KR20260003370A - 펠리클 수납 용기용 클립, 펠리클 수용체 및 펠리클 - Google Patents

펠리클 수납 용기용 클립, 펠리클 수용체 및 펠리클

Info

Publication number
KR20260003370A
KR20260003370A KR1020257041119A KR20257041119A KR20260003370A KR 20260003370 A KR20260003370 A KR 20260003370A KR 1020257041119 A KR1020257041119 A KR 1020257041119A KR 20257041119 A KR20257041119 A KR 20257041119A KR 20260003370 A KR20260003370 A KR 20260003370A
Authority
KR
South Korea
Prior art keywords
pellicle
clip
outgas
storage container
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020257041119A
Other languages
English (en)
Korean (ko)
Inventor
슈 니시고치
다이키 다네이치
겐 이토
Original Assignee
미쯔이가가꾸가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 미쯔이가가꾸가부시끼가이샤 filed Critical 미쯔이가가꾸가부시끼가이샤
Publication of KR20260003370A publication Critical patent/KR20260003370A/ko
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D45/00—Clamping or other pressure-applying devices for securing or retaining closure members
    • B65D45/02—Clamping or other pressure-applying devices for securing or retaining closure members for applying axial pressure to engage closure with sealing surface
    • B65D45/16—Clips, hooks, or clamps which are removable, or which remain connected either with the closure or with the container when the container is open, e.g. C-shaped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Packaging Frangible Articles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Packages (AREA)
KR1020257041119A 2023-06-09 2024-05-15 펠리클 수납 용기용 클립, 펠리클 수용체 및 펠리클 Pending KR20260003370A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2023-095898 2023-06-09
JP2023095898 2023-06-09
PCT/JP2024/018053 WO2024252879A1 (ja) 2023-06-09 2024-05-15 ペリクル収納容器用クリップ、ペリクル収容体及びペリクル

Publications (1)

Publication Number Publication Date
KR20260003370A true KR20260003370A (ko) 2026-01-06

Family

ID=93795428

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020257041119A Pending KR20260003370A (ko) 2023-06-09 2024-05-15 펠리클 수납 용기용 클립, 펠리클 수용체 및 펠리클

Country Status (5)

Country Link
JP (1) JPWO2024252879A1 (https=)
KR (1) KR20260003370A (https=)
CN (1) CN121263370A (https=)
TW (1) TW202500479A (https=)
WO (1) WO2024252879A1 (https=)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5209423B2 (ja) * 2008-09-11 2013-06-12 旭化成イーマテリアルズ株式会社 ペリクル梱包構造体
JP2013197513A (ja) * 2012-03-22 2013-09-30 Tosoh Corp 電子材料の保管・運搬用ケース
JP5767730B2 (ja) * 2014-03-20 2015-08-19 旭化成イーマテリアルズ株式会社 収納容器からの大型ペリクルの取出し方法

Also Published As

Publication number Publication date
JPWO2024252879A1 (https=) 2024-12-12
WO2024252879A1 (ja) 2024-12-12
CN121263370A (zh) 2026-01-02
TW202500479A (zh) 2025-01-01

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