WO2024247604A1 - 被覆工具及び切削工具 - Google Patents

被覆工具及び切削工具 Download PDF

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Publication number
WO2024247604A1
WO2024247604A1 PCT/JP2024/016815 JP2024016815W WO2024247604A1 WO 2024247604 A1 WO2024247604 A1 WO 2024247604A1 JP 2024016815 W JP2024016815 W JP 2024016815W WO 2024247604 A1 WO2024247604 A1 WO 2024247604A1
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WIPO (PCT)
Prior art keywords
layer
coating layer
coated tool
outermost surface
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
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PCT/JP2024/016815
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English (en)
French (fr)
Japanese (ja)
Inventor
尚久 松田
匠 橋本
哲平 長田
理沙 幸田
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Kyocera Corp
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Kyocera Corp
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Priority to JP2025523377A priority Critical patent/JPWO2024247604A1/ja
Publication of WO2024247604A1 publication Critical patent/WO2024247604A1/ja
Anticipated expiration legal-status Critical
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides

Definitions

  • This disclosure relates to coated tools and cutting tools.
  • a coated tool (coated cemented carbide cutting tool) described in JP-A-11-197907 (Patent Document 1) is known as a coated tool used for cutting tools and the like.
  • the average crack spacing in the coating film on the cutting edge ridge and/or rake face is smaller than the average crack spacing in the coating film on the flank face.
  • the average length of the cracks in the coating film on the cutting edge ridge and/or rake face is shorter than the average thickness of the coating film on the flank face.
  • a non-limiting one-sided coated tool of the present disclosure is a coated tool in the shape of a cutting tool, comprising a substrate and a coating layer located on the surface of the substrate.
  • the coating layer has a Ti-based coating layer and an Al 2 O 3 layer.
  • the Ti-based coating layer is in contact with the substrate.
  • the Al 2 O 3 layer is located farther from the substrate than the Ti-based coating layer, and includes the outermost surface of the coating layer.
  • At the cutting edge ridge and/or rake face there is a crack in the coating layer extending from the outermost surface toward the substrate.
  • the crack opens at the outermost surface.
  • the width of the crack at -0.2 ⁇ m from the outermost surface is 1 to 30 ⁇ m.
  • FIG. 1 is a perspective view of a non-limiting one-sided coated tool of the present disclosure.
  • 2 is a cross-sectional view perpendicular to the surface of the substrate in the coated tool shown in FIG. 1 .
  • FIG. 2 is a plan view of the coated tool shown in FIG. 1 .
  • FIG. 4 is an enlarged view of region IV shown in FIG. 3 .
  • FIG. 1 is a perspective view of a non-limiting one-sided cutting tool of the present disclosure.
  • the coated tool 1 may include any component member not shown in each of the drawings referred to.
  • the dimensions of the components in each drawing do not faithfully represent the dimensions of the actual components and the dimensional ratios of each component.
  • the coated tool 1 may include a base 3 and a coating layer 7 located on a surface 5 of the base 3, as shown in a non-limiting example in Figures 1 and 2.
  • the coated tool 1 may also have a cutting tool shape.
  • the cutting tool shape means a shape that can be used as a cutting tool, and a specific configuration includes a plate shape.
  • a cutting insert is shown as a non-limiting example of the coated tool 1. Therefore, the cutting tool shape may be rephrased as an insert shape. Note that the form of the coated tool 1 is not limited to a cutting insert.
  • the coated tool 1 may have a rake face 9 and a clearance face 11, as shown in a non-limiting example in FIG. 1.
  • the coated tool 1 may also be plate-shaped.
  • the coated tool 1 may be square plate-shaped.
  • the top surface may be the rake face 9.
  • the side surface may be the clearance face 11.
  • the shape of the coated tool 1 is not limited to a square plate shape.
  • the rake face 9 (top surface) may be triangular, pentagonal, hexagonal, or circular.
  • the coated tool 1 is not limited to a specific size.
  • the length of one side of the rake face 9 (upper surface) may be set to about 3 to 20 mm.
  • the height from the rake face 9 (upper surface) to the surface (lower surface) located opposite the rake face 9 may be set to about 5 to 20 mm.
  • the coated tool 1 may have a cutting edge ridge 13 located at the intersection of the rake face 9 and the flank 11.
  • the cutting edge ridge 13 may be a portion of the intersection of the rake face 9 and the flank 11 that has been subjected to cutting edge treatment.
  • the cutting edge ridge 13 may be located over the entire intersection of the rake face 9 and the flank 11, or may be located over only a portion of this intersection.
  • the cutting edge ridge 13 can be used to cut a workpiece when manufacturing a machined product using the coated tool 1.
  • the cutting edge ridge 13 may also be referred to as a cutting edge.
  • the coating layer 7 may include a Ti-based coating layer 15 (titanium-based coating layer) and an Al 2 O 3 layer 17 (alumina layer), as a non-limiting example shown in FIG.
  • the Ti-based coating layer 15 may be in contact with the substrate 3.
  • the Ti-based coating layer 15 may also be called a base layer.
  • the Al2O3 layer 17 may be located farther from the substrate 3 than the Ti-based coating layer 15. Also, the Al2O3 layer 17 may be located the furthest from the substrate 3 in the coating layer 7. The Al2O3 layer 17 may include the outermost surface 19 of the coating layer 7. That is, the Al2O3 layer 17 may be the outermost layer.
  • cracks 21 may be present in the coating layer 7 extending from the outermost surface 19 towards the substrate 3 (see FIG. 2).
  • the cracks 21 may open at the outermost surface 19 (see FIGS. 2 and 4).
  • the width W of the cracks 21 at -0.2 ⁇ m from the outermost surface 19 may be 1 to 30 ⁇ m.
  • the width W of the cracks 21 may be 1 to 30 ⁇ m.
  • the "-" (minus) in "-0.2 ⁇ m” means that the value approaches the substrate 3.
  • the coated tool 1 has high chipping resistance and fracture resistance.
  • a number of cracks 21 may be present in the coating layer 7 at the cutting edge ridge 13 and/or the rake face 9.
  • the cracks 21 may also open at the outermost surface 19.
  • the cracks 21 may also be referred to as fissures.
  • the width W of the crack 21 may be measured by observing the outermost surface 19 using a laser microscope.
  • the width W of the crack 21 may be an average value.
  • the width W of the crack 21 may be an average value measured under the conditions that a range of 205 ⁇ m ⁇ 275 ⁇ m in a micrograph obtained by photographing the outermost surface 19 with a laser microscope at a magnification of 500 times is set as one field of view, the width W of the crack 21 present in the one field of view is measured at five measurement points at intervals of 0.13 ⁇ m or 0.26 ⁇ m in the direction perpendicular to the extension direction of the crack 21 (direction A shown in FIG. 4), and the number of photographing points is three.
  • the laser microscope for example, the VK-X1000 series manufactured by KEYENCE Corporation may be mentioned.
  • the maximum value of the width W of the crack 21 may be present at the outermost surface 19 (see FIG. 2).
  • the width W of the crack 21 may also become smaller with increasing distance from the outermost surface 19.
  • the width W of the crack 21 may be 2 to 30 ⁇ m.
  • the width W of the crack 21 may be 6 to 30 ⁇ m.
  • Region R may be located closer to the outermost surface 19 than the center 17a in the thickness direction of the Al2O3 layer 17. In this case, the strength of the Al2O3 layer 17 is easily ensured. Also, the toughness of the Al2O3 layer 17 is easily improved. The entire crack 21 may be located closer to the outermost surface 19 than the center 17a in the thickness direction of the Al2O3 layer 17.
  • the area ratio of the cracks 21 on the outermost surface 19 may be 5 to 30%. In this case, it is easy to avoid an excessively large proportion of cracks 21 opening on the outermost surface 19. In other words, the strength of the outermost surface 19 is easy to ensure. Therefore, chipping resistance and chipping resistance are easy to improve.
  • the lower limit of the area ratio of the cracks 21 may be 6%.
  • the upper limit of the area ratio of the cracks 21 may be 26%.
  • the area ratio of cracks 21 on the outermost surface 19 can be evaluated using an image of height data measured over a range of 205 ⁇ m x 275 ⁇ m at 500x magnification on the outermost surface 19 using a laser microscope, with the height data being one field of view.
  • the average value of the height data is taken as the reference surface (zero point)
  • the surface area of the area that is -0.2 ⁇ m or less from the reference surface is S
  • the total measured area (the entire area of the above image) is ST
  • the value may be calculated from the formula: (S/ST) x 100.
  • the "-" (minus) in "-0.2 ⁇ m" means that the value is closer to the base 3.
  • the depth D of the opened crack 21 may be 0.3 to 5 ⁇ m (see FIG. 2). In this case, chipping resistance and defect resistance are likely to be improved.
  • the lower limit of the depth D of the crack 21 may be 0.4 ⁇ m.
  • the upper limit of the depth D of the crack 21 may be 1.9 ⁇ m.
  • the depth D of the opened crack 21 may be measured by observing the outermost surface 19 using a laser microscope.
  • the depth D of the opened cracks 21 may be an average value.
  • the outermost surface 19 may have multiple regions 23 surrounded by cracks 21 (see FIG. 3). In this case, the strength of the outermost surface 19 is likely to be ensured by the multiple regions 23.
  • the area ratio of the cracks 21 is likely to be 5 to 30%.
  • the regions 23 may be composed of multiple cracks 21. The presence of the regions 23 in the outermost surface 19 may be confirmed by observing the outermost surface 19 using, for example, a metallurgical microscope.
  • the substrate 3 may be a sintered alloy.
  • the sintered alloy may be made of a cemented carbide.
  • the substrate 3 may be made of a cemented carbide.
  • the cemented carbide may contain a hard phase and a binder phase.
  • the hard phase in the cemented carbide may contain, for example, tungsten carbide (WC).
  • the hard phase in the cemented carbide may contain WC as the main component.
  • the cemented carbide may be a WC-based cemented carbide.
  • "Main component” means the component with the largest mass percentage value compared to other components.
  • the binder phase in the cemented carbide may contain an iron group metal.
  • iron group metals include cobalt (Co) and nickel (Ni).
  • the binder phase in the cemented carbide may contain at least one of Co and Ni.
  • the binder phase in the cemented carbide may contain an iron group metal as a main component.
  • the binder phase may function as a phase that bonds adjacent hard phases.
  • the substrate 3 may be made of a cemented carbide.
  • the hard phase may be made of WC.
  • the hard phase may contain a cubic crystal structure compound in addition to WC.
  • the cubic crystal structure compound may be composed of at least one selected from carbides, nitrides, carbonates, oxynitrides, and mutual solid solutions of elements in Groups 4, 5, and 6 of the periodic table.
  • the hard phase may be composed of WC and at least one cubic crystal structure compound selected from carbides, nitrides, carbonates, oxynitrides, and mutual solid solutions of elements in Groups 4, 5, and 6 of the periodic table.
  • the binder phase may be mainly composed of Co and/or Ni.
  • the sintered alloy may be made of a cermet.
  • the substrate 3 may be made of a cermet.
  • the cermet may contain a hard phase and a binder phase.
  • the hard phase in the cermet may contain, for example, a titanium (Ti) compound. Examples of Ti compounds include titanium carbonitride (TiCN), titanium carbide (TiC), and titanium nitride (TiN).
  • Ti compounds include titanium carbonitride (TiCN), titanium carbide (TiC), and titanium nitride (TiN).
  • the hard phase in the cermet may also contain a Ti compound as a main component. In other words, the cermet may be a Ti-based cermet.
  • the binder phase in the cermet may contain an iron group metal.
  • the binder phase in the cermet may contain at least one of Co and Ni.
  • the binder phase in the cermet may contain an iron group metal as a main component.
  • the composition of the substrate 3 may be measured, for example, by Energy Dispersive X-ray Spectroscopy (EDS).
  • EDS Energy Dispersive X-ray Spectroscopy
  • the measurement may be performed using an EDS attached to an electron microscope.
  • electron microscopes include a Scanning Electron Microscopy (SEM) and a Transmission Electron Microscopy (TEM).
  • the Ti-based coating layer 15 may be a single layer.
  • the composition of the Ti-based coating layer 15 may be, for example, TiN.
  • the Ti-based coating layer 15 may be a TiN layer.
  • the coating layer 7 is not limited to a specific thickness.
  • the Ti-based coating layer 15 may have an average thickness of 0.1 to 1 ⁇ m
  • the Al 2 O 3 layer 17 may have an average thickness of 1 to 15 ⁇ m.
  • the average thickness of the coating layer 7 may be measured by cross-sectional observation using an electron microscope. Specifically, the average thickness of the coating layer 7 may be a value measured under the conditions that the measurement range is a 40 ⁇ m x 50 ⁇ m range in a micrograph obtained by taking a cross-section perpendicular to the surface 5 of the substrate 3 using an electron microscope at a magnification of 3000 times, the thickness of the measurement object such as the Ti-based coating layer 15 is measured at five measurement points at 5 ⁇ m intervals along a direction perpendicular to the thickness direction of the coating layer 7, and the number of photographed points is three. It is not necessary to measure the average thickness of the coating layer 7 at multiple cross-sections, and it is sufficient to measure it at one cross-section.
  • the coating layer 7 may have, in order from the substrate 3, a Ti-based coating layer 15, a first TiCN layer 25, a second TiCN layer 27, a TiCNO layer 29 (titanium carbonate nitride layer), and an Al2O3 layer 17. In this case, the life of the coated tool 1 is likely to be long.
  • the first TiCN layer 25 may be a so-called MT (moderate temperature)-TiCN layer.
  • the first TiCN layer 25 may have an average thickness of 2 to 15 ⁇ m. In this case, the first TiCN layer 25 has high wear resistance and chipping resistance.
  • the titanium carbonitride crystals contained in the first TiCN layer 25 may be columnar crystals that are elongated in the thickness direction of the coating layer 7.
  • the first TiCN layer 25 may be in contact with the Ti-based coating layer 15.
  • the second TiCN layer 27 may be a so-called HT (high temperature)-TiCN layer.
  • the second TiCN layer 27 may have an average thickness set to 10 to 900 nm.
  • the second TiCN layer 27 may be in contact with the first TiCN layer 25.
  • the TiCNO layer 29 may have an average thickness of 200 to 2000 nm, which is likely to improve adhesion to the Al 2 O 3 layer 17.
  • the TiCNO layer 29 may be in contact with the second TiCN layer 27.
  • the average thickness of the Al 2 O 3 layer 17 may be greater than the average thickness of the TiCNO layer 29.
  • the Al 2 O 3 layer 17 may be in contact with the TiCNO layer 29.
  • the coating layer 7 may further include a TiCN layer located between the Ti-based coating layer 15 and the Al2O3 layer 17.
  • the residual stress of the Al2O3 layer 17 may be 100 to 250 MPa.
  • the residual stress of the TiCN layer may be 150 to 300 MPa. In these cases, the chipping resistance is likely to be improved.
  • the TiCN layer may be a first TiCN layer 25 (MT-TiCN layer).
  • Residual stress may be measured, for example, by the sin2 ⁇ method using an X-ray stress measurement device (X-Ray Diffraction: XRD).
  • the coating layer 7 may be located on the entire surface 5 of the base 3, or on only a portion of the surface 5. In other words, the coating layer 7 may be located on at least a portion of the surface 5 of the base 3 (the portion corresponding to the cutting edge ridge 13 and/or the rake face 9).
  • the coating layer 7 may be formed by a chemical vapor deposition (CVD) method.
  • the coating layer 7 may be a CVD film.
  • the coating layer 7 may be a physical vapor deposition (PVD) film formed by a PVD method.
  • the coated tool 1 may have a through hole 31.
  • the through hole 31 can be used to attach a screw or a clamp member when fixing the coated tool 1 to a holder.
  • the through hole 31 may be formed from the scooping face 9 (upper face) to the face (lower face) located opposite the scooping face 9, and may open in these faces. There is no problem with the through hole 31 being configured to open in opposing areas of the relief face 11 (side face).
  • a substrate When manufacturing a coated tool, a substrate may be prepared first. An example will be described in which a substrate made of a sintered alloy is prepared as the substrate. First, a mixed powder may be obtained by adding metal powder, carbon powder, etc. to inorganic powder such as carbide, nitride, carbonitride, or oxide, which can be fired to form a substrate, and mixing them. Next, this mixed powder may be molded into a desired cutting tool shape by a known molding method such as press molding, casting, extrusion, or cold isostatic pressing. The obtained molded body may then be fired in a vacuum or a non-oxidizing atmosphere to obtain a substrate made of a sintered alloy.
  • a mixed powder may be obtained by adding metal powder, carbon powder, etc. to inorganic powder such as carbide, nitride, carbonitride, or oxide, which can be fired to form a substrate, and mixing them.
  • this mixed powder may be molded into a desired cutting tool shape by a known molding method such as press
  • a coating layer may be formed on the surface of the obtained substrate by a CVD method.
  • the coating layer has, in order from the substrate, a Ti-based coating layer, a first TiCN layer (MT-TiCN layer), a second TiCN layer (HT-TiCN layer), a TiCNO layer, and an Al2O3 layer, and the respective film formation conditions will be described in order.
  • a mixed gas containing 0.5 to 10 volume % titanium tetrachloride (TiCl 4 ) gas, 10 to 60 volume % nitrogen (N 2 ) gas, and the remainder hydrogen (H 2 ) gas may be prepared as the reaction gas composition. Then, this mixed gas may be introduced into the chamber, and the film formation temperature may be set to 800 to 940° C. and the pressure may be set to 8 to 50 kPa to form the TiN layer.
  • the first TiCN layer (MT-TiCN layer) may be formed as follows. First, a mixed gas consisting of 0.5 to 10 volume % titanium tetrachloride (TiCl 4 ) gas, 5 to 60 volume % nitrogen (N 2 ) gas, 0.1 to 3 volume % acetonitrile (CH 3 CN) gas, and the remainder hydrogen (H 2 ) gas may be adjusted as the reaction gas composition. Then, this mixed gas may be introduced into the chamber, the film formation temperature may be set to a relatively low temperature of 780 to 880° C., and the pressure may be set to 5 to 25 kPa, and the first TiCN layer may be formed.
  • a mixed gas consisting of 0.5 to 10 volume % titanium tetrachloride (TiCl 4 ) gas, 5 to 60 volume % nitrogen (N 2 ) gas, 0.1 to 3 volume % acetonitrile (CH 3 CN) gas, and the remainder hydrogen (H 2 ) gas may be adjusted as the reaction gas
  • the average crystal width of the titanium carbonitride columnar crystals constituting the first TiCN layer is likely to be larger on the outermost surface side than on the substrate side.
  • the second TiCN layer (HT-TiCN layer) may be formed as follows. First, a mixed gas consisting of 1 to 4 volume % titanium tetrachloride (TiCl 4 ) gas, 5 to 20 volume % nitrogen (N 2 ) gas, 0.1 to 10 volume % methane (CH 4 ) gas, and the remainder hydrogen (H 2 ) gas may be prepared as a reaction gas composition. Then, this mixed gas may be introduced into a chamber, and the film formation temperature may be set to 900 to 990° C. and the pressure may be set to 5 to 40 kPa to form the second TiCN layer. The second TiCN layer may be formed at a higher temperature than the first TiCN layer.
  • TiCl 4 titanium tetrachloride
  • N 2 nitrogen
  • CH 4 0.1 to 10 volume % methane
  • H 2 hydrogen
  • the TiCNO layer may be formed as follows. First, a mixed gas containing 3 to 15 volume percent titanium tetrachloride (TiCl 4 ) gas, 3 to 50 volume percent nitrogen (N 2 ) gas, 0.5 to 15 volume percent methane (CH 4 ) gas, 0.5 to 10 volume percent carbon monoxide (CO) gas, and the remainder hydrogen (H 2 ) gas may be prepared as the reaction gas composition. Then, this mixed gas may be introduced into a chamber, and the film formation temperature may be set to 900 to 1010° C. and the pressure may be set to 5 to 40 kPa to form the TiCNO layer.
  • TiCl 4 titanium tetrachloride
  • N 2 nitrogen
  • CH 4 methane
  • CO carbon monoxide
  • H 2 hydrogen
  • the Al 2 O 3 layer may be formed as follows. First, a mixed gas may be prepared as a reaction gas composition, which is 3.5 to 15 volume % aluminum trichloride (AlCl 3 ) gas, 0.5 to 2.5 volume % hydrogen chloride (HCl) gas, 0.5 to 5 volume % carbon dioxide (CO 2 ) gas, 0 to 1 volume % hydrogen sulfide (H 2 S) gas, and the remainder hydrogen (H 2 ) gas. Then, this mixed gas may be introduced into a chamber, and the film formation temperature may be set to 900 to 1010°C and the pressure to 5 to 20 kPa to form the Al 2 O 3 layer.
  • AlCl 3 aluminum trichloride
  • HCl hydrogen chloride
  • CO 2 carbon dioxide
  • H 2 S hydrogen sulfide
  • H 2 S hydrogen sulfide
  • a surface treatment may be performed on the cutting edge ridge and/or rake face to form cracks in the coating layer formed, to obtain a coated tool.
  • the surface treatment may include a first treatment and a second treatment.
  • the first treatment uses media having an average particle size of 30 to 70 ⁇ m, and is performed at an air pressure of 0.2 to 0.5 MPa for 1 to 20 s (seconds). This first treatment may be performed as a pretreatment for forming cracks. The first treatment may also be performed for the purpose of relaxing the residual tensile stress of the first TiCN layer (MT-TiCN layer).
  • the average particle size of the media may be a value measured by a laser diffraction method. Examples of the first treatment include treatments 1-1 to 1-3 shown below.
  • the second process is carried out after the first process, using media with an average particle size of 10 ⁇ m or more and less than 50 ⁇ m, and is carried out for 0.1 to 20 s at an air pressure of 0.2 to 0.5 MPa.
  • Examples of the second process include processes 2-1 to 2-3 shown below.
  • the first and second processes exemplified above are carried out in any combination of the following (1) to (5).
  • coated tools are not limited to those manufactured by the above manufacturing method.
  • the cutting tool 101 may include a holder 103 and a coated tool 1, as shown in a non-limiting example in FIG. 5.
  • the holder 103 may extend from a first end 103a toward a second end 103b, and may have a pocket 105 on the side of the first end 103a.
  • the coated tool 1 may be located in the pocket 105.
  • the coated tool 1 has high chipping resistance and defect resistance, enabling stable cutting.
  • the pocket 105 may be a portion in which the coated tool 1 is attached.
  • the pocket 105 may open on the outer peripheral surface of the holder 103 and on the end surface on the side of the first end 103a.
  • the coated tool 1 may be attached to the pocket 105 so that at least a part of the cutting edge ridge 13 protrudes from the holder 103.
  • the coated tool 1 may also be attached to the pocket 105 by a screw 107. That is, the coated tool 1 may be attached to the pocket 105 by inserting the screw 107 into the through hole 31 of the coated tool 1 and inserting the tip of the screw 107 into a screw hole formed in the pocket 105 to fix the screw 107 in the screw hole.
  • the bottom surface of the coated tool 1 may be in direct contact with the pocket 105, or a sheet may be sandwiched between the coated tool 1 and the pocket 105.
  • the material of the holder 103 may be, for example, steel or cast iron. If the material of the holder 103 is steel, the holder 103 has high toughness.
  • a cutting tool 101 used for so-called turning is illustrated.
  • Examples of turning include internal diameter machining, external diameter machining, and groove machining.
  • the cutting tool 101 (coated tool 1) is not limited to use for turning. For example, there is no problem in using the coated tool 1 for the cutting tool 101 used for milling.
  • the area ratio of the cracks on the outermost surface may be 5 to 30%.
  • the cracks may have a depth of 0.3 to 5 ⁇ m.
  • the substrate may be a sintered alloy made of cemented carbide or cermet containing a hard phase and a binder phase.
  • the substrate may be made of a cemented carbide containing a hard phase and a binder phase
  • the hard phase may be made of tungsten carbide or tungsten carbide and at least one cubic crystal structure compound selected from carbides, nitrides, carbonates, oxynitrides of elements in Groups 4, 5 and 6 of the Periodic Table and their mutual solid solutions
  • the binder phase may be mainly composed of cobalt and/or nickel.
  • the coating layer may have, in order from the base, the Ti-based coating layer, a first TiCN layer, a second TiCN layer, a TiCNO layer and the Al 2 O 3 layer.
  • the coating layer may further have a TiCN layer located between the Ti-based coating layer and the Al2O3 layer, the residual stress of the Al2O3 layer may be 100 to 250 MPa, and the residual stress of the TiCN layer may be 150 to 300 MPa.
  • the cutting tool may include a holder extending from a first end toward a second end and having a pocket on the side of the first end, and a coated tool according to any one of (1) to (7) above, located in the pocket.
  • a substrate was prepared. Specifically, 6 mass% of metal cobalt powder with an average particle size of 1.2 ⁇ m, 0.5 mass% of titanium carbide powder with an average particle size of 2 ⁇ m, 5 mass% of niobium carbide powder with an average particle size of 2 ⁇ m, and the remainder of the powder with an average particle size of 1.5 ⁇ m were mixed to obtain a mixed powder. The average particle size of each powder was measured by a microtrack method.
  • the obtained mixed powder was press-molded into a cutting tool shape (CNMG120408) to obtain a molded body.
  • the obtained molded body was then subjected to a binder removal process and then sintered in a non-oxidizing atmosphere to obtain a base body made of cemented carbide.
  • the sintering temperature was set to 1450°C
  • the sintering time was set to 1 hour
  • an argon atmosphere was used as the non-oxidizing atmosphere.
  • the composition of the obtained cemented carbide was measured by EDS. Specifically, cross-sections were observed using an EDS attached to an SEM at a magnification of 5,000 to 20,000 times, and the average value of measurements at five locations was measured. Five elements were selected for measurement using EDS: tungsten carbide, cobalt, titanium, carbon, and nitrogen.
  • the obtained cemented carbide contained a hard phase and a binder phase. More specifically, the obtained cemented carbide contained a hard phase made of WC and a binder phase mainly composed of Co.
  • a Ti-based coating layer was first formed on the surface of the substrate, and then a first TiCN layer (MT-TiCN layer), a second TiCN layer (HT-TiCN layer), a TiCNO layer, and an Al2O3 layer were formed in this order on the Ti-based coating layer.
  • the respective film formation conditions were as follows:
  • Ti-based coating layer A single layer of TiN was formed as the Ti-based coating layer.
  • a mixed gas consisting of 1 volume % titanium tetrachloride (TiCl 4 ) gas, 38 volume % nitrogen (N 2 ) gas, and the remainder hydrogen (H 2 ) gas was prepared as the reaction gas composition. Then, this mixed gas was introduced into the chamber, and the film formation temperature was set to 850° C. and the pressure was set to 16 kPa. The film formation time was set to 180 minutes.
  • a mixed gas was prepared as a reactive gas composition, which consisted of 4 volume % titanium tetrachloride ( TiCl4 ) gas, 20 volume % nitrogen ( N2 ) gas, 8 volume % methane ( CH4 ) gas, 2 volume % carbon monoxide (CO) gas, and the remainder hydrogen ( H2 ) gas.
  • TiCl4 titanium tetrachloride
  • N2 nitrogen
  • CH4 methane
  • CO carbon monoxide
  • H2 hydrogen
  • a mixed gas was prepared as a reaction gas composition, which was composed of 3.7 volume % aluminum trichloride (AlCl 3 ) gas, 0.7 volume % hydrogen chloride (HCl) gas, 4.3 volume % carbon dioxide (CO 2 ) gas, 0.3 volume % hydrogen sulfide (H 2 S) gas, and the remainder hydrogen (H 2 ) gas.
  • AlCl 3 aluminum trichloride
  • HCl 0.7 volume % hydrogen chloride
  • CO 2 carbon dioxide
  • H 2 S hydrogen sulfide
  • this mixed gas was introduced into the chamber, and the film formation temperature was set to 950° C. and the pressure was set to 7.5 kPa.
  • the film formation time was set to 380 minutes.
  • the surface treatment was performed under the following conditions: The conditions for the first process are as follows. (1-1 Processing) Media: Average particle size 50 ⁇ m Air pressure: 0.3MPa Processing time: 10 s (1st-2nd Processing) Media: Average particle size 50 ⁇ m Air pressure: 0.4MPa Processing time: 10 s (1st-3rd Processing) Media: Average particle size 50 ⁇ m Air pressure: 0.5MPa Processing time: 10 s
  • the average particle size of each media was measured using the laser diffraction method.
  • the width of the crack at -0.2 ⁇ m from the outermost surface was measured according to the method exemplified above. Specifically, the outermost surface of the rake face was photographed at 500x magnification using a laser microscope, with a range of 205 ⁇ m x 275 ⁇ m being taken as one field of view. The width of the cracks present in the above-mentioned one field of view was also measured at five measurement points at 0.13 ⁇ m intervals in the direction perpendicular to the direction in which the cracks extended. The average value was then measured under the condition that three photographing points were taken. The measurement results are shown in the "Width ( ⁇ m)" column of "Crack” in Table 1. The laser microscope used was a VK-X1000 manufactured by KEYENCE.
  • the area ratio of cracks on the outermost surface was measured using the method exemplified above. Specifically, a laser microscope was used to measure the height of the outermost surface at 500x magnification over a range of 205 ⁇ m x 275 ⁇ m, and the evaluation was performed based on an image of the surface. In this image, the average value of the height data was set as the reference surface (zero point), and the surface area of the area that was -0.2 ⁇ m or less from the reference surface was defined as S, and the total measured area (the entire area of the above image) was defined as ST. The area ratio was calculated from the formula: (S/ST) x 100. The measurement results are shown in the "Area ratio (%)" column under "Cracks" in Table 1.
  • Samples No. 1 to 5 showed higher chipping resistance and fracture resistance than samples No. 6 to 9.
  • Coated tools were manufactured under the same conditions as samples No. 1 to 9, except that the coating layer on the cutting edge ridge instead of the rake face was subjected to the surface treatment shown in Table 1.
  • the width of the crack at -0.2 ⁇ m from the outermost surface, as well as the depth and area ratio of the crack were measured under the same conditions as samples No. 1 to 9.
  • the cutting edge ridge of each sample had substantially the same measurement results as the rake face.
  • Coated tool 3 Base body 5: Surface 7: Coating layer 9: Rake face (upper surface) 11...Flank face (side) Reference Signs List 13: Cutting edge ridge 15: Ti-based coating layer 17: Al2O3 layer 19 : Outermost surface 21: Crack 23: Region 25: First TiCN layer 27: Second TiCN layer 29: TiCNO layer 31: Through hole 101: Cutting tool 103: Holder 103a: First end 103b: Second end 105: Pocket 107: Screw

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5123934A (en) * 1989-09-04 1992-06-23 Nippon Steel Corporation Ceramics coated cemented-carbide tool with high-fracture resistance
JP2017071045A (ja) * 2016-02-24 2017-04-13 住友電工ハードメタル株式会社 表面被覆切削工具およびその製造方法
JP2017113860A (ja) * 2015-12-25 2017-06-29 三菱マテリアル株式会社 表面被覆切削工具

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5123934A (en) * 1989-09-04 1992-06-23 Nippon Steel Corporation Ceramics coated cemented-carbide tool with high-fracture resistance
JP2017113860A (ja) * 2015-12-25 2017-06-29 三菱マテリアル株式会社 表面被覆切削工具
JP2017071045A (ja) * 2016-02-24 2017-04-13 住友電工ハードメタル株式会社 表面被覆切削工具およびその製造方法

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