CN110319939A - Polarize the short-coherence light source system and experimental method of phase shift combination PZT phase shift - Google Patents
Polarize the short-coherence light source system and experimental method of phase shift combination PZT phase shift Download PDFInfo
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- CN110319939A CN110319939A CN201910571455.1A CN201910571455A CN110319939A CN 110319939 A CN110319939 A CN 110319939A CN 201910571455 A CN201910571455 A CN 201910571455A CN 110319939 A CN110319939 A CN 110319939A
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- 230000010363 phase shift Effects 0.000 title claims abstract description 93
- 238000002474 experimental method Methods 0.000 title claims abstract description 29
- 230000010287 polarization Effects 0.000 claims abstract description 73
- 239000013307 optical fiber Substances 0.000 claims abstract description 70
- 230000003287 optical effect Effects 0.000 claims abstract description 18
- 239000000835 fiber Substances 0.000 claims abstract description 17
- 238000005259 measurement Methods 0.000 claims abstract description 16
- 230000001427 coherent effect Effects 0.000 claims abstract description 11
- 238000003384 imaging method Methods 0.000 claims description 7
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J2009/0261—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods polarised
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- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The invention discloses a kind of short-coherence light source systems and experimental method for polarizing phase shift combination PZT phase shift, short coherent light is p light and s light by PBS points, isolated p light and s light is turned back by specific optical path and is coupled in optical fiber into fiber coupler, and casing is matched by optical fiber and is connected with interference system, realize the polarization phase shift and PZT phase shift of light source.The present invention overcomes the modes of the light source of conventional dry interferometer and interference system one, light source module is connected with interference system by polarization maintaining optical fibre, the switching of light source is more convenient, utilize the characteristic of short-coherence light source, it eliminates optical element self-characteristic and forms influence of the miscellaneous line to result, it joined the phase shift system that PZT phase shift and polarization phase shift combine in light source module, measurement result can be mutually authenticated and carry out error analysis, can obtain high-precision measurement result.
Description
Technical field
The invention belongs to light sources to interfere phase shift field, and in particular to a kind of short coherent light for polarizing phase shift combination PZT phase shift
Source system and experimental method.
Background technique
Planar optical elements are most widely used basic optical elements in optical system, astronomy, military affairs, space flight,
Important function, including space telescope, controllable inertial confinement fusion device etc. have been played among the every field such as the energy.At this
In a little large size Optical devices, planar wave is mark with nearest decades new projects, these projects lead to the work to optical element
Skill requires to be continuously improved.Laser interferometer gravitational wave astronomy platform (LIGO) detector generates inertial confinement fusion, example with laser
Such as American National igniter (NIF).Its absolute measurement precision depends on the accuracy of manufacture of working surface in reference plate.If not yet
There are enough meterings to support, the accurate manufacture of optical element is impossible.Through Optical Interference Spectra used by interferometer, it is such as classical
Interference, holographic interference, speckle interference and moire interference etc., it has also become the physical quantitys such as measurement deformation, shape and variations in refractive index
Important and common means[29].Due to be usually noted be interference optical field intensity, and it is directly related with measurand past
Toward being to imply optics position therein phase, the method for needing to extract phase information from light distribution, this method is known as position phase
Measurement method.
When measuring element under test using four step phase-shifting methods, need to carry out phase shift, most common phase shift measurement method has
Heterodyne method, time domain phase shift method, airspace phase shift method etc., wherein heterodyne method precision highest, up to 1/1000 wavelength, but system is more multiple
Miscellaneous, application is relatively fewer；Time domain phase shift method includes the methods of PZT phase shift and wavelength phase shift, be widely used but to environmental requirement compared with
Height, when measurement, need to maintain the ambient stable in a period of time；It is more common that phase shift is polarized in the phase shift method of airspace, its advantage is that can
To acquire the interference pattern of four amplitude shift phases simultaneously, influence of the environmental factor to measurement can be effectively eliminated, but due to polarizing phase shift
In will appear quarter wave plate azimuth angle error and retardation error, need to carry out certain calibration.Therefore the present invention proposes a kind of inclined
The short-coherence light source system and experimental method of vibration phase shift combination PZT phase shift, reduce measurement error while realizing simultaneous phase-shifting.
Summary of the invention
The purpose of the present invention is to provide a kind of short-coherence light source system for polarizing phase shift combination PZT phase shift and experiment sides
Method can combine time phase shift and spatial Phase-shifting Method, environment can either be avoided to disturb in the way of the spatial Phase-shifting Method of polarization phase shift
The dynamic influence to measurement, and capable of being compared using the time phase shift system of PZT phase shift, improve measurement result accuracy and
Efficiency.
The technical solution for realizing the aim of the invention is as follows: a kind of short-coherence light source system polarizing phase shift combination PZT phase shift
System and experimental method, experimental provision include short-coherence light source, the first polarization maintaining optical fibre, the second polarization maintaining optical fibre, third polarization maintaining optical fibre, the
One optical fiber match casing, the second optical fiber matching casing, optical fiber collimator, the polarizer, half-wave plate, reflecting mirror, polarization splitting prism,
PZT phase shift block (including prism of corner cube and PZT positioning table), delay light path matching module, fiber coupler, negative lens, light splitting
Prism, imaging len, quarter wave plate, Polarization CCD Camera, collimation lens, reference mirror, mirror to be measured.
Laser goes out light and forms interference field on Polarization CCD Camera target surface via light path system, can in Polarization CCD Camera
With obtain four width polarization phase shift striped, then by adjust PZT positioning table realization four step phase shifts obtain the interference pattern of PZT phase shift.
A kind of experimental method for the short-coherence light source system polarizing phase shift combination PZT phase shift, steps are as follows:
Step 1: opening short coherent laser, the first polarization maintaining optical fibre is matched into casing and the second polarization maintaining optical fibre by the first optical fiber
Connection；
Step 2: successively adjusting the position of the polarizer, half-wave plate, Space Collimation is optically coupled by adjusting fiber coupler
Third polarization maintaining optical fibre；
Step 3: making the optical path difference and reference mirror of the first transmitted light and the first reflected light by adjusting delay light path matching module
Rear surface it is identical with mirror front surface spacing to be measured, obtain the interference pattern of four stable width different polarization modes, realize that polarization moves
Phase；
Step 4: moving λ/4 every time by the position for adjusting the prism of corner cube on PZT positioning table, PZT phase shift is realized, and take
Four width interference patterns；
Step 5: resolving phase using four step Phase-shifting algorithms, and mutually compared the result that phase shift is obtained with PZT phase shift is polarized,
Improve measurement accuracy.
Compared with prior art, the present invention its remarkable advantage is:
(1) short-coherence light source is used, influence of the miscellaneous line of optical element formation in system to measurement result is avoided, overcomes tradition
The problem of interferometer system noise；(2) situation combined using polarization phase shift and PZT phase shift is moved using polarization phase shift and PZT
Phase result is compared, and is reduced measurement error, is improved measurement accuracy；(3) led to by light source module phase shift compared to traditional
It is more convenient to cross promotion standard mirror phase shift, convenient for control and integrate: (4) light source module matches casing by polarization maintaining optical fibre and optical fiber
It is connected with interference system, easy-to-dismount usage mode keeps its scope of application more wide.
Detailed description of the invention
Fig. 1 is the short-coherence light source system of present invention polarization phase shift combination PZT phase shift and the index path of experimental method.
Fig. 2 is light source module schematic diagram.
Fig. 3 is the short-coherence light source system of present invention polarization phase shift combination PZT phase shift and the experimental method stream of experimental method
Cheng Tu.
Specific embodiment
Present invention is further described in detail with reference to the accompanying drawing
In conjunction with Fig. 1, it is a kind of polarize phase shift combination PZT phase shift short-coherence light source system and experimental method, including light source module with
Interference system, light source module include short coherent laser 1, the first polarization maintaining optical fibre 2-1, the second polarization maintaining optical fibre 2-2, third polarization-maintaining light
Fine 2-3, the 4th polarization maintaining optical fibre 2-4, the first optical fiber matching casing (3-1), the second optical fiber matching casing 3-2, optical fiber collimator 4,
The polarizer 5, half-wave plate 6, reflecting mirror 7, polarization splitting prism 8, PZT phase shift block 9, delay light path matching module 12, optical fiber coupling
Clutch 13；Interference system includes negative lens 14, Amici prism 15, imaging len 16, quarter wave plate 17, Polarization CCD Camera 18, standard
Straight lens 19, reference mirror 20 and mirror to be measured 21；
Short 1 emergent light of coherent laser matches casing 3-1 by the first optical fiber by the first polarization maintaining optical fibre 2-1 and accesses the second polarization-maintaining light
Fine 2-2 converts Space Collimation light for the emergent light of the second polarization maintaining optical fibre 2-2 by optical fiber collimator 4, and collimated light successively passes through
Inclined device 5 and half-wave plate 6 generate line polarisation, then are decomposed into the first transmitted light and the first reflected light, the first transmitted light, that is, p via PBS8
Light, the first reflected light, that is, s light, s light return to PBS8 by PZT phase shift block 9；P light is returned by delay light path matching module 12
PBS8, the s light and p light of return, which enter third after being turned back by reflecting mirror 7 after PBS8 convergence into the coupling of fiber coupler 13, to be protected
Polarisation fibre 2-3, third polarization maintaining optical fibre 2-3 match casing 3-2 by the second optical fiber and connect with the 4th polarization maintaining optical fibre 2-4, and the 4th protects
Polarisation fibre 2-4 emergent light is decomposed into the second transmitted light and the second reflected light through Amici prism 15 after negative lens 14 expands, and second
Transmitted light is collimated by collimation lens 19, and the light of the front surface reflection by the rear surface and mirror to be measured 21 of reference mirror 20 converges warp
Amici prism 15 is decomposed into third reflected light and third transmitted light, and third reflected light enters imaging len 16, by quarter wave plate 17
It is imaged in 18 target surface of Polarization CCD Camera.
The light source module includes the short-coherence light source laser 1 set gradually combined with Figure 1 and Figure 2, passes through the first polarization-maintaining
Optical fiber 2-1 accesses collimation lens 4, the polarizer 5, half-wave plate 6 is successively adjusted, by the first transmitted light p light and the second reflected light s optocoupler
It closes and enters the second polarization maintaining optical fibre 2-2, enter interferometer by matching the polarization maintaining optical fibre 2-3 that casing 3-2 is connected with the second optical fiber
In, by adjust light path matching module 12 match chamber it is long, find suitable interference fringe, obtain four width polarization phase shift interference
Figure, then by PZT phase shift block 9, move λ/4 every time and obtain the interference pattern of four width PZT phase shifts, resolved and analyzed.
In conjunction with Fig. 1 and Fig. 3, a kind of short-coherence light source system and experimental method polarizing phase shift combination PZT phase shift, step is such as
Under:
Step 1: opening short coherent laser 1, the first polarization maintaining optical fibre 2-1 is matched into casing 3-1 and second by the first optical fiber and is protected
The 2-2 connection of polarisation fibre；
Step 2: the position of the polarizer 5, half-wave plate 6 is successively adjusted, by adjusting fiber coupler 13 for Space Collimation optical coupling
Into third polarization maintaining optical fibre 2-3；
Step 3: making the optical path difference and reference of the first transmitted light and the first reflected light by adjusting delay light path matching module 12
The rear surface of mirror 20 is identical with 21 front surface spacing of mirror to be measured, obtains the interference pattern of four stable width different polarization modes, realizes
Polarize phase shift；
Step 4: moving λ/4 every time by the position for adjusting the prism of corner cube 10 on PZT positioning table 11, PZT phase shift is realized, and
Take four width interference patterns；
Step 5: resolving phase using four step Phase-shifting algorithms, and mutually compared the result that phase shift is obtained with PZT phase shift is polarized,
Improve measurement accuracy.
In conclusion the present invention is by realizing PZT phase shift using short-coherence light source system and polarizes phase shift, while will polarization
Phase shift and PZT phase shift combine, and the two result, which compares, processes reduction resultant error, do not need to push reference mirror or to be measured
Mirror, therefore the scope of application is wider, the short-coherence light source of use reduces influence of the miscellaneous line of system to measurement structure, improves system
Stability and accuracy.
Claims (7)
1. a kind of short-coherence light source system and experimental method for polarizing phase shift combination PZT phase shift, it is characterised in that: including light source die
Block and interference system, light source module include short coherent laser (1), the first polarization maintaining optical fibre (2-1), the second polarization maintaining optical fibre (2-2),
Third polarization maintaining optical fibre (2-3), the 4th polarization maintaining optical fibre (2-4), the first optical fiber matching casing (3-1), the second optical fiber match casing (3-
2), optical fiber collimator (4), the polarizer (5), half-wave plate (6), reflecting mirror (7), polarization splitting prism (8), PZT phase shift block
(9), postpone light path matching module (12), fiber coupler (13)；Interference system include negative lens (14), Amici prism (15),
Imaging len (16), quarter wave plate (17), Polarization CCD Camera (18), collimation lens (19), reference mirror (20) and mirror to be measured (21)；
Primary optic axis sets gradually optical fiber collimator (4), the polarizer (5), half-wave plate (6), polarization splitting prism (8) and delay altogether
The output end of light path matching module (12), short coherent laser (1) is connect with the one end the first polarization maintaining optical fibre (2-1), the first polarization-maintaining
The other end of optical fiber (2-1) is connect by the first optical fiber matching casing (3-1) with the second polarization maintaining optical fibre (2-2), the second polarization-maintaining light
The other end of fine (2-2) is connect with optical fiber collimator (4), and PZT phase shift block (9) is located at the first of polarization splitting prism (8) instead
It penetrates in optical path, reflecting mirror (7) is located on the second reflected light path of polarization splitting prism (8), the first reflected light path and the second reflection
Optical path is vertical, and fiber coupler (13) is located at the reflected light path of reflecting mirror (7), and the exit end of fiber coupler (13), third are protected
Polarisation fibre (2-3), the second optical fiber matching casing (3-2), the 4th polarization maintaining optical fibre (2-4) are sequentially connected, the 4th polarization maintaining optical fibre (2-4)
Output end be aligned negative lens (14), the totally second optical axis sets gradually negative lens (14), Amici prism (15), collimation lens
(19), reference mirror (20) and mirror to be measured (21), imaging len (16), quarter wave plate (17), Polarization CCD Camera (18) are set gradually
On the reflected light path of Amici prism (15)；
Short coherent laser (1) emergent light is by the first polarization maintaining optical fibre (2-1) by the first optical fiber matching casing (3-1) access second
Polarization maintaining optical fibre (2-2) converts Space Collimation light for the emergent light of the second polarization maintaining optical fibre (2-2) by optical fiber collimator (4), collimation
Light successively passes through the polarizer (5) and half-wave plate (6) generates line polarisation, then via PBS(8) it is decomposed into the first transmitted light and first instead
Light is penetrated, the first transmitted light, that is, p light, the first reflected light, that is, s light, s light is by PZT phase shift block (9) return PBS(8)；P light passes through
Postpone light path matching module (12) return PBS(8), the s light and p light of return are in PBS(8) convergence after by reflecting mirror (7) turn back into
Enter third polarization maintaining optical fibre (2-3) after entering fiber coupler (13) coupling, third polarization maintaining optical fibre (2-3) is matched by the second optical fiber
Casing (3-2) is connect with the 4th polarization maintaining optical fibre (2-4), and the 4th polarization maintaining optical fibre (2-4) emergent light passes through after negative lens (14) expands
Amici prism (15) is decomposed into the second transmitted light and the second reflected light, and the second transmitted light is collimated by collimation lens (19), passes through
The light of the front surface reflection of the rear surface and mirror to be measured (21) of reference mirror (20) converges that be decomposed into third through Amici prism (15) anti-
Light and third transmitted light are penetrated, third reflected light enters imaging len (16), by quarter wave plate (17) in Polarization CCD Camera (18)
Target surface imaging.
2. the short-coherence light source system and experimental method experiment dress of polarization phase shift combination PZT phase shift according to claim 1
It sets, it is characterised in that: wherein PZT phase shift block (9) includes prism of corner cube (10) and PZT positioning table (11), prism of corner cube (10)
It is fixed on PZT positioning table (11)；PBS(8 line polarisation) is decomposed into the first transmitted light and the first reflected light, wherein s light passes through
The prism of corner cube (10) being fixed on PZT positioning table (11) is reflected back PBS(8) four step phase shifts of middle realization, p light is via delay light path
Matching module (12) reflexes to PBS(8), and converged with the s light of return, fiber coupler (13) are reflected into through reflecting mirror (7),
It is coupled into third polarization maintaining optical fibre (2-3) by fiber coupler (13), and passes through the second optical fiber matching casing (3-2) and the 4th
Polarization maintaining optical fibre (2-4) connection enters negative lens (14).
3. the short-coherence light source system and experimental method experiment dress of polarization phase shift combination PZT phase shift according to claim 1
It sets, it is characterised in that: delay light path matching module (12) is total to the prism of corner cube structure that primary optic axis is set gradually by several groups
At.
4. a kind of based on the short-coherence light source for polarizing phase shift combination PZT phase shift described in any one of the claims 1-3
The experimental method of system and experimental method, which is characterized in that steps are as follows:
Step 1: open short coherent laser (1), by the first polarization maintaining optical fibre (2-1) by the first optical fiber matching casing (3-1) with
Second polarization maintaining optical fibre (2-2) connection；
Step 2: the position of the polarizer (5), half-wave plate (6) is successively adjusted, by adjusting fiber coupler (13) for Space Collimation
It is optically coupled into third polarization maintaining optical fibre (2-3)；
Step 3: making the optical path difference and ginseng of the first transmitted light and the first reflected light by adjusting delay light path matching module (12)
The rear surface for examining mirror (20) is identical with mirror to be measured (21) front surface spacing, obtains the interference of four stable width different polarization modes
Figure realizes polarization phase shift；
Step 4: moving λ/4 every time by the position for adjusting the prism of corner cube (10) on PZT positioning table (11), realize that PZT is moved
Phase, and take four width interference patterns；
Step 5: resolving phase using four step Phase-shifting algorithms, and mutually compared the result that phase shift is obtained with PZT phase shift is polarized,
Improve measurement accuracy.
5. the short-coherence light source system and experimental method experiment dress of polarization phase shift combination PZT phase shift according to claim 4
The experimental method set, feature in: in step 1, the coherence length of short coherent laser (1) is 0.5mm.
6. the short-coherence light source system and experimental method experiment dress of polarization phase shift combination PZT phase shift according to claim 4
The experimental method set, it is characterised in that: in step 2, it is inclined that Space Collimation light by the polarizer (5) and half-wave plate (6) is converted into line
Light, by PBS(8) the identical s light of light intensity and p light are generated later and enter third polarization maintaining optical fibre (2- by fiber coupler (13)
3).
7. polarizing the short-coherence light source system and experimental method experimental provision of phase shift combination PZT phase shift according to claim 4
Experimental method, it is characterised in that: the experimental result for polarizing phase shift and PZT phase shift is contrasted into reduction experiment in step 5 and is missed
Difference.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111562215A (en) * | 2020-04-30 | 2020-08-21 | 南京理工大学 | Composite control light source system in polarization-based dynamic interferometer and experimental method |
| CN111578832A (en) * | 2020-04-30 | 2020-08-25 | 南京理工大学 | Short coherent light source interferometer-based long-stroke optical path matching device and experimental method |
| CN112033279A (en) * | 2020-07-24 | 2020-12-04 | 长沙麓邦光电科技有限公司 | White light interference system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4872755A (en) * | 1987-03-07 | 1989-10-10 | Carl-Zeiss-Stiftung | Interferometer for measuring optical phase differences |
| US20170016711A1 (en) * | 2015-07-14 | 2017-01-19 | Mitutoyo Corporation | Instantaneous phase-shift interferometer |
| US20180128593A1 (en) * | 2016-11-09 | 2018-05-10 | Mitutoyo Corporation | Phase shift interferometer |
| CN108195849A (en) * | 2018-01-23 | 2018-06-22 | 南京理工大学 | Position phase defect detecting system and method based on the safe graceful interferometer of short relevant dynamic |
| CN109211934A (en) * | 2018-08-29 | 2019-01-15 | 南京理工大学 | Based on interference micro- microballoon planar defect detection device and its detection method |
-
2019
- 2019-06-28 CN CN201910571455.1A patent/CN110319939A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4872755A (en) * | 1987-03-07 | 1989-10-10 | Carl-Zeiss-Stiftung | Interferometer for measuring optical phase differences |
| US20170016711A1 (en) * | 2015-07-14 | 2017-01-19 | Mitutoyo Corporation | Instantaneous phase-shift interferometer |
| US20180128593A1 (en) * | 2016-11-09 | 2018-05-10 | Mitutoyo Corporation | Phase shift interferometer |
| CN108195849A (en) * | 2018-01-23 | 2018-06-22 | 南京理工大学 | Position phase defect detecting system and method based on the safe graceful interferometer of short relevant dynamic |
| CN109211934A (en) * | 2018-08-29 | 2019-01-15 | 南京理工大学 | Based on interference micro- microballoon planar defect detection device and its detection method |
Non-Patent Citations (1)
| Title |
|---|
| CHRIS L. KOLIOPOULOS: "Simultaneous phase-shift interferometer", 《SPIE》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111562215A (en) * | 2020-04-30 | 2020-08-21 | 南京理工大学 | Composite control light source system in polarization-based dynamic interferometer and experimental method |
| CN111578832A (en) * | 2020-04-30 | 2020-08-25 | 南京理工大学 | Short coherent light source interferometer-based long-stroke optical path matching device and experimental method |
| CN112033279A (en) * | 2020-07-24 | 2020-12-04 | 长沙麓邦光电科技有限公司 | White light interference system |
| CN112033279B (en) * | 2020-07-24 | 2021-12-10 | 长沙麓邦光电科技有限公司 | White light interference system |
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