WO2024098826A1 - 光学整形模组、装置及激光雷达系统 - Google Patents

光学整形模组、装置及激光雷达系统 Download PDF

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Publication number
WO2024098826A1
WO2024098826A1 PCT/CN2023/107454 CN2023107454W WO2024098826A1 WO 2024098826 A1 WO2024098826 A1 WO 2024098826A1 CN 2023107454 W CN2023107454 W CN 2023107454W WO 2024098826 A1 WO2024098826 A1 WO 2024098826A1
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module
lens
collimation
slow axis
slow
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PCT/CN2023/107454
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English (en)
French (fr)
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种洪涛
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西安炬光科技股份有限公司
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Publication of WO2024098826A1 publication Critical patent/WO2024098826A1/zh

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/30—Collimators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483—Details of pulse systems
    • G01S7/484—Transmitters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0916—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G02B27/0961—Lens arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G02B27/0966—Cylindrical lenses
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
    • Y02A90/10—Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation

Definitions

  • the present application relates to the field of optical technology, and more specifically, to an optical shaping module, device and laser radar system.
  • the slow-axis divergence angle of the laser radar line spot system using a semiconductor laser as the light source is mostly concentrated at about 25°. Due to the large slow-axis divergence angle, in order to achieve high energy density beam quality, the only way is to increase the number of semiconductor laser light-emitting units. This solution has a complex optical path, a large volume, and is difficult to assemble and adjust.
  • the laser radar system in the prior art that uses a point light source in conjunction with a galvanometer scanning can obtain a higher energy density in the slow axis direction, the utilization rate of the light spot is low, and a longer scanning time is required at the same scanning format and scanning resolution.
  • the purpose of the present application is to provide an optical shaping module, device and laser radar system, aiming to solve the technical problem in the prior art that high energy density in the slow axis direction and extremely small divergence angle cannot be simultaneously satisfied.
  • an optical shaping module comprising a collimation module, a beam expansion and shaping module and a slow axis homogenization module;
  • the collimation module is configured to collimate the light beam emitted by the laser light source in the fast axis direction, and optimize the light field distribution in the slow axis direction;
  • the beam expansion and shaping module comprises at least one lens, configured to expand and shape the divergence angle of the light beam in the fast axis direction and/or the slow axis direction;
  • the slow axis homogenization module comprises at least one micro cylindrical array lens, configured to homogenize the light beam in the slow axis direction.
  • the embodiments of the present invention can achieve a smaller divergence angle in the slow axis while obtaining high energy uniformity in the slow axis direction, have high utilization of the light spot, and adapt to small-volume scenes, thereby solving the technical problem in the prior art that both high energy density and extremely small divergence angle in the slow axis direction cannot be satisfied simultaneously.
  • the collimation module when the collimation module, the beam expansion and shaping module and the slow axis homogenization module are arranged in sequence along the optical axis of the laser light source, the collimation module is configured as a single biconvex aspheric lens; or, the collimation module is configured as a collimation lens group.
  • the desired performance can be achieved by setting the collimating module to different lenses.
  • the lens of the beam expansion and shaping module is a cylindrical lens or a spherical lens.
  • the fast axis and the slow axis are collimated separately, which can optimize the aberration to be smaller and is conducive to the compression of the divergence angle.
  • the beam expansion and shaping module includes a first cylindrical lens and a second cylindrical lens, and the first cylindrical lens and the second cylindrical lens are both positive lenses; or the first cylindrical lens is a negative lens, and the second cylindrical lens is a positive lens.
  • the micro cylindrical array lens is a homogenizer or a homogenizer group having a pair of homogenizers.
  • the collimation module when the collimation module, the slow-axis homogenization module and the beam expansion and shaping module are arranged in sequence along the optical axis of the laser light source, the collimation module is configured as a fast-axis collimation lens and a slow-axis collimation lens, the fast-axis collimation lens is convex in the fast-axis direction, and the slow-axis collimation lens is a cylindrical lens.
  • the slow axis homogenization module is a micro cylindrical lens.
  • the beam expansion and shaping module is a ball lens group.
  • a second aspect of the present application provides an optical shaping device, comprising a laser light source, and the above-mentioned optical shaping module arranged on the light emitting side of the laser light source.
  • the laser light source is a multi-channel edge-emitting laser light source.
  • the third aspect of the present application provides a laser radar system, comprising the above-mentioned optical shaping device.
  • the beneficial effects of the present application include: the optical shaping module, device and laser radar system provided in the embodiments of the present application, the light beam emitted by the laser light source can pass through the collimation module, the beam expansion shaping module and the slow axis homogenization module in sequence, or the light beam passes through the collimation module, the slow axis homogenization module and the beam expansion shaping module in sequence; wherein, the light beam is collimated in the fast axis direction through the collimation module, and the light field distribution in the slow axis direction is optimized at the same time, when the light beam passes through the beam expansion shaping module including at least one lens, the divergence angle of the beam expansion shaping light beam in the fast axis direction and/or the slow axis direction, when the light beam passes through the slow axis homogenization module including at least one micro cylindrical array lens, the light beam is homogenized in the slow axis, the angular space energy distribution of the slow axis is homogenized, and a slow axis small-angle homogen
  • the optical shaping module provided in the embodiment of the present application sequentially collides the fast axis of the light beam, optimizes the light field distribution in the slow axis direction, expands and shapes the divergence angle of the light beam in the fast axis direction and/or the slow axis direction, and homogenizes the energy of the slow axis small-angle light beam, thereby achieving small-volume compression of the slow axis divergence angle, and obtaining a slow-axis small-angle homogenized line light spot, so as to achieve a smaller divergence angle of the slow axis while obtaining high energy uniformity in the slow axis direction, thereby achieving high utilization of the light spot, adapting to small-volume scenes, solving the technical problem in the prior art that high energy density and extremely small divergence angle in the slow axis direction cannot be satisfied at the same time, and quickly realizing solution upgrades.
  • FIG1 is a schematic diagram of the structure of an embodiment of an optical shaping module provided in an embodiment of the present application.
  • FIG2 is a schematic structural diagram of one embodiment of a collimation module of an optical shaping module provided in an embodiment of the present application
  • FIG3 is a schematic structural diagram of another embodiment of a collimation module of an optical shaping module provided in an embodiment of the present application.
  • FIG4 is a schematic structural diagram of one embodiment of a beam expansion and shaping module of an optical shaping module provided in an embodiment of the present application;
  • FIG5 is a schematic structural diagram of another embodiment of a beam expansion and shaping module of an optical shaping module provided in an embodiment of the present application;
  • FIG6 is a schematic structural diagram of one embodiment of a slow axis homogenization module of an optical shaping module provided in an embodiment of the present application;
  • FIG7 is a schematic structural diagram of another embodiment of a slow axis homogenization module of an optical shaping module provided in an embodiment of the present application;
  • FIG14 is an angular spatial spot diagram formed by the optical shaping module provided in an embodiment of the present application.
  • FIG15 is an angular space slow axis energy distribution curve formed by the optical shaping module provided in an embodiment of the present application.
  • FIG16 is a fast axis energy distribution curve of the angular space formed by the optical shaping module provided in an embodiment of the present application.
  • FIG. 17 is one of the wave optics simulation diagrams when passing through homogenization modules with different numerical apertures provided in an embodiment of the present application.
  • FIG. 18 is a second wave optics simulation diagram of the wave passing through a homogenization module with different numerical apertures provided in an embodiment of the present application.
  • Icons 10-laser light source; 100-collimation module; 101-double convex aspheric lens; 102-fast axis collimation lens; 103-slow axis collimation lens; 200-beam expansion and shaping module; 201, 206-double convex cylindrical lens; 202, 205-single convex cylindrical lens; 203-first ball lens; 204-second ball lens; 300-slow axis homogenization module; 301-micro cylindrical array lens; 302-micro cylindrical lens; 400-reflector.
  • horizontal does not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted.
  • horizontal only means that its direction is more horizontal than “vertical”, and does not mean that the structure must be completely horizontal, but can be slightly tilted.
  • the terms “set”, “install”, “connect”, and “connect” should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements.
  • the specific meanings of the above terms in this application can be understood according to specific circumstances.
  • Figure 1 is a schematic diagram of the structure of one embodiment of the optical shaping module provided in the embodiment of the present application.
  • the optical shaping module provided in the embodiment of the present application includes a collimation module 100, a beam expansion shaping module 200 and a slow axis homogenization module 300 arranged in sequence along the optical axis of the laser light source 10; or, includes a collimation module 100, a slow axis homogenization module 300 and a beam expansion shaping module 200 arranged in sequence along the optical axis of the laser light source 10.
  • the collimation module 100 is configured to collimate the light beam emitted by the laser light source 10 in the fast axis direction, and optimize the light field distribution in the slow axis direction;
  • the beam expansion and shaping module 200 includes at least one lens, which is configured to expand and shape the divergence angle of the light beam in the fast axis direction and/or the slow axis direction;
  • the slow axis homogenization module 300 includes at least one micro cylindrical array lens 301, which is configured to homogenize the light beam in the slow axis direction.
  • the laser light source 10 emits a light beam
  • the light beam passes through the collimation module 100, the beam expansion and shaping module 200 and the slow axis homogenization module 300 in sequence.
  • the collimation module 100 collimates the fast axis direction of the light beam and optimizes the slow axis light field distribution at the same time.
  • the optimization of the slow axis light field distribution includes but is not limited to the regulation (compression or expansion) of the divergence angle of the slow axis light beam.
  • the light beam passing through the collimation module 100 passes through the beam expansion and shaping module 200 and the slow axis homogenization module 300 in sequence.
  • the beam expansion and shaping module 200 expands the light beam by first compressing and then collimating the divergence angle of the light beam in the fast axis direction and/or the slow axis direction, thereby achieving beam expansion and shaping of the divergence angle of the light beam in the fast axis direction and/or the slow axis direction.
  • the slow axis homogenization module 300 includes at least one micro-cylindrical array lens 301, which functions to change or homogenize the slow axis angular spatial energy distribution so as to form a light spot shape with an approximate flat-top intensity distribution with specific divergence angle and uniformity requirements, thereby realizing energy homogenization under the condition of a small divergence angle of the slow axis (such as less than 1°); the light beam from the beam expansion and shaping module 200 passes through at least one micro-cylindrical array lens 301 in sequence to homogenize the energy of the small-angle light beam in the slow axis direction, and finally emits a slow axis small-angle homogenized line light spot.
  • a small divergence angle of the slow axis such as less than 1°
  • the light beam emitted by the laser light source 10 can pass through the collimation module 100, the beam expansion shaping module 200 and the slow axis homogenization module 300 in sequence, or the light beam passes through the collimation module 100, the slow axis homogenization module 300 and the beam expansion shaping module 200 in sequence; the light beam is collimated in the fast axis direction through the collimation module 100, and the light field distribution in the slow axis direction is optimized at the same time, the light beam passes through the beam expansion shaping module 200 including at least one lens, and the divergence angle of the light beam in the fast axis direction and/or the slow axis direction is first compressed and then collimated to expand the beam, and the light beam passes through the slow axis homogenization module 300 including at least one micro cylindrical array lens 301, so as to change or homogenize the angular space energy distribution of the slow axis, and form a slow axis small-angle homogenized line light spot.
  • the optical shaping module provided in the embodiment of the present application sequentially collimates the fast axis of the light beam, optimizes the light field distribution in the slow axis direction, expands the beam by first compressing the divergence angle in the fast axis direction and/or the slow axis direction and then collimating it, homogenizes the energy of the slow axis small-angle light beam, realizes small-volume compression of the slow axis divergence angle, and obtains a slow axis small-angle homogenized line light spot, so as to achieve a smaller divergence angle of the slow axis while obtaining high energy uniformity in the slow axis direction, and has a high utilization rate of the light spot, which is suitable for small-volume scenes.
  • it can be used in conjunction with a rotating mirror, MEMS, etc. to realize two-dimensional scanning and realize laser radar ranging, thereby solving the technical problem that the prior art cannot simultaneously meet high energy density and extremely small divergence angle in the slow axis direction.
  • the collimating module 100 is configured as a single biconvex aspheric lens 101 as shown in FIG. 2 ; or, the collimating module 100 is configured as a collimating lens group as shown in FIG. 3 .
  • the biconvex aspheric lens has a better curvature radius and can maintain good aberration correction to obtain the required performance.
  • LD semiconductor laser Laser Diode
  • the collimation module 100 in the present application adopts a single biconvex aspheric lens 101, the fast axis and the slow axis are collimated at the same time.
  • the correction of the aberration of the slow axis with a large luminous size is taken into account.
  • the LD fast axis Under the condition that the LD fast axis obtains a smaller divergence angle (such as ⁇ 0.1°) at a given lens focal length, it can adapt to the larger slow axis luminous size of the LD, thereby playing an auxiliary role in improving the system power density.
  • a smaller divergence angle such as ⁇ 0.1°
  • the collimating module 100 is configured as a collimating lens group, that is, the light beam is collimated by a plurality of collimating lenses arranged in sequence.
  • the fast axis and the slow axis are collimated separately, which can optimize the aberration to be smaller and is conducive to the compression of the divergence angle.
  • the specific collimating lens surface shape depends on the aberration requirements. When the aberration requirements are not high, a simple single lens can be used, such as a plano-convex or biconvex lens, and a larger relative aperture is allowed. When the aberration requirements are high, a double-cemented lens is used, and the relative aperture is appropriately reduced. The specific selection is based on the requirements.
  • the beam expansion and shaping module 200 is composed of one, two or more lenses, which are used to compress the divergence angle of the fast axis and/or the slow axis.
  • the lens can be a cylindrical lens (pointing to the slow axis for beam expansion) or a spherical lens (fast axis and slow axis are expanded at the same time).
  • Figure 4 is an example of a spherical lens
  • Figure 5 is an example of a cylindrical lens, which completes the shaping of the divergence angle of the light beam.
  • the beam expansion and shaping module 200 uses two spherical lenses to expand the fast-axis and slow-axis beams by first compressing and then collimating them. On the premise of achieving fast-axis and slow-axis collimation, the requirements for processing and assembly accuracy of optical components are reduced, and the system volume is reduced.
  • the beam expansion and shaping module 200 uses two cylindrical lenses to expand the slow-axis beam by first compressing and then collimating it. On the premise of achieving slow-axis collimation, the requirements for processing and assembly accuracy of optical components are reduced, and the system volume is reduced.
  • the slow axis homogenization module 300 includes one, two or more cylindrical microlens arrays, which function to change or homogenize the slow axis angular spatial energy distribution, so that it forms a light spot shape with a flat-top intensity distribution that meets specific divergence angle and uniformity requirements, and realizes energy homogenization under the condition of a small slow axis divergence angle (such as less than 1°).
  • the microlens array can be placed at different positions of the optical path (such as after the collimation module 100 or at the optical path exit, etc.).
  • the slow axis homogenization module 300 includes more than two micro-cylindrical array lenses 301
  • the more than two micro-cylindrical array lenses 301 are the same micro-cylindrical array lenses 301.
  • the surface shape, parameters, and other aspects of the more than two micro-cylindrical array lenses 301 are consistent.
  • the light beam passes through more than two identical micro-cylindrical array lenses 301, that is, the light beam energy is homogenized at a small angle in the direction of the slow axis, and finally a slow axis small angle homogenized line spot is projected.
  • the micro cylindrical array lens 301 can form an array on the incident surface or on the exit surface, and the array surface can have various shapes, for example, it can be an array of multiple continuous convex surfaces, or an array of multiple continuous serrated surfaces, etc.; it can also be a one-dimensional array, or a two-dimensional array, etc., and there is no specific limitation here.
  • the optical shaping module uses at least one micro-cylindrical array lens 301 to homogenize the light beam, realizes energy homogenization under the condition of small divergence angle (such as less than 1°), and forms a uniform small line spot.
  • One micro-cylindrical array lens 301 is equivalent to one homogenizer. Using two micro-cylindrical array lenses 301 can also avoid using one homogenizer and causing the device to be too thick and unworkable.
  • the micro-cylindrical array lens 301 is the homogenizer shown in FIG6, or the micro-cylindrical array lens 301 is the homogenizer group with a pair of homogenizers shown in FIG7.
  • the collimation module 100 is a single biconvex aspheric lens 101
  • the beam expansion and shaping module 200 is a combination of a biconvex cylindrical lens 201 and a single convex cylindrical lens 202
  • the slow axis homogenization module 300 is two micro cylindrical array lenses 301, so as to form a combination of the collimation module 100, the beam expansion and shaping module 200, and the slow axis homogenization module 300.
  • the beam expansion and shaping module 200 includes a first cylindrical lens and a second cylindrical lens, and both the first cylindrical lens and the second cylindrical lens are positive lenses; or the first cylindrical lens is a negative lens, and the second cylindrical lens is a positive lens.
  • the light beam emitted by the light source is collimated by the collimation module 100.
  • the first cylindrical lens and the second cylindrical lens are both positive lenses.
  • the slow-axis light is converged into a small-size spot by the first cylindrical lens. Under the premise of BPP conservation, it is emitted with a slow-axis divergence angle greater than the LD.
  • the slow-axis collimation is then completed by the second cylindrical lens.
  • the emitted light beam is finally projected into a slow-axis small-angle homogenized line spot through a slow-axis homogenization module 300 composed of two micro-cylindrical array lenses 301, as shown in FIG1 .
  • the first cylindrical lens is a negative lens
  • the second cylindrical lens is a positive lens.
  • the slow-axis light is diffused by the first cylindrical lens, and under the premise of BPP conservation, the slow-axis collimation is completed by the second cylindrical lens.
  • the outgoing light beam is finally projected into a slow-axis small-angle homogenized line spot through the slow-axis homogenization module 300 composed of a pair of micro-cylindrical array lenses 301.
  • the disadvantage is that the processing and assembly accuracy requirements of optical components are relatively high.
  • the optical shaping module provided in the embodiment of the present application can be based on a multi-channel EEL chip (with a larger active area) to achieve a small linear spot with an extremely small slow axis angle ( ⁇ 1 degree) and high uniformity, and cooperate with a rotating mirror, MEMS, etc. to achieve two-dimensional scanning, realize laser radar ranging, and quickly implement solution upgrades.
  • an embodiment of the present application also provides an optical shaping module, in which a collimation module 100, a slow axis homogenization module 300 and a beam expansion shaping module 200 are arranged in sequence;
  • the collimation module 100 is configured to collimate the light beam emitted by the laser light source 10 in the fast axis direction, and optimize the light field distribution in the slow axis direction;
  • the slow axis homogenization module 300 includes a micro cylindrical lens 302, which is configured to homogenize the light beam in the slow axis direction and homogenize the divergence angle of the slow axis;
  • the beam expansion shaping module 200 includes a spherical lens group, which is configured to improve the performance of the optical shaping module.
  • the optical shaping module can also be presented in the form of a collimation module 100 , a slow axis homogenization module 300 , and a beam expansion shaping module 200 .
  • the collimation module 100 is configured as a fast-axis collimating lens 102 and a slow-axis collimating lens 103.
  • the fast-axis collimating lens 102 is convex in the fast-axis direction
  • the slow-axis collimating lens 103 is a cylindrical lens, which realizes fast-axis collimation and slow-axis compression divergence angle. This method can reduce costs under the condition of fully correcting fast-axis aberrations.
  • the fast-axis collimating lens 102 is set to place the convex type on the light-incoming surface.
  • the conventional fast-axis collimating lens 102 surface type placed on the light-outgoing surface it has a back intercept equal to the focal length of the fast-axis collimating lens 102 (i.e., the focal length and back intercept of the fast-axis collimating lens 102 are equal), and the application range can be extended to some packaged LDs, such as the QFN packaged SPL_S4L90A.
  • the packaged LD requires the back intercept of the fast-axis collimating lens 102 to exceed its package size.
  • the back intercept of the conventional fast-axis collimating lens 102 is generally ⁇ 0.2 mm, which cannot meet the collimation distance requirements after packaging.
  • the slow axis homogenization module 300 is a micro cylindrical lens 302, which is used to homogenize the slow axis light beam.
  • the slow axis homogenization module 300 is placed before the beam expansion and shaping module 200. Since the slow axis is only subjected to a preliminary divergence angle compression, the incident angle of the light beam entering the slow axis homogenization module 300 is relatively large, thereby reducing the wave optical effect of the micro cylindrical lens 302 and obtaining better uniformity.
  • the beam expansion and shaping module 200 is a ball lens group, including a first ball lens 203 and a second ball lens 204. Compared with the cylindrical lens group shown in FIG. 1 , it has more tolerance to the influence of thermal effects, which is beneficial to improving the performance of the system. The processing method is more mature, the accuracy is easier to ensure, and the cost is lower; FIG. 9 is a schematic diagram of the optical path in the fast axis direction of FIG. 8 for cutting out the invalid area, and FIG. 10 is a schematic diagram of the optical path in the slow axis direction of FIG. 8 for cutting out the invalid area.
  • a single biconvex aspheric lens 101 is used for collimation
  • a single micro-cylindrical array lens 301 is used for slow axis homogenization
  • a single convex cylindrical lens group is used for beam expansion and shaping.
  • the convex directions of the single convex cylindrical lens 205 and the single convex cylindrical lens 202 are different.
  • Figure 11 is a light path diagram in the slow axis direction
  • Figure 12 is a combination of a single biconvex aspheric lens 101 for collimation, a single micro-cylindrical array lens 301 is used for slow axis homogenization, and a cylindrical lens group (biconvex cylindrical lens 206, single convex cylindrical lens 202) is used for beam expansion and shaping.
  • Figure 12 is a light path diagram in the slow axis direction.
  • the optical shaping module provided in the embodiment of the present application further includes a reflector after the laser light source 10, which is configured to change the propagation direction of the light beam.
  • the reflector 400 is used to change the propagation direction of the light path, and the specific setting position of the reflector 400 can be selected as needed. For example, as shown in FIG.
  • the reflector 400 can be set between the collimation module 100 and the slow axis homogenization module 300; it is also possible that the reflector 400 can be set in the slow axis homogenization module 300, when the slow axis homogenization module 300 includes two micro-cylindrical array lenses 301, the reflector 400 is set between the two micro-cylindrical array lenses 301, and the light beam is homogenized by the first micro-cylindrical array lens 301, and after the direction is changed by the reflector 400, it is incident on the second micro-cylindrical array lens 301 to achieve homogenization.
  • different scene layouts can be adapted.
  • Figure 14 is a schematic diagram of the energy distribution of the angular space spot after shaping in this embodiment
  • Figure 15 is a curve of the slow axis energy distribution in the angular space after shaping in this embodiment
  • Figure 16 is a curve of the fast axis energy distribution in the angular space after shaping in this embodiment.
  • the fluctuation simulation effects after passing through the slow axis homogenization module 300 with a numerical aperture of sin(0.8°/2) in FIG17 and the slow axis homogenization module 300 with a numerical aperture of sin(9°/2) in FIG18 are very different. It can be seen that the larger the incident angle of the light beam entering the slow axis homogenization module 300, the weaker the fluctuation effect.
  • the present application first homogenizes the collimated light beam and then performs beam expansion and shaping.
  • the slow axis homogenization module 300 is placed before the beam expansion and shaping module 200. Since the slow axis is only preliminarily compressed in divergence angle, the incident angle of the light beam entering the slow axis homogenization module 300 is relatively large, thereby reducing the wave optical effect of the micro cylindrical lens 302 and obtaining better uniformity.
  • the second aspect of the embodiment of the present application further provides an optical shaping device, comprising a laser light source 10 and the above optical shaping module, wherein the laser light source 10 is a multi-channel edge-emitting laser light source.
  • the above optical shaping device can be applied to a laser radar system.
  • the third aspect of the embodiment of the present application provides a laser radar system, including the above optical shaping device. It can be applied to an automotive LiDAR laser line spot system using LD as a light source. On the premise of obtaining high energy uniformity in the slow axis direction of the LD emitted laser beam, a smaller divergence angle of the slow axis is achieved, and the light
  • the LiDAR laser system has a simple circuit, small size, and easy installation and adjustment. It uses a point light source and a galvanometer to scan, which can achieve higher energy density and high utilization rate of the light spot. Under the same scanning format and scanning resolution, the scanning time is short.
  • optical shaping device and the laser radar system have the same structure and beneficial effects as the optical shaping module in the aforementioned embodiment.
  • the structure and beneficial effects of the optical shaping module have been described in detail in the aforementioned embodiment and will not be repeated here.

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Abstract

一种光学整形模组、装置及激光雷达系统，光学整形模组包括准直模块（100）、扩束整形模块（200）和慢轴匀化模块（300），光学整形装置包括激光光源（10）和光学整形模组；准直模块（100）被配置为对激光光源（10）发射的光束在快轴方向上准直，同时优化慢轴方向的光场分布；扩束整形模块（200）包括至少一个透镜，以扩束整形光束在快轴方向和/或慢轴方向的发散角；慢轴匀化模块（300）包括至少一个微柱面阵列透镜（301），以在慢轴方向匀化光束，光学整形装置可应用于激光雷达系统。

Description

光学整形模组、装置及激光雷达系统
相关申请的交叉引用
本申请要求于2022年11月10日提交中国专利局的申请号为202211402974.3、名称为“光学整形模组、装置及激光雷达系统”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及光学技术领域，具体而言，涉及一种光学整形模组、装置及激光雷达系统。
背景技术
现有技术中，以半导体激光器作为光源的激光雷达线光斑系统，其慢轴发散角度大部分集中在25°左右，因慢轴发散角较大，为了实现高能量密度的光束质量，只能增加半导体激光器发光单元数量，此种方案的光路复杂，体积较大，装调困难。
此外，现有技术中以点光源配合振镜扫描的激光雷达系统，虽能在慢轴方向获得较高的能量密度，但是对光斑的利用率低，在同等扫描幅面及扫描分辨率下，需要更长的扫描时间。
如何使得在半导体激光器出射激光束慢轴方向获得高能量密度的前提下，实现慢轴极小的发散角度，成为目前本领域亟待解决的技术问题。
发明内容
本申请的目的在于提供一种光学整形模组、装置及激光雷达系统，旨在解决现有技术中无法同时满足在慢轴方向高能量密度和极小的发散角度的技术问题。
本申请的实施例是这样实现的：
本申请的一方面，提供一种光学整形模组，包括准直模块、扩束整形模块和慢轴匀化模块；所述准直模块被配置为对激光光源发射的光束在快轴方向上准直，同时优化慢轴方向的光场分布；所述扩束整形模块包括至少一个透镜，被配置为扩束整形所述光束在所述快轴方向和/或所述慢轴方向的发散角；所述慢轴匀化模块包括至少一个微柱面阵列透镜，被配置为在所述慢轴方向匀化所述光束。
本发明实施例能够在慢轴方向获得高能量均匀度的前提下，实现慢轴更小的发散角度，对光斑的利用率高，适应小体积的场景，解决现有技术中无法同时满足在慢轴方向高能量密度和极小的发散角度的技术问题。
在一个可能的实现中，所述准直模块、所述扩束整形模块和所述慢轴匀化模块沿激光光源的光轴依次排列时，所述准直模块被配置为单个双凸非球面透镜；或者，所述准直模块被配置为准直透镜组。
通过设置准直模块为不同的镜片，实现所需的性能。
在一个可能的实现中，所述扩束整形模块的透镜为柱透镜或球透镜。
采用准直透镜组时，分别对快轴和慢轴进行准直，可以将像差优化的更小，有利于发散角的压缩。
在一个可能的实现中，所述扩束整形模块包括第一柱透镜和第二柱透镜，所述第一柱透镜和第二柱透镜均为正透镜；或者所述第一柱透镜为负透镜，所述第二柱透镜为正透镜。
在一个可能的实现中，所述微柱面阵列透镜为匀化器或者具有一对匀化器的匀化器组。
在一个可能的实现中，所述准直模块、所述慢轴匀化模块和所述扩束整形模块沿激光光源的光轴依次排列时，所述准直模块被配置为快轴准直透镜和慢轴准直透镜，所述快轴准直透镜在所述快轴方向上为凸面，所述慢轴准直透镜为柱面镜。
在一个可能的实现中，所述慢轴匀化模块为一个微柱面透镜。
在一个可能的实现中，所述扩束整形模块为球透镜组。
本申请的第二个方面，提供一种光学整形装置，包括激光光源，以及设置在所述激光光源出光侧的上述的光学整形模组。
在一个可能的实现中，所述激光光源为多通道边发射激光器光源。
本申请的第三个方面，提供一种激光雷达系统，包括上述的光学整形装置。
本申请的有益效果包括：本申请实施例提供的光学整形模组、装置及激光雷达系统，激光光源出射的光束可依次通过准直模块、扩束整形模块和慢轴匀化模块，或者光束依次通过准直模块、慢轴匀化模块和扩束整形模块；其中，经过准直模块完成对光束在快轴方向上准直，同时优化慢轴方向的光场分布，光束经过包括至少一个透镜的扩束整形模块时，扩束整形光束在快轴方向和/或慢轴方向的发散角，光束通过包括至少一个微柱面阵列透镜的慢轴匀化模块时，在慢轴匀化光束，匀化慢轴的角空间能量分布，形成慢轴小角度匀化线光斑。本申请实施例提供的光学整形模组，依次对光束的快轴准直、优化慢轴方向的光场分布，扩束整形光束在快轴方向和/或慢轴方向的发散角，慢轴小角度光束能量匀化，实现小体积压缩慢轴发散角，得到慢轴小角度匀化线光斑，以在慢轴方向获得高能量均匀度的前提下，实现慢轴更小的发散角度，对光斑的利用率高，适应小体积的场景，解决现有技术中无法同时满足在慢轴方向高能量密度和极小的发散角度的技术问题，快速实现方案升级。
附图说明
为了更清楚地说明本申请实施例的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，应当理解，以下附图仅示出了本申请的某些实施例，因此不应被看作是对范围的限定，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他相关的附图。
图1为本申请实施例提供的光学整形模组的其中一种实施例结构示意图；
图2为本申请实施例提供的光学整形模组的准直模块的其中一种实施例结构示意图；
图3为本申请实施例提供的光学整形模组的准直模块的另一种实施例结构示意图；
图4为本申请实施例提供的光学整形模组的扩束整形模块的其中一种实施例结构示意图；
图5为本申请实施例提供的光学整形模组的扩束整形模块的另一种实施例结构示意图；
图6为本申请实施例提供的光学整形模组的慢轴匀化模块的其中一种实施例结构示意图；
图7为本申请实施例提供的光学整形模组的慢轴匀化模块的另一种实施例结构示意图；
图8-图13是本申请实施例提供的光学整形模组的其中几种实施例结构示意图；
图14为本申请实施例提供的光学整形模组形成的角空间光斑图；
图15为本申请实施例提供的光学整形模组形成的角空间慢轴能量分布曲线；
图16为本申请实施例提供的光学整形模组形成的角空间快轴能量分布曲线；
图17为本申请实施例提供的经过不同数值孔径的匀化模块时波动光学仿真图之一；
图18为本申请实施例提供的经过不同数值孔径的匀化模块时波动光学仿真图之二。
图标：10-激光光源；100-准直模块；101-双凸非球面透镜；102-快轴准直透镜；103-慢轴准直透镜；200-扩束整形模块；201、206-双凸柱透镜；202、205-单凸柱透镜；203-第一球透镜；204-第二球透镜；300-慢轴匀化模块；301-微柱面阵列透镜；302-微柱面透镜；400-反射镜。
具体实施方式
为使本申请实施例的目的、技术方案和优点更加清楚，下面将结合本申请实施例中的附图，对本申请实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例是本申请一部分实施例，而不是全部的实施例。通常在此处附图中描述和示出的本申请实施例的组件可以以各种不同的配置来布置和设计。
因此，以下对在附图中提供的本申请的实施例的详细描述并非旨在限制要求保护的本申请的范围，而是仅仅表示本申请的选定实施例。基于本申请中的实施例，本领域普通技 术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本申请保护的范围。
应注意到：相似的标号和字母在下面的附图中表示类似项，因此，一旦某一项在一个附图中被定义，则在随后的附图中不需要对其进行进一步定义和解释。
在本申请的描述中，需要说明的是，术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，或者是该发明产品使用时惯常摆放的方位或位置关系，仅是为了便于描述本申请和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。此外，术语“第一”、“第二”、“第三”等仅用于区分描述，而不能理解为指示或暗示相对重要性。
此外，术语“水平”、“竖直”等术语并不表示要求部件绝对水平或悬垂，而是可以稍微倾斜。如“水平”仅仅是指其方向相对“竖直”而言更加水平，并不是表示该结构一定要完全水平，而是可以稍微倾斜。
在本申请的描述中，还需要说明的是，除非另有明确的规定和限定，术语“设置”、“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以具体情况理解上述术语在本申请中的具体含义。
参照图1所示，图1为本申请实施例提供的光学整形模组的其中一种实施例结构示意图。本申请实施例提供的光学整形模组包括沿激光光源10的光轴依次排列的准直模块100、扩束整形模块200和慢轴匀化模块300；或者，包括沿激光光源10的光轴依次排列的准直模块100、慢轴匀化模块300和扩束整形模块200。
其中，准直模块100被配置为对激光光源10发射的光束在快轴方向上准直，同时优化慢轴方向的光场分布；扩束整形模块200包括至少一个透镜，被配置为扩束整形光束在快轴方向和/或慢轴方向的发散角；慢轴匀化模块300包括至少一个微柱面阵列透镜301，被配置为在慢轴方向匀化光束。
准直模块100、扩束整形模块200和慢轴匀化模块300依次排列时，激光光源10出射光束，光束依次通过准直模块100、扩束整形模块200和慢轴匀化模块300。其中，准直模块100对光束的快轴方向进行准直，同时实现慢轴光场分布的优化，对慢轴光场分布的优化包括但不限于对慢轴光束发散角的调控(压缩或者扩大)。
经准直模块100的光束依次经扩束整形模块200、慢轴匀化模块300，扩束整形模块200对光束快轴方向和/或慢轴方向的发散角进行先压缩再准直的方式进行扩束，实现对光束快轴方向和/或慢轴方向发散角的扩束整形。
而慢轴匀化模块300包括至少一个微柱面阵列透镜301，功能为改变或匀化慢轴角空间能量分布，使其形成特定发散角和均匀度要求的近似平顶强度分布的光斑形态，实现慢轴小发散角(如小于1°)条件下的能量匀化；经扩束整形模块200的光束依次经过至少一个微柱面阵列透镜301，以对光束在慢轴方向上的小角度光束进行能量匀化，最终出射慢轴小角度匀化线光斑。
本申请实施例提供的光学整形模组，激光光源10出射的光束可依次通过准直模块100、扩束整形模块200和慢轴匀化模块300，或者光束依次通过准直模块100、慢轴匀化模块300和扩束整形模块200；经过准直模块100完成对光束在快轴方向上准直，同时优化慢轴方向的光场分布，光束经过包括至少一个透镜的扩束整形模块200，对光束在快轴方向和/或慢轴方向的发散角进行先压缩再准直的方式进行扩束，光束通过包括至少一个微柱面阵列透镜301的慢轴匀化模块300，改变或匀化慢轴的角空间能量分布，形成慢轴小角度匀化线光斑。本申请实施例提供的光学整形模组，依次对光束的快轴准直、优化慢轴方向的光场分布，在快轴方向和/或慢轴方向的发散角进行先压缩再准直的方式进行扩束，慢轴小角度光束能量匀化，实现小体积压缩慢轴发散角，得到慢轴小角度匀化线光斑，以在慢轴方向获得高能量均匀度的前提下，实现慢轴更小的发散角度，对光斑的利用率高，适应小体积的场景，例如可配合转镜、MEMS等实现二维扫描，实现激光雷达测距，解决现有技术中无法同时满足在慢轴方向高能量密度和极小的发散角度的技术问题。
具体地，在其中一个可能的实现中，准直模块100被配置为图2所示的单个双凸非球面透镜101；或者，准直模块100被配置为图3所示的准直透镜组。
双凸非球面透镜具有更佳的曲率半径，可以维持良好的像差修正，以获得所需要的性能。以半导体激光器Laser Diode(以下简称“LD”)作为激光光源10为例，本申请中的准直模块100采用一单片双凸非球面透镜101时，同时对快轴和慢轴进行准直，通过在主要保证快轴小发光尺寸大发散角度的像差优化基础上，同时兼顾对慢轴大发光尺寸像差的校正，在给定透镜焦距保证LD快轴获得较小发散角(如≤0.1°)的条件下，能够适应LD更大的慢轴发光尺寸，从而对系统功率密度提升起到辅助作用。
在本申请的另一个可实现的方式中，准直模块100被配置为准直透镜组，即光束通过多个依次设置的准直透镜准直。
采用准直透镜组时，分别对快轴和慢轴进行准直，可以将像差优化的更小，有利于发散角的压缩。
具体准直透镜面型取决于像差要求，像差要求不高时，可采用简单的单片透镜，如平凸或双凸透镜，并允许较大的相对孔径。像差要求较高时，采用双胶合透镜，相对孔径也适当缩小，具体根据需求选用。
光束经准直模块100在快轴方向上准直后，再依次经扩束整形模块200，扩束整形模块200由一个、两个或多个透镜组成，用于压缩快轴和/或慢轴的发散角，透镜可以是柱透镜(指针对慢轴扩束)，也可以是球透镜(快轴和慢轴同时扩束)，图4为球透镜的示例，图5为柱透镜的示例，完成对光束发散角的整形。
例如：扩束整形模块200采用两个球透镜同时对快轴和慢轴光束采用先压缩、再准直的形式扩束，在实现快轴和慢轴准直的前提下，降低了对光学元件的加工和组装精度需求，缩小了系统体积。扩束整形模块200采用两个柱透镜对慢轴光束采用先压缩、再准直的形式扩束，在实现慢轴准直的前提下，降低了对光学元件的加工和组装精度需求，缩小了系统体积。
慢轴匀化模块300包括一个、两个或多个柱面微透镜阵列，其功能为改变或匀化慢轴角空间能量分布，使其形成特定发散角和均匀度要求的近似平顶强度分布的光斑形态，实现慢轴小发散角(如小于1°)条件下的能量匀化。微透镜阵列可放置在光路不同位置(例如准直模块100后或光路出口处等位置)。
慢轴匀化模块300包括两个以上的微柱面阵列透镜301时，两个以上的微柱面阵列透镜301为相同的微柱面阵列透镜301，换言之，两个以上的微柱面阵列透镜301的面型、参数等各方面一致。光束经两个以上的相同的微柱面阵列透镜301，也就是经两个以上的慢轴方向上的小角度光束能量匀化，最终投射出慢轴小角度匀化线光斑。
示例地，微柱面阵列透镜301可在入射面上形成阵列，也可在出射面上形成阵列，阵列的面型也可具有多种，例如可为多个连续凸面的阵列，也可为多个连续锯齿面的阵列等等；还可以为一维阵列，或者二维阵列等，此处均不做具体限制。
本申请实施例提供的光学整形模组，采用至少一个微柱面阵列透镜301对光束进行匀化，实现小发散角(如小于1°)条件下的能量匀化，形成均匀的小线光斑，一个微柱面阵列透镜301相当于一个匀化器，采用两个微柱面阵列透镜301还可避免使用一个匀化器而导致器件太厚不具备可加工性。微柱面阵列透镜301为图6所示的匀化器，或者微柱面阵列透镜301为图7所示的具有一对匀化器的匀化器组。
在本申请的另一个实施例中，准直模块100、扩束整形模块200、慢轴匀化模块300的组合方式还有其他的实现形式。例如，图1中准直模块100为单个双凸非球面透镜101，扩束整形模块200为双凸柱透镜201和单凸柱透镜202的组合，慢轴匀化模块300为两个微柱面阵列透镜301，以形成准直模块100、扩束整形模块200、慢轴匀化模块300的组合方式。
示例地，扩束整形模块200包括第一柱透镜和第二柱透镜，第一柱透镜和第二柱透镜均为正透镜；或者第一柱透镜为负透镜，第二柱透镜为正透镜。
光源发射的光束，经准直模块100准直后，扩束整形模块200中，第一柱透镜和第二柱透镜均为正透镜，通过第一柱透镜将慢轴光线会聚成小尺寸光斑，在BPP守恒前提下，以大于LD慢轴发散角出射，后经第二柱透镜完成慢轴准直，出射光束最终通过两个微柱面阵列透镜301组成的慢轴匀化模块300投射出慢轴小角度匀化线光斑，如图1所示。
在其他实施例中，第一柱透镜为负透镜，第二柱透镜为正透镜，通过第一柱透镜将慢轴光线扩散，在BPP守恒前提下，后经第二柱透镜完成慢轴准直，出射光束最终通过成对微柱面阵列透镜301组成的慢轴匀化模块300投射出慢轴小角度匀化线光斑，其缺点是对光学元件的加工组装精度要求相对较高。
本申请实施例提供的光学整形模组，可基于多通道EEL芯片(有源区较大)，实现慢轴极小角度(<1度)且高度均匀的小线光斑，配合转镜、MEMS等实现二维扫描，实现激光雷达测距，通过快速实现方案升级。
另一方面，本申请实施例还提供一种光学整形模组，准直模块100、慢轴匀化模块300和扩束整形模块200依次排列；准直模块100被配置为对激光光源10发射的光束在快轴方向上准直，同时优化慢轴方向的光场分布；慢轴匀化模块300包括一个微柱面透镜302，被配置为被配置为在慢轴方向匀化光束、匀化慢轴的发散角；扩束整形模块200包括球透镜组，被配置为提高光学整形模组的性能。
与前述实施例不同的是，光学整形模组还可通过准直模块100、慢轴匀化模块300、扩束整形模块200的方式呈现。
如图8所示，准直模块100被配置为快轴准直透镜102和慢轴准直透镜103，快轴准直透镜102在快轴方向上为凸面，慢轴准直透镜103为柱面镜，实现快轴准直，慢轴压缩发散角，此种方式能在充分矫正快轴像差的条件下，降低成本，快轴准直透镜102的设置是将凸面型放在进光面上，与常规快轴准直透镜102面型放在出光面上相比，具有等同快轴准直透镜102焦距的后截距(即快轴准直透镜102的焦距和后截距相等)，可以将应用范围扩展到一些封装好的LD上，如QFN封装的SPL_S4L90A，封装好的LD对快轴准直透镜102的后截距要求超过其封装尺寸。而常规快轴准直透镜102的后截距一般<0.2mm，是不能满足封装后准直距离要求的。
慢轴匀化模块300为一个微柱面透镜302，用于对慢轴光束进行匀化，将慢轴匀化模块300放在扩束整形模块200之前，由于对慢轴只是进行了初步发散角压缩，因此进入慢轴匀化模块300的光束入射角较大，从而降低微柱面透镜302的波动光学效应，获得更好的均匀性。
扩束整形模块200为球透镜组，包括第一球透镜203和第二球透镜204，相比于图1所示的柱透镜组，其对热效应带来的影响具有更多的容忍性，有利于提高系统的性能，且 加工方式更成熟，精度更容易保证，成本更低；图9为图8切除无效区域的快轴方向的光路示意图，图10为图8切除无效区域的慢轴方向的光路示意图。
还可以的情况是，如图11所示，采用单个双凸非球面透镜101准直、单片微柱面阵列透镜301慢轴匀化、单凸柱透镜组(单凸柱透镜205、单凸柱透镜202)扩束整形的组合方式，单凸柱透镜205和单凸柱透镜202的凸向不同，图11为慢轴方向光路图；图12为单个双凸非球面透镜101准直、单片微柱面阵列透镜301慢轴匀化、柱透镜组(双凸柱透镜206、单凸柱透镜202)扩束整形的组合方式，图12为慢轴方向光路图。
此外，本申请实施例提供的光学整形模组在激光光源10之后还包括一个反光镜，被配置为改变光束的传播方向，反射镜400用于改变光路的传播方向，反射镜400具体设置位置可根据需要选择。例如，请参照图13所示，反射镜400可设置在准直模块100和慢轴匀化模块300之间；还可以的情况是，反射镜400可设置在慢轴匀化模块300中，当慢轴匀化模块300包括两个微柱面阵列透镜301时，反射镜400设置在两个微柱面阵列透镜301之间，光束经第一个微柱面阵列透镜301匀化后，经过反射镜400改变方向后，再入射第二个微柱面阵列透镜301实现匀化。通过反射镜400改变光路，可适应不同的场景布局。
图14所示为本实施例整形后的角空间光斑能量分布示意图；图15所示为本实施例整形后的角空间慢轴能量分布曲线；图16所示为本实施例整形后的角空间快轴能量分布曲线。需要说明的是，上述几个实施例虽然都能实现慢轴小的发散角的均匀光斑，但在工程化过程中的输出效果会受到波动光学的影响。
例如在上述第二类实施例中，当两个微柱面阵列透镜301不能做到面型以及装调位置等完全相同时，输出光斑会出现很大波动。
相同的SPL_S4L90A光源下，经过图17数值孔径为sin(0.8°/2)的慢轴匀化模块300后与图18数值孔径为sin(9°/2)慢轴匀化模块300后的波动仿真效果差别很大。可见，进入慢轴匀化模块300的光束入射角越大，波动效应越微弱。
因此，本申请在工程化方面是将先对准直后的光束进行匀化，再进行扩束整形。将慢轴匀化模块300置于扩束整形模块200之前，由于对慢轴只是进行了初步发散角压缩，因此进入慢轴匀化模块300的光束入射角较大，从而降低微柱面透镜302的波动光学效应，获得更好的均匀性。
由此，本申请实施例的第二方面还提供一种光学整形装置，包括激光光源10，还包括上述光学整形模组。其中，激光光源10为多通道边发射激光器光源。
上述光学整形装置可应用于激光雷达系统，本申请实施例的第三方面提供一种激光雷达系统，包括上述光学整形装置。可应用于以LD作为光源的汽车LiDAR激光线光斑系统，在LD出射激光束慢轴方向获得高能量均匀度的前提下，实现了慢轴更小的发散角度，光 路简单、体积较小，装调简便，以点光源配合振镜扫描的LiDAR激光系统，获得较高的能量密度，对光斑的利用率高，在同等扫描幅面及扫描分辨率下，扫描时间短。
该光学整形装置、激光雷达系统包含与前述实施例中的光学整形模组相同的结构和有益效果。光学整形模组的结构和有益效果已经在前述实施例中进行了详细描述，在此不再赘述。
以上仅为本申请的可选实施例而已，并不用于限制本申请，对于本领域的技术人员来说，本申请可以有各种更改和变化。凡在本申请的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本申请的保护范围之内。
另外需要说明的是，在上述具体实施方式中所描述的各个具体技术特征，在不矛盾的情况下，可以通过任何合适的方式进行组合，为了避免不必要的重复，本申请对各种可能的组合方式不再另行说明。

Claims (11)

  1. 一种光学整形模组，其特征在于，包括准直模块、扩束整形模块和慢轴匀化模块；
    所述准直模块被配置为对激光光源发射的光束在快轴方向上准直，同时优化慢轴方向的光场分布；
    所述扩束整形模块包括至少一个透镜，被配置为扩束整形所述光束在所述快轴方向和/或所述慢轴方向的发散角；
    所述慢轴匀化模块包括至少一个微柱面阵列透镜，被配置为在所述慢轴方向匀化所述光束。
  2. 根据权利要求1所述的光学整形模组，其特征在于，所述准直模块、所述扩束整形模块和所述慢轴匀化模块沿激光光源的光轴依次排列时，所述准直模块被配置为单个双凸非球面透镜；或者，所述准直模块被配置为准直透镜组。
  3. 根据权利要求2所述的光学整形模组，其特征在于，所述扩束整形模块的透镜为柱透镜或球透镜。
  4. 根据权利要求2所述的光学整形模组，其特征在于，所述扩束整形模块包括第一柱透镜和第二柱透镜，所述第一柱透镜和第二柱透镜均为正透镜；或者所述第一柱透镜为负透镜，所述第二柱透镜为正透镜。
  5. 根据权利要求2所述的光学整形模组，其特征在于，所述微柱面阵列透镜为匀化器或者具有一对匀化器的匀化器组。
  6. 根据权利要求1所述的光学整形模组，其特征在于，所述准直模块、所述慢轴匀化模块和所述扩束整形模块沿激光光源的光轴依次排列时，所述准直模块被配置为快轴准直透镜和慢轴准直透镜，所述快轴准直透镜在所述快轴方向上为凸面，所述慢轴准直透镜为柱面镜。
  7. 根据权利要求6所述的光学整形模组，其特征在于，所述慢轴匀化模块为一个微柱面透镜。
  8. 根据权利要求6所述的光学整形模组，其特征在于，所述扩束整形模块为球透镜组。
  9. 一种光学整形装置，其特征在于，包括激光光源，以及设置在所述激光光源出光侧的权利要求1至8任一项所述的光学整形模组。
  10. 根据权利要求9所述的光学整形装置，其特征在于，所述激光光源为多通道边发射激光器光源。
  11. 一种激光雷达系统，其特征在于，包括如权利要求9或10所述的光学整形装置。
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