WO2024092984A1

WO2024092984A1 - Electronic-grade negative photoresist developer preparation stirring apparatus

Info

Publication number: WO2024092984A1
Application number: PCT/CN2022/140302
Authority: WO
Inventors: 王琴; 张晨良
Original assignee: 联仕(昆山)化学材料有限公司
Priority date: 2022-11-01
Filing date: 2022-12-20
Publication date: 2024-05-10
Also published as: CN115400642B; CN115400642A

Abstract

An electronic-grade negative photoresist developer preparation stirring apparatus, comprising a stirring tank (11) for providing a stirring environment, wherein a circulation mechanism (3) and a pressing mechanism (2) for matching the circulation mechanism (3) are mounted inside the stirring tank (11); the circulation mechanism (3) comprises a driving pipe (31) rotationally connected to the stirring tank (11); a circulation cavity (32) is provided inside the driving pipe (31); pressing spiral blades (36) are mounted inside the circulation cavity (32) and are in sliding fit with the driving pipe (31); a liquid inlet (33) is provided at a position on the driving pipe (31) close to the top; a liquid outlet (35) is provided at a position on the driving pipe (31) close to the bottom; and stirring blades (34) are mounted on the driving pipe (31) and located at an upper side of the liquid outlet (35). The electronic-grade negative photoresist developer preparation stirring apparatus is used for solving the technical problem of low mixing efficiency due to the fact that, when a negative photoresist developer is stirred at present, an alkaline solution and water are layered and layers cannot be mixed in a timely manner.

Description

An electronic grade negative photoresist developer configured with stirring equipment

Technical Field

The invention relates to the field of developer mixing and stirring, and in particular to a stirring device for mixing an electronic-grade negative photoresist developer.

Background technique

Negative photoresist is usually developed with negative developer, which is usually KOH. Some factories also use Na2CO3. However, no matter what kind of alkaline solution, it will contain surfactants. The weakly acidic area of the photoresist is not exposed. From the perspective of the chemical reaction layer, the photoresist in the unexposed area has an acid-base relationship with the alkaline developer. Since the negative photoresist has a large molecular weight and is hydrophobic, it is necessary to use a surfactant in the developer to increase the hydrophilicity of the developer so that it can be dissolved.

The Chinese patent with the authorization announcement number CN102743996B discloses an extraction mixing and stirring machine, wherein an upper baffle plate is provided above the blades, and a lower cover plate with a fluid suction port at the center is provided below the blades, and a mixing element for radially passing and mixing fluids is provided between the upper cover plate and the lower cover plate, and the mixing element is provided with a plurality of fluid passing holes for radially passing fluids, and the fluids pass through these fluid passing holes and the flow paths are staggered in the stirrer. However, in the prior art, in the existing stratification treatment of alkali solution and water, the existing circulation mode is broken by changing the blade mode, but for mixing with obvious stratification, simply changing the circulation mode without obvious positive impact between solutions will not produce an ideal mixing effect when the destruction effect of the solution body is not obvious.

Summary of the invention

The invention provides an electronic grade negative photoresist developer equipped with a stirring device to solve the current technical problem that when the negative photoresist developer is stirred, alkali solution and water are separated and the separated layers cannot be mixed in time, resulting in low mixing efficiency.

The electronic grade negative photoresist developer configuration stirring device of the present invention adopts the following technical scheme: comprising a stirring kettle for providing a stirring environment, a circulation mechanism and an extrusion mechanism for cooperating with the circulation mechanism installed inside the stirring kettle, the circulation mechanism comprising an active pipe rotatably connected to the stirring kettle, a circulation cavity arranged inside the active pipe, an extrusion spiral blade installed inside the circulation cavity and the blade slidably cooperates with the active pipe, a liquid inlet is arranged near the top of the active pipe, a liquid outlet is arranged near the bottom of the active pipe, and a stirring blade is arranged on the active pipe at the upper side of the liquid outlet;

The active pipe is connected to the bottom ring of the extrusion mechanism through a deceleration fitting, the inner wall of the bottom ring is formed with a tooth groove that matches the deceleration fitting, the upper end of the bottom ring is fixedly connected with a cut-off piece corresponding to the position of the liquid outlet, two rings are arranged on the active pipe and circumferentially rotate to match the active pipe, the two rings are respectively arranged outside the liquid inlet and on the upper side of the liquid outlet, four support rods are arranged on the two rings, and a spiral extrusion rod is fixedly connected between the two groups of support rods, four triangular extrusion tubes are evenly arranged between the outer side surface of the spiral extrusion rod and the inner wall of the stirring kettle, an extrusion cavity is formed inside the triangular extrusion tube, a bottom nozzle is arranged at the bottom of the triangular extrusion tube, a water spray port is formed on the upper side surface of the bottom nozzle, and the direction of the water spray port corresponds to the direction of the liquid outlet.

Furthermore, the deceleration mating parts of the active tube are a bottom sun gear and a planetary gear set. The bottom sun gear is fixedly connected to the bottom of the active tube. The outer side of the bottom sun gear cooperates with the planetary gear set. The planetary gear set is meshed with the teeth of the bottom ring. Through the cooperation of the bottom sun gear, the planetary gear set and the bottom ring, the rapid rotation force of the active tube is converted into a slow, same-direction rotation of the bottom ring, thereby ensuring the rotation and pressurization effect of the spiral extrusion rod.

Furthermore, the four cut-off pieces are fixedly connected between the sleeve ring and the bottom ring, and the water-facing surface of the cut-off piece is provided with rounded corners inwardly. Through the rounded corner treatment, when the cut-off piece rotates, a small amount of pressure can be provided to the liquid outlet, so that the water pressure sprayed from the liquid outlet impacts the cut-off piece and the water pressure, thereby improving the liquid crushing effect of the water spraying from the liquid outlet.

Furthermore, the cross-section of the triangular extrusion tube in top view is a hollow triangle, and the matching clearance between the spiral extrusion rod and the inner wall of the stirring kettle is the thickness of the triangular extrusion tube after being folded in half. The triangular extrusion tube can be filled with peripheral high-density liquid under normal conditions. When sequentially squeezed by the spiral extrusion rod, the high-density liquid is transmitted downward through the matching extrusion and then sprayed out through the nozzle of the bottom nozzle.

Furthermore, the spiral extrusion rod is a spiral structure, and a sleeve is provided on the spiral extrusion rod, which is rotatably connected to the spiral extrusion rod. When the rotating sleeve cooperates with the triangular extrusion tube for extrusion, sliding friction is avoided, thereby improving the extrusion effect when the triangular extrusion tube and the spiral extrusion rod are staggered.

Furthermore, the bottom of the extrusion spiral blade is connected to the bottom surface of the stirring tank through a fixed shaft that penetrates the active pipe and the bottom sun gear. The extrusion spiral blade is fixedly connected to the stirring tank through the fixed shaft, thereby cooperating with the rotating active pipe so that the liquid can be transmitted and extruded by the extrusion spiral blade.

Furthermore, a support frame is fixed to the outside of the stirring kettle, and a stirring motor for providing power to the active pipe is installed at the upper end of the stirring kettle.

The beneficial effects of the present invention are as follows: the present invention drives the stirring blades to rotate forwardly and stir rapidly through the active tube, so that the internal liquid forms a vortex of radial flow, and the low-density liquid is concentrated and supplied to the inside of the active tube through the liquid inlet. When the liquid enters the inside of the active tube, the fixed extrusion spiral blade cooperates with the rotating active tube to transmit the liquid from top to bottom, and then squeezes out from the liquid outlet. The active tube then drives the bottom ring and the cut-off piece and sleeve ring attached to the upper end to rotate forwardly at a slow speed through the deceleration fitting at the bottom, so that the support rod and the spiral extrusion rod fixed on the sleeve ring sequentially squeeze the triangular extrusion tube. After the high-density liquid is drawn into the triangular extrusion tube, it is sprayed out through the bottom nozzle at the bottom, thereby impacting the low-density liquid sprayed out of the liquid outlet, and utilizing the stratified properties of the alkali solution and water themselves in combination with the original radial flow of the stirring kettle to utilize the combination of the two characteristics, thereby improving the mixing effect and mixing efficiency of the water-alkali solution.

BRIEF DESCRIPTION OF THE DRAWINGS

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

FIG1 is a schematic diagram of a stirring kettle structure of an embodiment of an electronic-grade negative photoresist developer equipped with a stirring device according to the present invention;

FIG2 is a schematic diagram of a support frame structure of an embodiment of an electronic-grade negative photoresist developer configured with a stirring device according to the present invention;

3 is a schematic diagram of the internal structure of a stirring kettle of an embodiment of an electronic-grade negative photoresist developer equipped with a stirring device according to the present invention;

FIG4 is a schematic diagram of the structure of an extruding spiral blade of an embodiment of an electronic-grade negative photoresist developer configured with a stirring device according to the present invention;

FIG5 is a schematic diagram of the structure of a spiral extrusion rod of an embodiment of an electronic-grade negative photoresist developer equipped with a stirring device according to the present invention;

FIG6 is a schematic structural diagram of the cooperation relationship between the extrusion spiral blade and the active tube of an embodiment of a stirring device configured for an electronic-grade negative photoresist developer according to the present invention;

7 is a schematic structural diagram of the matching relationship between a speed reducing fitting and a bottom ring of an embodiment of an electronic-grade negative photoresist developer equipped with a stirring device according to the present invention;

FIG8 is a schematic structural diagram of the coordination relationship between a spiral extrusion rod and a bottom nozzle of an embodiment of an electronic-grade negative photoresist developer equipped with a stirring device according to the present invention;

FIG. 9 is a schematic diagram of a cut-off structure of an embodiment of an electronic-grade negative photoresist developer configured with a stirring device according to the present invention.

In the figure: 2, extrusion mechanism; 3, circulation mechanism; 11, stirring kettle; 12, support frame; 13, stirring motor; 21, triangular extrusion tube; 22, extrusion chamber; 23, spiral extrusion rod; 24, bottom nozzle; 25, support rod; 26, collar; 27, cut-off piece; 28, bottom ring; 31, active tube; 32, circulation chamber; 33, liquid inlet; 34, stirring blade; 35, liquid outlet; 36, extrusion spiral blade; 37, bottom sun gear; 38, planetary gear set.

Detailed ways

The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

An embodiment of an electronic-grade negative photoresist developer of the present invention is provided with a stirring device, as shown in FIGS. 1 to 9 , comprising a stirring kettle 11 for providing a stirring environment, wherein a circulation mechanism 3 and an extrusion mechanism 2 for cooperating with the circulation mechanism 3 are installed inside the stirring kettle 11, as shown in FIGS. 3 and 4 , the circulation mechanism 3 comprises an active pipe 31 rotatably connected to the stirring kettle 11, wherein a circulation chamber 32 is arranged inside the active pipe 31, an extrusion spiral blade 36 is installed inside the circulation chamber 32 and the blade slidably cooperates with the active pipe 31, a liquid inlet 33 is arranged near the top position of the active pipe 31, a liquid outlet 35 is arranged near the bottom position of the active pipe 31, and a stirring blade 34 is arranged on the active pipe 31 at the upper side of the liquid outlet 35;

As shown in Figures 5 and 6, the active pipe 31 is connected to the bottom ring 28 of the extrusion mechanism 2 through a deceleration fitting. The inner wall of the bottom ring 28 is formed with a tooth groove that matches the deceleration fitting. The upper end of the bottom ring 28 is fixedly connected with a cut-off piece 27 corresponding to the position of the liquid outlet 35. Two collars 26 are arranged on the active pipe 31 and rotate circumferentially to match the active pipe 31. The two collars 26 are respectively arranged outside the liquid inlet 33 and on the upper side of the liquid outlet 35. Four support rods 25 are arranged on the two collars 26, and a spiral extrusion rod 23 is fixedly connected between the two groups of support rods 25. Four triangular extrusion tubes 21 are evenly arranged between the outer side surface of the spiral extrusion rod 23 and the inner wall of the stirring kettle 11. An extrusion cavity 22 is formed inside the triangular extrusion tube 21. A bottom nozzle 24 is arranged at the bottom of the triangular extrusion tube 21. A water spray outlet is formed on the upper side surface of the bottom nozzle 24, and the direction of the water spray outlet corresponds to the direction of the liquid outlet 35.

As shown in Figures 6 and 7, the deceleration matching parts of the active tube 31 are the bottom sun gear 37 and the planetary gear set 38. The bottom sun gear 37 is fixedly connected to the bottom of the active tube 31. The outer side of the bottom sun gear 37 matches the planetary gear set 38. The planetary gear set 38 meshes with the tooth grooves of the bottom ring 28. Through the cooperation of the bottom sun gear 37, the planetary gear set 38 and the bottom ring 28, the rapid rotation force of the active tube 31 is converted into a slow co-directional rotation of the bottom ring 28, thereby ensuring the rotation and pressurization effect of the spiral extrusion rod 23.

As shown in Figure 9, four cutting pieces 27 are fixedly connected between the sleeve ring 26 and the bottom ring 28, and the water-facing surface of the cutting piece 27 is provided with rounded corners inward. Through the rounded corner treatment, when the cutting piece 27 rotates, a small pressure can be provided to the liquid outlet 35, so that the water pressure sprayed from the liquid outlet 35 impacts the cutting piece 27 and the water pressure, thereby improving the liquid crushing effect of the water sprayed from the liquid outlet 35.

As shown in Figure 8, the cross-section of the triangular extrusion tube 21 viewed from above is a hollow triangle. The clearance between the spiral extrusion rod 23 and the inner wall of the stirring tank 11 is the thickness of the triangular extrusion tube 21 after being folded in half. The triangular extrusion tube 21 can normally fill the peripheral high-density liquid into it. After being sequentially squeezed by the spiral extrusion rod 23, the high-density liquid is transmitted downward through cooperative extrusion and then sprayed out through the nozzle of the bottom nozzle 24.

As shown in FIG3 , the spiral extrusion rod 23 is in a spiral structure, and a sleeve is provided on the spiral extrusion rod 23 , which is rotatably connected to the spiral extrusion rod 23 . When the rotating sleeve cooperates with the triangular extrusion tube 21 for extrusion, sliding friction is avoided, thereby improving the extrusion effect when the triangular extrusion tube 21 and the spiral extrusion rod 23 are staggered.

As shown in FIG6 , the bottom of the extrusion spiral blade 36 is connected to the bottom surface of the stirring tank 11 through a fixed shaft that penetrates the active tube 31 and the bottom sun gear 37. The extrusion spiral blade 36 is fixedly connected to the stirring tank 11 through the fixed shaft, thereby cooperating with the rotating active tube 31 so that the liquid can be transmitted and squeezed by the extrusion spiral blade 36.

As shown in FIG. 2 , a support frame 12 is fixed to the outside of the stirring kettle 11 , and a stirring motor 13 for providing power to the active pipe 31 is installed at the upper end of the stirring kettle 11 .

In summary, after the stirring motor 13 is started, it drives the active pipe 31 to rotate. When in a slow state, the alkali liquid layer floats on the water surface. At this time, the bottom sun gear 37 at the bottom of the active pipe 31 drives the bottom ring 28 to rotate slowly through the planetary gear set 38. At this time, the bottom ring 28 drives the spiral extrusion rod 23 to rotate through the sleeve ring 26. The spiral extrusion rod 23 sequentially squeezes the triangular extrusion tube 21, so that the alkali liquid layer is squeezed by the suction force provided by the triangular extrusion tube 21 and poured into the inside of the triangular extrusion tube 21. When the triangular extrusion tube 21 is squeezed by the spiral extrusion rod 23 again, the alkali liquid can be squeezed from top to bottom inside the triangular extrusion tube 21, and sprayed out after reaching the bottom nozzle 24, and the rotating active pipe 31 cooperates with the fixed extrusion spiral blade 36 to squeeze the water under the alkali liquid layer and transmit it downward. , and is sprayed out from the liquid outlet 35, so that the water and the alkali solution can impact each other positively and mix with the activating agent. When the speed of the active pipe 31 increases, the stirring blade 34 is driven by the active pipe 31 to rotate positively and stir quickly, so that the internal liquid forms a vortex of radial flow, so that the alkali solution is concentrated and supplied to the inside of the active pipe 31 through the liquid inlet 33. When the liquid enters the inside of the active pipe 31, the fixed extrusion spiral blade 36 cooperates with the rotating active pipe 31 to transmit the liquid from top to bottom, and then squeezed out from the liquid outlet 35. The active pipe 31 drives the spiral extrusion rod 23 to rotate positively at a slow speed. After the water is drawn into the triangular extrusion tube 21, it is sprayed out through the bottom nozzle 24 at the bottom, thereby impacting the alkali solution sprayed out from the liquid outlet 35, and then cooperating with the activating agent to improve the mixing effect and mixing efficiency of the water alkali.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

A stirring device for an electronic-grade negative photoresist developer comprises a stirring kettle (11) for providing a stirring environment, characterized in that: a circulation mechanism (3) and an extrusion mechanism (2) for cooperating with the circulation mechanism (3) are installed inside the stirring kettle (11); the circulation mechanism (3) comprises an active tube (31) rotatably connected to the stirring kettle (11); a circulation chamber (32) is arranged inside the active tube (31); an extrusion spiral blade (36) is installed inside the circulation chamber (32) and the blade is slidably matched with the active tube (31); a liquid inlet (33) is arranged near the top of the active tube (31); a liquid outlet (35) is arranged near the bottom of the active tube (31); and a stirring blade (34) is installed on the active tube (31) at the upper side of the liquid outlet (35);

The active tube (31) is connected to the bottom ring (28) of the extrusion mechanism (2) through a deceleration fitting. The inner wall of the bottom ring (28) is formed with a tooth groove that matches the deceleration fitting. The upper end of the bottom ring (28) is fixedly connected with a cutting piece (27) at a position corresponding to the liquid outlet (35). Two sleeve rings (26) are arranged on the active tube (31) and are circumferentially rotatable with the active tube (31). The two sleeve rings (26) are respectively arranged outside the liquid inlet (33) and on the upper side of the liquid outlet (35). The two sleeve rings (26) are arranged on the outer side of the liquid inlet (33) and on the upper side of the liquid outlet (35). 6), four support rods (25) are arranged on each of the two groups of support rods (25), and a spiral extrusion rod (23) is fixedly connected between the two groups of support rods (25), four triangular extrusion tubes (21) are evenly arranged between the outer side surface of the spiral extrusion rod (23) and the inner wall of the stirring kettle (11), an extrusion cavity (22) is formed inside the triangular extrusion tube (21), a bottom nozzle (24) is arranged at the bottom of the triangular extrusion tube (21), a water spray port is formed on the upper side surface of the bottom nozzle (24), and the direction of the water spray port corresponds to the direction of the liquid outlet (35).
According to claim 1, a stirring device for configuring an electronic-grade negative photoresist developer is characterized in that: the deceleration fitting of the active tube (31) is a bottom sun gear (37) and a planetary gear set (38), the bottom sun gear (37) is fixedly connected to the bottom of the active tube (31), the outer side of the bottom sun gear (37) is matched with the planetary gear set (38), and the planetary gear set (38) is meshed with the tooth groove of the bottom ring (28).
The electronic grade negative photoresist developer configuration stirring device according to claim 1 is characterized in that: the four cut-off pieces (27) are fixedly connected between the sleeve ring (26) and the bottom ring (28), and the water-facing surface of the cut-off piece (27) is provided with rounded corners inwardly.
According to claim 1, a stirring device for configuring an electronic-grade negative photoresist developer is characterized in that: the cross-section of the triangular extrusion tube (21) in top view is a hollow triangle, and the matching clearance between the spiral extrusion rod (23) and the inner wall of the stirring kettle (11) is the thickness of the triangular extrusion tube (21) after being folded in half.
The electronic-grade negative photoresist developer configuration stirring device according to claim 1 is characterized in that: the spiral extrusion rod (23) is a spiral structure, and a sleeve is provided on the spiral extrusion rod (23), and the sleeve is rotatably connected to the spiral extrusion rod (23).
According to claim 2, a stirring device for configuring an electronic-grade negative photoresist developer is characterized in that the bottom of the extrusion spiral blade (36) is connected to the bottom surface of the stirring tank (11) through a fixed shaft penetrating the active tube (31) and the bottom sun gear (37).
The electronic-grade negative photoresist developer configuration stirring device according to claim 1 is characterized in that a support frame (12) is fixed to the outside of the stirring kettle (11), and a stirring motor (13) is installed at the upper end of the stirring kettle (11) to provide power for the active tube (31).