WO2024122138A1 - Système de véhicule de transport - Google Patents

Système de véhicule de transport Download PDF

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Publication number
WO2024122138A1
WO2024122138A1 PCT/JP2023/032503 JP2023032503W WO2024122138A1 WO 2024122138 A1 WO2024122138 A1 WO 2024122138A1 JP 2023032503 W JP2023032503 W JP 2023032503W WO 2024122138 A1 WO2024122138 A1 WO 2024122138A1
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WO
WIPO (PCT)
Prior art keywords
track
transport vehicle
transport
transported object
placement location
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Application number
PCT/JP2023/032503
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English (en)
Japanese (ja)
Inventor
陽一 本告
Original Assignee
村田機械株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 村田機械株式会社 filed Critical 村田機械株式会社
Publication of WO2024122138A1 publication Critical patent/WO2024122138A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical

Definitions

  • the present invention relates to a transport vehicle system.
  • Patent Document 1 discloses a technology in which an overhead transport vehicle travels in the same direction on two tracks aligned vertically. Patent Document 1 discloses that by using two tracks, congestion of overhead transport vehicles can be suppressed.
  • the present invention provides a transport vehicle system that can improve the efficiency of transporting transported objects.
  • the transport vehicle system has a first track that is provided so that a placement location for the transported object is located below, a second track that is provided so that the placement location is located below, a plurality of transport vehicles that travel along the first track and the second track and transport the transported object, and a controller that controls the operation of each of the plurality of transport vehicles, and the transport vehicles have a gripping section that grips the transported object, a movement mechanism that moves the gripping section to just above the placement location, and a lifting mechanism that raises and lowers the gripping section located just above the placement location relative to the placement location, and the transport vehicles that are present at a transfer position on the first track for transferring the transported object to a specific placement location and the transport vehicles that are present at a transfer position on the second track for transferring the transported object to a specific placement location travel in different directions, and the orientation of the transported object gripped by each transport vehicle is the same.
  • each transport vehicle present at a transfer position on each track for transferring the transported object to a specific loading location has a different running direction, and the orientation of the transported object held by each transport vehicle is the same, so that the transported object can be loaded onto the loading location in the same orientation from either track, and by selectively using the first track and the second track, the transport distance can be shortened and the transport efficiency of the transported object can be improved.
  • the multiple transport vehicles may travel forward on one of the first track and the second track, and reverse on the other track.
  • transport vehicles having the same structure can be used on each track.
  • the second track may be provided below the first track.
  • the layout of the transport vehicle system can be space-saving.
  • the first track and the second track are connected to each other, and an access track along which the transport vehicles travel may be provided, and the transport vehicles may switch between traveling forward and traveling reverse on a switching track included in the access track.
  • transport vehicles that arrive at the destination faster can be used while balancing the number of transport vehicles between the first track and the second track.
  • the switching track may have a length that allows two or more transport vehicles to enter at once, and the controller may cause two or more transport vehicles to enter the switching track from one of the first track and the second track, and cause the transport vehicles that entered the switching track last to exit to the other track in order. According to this aspect, it is possible to realize the movement of transport vehicles between the first track and the second track in a shorter time.
  • FIG. 1 is a plan view showing a configuration example of a guided vehicle system according to an embodiment.
  • FIG. 2 is a front view showing a configuration example of a transport vehicle according to an embodiment.
  • 5A and 5B are diagrams illustrating the orientation of an object transported by a transport vehicle according to the embodiment.
  • FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment.
  • FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment.
  • FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment.
  • FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment.
  • FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment.
  • FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment.
  • FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment.
  • FIG. 13 is a diagram illustrating an example of a switching trajectory according to the embodiment.
  • FIG. 2 is a front view showing an example of the configuration of a track and a transport vehicle according to the embodiment.
  • FIG. 2 is a front view showing an example of the configuration of a track and a transport vehicle according to the embodiment.
  • 5A to 5C are diagrams illustrating an example of transfer of a transported object according to the embodiment.
  • the transport vehicle system 1 is a plan view showing an example of the configuration of a transport vehicle system according to an embodiment.
  • the transport vehicle system 1 has a first track 10A, a second track 10B, a plurality of transport vehicles 20A, a plurality of transport vehicles 20B, a plurality of storage shelves 40, and a controller 50.
  • the transport vehicle system 1 is a system arranged in a manufacturing factory for semiconductor devices or the like.
  • the transport vehicles 20A and 20B are not distinguished from each other, they are simply referred to as "track 10".
  • transport vehicles 20A and 20B are not distinguished from each other, they are simply referred to as "transport vehicles 20".
  • the transport vehicle 20 traveling on the first track 10A is referred to as transport vehicle 20A
  • the transport vehicle 20 traveling on the second track 10B is referred to as transport vehicle 20B.
  • the track 10 is the travel area of the transport vehicle 20, and is, for example, a travel rail provided on the ceiling of a clean room, etc., and is provided adjacent to the processing device 100 (equipment port 101) and storage shelf 40.
  • the first track 10A and the second track 10B are provided so that the placement location of the transported object 90 (e.g., storage shelf 40, equipment port 101) is located below.
  • the track 10 provided higher is the first track 10A
  • the second track 10B is provided below the first track 10A.
  • the first track 10A and the second track 10B are provided in a position where they overlap in a plan view.
  • the first track 10A (solid line) and the second track 10B (dashed line) are illustrated shifted.
  • the transport vehicle 20 is a ceiling transport vehicle that travels along the track 10 based on commands from the controller 50 and transports transported objects 90 (e.g., containers, objects), such as FOUPs that contain semiconductor wafers used in the manufacture of semiconductor devices, or reticle pods that contain processing materials such as reticles.
  • the transport vehicle 20 travels along the track 10 while suspended from the track 10.
  • the transport vehicle 20 transmits its own status information to the controller 50 as appropriate.
  • the status information includes information on the current position, destination, running status, and status of the transported object 90, along with transport vehicle identification information that identifies the transport vehicle 20.
  • the running status is information indicating the current speed of the transport vehicle 20.
  • the status of the transported object 90 is information indicating the presence or absence, type, etc.
  • the controller 50 outputs commands to the transport vehicle 20 based on the status information from the transport vehicle 20.
  • the multiple transport vehicles 20 travel forward on one of the first track 10A and the second track 10B, and travel backward on the other.
  • the transport vehicle 20 has a forward and backward direction, and in FIG. 1 and other figures, the forward direction of the transport vehicle 20 is represented by a tapered tip.
  • the transport vehicle 20A travels forward (solid arrow in the figure), and the transport vehicle 20B travels backward (dashed arrow in the figure).
  • the storage shelf 40 is one of the locations where the transported object 90 transported by the transport vehicle 20 is placed, and stores the transported object 90 transported by the transport vehicle 20.
  • the controller 50 controls the operation of each of the transport vehicles 20. Specifically, the controller 50 controls the operation of the transport vehicles 20 in units of one or more islands (three islands in FIG. 1) based on instructions from a higher-level controller (not shown). For example, the higher-level controller issues the source (from) and destination (to) to the controller 50, and also determines whether the first track 10A or the second track 10B will be used. The controller 50 receives information on the source and destination from the higher-level controller, and information indicating whether the first track 10A or the second track 10B will be used.
  • the controller 50 based on the status of the track 10 (e.g., congestion, availability) and status information of the transport vehicles 20, the controller 50 identifies the transport vehicle 20 that will arrive faster from the source to the destination, and outputs a transport command to the identified transport vehicle 20.
  • the transport vehicle 20 that will arrive faster from the source to the destination, and outputs a transport command to the identified transport vehicle 20.
  • the processing device 100 is, for example, an exposure device, a coater developer, a film forming device, or an etching device, and performs various processes on the semiconductor wafers in the transported object 90 transported by the transport vehicle 20.
  • the equipment port 101 is one of the locations where the transported object 90 transported by the transport vehicle 20 is placed. For example, when the transported object 90 placed in the equipment port 101 is transferred to the processing device 100, the processing device 100 performs various processes on the semiconductor wafers contained therein. The transported object 90 is processed into a semiconductor wafer by the processing device 100 and then transferred to the equipment port 101.
  • FIG. 2 is a front view showing an example of the configuration of a transport vehicle according to an embodiment.
  • the transport vehicle 20 has a gripping unit 21, a lifting mechanism 22, and a moving mechanism 23.
  • the gripping unit 21 grips the transported object 90.
  • the gripping unit 21 is a device that grips and releases the flange portion 91 of the transported object 90.
  • the gripping unit 21 grips the flange portion 91 of the transported object 90 when the transport vehicle 20 retrieves the transported object 90 from a placement location such as the storage shelf 40 or the equipment port 101.
  • the gripping unit 21 releases the flange portion 91 of the transported object 90 when the transport vehicle 20 places the transported object 90 on a placement location such as the storage shelf 40 or the equipment port 101.
  • the moving mechanism 23 moves the gripping unit 21 to a position directly above the placement location.
  • the lifting mechanism 22 raises and lowers the gripping unit 21, which is located directly above the placement location, relative to the placement location.
  • the moving mechanism 23 is a device that moves the gripping unit 21 and the lifting mechanism 22 to both sides from the transport vehicle 20.
  • the moving mechanism 23 places the transported object 90 on a placement location such as a storage shelf 40 or an equipment port 101, or moves the gripping unit 21 and the lifting mechanism 22 to a position directly above a placement location where the transported object 90 can be retrieved from the placement location.
  • the lifting mechanism 22 is a device that raises and lowers the gripping unit 21 in the vertical direction.
  • the lifting mechanism 22 has a hoisting mechanism 22a and a belt 22b.
  • the hoisting mechanism 22a is held by the moving mechanism 23 and can vertically wind up and down the belt 22b.
  • the belt 22b hangs down from the winding mechanism 22a and holds the gripping part 21 at its lower end.
  • the lifting mechanism 22 can wind up and wind down the transported object 90 gripped by the gripping part 21 at least a distance to a placement location such as the storage shelf 40 or the equipment port 101.
  • the transport vehicle 20 can place the transported object 90 at a placement location by operating the moving mechanism 23 and the lifting mechanism 22, and release the flange portion 91 gripped by the gripping portion 21, and can retrieve the transported object 90 from the placement location by having the gripping portion 21 grip the flange portion 91.
  • both transport vehicles 20A and 20B can place the transported object 90 at a placement location such as the storage shelf 40 or equipment port 101, or retrieve it from the placement location.
  • FIG. 3 is a diagram for explaining the orientation of the transported object transported by the transport vehicle according to the embodiment.
  • the transport vehicle 20A present at the transfer position for transferring the transported object 90 to a specific placement location on the first track 10A and the transport vehicle 20B present at the transfer position for transferring the transported object 90 to a specific placement location on the second track 10B have different running directions, and the orientation of the transported object 90 held by each transport vehicle 20 is the same.
  • the transport vehicle 20A travels forward (solid arrow in the figure), and the transport vehicle 20B travels backward (dashed arrow in the figure).
  • the transported object 90 When the transported object 90 is placed on a placement location such as the storage shelf 40 or the equipment port 101, it is preferable that the transported object 90 is placed in the same orientation. Specifically, when the semiconductor wafer is processed by the processing device 100, it is assumed that the wafer is placed in a specific orientation. If the wafer is not placed in the specific orientation when the wafer is processed, the processing result will be different from the expected result. If the transported object 90 is not placed in the specified orientation, a mechanism is required to rotate it to the specified orientation. For this reason, the present embodiment is configured so that a mechanism for rotating the transported object 90 is not required.
  • the transport vehicle 20 is moved forward on one of the first track 10A and the second track 10B, and backward on the other, thereby improving the transport efficiency of the transported object 90.
  • the transport time does not differ significantly regardless of which track 10 is used (in detail, it takes more time to use the track 10 installed above, because the distance to raise and lower the transported object 90 is longer).
  • each transport vehicle 20 is moved forward and the transport vehicle 20B is moved backward, and each transport vehicle 20 is at a transfer position for transferring the transported object 90 to a specific placement location (the same placement location), the orientation of the transported object 90 held by each transport vehicle 20 is the same, so the transport time can be shortened.
  • the transport time is shortened if the transported object 90 is transported by the transport vehicle 20A.
  • the transport time is shortened if the transported object 90 is transported by the transport vehicle 20B. In this way, by having one of the transport vehicles 20 traveling on each track 10 travel forward and the other travel backward, the transport efficiency of the transported object 90 is improved.
  • the transport vehicle 20 may be able to travel between the first track 10A and the second track 10B.
  • the transport vehicle 20 When the transport vehicle 20 travels between the first track 10A and the second track 10B, it switches between forward travel and reverse travel in order not to use a mechanism for rotating the transported object 90 and to improve transport efficiency.
  • Figures 4A to 4E are diagrams for explaining an example of travel between tracks by the transport vehicle according to the embodiment.
  • the transport vehicle system 1 has an access track 15 that connects the first track 10A and the second track 10B and on which the transport vehicle 20 travels.
  • the transport vehicle 20 switches between forward travel and reverse travel on a switching track 15a included in the access track 15.
  • the transport vehicle 20 switches between forward travel and reverse travel by running by switchback on the switching track 15a, which is part of the access track 15.
  • the transport vehicle 20 (transport vehicle 20A traveling forward on the first track 10A) enters the access track 15. Then, as shown in Figure 4C, when the transport vehicle 20 travels to the switching track 15a, it switches from traveling forward to traveling backward. Thereafter, as shown in Figures 4D and 4E, the transport vehicle 20 travels backward on the access track 15, and travels backward on the second track 10B as transport vehicle 20B. In this way, the transport vehicle 20 switches between traveling forward and traveling backward on the access track 15 (switching track 15a) connecting the first track 10A and the second track 10B, thereby ensuring improved transport efficiency without using a mechanism to rotate the transported object 90.
  • 4A to 4E show an example of the transport vehicle 20 moving from the first track 10A to the second track 10B, but when moving from the second track 10B to the first track 10A, the vehicle also switches back from traveling backward to traveling forward.
  • the access track 15 provided for moving from the first track 10A to the second track 10B and the access track 15 provided for moving from the second track 10B to the first track 10A are provided in different locations and are not used together.
  • the transport vehicle 20 may select a route that avoids unavailable tracks 10 or congested tracks 10 and arrives at the destination faster than the travel route that passes through these tracks 10.
  • the switching track 15a may have a length that allows two or more transport vehicles 20 to enter at once.
  • the controller 50 causes two or more transport vehicles 20 to enter the switching track 15a from one of the tracks 10, the first track 10A and the second track 10B, and causes the transport vehicles 20 that entered the switching track 15a later to exit to the other track 10 in order.
  • FIG. 5 is a diagram showing an example of a switching track according to the embodiment.
  • the switching track 15a has a length that allows two or more transport vehicles 20A to enter at once from the first track 10A.
  • the controller 50 causes two or more transport vehicles 20A to enter the switching track 15a from the first track 10A, and causes the transport vehicles 20A that entered the switching track 15a later to exit to the second track 10B in order.
  • the transport vehicle system 1 by allowing two or more transport vehicles 20 to enter the switching track 15a at once, congestion on the track 10 can be suppressed, and the efficiency of transporting the transported object 90 by the transport vehicles 20 can be improved.
  • FIG. 6 is a front view showing an example of the configuration of the track and the transport vehicle according to the embodiment.
  • the first track 10A is arranged so that the storage shelf 40, which is one of the places where the transported object 90 is placed, is located directly below.
  • the transport vehicle 20A places the transported object 90 on the storage shelf 40 or retrieves the transported object 90 from the storage shelf 40 by operating the gripping unit 21 and the lifting mechanism 22 without operating the moving mechanism 23.
  • the first track 10A is arranged so that the device port 101, which is one of the places where the transported object 90 is placed, is located directly below.
  • the transport vehicle 20A operates the gripper 21 and the lifting mechanism 22 to place the transported object 90 on the equipment port 101 or to retrieve it from the equipment port 101 without operating the moving mechanism 23.
  • the second track 10B is provided so that the storage shelf 40 and the equipment port 101, which are the placement location of the transported object 90, are located below, as in FIG. 1 and other figures.
  • the transport vehicle 20B operates the gripper 21, the moving mechanism 23, and the lifting mechanism 22 to move the gripper 21 to directly above the placement location and raise and lower the gripper 21 located directly above the placement location relative to the placement location, thereby placing the transported object 90 on the placement location or retrieving it from the placement location.
  • FIG. 7 is a front view showing an example of the configuration of the track and the transport vehicle according to the embodiment.
  • FIG. 8 is a diagram for explaining an example of the transfer of the transported object in FIG. 7.
  • the first track 10A is provided so that the storage shelf 40, which is one of the storage locations for the transported object 90, is located directly below.
  • the transport vehicle 20A places the transported object 90 on the storage shelf 40 or retrieves it from the storage shelf 40 by operating the gripping unit 21 and the lifting mechanism 22 without operating the moving mechanism 23.
  • the second track 10B is provided so that the storage shelf 40, which is the storage location for the transported object 90, is located below.
  • the transport vehicle 20B operates the gripping unit 21, the moving mechanism 23, and the lifting mechanism 22 to move the gripping unit 21 directly above the placement location and raise and lower the gripping unit 21 located directly above the placement location relative to the placement location, thereby placing the transported object 90 on the placement location or retrieving it from the placement location.
  • the storage shelves 40 provided directly below the first track 10A, one of the opposing storage shelves 40 is a load grabbing zone for grabbing the transported object 90, and the other is a load unloading zone for unloading the transported object 90.
  • the transport vehicles 20A and 20B run on the first track 10A and the second track 10B in the order of the load grabbing zone and the load unloading zone.
  • the load grabbing zone is provided on the upstream side of the transport vehicle 20, and the load unloading zone is provided on the downstream side of the transport vehicle 20.
  • the transport vehicles 20A and 20B present at the transfer position for transferring the transported object 90 to a specific placement location have different travel directions, and the orientation of the transported object 90 grasped by each transport vehicle 20 is the same, so the transported object 90 can be placed at the placement location in the same orientation from any track 10, and the transport distance can be shortened by using the first track 10A and the second track 10B appropriately, and the transport efficiency of the transported object 90 can be improved.
  • the transport vehicle 20 travels forward on one of the first track 10A and the second track 10B, and travels backward on the other, so that the transport vehicle 20 having the same structure can be used on each track 10.
  • the second track 10B is provided below the first track 10A, so the layout of the transport vehicle system 1 can be kept space-saving.
  • the transport vehicles 20 switch between forward and reverse travel on the switching track 15a that connects the first track 10A and the second track 10B and may be included in the entry track 15 on which the transport vehicles 20 travel, so that the number of transport vehicles 20 can be balanced between the first track 10A and the second track 10B and the transport vehicles 20 that arrive at the destination faster can be used.
  • the switching track 15a is provided with a length that allows two or more transport vehicles 20 to enter at once, so that the transport vehicles 20 can travel between the first track 10A and the second track 10B in a shorter time.
  • a first track is provided so that a placement location for a transported object is located below the first track;
  • a second track is provided so that the placement location is located below the second track; a plurality of transport vehicles that travel along the first track and the second track and transport the transported object;
  • a controller for controlling the operation of each of the plurality of transport vehicles,
  • the transport vehicle is A gripping unit that grips the transported object;
  • a moving mechanism that moves the gripping unit to directly above the placement location; a lifting mechanism for lifting and lowering the gripping unit located directly above the placement location relative to the placement location,
  • a transport vehicle system in which the transport vehicle located at a transfer position on the first track for transferring the transported object to a specific loading location and the transport vehicle located at a transfer position on the second track for transferring the transported object to the specific loading location have different traveling directions, and the orientation of the transported object held by each transport vehicle is the same.
  • Supplementary Note 2 The multiple guided vehicles of the guided vehicle system described in Supplementary Note 1 travel forward on one of the first track and the second track, and travel backward on the other track.
  • Supplementary Note 3 The transport vehicle system described in Supplementary Note 1 or Supplementary Note 2, wherein the second track is arranged below the first track.
  • a track is provided that connects the first track and the second track and through which the transport vehicle travels, The transport vehicle system according to claim 2 or 3, wherein the transport vehicle switches between forward travel and reverse travel on a switching track included in the entry track.
  • the switching track has a length that allows two or more of the transport vehicles to enter at once,
  • Transport vehicle system 10 ... Track 10A ... First track 10B ... Second track 20, 20A, 20B ... Transport vehicle 40 ... Storage shelf 50 ... Controller 90 ... Transported object 100 ... Processing device 101 ... Equipment port

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  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

Le problème décrit par la présente invention est d'améliorer l'efficacité de transport d'un objet à transporter. La solution selon l'invention porte sur un système de véhicule de transport 1 comprenant : une première piste 10A disposée de telle sorte que l'emplacement de placement d'un objet 90 à transporter est situé en dessous de celle-ci ; une seconde piste 10B ; une pluralité de véhicules de transport 20 qui se déplacent le long de chacune de la première piste 10A et de la seconde piste 10B et transportent l'objet 90 à transporter ; et un dispositif de commande 50 qui commande le fonctionnement de chacun des véhicules de transport 20. Les véhicules de transport 20 comprennent une unité de préhension 21 qui saisit l'objet 90 à transporter, un mécanisme de déplacement 23 qui déplace l'unité de préhension 21 jusqu'à immédiatement au-dessus de l'emplacement de placement et un mécanisme de levage 22 qui déplace l'unité de préhension 21 située immédiatement au-dessus de l'emplacement de placement vers le haut et vers le bas par rapport à l'emplacement de placement. Un véhicule de transport 20 présent au niveau d'une position de livraison spécifique sur la première piste 10A et un véhicule de transport 20 présent au niveau d'une position de livraison spécifique sur la seconde piste 10B sont différents dans la direction de déplacement et sont identiques dans l'orientation de l'objet 90 à transporter saisi par chaque véhicule de transport 20.
PCT/JP2023/032503 2022-12-05 2023-09-06 Système de véhicule de transport WO2024122138A1 (fr)

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JP2022194270 2022-12-05
JP2022-194270 2022-12-05

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017029871A1 (fr) * 2015-08-14 2017-02-23 村田機械株式会社 Système de transport
WO2020153041A1 (fr) * 2019-01-25 2020-07-30 村田機械株式会社 Système de transport

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017029871A1 (fr) * 2015-08-14 2017-02-23 村田機械株式会社 Système de transport
WO2020153041A1 (fr) * 2019-01-25 2020-07-30 村田機械株式会社 Système de transport

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