Classifications

• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C24/00—Coating starting from inorganic powder
  • C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat
  • C23C24/10—Coating starting from inorganic powder by application of heat or pressure and heat with intermediate formation of a liquid phase in the layer
  • C23C24/103—Coating with metallic material, i.e. metals or metal alloys, optionally comprising hard particles, e.g. oxides, carbides or nitrides
  • C23C24/106—Coating with metal alloys or metal elements only
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
  • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
  • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
  • B05C1/0804—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the material being applied without contact with the roller
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
  • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
  • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
  • B05C1/0813—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line characterised by means for supplying liquid or other fluent material to the roller
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
  • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
  • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
  • B05C1/12—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the work being fed round the roller
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
  • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
  • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
  • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
  • B05C5/0254—Coating heads with slot-shaped outlet
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
  • B05D1/00—Processes for applying liquids or other fluent materials
  • B05D1/28—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
  • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
  • H10K71/10—Deposition of organic active material
  • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating

Definitions

• Embodiments of the present invention relate to a coating device, a meniscus head, and a coating method.
• Organic thin-film solar cells and organic/inorganic hybrid solar cells using organic semiconductors are expected to be low-cost solar cells because inexpensive coating methods can be used to form the active layer.
• it is necessary to uniformly coat the coating materials that form the organic active layer and other layers.
• the film thickness of each layer is about several nm to several hundreds of nm, and it is necessary to form such extremely thin layers with good uniformity over a large area.
• the meniscus coating method is known as one of the roll-to-roll (R2R) coating methods that can coat extremely thin layers over a large area at low cost.
• the problem that this invention aims to solve is to provide a coating device, meniscus head, and coating method that can produce a uniform coating film over a large area.
• a coating device for supplying a coating liquid to a surface of a substrate and forming a coating film by a meniscus method A member for conveying the substrate; A coating bar; a slot die that supplies the coating solution to a surface of the coating bar; A coating liquid supplying member that supplies the coating liquid to a slot die; wherein each member is arranged so that the coating liquid supplied from the slot die is supplied between the coating bar and the substrate via a surface of the coating bar to form a meniscus.
• the coating device according to [1] or [2], further comprising a position detection member that detects whether a longitudinal direction of the coating bar is parallel to a coating liquid discharge port of the slot die.
• the coating apparatus according to any one of [1] to [3], further comprising a gap measuring member for measuring a gap between the coating bar and the slot die.
• the gap measuring member measures the gap by measuring an electrical resistance between the coating bar and the slot die.
• the coating device according to any one of [1] to [6], further comprising a number of coating liquid supply members equal to or less than the number of the slot dies.
• the coating device according to any one of [1] to [7], comprising a plurality of slot dies.
• the coating device according to [8], further comprising a slot die distance adjustment member for adjusting a distance between adjacent slot dies.
• a meniscus head arranged apart from a substrate for supplying a coating liquid to a surface of the substrate to form a coating film The meniscus head is A coating bar; a slot die that supplies the coating solution to a surface of the coating bar; a fixing member that connects and fixes the coating bar and the slot die, A meniscus head in which the coating liquid ejected from the slot die is supplied to the gap between the coating bar and the substrate via the surface of the coating bar, forming a meniscus and forming the coating film.
• the meniscus head according to [10] wherein the length of the coating bar in the longitudinal direction is 30 cm or more, and the length of the coating liquid discharge port of the slot die is 10 cm or less.
• a coating method for supplying a coating liquid between a coating bar and a substrate, forming a meniscus to form a coating film on a surface of the substrate comprising the steps of: (S31) A step of supplying the coating liquid to a slot die and removing air; (S32) controlling the distance between the coating bar and the slot die; (S33) controlling the distance between the coating bar and the substrate; (S34) A step of supplying the coating liquid from the slot die through a surface of the coating bar to a gap between the coating bar and the nozzle to form a meniscus; (S35) A coating method comprising a step of transporting the substrate to form the coating film.
• FIG. 2 is a schematic side view showing a coating apparatus according to an embodiment.
• FIG. 2 is a schematic top view showing a coating apparatus according to an embodiment.
• FIG. 2 is a conceptual diagram of a meniscus head according to an embodiment.
• FIG. 4 is a flowchart of a coating method according to an embodiment.
• First Embodiment 1A and 1B are a schematic side view and a schematic top view showing a coating apparatus according to an embodiment.
• the coating device 100 includes: A member 103 for conveying the substrate 102; A coating bar 101; a slot die 106 that supplies a coating liquid 104 between the coating bar 101 and the substrate 102 to form a meniscus 105; A coating liquid supply member 107 (such as a liquid feed pump, one shown in the figure) that supplies a coating liquid to the slot die; Yes.
• the coating device may further include a coating liquid tank 108 and a pipe 109. These are used to deliver the coating liquid 104 stored in the coating liquid tank 108 to the slot die 106.
• the substrate transported from the coating device is usually transported to a drying device (not shown) and dried.
• the components are arranged so that the coating liquid discharged from the slot die is not applied directly to the surface of the substrate, but rather the coating liquid supplied from the slot die passes through the surface of the coating bar and is supplied between the coating bar and the substrate to form a meniscus.
• slot dies there may be only one slot die, as shown in Figure 1B, multiple slot dies may be arranged in a multiple number.
• the streams of coating liquid discharged from each slot die join each other on the coating bar surface to form a wide stream of coating liquid, which forms a meniscus, thereby forming a uniform, wide coating film.
• Meniscus coating is known as one of the coating methods for forming a coating film on a substrate.
• a "meniscus" is a phenomenon in which the surface of a liquid forms a concave or convex curve.
• a coating liquid containing various materials is injected into the gap between the coating bar and the substrate, a meniscus forms on the liquid surface. If the substrate is moved with the meniscus formed, a coating film can be formed on the substrate.
• the liquid In meniscus coating using a coating bar, the liquid is generally supplied to the coating bar by a syringe needle. Also, when continuous coating is required, such as in the roll-to-roll method (sometimes called R2R), coating liquid is often supplied to a single coating bar from multiple needles. In such cases, the spacing between adjacent needles varies depending on the physical properties of the coating liquid used, the coating liquid film, the specific speed, etc. The number of needles that can be arranged on a single coating bar is limited because the coating liquid supply structure becomes complicated, making it difficult to use a long coating bar. Also, it is difficult to stably supply coating liquid to the middle parts of adjacent needles, and streaks may occur in the coating liquid.
• slot die coating In slot die coating (slot coating), it is common to supply the liquid to one slot die. If a wider coating width is required, the slot die outlet must also be longer. Normally, the coating liquid is injected into the slot die from a central inlet, and then distributed throughout the entire outlet. If the coating liquid has low viscosity, it becomes difficult for pressure to be transmitted to both ends of the outlet of a long slot die, making it difficult to discharge the liquid uniformly from the slot die outlet.
• the coating liquid discharged from the slot die is supplied to the substrate surface via a coating bar to perform meniscus coating.
• a coating film with improved uniformity can be formed.
• the coating liquid can be uniformly supplied to the coating bar from multiple short slot dies, making it possible to apply uniformly even over a large area.
• the coating film between the slot dies tends to be uneven.
• the coating liquid is supplied to the substrate surface via a coating bar, the coating liquid is more likely to be distributed uniformly on the coating bar.
• the cross-sectional shape of the coating bar in a plane perpendicular to the longitudinal direction can be constant.
• the cross-sectional shape of the coating bar 101 is arbitrary.
• the cross-sectional shape of the coating bar 101 is, for example, circular, flattened circular, or polygonal. Part of the cross-sectional shape may be curved and other parts may be linear.
• the cross-sectional shape of the surface of the coating bar 101 facing the substrate 102 may be curved.
• the coating bar 101 preferably includes at least one selected from the group consisting of, for example, stainless steel, aluminum, titanium, and glass. This makes it easier to process the coating bar 101.
• the surface of the coating bar 101 is a mirror surface. In another example, the surface of the coating bar 101 may include irregularities.
• the longitudinal direction of the coating bar and the coating liquid discharge port of the slot die are parallel.
• a position detection member may be provided that detects that the longitudinal direction of the coating bar and the coating liquid discharge port of the slot die are parallel before coating begins or during coating.
• An optical method is preferable as the detection method, and an image camera is preferable.
• the coating device it is preferable to control the distance between the coating bar and the slot die during coating.
• a gap measuring member that measures the gap between the coating bar and the slot die before or during coating can be further provided.
• the coating bar and the slot die may be in contact.
• the coating liquid can be applied directly to the coating bar, and repelling of the coating liquid tends to be less likely to occur. Therefore, a device that detects contact between the coating bar and the slot die can be used as the gap measuring member. Contact between the coating bar and the slot die is easy to detect, and maintaining the contact state can improve the uniformity of the coating film.
• a member that measures the electrical resistance between the coating bar and each slot die can be used as the gap measuring member. If the slot die and coating bar are made of conductive stainless steel or the like, and multiple slot dies are provided, and if the slot dies are insulated from each other, then by measuring the electrical resistance between the coating bar and the slot die, the electrical resistance will drop sharply the moment they come into contact, making it possible to detect contact. Furthermore, since the electrical resistance changes depending on the state of contact, it becomes possible to monitor the state of contact.
• the electrical resistance meter can also be an external device separate from the coating equipment.
• the coating device can be equipped with fewer coating liquid supply members, such as pumps, than a slot die.
• one coating liquid supply member can be arranged for each of the multiple slot dies, but it is also possible to supply coating liquid to three slot dies from one coating liquid supply member.
• the coating liquid discharged from the slot die becomes uniform on the coating bar, so the coating film is more uniform than when coating liquid is supplied directly from a slot die onto a substrate, for example, in general slot coating.
• the coating device When the coating device according to this embodiment is equipped with multiple slot dies, it may have a member that controls the spacing between each slot die.
• a member that controls the slot die spacing is a spacer that is provided between the slot dies.
• the slot die can be separately detachable.
• the pipe that supplies the coating liquid to the slot die can be equipped with a joint that can be attached and detached to the slot die. This structure allows individual slot dies to be easily attached and detached.
• each pipe can be connected from one coating liquid tank to each slot die. This simplifies the arrangement of the pipes and makes it easier to apply uniform pressure from the tank and uniformly control the amount of coating liquid supplied to each pipe.
• the direction of movement of the substrate is not particularly limited, but it is preferable to coat the substrate while transporting it vertically from bottom to top. By moving the substrate vertically from bottom to top, gravity acts on the meniscus, making it easier to form a uniform film and enabling faster coating.
• the direction of movement can be adjusted depending on the configuration of the device and the physical properties of the coating liquid, and is generally within a range of ⁇ 30° from the vertical direction.
• the substrate transport member preferably transports the substrate from bottom to top, and in this case, the slot die is preferably positioned so that the coating liquid is supplied from the top of the coating bar. By supplying the coating liquid from the top of the coating bar, dripping can be suppressed.
• the coating device may further include a member for measuring and controlling the distance between the coating bar and the substrate. Since a meniscus is formed between the coating bar and the equipment, controlling the distance between the coating bar and the substrate can improve the uniformity of the thickness of the coating film.
• the coating device may further include a member for cleaning the coating bar. This allows the coating bar to be periodically cleaned to remove impurities mixed in from the atmosphere and solid matter precipitated from the coating liquid.
• a member for spraying or emitting a solvent such as water and a member for applying ultrasonic waves.
• the coating device according to the embodiment can further include a member for recovering excess coating liquid. This member prevents backflow of the coating liquid after coating is completed and loss of expensive coating liquid, and also makes it easier to prevent the release of solvents, etc. into the environment.
• the second embodiment relates to a meniscus head.
• the meniscus head according to the embodiment is used, for example, as a part of the coating apparatus 10 (and its modifications) described in relation to the first embodiment.
• the meniscus head according to the embodiment comprises:
• the meniscus head is A coating bar; a slot die that supplies the coating solution to a surface of the coating bar; and a fixing member that connects and fixes the coating bar and the slot die.
• the coating liquid ejected from the slot die is supplied via the surface of the coating bar into the gap between the coating bar and the substrate placed at a distance, forming a meniscus, and the substrate is transported to form a coating film.
• FIG. 2 is a conceptual diagram of a meniscus head 200 of this embodiment.
• the meniscus head 200 has a coating bar 201 and multiple slot dies 202 (three in FIG. 2) that supply coating liquid to the coating bar, and a fixing member 203 for the coating bar and the slot dies.
• the fixing member can have various structures, but it is preferable that it is easy to remove and clean. It is preferable that the axis of the coating bar and the axis connecting each slot die are connected and fixed, and that there is an adjustment member 204 for adjusting the distance between the coating bar and the outlet of the slot die.
• Each slot die is preferably equipped with a member (not shown) for removing air that is mixed into the slot die after the coating liquid is introduced into the slot die through the coating liquid inlet 202a.
• the longitudinal length of the coating bar can be 30 cm or more, and the length of the coating liquid outlet (not shown) of the slot die 202 can be 10 cm or less.
• the third embodiment relates to a coating method.
• coating is performed using, for example, the coating apparatus 100 (and its modifications) described in relation to the first embodiment.
• FIG. 3 is a flow chart illustrating a coating method S30 according to a third embodiment.
• a meniscus is formed between a coating bar and a substrate to coat the substrate
• S31 A step of supplying the coating liquid to a slot die and removing air
• S32 controlling the distance between the coating bar and the slot die
• S33 controlling the distance between the coating bar and the substrate
• S34 A step of supplying the coating liquid from the slot die through a surface of the coating bar to a gap between the coating bar and the nozzle to form a meniscus
• S35 A step of transporting the substrate to form the coating film.
• the order of steps S31 to S33 may be reversed.
• the longitudinal length of the coating bar can be 30 cm or more, and the length of the outlet of the slot die can be 10 cm or less.
• the viscosity of the coating liquid at the temperature during coating can be set to 2 ⁇ 10 ⁇ 3 kg ⁇ m/s (2 cp) or less.
• a method for checking the distance between the lot die and the coating bar may be to measure the electrical resistance between them.
• the coating liquid outlet of the slot die is parallel to the coating bar, and the method may further include a step of confirming that they are arranged so as to be parallel.
• the coating method according to this embodiment it is preferable to start supplying the coating liquid before transporting the substrate, and form a meniscus in the gap between the coating bar and the substrate. By starting transport of the substrate after the meniscus has been formed, a uniform film can be formed.
• Example 1 a transparent electrode film is produced as follows using the coating device 100 shown in Fig. 1A.
• a coating bar made of SUS303 and having a cross-sectional shape perpendicular to the longitudinal direction that is a circle with a radius of 10 mm and a length in the coating width direction of 300 mm, and three slot dies with a discharge port length of 95 mm are used.
• a Teflon tube is connected to each slot die with a detachable joint, and three small pumps supply the coating liquid to each slot die.
• a silver nanowire aqueous dispersion with a viscosity of 1.7 ⁇ 10 ⁇ 3 kg ⁇ m/s at the temperature during coating is prepared as the coating liquid.
• the coating liquid is supplied to the slot die and deaired. The interval between the coating bar and each slot die is adjusted, and it is confirmed that the coating bar is parallel to the slot die outlet.
• a PET substrate is used as the substrate, and the coating bar is positioned using an actuator so that the minimum gap distance between the coating bar and the PET substrate is 200 ⁇ m. 0.2 mL of coating liquid is supplied from each slot die to form a meniscus column before conveying the substrate.
• the PET substrate While controlling the gap distance between the coating bar and the PET substrate, the PET substrate is conveyed and the coating liquid is continuously supplied to obtain a coating film.
• the moving speed of the PET substrate is constant at 83 mm/s.
• the PET substrate is placed in a hot air drying oven compatible with R2R and continuously dried.
• the coating film produced has high uniformity
• Example 2 A transparent electrode of ITO/Ag alloy/iTO with a sheet resistance of 10 ⁇ / ⁇ is fabricated on a rolled PET film with a width of 300 mm using a R2R compatible sputtering device. Next, the transparent electrode is patterned by laser scribing into a rectangular shape with a cell pitch of 12 mm and a separation region with a width of 50 ⁇ m.
• Coating is performed using a coating device with a modified coating bar shape compared to the coating device shown in Figure 1A.
• a PEDOT/PSS aqueous dispersion is prepared as the coating liquid for producing the hole transport layer, and the coating bar is positioned using an actuator so that the minimum gap distance between the coating bar and the PET substrate on which the transparent electrode is formed is 150 ⁇ m.
• coating liquid is supplied from the slot die to the coating bar to form a meniscus column before the substrate is transported.
• the PET substrate is transported and coating liquid is continuously supplied to obtain a coating film.
• the movement speed of the PET substrate is constant at 83 mm/s.
• the coating film is placed in a R2R compatible hot air drying oven and continuously dried.
• PTB7 [poly ⁇ 4,8-bis[(2-ethylhexyl)oxy]benzo[1,2-b:4,5-b']dithiophene-2,6-diyl-1t-alt-3-fluoro-2-[(2-ethylhexyl)carbonyl]thieno[3,4-b]thiophene-4,6-diyl ⁇ ]/p-type semiconductor
• PC70BM [6,6]phenyl C71 butyric acid methyl ester/n-type semiconductor
• the coating bar is positioned using an actuator so that the minimum gap distance between the coating bar and the PET substrate is 300 ⁇ m on the PET substrate on which the hole transport layer is formed.
• a meniscus column is formed before the coating liquid is supplied from each slot die to the coating bar to transport the substrate.
• the PET substrate is transported and the coating liquid is continuously supplied to obtain a coating film.
• the moving speed of the PET substrate is constant at 83 mm/s.
• the PET substrate is placed in a R2R compatible hot air drying oven and continuously dried. Both coating films produced are uniform.

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• Chemical & Material Sciences (AREA)
• Chemical Kinetics & Catalysis (AREA)
• Engineering & Computer Science (AREA)
• Materials Engineering (AREA)
• Mechanical Engineering (AREA)
• Metallurgy (AREA)
• Organic Chemistry (AREA)
• Application Of Or Painting With Fluid Materials (AREA)
• Coating Apparatus (AREA)

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• 2022
  • 2022-11-14 EP EP22965695.4A patent/EP4620578A1/en active Pending
  • 2022-11-14 WO PCT/JP2022/042173 patent/WO2024105718A1/ja not_active Ceased
  • 2022-11-14 JP JP2024533912A patent/JP7698803B2/ja active Active
  • 2022-11-14 CN CN202280092645.5A patent/CN118829489A/zh active Pending
• 2024
  • 2024-08-14 US US18/804,283 patent/US20240399406A1/en active Pending

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