ES2008499A6 - Viga distribuidora para deposicion de vapor quimico sobre vidrio. - Google Patents
Viga distribuidora para deposicion de vapor quimico sobre vidrio.Info
- Publication number
- ES2008499A6 ES2008499A6 ES8801533A ES8801533A ES2008499A6 ES 2008499 A6 ES2008499 A6 ES 2008499A6 ES 8801533 A ES8801533 A ES 8801533A ES 8801533 A ES8801533 A ES 8801533A ES 2008499 A6 ES2008499 A6 ES 2008499A6
- Authority
- ES
- Spain
- Prior art keywords
- gases
- plenum
- mixing chamber
- glass
- finger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011521 glass Substances 0.000 title abstract 3
- 238000005229 chemical vapour deposition Methods 0.000 title 1
- 239000007789 gas Substances 0.000 abstract 4
- 239000011248 coating agent Substances 0.000 abstract 3
- 238000000576 coating method Methods 0.000 abstract 3
- 239000000463 material Substances 0.000 abstract 2
- 239000012809 cooling fluid Substances 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Surface Treatment Of Glass (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
UNA VIGA DISTRIBUIDORA PARA DEPOSITAR MATERIAL DE REVESTIMIENTO SOBRE LA SUPERFICIE DE UNA LAMINA DE VIDRIO INCLUYE UNA CAMARA IMPELENTE DIVIDIDA POR UN TABIQUE PARA SEPARAR DIFERENTES GASES DE REVESTIMIENTO. SALIDAS PARA LOS GASES ESTAN CONECTADAS A UNA ENTRADA A UNA CAMARA DE MEZCLADO PARA SEPARAR Y DIRIGIR DE NUEVO EL FLUJO DE LOS GASES A FIN DE MEZCLARLO A FONDO EN FORMA DE UN MATERIAL DE REVESTIMIENTO. UN DEFLECTOR DE DEDO QUE TIENE DOS GRUPOS DE ELEMENTOS DE DEDO EXTERNOS SE EXTIENDE A TRAVES DE LA ANCHURA DE LA CAMARA DE MEZCLADO. CADA ELEMENTO DE DEDO TIENE UN EXTREMO MAS PROXIMO DE LA SALIDA DE LA CAMARA IMPELENTE QUE DE UN EXTREMO OPUESTO. LA CAMARA IMPELENTE ESTA RODEADA POR UN CONDUCTO DE FLUIDO DE ENFRIAMIENTO, Y ESTAN PREVISTOS ELEMENTOS DE CALENTAMIENTO PARA CONTROL DE LA TEMPERATURA.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/050,466 US4793282A (en) | 1987-05-18 | 1987-05-18 | Distributor beam for chemical vapor deposition on glass |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2008499A6 true ES2008499A6 (es) | 1989-07-16 |
Family
ID=21965405
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES8801533A Expired ES2008499A6 (es) | 1987-05-18 | 1988-05-17 | Viga distribuidora para deposicion de vapor quimico sobre vidrio. |
Country Status (12)
Country | Link |
---|---|
US (1) | US4793282A (es) |
EP (1) | EP0316409A4 (es) |
JP (1) | JPH01503295A (es) |
KR (1) | KR890701794A (es) |
AU (1) | AU601594B2 (es) |
BR (1) | BR8807160A (es) |
CA (1) | CA1293119C (es) |
ES (1) | ES2008499A6 (es) |
FI (1) | FI890226A0 (es) |
TR (1) | TR23471A (es) |
WO (1) | WO1988009394A1 (es) |
ZA (1) | ZA883485B (es) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5065696A (en) * | 1987-05-18 | 1991-11-19 | Libbey-Owens-Ford Co. | Temperature controlled distributor beam for chemical vapor deposition |
CA1332281C (en) * | 1988-09-16 | 1994-10-11 | Randall L. Bauman | Temperature controlled distributor beam for chemical vapor deposition |
GB8824102D0 (en) * | 1988-10-14 | 1988-11-23 | Pilkington Plc | Apparatus for coating glass |
US5186120A (en) * | 1989-03-22 | 1993-02-16 | Mitsubishi Denki Kabushiki Kaisha | Mixture thin film forming apparatus |
US4922853A (en) * | 1989-05-16 | 1990-05-08 | Libbey-Owens-Ford Co. | Stripe coating on glass by chemical vapor deposition |
US5658387A (en) * | 1991-03-06 | 1997-08-19 | Semitool, Inc. | Semiconductor processing spray coating apparatus |
FR2672518B1 (fr) * | 1991-02-13 | 1995-05-05 | Saint Gobain Vitrage Int | Buse a alimentation dissymetrique pour la formation d'une couche de revetement sur un ruban de verre, par pyrolyse d'un melange gazeux. |
US5298073A (en) * | 1992-02-28 | 1994-03-29 | Libbey-Owens-Ford Co. | Two sensor for determining spacing between surfaces |
GB9300400D0 (en) * | 1993-01-11 | 1993-03-03 | Glaverbel | A device and method for forming a coating by pyrolysis |
FR2724923B1 (fr) * | 1994-09-27 | 1996-12-20 | Saint Gobain Vitrage | Technique de depot de revetements par pyrolyse de composition de gaz precurseur(s) |
FR2736632B1 (fr) * | 1995-07-12 | 1997-10-24 | Saint Gobain Vitrage | Vitrage muni d'une couche conductrice et/ou bas-emissive |
US7972467B2 (en) * | 2003-04-17 | 2011-07-05 | Applied Materials Inc. | Apparatus and method to confine plasma and reduce flow resistance in a plasma reactor |
JP2010508716A (ja) * | 2006-10-25 | 2010-03-18 | コンティネンタル オートモーティブ システムズ ユーエス, インコーポレイティッド | 構築可能なプロトコル識別装置 |
CN112777943B (zh) * | 2021-03-02 | 2021-11-19 | 浙江大学 | 一种用于化学气相沉积法镀膜玻璃的反应器 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3850679A (en) * | 1972-12-15 | 1974-11-26 | Ppg Industries Inc | Chemical vapor deposition of coatings |
GB1507996A (en) * | 1975-06-11 | 1978-04-19 | Pilkington Brothers Ltd | Coating glass |
IT1134153B (it) * | 1979-11-21 | 1986-07-31 | Siv Soc Italiana Vetro | Ugello per depositare in continuo su un substrato uno strato di una materia solida |
CH643469A5 (fr) * | 1981-12-22 | 1984-06-15 | Siv Soc Italiana Vetro | Installation pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide. |
US4504526A (en) * | 1983-09-26 | 1985-03-12 | Libbey-Owens-Ford Company | Apparatus and method for producing a laminar flow of constant velocity fluid along a substrate |
US4761171A (en) * | 1987-02-09 | 1988-08-02 | Libbey-Owens-Ford Co. | Apparatus for coating glass |
-
1987
- 1987-05-18 US US07/050,466 patent/US4793282A/en not_active Expired - Fee Related
-
1988
- 1988-05-10 CA CA000566408A patent/CA1293119C/en not_active Expired - Lifetime
- 1988-05-12 JP JP63504596A patent/JPH01503295A/ja active Pending
- 1988-05-12 BR BR888807160A patent/BR8807160A/pt unknown
- 1988-05-12 KR KR1019890700103A patent/KR890701794A/ko not_active Application Discontinuation
- 1988-05-12 EP EP19880904883 patent/EP0316409A4/en not_active Withdrawn
- 1988-05-12 WO PCT/US1988/001578 patent/WO1988009394A1/en not_active Application Discontinuation
- 1988-05-12 AU AU17887/88A patent/AU601594B2/en not_active Ceased
- 1988-05-13 TR TR366/88A patent/TR23471A/xx unknown
- 1988-05-17 ES ES8801533A patent/ES2008499A6/es not_active Expired
- 1988-05-17 ZA ZA883485A patent/ZA883485B/xx unknown
-
1989
- 1989-01-17 FI FI890226A patent/FI890226A0/fi not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
WO1988009394A1 (en) | 1988-12-01 |
EP0316409A1 (en) | 1989-05-24 |
TR23471A (tr) | 1990-01-22 |
EP0316409A4 (en) | 1989-08-22 |
US4793282A (en) | 1988-12-27 |
ZA883485B (en) | 1989-02-22 |
JPH01503295A (ja) | 1989-11-09 |
FI890226A (fi) | 1989-01-17 |
CA1293119C (en) | 1991-12-17 |
FI890226A0 (fi) | 1989-01-17 |
KR890701794A (ko) | 1989-12-21 |
AU601594B2 (en) | 1990-09-13 |
AU1788788A (en) | 1988-12-21 |
BR8807160A (pt) | 1989-10-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
SA6 | Expiration date (snapshot 920101) |
Free format text: 2008-05-17 |
|
FD1A | Patent lapsed |
Effective date: 19980504 |