ZA772644B - Process and apparatus for monitoring high current glow discharges - Google Patents

Process and apparatus for monitoring high current glow discharges

Info

Publication number
ZA772644B
ZA772644B ZA00772644A ZA772644A ZA772644B ZA 772644 B ZA772644 B ZA 772644B ZA 00772644 A ZA00772644 A ZA 00772644A ZA 772644 A ZA772644 A ZA 772644A ZA 772644 B ZA772644 B ZA 772644B
Authority
ZA
South Africa
Prior art keywords
high current
monitoring high
glow discharges
current glow
discharges
Prior art date
Application number
ZA00772644A
Other languages
English (en)
Inventor
W Oppel
Original Assignee
Berghaus Ionit Anstalt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berghaus Ionit Anstalt filed Critical Berghaus Ionit Anstalt
Publication of ZA772644B publication Critical patent/ZA772644B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/16—Heating by glow discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Discharge Heating (AREA)
ZA00772644A 1976-05-07 1977-05-03 Process and apparatus for monitoring high current glow discharges ZA772644B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2620164A DE2620164C2 (de) 1976-05-07 1976-05-07 Verfahren und Vorrichtung zur Überwachung von stromstarken Glimmentladungen

Publications (1)

Publication Number Publication Date
ZA772644B true ZA772644B (en) 1978-04-26

Family

ID=5977282

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA00772644A ZA772644B (en) 1976-05-07 1977-05-03 Process and apparatus for monitoring high current glow discharges

Country Status (9)

Country Link
JP (1) JPS5340644A (de)
BR (1) BR7702855A (de)
DD (1) DD129846A5 (de)
DE (1) DE2620164C2 (de)
FR (1) FR2350761A1 (de)
GB (1) GB1522925A (de)
IT (1) IT1084635B (de)
PL (1) PL197863A1 (de)
ZA (1) ZA772644B (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521918U (de) * 1978-07-26 1980-02-13
DE10004556C2 (de) * 2000-02-02 2003-11-27 Ald Vacuum Techn Ag Anordnung zum Erkennen von Störungen in einer elektrischen Heizung

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB756760A (en) * 1953-05-04 1956-09-12 Air Preheater Precipitator flashover control through current and voltage response
BE569243A (de) * 1953-12-09
FR1127831A (fr) * 1954-07-22 1956-12-26 Apra Precipitator Corp Circuit avec relais de protection
US2911571A (en) * 1956-04-10 1959-11-03 Hoerder Huettenunion Ag Operation of glow discharges
CH389797A (de) * 1959-08-17 1965-03-31 Berghaus Elektrophysik Anst Vorrichtung zur Vermeidung von plötzlichen Änderungen des Entladungszustandes für mit stromstarken Glimmentladungen betriebene Entladungsgefässe
DE1565364B2 (de) * 1966-04-02 1971-09-02 AEG Elotherm GmbH, 5630 Remscheid Hasten Schaltung zum schutz fuer die heizleiter von induktoren
US3740579A (en) * 1966-10-03 1973-06-19 Ex Cell O Corp Zener coupled amplifier circuit with feedback
FR1541370A (fr) * 1966-11-08 1968-10-04 Berghaus Elektrophysik Anst Procédé et dispositif de contrôle du comportement électrique d'une décharge luminescente à forte intensité, pour des opérations métallurgiques
US3809955A (en) * 1973-03-26 1974-05-07 Graco Inc Safety circuit for electrostatic spray gun
US3801899A (en) * 1973-03-26 1974-04-02 Gen Electric Means for detecting the inception of corona discharges within induction apparatus
DE2606395C3 (de) * 1976-02-18 1979-01-18 Ionit Anstalt Bernhard Berghaus, Vaduz Verfahren und Vorrichtung zur Überwachung des elektrischen Verhaltens einer stromstarken Glimmentladung

Also Published As

Publication number Publication date
DE2620164B1 (de) 1977-11-10
JPS5340644A (en) 1978-04-13
GB1522925A (en) 1978-08-31
DD129846A5 (de) 1978-02-08
FR2350761A1 (fr) 1977-12-02
IT1084635B (it) 1985-05-25
JPS5526181B2 (de) 1980-07-11
DE2620164C2 (de) 1978-07-06
BR7702855A (pt) 1978-04-04
PL197863A1 (pl) 1978-01-02

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