off-axis reflection optical fiber after all-dielectric interference filter optical filtering 10
Straight device 7 is emitted, and passes through quarter-wave using S light is become after the polarizer 6 after S light reflects in polarization splitting prism PBS5
Piece 4 becomes circularly polarized light again, is finally emitted from telescopic system 3, illuminates the APD detector of system under test (SUT) receiving end 1-3.It is unrestrained anti-
It is emitted back towards the light come and enters telescopic system 3 again, then by becoming P light after quarter-wave plate 4, P light enters subsequent optical through PBS
System, and be ultimately imaged near infrared detector 16.Data processing system 17 handles the received light spot image of near infrared detector,
And image center location coordinate, the i.e. position coordinates of receiving axis, and the deviation B with visual benchmark at this time are calculated, meanwhile,
Calculate the deviation C of emission shaft position coordinates in receiving axis position coordinates and step 3；To sum up, transmitting terminal and receiving end are utilized
The deviation C of inconocenter position and respectively deviation A, B with visual benchmark can be calculated in conjunction with system focal length
Emission shaft, visual sight axis, the angular deviation between receiving axis so far complete the detection to each light axis consistency of equipment under test
Process.
Step 5: the equipment under test transmitting terminal 1-1 in step 4 is kept to close, wide spectrum lighting source 9 is opened.Only adjust
It splits as pulling and pushing device 12, makes to split as focusing screen 14 is in common optical axis state.The APD detector of Devices to test receiving end 1-3 is unrestrained
When reflected light, as long as imaging has defocusing amount, then image can all be shown as being staggered in a computer, round spot or the APD being staggered are visited
Device picture is surveyed, and computer data processing system 17 can be according to the deviation for the image center location that is staggered by splitting as defocus relational expression
Calculate the size of defocusing amount.According to the size of defocusing amount, it is moved forward and backward the position of the APD detector of equipment under test receiving end 1-3
It sets, it is ensured that Devices to test detector is installed on ideal image planes position.So far the process split as fixed-focus adjustment is completed.
Apparatus of the present invention accuracy test process:
Different facula position information is directly detected using the device, analysis is as a result, obtain its single facula position inspection
Survey precision.
The Image Acquisition of the device is high-frequency real-time acquisition, it can be deduced that the dynamic coordinate of picture position.Therefore straight
The multiple groups coordinate data for recording a certain position is connect, data analysis is carried out, can obtain the facula position detection accuracy of the device.
Single takes the facula position coordinate (x, y) in 1 second in experimentation, and the data value of each position measurement is about 100 to 300
Group, carries out 5 measurements altogether, and measurement result is shown in Table 1.
Table 1
In table 1, measurement point deviation is the square root of standard sum of square of deviations on the point x and the direction y.Position is characterized with this
Measurement accuracy.Maximum measurement point position deviation value is 0.1460, is calculated as follows；
I.e. single measurement maximum angle error be 0.0001115 degree, about 0.4014 ".Illustrate good in experimental situation
In the case of, the uncertainty of device single facula position measurement is better than 0.5 ", light axis consistency uncertainty of measurement is better than 1 ".
Claims (7)
1. the light axis consistency of non-imaging optical system is calibrated and is split as fixed-focus debugging device, characterized in that the device is by decaying
System (2), telescopic system (3), quarter-wave plate (4), polarization splitting prism (5), the polarizer (6), off-axis total-reflection type light
Fine collimating mirror (7), FC optical fiber interface (8), wide spectrum lighting source (9), all-dielectric interference filter (10), Polaroid object lens
(11), it splits as pulling and pushing device (12), parallel flat (13), splitting as focusing screen (14), secondary imaging microscope group (15), near infrared from detecting
Device (16) and data processing system (17) are constituted；
The attenuation factor (2) is arranged behind the transmitting terminal of Devices to test (1), and before telescopic system (3) Receiver aperture
Side；
The telescopic system (3), quarter-wave plate (4), polarization splitting prism (5), Polaroid object lens (11), secondary imaging
Microscope group (15), near infrared detector (16) are sequentially coaxially arranged；It parallel flat (13) and splits as focusing screen (14) are mounted on and split picture
It pulls and pushes on device (12)；Described split is installed on Polaroid object lens (11) image space position of focal plane as pulling and pushing device (12), is taking out, is inserting
In the process, parallel flat (13) and splitting is located on above-mentioned coaxial optical axis as focusing screen (14)；
The polarizer (6), off-axis total-reflection type fiber optic collimator mirror (7) are set in turn in the reflected light of polarization splitting prism (5)
Lu Zhong；The wide spectrum lighting source (9) is connected by multimode fibre with FC optical fiber interface (8), all dielectric interference filter
Piece (10) is placed in lighting source (9) front end, and FC optical fiber interface (8) is set to the coke of off-axis total-reflection type fiber optic collimator mirror (7)
At point position；The data processing system (17) is connected by data line near infrared detector (16)；Near infrared detector
(16) at the image space focal plane of secondary imaging microscope group (15)；
When the transmitting terminal (1-1) of Devices to test (1) emits laser, light beam passes through attenuation factor (2), and the light beam after decaying enters prestige
In remote system (3), by being emitted after its internal primary and secondary mirror reflection, emergent light passes through quarter-wave plate (4), becomes P waveshape
Linearly polarized light, then P light pass sequentially through polarization splitting prism (5), Polaroid object lens (11), split as pull and push device (12) and
Secondary imaging microscope group (15) finally converges near infrared detector (16)；
When opening wide spectrum lighting source (9), light beam goes out after all-dielectric interference filter (10) from FC optical fiber interface (8)
It penetrates, is irradiated on off-axis total-reflection type fiber optic collimator mirror (7), the directional light of reflection becomes S wave, the S after the polarizer (6)
Wave reflection in polarization splitting prism (5), then becomes circularly polarized light by quarter-wave plate (4), finally from telescopic system
The visual sight end (1-2) of Devices to test (1) and the APD detector of receiving end (1-3) are irradiated in outgoing；
The irreflexive light of APD detector of the receiving end (1-3) of Devices to test (1) can again pass by telescopic system (3), the circle again
Polarised light will become P light, P light-transmissive polarization splitting prism (5) again after quarter-wave plate (4), then successively pass through one
Secondary image-forming objective lens (11) are split as pulling and pushing device (12), secondary imaging microscope group (15), are finally received by near infrared detector (16).
2. the light axis consistency of non-imaging optical system according to claim 1 is calibrated and splits as fixed-focus debugging device,
Be characterized in that, the attenuation factor (2) is adjustable attenuator group, to be by decaying multiplying power be respectively 10,100,1000 three
Kind attenuator is constituted；Their model is respectively OD1, OD2, OD3.
3. the light axis consistency of non-imaging optical system according to claim 1 is calibrated and splits as fixed-focus debugging device,
It is characterized in that, the telescopic system (3) is the reflective telescopic system of Cassegrain, and clear aperture 280mm, focal length is
1500mm。
4. the light axis consistency of non-imaging optical system according to claim 1 is calibrated and splits as fixed-focus debugging device,
It is characterized in that, the all-dielectric interference filter (10) is ± 20nm through spectrum half-band width.
5. the light axis consistency of non-imaging optical system according to claim 1 is calibrated and splits as fixed-focus debugging device,
It is characterized in that, picture focusing screen (14) that splits is formed by the semi-circular plate wedge gluing of two panels same size, any plate
Inclined-plane inclination angle is 12 °, diameter 20mm.
6. the light axis consistency of non-imaging optical system according to claim 1 is calibrated and splits as fixed-focus debugging device,
It is characterized in that, the wave-length coverage of the near infrared detector (16) is 950~1700nm, and resolution ratio is 640 × 512 pixels.
7. the light axis consistency of non-imaging system is calibrated and is split as fixed-focus Method of Adjustment, comprising the following steps:
Step 1: first opening wide spectrum lighting source (9), all-dielectric interference filter (10) are removed, tentatively alignment equipment under test
(1) and detection device it, is observed at the visual sight end (1-2) of equipment under test, the position of equipment under test is constantly regulate, until visual
The light spot image that lighting source is launched can be observed by aiming at end (1-2), and be adjusted to field of view center position, be surveyed as entire
Visual reference axis during examination；
Step 2: closing wide spectrum lighting source (9), attenuation factor (2) is placed afterwards in equipment under test transmitting terminal (1-1), is opened
The transmitting terminal (1-1) of equipment under test (1) adjusts attenuator group (2), and the hot spot for guaranteeing that data and image processing system is shown is clear,
Light intensity is moderate；
Step 3: the laser of outgoing passes through attenuation factor (2), then through looking in the distance after opening equipment under test transmitting terminal (1-1) switch
System (3) then passes through quarter-wave plate (4), polarization splitting prism (5), Polaroid object lens (11), parallel flat
(13), secondary imaging microscope group (15), light beam finally converge near infrared detector (16)；Near infrared detector (16) passes through data
Line is connected with computer, and the data and image processing program (17) of computer can show light spot image, and calculate transmitting terminal (1-
1) the deviation A of spot center position coordinates one, the i.e. position coordinates of emission shaft and the facula position and visual benchmark；
Step 4: closing equipment under test transmitting terminal (1-1) switch, wide spectrum lighting source (9) switch is opened, before lighting source
Place all-dielectric interference filter (10) in end；Light beam is after all-dielectric interference filter (10) filter, from off-axis reflection optical fiber
Collimator (7) outgoing, using S light is become after the polarizer (6), S light after reflection, passes through four points in polarization splitting prism (5)
One of wave plate (4) become circularly polarized light again, finally from telescopic system (3) be emitted, illuminate the APD of system under test (SUT) receiving end (1-3)
Detector, the light that diffusing reflection is returned enter telescopic system (3) again, then by becoming P light after quarter-wave plate (4), P light is saturating
It crosses PBS and enters subsequent optical system, and be ultimately imaged near infrared detector (16), data processing system (17) handles near-infrared
The received light spot image of detector, and calculate image center location coordinate, the i.e. position coordinates of receiving axis, and and mesh at this time
Depending on the deviation B of benchmark, meanwhile, calculate the deviation C of emission shaft position coordinates in receiving axis position coordinates and step 3；It is comprehensive
On, utilize the deviation C and respectively and the deviation of visual benchmark of the inconocenter position of transmitting terminal (1-1) and receiving end (1-3)
Value A, B can calculate emission shaft, visual sight axis, the angular deviation between receiving axis, so far in conjunction with system focal length
Complete the detection process to each light axis consistency of equipment under test；
Step 5: the equipment under test transmitting terminal (1-1) in step 4 is kept to close, wide spectrum lighting source (9) is opened；Only adjust
It splits as pulling and pushing device (12), makes to split as focusing screen (14) are in common optical axis state, the APD spy of Devices to test receiving end (1-3)
When surveying device diffusing reflection light echo, as long as imaging has a defocusing amount, image can all be shown as being staggered round spot or the APD that is staggered in a computer
Detector picture, and computer data processing system (17) can be according to the deviation for the image center location that is staggered by splitting as defocus is closed
It is formula:
Δ1=0.02055D=0.000411S
Calculate the size delta of defocusing amount1, according to the size delta of defocusing amount1, it is moved forward and backward equipment under test receiving end (1-3) APD and visits
Survey the position of device, it is ensured that Devices to test detector is installed on ideal image planes position, so far completes the mistake split as fixed-focus adjustment
Journey.
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