ZA200907951B - Operation method and switch arrangement for a capacitive micromechanical sensor with analog reset - Google Patents

Operation method and switch arrangement for a capacitive micromechanical sensor with analog reset

Info

Publication number
ZA200907951B
ZA200907951B ZA200907951A ZA200907951A ZA200907951B ZA 200907951 B ZA200907951 B ZA 200907951B ZA 200907951 A ZA200907951 A ZA 200907951A ZA 200907951 A ZA200907951 A ZA 200907951A ZA 200907951 B ZA200907951 B ZA 200907951B
Authority
ZA
South Africa
Prior art keywords
switch arrangement
central electrode
operation method
micromechanical sensor
capacitive micromechanical
Prior art date
Application number
ZA200907951A
Other languages
English (en)
Inventor
Guenter Spahlinger
Original Assignee
Northrop Grumman Litef Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northrop Grumman Litef Gmbh filed Critical Northrop Grumman Litef Gmbh
Publication of ZA200907951B publication Critical patent/ZA200907951B/xx

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
    • H03K17/965—Switches controlled by moving an element forming part of the switch
    • H03K17/975—Switches controlled by moving an element forming part of the switch using a capacitive movable element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Micromachines (AREA)
  • Gyroscopes (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Drying Of Semiconductors (AREA)
  • Measuring Fluid Pressure (AREA)
ZA200907951A 2007-06-15 2008-03-14 Operation method and switch arrangement for a capacitive micromechanical sensor with analog reset ZA200907951B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102007027652A DE102007027652B4 (de) 2007-06-15 2007-06-15 Betriebsverfahren und Schaltungsanordnung für einen kapazitiven mikromechanischen Sensor mit analoger Rückstellung

Publications (1)

Publication Number Publication Date
ZA200907951B true ZA200907951B (en) 2010-08-25

Family

ID=39591527

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA200907951A ZA200907951B (en) 2007-06-15 2008-03-14 Operation method and switch arrangement for a capacitive micromechanical sensor with analog reset

Country Status (12)

Country Link
US (1) US8171794B2 (fr)
EP (1) EP2156198B1 (fr)
JP (2) JP5237363B2 (fr)
KR (1) KR101094971B1 (fr)
CN (1) CN101680910B (fr)
AT (1) ATE519118T1 (fr)
AU (1) AU2008261367B2 (fr)
CA (1) CA2687127C (fr)
DE (1) DE102007027652B4 (fr)
RU (1) RU2431150C2 (fr)
WO (1) WO2008151683A1 (fr)
ZA (1) ZA200907951B (fr)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007027652B4 (de) * 2007-06-15 2013-06-20 Litef Gmbh Betriebsverfahren und Schaltungsanordnung für einen kapazitiven mikromechanischen Sensor mit analoger Rückstellung
US8104346B2 (en) * 2008-11-10 2012-01-31 Westerngeco L.L.C. MEMS-based capacitive sensor
TWI410849B (zh) * 2009-10-19 2013-10-01 Orise Technology Co Ltd 電容式觸控面板的感測電路
US8476970B2 (en) * 2010-09-14 2013-07-02 Ahmed Mokhtar Interface for MEMS inertial sensors
US9217805B2 (en) 2010-10-01 2015-12-22 Westerngeco L.L.C. Monitoring the quality of particle motion data during a seismic acquisition
US9341646B2 (en) * 2012-12-19 2016-05-17 Northrop Grumman Guidance And Electronics Company, Inc. Bias reduction in force rebalanced accelerometers
US10309997B2 (en) * 2013-03-15 2019-06-04 Infineon Technologies Ag Apparatus and a method for generating a sensor signal indicating information on a capacitance of a variable capacitor comprising a variable capacitance
CN108613715B (zh) * 2016-12-12 2020-04-07 中国航空工业集团公司西安航空计算技术研究所 基于交流比例法的航空油量传感器采集系统
JP6998741B2 (ja) * 2017-11-20 2022-01-18 エイブリック株式会社 センサ装置
US10816568B2 (en) 2017-12-26 2020-10-27 Physical Logic Ltd. Closed loop accelerometer
IT201900017546A1 (it) 2019-09-30 2021-03-30 St Microelectronics Srl Dispositivo a pulsante mems resistente all'acqua, dispositivo di ingresso comprendente il dispositivo a pulsante mems e apparecchio elettronico
CN117957658A (zh) 2021-01-11 2024-04-30 Ysi公司 用于改进传感器线性度的引入串扰电路
IT202100006257A1 (it) 2021-03-16 2022-09-16 St Microelectronics Srl Dispositivo a pulsante mems resistente all'acqua, package alloggiante il dispositivo a pulsante e metodo di fabbricazione del dispositivo a pulsante
CN114414848B (zh) * 2021-12-01 2022-10-25 西安电子科技大学 基于对称驱动的mems电容型传感器的馈通电容提取方法
CN114043879B (zh) * 2022-01-13 2022-03-29 西南交通大学 基于图像处理的中低速磁悬浮列车过轨道接缝控制系统

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DE3831593A1 (de) * 1988-09-15 1990-03-22 Siemens Ag Schaltungsanordnung mit einer einer mechanischen verstimmung ausgesetzten differentialkondensator-anordnung
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JP3588276B2 (ja) 1999-07-26 2004-11-10 株式会社山武 センサ信号処理回路
CN2424450Y (zh) * 2000-06-02 2001-03-21 中国科学院上海冶金研究所 微机械梳状电容式加速度传感器
KR100501201B1 (ko) * 2003-12-23 2005-07-18 삼성전기주식회사 Ｍｅｍｓ 구조의 정전 용량 보정기를 갖는 차동형커패시티브 타입 ｍｅｍｓ 센서 장치
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Also Published As

Publication number Publication date
AU2008261367B2 (en) 2011-07-21
EP2156198A1 (fr) 2010-02-24
CA2687127A1 (fr) 2008-12-18
JP2010530065A (ja) 2010-09-02
EP2156198B1 (fr) 2011-08-03
RU2431150C2 (ru) 2011-10-10
JP2012141318A (ja) 2012-07-26
CN101680910A (zh) 2010-03-24
KR20100010930A (ko) 2010-02-02
RU2009140386A (ru) 2011-07-20
JP5624073B2 (ja) 2014-11-12
CA2687127C (fr) 2013-04-30
AU2008261367A1 (en) 2008-12-18
KR101094971B1 (ko) 2011-12-20
DE102007027652A1 (de) 2008-12-18
JP5237363B2 (ja) 2013-07-17
CN101680910B (zh) 2012-01-18
WO2008151683A1 (fr) 2008-12-18
US8171794B2 (en) 2012-05-08
DE102007027652B4 (de) 2013-06-20
ATE519118T1 (de) 2011-08-15
US20100132466A1 (en) 2010-06-03

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