WO2023240847A1 - 一种分束整形模组、扫描光学系统及激光应用终端 - Google Patents

一种分束整形模组、扫描光学系统及激光应用终端 Download PDF

Info

Publication number
WO2023240847A1
WO2023240847A1 PCT/CN2022/123420 CN2022123420W WO2023240847A1 WO 2023240847 A1 WO2023240847 A1 WO 2023240847A1 CN 2022123420 W CN2022123420 W CN 2022123420W WO 2023240847 A1 WO2023240847 A1 WO 2023240847A1
Authority
WO
WIPO (PCT)
Prior art keywords
shaping
mirror
light
axis
fast
Prior art date
Application number
PCT/CN2022/123420
Other languages
English (en)
French (fr)
Inventor
种洪涛
刘琳
刘兴胜
Original Assignee
西安炬光科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 西安炬光科技股份有限公司 filed Critical 西安炬光科技股份有限公司
Publication of WO2023240847A1 publication Critical patent/WO2023240847A1/zh

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems

Definitions

  • the present disclosure relates to the field of laser technology, and specifically to a beam splitting shaping module, a scanning optical system and a laser application terminal.
  • lasers are more and more widely used in people's production and life. With its good unidirectionality and penetration, laser has been relatively maturely used in laser radar, photoelectric slip rings and other related work fields. Laser with sufficient energy intensity is used in laser processing, which can provide accurate and high-precision cutting, Etching or other laser processing. In medicine, lasers have also been widely used in treatment and health care. Medical research shows that laser beams with a certain wavelength range and energy intensity act on human skin and can have cosmetic effects such as freckle removal, firming, and skin rejuvenation. Correspondingly, Laser beauty instruments came into being.
  • equal-intensity beam splitting of laser light is usually achieved by using wave-splitting surfaces or diffractive optical elements.
  • Diffractive optical elements have higher requirements for device installation accuracy and working environment, and their application limitations are relatively large.
  • the method of wave-splitting surfaces First, the laser beam emitted by the laser is shaped into a flat-top distribution, and then the flat-top distribution beam is split. Through beam splitting, the split beams are emitted with equal intensity. However, due to the impact of the split light intensity on the laser beam itself, The slow-axis divergence angle is extremely sensitive.
  • the slow-axis divergence angle of the laser beam emitted by the laser deviates slightly from the design value, it will greatly affect the energy consistency of the emitted split-beam light, resulting in unstable product performance. If the application For products that directly act on the human body, the safety of the product may be affected.
  • the purpose of the embodiments of the present disclosure is to provide a beam splitting shaping module, a scanning optical system and a laser application terminal, which can achieve relatively stable and equal-intensity beam splitting light output, so that the scanning optical system and the laser application terminal have better products Performance, working stability and safety of use are better.
  • a beam splitting shaping module including a shaping mirror group and a beam splitter arranged in sequence along the main optical axis of the light beam, and a reflection unit arranged in the direction of the reflected light of at least one beam splitter.
  • the shaping mirror group includes a fast-axis shaping mirror and a slow-axis shaping mirror.
  • the beam splitter is set at a first preset angle with the main optical axis of the beam.
  • the reflector and the beam splitter cut out light surfaces in parallel at equal intervals, so that The split beams that pass through the beam splitter emerge in parallel along the fast axis direction as multiple equally spaced light spots.
  • the beam splitter includes a first beam splitter, and a second beam splitter and a third beam splitter that are separate from the two splitting directions of the first beam splitter, and further It includes a reflector that matches the settings of the second beam splitter and the third beam splitter respectively, and is used to turn a split beam of the second beam splitter and a split beam of the third beam splitter in a turning direction so as to form multiple split beams.
  • the beams are emitted at parallel intervals, and the beam splitting ratios of the first beam splitter, the second beam splitter and the third beam splitter are all 1:1.
  • the shaping lens group includes a fast-axis shaping mirror for collimating and shaping the fast-axis direction of the incident light beam.
  • the width of the light beam emitted by the fast-axis shaping mirror in the fast-axis direction Smaller than the spacing of the emitted light spots.
  • the fast-axis shaping mirror satisfies the relationship:
  • f fac is the focal length of the fast-axis shaping mirror
  • P is the spacing of the outgoing light spots
  • ⁇ is the fast-axis divergence angle of the light beam.
  • a focusing lens is further included.
  • the focusing lens is disposed on the light exit side of the split beam along the fast axis direction, and is used to adjust the position and size of the light spot projected by the split beam on the receiving surface.
  • a scanning optical system which includes any one of the aforementioned beam splitting shaping modules, and also includes a scanning lens group, which is driven to reciprocate along the optical axis direction to split the beam.
  • the split-beam scanning output of the shaping module is a scanning light spot.
  • the scanning lens group includes a reflector and an array focusing mirror.
  • the array focusing mirror has a relative fast-axis array transmission surface and a slow-axis array transmission surface.
  • the reflector includes a curved surface array along the fast axis direction.
  • the shaping lens group includes a slow-axis shaping mirror, which is used to collimate and shape the slow-axis direction of the incident light beam.
  • the slow-axis shaping mirror satisfies the relationship:
  • W s L*f sa /f sac ;
  • W s is the width of the emitted light spot in the slow axis direction
  • L is the slow axis luminous width of the light beam
  • f sa is the focal length of the array focusing mirror in the slow axis direction
  • f sac is the focal length of the slow axis shaping mirror.
  • the reflector is a curved surface array, or the sub-reflector is a cylindrical reflector.
  • the curved surface array satisfies the relationship:
  • W f is the width of the emitted light spot in the fast axis direction
  • f fa is the fast axis focal length of the array focusing mirror
  • NA is the numerical aperture of each split light in the fast axis direction after passing through the curved surface array.
  • the fast-axis array transmission surface and the slow-axis array transmission surface are respectively micro-cylindrical arrays composed of micro-cylinders on the surface of the array focusing mirror.
  • the number of microcylinders on the transmission surface of the fast axis array corresponds to the number of split beams, and the width of the microcylinders is greater than the spacing of the emitted light spots.
  • the scanning optical system further includes a scanning mirror support body and a driving member that drives the scanning mirror support body to reciprocate along the slow axis direction. The positions are respectively fixed on the scanning mirror support body.
  • the scanning optical system further includes a light source.
  • the beam emitted by the light source is emitted parallel to the fast axis direction through the beam splitting and shaping module.
  • the sub-beam is scanned by the scanning lens group and emitted into a scanning spot. .
  • Another aspect of the embodiments of the present disclosure provides a laser application terminal, including any of the foregoing beam splitting shaping modules, or any of the foregoing scanning optical systems.
  • the beam splitting shaping module includes a shaping lens group and a beam splitter arranged in sequence along the main optical axis of the light beam, and a reflector arranged in the direction of reflected light of at least one beam splitter.
  • the shaping lens group includes Fast-axis shaping mirror and slow-axis shaping mirror.
  • the fast-axis shaping mirror of the shaping mirror group can shape the fast-axis direction of the light beam.
  • the slow-axis shaping mirror of the shaping mirror group can shape the slow-axis direction of the light beam, so that it can According to the parameters of the exit light spot, the beam needs to be shaped in the fast axis and slow axis directions.
  • the beam splitter and the main optical axis of the beam are set at a first preset angle.
  • the reflector and the beam splitter are parallel and the light exit surfaces are equally spaced. , the split beams split by the beam splitter are emitted parallel to multiple spaced light spots along the fast axis direction.
  • the beam is first shaped into collimated light of equal energy intensity.
  • collimated light with equal energy intensity can be split into equal-intensity beams in any required number, thereby obtaining multiple equally spaced and equal-intensity light spots.
  • Figure 1 is one of the structural schematic diagrams of a beam splitting shaping module provided by an embodiment of the present disclosure
  • Figure 2 is a second structural schematic diagram of a beam splitting shaping module provided by an embodiment of the present disclosure
  • Figure 3 is a schematic structural diagram of a scanning optical system provided by an embodiment of the present disclosure.
  • Figure 4 is a schematic structural diagram of an array focusing mirror in a scanning optical system provided by an embodiment of the present disclosure
  • Figure 5 is a schematic structural diagram of a reflector in a scanning optical system provided by an embodiment of the present disclosure
  • Figure 6 is a simulation rendering of a scanning spot emitted by a scanning optical system provided by an embodiment of the present disclosure
  • Figure 7 is a partial enlarged view of a light spot in Figure 6.
  • Icon 10-shaping mirror group; 11-fast axis shaping mirror; 12-slow axis shaping mirror; 20-beam splitter; 21-first beam splitter; 22-second beam splitter; 23-third beam splitter Mirror; 30-reflecting mirror; 40-scanning mirror group; 41-reflecting mirror; 42-array focusing mirror; 421-fast axis array transmission surface; 422-slow axis array transmission surface; 70-light source.
  • orientation or positional relationship indicated by the terms “inner”, “outer”, etc. is based on the orientation or positional relationship shown in the drawings, or is the customary placement of the applied product when in use.
  • the orientation or positional relationship is only for the convenience of describing the present disclosure and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the disclosure.
  • first”, “second”, etc. are only used to differentiate descriptions and are not to be understood as indicating or implying relative importance.
  • the terms "setting” and “connection” should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection. Connected, it can also be connected indirectly through an intermediary, or it can be an internal connection between two components.
  • the specific meanings of the above terms in this disclosure can be understood on a case-by-case basis.
  • an embodiment of the present disclosure provides a beam splitting shaping module, which includes a shaping mirror group 10 and a beam splitter 20 arranged in sequence along the main optical axis of the beam, and a reflected light direction in at least one beam splitter 20
  • the reflective mirror 30 is provided, and the shaping mirror group 10 includes a fast-axis shaping mirror 11 and a slow-axis shaping mirror 12.
  • the beam splitter 20 is arranged at a first preset angle with the main optical axis of the light beam, for example, as shown in Figure 1
  • the 45° shown is based on the needs of the overall optical path design. It can also be set in the angle range of 0-90°.
  • the angle range is 30°-60°. It is better to set it within the range of °.
  • the reflector 30 is parallel to the beam splitter 20, and the light exit surface of the reflector 30 is equally spaced from the light exit surface of the beam splitter 20, so that the split beam passing through the beam splitter 20 is along the fast axis.
  • the direction is parallel and the light spots are emitted into multiple equally spaced spots, which eliminates the impact of the spot slow axis divergence angle error on the spot energy consistency.
  • a shaping lens group 10 and a beam splitter 20 are arranged in sequence.
  • the beam emitted by the light source is first subjected to beam shaping processing in the shaping lens group 10.
  • the shaping lens group 10 It includes a fast-axis shaping mirror 11 and a slow-axis shaping mirror 12.
  • the shaping lens group 10 includes the fast-axis shaping mirror 11
  • the light beam passing through the fast-axis shaping mirror 11 can be shaped in the direction of the fast axis, where the shaping includes collimating the light beam.
  • the light beam passing through the slow axis shaping mirror 12 can achieve shaping processing in the slow axis direction.
  • the shaping lens group 10 includes a fast-axis shaping mirror 11 and a slow-axis shaping mirror 12.
  • the light beam passing through the shaping lens group 10 can achieve the same type or different types of shaping processing in the fast-axis direction and the slow-axis direction.
  • the fast axis shaping mirror 11 collimates and shapes the light beam in the fast axis direction
  • the slow axis shaping mirror 12 collimates and shapes the light beam in the slow axis direction.
  • the present disclosure is not limited to this, and the shaping can also be are other forms of processing as described above.
  • the shaping lens group 10 includes a fast-axis shaping mirror 11 and a slow-axis shaping mirror 12
  • the arrangement of the fast-axis shaping mirror 11 and the slow-axis shaping mirror 12 along the optical path transmission direction is not specified in the embodiment of the present disclosure. limit, but in fact, the settings of the fast-axis shaping mirror 11 and the slow-axis shaping mirror 12 along the optical path transmission direction are different, and the specific optical element settings and parameter settings of the fast-axis shaping mirror 11 and the slow-axis shaping mirror 12 should also be different. Adjustment, those skilled in the art can make specific detailed settings according to different requirements for the actual exit light spot.
  • the beam that is shaped by the shaping lens group 10 enters the beam splitter 20.
  • the beam splitter 20 can be a semi-transparent mirror or other similar optical elements that can split the beam into two or more parts. Taking a half mirror as an example, the light beam is divided into two parts through the half mirror. One part is emitted from the transmission surface of the half mirror as transmitted light, and the other part is reflected by the reflective surface of the half mirror as reflected light. This achieves beam splitting.
  • the beam splitter 20 is arranged at an angle of 45° to the main optical axis of the beam. In this way, the reflected light from the beam splitter 20 is reflected in a direction of 90° to the beam.
  • the direction of the reflected light from the beam splitter 20 is also The reflector 30 is set up parallel to the beam splitter 20.
  • the reflected light split beam is then turned 90° by the reflector 30 and emitted, and then the transmitted light split beam can be emitted parallel to the fast axis direction as equally spaced light spots.
  • the number of split beams is not specifically limited in the embodiments of the present disclosure.
  • the number of equally spaced split beams after shaping the beam emitted by the light source can be selected according to requirements. Those skilled in the art should know that with the aforementioned split beams In this way, the light beam can be equally divided into various required numbers of equally spaced divided light beams through the number and mutual positional relationship of the beam splitting mirrors 20 .
  • multiple half-mirrors can be arranged in sequence, and the reflected light directions of the multiple half-mirrors are arranged in accordance with the direction of the semi-transparent and half-mirrors.
  • the parallel mirrors 30 are arranged in mutual positional relationship, so that the reflected light beams that are turned by 90° and emitted are transmitted by the other semi-transparent mirror.
  • the reflection and transmission beam splitting ratios of the six half-mirrors are configured in order from top to bottom in Figure 2 to be 5: 1, 4:1, 3:1, 2:1, 1:1, 0:1, the beam splitter 20 is composed of six single-piece semi-transparent half mirrors, combined with one reflector 30, or, six half mirrors.
  • the transmissive half mirror can form a stripe mirror as the beam splitter 20.
  • the beam splitter 20 can be coated with a transflective film that meets the beam splitting ratio at the corresponding position according to the aforementioned beam splitting ratio requirements.
  • This stripe mirror is coated with a transflective film.
  • the film layer method reduces the number of components in the module, which is more conducive to reducing costs.
  • the beam splitter 20 includes a first splitter.
  • the beam splitter 21, as well as the second beam splitter 22 and the third beam splitter 23 that are independent of the two splitting directions of the first beam splitter 21, also include matching second beam splitter 22 and third beam splitter 23 respectively.
  • the reflecting mirror 30 is provided for turning a split beam of the second beam splitter 22 and a split beam of the third beam splitter 23 in such a direction that the formed multiple split beams are emitted at parallel intervals.
  • the first beam splitter 21 is provided for turning a split beam of the second beam splitter 22 and a split beam of the third beam splitter 23 in such a direction that the formed multiple split beams are emitted at parallel intervals.
  • the beam splitting ratios of the second beam splitter 22 and the third beam splitter 23 are both 1:1.
  • the first beam splitter 21 , the second beam splitter 22 and the third beam splitter 23 adopt the same configuration (for example, the same beam splitting ratio). Therefore, the types of components of the entire beam splitting shaping module can be reduced. Less, which helps reduce the cost of the module, reduces the assembly difficulty of the module, and improves assembly efficiency and installation accuracy.
  • the light beam emitted from the light source first enters the first beam splitter 20 after being shaped.
  • a second beam splitter 22 and a third beam splitter 23 are respectively provided in the reflected light direction and the transmitted light direction after passing through the first beam splitter 20. That is, the reflected light and transmitted light are split by the second beam splitter 22 and the third beam splitter 23 respectively, and a mirror 30 is provided on one of the split beam sides of the second beam splitter 22 to turn the direction of the split beam 90 °Emit in parallel with other partial beams, and a reflecting mirror 30 is also provided on one side of the third beam splitter 23 to turn the direction of the partial beam and then exit in parallel with other partial beams, thereby forming a beam as shown in Figure 1
  • the four equally divided beams can be equally spaced.
  • the beam splitting ratios of the first beam splitter 21 , the second beam splitter 22 and the third beam splitter 23 are all 1:1, that is, the light intensity of the reflected light and the transmitted light is evenly distributed, which is more conducive to forming an equal distribution of the exit light. Intensity, equally spaced light spots.
  • the beam splitting ratio of the beam splitter 20 can also be specifically set under the requirement of spacing light spots of other required energy distribution types.
  • the multiple beam splitters 20 are all arranged at an angle of 45° with the main optical axis of the light beam, there are differences between the multiple beam splitters 20.
  • the defined reflector 30 is parallel to the beam splitter 20 , which should be understood to mean that the reflector 30 is parallel to the direction of one of the oriented beam splitters 20 .
  • the multiple reflecting mirrors 30 may also have different orientations on the premise that the beam splitter 20 is parallel.
  • the beam splitting shaping module includes a shaping mirror group 10 and a beam splitter 20 arranged in sequence along the main optical axis of the beam, and a reflector 30 arranged in the direction of the reflected light of at least one beam splitter 20.
  • the shaping lens group 10 includes a fast-axis shaping mirror 11 and/or a slow-axis shaping mirror 12.
  • the fast-axis shaping mirror 11 of the shaping lens group 10 can shape the fast-axis direction of the light beam.
  • the slow-axis shaping mirror of the shaping lens group 10 can 12 can shape the slow axis direction of the light beam, so that the light beam can be shaped in the fast axis and/or slow axis direction according to the parameters of the exit light spot.
  • the beam splitter 20 is in a first preset position with the main optical axis of the light beam. The angle is set, the reflector 30 and the beam splitter 20 are parallel, the light exit surface of the reflector 30 and the light exit surface of the beam splitter 20 are equally spaced, the split beams after being split by the beam splitter 20 emerge parallel to the fast axis direction as Multiple equally spaced light spots, by shaping the slow axis and/or fast axis direction of the beam, can first shape the beam into collimated light of equal energy intensity, and then through the combination of the beam splitter 20 and the reflector 30, It is possible to split collimated light with equal energy intensity into equal intensity beams in any required number, thereby obtaining multiple equally spaced and equal intensity light spots.
  • the shaping lens group 10 includes a fast-axis shaping mirror 11 for collimating and shaping the incident light beam in the fast-axis direction.
  • the light beam emitted by the fast-axis shaping mirror 11 is in the fast-axis direction.
  • the width of the direction is smaller than the spacing of the emitted light spots.
  • the shaping lens group 10 at least includes a fast-axis shaping mirror 11 for collimation and shaping in the fast-axis direction.
  • the fast-axis shaping can define the width of the beam that emerges after shaping, and limits the output of the fast-axis shaping mirror 11.
  • the width of the light beam in the fast axis direction is smaller than the spacing of the outgoing light spots, which can effectively reduce the possibility of crosstalk between equally spaced out light spots due to the short distance and the effect of the fast axis divergence angle.
  • the fast-axis shaping mirror 11 satisfies the relational expression:
  • f fac is the focal length of the fast-axis shaping mirror
  • P is the spacing of the outgoing light spots
  • ⁇ is the fast-axis divergence angle of the light beam.
  • the spaced light spots emitted by the beam splitting shaping module in the embodiment of the present disclosure can have For better application effects, the spacing P of the outgoing light spots is limited to satisfy the above formula (1), which is defined by the inequality relationship with the focal length f fac of the fast-axis shaping mirror 11 and the fast-axis divergence angle of the light beam, ensuring that the spacing between the outgoing light spots is There will be no beam crosstalk between them.
  • the beam splitting shaping module further includes a focusing lens.
  • the focusing lens is disposed on the light exit side of the split beam along the fast axis direction and is used to adjust the light spot projected by the split beam on the receiving surface. location and size.
  • the focusing mirror can usually converge and collimate the passing light beam.
  • a focusing mirror is provided on the light exit side of the beam splitting shaping module emitted from the beam splitting shaping module in the embodiment of the present disclosure along the fast axis direction. Different positions on the focusing mirror correspond to the outgoing split beams. , perform corresponding convergence and collimation on the split beams respectively, or also include adjusting the exit direction of the split beams through the setting position and angle of the focusing mirror surface, so as to adjust the position of the light spot formed by the split beams projected on the receiving surface. , and the shape and size of the spot.
  • the above-mentioned beam splitting shaping module including a focusing mirror can be used, and the beam splitting mirror can be used for 20 minutes.
  • the split beams emerge parallel to multiple spaced light spots along the fast axis direction.
  • the beam is first shaped into collimated light of equal energy intensity, and then passes through the beam splitter 20
  • the collimated light with equal energy intensity can be split into equal intensity beams in any required number to obtain multiple equally spaced and equal intensity light spots.
  • the equally spaced and equal-intensity light spots have the same shape, thereby achieving equal spacing, equal intensity and equal large scribing lines on the surface of the workpiece.
  • FIG. 3 Another aspect of the embodiment of the present disclosure provides a scanning optical system, as shown in Figure 3, including any one of the aforementioned beam splitting modules and a scanning lens group 40.
  • the scanning lens group 40 is driven along a slow edge. The reciprocating motion in the axial direction is used to scan and emit the split beams of the split beam shaping module into scanning spots.
  • the scanning lens group 40 includes a reflective mirror 41 and an array focusing mirror 42. As shown in Figure 4, the array focusing mirror 42 has an opposite fast axis array.
  • the scanning mirror group 40 includes a reflective mirror 41 and an array focusing mirror 42 arranged in sequence.
  • the split beams emitted from the beam splitting module are incident into the scanning mirror group 40 at parallel intervals along the fast axis direction.
  • the reflective mirror 41 The split beam emitted from the split beam shaping module enters the reflector 41 .
  • the reflector 41 turns the optical path of the split beam and then enters the array focusing mirror 42 .
  • the array focusing mirror 42 has opposite fast-axis array transmission surfaces 421 and slow-axis array transmission surfaces 422 , that is, the light beam passing through the array focusing mirror 42 achieves respective fast-axis and slow-axis directions. Focusing effect, since both the fast axis direction and the slow axis direction are transmission surfaces composed of arrays, therefore, the fast axis focusing and slow axis focusing of the beam are carried out respectively corresponding to the sub-beams to avoid crosstalk between the sub-beams.
  • the array focusing mirror 42 can be a monolithic optical element.
  • the fast-axis array transmission surface 421 and the slow-axis array transmission surface 422 are respectively formed on opposite sides of a single-piece optical element, as shown in FIG. 4 .
  • the array focusing mirror 42 can also be a two-piece optical element.
  • the fast-axis array transmission surface 421 and the slow-axis array transmission surface 422 are respectively formed on two different optical elements.
  • the two-piece optical elements can be arranged in parallel with a certain distance apart or can be arranged close to each other. .
  • the reflector 41 includes a curved surface array along the fast axis direction.
  • the reflector 41 can be regarded as an array surface formed by connecting multiple curved surfaces in sequence. Each curved surface corresponds to the split beam emitted from the beam splitting shaping module, and is used to perform splitting of the split beams respectively. Shaped reflection means homogenizing the beam along the fast axis and turning the optical path by 90°. The homogenized beam converges to form a flat-top energy distribution, which meets actual application requirements.
  • the reflector 41 is composed of multiple cylinders with curved surfaces connected along the fast axis direction, and the curved surfaces of the multiple cylinders are located on the same side of the reflector 41 to jointly form a curved surface array.
  • the shaping lens group 10 includes a slow-axis shaping mirror 12 for collimating and shaping the slow-axis direction of the incident light beam.
  • the slow-axis shaping mirror 12 satisfies the relationship:
  • W s is the width of the emitted light spot in the slow axis direction
  • L is the slow axis luminous width of the light beam
  • f sa is the focal length of the array focusing mirror 42 in the slow axis direction
  • f sac is the focal length of the slow axis shaping mirror 12 .
  • the emission shape is a scanning light spot that is scanned along the slow axis direction.
  • the spacing between two adjacent columns of light spots along the slow axis direction is related to the pulse frequency of the beam and the linear reciprocating speed of the scanning mirror group 40, which can be calculated by The settings of the above two parameters are used to design the spacing between two adjacent columns of light spots along the slow axis direction.
  • the scanning optical system is applied to laser beauty, if two adjacent columns of light spots in the scanning light spots overlap, the Light energy is also superimposed energy. If the local energy is too strong due to the superposition of light spots, it may cause skin damage.
  • the width W s of the emitted light spot in the slow axis direction satisfies formula (2) and is between the slow axis luminous width L of the light beam, the focal length f sa of the array focusing mirror 42 in the slow axis direction, and the focal length f sac of the slow axis shaping mirror 12
  • the relationship can define both the width W s of the emitted light spot in the slow axis direction and the spacing between two adjacent rows of light spots in the scanning light spot along the slow axis direction. The two cooperate with each other to avoid the superposition or partial superposition of two adjacent rows of light spots. This causes the problem of uneven energy in the scanning spot, and the array focusing mirror 42 is used to ensure that the shape of the spot is rectangular and the energy distribution is uniform and symmetrical.
  • the fast-axis array transmission surface 421 and the slow-axis array transmission surface 422 are respectively micro-cylindrical arrays composed of micro-cylinders on the surface of the array focusing mirror 42 .
  • the fast-axis array transmission surface 421 of the array focusing mirror 42 is a micro-cylindrical array composed of micro-cylindrical arrangements
  • the slow-axis array transmission surface 422 of the array focusing mirror 42 is a micro-cylindrical array composed of micro-cylindrical arrangements.
  • Cylindrical array in which the microcylindrical surfaces of the fast axis array transmission surface 421 are arranged along the fast axis direction, and the microcylindrical surfaces of the slow axis array transmission surface 422 are arranged along the slow axis direction, that is, the microcylindrical surfaces of the fast axis array transmission surface 421
  • the arrangement direction is orthogonal to the direct busbar of the micro-cylindrical arrangement direction of the slow axis array transmission surface 422 .
  • the number of micro-cylinders in the fast-axis array transmission surface 421 is the same as the preset number of light spots, and the width of the micro-cylinders > the spacing P of the emitted light spots.
  • the surface shape or structure of the microarray described in the embodiments of the present disclosure refers to millimeter-level microstructures.
  • Those skilled in the art should know that the surface shape of a millimeter-level microarray formed on an optical element When the light beam passes through the optical element, the microstructure realizes the refraction of the light beam. If the microfacet structure formed on the optical element is nanoscale, when the light beam passes through the optical element, the microfacet structure What is achieved is the diffraction effect on the light beam. Therefore, although they are all called microstructures, the size range of the microstructures has a direct impact on the optical effects.
  • the cylindrical reflector satisfies the relationship:
  • W f is the width of the emitted light spot in the fast axis direction
  • f fa is the fast axis focal length of the array focusing mirror 42
  • NA is the numerical aperture of each split light in the fast axis direction after passing through the curved surface array.
  • the width W f of the emitted light spot in the fast axis direction satisfies the above relationship (3) with the fast axis focal length f fa of the array focusing mirror 42 and the numerical aperture NA of the cylindrical mirror, and can pass through the fast axis focal length of the array focusing mirror 42 Realize the adjustment and setting of the width W f of the exiting light spot in the fast axis direction.
  • the scanning optical system further includes a scanning mirror support body and a driving member that drives the scanning mirror support body to reciprocate along the slow axis direction, the reflective mirror 41 of the scanning mirror group 40 and the array focusing mirror 42 are respectively fixedly arranged on the scanning mirror support body in a preset position relationship.
  • the scanning optical system also includes a scanning mirror support body.
  • the scanning mirror support body is provided with a driving member.
  • the driving member can drive the scanning mirror support body to reciprocate along the slow axis direction.
  • the reflector 41 and the array focusing mirror 42 are at a preset position.
  • the relationships are respectively fixed on the scanning mirror support body.
  • the driving member drives the scanning mirror support body to reciprocate linearly, the scanning mirror group 40 provided on the scanning mirror support body moves together with the scanning mirror support body in a preset position relationship.
  • the beam splitting shaping module is fixed, and the reflector 41 and the array focusing mirror 42 move together, which can effectively ensure that the relative positional relationship between the reflector 41 and the array focusing mirror 42 remains stable. This maintains the stable scanning light output of the scanning light path during the scanning movement, ensuring the stability and consistency of the spot size of the scanning spot as well as the spot energy and distribution throughout the scanning range.
  • the scanning optical system also includes a light source 70.
  • the light beam emitted by the light source 70 is emitted into parallel beams along the fast axis direction through the beam splitting and shaping module.
  • the scanning lens group 40 scans and outputs a scanning light spot.
  • the scanning optical system also includes a light source 70.
  • the light source 70 emits an application beam.
  • the light source 70 is a laser
  • the light source 70 emits a laser beam.
  • the beam shaping module is collimated and homogenized and the beam is equally divided, it is scanned by the scanning mirror group 40 and emitted into an equal-intensity scanning spot with uniform spot energy and distribution.
  • Another aspect of the embodiments of the present disclosure provides a laser application terminal, including any of the foregoing beam splitting shaping modules that does not include a focusing mirror, or a scanning optical system including any of the foregoing.
  • Laser beauty is a new form of beauty that has gradually emerged and prospered in recent years with the development of laser technology.
  • Laser beauty is to irradiate a laser beam with a specific wavelength and energy intensity through the epidermis and dermis of the skin, destroying pigment cells and pigment granules under the dermis, achieving whitening, rejuvenation, wrinkle removal and other beauty effects.
  • Cell debris can be processed and absorbed by macrophages in the body, and laser beauty is less painful and safer than other surgeries, making it increasingly popular among beauty lovers.
  • the laser beauty instrument is a small handheld instrument that performs beauty through laser beams. It is a type of laser application terminal.
  • the laser beauty instrument can use any of the aforementioned scanning optical systems to provide a laser beam of a specific wavelength and energy intensity.
  • the shell of the beauty instrument defines its shape and structure, thereby achieving simple and easy operation.
  • there are no specific restrictions on the shape and structure of the laser beauty instrument as long as it can use the built-in scanning optical system to scan the laser.
  • the output position of the beauty instrument only needs to output a scanning light spot with a specific wavelength and energy intensity to achieve convenient beauty operations.
  • the aforementioned beam splitting modules can also use any of the aforementioned beam splitting modules to provide a laser beam with a specific wavelength and energy intensity. For example: when it is necessary to use laser marking on the target. When marking lines of equal spacing, equal intensity and equal size on the surface of the workpiece, the above-mentioned beam splitting shaping module including a focusing mirror can be used. After being split by the beam splitter 20, the split beams emerge parallel to the fast axis direction.
  • the beam is shaped into collimated light of equal energy intensity, and then through the combination of the beam splitter 20 and the reflector 30, the beam is shaped into collimated light of equal energy intensity.
  • the collimated light is split into equal intensity beams in any required number to obtain multiple equally spaced and equal intensity light spots.
  • the reflector in the scanning lens group 40 can be set at an angle of 45° in the optical path, thereby turning the entire scanning optical path 90°, and the scanning optical path There is a 90° right angle relationship between the two parts, which makes it easy to set one part of the light path on the holding part of the casing, and the other part of the light path on the light emitting direction, so as to make full use of the internal space of the casing of the laser beauty instrument.
  • the compact light path structure Match the corresponding shape structure to assist the needs of device miniaturization.

Abstract

一种分束整形模组、扫描光学系统及激光应用终端，涉及激光技术领域，分束整形模组包括沿光束的主光轴依次设置的整形镜组（10）、分束镜（20），以及在至少一个分束镜（20）的反射光方向设置的反射镜（30），整形镜组（10）包括快轴整形镜（11）和慢轴整形镜（12），分束镜（20）与光束的主光轴呈第一预设夹角设置，反射镜（30）与分束镜（20）平行且出光面的间隔相等，以使经分束镜（20）的分光束沿快轴方向平行出射为多个等间隔的光斑。分束整形模组能够实现较为稳定的等强度分束光出射，从而使得扫描光学系统和激光应用终端具有较佳的产品性能，工作稳定性和使用安全性较佳。

Description

一种分束整形模组、扫描光学系统及激光应用终端
相关申请的交叉引用
本公开要求于2022年6月15日提交中国国家知识产权局的申请号为202210671032.9、名称为“一种分束整形模组、扫描光学系统及激光应用终端”的中国专利申请的优先权，其全部内容通过引用结合在本公开中。
技术领域
本公开涉及激光技术领域，具体涉及一种分束整形模组、扫描光学系统及激光应用终端。
背景技术
随着激光技术的发展，激光越来越广泛的应用于人们的生产生活中。激光以其较好的单向性和穿透性，已较为成熟的应用于激光雷达、光电滑环等相关工作领域，足够能量强度的激光应用于激光加工，能够提供为准确高精度的切割、刻蚀或其他激光加工。在医学上，激光也已经广泛应用于治疗和保健理疗中，医学研究表明，一定波长范围和能量强度的激光束作用于人体皮肤，能够具有祛斑、紧致、嫩肤等美容作用，相应的，激光美容仪应运而生。
应用于激光美容，需要对激光器出射的激光束进行等强度分束，即对出射激光束进行分束，使得出射为由光斑组成的区域面，并且还需要对分束光进行整形，以得到所需的均等能量强度分布的光斑区域面。
现有技术中，对于激光的等强度分束通常采用分波面或衍射光学元件来实现，衍射光学元件对器件的安装精度和工作环境要求较高，其应用的局限性较大，分波面的方式首先将由激光器出射的激光束整形为平顶分布，然后再对平顶分布的光束进行分束处理，通过分束方式来实现分光束的等强度出射，但是由于分束光强度对激光束自身的慢轴发散角极为敏感，激光器出射的激光束的慢轴发散角一旦与设计值出现细微偏差，则会极大的影响出射的分束光的能量一致性，从而导致产品性能不稳定，若应用于直接作用于人体的产品，则可能影响产品的使用安全性。
发明内容
本公开实施例的目的在于提供一种分束整形模组、扫描光学系统及激光应用终端，能够实现较为稳定的等强度分束光出射，从而使得扫描光学系统和激光应用终端具有较佳的产品性能，工作稳定性和使用安全性较佳。
本公开实施例的一方面，提供了一种分束整形模组，包括沿光束的主光轴依次设置的整形镜组、分束镜，以及在至少一个分束镜的反射光方向设置的反射镜，整形镜组包括快轴整形镜和慢轴整形镜，分束镜与光束的主光轴呈第一预设夹角设置，反射镜与分束镜平 行切出光面的间隔相等，以使经分束镜的分光束沿快轴方向平行出射为多个等间隔的光斑。
在本公开的一种可实现的实施方式中，分束镜包括第一分束镜，以及分立于第一分束镜的两个分光方向的第二分束镜和第三分束镜，还包括分别匹配第二分束镜和第三分束镜设置的反射镜，用于对第二分束镜的一个分光束和第三分束镜的一个分光束转折方向以使形成的多个分光束呈平行间隔出射，第一分束镜、第二分束镜和第三分束镜的分束比均为1:1。
在本公开的一种可实现的实施方式中，整形镜组包括快轴整形镜，用于对入射的光束的快轴方向准直整形，由快轴整形镜出射的光束在快轴方向的宽度小于出射的光斑的间距。
在本公开的一种可实现的实施方式中，快轴整形镜满足关系式：
P≥2*f fac*tan(θ/2)；
其中，f fac为快轴整形镜的焦距，P为出射的光斑的间距，θ为光束的快轴发散角。
在本公开的一种可实现的实施方式中，还包括聚焦镜，聚焦镜设置于分光束沿快轴方向的出光侧，用于调节分光束在接收面上投射的光斑的位置和尺寸。
本公开实施例的另一方面，提供了一种扫描光学系统，包括前述任意一项的分束整形模组，还包括扫描镜组，扫描镜组受驱沿光轴方向往复运动以将分束整形模组的分光束扫描出射为扫描光斑，扫描镜组包括反光镜和阵列聚焦镜，阵列聚焦镜具有相对的快轴阵列透射面和慢轴阵列透射面。
在本公开的一种可实现的实施方式中，反光镜包括沿快轴方向的曲面阵列。
在本公开的一种可实现的实施方式中，整形镜组包括慢轴整形镜，用于对入射的光束的慢轴方向准直整形，慢轴整形镜满足关系式：
W s＝L*f sa/f sac；
其中，W s为出射的光斑在慢轴方向的宽度，L为光束的慢轴发光宽度，f sa为阵列聚焦镜在慢轴方向的焦距，f sac为慢轴整形镜的焦距。
在本公开的一种可实现的实施方式中，反光镜为曲面阵列，或者，子反光镜为柱面反光镜。
在本公开的一种可实现的实施方式中，曲面阵列满足关系式：
W f≈2f fa*NA；
其中，W f为出射的光斑在快轴方向的宽度，f fa为阵列聚焦镜的快轴焦距，NA为经过曲面阵列后每个分束光在快轴方向的数值孔径。
在本公开的一种可实现的实施方式中，快轴阵列透射面和慢轴阵列透射面分别为在阵列聚焦镜表面上由微柱面组成的微柱面阵列。
在本公开的一种可实现的实施方式中，快轴阵列透射面的微柱面数量与分光束的数量 相对应，微柱面的宽度大于出射的光斑的间距。
在本公开的一种可实现的实施方式中，扫描光学系统还包括扫描镜支撑体以及驱动扫描镜支撑体沿慢轴方向往复运动的驱动件，扫描镜组的反光镜和阵列聚焦镜以预设位置分别固定设置于扫描镜支撑体上。
在本公开的一种可实现的实施方式中，扫描光学系统还包括光源，光源出射的光束经分束整形模组沿快轴方向平行出射分光束，分光束经扫描镜组扫描出射为扫描光斑。
本公开实施例的又一方面，提供了一种激光应用终端，包括前述任意一项的分束整形模组，或者前述任意一项的扫描光学系统。
本公开实施例提供的分束整形模组，包括沿光束的主光轴依次设置的整形镜组、分束镜，以及在至少一个分束镜的反射光方向设置的反射镜，整形镜组包括快轴整形镜和慢轴整形镜，通过整形镜组的快轴整形镜能够对光束的快轴方向进行整形，通过整形镜组的慢轴整形镜能够对光束的慢轴方向进行整形，从而能够根据出射光斑的参数需要在快轴和慢轴方向对光束进行整形处理，分束镜与光束的主光轴呈第一预设夹角设置，反射镜与分束镜平行且出光面的间隔相等，经分束镜分束后的分光束沿快轴方向平行出射为多个间隔的光斑，通过对光束慢轴和快轴方向的整形处理，首先将光束整形为等能量强度的准直光，再通过分束镜与反射镜的组合形式，能够实现对等能量强度的准直光以任意所需的数量进行等强度分束，从而得到多个等间隔且等强度的光斑。
附图说明
为了更清楚地说明本公开实施例的技术方案，下面将对本公开实施例中所需要使用的附图作简单地介绍，应当理解，以下附图仅示出了本公开的某些实施例，因此不应被看作是对范围的限定，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他相关的附图。
图1是本公开实施例提供的一种分束整形模组的结构示意图之一；
图2是本公开实施例提供的一种分束整形模组的结构示意图之二；
图3是本公开实施例提供的一种扫描光学系统的结构示意图；
图4是本公开实施例提供的一种扫描光学系统中阵列聚焦镜的结构示意图；
图5是本公开实施例提供的一种扫描光学系统中反光镜的结构示意图；
图6是本公开实施例提供的一种扫描光学系统出射的扫描光斑的仿真效果图；
图7是图6中一个光斑的局部放大图。
图标：10-整形镜组；11-快轴整形镜；12-慢轴整形镜；20-分束镜；21-第一分束镜；22-第二分束镜；23-第三分束镜；30-反射镜；40-扫描镜组；41-反光镜；42-阵列聚焦镜；421-快轴阵列透射面；422-慢轴阵列透射面；70-光源。
具体实施方式
下面将结合本公开实施例中的附图，对本公开实施例中的技术方案进行清楚、完整地描述。
在本公开的描述中，需要说明的是，术语“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，或者是该申请产品使用时惯常摆放的方位或位置关系，仅是为了便于描述本公开和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本公开的限制。此外，术语“第一”、“第二”等仅用于区分描述，而不能理解为指示或暗示相对重要性。
还需要说明的是，除非另有明确的规定和限定，术语“设置”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以具体情况理解上述术语在本公开中的具体含义。
请参照图1，本公开实施例提供一种分束整形模组，包括沿光束的主光轴依次设置的整形镜组10、分束镜20，以及在至少一个分束镜20的反射光方向设置的反射镜30，整形镜组10包括快轴整形镜11和慢轴整形镜12，分束镜20与光束的主光轴呈第一预设夹角设置，例如可以为如图1中所示的45°，基于整体光路设计的需要，也可以在0-90°的角度范围内进行对应设置，通常基于光束质量和损失比例等的考虑，本领域技术人员应当知晓，在30°-60°的范围内设置较佳，反射镜30与分束镜20平行，并且反射镜30的出光面与分束镜20的出光面的间隔相等，以使经分束镜20的分光束沿快轴方向平行出射为多个等间隔的光斑，消除了光斑慢轴发散角误差对光斑能量一致性的影响。
如图1所示，沿光源发出光束的主光轴方向，依次设置有整形镜组10和分束镜20，由光源发出的光束首先在整形镜组10中进行光束整形处理，整形镜组10包括快轴整形镜11和慢轴整形镜12，当整形镜组10包括快轴整形镜11，经过快轴整形镜11的光束能够实现对快轴方向的整形，其中，整形包括对光束进行准直、匀化、扩束等形态或参数的调整，当整形镜组10包括有慢轴整形镜12时，经过慢轴整形镜12的光束能够实现对慢轴方向的整形处理，同理，若整形镜组10包括快轴整形镜11和慢轴整形镜12，如图1所示，则经过整形镜组10的光束能够实现快轴方向和慢轴方向的相同类型或不同类型的整形处理。其中，图1中示出的是，快轴整形镜11对光束的快轴方向准直整形，以及慢轴整形镜12对光束的慢轴方向准直整形，本公开不限于此，整形还可以是如上所述的其他处理形式。
需要说明的是当整形镜组10包括快轴整形镜11和慢轴整形镜12时，本公开实施例中对于快轴整形镜11和慢轴整形镜12沿光路传输方向的设置先后不做具体限定，但是事实上，快轴整形镜11和慢轴整形镜12沿光路传输方向的设置先后不同，对于快轴整形镜11 和慢轴整形镜12的具体光学元件设置和参数设置也应有不同的调整，本领域技术人员可以根据对实际出射光斑的要求不同进行具体的细节设置。
经过整形镜组10整形出射的光束入射分束镜20，示例的，分束镜20可以采用半透半反镜或其他类似能够将光束一分为二或一分为多的光学元件，以半透半反镜为例，光束经过半透半反镜一分为二，一部分由半透半反镜的透射面出射为透射光，一部分由半透半反镜的反射面反射为反射光，由此实现对光束的分束。分束镜20与光束的主光轴呈45°夹角设置，如此一来，经过分束镜20的反射光以与光束呈90°的方向反射出射，在分束镜20的反射光方向还设置反射镜30，且反射镜30与分束镜20平行，反射光分光束经反射镜30再转折90°出射，则可与透射光分光束在快轴方向平行出射为等间隔光斑。
需要说明的是，本公开实施例中对于分光束的数量未做具体限定，可根据要求选择对光源发出的光束整形后等间隔分束的数量，本领域技术人员应当知晓，以前述的分束方式，通过分束镜20的设置数量和相互位置关系，能够均等的将光束分割为各种所需数量的等间隔分光束。
仍旧以分束镜20为半透半反镜为例，如图2所示，可将半透半反镜依次设置多个，在多个半透半反镜的反射光方向设置与半透半反镜平行的反射镜30，通过相互位置关系的设置，使得经过反射镜30再次转折90°出射的反射光分光束由另一半透半反镜透射。在本实施例中，以获得6个等能量等间隔的光斑为例，需要设置六个单片半透半反镜以及一个与上述半透半反镜位置对应设置的反射镜30(也可以理解为六个与半透半反镜一一对应的反射镜30的组合镜)，六个半透半反镜的反射和透射分束比以图2中从上往下的方位依次配置为5：1，4：1，3：1，2：1，1：1，0：1，分束镜20由六个单片半透半反镜组成，与一个反射镜30组合，或者，六个半透半反镜可以组成一个条纹镜作为分束镜20，分束镜20按照前述的分束比要求在对应位置涂敷满足分束比的透反膜即可，这种条纹镜涂覆透反膜层的方式减少了模组中组成元件的数量，更有利于降低成本。
又例如，为了实现出射的光斑等间隔且等强度，可以通过调整多个分束镜20的设置关系以及反射镜30的设置数量来实现，如图1所示，分束镜20包括第一分束镜21，以及分立于第一分束镜21的两个分光方向的第二分束镜22和第三分束镜23，还包括分别匹配第二分束镜22和第三分束镜23设置的反射镜30，用于对第二分束镜22的一个分光束和第三分束镜23的一个分光束转折方向以使形成的多个分光束呈平行间隔出射，第一分束镜21、第二分束镜22和第三分束镜23的分束比均为1:1。本实施例中，第一分束镜21、第二分束镜22和第三分束镜23采用相同的配置(例如分束比相同)，因此，能够使得整个分束整形模组的元件种类少，从而有利于降低模组的成本，并且有利于降低模组的装配难度，提高装配效率和安装精度。
光源出射的光束经整形后首先入射第一个分束镜20，经过第一个分束镜20的反射光方向和透射光方向分别设置有第二分束镜22和第三分束镜23，即反射光和透射光分别再通过第二分束镜22和第三分束镜23分束，第二分束镜22的其中一个分光束侧匹配设置反射镜30以将分光束的方向转折90°与其他分光束平行出射，第三分束镜23的其中一个分光束侧也匹配设置有反射镜30以将分光束的方向转折后与其他分光束平行出射，从而形成如图1所示的4个等分的分光束，通过设置分束镜20和反射镜30的位置关系，能够实现4个等分的分光束之间等间距。
第一分束镜21、第二分束镜22和第三分束镜23的分束比均为1:1，即反射光与透射光的光强度均等分布，从而更有利于形成出射的等强度、等间距的间隔光斑。当然，在其他所需的能量分布类型的间隔光斑要求下，分束镜20的分束比还可以进行具体设置。
需要说明的是，在如图1所示的分束方案中，多个分束镜20虽然均与光束的主光轴呈45°夹角设置，但是多个分束镜20之间存在有不同的朝向，在此情况下，限定的反射镜30与分束镜20平行，应理解为，反射镜30与其中一个朝向的分束镜20的方向平行。那么在包含有多个反射镜30的情况下，多个反射镜30也可能在满足于分束镜20平行的前提下，具有不同的朝向。
以上是本公开实施例中以示例的方式举例说明的几种分束形式，本领域技术人员可在以上的精神和原则下根据实际需要的分光数量、强度要求、距离关系等参数进行相应的更改和变化。
本公开实施例提供的分束整形模组，包括沿光束的主光轴依次设置的整形镜组10、分束镜20，以及在至少一个分束镜20的反射光方向设置的反射镜30，整形镜组10包括快轴整形镜11和/或慢轴整形镜12，通过整形镜组10的快轴整形镜11能够对光束的快轴方向进行整形，通过整形镜组10的慢轴整形镜12能够对光束的慢轴方向进行整形，从而能够根据出射光斑的参数需要在快轴和/或慢轴方向对光束进行整形处理，分束镜20与光束的主光轴呈第一预设夹角设置，反射镜30与分束镜20平行，反射镜30的出光面和分束镜20的出光面之间间隔相等，经分束镜20分束后的分光束沿快轴方向平行出射为多个等间隔的光斑，通过对光束慢轴和/或快轴方向的整形处理，可首先将光束整形为等能量强度的准直光，再通过分束镜20与反射镜30的组合形式，能够实现对等能量强度的准直光以任意所需的数量进行等强度分束，从而得到多个等间隔且等强度的光斑。
在本公开的一种可实现的实施方式中，整形镜组10包括快轴整形镜11，用于对入射的光束的快轴方向准直整形，由快轴整形镜11出射的光束在快轴方向的宽度小于出射的光斑的间距。
如图1所示，整形镜组10中至少包括用于快轴方向准直整形的快轴整形镜11，快轴整 形能够对整形后出射的光束的宽度进行界定，限定快轴整形镜11出射的光束在快轴方向的宽度小于出射的光斑的间距，从而能够有效的降低等间隔出射的光斑之间由于距离近，由于快轴发散角的作用而发生串扰的可能性。
在本公开的一种可实现的实施方式中，快轴整形镜11满足关系式：
P≥2*f fac*tan(θ/2)     (1)；
其中，f fac为快轴整形镜的焦距，P为出射的光斑的间距，θ为光束的快轴发散角。
为了能够有效的降低等间隔出射的光斑之间由于距离过近，在快轴发散角的作用下发生串扰的可能性，以便在本公开实施例的分束整形模组出射的间隔的光斑能够具有更佳的应用效果，限定出射的光斑的间距P满足上述公式(1)，通过与快轴整形镜11的焦距f fac和光束的快轴发散角的不等式关系限定，保证出射的间隔的光斑之间不会发生光束串扰。
在本公开的一种可实现的实施方式中，分束整形模组还包括聚焦镜，聚焦镜设置于分光束沿快轴方向的出光侧，用于调节分光束在接收面上投射的光斑的位置和尺寸。
聚焦镜通常能够对通过的光束进行汇聚准直，在本公开实施例的分束整形模组出射的分光束沿快轴方向的出光侧设置聚焦镜，聚焦镜上不同位置对应于出射的分光束，分别对分光束进行相应的汇聚准直作用，或者还包括通过聚焦镜表面的设置位置和角度对分光束的出射方向进行调节，从而能够调节分光束在接收面上投射形成的光斑所在的位置，以及光斑的形状尺寸。
示例的，当需要采用激光刻划的方式在被加工件表面刻画等间距、等强度且等大的划线时，可以采用上述的包括聚焦镜的分束整形模组，经分束镜20分束后的分光束沿快轴方向平行出射为多个间隔的光斑，通过对光束慢轴和快轴方向的整形处理，首先将光束整形为等能量强度的准直光，再通过分束镜20和反射镜30的组合形式，对等能量强度的准直光以任意所需的数量进行等强度分束，得到多个等间隔且等强度的光斑，通过聚焦镜的设置和调整，进一步保证多个等间隔且等强度的光斑的形状相同，从而实现在被加工件表面刻画等间距、等强度且等大的划线。
本公开实施例的另一方面，提供了一种扫描光学系统，如图3所示，包括前述任意一项的分束整形模组，还包括扫描镜组40，扫描镜组40受驱沿慢轴方向往复运动以将分束整形模组的分光束扫描出射为扫描光斑，扫描镜组40包括反光镜41和阵列聚焦镜42，如图4所示，阵列聚焦镜42具有相对的快轴阵列透射面421和慢轴阵列透射面422。
如图3所示，扫描镜组40包括依次设置的反光镜41和阵列聚焦镜42，由分束整形模组中出射的分光束沿快轴方向平行间隔入射扫描镜组40中，反光镜41由分束整形模组中出射的分光束入射反光镜41，由反光镜41对分光束进行光路转折后入射阵列聚焦镜42。
如图4所示，阵列聚焦镜42具有相对的快轴阵列透射面421和慢轴阵列透射面422， 即，经过阵列聚焦镜42的光束，在其快轴方向和慢轴方向均实现了分别的聚焦作用，由于快轴方向和慢轴方向均为阵列形式组成的透射面，因此，对光束的快轴聚焦和慢轴聚焦均是分别对应分光束进行的，避免分光束之间发生串扰。
其中，本公开实施例中对于阵列聚焦镜42中如何实现相对的快轴阵列透射面421和慢轴阵列透射面422不做具体限定，例如，阵列聚焦镜42可以为单片式的光学元件，快轴阵列透射面421和慢轴阵列透射面422分别形成于单片式的光学元件的相对两侧，即如图4所示，又例如，阵列聚焦镜42也可以是两片式的光学元件，快轴阵列透射面421和慢轴阵列透射面422分别形成于两片不同的光学元件上，在此基础上，两片式的光学元件之间可以相隔一定距离平行设置也可以相互贴合设置。
如图5所示，在本公开的一种可实现的实施方式中，反光镜41包括沿快轴方向的曲面阵列。
如图5所示，沿快轴方向，反光镜41可以视为多个曲面依次连接形成的阵列面，每个曲面对应于分束整形模组中出射的分光束，用于分别对分光束进行整形反射，即对光束沿快轴进行匀化，且使光路转折90°，匀化后的光束汇聚后形成平顶能量分布，满足实际的应用需求。当然，也可以理解为，反光镜41是由沿快轴方向的多个具有曲面的柱体连接而成，多个柱体的曲面位于反光镜41的同一侧，以共同形成曲面阵列。
在本公开的一种可实现的实施方式中，整形镜组10包括慢轴整形镜12，用于对入射的光束的慢轴方向准直整形，慢轴整形镜12满足关系式：
W s＝L*f sa/f sac     (2)；
其中，W s为出射的光斑在慢轴方向的宽度，L为光束的慢轴发光宽度，f sa为阵列聚焦镜42在慢轴方向的焦距，f sac为慢轴整形镜12的焦距。
对于扫描光学系统来说，出射形态为沿慢轴方向扫描出射的扫描光斑，沿慢轴方向相邻的两列光斑的间距与光束的脉冲频率以及扫描镜组40直线往复运动速度相关，可以通过上述两项参数的设置来设计沿慢轴方向相邻的两列光斑的间距，但是，例如将扫描光学系统应用于激光美容时，若扫描光斑中相邻两列光斑形成叠加，则叠加处的光能量也为叠加能量，若由于光斑叠加导致局部能量过强就可能导致皮肤损伤，因此，为了保证使用安全性等需求，在设计扫描光斑沿慢轴方向相邻的两列光斑的间距的同时，还需要对出射的光斑在慢轴方向的宽度W s进行匹配设计。
出射的光斑在慢轴方向的宽度W s满足公式(2)中与光束的慢轴发光宽度L、阵列聚焦镜42在慢轴方向的焦距f sa以及慢轴整形镜12的焦距f sac之间的关系，既能够限定出射的光斑在慢轴方向的宽度W s以及扫描光斑中沿慢轴方向相邻的两列光斑的间距，二者相互配合以避免发生相邻两列光斑叠加或部分叠加导致扫描光斑能量不均衡的问题，且采用阵 列聚焦镜42，保证了光斑形状是矩形，且能量分布均匀对称。
在本公开的一种可实现的实施方式中，快轴阵列透射面421和慢轴阵列透射面422分别为在阵列聚焦镜42表面上由微柱面组成的微柱面阵列。
如图4所示，阵列聚焦镜42的快轴阵列透射面421为由微柱面排列组成的微柱面阵列，阵列聚焦镜42的慢轴阵列透射面422为由微柱面排列组成的微柱面阵列，其中，快轴阵列透射面421的微柱面沿快轴方向排列，慢轴阵列透射面422的微柱面沿慢轴方向排列，即，快轴阵列透射面421的微柱面排列方向与慢轴阵列透射面422的微柱面排列方向直母线正交。其中，快轴阵列透射面421中微柱面的个数与预设的光斑数量相同，且微柱面的宽度>出射的光斑的间距P。如此一来，经过阵列聚焦镜42的分光束经过快轴阵列透射面421和慢轴阵列透射面422后，能够出射为每个光斑都汇聚且呈矩形的扫描光斑，如图6和图7所示，且扫描光斑的能量分布均匀对称。
需要说明的是，本公开实施例中所述的微阵列的面型或结构，指的是毫米级的微结构，本领域技术人员应当知晓，形成在光学元件上的毫米级的微阵列的面型或结构，当光束经过该光学元件时，微结构实现的是对光束的折射作用，而形成在光学元件上的微面型结构若是纳米级，当光束经过该光学元件时，微面型结构实现的是对光束的衍射作用，因此，虽然均称为微结构，但微结构的尺寸范围对光学作用有直接的影响。
在本公开的一种可实现的实施方式中，柱面反光镜满足关系式：
W f≈2f fa*NA     (3)；
其中，W f为出射的光斑在快轴方向的宽度，f fa为阵列聚焦镜42的快轴焦距，NA为经过曲面阵列后每个分束光在快轴方向的数值孔径。
出射的光斑在快轴方向的宽度W f满足上述与阵列聚焦镜42的快轴焦距f fa以及柱面反光镜的数值孔径NA的关系式(3)，能够通过阵列聚焦镜42的快轴焦距实现对出射的光斑在快轴方向的宽度W f的调节设置。
在本公开的一种可实现的实施方式中，扫描光学系统还包括扫描镜支撑体以及驱动扫描镜支撑体沿慢轴方向往复运动的驱动件，扫描镜组40的反光镜41和阵列聚焦镜42以预设位置关系分别固定设置于扫描镜支撑体上。
扫描光学系统还包括扫描镜支撑体，扫描镜支撑体上设置有驱动件，通过驱动件可驱动扫描镜支撑体沿慢轴方向往复运动，其中，反光镜41和阵列聚焦镜42以预设位置关系分别固定设置在扫描镜支撑体上，当驱动件驱动扫描镜支撑体直线往复运动时，设置在扫描镜支撑体上的扫描镜组40以预设的位置关系随扫描镜支撑体一同运动，这样一来，在扫描运动中，分束整形模组固定不动，反光镜41和阵列聚焦镜42一同运动，能够有效的保证反光镜41和阵列聚焦镜42之间的相对位置关系保持稳定，从而保持扫描光路在扫描运 动中的稳定扫描出光，保证了扫描光斑的光斑尺寸以及光斑能量和分布在整个扫描范围内的稳定性和一致性。
在本公开的一种可实现的实施方式中，如图3所示，扫描光学系统还包括光源70，光源70出射的光束经分束整形模组沿快轴方向平行出射分光束，分光束经扫描镜组40扫描出射为扫描光斑。
如图3所示，扫描光学系统还包括光源70，光源70出射应用光束，例如，当光源70为激光器，则光源70出射为激光束，限定激光束的特定波长范围的前提下，能够通过分束整形模组的准直匀化以及等分光束后经扫描镜组40扫描出射为光斑能量和分布均一的等强扫描光斑。
本公开实施例的又一方面，提供了一种激光应用终端，包括前述不包含聚焦镜的任意一项的分束整形模组，或者，包括前述任意一项的扫描光学系统。
激光美容是近些年随着激光技术的发展而逐步兴起繁荣的一种新的美容形式。激光美容是将特定波长和能量强度的激光光束透过皮肤的表皮和真皮层照射，破坏真皮层下的色素细胞和色素颗粒，实现美白、嫩肤、去皱等美容功效，通过激光束破坏的细胞碎片能够经由体内的巨噬细胞处理吸收，且激光美容相对于其他手术等方式来说痛苦较小、安全性较高，越来越受到爱美人士的欢迎。
激光美容仪作为一种通过激光束进行美容的手持小型仪器，属于激光应用终端的一种，激光美容仪可以应用前述任意一项的扫描光学系统以提供特定波长和能量强度的激光束，通过激光美容仪的壳体界定其外形结构，从而实现简便易操作的使用效果，本公开实施例中，对于激光美容仪的外形和结构等不做具体限定，只要是能够通过内置扫描光学系统，在激光美容仪的输出位置输出特定波长和能量强度的扫描光斑以实现便利的美容操作即可。
若为不需要扫描出射扫描光板的激光应用终端，也可以应用前述任意一项的分束整形模组，以提供特定波长和能量强度的激光束，例如：当需要采用激光刻划的方式在被加工件表面刻画等间距、等强度且等大的划线时，可以采用上述的包括聚焦镜的分束整形模组，经分束镜20分束后的分光束沿快轴方向平行出射为多个间隔的光斑，通过对光束慢轴和快轴方向的整形处理，首先将光束整形为等能量强度的准直光，再通过分束镜20和反射镜30的组合形式，对等能量强度的准直光以任意所需的数量进行等强度分束，得到多个等间隔且等强度的光斑，通过聚焦镜的设置和调整，进一步保证多个等间隔且等强度的光斑的形状相同，从而实现在被加工件表面刻画等间距、等强度且等大的划线。
示例的，如图4所示，对于一种手持形式的激光美容仪，可以将扫描镜组40中的反光镜在光路中呈45°夹角设置，从而将整个扫描光路转折90°，扫描光路的两部分之间呈90° 的直角关系，便于将一部分光路设置于壳体的握持部，另一部分光路设置于出光方向，以充分利用激光美容仪的壳体内部空间，通过紧凑的光路结构配合相应的外形结构以辅助器件小型化的需求。
以上所述仅为本公开的实施例而已，并不用于限制本公开的保护范围，对于本领域的技术人员来说，本公开可以有各种更改和变化。凡在本公开的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本公开的保护范围之内。

Claims (14)

  1. 一种分束整形模组，包括沿光束的主光轴依次设置的整形镜组、分束镜，以及在至少一个所述分束镜的反射光方向设置的反射镜，所述整形镜组包括快轴整形镜和慢轴整形镜，所述分束镜与光束的主光轴呈第一预设夹角设置，所述反射镜与所述分束镜平行且出光面的间隔相等，以使经所述分束镜的分光束沿快轴方向平行出射为多个等间隔的光斑。
  2. 根据权利要求1所述的分束整形模组，其中，所述分束镜包括第一分束镜，以及分立于所述第一分束镜的两个分光方向的第二分束镜和第三分束镜，还包括分别匹配所述第二分束镜和所述第三分束镜设置的所述反射镜，用于对所述第二分束镜的一个分光束和所述第三分束镜的一个分光束转折方向以使形成的多个所述分光束呈平行间隔出射，所述第一分束镜、所述第二分束镜和所述第三分束镜的分束比均为1:1。
  3. 根据权利要求1或2所述的分束整形模组，其中，所述整形镜组包括快轴整形镜，用于对入射的光束的快轴方向准直整形，由所述快轴整形镜出射的光束在快轴方向的宽度小于出射的光斑的间距。
  4. 根据权利要求3所述的分束整形模组，其中，所述快轴整形镜满足关系式：
    P≥2*f fac*tan(θ/2)；
    其中，f fac为快轴整形镜的焦距，P为出射的光斑的间距，θ为光束的快轴发散角。
  5. 根据权利要求1或2所述的分束整形模组，其中，还包括聚焦镜，所述聚焦镜设置于所述分光束沿快轴方向的出光侧，用于调节所述分光束在接收面上投射的光斑的位置和尺寸。
  6. 一种扫描光学系统，包括如权利要求1-4任意一项所述的分束整形模组，还包括扫描镜组，所述扫描镜组受驱沿光轴方向往复运动以将所述分束整形模组的分光束扫描出射为扫描光斑，所述扫描镜组包括反光镜和阵列聚焦镜，所述阵列聚焦镜具有相对的快轴阵列透射面和慢轴阵列透射面。
  7. 根据权利要求6所述的扫描光学系统，其中，所述反光镜包括沿快轴方向的曲面阵列。
  8. 根据权利要求6或7所述的扫描光学系统，其中，所述整形镜组包括慢轴整形镜，用于对入射的光束的慢轴方向准直整形，所述慢轴整形镜满足关系式：
    W s＝L*f sa/f sac；
    其中，W s为出射的光斑在慢轴方向的宽度，L为光束的慢轴发光宽度，f sa为阵列聚焦镜在慢轴方向的焦距，f sac为慢轴整形镜的焦距。
  9. 根据权利要求7所述的扫描光学系统，其中，所述曲面阵列满足关系式：
    W f≈2f fa*NA；
    其中，W f为出射的光斑在快轴方向的宽度，f fa为阵列聚焦镜的快轴焦距，NA为经过曲面阵列后每个分束光在快轴方向的数值孔径。
  10. 根据权利要求6或7所述的扫描光学系统，其中，所述快轴阵列透射面和所述慢轴阵列透射面分别为在所述阵列聚焦镜表面上由微柱面组成的微柱面阵列。
  11. 根据权利要求10所述的扫描光学系统，其中，所述快轴阵列透射面的微柱面数量与所述分光束的数量相对应，所述微柱面的宽度大于出射的光斑的间距。
  12. 根据权利要求6或7所述的扫描光学系统，其中，还包括扫描镜支撑体以及驱动所述扫描镜支撑体沿慢轴方向往复运动的驱动件，所述扫描镜组的反光镜和阵列聚焦镜以预设位置分别固定设置于所述扫描镜支撑体上。
  13. 根据权利要求6或7所述的扫描光学系统，其中，还包括光源，所述光源出射的光束经所述分束整形模组沿快轴方向平行出射分光束，所述分光束经所述扫描镜组扫描出射为扫描光斑。
  14. 一种激光应用终端，包括如权利要求1-5任意一项所述的分束整形模组，或如权利要求6-13任意一项所述的扫描光学系统。
PCT/CN2022/123420 2022-06-15 2022-09-30 一种分束整形模组、扫描光学系统及激光应用终端 WO2023240847A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202210671032.9A CN114740630B (zh) 2022-06-15 2022-06-15 一种扫描光学系统及激光应用终端
CN202210671032.9 2022-06-15

Publications (1)

Publication Number Publication Date
WO2023240847A1 true WO2023240847A1 (zh) 2023-12-21

Family

ID=82287756

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2022/123420 WO2023240847A1 (zh) 2022-06-15 2022-09-30 一种分束整形模组、扫描光学系统及激光应用终端

Country Status (2)

Country Link
CN (1) CN114740630B (zh)
WO (1) WO2023240847A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114740630B (zh) * 2022-06-15 2022-09-16 西安炬光科技股份有限公司 一种扫描光学系统及激光应用终端
CN115144861B (zh) * 2022-09-05 2022-11-04 天津帆探科技有限公司 一种混合固态激光雷达及扫描方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1892283A (zh) * 2005-06-28 2007-01-10 三星电子株式会社 用于在串联成像设备中分开多束光束的激光扫描单元
CN101020277A (zh) * 2007-03-22 2007-08-22 苏州德龙激光有限公司 分布式激光加工系统
JP2007279670A (ja) * 2006-03-17 2007-10-25 Ricoh Co Ltd 光走査装置、画像形成装置、光束分割用回折光学素子、並びに回折光学素子の作成方法
US20070253047A1 (en) * 2006-04-27 2007-11-01 Ichii Daisuke Light source system, optical scanner, image forming apparatus, and light-amount control method
CN109212871A (zh) * 2018-11-13 2019-01-15 深圳创维新世界科技有限公司 投影显示装置
CN215910733U (zh) * 2021-07-12 2022-02-25 西安炬光科技股份有限公司 光学模组及光学系统
CN216096963U (zh) * 2021-09-30 2022-03-22 广东利元亨智能装备股份有限公司 一种激光光路模块及片材打孔系统
CN114740630A (zh) * 2022-06-15 2022-07-12 西安炬光科技股份有限公司 一种分束整形模组、扫描光学系统及激光应用终端

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102169506B1 (ko) * 2015-03-20 2020-10-23 가부시키가이샤 니콘 빔 주사 장치, 빔 주사 방법, 및 패턴 묘화 장치
CN113126061B (zh) * 2020-01-16 2023-03-10 上海耕岩智能科技有限公司 一种激光雷达及其扫描方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1892283A (zh) * 2005-06-28 2007-01-10 三星电子株式会社 用于在串联成像设备中分开多束光束的激光扫描单元
JP2007279670A (ja) * 2006-03-17 2007-10-25 Ricoh Co Ltd 光走査装置、画像形成装置、光束分割用回折光学素子、並びに回折光学素子の作成方法
US20070253047A1 (en) * 2006-04-27 2007-11-01 Ichii Daisuke Light source system, optical scanner, image forming apparatus, and light-amount control method
CN101020277A (zh) * 2007-03-22 2007-08-22 苏州德龙激光有限公司 分布式激光加工系统
CN109212871A (zh) * 2018-11-13 2019-01-15 深圳创维新世界科技有限公司 投影显示装置
CN215910733U (zh) * 2021-07-12 2022-02-25 西安炬光科技股份有限公司 光学模组及光学系统
CN216096963U (zh) * 2021-09-30 2022-03-22 广东利元亨智能装备股份有限公司 一种激光光路模块及片材打孔系统
CN114740630A (zh) * 2022-06-15 2022-07-12 西安炬光科技股份有限公司 一种分束整形模组、扫描光学系统及激光应用终端

Also Published As

Publication number Publication date
CN114740630B (zh) 2022-09-16
CN114740630A (zh) 2022-07-12

Similar Documents

Publication Publication Date Title
WO2023240847A1 (zh) 一种分束整形模组、扫描光学系统及激光应用终端
US5592333A (en) Device for optically rotating light beams in a beam array
US7773653B2 (en) Diode laser arrangement and associated beam shaping unit
EP2003484B1 (en) A Light Source
EP0772901B1 (en) High-power optical fiber amplifier or laser device
KR20190034589A (ko) 레이저 라인 조명
TWI452338B (zh) 射線成形裝置
CN1975507B (zh) 添加导引光的条阵大功率半导体激光器的整形方法
WO2018010224A1 (zh) 一种激光合束装置
WO1992002844A1 (en) High power light source
CN101144909A (zh) 一种面阵半导体激光器的光束整形装置
WO2015134931A1 (en) High brightness multijunction diode stacking
WO2020078197A1 (zh) 一种半导体激光器
WO2022021476A1 (zh) 一种光学模组和医疗激光装置
CN101185208A (zh) 激光装置
CN114904152A (zh) 一种激光点阵系统及激光点阵治疗仪
US20060165144A1 (en) Semiconductor laser device
US9306365B2 (en) Pump device for pumping an amplifying laser medium
CN112904581A (zh) 激光模组、器件、光空间转换方法、中强线光斑形成方法
CN116165806A (zh) 光学整形模组、装置及激光雷达系统
US4947402A (en) Two-mirror shaping of a non-circular optical pumping beam and lasers using same
JP4580236B2 (ja) 半導体レーザ装置
WO2024098826A1 (zh) 光学整形模组、装置及激光雷达系统
CN218567750U (zh) 一种用于激光光束整形的光学机构
CN218694974U (zh) 一种复合整形的大功率激光雕刻模组

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 22946519

Country of ref document: EP

Kind code of ref document: A1