ZA883485B - Distributor beam for chemical vapor deposition on glass - Google Patents

Distributor beam for chemical vapor deposition on glass

Info

Publication number
ZA883485B
ZA883485B ZA883485A ZA883485A ZA883485B ZA 883485 B ZA883485 B ZA 883485B ZA 883485 A ZA883485 A ZA 883485A ZA 883485 A ZA883485 A ZA 883485A ZA 883485 B ZA883485 B ZA 883485B
Authority
ZA
South Africa
Prior art keywords
glass
vapor deposition
chemical vapor
distributor beam
distributor
Prior art date
Application number
ZA883485A
Other languages
English (en)
Inventor
William M Greenberg
M Greenberg William
Dennis G Maas
G Maas Dennis
Randall L Bauman
L Bauman Randall
Original Assignee
Libbey Owens Ford Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Libbey Owens Ford Co filed Critical Libbey Owens Ford Co
Publication of ZA883485B publication Critical patent/ZA883485B/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemical Vapour Deposition (AREA)
ZA883485A 1987-05-18 1988-05-17 Distributor beam for chemical vapor deposition on glass ZA883485B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/050,466 US4793282A (en) 1987-05-18 1987-05-18 Distributor beam for chemical vapor deposition on glass

Publications (1)

Publication Number Publication Date
ZA883485B true ZA883485B (en) 1989-02-22

Family

ID=21965405

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA883485A ZA883485B (en) 1987-05-18 1988-05-17 Distributor beam for chemical vapor deposition on glass

Country Status (12)

Country Link
US (1) US4793282A (fi)
EP (1) EP0316409A4 (fi)
JP (1) JPH01503295A (fi)
KR (1) KR890701794A (fi)
AU (1) AU601594B2 (fi)
BR (1) BR8807160A (fi)
CA (1) CA1293119C (fi)
ES (1) ES2008499A6 (fi)
FI (1) FI890226A (fi)
TR (1) TR23471A (fi)
WO (1) WO1988009394A1 (fi)
ZA (1) ZA883485B (fi)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5065696A (en) * 1987-05-18 1991-11-19 Libbey-Owens-Ford Co. Temperature controlled distributor beam for chemical vapor deposition
CA1332281C (en) * 1988-09-16 1994-10-11 Randall L. Bauman Temperature controlled distributor beam for chemical vapor deposition
GB8824102D0 (en) * 1988-10-14 1988-11-23 Pilkington Plc Apparatus for coating glass
US5186120A (en) * 1989-03-22 1993-02-16 Mitsubishi Denki Kabushiki Kaisha Mixture thin film forming apparatus
US4922853A (en) * 1989-05-16 1990-05-08 Libbey-Owens-Ford Co. Stripe coating on glass by chemical vapor deposition
US5658387A (en) * 1991-03-06 1997-08-19 Semitool, Inc. Semiconductor processing spray coating apparatus
FR2672518B1 (fr) * 1991-02-13 1995-05-05 Saint Gobain Vitrage Int Buse a alimentation dissymetrique pour la formation d'une couche de revetement sur un ruban de verre, par pyrolyse d'un melange gazeux.
US5298073A (en) * 1992-02-28 1994-03-29 Libbey-Owens-Ford Co. Two sensor for determining spacing between surfaces
GB9300400D0 (en) * 1993-01-11 1993-03-03 Glaverbel A device and method for forming a coating by pyrolysis
FR2724923B1 (fr) * 1994-09-27 1996-12-20 Saint Gobain Vitrage Technique de depot de revetements par pyrolyse de composition de gaz precurseur(s)
FR2736632B1 (fr) * 1995-07-12 1997-10-24 Saint Gobain Vitrage Vitrage muni d'une couche conductrice et/ou bas-emissive
US7972467B2 (en) * 2003-04-17 2011-07-05 Applied Materials Inc. Apparatus and method to confine plasma and reduce flow resistance in a plasma reactor
JP2010508716A (ja) * 2006-10-25 2010-03-18 コンティネンタル オートモーティブ システムズ ユーエス， インコーポレイティッド 構築可能なプロトコル識別装置
CN112777943B (zh) * 2021-03-02 2021-11-19 浙江大学 一种用于化学气相沉积法镀膜玻璃的反应器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3850679A (en) * 1972-12-15 1974-11-26 Ppg Industries Inc Chemical vapor deposition of coatings
GB1507996A (en) * 1975-06-11 1978-04-19 Pilkington Brothers Ltd Coating glass
IT1134153B (it) * 1979-11-21 1986-07-31 Siv Soc Italiana Vetro Ugello per depositare in continuo su un substrato uno strato di una materia solida
CH643469A5 (fr) * 1981-12-22 1984-06-15 Siv Soc Italiana Vetro Installation pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide.
US4504526A (en) * 1983-09-26 1985-03-12 Libbey-Owens-Ford Company Apparatus and method for producing a laminar flow of constant velocity fluid along a substrate
US4761171A (en) * 1987-02-09 1988-08-02 Libbey-Owens-Ford Co. Apparatus for coating glass

Also Published As

Publication number Publication date
AU1788788A (en) 1988-12-21
EP0316409A1 (en) 1989-05-24
KR890701794A (ko) 1989-12-21
TR23471A (tr) 1990-01-22
EP0316409A4 (en) 1989-08-22
JPH01503295A (ja) 1989-11-09
ES2008499A6 (es) 1989-07-16
WO1988009394A1 (en) 1988-12-01
FI890226A0 (fi) 1989-01-17
BR8807160A (pt) 1989-10-17
US4793282A (en) 1988-12-27
AU601594B2 (en) 1990-09-13
CA1293119C (en) 1991-12-17
FI890226A (fi) 1989-01-17

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