Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
  • B65D45/00—Clamping or other pressure-applying devices for securing or retaining closure members
  • B65D45/02—Clamping or other pressure-applying devices for securing or retaining closure members for applying axial pressure to engage closure with sealing surface
  • B65D45/16—Clips, hooks, or clamps which are removable, or which remain connected either with the closure or with the container when the container is open, e.g. C-shaped
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
  • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
  • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
  • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
  • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Definitions

• This disclosure relates to a clip for a pellicle storage container, a pellicle container, and a pellicle.
• patterning is performed by irradiating light onto a photosensitive layer through a mask (also called an exposure master or reticle). If foreign matter is attached to the mask, the light will be absorbed by the foreign matter or will be reflected and bent by the surface of the foreign matter. As a result, the pattern formed will be deformed or the edges will become rough, causing problems such as impaired dimensions, quality, and appearance after patterning.
• a method is adopted in which a pellicle with a light-transmitting pellicle film is attached to the surface of the mask to suppress the adhesion of foreign matter.
• the pellicle may be packaged in the following order: a polycarbonate case with a clipped opening, an inner bag, a zippered bag, and an outer bag.
• a pellicle storage container a storage container that uses urethane elastomer clips to seal the tray and cover of the storage container has been proposed as a pellicle storage container that reduces the generation of wear powder generated by friction when a pellicle is placed inside the storage container and transported (JP Patent Publication No. 2007-128030).
• outgassing of volatile organic components generated from clips used in packaging for pellicles adheres to the packaged pellicle, and that in addition to outgassing of volatile components originating from the material itself that constitutes the pellicle, outgassing originating from the clips is one of the causes of pellicle contamination.
• An object of one embodiment of the present disclosure is to provide a clip for a pellicle storage container that reduces outgassing of volatile organic components.
• the problem that another embodiment of the present disclosure aims to solve is to provide a pellicle container that uses a clip for a pellicle storage container and that reduces the generation of outgassing of volatile organic components, and a pellicle in which the amount of outgassing caused by the adhesion of volatile organic components is reduced.
• a clip for a pellicle storage container in which the outgassing amount of organic gases having 20 or less carbon atoms is 150 ⁇ g or less per 1 g of the clip, as evaluated under condition 1 below.
• --Condition 1-- 1 g of the cut piece of the clip is placed in a container as a test specimen, and an extract is obtained by Soxhlet extraction for 6 hours in a water bath at 80° C. using 200 ml of hexane as an extraction solvent.
• the resulting extract is analyzed by gas chromatography using a flame ionization detector to detect the amount of components having a carbon number of 20 or less, and the total amount of the detected components having a carbon number of 20 or less is regarded as the amount of outgassing.
• a clip for a pellicle storage container in which the amount of outgassing generated from one clip is 2.000 ⁇ g or less, as evaluated under the following condition 2.
• the clip is placed in a container as a specimen and heated at 50° C. for 4 hours to adsorb the generated outgassing to 150 mg of adsorbent. Then, 150 mg of the adsorbent is set in a gas chromatograph mass spectrometer and the total amount of outgassing of volatile organic components generated from the clip is measured under heating conditions of 280° C. for 10 minutes.
• the total amount of outgassing is calculated in n-decane equivalent, and the total amount obtained is divided by the number of clips used as specimens to obtain the amount of outgassing per clip.
• a clip for a pellicle storage container which contains at least one resin selected from the group consisting of urethane resin, polyethylene resin, polyethylene terephthalate resin, polyvinyl chloride resin, polyamide resin, polycarbonate resin, acrylic resin, methacrylic resin, and phenolic resin.
• a pellicle container comprising: a pellicle; a pellicle storage container for storing the pellicle; a clip for a pellicle storage container described in any one of ⁇ 1> to ⁇ 3> that secures the pellicle storage container from the outside; and a pellicle packaging body that packages the pellicle storage container.
• a pellicle container described in ⁇ 4> wherein the total amount of outgassing of organic gases having a carbon number of 20 or less, measured under the following condition 3, of a pellicle container clip that fixes the pellicle container from the outside is 1,500 ⁇ g or less.
• the pellicle is heated at 50° C. for 4 hours, and the outgas generated is adsorbed onto 150 mg of an adsorbent. Then, 150 mg of the adsorbent is set in a gas chromatograph mass spectrometer, and the total amount of outgassing of volatile organic components generated from the pellicle is measured under heating conditions of 280° C. for 10 minutes.
• the total amount of outgassing is calculated in terms of n-decane.
• a pellicle container comprising a pellicle storage container for storing a pellicle, a pellicle storage container clip described in any one of ⁇ 1> to ⁇ 3> for fixing the pellicle storage container from the outside, and a pellicle packaging body for packaging the pellicle storage container, wherein the pellicle disposed in the pellicle storage container has a pellicle membrane, an original plate adhesive, and a pellicle frame, and has an outgassing amount of 2.9 ⁇ g or less when measured under condition 4 below.
• a clip for a pellicle storage container can be provided in which outgassing of volatile organic components is reduced.
• FIG. 1 is a plan view showing an example of a clip for a pellicle storage container.
• FIG. 2A is a side view of the pellicle storage container clip as viewed from one opening side.
• FIG. 2B is a side view of the pellicle storage container clip as seen from the other opening.
• FIG. 3 is a perspective view showing an example of a pellicle storage container whose four corners are sealed with the pellicle storage container clip shown in FIG.
• FIG. 4 is a schematic cross-sectional view showing an example of a pellicle.
• a numerical range indicated using “to” means a range that includes the numerical values before and after “to” as the minimum and maximum values, respectively.
• the upper or lower limit value described in a certain numerical range may be replaced with the upper or lower limit value of another numerical range described in the present disclosure.
• the upper or lower limit value described in a certain numerical range may be replaced with a value shown in the examples.
• combinations of two or more preferred aspects are more preferred aspects.
• the amount of each component means the total amount of the multiple substances, unless otherwise specified.
• the term "process” refers not only to an independent process, but also to a process that cannot be clearly distinguished from other processes, as long as the intended purpose of the process is achieved.
• a first aspect of the clip for pellicle storage containers of the present disclosure is a clip for pellicle storage containers in which the outgassing amount of organic gases having 20 or less carbon atoms, evaluated under condition 1 below, is 150 ⁇ g or less per gram of clip.
• clip refers to a "clip for a pellicle storage container.”
• condition 1 the components of organic gases having a carbon number of 20 or less (hereinafter also referred to as specific organic gases) are derived from a calibration curve obtained by gas chromatography GC-FID obtained by identifying the peak position of the corresponding carbon number using a mixed n-paraffin standard solution and measuring a standard solution of n- C20H42 of known concentration.
• the specimen may be collected from multiple different clips and the average of these measured values may be taken.
• the average of these measured values from the standpoint of the accuracy of the amount of outgassing generated, it is preferable to collect cut pieces as specimens from at least four clips and use the average value, and it is even more preferable to take the average value from eight clips.
• the outgassing amount of a specific organic gas is 150 ⁇ g or less per gram of clip, and from the viewpoint of suppressing outgassing from the pellicle itself, it is preferable that it is 100 ⁇ g or less per gram of clip, more preferably 50 ⁇ g or less per gram of clip, even more preferably 40 ⁇ g or less per gram of clip, particularly preferably 30 ⁇ g or less per gram of clip, and most preferably below the detection limit or 0 ⁇ g.
• the specific organic gas may be a hydrocarbon compound having 20 or less carbon atoms selected from aliphatic hydrocarbon compounds and aromatic hydrocarbon compounds.
• the outgassing refers to gas generated from the materials that make up the clip, including resin and the like.
• the amount of outgassing of the specific organic gas is preferably 405 ⁇ g or less per clip, more preferably 162 ⁇ g or less, even more preferably 135 ⁇ g or less, and particularly preferably 60 ⁇ g or less.
• the mass of a resin clip used to seal a pellicle container is preferably in the range of 2 g to 5 g per clip, and a general-purpose clip has a mass of about 2.7 g.
• any clip having a known sealing mechanism can be appropriately selected and applied as long as it can seal the pellicle storage container.
• a fastener having a shape as shown in FIG.
• FIG. 1 is a plan view showing an example of a clip.
• the clip 20 shown in FIG. 1 is made of resin and has a trapezoidal shape in a plan view as shown in FIG. 1, with an opening 22A on one side being wider than an opening 22B on the other side.
• 2A is a side view of the clip 20 as viewed from one opening side
• FIG. 2B is a side view of the clip 20 as viewed from the other opening side.
• the clip 20 may have a shape having a protrusion 26 that fits into a recess (not shown) provided in the bottom of the pellicle storage container 24.
• Fig. 3 is a perspective view showing an example of a state in which the clips 20 shown in Fig.
• Fig. 3 shows an example in which a pellicle storage container 24 that is rectangular in plan view is used.
• the pellicle storage container 24 shown in Fig. 3 includes a main body and a lid.
• the clip 20 shown in Figure 1 can be inserted into the four corners of the pellicle storage container 24 from the wider opening 22B (the other opening) side of the clip 20, thereby fastening the body and lid of the pellicle storage container 24 together.
• the four corners of the pellicle storage container 24, which is rectangular in plan view, are secured from the outside of the pellicle storage container 24 with clips 20, so that the convex portions 26 of the clips 20 fit into the concave portions provided on the bottom of the pellicle storage container 24, and the body and lid of the pellicle storage container 24 are secured at the four corners, thereby sealing, i.e., fixing, the pellicle storage container 24 from the outside with the four clips 20.
• a second aspect of the clip for pellicle storage containers of the present disclosure is a clip for pellicle storage containers in which the amount of outgassing generated from one clip is 2.000 ⁇ g or less, as evaluated under condition 2 below.
• -Condition 2- The clip is placed in a container as a specimen and heated at 50° C. for 4 hours to adsorb the generated outgassing to 150 mg of adsorbent. Then, 150 mg of the adsorbent is set in a gas chromatograph mass spectrometer (hereinafter sometimes abbreviated as GCMS) and the total amount of outgassing of volatile organic components generated from the clip is measured under heating conditions of 280° C. for 10 minutes.
• GCMS gas chromatograph mass spectrometer
• the total amount of outgassing is calculated in n-decane equivalent, and the total amount obtained is divided by the number of clips used as specimens to obtain the amount of outgassing per clip.
• Measurement device name GCMS-QP2010plus (Shimadzu Corporation)
• Column: DB-1 inner diameter: 0.32 mm, length: 60 m, thickness: 1.00 ⁇ m
• Scan range 35 m/Z to 450 m/Z
• Ionization 0.78 kV
• Measurement method The amount of gas generated at 280°C for 5 minutes was calculated in n-decane equivalent.
• condition 2 in consideration of variations in the amount of outgassing generated among clips from which specimens are collected, it is preferable to collect specimens from multiple different clips and take the average of their measured values.
• condition 2 from the viewpoint of accuracy of the amount of outgassing generated, it is preferable to collect cut pieces as specimens from at least four clips and use the average value, and it is more preferable to use the average value of eight clips.
• the total amount of the specific organic gas is the average value of eight clips.
• the amount of outgassing of volatile organic components generated from the clip is 2,000 ⁇ g or less per clip, and from the viewpoint of suppressing outgassing generation from the pellicle itself, it is preferably 0.5 ⁇ g or less per clip, more preferably 0.05 ⁇ g or less per clip, even more preferably 0.04 ⁇ g or less per clip, particularly preferably 0.03 ⁇ g or less per clip, and most preferably below the detection limit or 0 ⁇ g.
• the volatile organic components refer to organic components that volatilize under conditions of 25° C. and 1 atm.
• the volatile organic components include hydrocarbon compounds such as aromatic hydrocarbon compounds and aliphatic hydrocarbon compounds.
• the clip of the present disclosure have an outgassing amount of a specific organic gas measured under the above condition 1 specified in the first aspect of the present disclosure of 150 ⁇ g or less per gram of clip, and an outgassing amount of a volatile organic component measured under the above condition 2 specified in the second aspect of the present disclosure of 2,000 ⁇ g or less per clip.
• the clip of the present disclosure preferably contains at least one resin selected from the group consisting of urethane resin, polyethylene resin, polyethylene terephthalate resin, polyvinyl chloride resin, polyamide resin, polycarbonate resin, acrylic resin, methacrylic resin, and phenolic resin.
• the polyamide resin include PA6 and PA66.
• the clip contains at least one resin selected from the group consisting of polyethylene resin, polypropylene resin, and polyurethane resin.
• the clip may contain only one type of resin, or may contain two or more types of resin.
• the clip containing the above resin after the clip containing the above resin is manufactured, it may be subjected to a heat treatment at a temperature equal to or lower than the softening point of the resin.
• a heat treatment at a temperature equal to or lower than the softening point of the resin.
• the pellicle container of the present disclosure comprises a pellicle, a pellicle storage container for storing the pellicle, a pellicle storage container clip of the present disclosure for fixing the pellicle storage container from the outside, and a pellicle packaging body for packaging the pellicle storage container.
• the pellicle packaging of the present disclosure the amount of outgassing from the pellicle caused by the adhesion of volatile organic component outgassing from the clip used in the pellicle container is reduced.
• pellicle container is used to include the pellicle and each packaging material that packages the pellicle.
• the pellicle is placed in a pellicle storage container made of a resin such as polycarbonate, and the pellicle storage container is secured, for example, by clips at the four corners, making it less susceptible to influence from other packaging materials, and the clips of the present disclosure suppress the generation of outgassing such as specific organic gases and volatile organic components that cause pellicle contamination to a low range, thereby further reducing the amount of outgassing from the pellicle due to the adhesion of outgassing generated from the packaging material of the pellicle container.
• outgassing such as specific organic gases and volatile organic components that cause pellicle contamination
• the inside of the pellicle storage container is not sealed, as this may lead to problems when opening the pellicle storage container, such as making it difficult to open if there is a pressure difference between the inside and outside of the pellicle storage container.
• the clip used in the pellicle container of the present disclosure has a total outgassing amount of organic gases having a carbon number of 20 or less, measured under condition 3 below, of 648 ⁇ g or less.
• a cut piece of a clip used for a pellicle container is placed in a container as a specimen, and an extract is obtained by Soxhlet extraction for 6 hours in a water bath at 80° C. using 200 ml of hexane as an extraction solvent.
• the resulting extract is analyzed by gas chromatography using a flame ionization detector to detect the amount of components having a carbon number of 20 or less, and the total amount of the detected components having a carbon number of 20 or less is regarded as the amount of outgassing.
• the evaluation method under condition 3 was the same as the measurement method under condition 1 described above, except that the specimen was changed from 1 g of cut pieces of the clip to cut pieces of the entire amount of clips used in the pellicle container.
• the clips used in the pellicle container of the present disclosure preferably have a total outgassing amount of organic gases having a carbon number of 20 or less, measured under condition 3 above, of 1500 ⁇ g or less, more preferably 1000 ⁇ g or less, even more preferably 500 ⁇ g or less, and particularly preferably 350 ⁇ g or less, which may be below the measurement limit.
• pellicle storage container a known pellicle storage container can be used.
• materials for the pellicle container include resins such as polycarbonate, and conductive materials such as carbon nanotubes, conductive carbon black, and inorganic particles.
• FIG. 4 is a schematic cross-sectional view showing a pellicle 10.
• a pellicle film 12 and a support frame 14 are bonded via a film adhesive layer 13.
• the support frame 14 has an air vent 16 and an original plate adhesive layer 15 formed thereon.
• a release sheet e.g., a separator
• the support frame 14 may not have an air vent 16, and may have a structure in which the support frame 14 is laminated from multiple layers.
• the pellicle membrane 12 is supported by a support frame 14 .
• materials for the pellicle film 12 include transparent materials such as quartz glass, fluorine-based resin, cellulose acetate, and carbon nanotubes.
• materials for the support frame 14 include an anodized aluminum frame, a titanium frame, a silicon frame, etc.
• the support frame 14 is preferably black in order to prevent reflection of the exposure light and to facilitate inspection for the presence or absence of attached foreign matter, etc.
• the film adhesive layer 13 bonds the support frame and the pellicle film.
• the material of the film adhesive layer 13 is not particularly limited, but examples thereof include fluoropolymers such as acrylic resin adhesives, epoxy resin adhesives, silicone resin adhesives, and fluorine-containing silicone adhesives.
• the master plate adhesive layer 15 can be formed by applying a known adhesive and drying it.
• the material of the master adhesive layer 15 (hereinafter also referred to as master adhesive) is not particularly limited, but examples thereof include acrylic, silicone, styrene butadiene, urethane, and olefin adhesives.
• the pellicle in the pellicle container of the present disclosure includes an adhesive for the master plate, and the adhesive for the master plate may be a styrene butadiene-based adhesive.
• a styrene-butadiene adhesive is preferable as the material of the master adhesive layer 15 that bonds the support frame 14 and the master, since it makes it easier to suppress distortion of the master.
• Styrene-butadiene adhesives are more likely to be generated as outgassing from the pellicle after the outgassing of volatile organic components generated from the pellicle package adheres to the pellicle.
• the pellicle package according to the present disclosure has the above-mentioned configuration, and therefore the amount of outgassing from the pellicle caused by the adhesion of the outgassing of volatile organic components generated from the pellicle package is reduced even when a styrene-butadiene adhesive is used as the material for the master plate adhesive layer 15.
• adheresive is a concept that encompasses adhesives and pressure-sensitive adhesives.
• adhesive layer is a concept that encompasses an adhesive layer and a pressure-sensitive adhesive layer.
• Examples of materials for the release sheet include a polyethylene terephthalate film and a polypropylene film. As mentioned above, depending on the materials of the pellicle membrane 12 and the support frame 14, the support frame and the pellicle membrane may be adhered to each other without the membrane adhesive layer 13 therebetween.
• the pellicle of the present disclosure has a pellicle membrane, a master adhesive, and a pellicle frame, and has an outgassing amount of 2.9 ⁇ g or less when measured under condition 4 below.
• --Condition 4- The pellicle is heated at 50° C. for 4 hours, and the outgassing generated is adsorbed onto 150 mg of an adsorbent. Then, 150 mg of the adsorbent is set in a gas chromatograph mass spectrometer (GCMS), and the total amount of outgassing of volatile organic components generated from the pellicle is measured under heating conditions of 280° C. for 10 minutes.
• GCMS gas chromatograph mass spectrometer
• the total amount of outgassing is calculated in terms of n-decane.
• the outgassing measurement method for volatile organic components under condition 4 is the same as that under condition 2 described above, except that the specimen is changed from a clip to a pellicle, and the measurement conditions for the GCMS
• the pellicle of the present disclosure is a pellicle storage body comprising a pellicle storage container for storing a pellicle, a pellicle storage container clip of the present disclosure for fixing the pellicle storage container, and a pellicle packaging body for packaging the pellicle storage container, wherein the pellicle placed in the pellicle storage container has a pellicle membrane, an adhesive for an original plate, and a pellicle frame, and has an outgassing amount of 2.9 ⁇ g or less when measured under condition 4 below.
• 150 mg of the adsorbent is set in a gas chromatograph mass spectrometer, and the total amount of outgassing of volatile organic components generated from the pellicle is measured under heating conditions of 280° C. for 10 minutes.
• the total amount of outgassing is calculated in terms of n-decane.
• the method of measuring the outgassing of volatile organic components under the above condition 4 is the same as that under the above condition 2, except that the specimen is changed from a clip to a pellicle, and the measurement conditions applied by GCMS are also the same.
• the pellicle packaging material for packaging the pellicle storage container may be a known material.
• the pellicle packaging material may be a laminate including at least two layers, a sealant layer and a base layer.
• the pellicle packaging preferably has a breaking strength of 5N or more and 50N or less, more preferably 7N or more and 45N or less, and even more preferably 10N or more and 40N or less.
• JIS-K7127-5 (1999) (corresponding to ISO527-3:1995)). Both ends of a JIS-K7127 type 5 test piece (dumbbell-shaped with a total length of 115 mm, width of parallel portion 6 mm, gauge length 25 mm, and gripping width of 25 mm) are pulled to measure the breaking strength.
• the pellicle packaging preferably includes at least two layers, a sealant layer and a base layer, and more preferably includes a sealant layer, an adhesive layer, and a base layer in this order.
• the pellicle packaging body is a laminate including at least two layers, a sealant layer and a base layer, or when the pellicle packaging body is a laminate including a sealant layer, an adhesive layer, and a base layer in this order, the outermost surface on the pellicle side may be the sealant layer, and the outermost surface on the outer circumferential surface side may be the base layer.
• the pellicle package is composed of at least two layers, a sealant layer and a base layer, or when the pellicle package is a laminate containing a sealant layer, an adhesive layer, and a base layer in this order, it is considered that the outgassing of volatile organic components in the pellicle package is likely to occur from the sealant layer. Therefore, if the outermost surface on the pellicle side is a sealant layer, the adhesion of the outgassing of volatile organic components generated from the pellicle package is also significant.
• the pellicle package of the present disclosure has the above-mentioned configuration, and therefore the amount of outgassing from the pellicle caused by the adhesion of the outgassing of volatile organic components generated from the pellicle package is easily maintained low.
• the sealant layer may be a single layer or a laminate consisting of two or more layers.
• the material for the sealant layer is not particularly limited, and a composition containing a known resin can be used.
• the resin include polyolefin resins which are homopolymers such as polyethylene (PE) (including high density polyethylene (HDPE), medium density polyethylene (MDPE), low density polyethylene (LDPE), linear low density polyethylene (LLDPE), etc.), polypropylene (PP), polybutene, polymethylpentene, etc.; copolymers of two or more types selected from the group consisting of olefins such as ethylene, propylene, butene, methylpentene, etc.; polyester resins such as polyethylene terephthalate (PET), polybutylene terephthalate (PBT), polyethylene naphthalate, etc.; polyamide resins such as nylon-6, nylon-6,6, metaxylenediamine-adipic acid condensation polymer, polymethyl
• the material of the sealant layer to contain at least one selected from the group consisting of polyester resin, polyamide resin, and ethylene-vinyl alcohol copolymer, more preferably at least one selected from the group consisting of polyester resin and ethylene-vinyl alcohol copolymer, and even more preferably ethylene-vinyl alcohol copolymer.
• the thickness of the sealant layer (total thickness when it has a laminate structure consisting of two or more layers) is preferably 500 ⁇ m or less, more preferably 100 ⁇ m or less, even more preferably 50 ⁇ m or less, and particularly preferably 40 ⁇ m or less.
• the thickness of the sealant layer is within the above range, the amount of outgassing from the pellicle caused by the adhesion of volatile organic component outgassing from the pellicle packaging is further reduced.
• the thickness of the sealant layer (total thickness when it has a laminated structure consisting of two or more layers) may be 3 ⁇ m or more, 5 ⁇ m or more, or 15 ⁇ m or more. From the above viewpoint, the thickness of the sealant layer (total thickness when the sealant layer has a laminated structure consisting of two or more layers) may be 3 ⁇ m or more and 500 ⁇ m or less, or 3 ⁇ m or more and 40 ⁇ m or less.
• the pellicle packaging body is composed of at least two layers, a sealant layer and a base layer, it is believed that outgassing of volatile organic components in the pellicle packaging body is likely to occur from the sealant layer. Therefore, as the thickness of the sealant layer increases, the adhesion of outgassing of volatile organic components generated from the pellicle packaging body is also likely to become more noticeable.
• the pellicle packaging body of the present disclosure has the above-mentioned configuration, and therefore, even if the thickness of the sealant layer is within the above-mentioned range, the amount of outgassing from the pellicle, which is caused by the adhesion of outgassing of volatile organic components generated from the pellicle packaging body, is likely to be kept low.
• the substrate layer may be a single layer or a laminate of two or more layers.
• the material of the substrate layer is not particularly limited, and a composition containing a known resin can be used.
• the resin include polyolefin resins such as polyethylene (including high density polyethylene (HDPE), medium density polyethylene (MDPE), low density polyethylene (LDPE), linear low density polyethylene (LLDPE), etc.), ethylene-propylene copolymer, ethylene-butene copolymer, ethylene-hexene copolymer, ethylene-octene copolymer, polypropylene (PP), ethylene-vinyl acetate copolymer, ethylene-methyl methacrylate copolymer, and ionomer resin; polyester resins such as polyethylene terephthalate (PET), polybutylene terephthalate (PBT), and polyethylene naphthalate; and amide resins such as nylon-6, nylon-6,6, metaxylenediamine-adipic acid condensation polymer, and polymethylmethacrylimide.
• polyethylene including high density polyethylene
• the resin examples include acrylic resins such as polymethyl methacrylate, styrene-acrylonitrile resins such as polystyrene, styrene-acrylonitrile copolymer, styrene-acrylonitrile-butadiene copolymer, and polyacrylonitrile, hydrophobized cellulose resins such as cellulose triacetate and cellulose diacetate, halogen-containing resins such as polyvinyl chloride, polyvinylidene chloride, polyvinylidene fluoride, and Teflon (registered trademark), polyvinyl alcohol, ethylene-vinyl alcohol copolymer, and cellulose derivatives, and high hydrogen bond resins, polycarbonate resins, polysulfone resins, polyethersulfone resins, polyetheretherketone resins, polyphenylene oxide resins, polymethylene oxide resins, and liquid crystal resins.
• the resins may be used alone or in combination of two or more.
• a material that is less prone to static electricity preferably a resin that contains an antistatic treatment, more preferably a resin that contains either polyethylene terephthalate or polyethylene naphthalate
• a material that contains an antistatic treatment more preferably a resin that contains either polyethylene terephthalate or polyethylene naphthalate
• the thickness of the substrate layer (total thickness if it is a laminated structure consisting of two or more layers) is not particularly limited, but is preferably, for example, 0.1 ⁇ m or more and 500 ⁇ m or less, more preferably 1 ⁇ m or more and 100 ⁇ m or less, and even more preferably 5 ⁇ m or more and 30 ⁇ m or less.
• the pellicle packaging of the present disclosure may, if necessary, have an adhesive layer between the sealant layer and the base layer.
• the adhesive layer may be a single layer or a laminate consisting of two or more layers.
• the material for the adhesive layer is not particularly limited, and a composition containing a known resin can be used.
• the resin include polyurethane resin, polyester resin, polyether resin, and mixtures thereof.
• the thickness of the adhesive layer is not particularly limited, but from the viewpoint of adhesive strength, it is preferably 1 ⁇ m or more, and more preferably 2 ⁇ m or more.
• the thickness of the adhesive layer is not particularly limited, but from the viewpoint of shortening the time of the curing reaction when forming the adhesive layer and from the viewpoint of reducing the proportion of unreacted materials and residual solvent during the curing reaction, the thickness is preferably 5 ⁇ m or less, and more preferably 4 ⁇ m or less.
• the shape of the pellicle package is not particularly limited.
• the shape of the pellicle package may be, for example, a sheet, a bag, a pack, a box, or the like.
• the pellicle package may be configured to include, as a part of the package, a packaging member having a total outgassing amount of volatile organic components exceeding 90 ppm when heated at 100° C. for 30 minutes, as necessary, within the range in which the effects of the present disclosure can be obtained.
• the proportion of packaging members in the pellicle package having a total outgassing amount exceeding 90 ppm is preferably 20% by mass or less, more preferably 10% by mass or less, and even more preferably 5% by mass or less of the entire pellicle package. It is preferable that the pellicle package does not include packaging members having a total outgassing amount exceeding 90 ppm.
• the volume of the pellicle package is not particularly limited and can be appropriately set depending on the size of the pellicle and the packaging form.
• the volume of the package is, for example, preferably 2000 cm 3 to 70000 cm 3 , more preferably 4000 cm 3 to 30000 cm 3 , and even more preferably 5000 cm 3 to 10000 cm 3 .
• the volume of the pellicle packaging is within the above range, it is easy to optimize the balance between the volume of the pellicle or pellicle storage container packaged in the pellicle packaging and the surface area of the pellicle packaging. As a result, the proportion of outgassing of volatile organic components generated from the pellicle packaging is reduced, and the amount of outgassing from the pellicle caused by the adhesion of outgassing derived from the pellicle packaging is also reduced.
• Example 1 (1) Preparation of the various components that are the raw materials for the mask adhesive: Thermoplastic elastomer (A) Styrene-hydrogenated isoprene-styrene block copolymer (product name "Hybra 7125” (manufactured by Kuraray Co., Ltd.), tan ⁇ peak temperature: -5°C, styrene content: 20% by mass)
• ⁇ Tackifying resin (B) Hydrogenated alicyclic petroleum resin: C9 hydrogenated petroleum resin (product name "Arcon P-100” (manufactured by Arakawa Chemical Industries, Ltd.), softening point: 100 ⁇ 5°C, number average molecular weight (Mn): 610 ) Rosin ester resin (product name "Pine Crystal KE-311” (manufactured by Arakawa Chemical Industries, Ltd.), softening point: 100 ⁇ 5°C)
• Wax Polypropylene pyrolysis type wax product name "Hiwax NP055" (manufactured by Mitsui Chemicals, Inc.)
• an anodized aluminum support frame 14 (outer dimensions: 148.77 mm ⁇ 114.9 mm, frame height H: 2.5 mm, frame width W: 2 mm) as shown in FIG. 4 was prepared.
• the molten mask adhesive extruded from a needle tip connected to the heating tank was applied to one end surface of the support frame 14 to form an adhesive layer 15 for the original plate.
• the thickness of the formed master plate adhesive layer 15 was 0.6 mm.
• a separator was placed on the surface of the master plate adhesive layer 15.
• a pellicle film 12 was attached to the other end face of the support frame 14 (i.e., the end face on the side on which the master plate adhesive layer 15 was not formed) via a film adhesive layer 13 (fluoropolymer (AGC Corporation, CYTOP A type)) to obtain a pellicle 10.
• a film adhesive layer 13 fluoropolymer (AGC Corporation, CYTOP A type)
• the prepared pellicle was placed in a polycarbonate container.
• Four polyethylene clips were prepared that had been heat-treated in the air at 90° C. for 24 hours.
• the clips each had a mass of 2.9 g.
• the four corners of the polycarbonate storage container were fixed with the four clips prepared.
• the polycarbonate storage container fixed with the clips was wrapped in a pellicle package and stored at 23° C. for two months.
• the pellicle packaging body was a laminate of a base material: polyethylene terephthalate and a sealant layer: ethylene-vinyl alcohol copolymer, and had a thickness of 25 ⁇ m.
• the components of the organic gas having a carbon number of 20 or less were determined by identifying the peak position of the corresponding carbon number in gas chromatography using a mixed n-paraffin standard solution, and were derived from a calibration curve obtained by gas chromatography GC-FID obtained when a standard solution of n-C 20 H 42 of known concentration was measured.
• -Condition 2- The clip was placed in a container as a specimen and heated at 50° C. for 4 hours to adsorb the generated outgassing onto 150 mg of adsorbent. Then, 150 mg of the adsorbent was set in a gas chromatograph mass spectrometer (GCMS) and the total amount of outgassing of volatile organic components generated from the clip was measured under heating conditions of 280° C. for 10 minutes.
• GCMS gas chromatograph mass spectrometer
• the total amount of outgassing was calculated in terms of n-decane, and the total amount was divided by the number of test clips to determine the amount of outgassing per clip.
• Measurement device name GCMS-QP2010plus (Shimadzu Corporation)
• Column: DB-1 inner diameter: 0.32 mm, length: 60 m, thickness: 1.00 ⁇ m
• Scan range 35 m/Z to 450 m/Z
• Ionization 0.78 kV
• Measurement method The amount of gas generated at 280°C for 5 minutes was calculated in n-decane equivalent.
• the pellicle stored in the pellicle container was placed in a clean oven under atmospheric air and heated at a temperature in the range of 70° C. to 80° C. for 20 hours to perform a degassing process.
• the pellicle was packaged using the pellicle package and stored at 23° C. for one week. After storage, the pellicle was removed from the pellicle package and set in an oven. Then, the outgassing generated under heating conditions of 50° C. for 4 hours was adsorbed by Tenax (trademark, manufactured by GL Sciences Inc.), a powdered adsorbent.
• Example 2 Except for making the clip from the same polyethylene resin as in Example 1 and heating the clip at 60° C. for 24 hours, the clip and the pellicle container were made in the same manner as in Example 1 and evaluated in the same manner as in Example 1. The results are shown in Table 1.
• Example 3 Except for making the clip from polypropylene resin and heating at 90° C. for 24 hours, the clip and the pellicle container were made in the same manner as in Example 1, and evaluated in the same manner as in Example 1. The results are shown in Table 1.
• Comparative Example 1 The clip was made of the same polyethylene resin as in Example 1, and except that heating was not performed, the clip and the pellicle container were prepared in the same manner as in Example 1, and evaluated in the same manner as in Example 1. The results are shown in Table 1.
• Comparative Example 2 The clip was made of the same polypropylene resin as in Example 2, and except that heating was not performed, the clip and the pellicle container were prepared in the same manner as in Example 2, and evaluated in the same manner as in Example 1. The results are shown in Table 1.
• PE stands for polyethylene
• PP stands for polypropylene.

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• 2024
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