WO2024241920A1 - 分析装置、分析装置用プログラム及び分析方法 - Google Patents

分析装置、分析装置用プログラム及び分析方法 Download PDF

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WO2024241920A1
WO2024241920A1 PCT/JP2024/017471 JP2024017471W WO2024241920A1 WO 2024241920 A1 WO2024241920 A1 WO 2024241920A1 JP 2024017471 W JP2024017471 W JP 2024017471W WO 2024241920 A1 WO2024241920 A1 WO 2024241920A1
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acetylene
concentration
laser light
absorption
sample gas
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French (fr)
Japanese (ja)
Inventor
享司 渋谷
翔太 ▲濱▼内
広大 新名
知己 山本
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Horiba Ltd
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Horiba Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers

Definitions

  • the present invention relates to an analytical device used, for example, for analyzing the components of gas.
  • hydrocarbons other than acetylene ( C2H2 ) contained in the process gas become interference components, causing measurement errors in the concentration of acetylene ( C2H2 ) .
  • the absorption spectrum of the interference components overlaps with the absorption peak position of the above-mentioned acetylene ( C2H2 ) , causing errors in the concentration quantification.
  • Patent Document 1 a method for correcting the interference effect of interfering components on the components to be measured is shown in Patent Document 1.
  • the present invention has been made in consideration of the above-mentioned problems, and has as its main object to more effectively reduce the interference effect of hydrocarbons other than acetylene (C 2 H 2 ) on the concentration of acetylene (C 2 H 2 ) in a sample gas, thereby enabling accurate measurement.
  • the analytical device is an analytical device for analyzing acetylene (C 2 H 2 ) in a sample gas containing acetylene (C 2 H 2 ) and at least one type of hydrocarbon other than acetylene (C 2 H 2 ), and is provided with a laser light source for irradiating the sample gas with a laser beam, a photodetector for detecting the intensity of the sample beam of the laser beam transmitted through the sample gas, and a signal processing device for calculating the concentration of acetylene (C 2 H 2 ) based on an output signal from the photodetector, and the signal processing device calculates the acetylene (C 2 H 2 ) concentration based on the absorption of acetylene between 7.56 and 7.66 ⁇ m or between 7.27 and 7.83 ⁇ m.
  • the laser light source emits laser beams having an oscillation wavelength including a wavelength between 7.56 and 7.66 ⁇ m or between 7.27 and 7.83 ⁇ m.
  • Such an analytical device calculates the concentration of acetylene (C 2 H 2 ) based on the absorption of acetylene (C 2 H 2 ) between 7.56 and 7.66 ⁇ m or between 7.27 and 7.83 ⁇ m, so that it is possible to reduce the influence of interference from at least one type of hydrocarbon other than acetylene (C 2 H 2 ), thereby improving the measurement accuracy of the concentration of acetylene (C 2 H 2 ) in the sample gas.
  • the analytical device In order to make the effect of the present invention prominent, it is desirable for the analytical device to be used in an industrial process in which acetylene (C 2 H 2 ) is used or generated, or in a process in which the concentration of acetylene (C 2 H 2 ) is controlled.
  • hydrocarbon other than acetylene (C 2 H 2 ) include at least one of methane (CH 4 ), ethylene (C 2 H 4 ) and ethane (C 2 H 6 ).
  • the absorption intensities of methane (CH 4 ), ethylene (C 2 H 4 ), and/or ethane (C 2 H 6 ) are smaller, and the influence of interference therebetween is smaller, so that the measurement accuracy of the concentration of acetylene (C 2 H 2 ) in a sample gas containing at least one of methane (CH 4 ), ethylene (C 2 H 4 ), and ethane (C 2 H 6 ) can be improved.
  • the signal processing device has a function of correcting the interference effect of at least one type of hydrocarbon other than acetylene (C 2 H 2 ) when calculating the concentration of acetylene (C 2 H 2 ).
  • Acetylene (C 2 H 2 ) has the strongest absorption line in the wavelength range of 3.0 to 3.1 ⁇ m, but this wavelength range is difficult to achieve with a quantum cascade laser (QCL).
  • QCL quantum cascade laser
  • the wavelength range of 3.0 to 3.1 ⁇ m can be measured by using an interband cascade laser (ICL).
  • wavelengths between 7.56 and 7.66 ⁇ m can be realized by quantum cascade lasers, and have the second strongest absorption line after the wavelength band of 3.0 to 3.1 ⁇ m. More preferably, the strongest absorption line in this wavelength band is at 7.5966 ⁇ m, 7.6233 ⁇ m, or 7.6501 ⁇ m, and the absorption intensity of the interference components methane (CH 4 ), ethylene (C 2 H 4 ), and/or ethane (C 2 H 6 ) in the sample gas is relatively small, and their interference effects are small.
  • the wavelengths between 7.56 and 7.66 ⁇ m, preferably between 7.566 and 7.634 ⁇ m, more preferably 7.5698 ⁇ m, 7.6231 ⁇ m or 7.6367 ⁇ m have smaller absorption intensities than the above-mentioned wavelengths of 7.5966 ⁇ m, 7.6233 ⁇ m or 7.6501 ⁇ m, but the absorption intensities of methane (CH 4 ), ethylene (C 2 H 4 ) and/or ethane (C 2 H 6 ) are smaller, and the interference effects thereof are smaller.
  • the analytical apparatus of the present invention preferably irradiates the sample gas with laser light from one of the laser light sources, and the signal processing device preferably calculates the concentration of acetylene (C 2 H 2 ) and the concentration of at least one type of hydrocarbon other than acetylene.
  • the concentration is calculated based on the absorption of acetylene (C 2 H 2 ) between 7.27 and 7.59 ⁇ m or between 7.64 and 7.83 ⁇ m.
  • the laser light source emits laser light having an oscillation wavelength including a wavelength between 7.27 and 7.59 ⁇ m or between 7.64 and 7.83 ⁇ m.
  • the concentration of methane (CH 4 ) is calculated based on the absorption of acetylene (C 2 H 2 ) between 7.378 and 7.638 ⁇ m, between 7.378 and 7.603 ⁇ m, and between 7.629 and 7.683 ⁇ m. More preferably, the concentration of methane (CH 4 ) is calculated based on the absorption of acetylene (C 2 H 2 ) at wavelengths of 7.5966 ⁇ m, 7.6501 ⁇ m, 7.5698 ⁇ m, and 7.6367 ⁇ m.
  • the laser light source it is desirable to use a quantum cascade laser that oscillates laser light in the mid-infrared region where acetylene (C 2 H 2 ) shows strong absorption.
  • the program for an analytical device is a program used in an analytical device that analyzes acetylene (C 2 H 2 ) in a sample gas containing acetylene (C 2 H 2 ) and at least one type of hydrocarbon other than acetylene (C 2 H 2 ), and the analytical device is equipped with a laser light source that irradiates laser light onto the sample gas, a photodetector that detects the intensity of sample light of the laser light that has passed through the sample gas, and a signal processing device that calculates the concentration of acetylene (C 2 H 2 ) based on the output signal of the photodetector, and is characterized in that the signal processing device has a function of calculating the concentration of acetylene (C 2 H 2 ) based on the absorption of acetylene (C 2 H 2 ) between 7.56 and 7.66 ⁇ m or between 7.27 and 7.83 ⁇ m.
  • the analytical method according to the present invention is an analytical method for analyzing acetylene (C 2 H 2 ) in a sample gas containing acetylene (C 2 H 2 ) and at least one type of hydrocarbon other than acetylene (C 2 H 2 ), which is characterized in that it irradiates the sample with laser light from a laser light source, detects the intensity of the sample light of the laser light that has passed through the sample with a photodetector, and calculates the concentration of acetylene (C 2 H 2 ) based on the absorption of acetylene (C 2 H 2 ) between 7.56 and 7.66 ⁇ m or between 7.27 and 7.83 ⁇ m based on the output signal from the photodetector.
  • the interference effect of at least one type of hydrocarbon other than acetylene (C 2 H 2 ) on the concentration of acetylene (C 2 H 2 ) in a sample gas can be more effectively reduced, enabling accurate measurement.
  • FIG. 1 is an overall schematic diagram of an analysis device according to an embodiment of the present invention
  • FIG. 2A is a diagram showing the drive current (voltage) and modulation signal in quasi-continuous oscillation
  • FIG. 2B is a diagram showing the oscillation wavelength
  • 5A to 5C are schematic diagrams showing a method of modulating a laser oscillation wavelength in the embodiment.
  • the analytical device 100 of this embodiment is used in industrial processes in which acetylene (C 2 H 2 ) is used or generated, such as petrochemical processes and carburization processes, or other processes in which the concentration of acetylene (C 2 H 2 ) is controlled.
  • the analytical device 100 measures the concentration of acetylene (C 2 H 2 ) in a process gas introduced or discharged to various devices 200 (hereinafter, process device 200) that perform process treatment in an industrial process.
  • the analytical device 100 is configured to measure the concentration of acetylene (C 2 H 2 ) in a process gas discharged from the process device 200, but the analytical device 100 may also measure the concentration of acetylene (C 2 H 2 ) in a process gas introduced into the process device 200.
  • the analytical device 100 may also measure the concentration of acetylene (C 2 H 2 ) in a process gas in the process device 200.
  • the process device 200 may be, for example, an ethylene generating device in a petrochemical process, or a gas carburizing furnace in a carburizing process.
  • the analytical device 100 includes a measurement cell 1 into which a sample gas, which is a process gas, is introduced, a laser light source 2 which irradiates the sample gas in the measurement cell 1 with laser light which is a reference light, a photodetector 3 which detects the intensity of the sample light which has passed through the sample gas in the measurement cell 1, and a signal processing device which receives an output signal from the photodetector 3 and calculates the concentration of acetylene (C 2 H 2 ) based on the value.
  • a sample gas which is a process gas
  • a laser light source 2 which irradiates the sample gas in the measurement cell 1 with laser light which is a reference light
  • a photodetector 3 which detects the intensity of the sample light which has passed through the sample gas in the measurement cell 1
  • a signal processing device which receives an output signal from the photodetector 3 and calculates the concentration of acetylene (C 2 H 2 ) based on the value.
  • the measurement cell 1 has a light inlet and an outlet formed of a transparent material such as quartz, calcium fluoride, barium fluoride, etc., which has almost no light absorption in the absorption wavelength band of the component to be measured.
  • the measurement cell 1 is provided with an inlet port for introducing gas into the inside and an outlet port for discharging the gas inside. The sample gas is introduced into the measurement cell 1 from the inlet port.
  • the laser light source 2 is a quantum cascade laser (QCL), a type of semiconductor laser, and emits mid-infrared (4 to 12 ⁇ m) laser light.
  • This laser light source 2 is capable of modulating (changing) the oscillation wavelength with a given current (or voltage). Note that other types of lasers may be used as long as the oscillation wavelength is variable, and the temperature may be changed to change the oscillation wavelength.
  • the laser light source 2 may be an interband cascade laser (ICL), a type of semiconductor laser, that emits mid-infrared (3 to 6 ⁇ m) laser light.
  • ICL interband cascade laser
  • the photodetector 3 is a quantum photoelectric element such as HgCdTe, InGaAs, InAsSb, or PbSe, which has good response.
  • a relatively inexpensive thermal type such as a thermopile may also be used as the photodetector 3.
  • the signal processing device 4 comprises an analog electric circuit consisting of a buffer, an amplifier, etc., a digital electric circuit consisting of a CPU, a memory, etc., and at least one of an AD converter, a DA converter, etc., which mediate between the analog/digital electric circuits.
  • the signal processing device 4 functions as a control unit 5 for controlling the laser light source 2 and a signal processing unit 6 for receiving an output signal from the photodetector 3 and processing the value to calculate the concentration of acetylene (C 2 H 2 ) as shown in Fig. 1, with the CPU and its peripheral devices working together in accordance with a predetermined program stored in a predetermined area of the memory.
  • the control unit 5 has a light source control unit 51 that controls the oscillation and modulation width of the laser light source 2. Note that the control unit 5 has a function of controlling each unit of the analysis device 100 in addition to the light source control unit 51.
  • the light source control unit 51 controls the current source (or voltage source) that drives the laser light source 2 by outputting a current (or voltage) control signal. Specifically, as shown in FIG. 2(a), the light source control unit 51 changes the drive current (or drive voltage) that provides wavelength modulation at a predetermined frequency, separate from the drive current (or drive voltage) that causes the laser light source 2 to oscillate in a pulsed manner, and modulates the oscillation wavelength of the laser light output from the laser light source 2 at a predetermined frequency relative to the center wavelength. This causes the laser light source 2 to emit modulated light modulated at a predetermined modulation frequency.
  • the light source control unit 51 changes the drive current to a triangular wave shape, and modulates the oscillation wavelength to a triangular wave shape (see “(b) Oscillation Wavelength” in FIG. 2).
  • the drive current is modulated with another function so that the oscillation wavelength becomes triangular.
  • the oscillation wavelength of the laser light is modulated with the peak of the optical absorption spectrum of acetylene (C 2 H 2 ) as the center wavelength.
  • the light source control unit 51 may change the drive current to a sine wave shape, a sawtooth wave shape, or an arbitrary function shape, and modulate the oscillation wavelength to a sine wave shape, a sawtooth wave shape, or an arbitrary function shape.
  • the light source control unit 51 modulates the wavelength modulation range of the laser light to include wavelengths between 7.56 and 7.66 ⁇ m, between 7.27 and 7.83 ⁇ m, between 7.24 and 7.27 ⁇ m, or between 7.25 and 7.83 ⁇ m. Specifically, the light source control unit 51 modulates the wavelength modulation range of the laser light to include wavelengths between 7.378 and 7.638 ⁇ m, between 7.378 and 7.603 ⁇ m, between 7.378 and 7.420 ⁇ m, between 7.430 and 7.603 ⁇ m, between 7.430 and 7.638 ⁇ m, between 7.629 and 7.683 ⁇ m, or between 7.594 and 7.651 ⁇ m.
  • the light source control unit 51 modulates the wavelength modulation range of the laser light to include wavelengths of 7.5966 ⁇ m, 7.6233 ⁇ m, or 7.6501 ⁇ m.
  • modulating in this manner it is possible to reduce the interference effect of methane (CH 4 ), ethylene (C 2 H 4 ), and/or ethane (C 2 H 6 ), and to improve the measurement accuracy of the concentration of acetylene (C 2 H 2 ) in the sample gas containing methane (CH 4 ), ethylene (C 2 H 4 ), and/or ethane (C 2 H 6 ).
  • the light source control unit 51 can also modulate the wavelength modulation range of the laser light so that it preferably includes a wavelength between 7.566 and 7.634 ⁇ m, more preferably includes a wavelength of 7.5698 ⁇ m, 7.6231 ⁇ m, or 7.6367 ⁇ m.
  • the interference effect of methane (CH 4 ), ethylene (C 2 H 4 ), and/or ethane (C 2 H 6 ) can be reduced, and the measurement accuracy of the concentration of acetylene (C 2 H 2 ) in the sample gas containing methane (CH 4 ), ethylene (C 2 H 4 ), and/or ethane (C 2 H 6 ) can be improved.
  • the light source control unit 51 can also modulate the wavelength modulation range of the laser light so that it preferably includes a wavelength between 7.810 and 7.822 ⁇ m, more preferably includes a wavelength of 7.8217 ⁇ m.
  • the signal processing unit 6 calculates the concentration of acetylene (C 2 H 2 ) by using the light intensity signal, which is the output signal of the photodetector 3.
  • the signal processing unit 6 of this embodiment has a function of correcting the influence of interference from at least one type of hydrocarbon other than acetylene (C 2 H 2 ) (methane (CH 4 ), ethylene (C 2 H 4 ) and/or ethane (C 2 H 6 )) when calculating the concentration of acetylene (C 2 H 2 ).
  • examples of a method for calculating the concentration of acetylene (C 2 H 2 ) while correcting the interference effect of at least one type of hydrocarbon other than acetylene (C 2 H 2 ) include the following (1) or (2).
  • An absorption spectrum is obtained from the light intensity signal of the photodetector 3, and the concentration of acetylene (C 2 H 2 ) is calculated by performing spectral calculation processing such as spectral fitting, baseline estimation, and multivariate analysis on the absorption spectrum.
  • the concentration of acetylene (C 2 H 2 ) in the sample gas is calculated by the least squares method or the like using a feature amount extracted from the light intensity signal of the photodetector 3 or an intensity-related signal such as an absorption spectrum obtained from the light intensity signal.
  • This method uses, for example, an infrared laser absorption modulation method (see Japanese Patent No. 6886507), and uses a correlation value between an intensity-related signal related to the intensity of sample light and a plurality of predetermined feature signals as a feature amount.
  • a function based on a sine function, a function based on a Lorentz function, a function based on a Voigt function, or a function based on a Gaussian function can be used.
  • the concentration of acetylene (C 2 H 2 ) in the sample gas is calculated using a feature amount (correlation value) per unit concentration extracted from an intensity-related signal when acetylene (C 2 H 2 ) exists alone, a feature amount (correlation value) per unit concentration when an interference component (e.g., methane ( CH 4 ) ) exists alone, and a feature amount (correlation value) extracted from an intensity-related signal of the sample gas.
  • the signal processing unit 6 calculates the concentration based on the absorption of acetylene (C 2 H 2 ) between 7.56 and 7.66 ⁇ m or between 7.27 and 7.83 ⁇ m. Specifically, the signal processing unit 6 calculates the concentration based on the absorption of acetylene (C 2 H 2 ) between 7.378 and 7.638 ⁇ m, between 7.378 and 7.603 ⁇ m, between 7.629 and 7.683 ⁇ m, between 7.594 and 7.651 ⁇ m, between 7.566 and 7.634 ⁇ m, or between 7.810 and 7.822 ⁇ m.
  • the signal processing unit 6 calculates the concentration based on the absorption of acetylene at 7.5966 ⁇ m, 7.6233 ⁇ m, 7.6501 ⁇ m, 7.5698 ⁇ m, 7.6367 ⁇ m, 7.6231 ⁇ m, or 7.8217 ⁇ m.
  • the concentration of acetylene (C 2 H 2 ) is calculated based on the absorption of acetylene (C 2 H 2 ) between 7.56 and 7.66 ⁇ m or between 7.27 and 7.83 ⁇ m, so that the influence of interference from at least one type of hydrocarbon other than acetylene (C 2 H 2 ) can be reduced, and as a result, the measurement accuracy of the concentration of acetylene (C 2 H 2 ) in the sample gas can be improved.
  • the light source control unit 51 modulates the wavelength modulation range of the laser light so that it includes wavelengths between 7.27 and 7.59 ⁇ m, or between 7.64 and 7.83 ⁇ m. Specifically, the light source control unit 51 modulates the wavelength modulation range of the laser light so that it includes wavelengths between 7.378 and 7.638 ⁇ m, between 7.378 and 7.603 ⁇ m, between 7.629 and 7.683 ⁇ m, and more preferably wavelengths of 7.5966 ⁇ m, 7.6501 ⁇ m, 7.5698 ⁇ m, and 7.6367 ⁇ m. By modulating in this manner, acetylene (C 2 H 2 ) and methane (CH 4 ) can be measured simultaneously. With this configuration, the analysis device 100 can simultaneously measure acetylene (C 2 H 2 ) and methane (CH 4 ) using one laser light source 2.
  • the analysis device 100 can simultaneously measure acetylene (C 2 H 2 ) and methane (CH 4 ) using one laser light source 2.
  • a configuration may be adopted in which a plurality of laser light sources 2 are used to simultaneously measure the concentrations of acetylene (C 2 H 2 ) and at least one type of hydrocarbon other than acetylene (C 2 H 2 ).
  • the concentration is calculated based on the absorption of methane ( CH4 ) between 8.10 and 8.14 ⁇ m.
  • the laser light source emits laser light with an oscillation wavelength that includes the wavelength between 8.10 and 8.14 ⁇ m.
  • the concentration is calculated based on the absorption of methane ( CH4 ) between 8.10 and 8.13 ⁇ m.
  • the laser light source emits laser light having an oscillation wavelength including a wavelength between 8.10 and 8.13 ⁇ m.
  • the concentration is calculated based on the absorption of methane ( CH4 ) between 7.50 and 7.54 ⁇ m.
  • the laser light source emits laser light having an oscillation wavelength that includes the wavelength between 7.50 and 7.54 ⁇ m.
  • the laser light source emits laser light having an oscillation wavelength that includes the wavelength between 7.50 and 7.54 ⁇ m.
  • the laser light source emits laser light having an oscillation wavelength that includes the wavelength between 7.50 and 7.54 ⁇ m.
  • the laser light source emits laser light having an oscillation wavelength that includes the wavelength between 7.50 and 7.54 ⁇ m.
  • the absorption intensity of acetylene (C 2 H 2 ) which is an interfering component in combustion gas in this wavelength region, is small, and the influence of interference is small.
  • the wavelength between 7.50 and 7.54 ⁇ m, preferably between 7.535 and 7.536 ⁇ m, and more preferably 7.5354 ⁇ m, has an absorption intensity of methane (CH 4 ) almost equivalent to that of the above-mentioned wavelength of 7.5035 ⁇ m, and has a smaller absorption intensity of acetylene (C 2 H 2 ), which is an interference component in the process gas in this wavelength region, and the interference effect between them is smaller.
  • the measurement accuracy of the concentration of methane (CH 4 ) can be improved.
  • the concentration is calculated based on the absorption of ethylene (C 2 H 4 ) between 8.46 and 8.60 ⁇ m.
  • the laser light source emits laser light having an oscillation wavelength including a wavelength between 8.46 and 8.60 ⁇ m.
  • the concentration is calculated based on the absorption of ethane (C 2 H 6 ) between 6.13 and 6.14 ⁇ m or between 6.09 and 6.45 ⁇ m.
  • the laser light source emits laser light having an oscillation wavelength including a wavelength between 6.13 and 6.14 ⁇ m or between 6.09 and 6.45 ⁇ m. Note that when measuring the concentration of ethane (C 2 H 6 ) having a high concentration of 1% or more and 3% or less, it is desirable to calculate the concentration based on the absorption of ethane (C 2 H 6 ) between 6.09 and 6.45 ⁇ m.
  • the concentration is calculated based on the absorption of ethane (C 2 H 6 ) between 3.33 and 3.36 ⁇ m.
  • the laser light source emits laser light having an oscillation wavelength that includes the wavelength between 3.33 and 3.36 ⁇ m.
  • the analytical device of the above embodiment may also use an infrared absorption method, such as a detector using non-dispersive infrared absorption (NDIR) or a detector using Fourier transform infrared spectroscopy (FTIR).
  • NDIR non-dispersive infrared absorption
  • FTIR Fourier transform infrared spectroscopy
  • the light source may be any type of laser other than a semiconductor laser, and any light source may be used as long as it is a single-wavelength light source with a half-width sufficient to ensure measurement accuracy and can be wavelength-modulated.
  • the interference effect of hydrocarbons other than acetylene (C 2 H 2 ) on the concentration of acetylene (C 2 H 2 ) in a sample gas can be more effectively reduced, enabling accurate measurement.
  • Analytical device 1 Measurement cell 2: Laser light source 3: Photodetector 4: Signal processing device

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PCT/JP2024/017471 2023-05-19 2024-05-10 分析装置、分析装置用プログラム及び分析方法 Ceased WO2024241920A1 (ja)

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CN120330655A (zh) * 2025-06-20 2025-07-18 法垄热工技术(上海)有限公司 引入气体调节干涉图像系统的工件渗碳工艺
CN120330655B (zh) * 2025-06-20 2025-08-22 法垄热工技术(上海)有限公司 引入气体调节干涉图像系统的工件渗碳工艺

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