CN115400642A - Electronic grade negative photoresist developer solution configuration stirring equipment - Google Patents
Electronic grade negative photoresist developer solution configuration stirring equipment Download PDFInfo
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- CN115400642A CN115400642A CN202211353620.4A CN202211353620A CN115400642A CN 115400642 A CN115400642 A CN 115400642A CN 202211353620 A CN202211353620 A CN 202211353620A CN 115400642 A CN115400642 A CN 115400642A
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- extrusion
- pipe
- stirring
- negative photoresist
- driving pipe
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- 238000003756 stirring Methods 0.000 title claims abstract description 57
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 27
- 238000001125 extrusion Methods 0.000 claims abstract description 91
- 239000007788 liquid Substances 0.000 claims abstract description 58
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 22
- 238000002156 mixing Methods 0.000 claims description 14
- 238000007493 shaping process Methods 0.000 claims description 6
- 238000013019 agitation Methods 0.000 claims 4
- 239000000243 solution Substances 0.000 description 18
- 239000003513 alkali Substances 0.000 description 13
- 230000000694 effects Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 239000007921 spray Substances 0.000 description 8
- 239000012530 fluid Substances 0.000 description 6
- 230000013011 mating Effects 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000013543 active substance Substances 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 235000017550 sodium carbonate Nutrition 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/80—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis
- B01F27/96—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis with openwork frames or cages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
- B01F23/405—Methods of mixing liquids with liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
- B01F23/43—Mixing liquids with liquids; Emulsifying using driven stirrers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
- B01F23/45—Mixing liquids with liquids; Emulsifying using flow mixing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/20—Jet mixers, i.e. mixers using high-speed fluid streams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/717—Feed mechanisms characterised by the means for feeding the components to the mixer
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mixers Of The Rotary Stirring Type (AREA)
Abstract
The invention relates to an electronic grade negative photoresist developing solution configuration stirring device which comprises a stirring kettle used for providing a stirring environment, wherein a circulating mechanism and an extrusion mechanism used for being matched with the circulating mechanism are arranged in the stirring kettle, the circulating mechanism comprises a driving pipe rotationally connected with the stirring kettle, a circulating cavity is arranged in the driving pipe, an extrusion spiral blade is arranged in the circulating cavity, the blade is in sliding fit with the driving pipe, a liquid inlet is arranged on the driving pipe close to the top, a liquid outlet is arranged on the driving pipe close to the bottom, and a stirring blade is arranged on the driving pipe and located on the upper side of the liquid outlet.
Description
Technical Field
The invention relates to the field of mixing and stirring of developing solutions, in particular to a device for preparing and stirring an electronic grade negative photoresist developing solution.
Background
Negative photoresist is typically developed using a negative developer, typically KOH, which is also used by some factories as Na2CO3, but alkaline solutions of either component will contain surfactants. The weak acidic region of the photoresist is not exposed to light, and only from the view of the chemical reaction layer, the relationship between the unexposed region of the photoresist and the pH value of the alkaline developing solution is formed.
Chinese patent No. CN102743996B discloses an extraction mixer, wherein an upper cover plate is disposed above the blade, a lower cover plate having a fluid suction inlet at the center is disposed below the blade, a mixing element for radially passing and mixing fluid is disposed between the upper cover plate and the lower cover plate, the mixing element is provided with a plurality of fluid passing holes for radially passing fluid, and the fluid passes through the fluid passing holes and then flows in the mixer in a staggered manner. However, in the prior art, the existing circulation mode is broken through by changing the blade mode in the existing layering treatment of alkali liquor and water, but for obvious layering mixing, the circulation mode is simply changed without obvious positive impact among solutions, and the mixing effect is not ideal under the condition that the damage effect of a solution body is not obvious.
Disclosure of Invention
The invention provides electronic grade negative photoresist developing solution preparation stirring equipment, which aims to solve the technical problems that alkali liquor and water are layered when the negative photoresist developing solution is stirred at present and the layers cannot be mixed in time, so that the mixing efficiency is low.
The invention relates to a stirring device for preparing an electronic grade negative photoresist developing solution, which adopts the following technical scheme: the stirring device comprises a stirring kettle for providing a stirring environment, wherein a circulating mechanism and an extruding mechanism for matching the circulating mechanism are arranged in the stirring kettle, the circulating mechanism comprises a driving pipe rotationally connected with the stirring kettle, a circulating cavity is arranged in the driving pipe, an extruding spiral blade is arranged in the circulating cavity, the blade is in sliding fit with the driving pipe, a liquid inlet is arranged at a position, close to the top, of the driving pipe, a liquid outlet is arranged at a position, close to the bottom, of the driving pipe, and stirring blades are arranged on the driving pipe and positioned on the upper side of the liquid outlet;
the initiative pipe is connected through the speed reduction fitting piece the return ring of extrusion mechanism, the shaping of return ring inner wall has the tooth's socket of cooperation speed reduction fitting piece, the return ring upper end corresponds the liquid outlet position has linked firmly the cutting-off section, and two lantern ring settings are in on the initiative pipe and the cooperation of rotation in a circumferential direction the initiative pipe, two lantern rings set up respectively the inlet outside with the liquid outlet upside, two all be provided with four bracing pieces on the lantern ring, and linked firmly the spiral extrusion pole between two sets of bracing pieces, spiral extrusion pole lateral surface with evenly be provided with four triangle extrusion pipes between the stirred tank inner wall, the inside shaping of triangle extrusion pipe has the extrusion chamber, triangle extrusion pipe bottom is provided with the bottom spray tube, the side shaping has the water jet on the bottom spray tube, and the water jet direction corresponds the liquid outlet direction.
Further, the speed reduction fitting piece of driving tube is bottom sun gear and planet wheelset, the bottom sun gear links firmly the driving tube bottom, the cooperation in the bottom sun gear outside the planet wheelset, planet wheelset with the tooth's socket meshing of end ring, through the bottom sun gear planet wheelset with the end ring cooperation turns into the slow homodromous of end ring with the quick revolving force of driving tube to guarantee the rotation and the pressurization effect of spiral extrusion pole.
Further, four the cutting blade links firmly the lantern ring with between the foundation ring, just the cutting blade upstream face inwards is provided with the fillet, handles through the fillet, when the cutting blade is rotatory, can for the liquid outlet provides a little pressure to make liquid outlet spun water pressure and cutting blade and water pressure strike, improve the liquid crushing effect of liquid outlet water spray.
Further, the triangle extrusion pipe overlooks the cross-section and is hollow triangle-shaped, the screw extrusion pole with the fit clearance of stirred tank inner wall does the thickness after the triangle extrusion pipe fifty percent discount, the triangle extrusion pipe can be poured into peripheral high density liquid under the normality, after receiving the order extrusion of screw extrusion pole, through the cooperation extrusion, transmits the spout blowout of rethread bottom spray tube downwards with high density liquid.
Further, the spiral extrusion pole becomes helical structure, just be provided with the sleeve on the spiral extrusion pole, the sleeve rotate connect in the spiral extrusion pole, when extruding through rotatory sleeve and triangle extrusion pipe cooperation, avoid sliding friction, improve the extrusion effect when triangle extrusion pipe and spiral extrusion pole are crisscross.
Furthermore, the bottom of the extrusion spiral blade penetrates through the driving pipe through the fixed shaft and the bottom sun gear is connected to the bottom surface of the stirring kettle, and the extrusion spiral blade is fixedly connected to the stirring kettle through the fixed shaft so as to be matched with the rotating driving pipe to enable liquid to be transmitted and extruded by the extrusion spiral blade.
Further, the stirred tank external fixation has the support frame, stirred tank upper end is installed and is done the agitator motor that the initiative pipe provided power.
The invention has the beneficial effects that: the invention drives the stirring blades to rotate positively and quickly through the driving pipe, so that the liquid in the stirring kettle forms a vortex of radial flow, low-density liquid is intensively supplied to the interior of the driving pipe through the liquid inlet, when the liquid enters the interior of the driving pipe, the liquid is transmitted from top to bottom through the fixed extrusion spiral blade matched with the rotating driving pipe and then extruded from the liquid outlet, the driving pipe drives the bottom ring and the cutting piece and the lantern ring attached to the upper end to rotate positively and slowly through the speed reduction matching piece at the bottom, the supporting rod and the spiral extrusion rod which are fixedly connected to the lantern ring form sequential extrusion on the triangular extrusion pipe, high-density liquid is pumped in by the triangular extrusion pipe and then is sprayed out through the bottom spray pipe at the bottom, so that the high-density liquid impacts with the low-density liquid sprayed out of the liquid outlet, and the combination of two characteristics of the alkali liquor and the water is utilized by utilizing the self layering property of the alkali liquor and the original radial flow matched with the stirring kettle, so that the mixing effect and the mixing efficiency of the water and the alkali are improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the description of the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a stirring tank of an embodiment of an electronic grade negative photoresist developer solution configuration stirring apparatus according to the invention;
FIG. 2 is a schematic structural diagram of a supporting frame of an embodiment of an electronic grade negative photoresist developer solution stirring apparatus according to the invention;
FIG. 3 is a schematic view of an internal structure of a stirring tank of an embodiment of an electronic grade negative photoresist developer solution configuration stirring apparatus according to the present invention;
FIG. 4 is a schematic structural diagram of an extruding helical blade of an embodiment of an electronic grade negative photoresist developer solution configuration stirring device of the present invention;
FIG. 5 is a schematic diagram of a screw extrusion rod of an embodiment of an electronic grade negative photoresist developer solution configuration stirring apparatus of the present invention;
FIG. 6 is a schematic diagram of a structure of a coordination relationship between an extrusion helical blade and a driving pipe of an embodiment of an electronic grade negative photoresist developer configuring and stirring apparatus of the present invention;
FIG. 7 is a schematic diagram of a structure of a mating relationship between a deceleration mating member and a bottom ring of an embodiment of an electronic grade negative photoresist developer solution stirring apparatus according to the present invention;
FIG. 8 is a schematic structural diagram illustrating a mating relationship between a screw extrusion stem and a bottom nozzle of an embodiment of an electronic grade negative photoresist developer solution dispensing stirring apparatus of the present invention;
fig. 9 is a schematic structural diagram of a cutting section of an embodiment of an electronic grade negative photoresist developer configuring stirring device according to the invention.
In the figure: 2. an extrusion mechanism; 3. a circulating mechanism; 11. stirring the kettle; 12. a support frame; 13. a stirring motor; 21. triangular extrusion pipe; 22. an extrusion chamber; 23. a screw extrusion stem; 24. a bottom nozzle; 25. a support bar; 26. a collar; 27. cutting off the slices; 28. a bottom ring; 31. an active tube; 32. a circulation chamber; 33. a liquid inlet; 34. stirring blades; 35. a liquid outlet; 36. extruding the helical blade; 37. a bottom sun gear; 38. a planetary gear set.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
An embodiment of an electronic grade negative photoresist developer configuring and stirring apparatus of the present invention, as shown in fig. 1 to 9, includes a stirring tank 11 for providing a stirring environment, a circulation mechanism 3 and an extrusion mechanism 2 for cooperating with the circulation mechanism 3 are installed inside the stirring tank 11, as shown in fig. 3 and 4, the circulation mechanism 3 includes a driving pipe 31 rotatably connected with the stirring tank 11, a circulation cavity 32 is installed inside the driving pipe 31, an extrusion helical blade 36 is installed inside the circulation cavity 32 and the blade is in sliding fit with the driving pipe 31, a liquid inlet 33 is installed on the driving pipe 31 near the top, a liquid outlet 35 is installed on the driving pipe 31 near the bottom, and a stirring blade 34 is installed on the driving pipe 31 above the liquid outlet 35;
as shown in fig. 5, 6, the driving pipe 31 is connected with the bottom ring 28 of the extruding mechanism 2 through the deceleration matching piece, the inner wall of the bottom ring 28 is formed to have a tooth groove matched with the deceleration matching piece, the position of the upper end of the bottom ring 28 corresponding to the liquid outlet 35 is fixedly connected with the cutting piece 27, two lantern rings 26 are arranged on the driving pipe 31 and are circumferentially and rotationally matched with the driving pipe 31, the two lantern rings 26 are respectively arranged at the outer part of the liquid inlet 33 and the upper side of the liquid outlet 35, four support rods 25 are arranged on the two lantern rings 26, a spiral extrusion rod 23 is fixedly connected between the two sets of support rods 25, four triangular extrusion pipes 21 are uniformly arranged between the outer side surface of the spiral extrusion rod 23 and the inner wall of the stirring kettle 11, the inner part of the triangular extrusion pipe 21 is formed to have an extrusion cavity 22, the bottom of the triangular extrusion pipe 21 is provided with a bottom spray pipe 24, the upper side surface of the bottom spray pipe 24 is formed to have a water jet, and the direction of the water jet direction corresponds to the direction of the liquid outlet 35.
As shown in fig. 6 and 7, the deceleration mating parts of the driving tube 31 are a bottom sun gear 37 and a planetary gear set 38, the bottom sun gear 37 is fixedly connected to the bottom of the driving tube 31, the outer side of the bottom sun gear 37 is matched with the planetary gear set 38, the planetary gear set 38 is meshed with the tooth grooves of the bottom ring 28, and the bottom sun gear 37 and the planetary gear set 38 are matched with the bottom ring 28 to convert the fast rotating force of the driving tube 31 into the slow same-direction rotation of the bottom ring 28, thereby ensuring the rotating and pressurizing effects of the screw extrusion rod 23.
As shown in fig. 9, four cutting blades 27 are fixedly connected between the sleeve ring 26 and the bottom ring 28, and the cutting blades 27 are provided with a fillet in the water-facing surface, and through fillet treatment, when the cutting blades 27 rotate, a small amount of pressure can be provided for the liquid outlet 35, so that the water pressure sprayed from the liquid outlet 35 impacts the cutting blades 27 and the water pressure, and the liquid crushing effect of the water sprayed from the liquid outlet 35 is improved.
As shown in fig. 8, the cross section of the triangular extrusion pipe 21 is a hollow triangle, the fit clearance between the screw extrusion rod 23 and the inner wall of the stirred tank 11 is the thickness of the triangular extrusion pipe 21 after being folded in half, the triangular extrusion pipe 21 can pour the high-density liquid at the periphery under normal conditions, and after being sequentially extruded by the screw extrusion rod 23, the high-density liquid is conveyed downwards and then sprayed out through the nozzle of the bottom nozzle 24 through fit extrusion.
As shown in fig. 3, the screw extrusion rod 23 is of a screw structure, and a sleeve is arranged on the screw extrusion rod 23, the sleeve is rotatably connected to the screw extrusion rod 23, so that when the rotating sleeve is matched with the triangular extrusion tube 21 for extrusion, sliding friction is avoided, and the extrusion effect when the triangular extrusion tube 21 and the screw extrusion rod 23 are staggered is improved.
As shown in fig. 6, the bottom of the extrusion screw blade 36 is connected to the bottom surface of the stirring tank 11 through the fixed shaft penetrating through the active pipe 31 and the bottom sun gear 37, and the extrusion screw blade 36 is connected to the stirring tank 11 through the fixed shaft, so as to cooperate with the rotating active pipe 31, so that the liquid can be transmitted and extruded by the extrusion screw blade 36.
As shown in fig. 2, a support frame 12 is fixed outside the stirred tank 11, and a stirring motor 13 for providing power to the driving pipe 31 is installed at the upper end of the stirred tank 11.
To sum up, after the stirring motor 13 is started, the driving pipe 31 is driven to rotate, when the alkali liquid layer floats on the water surface in a slow speed state, the bottom sun wheel 37 at the bottom of the driving pipe 31 drives the bottom ring 28 to rotate slowly through the planetary wheel set 38, the bottom ring 28 drives the spiral extrusion rod 23 to rotate through the lantern ring 26, the spiral extrusion rod 23 sequentially extrudes the triangular extrusion pipes 21, the suction force provided by the extruded triangular extrusion pipes 21 of the alkali liquid layer is filled into the triangular extrusion pipes 21, when the triangular extrusion pipes 21 are extruded by the spiral extrusion rod 23 again, the alkali liquid can be extruded inside the triangular extrusion pipes 21 from top to bottom and is ejected after reaching the bottom nozzle pipe 24, and the rotating driving pipe 31 is matched with the fixed extrusion spiral blades 36 to extrude the water under the alkali liquid layer to be transmitted downwards, spout from liquid outlet 35 mouth, make water and alkali lye can the positive impact, the cooperation active agent mixes, after the initiative pipe 31 speed risees, drive stirring leaf 34 corotation rapid mixing through the initiative pipe 31, make inside liquid form the swirl of radial flow, make alkali lye concentrate to supply with to the initiative pipe 31 inside through inlet 33, after liquid enters into the initiative pipe 31 inside, through the rotatory initiative pipe 31 of 36 cooperation of fixed extrusion helical blade, make liquid from the last down transmission, extrude from liquid outlet 35 mouths again, the initiative pipe 31 drives the screw extrusion pole 23 corotation at a slow speed, water is taken out into the back by triangle extrusion pipe 21, the bottom spray tube 24 blowout of rethread bottom, thereby take place the impact with liquid outlet 35 spun alkali lye, cooperate the active agent thereby improve the mixed effect and the mixing efficiency of water alkali again.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and should not be taken as limiting the scope of the present invention, which is intended to cover any modifications, equivalents, improvements, etc. within the spirit and scope of the present invention.
Claims (7)
1. An electronic grade negative photoresist developer solution mixing device, comprising a mixing tank (11) for providing a mixing environment, characterized in that: a circulating mechanism (3) and an extruding mechanism (2) matched with the circulating mechanism (3) are arranged in the stirring kettle (11), the circulating mechanism (3) comprises a driving pipe (31) rotatably connected with the stirring kettle (11), a circulating cavity (32) is arranged in the driving pipe (31), an extruding spiral blade (36) is arranged in the circulating cavity (32) and is in sliding fit with the driving pipe (31), a liquid inlet (33) is arranged on the driving pipe (31) close to the top, a liquid outlet (35) is arranged on the driving pipe (31) close to the bottom, and a stirring blade (34) is arranged on the driving pipe (31) and is positioned above the liquid outlet (35);
drive pipe (31) are connected through the speed reduction fitting piece bottom ring (28) of extrusion mechanism (2), bottom ring (28) inner wall shaping has the tooth's socket of cooperation speed reduction fitting piece, bottom ring (28) upper end corresponds liquid outlet (35) position has linked firmly cut-off section (27), and two lantern rings (26) set up drive pipe (31) go up and circumference normal running fit drive pipe (31), two lantern rings (26) set up respectively inlet (33) outside with liquid outlet (35) upside, two all be provided with four bracing pieces (25) on lantern ring (26), and linked firmly screw extrusion pole (23) between two sets of bracing pieces (25), screw extrusion pole (23) lateral surface with evenly be provided with four triangle extrusion pipe (21) between stirred tank (11) the inner wall, triangle extrusion pipe (21) inside shaping has extrusion chamber (22), triangle extrusion pipe (21) bottom is provided with bottom (24), side shaping has the water jet, and the water jet nozzle direction corresponds liquid outlet (35) direction.
2. The electronic grade negative photoresist developer solution dispensing agitation apparatus of claim 1, wherein: the speed reduction fitting piece of driving pipe (31) is bottom sun gear (37) and planetary gear set (38), bottom sun gear (37) link firmly driving pipe (31) bottom, bottom sun gear (37) outside cooperation planetary gear set (38), planetary gear set (38) with the tooth's socket meshing of end ring (28).
3. The electronic grade negative photoresist developer solution dispensing agitation apparatus of claim 1, wherein: the four cutting pieces (27) are fixedly connected between the lantern ring (26) and the bottom ring (28), and fillets are arranged on the cutting pieces (27) inwards towards the water surface.
4. The electronic grade negative photoresist developer solution dispensing agitation apparatus of claim 1, wherein: the overlooking cross section of the triangular extrusion pipe (21) is a hollow triangle, and the fit clearance between the spiral extrusion rod (23) and the inner wall of the stirring kettle (11) is the thickness of the triangular extrusion pipe (21) after being folded in half.
5. The electronic grade negative photoresist developer solution preparing and stirring device according to claim 1, wherein: the spiral extrusion rod (23) is of a spiral structure, a sleeve is arranged on the spiral extrusion rod (23), and the sleeve is rotationally connected to the spiral extrusion rod (23).
6. The electronic grade negative photoresist developer solution preparing and stirring device according to claim 2, wherein: the bottom of the extrusion spiral blade (36) penetrates through the driving pipe (31) and the bottom sun wheel (37) through a fixed shaft and is connected to the bottom surface of the stirring kettle (11).
7. The electronic grade negative photoresist developer solution dispensing agitation apparatus of claim 1, wherein: stirred tank (11) external fixation has support frame (12), stirred tank (11) upper end is installed and is done stirring motor (13) that initiative pipe (31) provided power.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211353620.4A CN115400642B (en) | 2022-11-01 | 2022-11-01 | Electronic grade negative photoresist developer configuration agitated vessel |
| PCT/CN2022/140302 WO2024092984A1 (en) | 2022-11-01 | 2022-12-20 | Electronic-grade negative photoresist developer preparation stirring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211353620.4A CN115400642B (en) | 2022-11-01 | 2022-11-01 | Electronic grade negative photoresist developer configuration agitated vessel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115400642A true CN115400642A (en) | 2022-11-29 |
| CN115400642B CN115400642B (en) | 2023-06-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211353620.4A Active CN115400642B (en) | 2022-11-01 | 2022-11-01 | Electronic grade negative photoresist developer configuration agitated vessel |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN115400642B (en) |
| WO (1) | WO2024092984A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024092984A1 (en) * | 2022-11-01 | 2024-05-10 | 联仕(昆山)化学材料有限公司 | Electronic-grade negative photoresist developer preparation stirring apparatus |
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- 2022-11-01 CN CN202211353620.4A patent/CN115400642B/en active Active
- 2022-12-20 WO PCT/CN2022/140302 patent/WO2024092984A1/en unknown
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| US20170113953A1 (en) * | 2014-03-31 | 2017-04-27 | Daikin Industries, Ltd. | Method for processing fluorine-containing aqueous solution |
| CN108435006A (en) * | 2018-04-02 | 2018-08-24 | 段建锋 | A kind of liquid material mixing apparatus based on worm and gear autorotation principle |
| CN108854822A (en) * | 2018-09-06 | 2018-11-23 | 辽阳博仕流体设备有限公司 | A kind of combined type stirring system |
| CN208771367U (en) * | 2018-09-06 | 2019-04-23 | 辽阳博仕流体设备有限公司 | A kind of suspension mixing preparation system |
| CN111760482A (en) * | 2020-07-14 | 2020-10-13 | 珠海格力智能装备有限公司 | Mixing device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024092984A1 (en) * | 2022-11-01 | 2024-05-10 | 联仕(昆山)化学材料有限公司 | Electronic-grade negative photoresist developer preparation stirring apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2024092984A1 (en) | 2024-05-10 |
| CN115400642B (en) | 2023-06-30 |
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Address after: 215300 No.66 Wenpu Middle Road, Qiandeng Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Lianshi New Materials (Suzhou) Co.,Ltd. Address before: 215300 No.66 Wenpu Middle Road, Qiandeng Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: Lianshi (Kunshan) chemical materials Co.,Ltd. |