CN115400642B - Electronic grade negative photoresist developer configuration agitated vessel - Google Patents

Electronic grade negative photoresist developer configuration agitated vessel Download PDF

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Publication number
CN115400642B
CN115400642B CN202211353620.4A CN202211353620A CN115400642B CN 115400642 B CN115400642 B CN 115400642B CN 202211353620 A CN202211353620 A CN 202211353620A CN 115400642 B CN115400642 B CN 115400642B
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CN
China
Prior art keywords
extrusion
driving pipe
stirring
pipe
negative photoresist
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Active
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CN202211353620.4A
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Chinese (zh)
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CN115400642A (en
Inventor
王琴
张晨良
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Lianshi New Materials Suzhou Co ltd
Original Assignee
Lianshi Kunshan Chemical Materials Co ltd
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Priority to CN202211353620.4A priority Critical patent/CN115400642B/en
Publication of CN115400642A publication Critical patent/CN115400642A/en
Priority to PCT/CN2022/140302 priority patent/WO2024092984A1/en
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Publication of CN115400642B publication Critical patent/CN115400642B/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/80—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis
    • B01F27/96—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis with openwork frames or cages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/40—Mixing liquids with liquids; Emulsifying
    • B01F23/405—Methods of mixing liquids with liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/40—Mixing liquids with liquids; Emulsifying
    • B01F23/43—Mixing liquids with liquids; Emulsifying using driven stirrers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/40—Mixing liquids with liquids; Emulsifying
    • B01F23/45—Mixing liquids with liquids; Emulsifying using flow mixing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/20—Jet mixers, i.e. mixers using high-speed fluid streams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/71—Feed mechanisms
    • B01F35/717—Feed mechanisms characterised by the means for feeding the components to the mixer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mixers Of The Rotary Stirring Type (AREA)

Abstract

The invention relates to electronic grade negative photoresist developer configuration stirring equipment, which comprises a stirring kettle used for providing a stirring environment, wherein a circulating mechanism and an extrusion mechanism used for being matched with the circulating mechanism are arranged in the stirring kettle, the circulating mechanism comprises a driving pipe rotationally connected with the stirring kettle, a circulating cavity is arranged in the driving pipe, an extrusion spiral blade is arranged in the circulating cavity and is in sliding fit with the driving pipe, a liquid inlet is arranged on the driving pipe close to the top, a liquid outlet is arranged on the driving pipe close to the bottom, and a stirring blade is arranged on the driving pipe and positioned on the upper side of the liquid outlet so as to solve the technical problems that alkali lye and water are layered and cannot be timely mixed in a layered mode when negative photoresist developer is stirred at present, and thus the mixing efficiency is low.

Description

Electronic grade negative photoresist developer configuration agitated vessel
Technical Field
The invention relates to the field of mixing and stirring of developing solutions, in particular to electronic-grade negative-photoresist developing solution configuration and stirring equipment.
Background
Negative photoresist is usually developed with a negative developer, typically KOH, and Na2CO3 is also used in individual factories, but any alkaline solution of either composition contains a surfactant. The photoresist in the weak acid region is not exposed to light, namely, the relationship between the pH value of the photoresist in the unexposed region and the pH value of the alkaline developer is seen from the chemical reaction layer, and the negative photoresist has large molecular weight and hydrophobicity, so that the hydrophilicity of the developer needs to be improved by the surfactant in the developer, and the negative photoresist is dissolved.
The Chinese patent with the publication number of CN102743996B discloses an extraction mixer, wherein an upper baffle cover plate is arranged above a blade, a lower cover plate with a fluid suction inlet at the center is arranged below the blade, a mixing element for radially passing and mixing fluid is arranged between the upper cover plate and the lower cover plate, and a plurality of fluid passing holes for radially passing the fluid are arranged on the mixing element, and the fluid flows in the mixer after passing through the fluid passing holes in a staggered way. However, in the prior art, in the existing layering treatment of alkali liquor and water, the existing circulation mode is broken by adopting a blade-changing mode, but for obvious layering mixing, the circulation mode is simply changed without obvious forward impact among solutions, and the mixing effect is not ideal under the condition that the damage effect of a solution body is not obvious.
Disclosure of Invention
The invention provides electronic-grade negative-photoresist developer solution configuration stirring equipment, which aims to solve the technical problems that layering of alkali solution and water occurs when negative-photoresist developer solution is stirred at present, layering cannot be timely mixed, and therefore mixing efficiency is low.
The invention relates to electronic grade negative photoresist developer solution configuration stirring equipment which adopts the following technical scheme: the stirring device comprises a stirring kettle used for providing a stirring environment, wherein a circulating mechanism and an extrusion mechanism used for being matched with the circulating mechanism are arranged in the stirring kettle, the circulating mechanism comprises a driving pipe rotationally connected with the stirring kettle, a circulating cavity is arranged in the driving pipe, extrusion spiral blades are arranged in the circulating cavity and are in sliding fit with the driving pipe, a liquid inlet is formed in the driving pipe, close to the top, a liquid outlet is formed in the driving pipe, close to the bottom, and stirring blades are arranged on the upper side of the liquid outlet;
the driving pipe is connected with a bottom ring of the extrusion mechanism through a speed reduction matching piece, a tooth slot matched with the speed reduction matching piece is formed on the inner wall of the bottom ring, a cutting piece is fixedly connected with the upper end of the bottom ring corresponding to the position of the liquid outlet, two lantern rings are arranged on the driving pipe and are circumferentially and rotatably matched with the driving pipe, the two lantern rings are respectively arranged on the outside of the liquid inlet and the upper side of the liquid outlet, two all be provided with four bracing pieces on the lantern ring, and linked firmly the screw extrusion pole between two sets of bracing pieces, screw extrusion pole lateral surface with evenly be provided with four triangle extrusion pipes between the stirred tank inner wall, triangle extrusion pipe internal shaping has extrusion chamber, triangle extrusion pipe bottom is provided with the bottom spray tube, the shaping of bottom spray tube upside has the water jet, and the water jet direction corresponds the liquid outlet direction.
Further, the speed reduction matching piece of the driving pipe is a bottom sun wheel and a planetary gear set, the bottom sun wheel is fixedly connected to the bottom of the driving pipe, the outer side of the bottom sun wheel is matched with the planetary gear set, the planetary gear set is meshed with a tooth slot of the bottom ring, and the quick rotation force of the driving pipe is converted into the slow same-direction rotation of the bottom ring through the cooperation of the bottom sun wheel, the planetary gear set and the bottom ring, so that the rotation and pressurizing effect of the spiral extrusion rod are guaranteed.
Further, four the cutting piece links firmly the lantern ring with between the bottom ring, just the cutting piece upstream face inwards is provided with the fillet, through the fillet processing, when the cutting piece is rotatory, can be for the liquid outlet provides a little pressure to make liquid outlet spun water pressure and cutting piece and water pressure impact, improve the liquid crushing effect of liquid outlet water spray.
Furthermore, the cross section is hollow triangle in overlook of triangle extrusion pipe, the cooperation clearance of screw extrusion pole with stirred tank inner wall is the thickness after the triangle extrusion pipe fifty percent discount, triangle extrusion pipe can pour peripheral high density liquid under the normality, after receiving the sequential extrusion of screw extrusion pole, through cooperation extrusion, will high density liquid downward transmission rethread bottom jet pipe's spout blowout.
Further, the screw extrusion rod is of a screw structure, the sleeve is arranged on the screw extrusion rod and rotatably connected to the screw extrusion rod, sliding friction is avoided when the rotating sleeve is matched with the triangular extrusion pipe for extrusion, and extrusion effect when the triangular extrusion pipe and the screw extrusion rod are staggered is improved.
Further, the bottom of the extrusion spiral blade penetrates through the driving pipe and the bottom sun gear through the fixing shaft to be connected to the bottom surface of the stirring kettle, and the extrusion spiral blade is fixedly connected to the stirring kettle through the fixing shaft, so that the liquid can be conveyed and extruded by the extrusion spiral blade in cooperation with the rotating driving pipe.
Further, a supporting frame is fixed outside the stirring kettle, and a stirring motor for providing power for the driving pipe is installed at the upper end of the stirring kettle.
The beneficial effects of the invention are as follows: according to the invention, the stirring blade is driven to rotate forward and stir rapidly through the driving pipe, so that the internal liquid forms a vortex of radial flow, the low-density liquid is intensively supplied to the driving pipe through the liquid inlet, after the liquid enters the driving pipe, the liquid is transmitted from top to bottom through the fixed extrusion spiral blade and is extruded from the liquid outlet through the driving pipe which is matched with the rotation of the fixed extrusion spiral blade, the bottom ring, the cutting blade attached to the upper end and the lantern ring are driven by the decelerating matching piece at the bottom to rotate forward at a low speed by the driving pipe, the supporting rod and the spiral extrusion rod fixedly connected to the lantern ring form sequential extrusion on the triangular extrusion pipe, the high-density liquid is pumped in by the triangular extrusion pipe and is ejected out through the bottom spray pipe at the bottom, so that the impact is generated with the low-density liquid ejected from the liquid outlet, and the original radial flow of the stirring kettle is matched with the layering property of alkali liquid and water, so that the mixing effect and mixing efficiency of water alkali are improved.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the invention, and that other drawings can be obtained according to these drawings without inventive faculty for a person skilled in the art.
FIG. 1 is a schematic diagram of a stirred tank architecture of an embodiment of an electronic grade negative photoresist developer solution configuration stirring apparatus of the present invention;
FIG. 2 is a schematic diagram of a supporting frame structure of an embodiment of an electronic grade negative photoresist developer solution configuration stirring device according to the present invention;
FIG. 3 is a schematic diagram showing the internal structure of a stirred tank of an embodiment of an electronic grade negative photoresist developer solution configuration stirring device according to the present invention;
FIG. 4 is a schematic view of an embodiment of an extrusion screw blade of an electronic grade negative photoresist developer solution dispensing and stirring apparatus according to the present invention;
FIG. 5 is a schematic view of a screw extrusion rod of an embodiment of an electronic grade negative photoresist developer solution dispensing and stirring apparatus according to the present invention;
FIG. 6 is a schematic diagram of the structure of the extrusion screw blade and drive tube in the embodiment of the stirring device for preparing electronic grade negative photoresist developer solution according to the present invention;
FIG. 7 is a schematic diagram showing a relationship between a deceleration fitting member and a bottom ring in an embodiment of an electronic grade negative photoresist developer solution dispensing and stirring apparatus according to the present invention;
FIG. 8 is a schematic diagram showing the structure of the cooperation between the screw extrusion rod and the bottom nozzle in the embodiment of the stirring device for preparing the electronic grade negative photoresist developer solution;
fig. 9 is a schematic diagram of a cut-off blade structure of an embodiment of an electronic grade negative photoresist developer solution dispensing and stirring apparatus according to the present invention.
In the figure: 2. an extrusion mechanism; 3. a circulation mechanism; 11. stirring kettle; 12. a support frame; 13. a stirring motor; 21. triangular extrusion pipes; 22. an extrusion chamber; 23. a screw extrusion rod; 24. a bottom nozzle; 25. a support rod; 26. a collar; 27. cutting off the sheet; 28. a bottom ring; 31. a drive tube; 32. a circulation chamber; 33. a liquid inlet; 34. stirring the leaves; 35. a liquid outlet; 36. extruding the helical blade; 37. a bottom sun gear; 38. a planetary gear set.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The embodiment of the invention for preparing stirring equipment by using electronic-grade negative photoresist developer comprises a stirring kettle 11 for providing a stirring environment, wherein a circulating mechanism 3 and an extruding mechanism 2 for matching with the circulating mechanism 3 are arranged in the stirring kettle 11, the circulating mechanism 3 comprises a driving pipe 31 rotatably connected with the stirring kettle 11, a circulating cavity 32 is arranged in the driving pipe 31, an extruding helical blade 36 is arranged in the circulating cavity 32 and is in sliding fit with the driving pipe 31, a liquid inlet 33 is arranged on the driving pipe 31 near the top, a liquid outlet 35 is arranged on the driving pipe 31 near the bottom, and stirring blades 34 are arranged on the driving pipe 31 above the liquid outlet 35;
as shown in fig. 5 and 6, the driving pipe 31 is connected with the bottom ring 28 of the extrusion mechanism 2 through a speed reducing matching piece, tooth grooves matched with the speed reducing matching piece are formed on the inner wall of the bottom ring 28, the cutting piece 27 is fixedly connected to the upper end of the bottom ring 28 corresponding to the position of the liquid outlet 35, the two lantern rings 26 are arranged on the driving pipe 31 and circumferentially rotate to match the driving pipe 31, the two lantern rings 26 are respectively arranged on the outside of the liquid inlet 33 and the upper side of the liquid outlet 35, four supporting rods 25 are respectively arranged on the two lantern rings 26, the screw extrusion rods 23 are fixedly connected between the two groups of supporting rods 25, four triangular extrusion pipes 21 are uniformly arranged between the outer side surfaces of the screw extrusion rods 23 and the inner wall of the stirring kettle 11, an extrusion cavity 22 is formed inside the triangular extrusion pipes 21, the bottom of the triangular extrusion pipes 21 is provided with a bottom spray pipe 24, the upper side surfaces of the bottom spray pipe 24 are formed with water spray ports, and the directions of the water spray ports correspond to the directions of the liquid outlet 35.
As shown in fig. 6 and 7, the decelerating mating members of the driving tube 31 are a bottom sun gear 37 and a planetary gear set 38, the bottom sun gear 37 is fixedly connected to the bottom of the driving tube 31, the planetary gear set 38 is mated with the outer side of the bottom sun gear 37, the planetary gear set 38 is meshed with the tooth slot of the bottom ring 28, and the rapid rotation force of the driving tube 31 is converted into the slow rotation of the bottom ring 28 in the same direction through the cooperation of the bottom sun gear 37 and the planetary gear set 38, so that the rotation and pressurizing effect of the screw extrusion rod 23 are ensured.
As shown in fig. 9, four cut-off pieces 27 are fixedly connected between the collar 26 and the bottom ring 28, and the upstream surface of the cut-off pieces 27 is provided with fillets inwards, and by the fillets, when the cut-off pieces 27 rotate, a small amount of pressure can be provided for the liquid outlet 35, so that the water pressure sprayed by the liquid outlet 35 is impacted with the cut-off pieces 27 and the water pressure, and the liquid crushing effect of spraying water from the liquid outlet 35 is improved.
As shown in fig. 8, the triangular extrusion tube 21 has a hollow triangle cross section in a top view, the fit gap between the screw extrusion rod 23 and the inner wall of the stirring kettle 11 is the thickness of the triangular extrusion tube 21 after being folded in half, the triangular extrusion tube 21 can pour peripheral high-density liquid in a normal state, and after being sequentially extruded by the screw extrusion rod 23, the high-density liquid is downwards transmitted and then sprayed out through the nozzle of the bottom spray tube 24 through the fit extrusion.
As shown in fig. 3, the screw extrusion rod 23 is in a screw structure, and the screw extrusion rod 23 is provided with a sleeve, the sleeve is rotatably connected to the screw extrusion rod 23, and when the sleeve is matched with the triangular extrusion pipe 21 for extrusion through rotation, sliding friction is avoided, and the extrusion effect when the triangular extrusion pipe 21 and the screw extrusion rod 23 are staggered is improved.
As shown in fig. 6, the bottom of the extrusion screw blade 36 is connected to the bottom surface of the agitation tank 11 through a fixed shaft penetrating the drive pipe 31 and the bottom sun gear 37, and the extrusion screw blade 36 is fixedly connected to the agitation tank 11 through the fixed shaft, thereby being capable of being transported and extruded by the extrusion screw blade 36 in cooperation with the rotating drive pipe 31.
As shown in fig. 2, a supporting frame 12 is fixed outside the stirring kettle 11, and a stirring motor 13 for providing power for a driving pipe 31 is installed at the upper end of the stirring kettle 11.
In summary, after the stirring motor 13 is started, the driving pipe 31 is driven to rotate, when the alkali liquor layer floats on the water surface in a slow speed state, at this time, the bottom sun wheel 37 at the bottom of the driving pipe 31 drives the bottom ring 28 to rotate slowly through the planetary gear set 38, then the bottom ring 28 drives the spiral extrusion rod 23 to rotate through the lantern ring 26, the spiral extrusion rod 23 sequentially extrudes the triangular extrusion pipe 21, so that the pumping force provided by the extruded triangular extrusion pipe 21 for the alkali liquor layer is poured into the triangular extrusion pipe 21, when the triangular extrusion pipe 21 is extruded by the spiral extrusion pipe 23 again, the alkali liquor can be extruded in the triangular extrusion pipe 21 from top to bottom to be sprayed out after reaching the bottom spray pipe 24, the rotating driving pipe 31 is matched with the fixed extrusion spiral blades 36 to extrude and convey the water under the alkali liquor layer downwards, the liquid is sprayed out from the liquid outlet 35, so that water and alkali liquor can be impacted positively and are matched with an active agent to be mixed, after the speed of the driving pipe 31 is increased, the stirring blade 34 is driven to stir positively and stir rapidly through the driving pipe 31, so that internal liquid forms a vortex of radial flow, the alkali liquor is concentrated to be supplied to the driving pipe 31 through the liquid inlet 33, after the liquid enters the driving pipe 31, the liquid is transmitted downwards through the fixed extrusion helical blade 36 in cooperation with the rotating driving pipe 31, and is extruded from the liquid outlet 35, the driving pipe 31 drives the helical extrusion rod 23 to rotate positively slowly, after the water is pumped in by the triangular extrusion pipe 21, the water is sprayed out through the bottom spray pipe 24 at the bottom, so that the impact is generated with the alkali liquor sprayed out from the liquid outlet 35, and the active agent is matched, so that the mixing effect and mixing efficiency of water and alkali are improved.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.

Claims (6)

1. The utility model provides an electronic grade negative photoresist developer solution configuration agitated vessel, is including being used for providing stirred tank (11) of stirring environment, its characterized in that: the stirring kettle is characterized in that a circulating mechanism (3) and an extrusion mechanism (2) used for being matched with the circulating mechanism (3) are arranged in the stirring kettle (11), the circulating mechanism (3) comprises a driving pipe (31) rotationally connected with the stirring kettle (11), a circulating cavity (32) is arranged in the driving pipe (31), extrusion spiral blades (36) are arranged in the circulating cavity (32) and are in sliding fit with the driving pipe (31), a liquid inlet (33) is formed in the driving pipe (31) at a position close to the top, a liquid outlet (35) is formed in the driving pipe (31) at a position close to the bottom, and stirring blades (34) are arranged on the upper side of the liquid outlet (35) on the driving pipe (31);
the device comprises a driving pipe (31), a bottom ring (28) of an extrusion mechanism (2) is connected through a speed reduction matching piece, tooth grooves matched with the speed reduction matching piece are formed in the inner wall of the bottom ring (28), a cutting-off piece (27) is fixedly connected to the upper end of the bottom ring (28) corresponding to the position of a liquid outlet (35), two lantern rings (26) are arranged on the driving pipe (31) and are circumferentially and rotatably matched with the driving pipe (31), the two lantern rings (26) are respectively arranged on the outer side of a liquid inlet (33) and the upper side of the liquid outlet (35), four supporting rods (25) are respectively arranged on the two lantern rings (26), a spiral extrusion rod (23) is fixedly connected between the two groups of supporting rods (25), four triangular extrusion pipes (21) are uniformly arranged between the outer side surfaces of the spiral extrusion rods (23) and the inner wall of a stirring kettle (11), extrusion cavities (22) are formed in the triangular extrusion pipes (21), bottom spray pipes (24) are respectively arranged at the bottoms of the triangular extrusion pipes, and the side surfaces of the triangular extrusion pipes (24) are respectively provided with spray pipes (24) corresponding to the liquid spray outlets in the directions;
a plurality of liquid inlets (33) are distributed on the driving pipe (31) along the radial direction, and the inlet of the triangular extrusion pipe (21) is higher than the height of most of the liquid inlets (33); the triangular extrusion pipe (21) is hollow in top view section, and the fit clearance between the spiral extrusion rod (23) and the inner wall of the stirring kettle (11) is the thickness of the triangular extrusion pipe (21) after being folded in half.
2. The electronic grade negative photoresist developer solution configuration stirring device according to claim 1, wherein: the speed reduction matching piece of the driving pipe (31) is a bottom sun wheel (37) and a planetary gear set (38), the bottom sun wheel (37) is fixedly connected to the bottom of the driving pipe (31), the outer side of the bottom sun wheel (37) is matched with the planetary gear set (38), and the planetary gear set (38) is meshed with a tooth groove of the bottom ring (28).
3. The electronic grade negative photoresist developer solution configuration stirring device according to claim 1, wherein: four the cutting pieces (27) are fixedly connected between the lantern ring (26) and the bottom ring (28), and round corners are inwards arranged on the upstream surface of the cutting pieces (27).
4. The electronic grade negative photoresist developer solution configuration stirring device according to claim 1, wherein: the screw extrusion rod (23) is of a screw structure, a sleeve is arranged on the screw extrusion rod (23), and the sleeve is rotationally connected with the screw extrusion rod (23).
5. The electronic grade negative photoresist developer solution configuration stirring device according to claim 2, wherein: the bottom of the extrusion spiral blade (36) penetrates through the driving pipe (31) and the bottom sun wheel (37) through the fixed shaft and is connected to the bottom surface of the stirring kettle (11).
6. The electronic grade negative photoresist developer solution configuration stirring device according to claim 1, wherein: the stirring kettle (11) is externally fixed with a supporting frame (12), and the upper end of the stirring kettle (11) is provided with a stirring motor (13) for providing power for the driving pipe (31).
CN202211353620.4A 2022-11-01 2022-11-01 Electronic grade negative photoresist developer configuration agitated vessel Active CN115400642B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN202211353620.4A CN115400642B (en) 2022-11-01 2022-11-01 Electronic grade negative photoresist developer configuration agitated vessel
PCT/CN2022/140302 WO2024092984A1 (en) 2022-11-01 2022-12-20 Electronic-grade negative photoresist developer preparation stirring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202211353620.4A CN115400642B (en) 2022-11-01 2022-11-01 Electronic grade negative photoresist developer configuration agitated vessel

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CN115400642A CN115400642A (en) 2022-11-29
CN115400642B true CN115400642B (en) 2023-06-30

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5874852B2 (en) * 2014-03-31 2016-03-02 ダイキン工業株式会社 Treatment method of fluorine-containing aqueous solution
CN108435006B (en) * 2018-04-02 2020-07-24 浙江兴舟纸业有限公司 Mixing equipment for liquid material based on worm and gear self-rotation principle
CN108854822A (en) * 2018-09-06 2018-11-23 辽阳博仕流体设备有限公司 A kind of combined type stirring system
CN208771367U (en) * 2018-09-06 2019-04-23 辽阳博仕流体设备有限公司 A kind of suspension mixing preparation system
CN111760482B (en) * 2020-07-14 2022-05-27 珠海格力智能装备有限公司 Mixing device

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Address after: 215300 No.66 Wenpu Middle Road, Qiandeng Town, Kunshan City, Suzhou City, Jiangsu Province

Patentee after: Lianshi New Materials (Suzhou) Co.,Ltd.

Address before: 215300 No.66 Wenpu Middle Road, Qiandeng Town, Kunshan City, Suzhou City, Jiangsu Province

Patentee before: Lianshi (Kunshan) chemical materials Co.,Ltd.