WO2024090756A1 - Robinet-vanne, et procédé de fixation d'une plaque d'étanchéité - Google Patents

Robinet-vanne, et procédé de fixation d'une plaque d'étanchéité Download PDF

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Publication number
WO2024090756A1
WO2024090756A1 PCT/KR2023/012174 KR2023012174W WO2024090756A1 WO 2024090756 A1 WO2024090756 A1 WO 2024090756A1 KR 2023012174 W KR2023012174 W KR 2023012174W WO 2024090756 A1 WO2024090756 A1 WO 2024090756A1
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WO
WIPO (PCT)
Prior art keywords
coupling
sealing
plate
sealing plate
seating
Prior art date
Application number
PCT/KR2023/012174
Other languages
English (en)
Korean (ko)
Inventor
김선빈
Original Assignee
주식회사 퓨젠
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 퓨젠 filed Critical 주식회사 퓨젠
Publication of WO2024090756A1 publication Critical patent/WO2024090756A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere

Definitions

  • the present invention relates to a gate valve of a semiconductor manufacturing equipment and a method of fastening the sealing plate of the gate valve.
  • a semiconductor manufacturing device includes a process chamber (PM: Process module) and a transfer chamber (TM: Transfer Module).
  • PM Process module
  • TM Transfer Module
  • a process chamber is a module that provides space for processing substrates (e.g. wafers, glass, etc.).
  • the transfer chamber is a module that transfers substrates.
  • the transfer chamber is equipped with a robot. The robot transfers the substrate between the load lock chamber and the process chamber.
  • a passage through which substrates pass is formed between the process chamber and the transfer chamber.
  • a gate valve is installed in the passage.
  • a gate valve is configured to open and close a passage.
  • One object of the present invention is to provide a gate valve used in a vacuum.
  • One object of the present invention is to provide a gate valve with excellent sealing performance.
  • One object of the present invention is to provide a gate valve that is easy to assemble.
  • One object of the present invention is to provide a gate valve that can conveniently replace the sealing, which is a consumable material, when it is necessary to replace it.
  • One object of the present invention is to provide a gate valve in which the sealing plate can be conveniently exchanged.
  • One object of the present invention is to provide a gate valve in which the left and right shaking of the sealing plate can be minimized.
  • One object of the present invention is to provide a gate valve in which the left and right shaking of the sealing plate can be minimized when the sealing contacts the valve seat.
  • One object of the present invention is to provide a gate valve with a structure that reduces sealing rubbing.
  • One object of the present invention is to provide a gate valve with a structure that can extend the life of the sealing.
  • One object of the present invention is to provide a semiconductor manufacturing apparatus that can maintain operation of other process chambers and transfer chambers while performing maintenance on a process chamber among a plurality of process chambers.
  • One object of the present invention is to provide a semiconductor manufacturing apparatus in which particles within a vacuum atmosphere can be reduced.
  • the present invention is provided in a gate valve of a semiconductor manufacturing equipment and provides a gate plate coupled to a valve rod.
  • the gate plate includes a fixed block, a first sealing plate and a second sealing plate coupled to the fixed block
  • the fixed block includes a support portion fixedly coupled to the valve rod; a first seating portion located on a first side of the support portion and having an upper surface located at a lower position than the upper surface of the support portion; a second seating portion located on a second side of the support portion opposite the first side and having an upper surface located at a lower position than the upper surface of the support portion; a 1-1 clamping part that protrudes from one of the first sides of the support part at a position biased in the direction in which the first sealing plate is located and extends in a vertical direction from an upper part of the first seating part; a 1-2 clamping part that protrudes from one of the first sides of the support part at a position biased in the direction in which the second sealing plate is located and extends in a vertical direction from an upper part of
  • the second sealing plate includes: a second plate having one surface forming a sealing surface and a coupling surface forming on the other surface of the sealing surface; a second sealing fixed to the sealing surface of the second plate; a 2-1 coupling portion located on the coupling surface of the second plate, including a 2-1 engaging portion engaged with the 1-2 clamping portion, and having a bottom surface seated on the upper surface of the first seating portion; and a 2-2 engaging part located on the engaging surface of the second plate, including a 2-2 engaging part engaged with the 2-2 clamping part, and having a bottom surface seated on the upper surface of the second seating part; It includes, wherein the second sealing plate is coupled to the fixed block in a vertical direction, wherein the 2-1 engaging portion is engaged with the 1-2 clamping portion at an upper portion of the
  • the 1-1 coupling portion and the 1-2 coupling portion of the first sealing plate, and the 2-1 coupling portion and the 2-2 coupling portion of the second sealing plate include Fastening holes are formed penetrating in the vertical direction, and each coupling hole is formed in the first and second seating parts of the fixing block at a position coaxial with each of the fastening holes, and each of the It may include a fastening hole and a fastening member inserted into each of the coupling holes to couple the first sealing plate and the fixing block, and to couple the second sealing plate and the fixing block.
  • the 1-1 coupling part and the 2-1 coupling part may directly face each other, and the 1-2 coupling part and the 2-2 coupling part may directly face each other.
  • the thickness of the support portion of the fixed block in the front-back direction is thicker than the thickness of the first seating portion and the second seating portion, and a step is formed due to the thickness difference to form a protrusion, and the first sealing plate And a receiving groove is formed in the second sealing plate to accommodate the protrusion caused by the step of the support part.
  • the first sealing is provided by being bonded to the first sealing plate
  • the second sealing is provided by being bonded to the second sealing plate.
  • a gate plate in a gate valve of a semiconductor manufacturing apparatus, and includes a fixed block and a sealing plate coupled to the fixed block, wherein the fixed block includes a support portion fixedly coupled to the valve rod; a first seating portion located on a first side of the support portion and having an upper surface located at a lower position than the upper surface of the support portion; a second seating portion located on a second side of the support portion opposite the first side and having an upper surface located at a lower position than the upper surface of the support portion; a first clamping part that protrudes from the first side of the support part and extends in a vertical direction above the first seating part; and a second clamping part that protrudes from the second side of the support part and extends in a vertical direction above the second seating part, wherein one side of the sealing plate forms a sealing surface, and the sealing surface A plate forming a coupling surface on the other side of; A sealing fixed to the sealing surface; a first coupling part located on the coupling surface, including
  • the second coupling portion is placed on the first seating portion, and the second coupling portion is placed on the second seating portion.
  • fastening holes penetrating in a vertical direction are formed in each of the first coupling portion and the second coupling portion, and each of the fastening portions is formed in the first seating portion and the second seating portion of the fixing block.
  • Each coupling hole is formed at a position coaxial with the hole, and may include each coupling hole and a fastening member inserted into each coupling hole to couple the sealing plate and the fixing block.
  • the sealing may be provided by bonding to the sealing plate.
  • the present invention provides a semiconductor manufacturing device including the above-described gate plate.
  • the process of assembling the gate plate is simple.
  • the sealing plate constituting the gate plate can be easily separated from the fixing block and easily combined. Additionally, when they are combined, they are not separated from each other.
  • the lifespan of the sealing can be increased.
  • the replacement cycle of the sealing can be increased.
  • the operating state of the other process chambers and the transfer chamber can be maintained.
  • particles within a vacuum atmosphere can be reduced.
  • productivity of a semiconductor manufacturing device can be improved.
  • FIG. 1 is a schematic diagram of a semiconductor manufacturing apparatus.
  • Figure 2 is a diagram for explaining the position and operation of the gate valve 1000 according to an embodiment of the present invention.
  • FIG. 3 schematically shows the gate valve 1000 according to an embodiment of the present invention as seen from the front.
  • Figure 4 is a perspective view of the gate plate 1100 according to an embodiment of the present invention as seen from a first direction.
  • Figure 5 is a perspective view of the gate plate 1100 according to an embodiment of the present invention as seen from a second direction (opposite to the first direction).
  • Figure 6 is a perspective view of the gate plate 1100 according to one embodiment as seen from the bottom.
  • Figure 7 is an exploded perspective view of the gate plate 1100 according to an embodiment of the present invention.
  • Figure 8 is a perspective view of the fixed block 110 according to an embodiment of the present invention.
  • Figure 9 is a plan view of the fixed block 110 according to an embodiment of the present invention.
  • Figure 10 is a bottom perspective view of the fixed block 110 according to an embodiment of the present invention.
  • Figure 11 is a bottom view of the fixed block 110 according to an embodiment of the present invention.
  • Figure 12 is a cross-sectional perspective view of the fixed block 110.
  • Figure 13 is a perspective view of the sealing plate 150.
  • FIG. 14 is a perspective view of the sealing plate 150 viewed from the direction opposite to that of FIG. 13.
  • Figure 15 is a cross-sectional perspective view of a portion where the first coupling hole 1519a and the second coupling hole 1519b are formed.
  • Figure 16 is a top view of the sealing plate 150.
  • Figure 17 is a bottom view of the sealing plate 150.
  • Figure 18 is a cross-sectional view taken along line II' of Figure 16.
  • Figure 19 is a diagram for explaining the combination of the fixing block 110 and the second sealing plate 130.
  • Figure 20 is a diagram for explaining the combination of the fixing block 110 and the first sealing plate 120, and the combination of the fixing block 110 and the second sealing plate 130.
  • Figure 21 is a cross-sectional view showing the gate plate 1100 coupled to the valve rod 200 according to an embodiment.
  • Figure 22 is a diagram explaining the operation of the gate valve 1000 according to one embodiment.
  • FIGS. 23 and 24 are diagrams illustrating a method of replacing the sealing plate of the gate plate 1100 according to an embodiment.
  • Figure 25 is a diagram for explaining the position and operation of the gate valve 2000 according to an embodiment of the present invention.
  • Figure 26 is a perspective view of the gate plate 1200 according to an embodiment of the present invention as seen from a first direction.
  • Figure 27 is a perspective view of the gate plate 1200 according to an embodiment of the present invention as seen from a second direction (opposite to the first direction).
  • Figure 28 is a perspective view of a fixed block 2110 according to an embodiment of the present invention.
  • Figure 29 is a perspective view of the sealing plate 2120 according to an embodiment of the present invention as seen from the coupling surface.
  • expressions such as “same” and “is the same” not only indicate a strictly identical state, but also indicate a state in which there is a difference in tolerance or the degree to which the same function can be obtained.
  • Each axis direction (X-axis direction, Y-axis direction, Z-axis direction) refers to both directions in which each axis extends.
  • the '+' sign in front of each axis direction (+X-axis direction, +Y-axis direction, +Z-axis direction) means the positive direction, which is one of the two directions in which each axis extends.
  • the '-' sign in front of each axis direction (-X-axis direction, -Y-axis direction, -Z-axis direction) means the negative direction, which is the other direction among the two directions in which each axis extends.
  • 'and/or' includes a combination of a plurality of listed items or any of the plurality of listed items.
  • 'A or B' may include 'A', 'B', or 'both A and B'.
  • FIG. 1 is a schematic diagram of a semiconductor manufacturing apparatus.
  • the arrow indicates the direction of movement of the substrate.
  • the semiconductor manufacturing apparatus 1 includes a load lock chamber 11, a transfer chamber 12, and a process chamber 13.
  • the load lock chamber 11 forms a normal pressure or vacuum atmosphere.
  • a substrate may be loaded in the load lock chamber 11.
  • the load lock chamber 11 can selectively achieve a normal pressure atmosphere and a vacuum atmosphere.
  • the transfer chamber 12 forms a vacuum atmosphere.
  • the transfer chamber 12 is equipped with a transfer robot that transfers the substrate.
  • the transfer robot transfers the substrate from the load lock chamber 11 to the process chamber 13. Additionally, the transfer robot transfers the substrate from the process chamber 13 to the load lock chamber 11.
  • the process chamber 13 forms a vacuum atmosphere.
  • the process chamber 13 performs a set process.
  • the process chamber 13 may be a deposition chamber for depositing a thin film on a substrate, an etching chamber for etching a thin film, etc.
  • Figure 2 is a diagram for explaining the position and operation of the gate valve 1000 according to an embodiment of the present invention.
  • Figure 3 schematically shows the gate valve 1000 according to an embodiment of the present invention as seen from the front. The gate valve 1000 will be described with reference to FIGS. 2 and 3.
  • Gate valve 1000 is located in a vacuum.
  • the gate valve 1000 is located in a passage connecting the transfer chamber 12 and the process chamber 13. Substrates come and go through the passage.
  • the gate valve 1000 opens and closes a passage connecting the transfer chamber 12 and the process chamber 13.
  • the gate valve 1000 may include a gate plate 1100, a valve rod 200, and an actuator 300.
  • the gate plate 1100 is configured to open and close the passage.
  • the gate plate 1100 is accommodated inside the valve housing 14.
  • the gate plate 1100 is configured to seal the gate (14aa or 14ba, see FIG. 22) by contacting the valve seat (14ab or 14bb, see FIG. 22) of the valve housing 14.
  • the valve rod 200 is coupled to the gate plate 1100.
  • the gate plate 1100 is fixed to the valve rod 200.
  • the valve rod 200 is connected to the actuator 300.
  • the valve rod 200 transmits the driving force of the actuator 300 to the gate plate 1100.
  • the actuator 300 is a driving means.
  • the actuator 300 applies driving force to the valve rod 200, and the gate plate 1100 connected to the valve rod 200 receives the driving force.
  • the gate plate 1100 that receives driving force from the actuator 300 can move up and down and forward and backward.
  • Figure 4 is a perspective view of the gate plate 1100 according to an embodiment of the present invention as seen from a first direction.
  • Figure 5 is a perspective view of the gate plate 1100 according to an embodiment of the present invention as seen from a second direction (opposite to the first direction).
  • Figure 6 is a perspective view of the gate plate 1100 according to one embodiment as seen from the bottom. The gate plate 1100 will be described with reference to FIGS. 4, 5, and 6.
  • the gate plate 1100 includes a fixing block 110, a first sealing plate 120, and a second sealing plate 130.
  • the fixed block 110 is configured to be coupled to the valve rod 200.
  • the fixing block 110 is located in the center of the gate plate 1100.
  • the fixing block 110 is located between the first sealing plate 120 and the second sealing plate 130.
  • the fixing block 110 supports the first sealing plate 120 and the second sealing plate 130.
  • the fixing block 110 is coupled to the first sealing plate 120.
  • the fixing block 110 is coupled to the second sealing plate 130.
  • the first sealing plate 120 includes a first plate 121 and a first sealing 125.
  • the first side of the first plate 121 is disposed to face the gate.
  • the second side which is the opposite side, is coupled to the fixing block 110.
  • the first sealing 125 is provided on the first side.
  • the second sealing plate 130 includes a second plate 131 and a second sealing 135.
  • the first side of the second plate 131 is disposed toward the gate.
  • the second side which is the opposite side, is coupled to the fixing block 110.
  • the second sealing 135 is provided on the first side.
  • FIG. 7 is an exploded perspective view of the gate plate 1100 according to an embodiment of the present invention. Referring to FIG. 7, the coupling relationship of the gate plate 1100 will be described.
  • the first sealing plate 120 is coupled to the fixing block 110.
  • the first sealing plate 120 is fitted into the fixing block 110.
  • the first sealing plate 120 moves downward from the top of the fixing block 110 and is coupled to the fixing block 110.
  • the first sealing plate 120 is seated on the fixing block 110.
  • the first sealing plate 120 and the fixing block 110 are coupled through fastening members 192a and 192b.
  • the fastening member 192a passes through the first fastening hole 1219a of the first sealing plate 120 and is inserted into the 1-1 fastening hole 1192a of the fixing block 110.
  • the fastening member 192b passes through the second fastening hole 1219b of the first sealing plate 120 and is inserted into the 2-1 fastening hole 1192b of the fixing block 110.
  • the second sealing plate 130 is coupled to the fixing block 110.
  • the second sealing plate 130 is fitted into the fixing block 110.
  • the second sealing plate 130 moves downward from the top of the fixing block 110 and is coupled to the fixing block 110.
  • the second sealing plate 130 is seated on the fixing block 110.
  • the second sealing plate 130 and the fixing block 110 are coupled through fastening members 193a and 193b.
  • the fastening member 193a penetrates the first fastening hole 1319a of the second sealing plate 130 and is inserted into the 1-2 fastening hole 1193a of the fixing block 110.
  • the fastening member 193b passes through the second fastening hole 1319b of the second sealing plate 130 and is inserted into the 2-2 fastening hole 1193b (see FIG. 9) of the fixing block 110.
  • At least a portion of the first sealing plate 120 and the second sealing plate 130 directly faces each other.
  • the fixed block 110 is coupled to the valve rod 200.
  • the fixed block 110 is inserted into the valve rod 200.
  • the fixing block 110 and the valve rod 200 are coupled through a fastening member 191.
  • the fastening member 191 penetrates the rod fastening hole 1191 and is coupled to the valve rod 200.
  • Figure 8 is a perspective view of the fixed block 110 according to an embodiment of the present invention.
  • the fixed block 110 will be described with reference to FIG. 8 .
  • the fixed block 110 includes a support portion 111, a first seating portion 112, and a second seating portion 113.
  • the support portion 111 is placed in the central portion of the first seating portion 112 and the second seating portion 113.
  • the support portion 111 has a first height H1.
  • a rod fastening hole 1191 is formed in the support portion 111.
  • the rod fastening hole 1191 penetrates the support portion 111 in the vertical direction.
  • the direction may be marked on the upper surface 111a of the support portion 111.
  • Directional notation can use the module name.
  • the PM may be located on the side where the first sealing plate 120 is coupled.
  • TM may be located on the side where the second sealing plate 130 is coupled.
  • PM and TM are marked on the upper surface of the support portion 111 as a direction indication method.
  • a first clamping part (1112a or 1112b) and a second clamping part (1113a or 1112b) are provided on the left and right sides of the support part 111.
  • a 1-1 clamping part 1112a and a 1-2 clamping part 1112b are provided on the first side 111c of the support part 111.
  • the 1-1st clamping part 1112a and the 1-2nd clamping part 1112b are formed to protrude more than other parts of the first side 111c.
  • a 2-1 clamping part 1113a and a 2-2 clamping part 1113b are also provided on the second side 111d, which is the opposite side to the first side 111c.
  • the 2-1st clamping part 1113a and the 2-2nd clamping part 1113b are formed to protrude more than other parts of the second side surface 111d.
  • the first seating portion 112 is located on the first side 111c of the support portion 111.
  • the upper surface 112a of the first seating part 112 is located at a lower position than the upper surface 111a of the support part 111.
  • the first seating portion 112 has a second height H2.
  • the second height (H2) is lower than the first height (H1).
  • a first sealing plate 120 and a second sealing plate 130 are placed on the upper surface 112a of the first seating portion 112.
  • the first seating portion 112 supports the first sealing plate 120 and the second sealing plate 130.
  • a 1-1 fastening hole 1192a and a 1-2 fastening hole 1193a are formed in the first seating portion 112.
  • the 1-1 fastening hole 1192a and the 1-2 fastening hole 1193a are formed on the upper surface of the first seating portion 112.
  • the 1-1 fastening hole 1192a and the 1-2 fastening hole 1193a are formed vertically downward from the upper surface of the first seating portion 112.
  • the second seating portion 113 is located on the second side 111d of the support portion 111.
  • the upper surface 113a of the second seating part 113 is located at a lower position than the upper surface 111a of the support part 111.
  • the second seating portion 113 has a third height H3.
  • the third height (H3) is lower than the first height (H1).
  • the third height H3 and the second height H2 may be the same.
  • a first sealing plate 120 and a second sealing plate 130 are placed on the upper surface 113a of the second seating portion 113.
  • the second seating portion 113 supports the first sealing plate 120 and the second sealing plate 130.
  • a 2-1 fastening hole 1192b and a 2-2 fastening hole 1193b are formed in the second seating portion 113.
  • the 2-1 fastening hole 1192b and the 2-2 fastening hole 1193b are formed on the upper surface of the second seating portion 113.
  • the 2-1 fastening hole 1192b and the 2-2 fastening hole 1193b are formed vertically downward from the upper surface of the second seating portion 113.
  • Figure 9 is a plan view of the fixed block 110 according to an embodiment of the present invention.
  • the fixed block 110 will be further described with reference to FIG. 9 .
  • the support portion 111 has a first thickness D1 in the front-back direction.
  • the front and rear of the support portion 111 are located outside the front and rear of the first seating portion 112.
  • the front surface of the support part 111 protrudes more than the front surface of the first seating part 112.
  • the back of the support part 111 protrudes more than the back of the first seating part 112.
  • the front and rear of the support portion 111 are located outside the front and rear of the second seating portion 113.
  • the front of the support portion 111 protrudes more than the front of the second seating portion 113.
  • the rear of the support portion 111 protrudes more than the rear of the second seating portion 113.
  • the 1-1 clamping part 1112a is provided on the first side 111c of the support part 111.
  • the 1-1 clamping part 1112a is formed on the first side 111c of the support part 111.
  • the 2-1 clamping part 1113a is provided on the second side 111d of the support part 111.
  • the 2-1 clamping part 1113a is formed on the second side 111d of the support part 111.
  • the 1-2 clamping part 1112b is provided on the first side 111c of the support part 111.
  • the 1-2 clamping part 1112b is formed on the first side 111c of the support part 111.
  • the 2-2 clamping part 1113b is provided on the second side 111d of the support part 111.
  • the 2-2 clamping part 1113b is formed on the second side 111d of the support part 111.
  • the 1-1 clamping part 1112a, the 2-1 clamping part 1113a, the 1-2 clamping part 1112b, and the 2-2 clamping part 1113b are collectively referred to as 'fixing block 110. It is called the ‘clamping part of’.
  • the ‘clamping portion of the fixing block 110’ may be formed to have a rounded (R) inner direction.
  • the 1-1st clamping part 1112a and the 1-2nd clamping part 1112b may be defined by the recessed first side 111c.
  • the first side 111c may be formed so that its central portion is depressed inward when viewed from a plan view. As the central portion of the first side 111c is formed to be depressed, the corners relatively protrude, thereby defining the 1-1 clamping part 1112a and the 1-2 clamping part 1112b.
  • the 1-1st clamping part 1112a and the 1-2nd clamping part 1112b extend to the upper surface 112a of the first seating part 112 (see FIG. 8).
  • the 1-1 clamping part 1112a and the 1-2 clamping part 1112b are located above the first seating part 112.
  • the 2-1st clamping part 1113a and the 2-2nd clamping part 1113b may be defined by the recessed second side surface 111d.
  • the second side surface 111d may be formed so that its central portion is depressed inward when viewed from a plan view. As the central portion of the second side 111d is formed to be depressed, the corners relatively protrude, thereby defining the 2-1 clamping part 1113a and the 2-2 clamping part 1113b.
  • the 2-1st clamping part 1113a and the 2-2nd clamping part 1113b extend to the upper surface 113a of the second seating part 113 (see FIG. 8).
  • the 2-1 clamping part 1113a and the 2-2 clamping part 1113b are located on a higher surface than the second seating part 113.
  • the first seating portion 112 has a second thickness D2.
  • the second thickness D2 is smaller than the first thickness D1.
  • the second seating portion 113 has a third thickness D3.
  • the third thickness D3 is smaller than the first thickness D1.
  • the third thickness D3 may be the same as the second thickness D2.
  • the fixed block 110 may be symmetrical forward and backward, with the portion coupled to the valve rod 200 as the central axis (O).
  • the fixed block 110 may be symmetrical left and right, with the part coupled to the valve rod 200 as the central axis (O).
  • Figure 10 is a bottom perspective view of the fixed block 110 according to an embodiment of the present invention.
  • Figure 11 is a bottom view. The bottom of the fixed block 110 will be described with reference to FIGS. 10 and 11 .
  • the bottom surface 111e of the fixing block 110 may be formed to be flat.
  • the support portion 111 and the first seating portion 112 have steps formed in the front and rear directions.
  • the step may be formed by a difference in thickness between the support portion 111 and the first seating portion 112.
  • the front step may be formed as much as the first distance L1.
  • the step at the rear may be formed as much as the second distance L2.
  • the support portion 111 and the second seating portion 113 have steps formed in the front and rear directions.
  • the step may be formed by a difference in thickness between the support portion 111 and the second seating portion 113.
  • the front step may be formed as much as the third distance L3.
  • the step at the rear may be formed as much as the fourth distance L4.
  • the first distance L1 and the third distance L3 may be the same.
  • the second distance L2 and the fourth distance L4 may be the same.
  • the first distance (L1), the second distance (L2), the third distance (L3), and the fourth distance (L4) may be the same.
  • Figure 12 is a cross-sectional perspective view of the fixed block 110.
  • the rod fastening hole 1191 formed in the fixed block 110 will be described with reference to FIG. 12 .
  • the rod fastening hole 1191 includes a first hole 1191a, a second hole 1191b, a third hole 1191c, and a fourth hole 1191d.
  • the first hole 1191a, the second hole 1191b, the third hole 1191c, and the fourth hole 1191d are continuous from top to bottom to form the rod fastening hole 1191.
  • the first hole 1191a, the second hole 1191b, the third hole 1191c, and the fourth hole 1191d are located on the same axis.
  • the first hole 1191a has a larger diameter than the second hole 1191b.
  • a fastening member seating portion 119a is formed in the support portion 111 due to the diameter difference between the first hole 1191a and the second hole 1191b.
  • the head 191a of the fastening member 191 is placed on the fastening member seating portion 119a.
  • the fastening member 191 may be a bolt, screw, or the like.
  • the body 191b of the fastening member 191 is located in the second hole 1191b.
  • the body 191b of the fastening member 191 penetrates the second hole 1191b.
  • the body 191b of the fastening member 191 is longer than the length of the second hole 1191b.
  • the fastening member 191 passes through the second hole 1191b and is inserted into the third hole 1191c.
  • the wall defining the second hole 1191b and the fastening member 191 may be screwed together.
  • the valve rod 200 is inserted into the third hole 1191c and the fourth hole 1191d.
  • the diameter of the third hole 1191c is larger than the diameter of the second hole 1191b.
  • a first locking protrusion 119b is formed in the rod fastening hole 1191.
  • the first stopping protrusion 119b can be formed using the diameter difference between the second hole 1191b and the third hole 1191c.
  • the maximum diameter of the third hole 1191c is smaller than the minimum diameter of the fourth hole 1191d.
  • a second locking protrusion 119c is formed in the rod fastening hole 1191.
  • the second locking protrusion 119c can be formed using the diameter difference between the third hole 1191c and the fourth hole 1191d.
  • the valve rod 200 includes a first part 201 having a shape corresponding to the third hole 1191c, and a second part 202 having a shape corresponding to the fourth hole 1191d.
  • the first part 201 is inserted into the third hole 1191c.
  • the upper end of the first portion 201 may be in contact with the first locking protrusion 119b.
  • the valve rod 200 can support the fixed block 110.
  • a fastening hole 209 is formed at the top of the first part 201.
  • a fastening member 191 is inserted into the fastening hole 209. The wall defining the fastening hole 209 and the fastening member 191 may be screwed together.
  • the second portion 202 is inserted into the fourth hole 1191d.
  • the second portion 202 may be square.
  • the second portion 202 may be a filleted square shape.
  • the second part 202 guides it to be coupled to the fixing block 110 at a preset angle.
  • second portion 202 has a chamfered rectangular plane.
  • the fixed block 110 can be coupled to the valve rod 200 in a 180-degree (deg) turned state, but cannot be coupled to the valve rod 200 at any other angle.
  • the upper surface of the second portion 202 may be in contact with the second locking protrusion 119c. By placing the second stopping protrusion 119c on the upper surface of the second part 202, the valve rod 200 can support the fixed block 110.
  • FIG 13 is a perspective view of the sealing plate 150.
  • the sealing plate 150 may be the first sealing plate 120 or the second sealing plate 130.
  • the first sealing plate 120 and the second sealing plate 130 of the embodiment have the same structure and shape. In this specification, the sealing plate 150 will be described, and the first sealing plate 120 and the second sealing plate 130 will be described in detail.
  • the sealing plate 150 has a first side 151a and a second side 151b that is opposite to the first side.
  • the first surface 151a may be referred to as a sealing surface 151a.
  • the second surface 151b may be referred to as a coupling surface 151b.
  • a sealing 155 is fixed to the sealing surface 151a.
  • the sealing 155 may be fixed by bonding to the sealing surface 151a.
  • a sealing groove 152 may be formed in the sealing plate 150.
  • a sealing 155 may be inserted into the sealing groove 152.
  • the sealing groove 152 may be formed along the edge of the sealing surface 151a.
  • FIG. 13 shows a portion of the sealing 155 being separated from the sealing plate 150 to expose the sealing groove 152.
  • the coupling surface 151b is provided with a first coupling part 156 and a second coupling part 157.
  • the first coupling portion 156 provided on the first sealing plate 120 is called a 1-1 coupling portion.
  • the second coupling portion 157 provided on the first sealing plate 120 is called a 1-2 coupling portion.
  • the first coupling portion 156 provided on the second sealing plate 130 is called a 2-1 coupling portion.
  • the second coupling portion 157 provided on the second sealing plate 130 is called a 2-2 coupling portion.
  • a first coupling hole 1519a is formed in the first coupling portion 156.
  • the first coupling hole 1519a is a hole that penetrates the first coupling portion 156 in the vertical direction.
  • a second coupling hole 1519b is formed in the second coupling portion 157.
  • the second coupling hole 1519b is a hole that penetrates the second coupling portion 157 in the vertical direction.
  • FIG. 14 is a perspective view of the sealing plate 150 viewed from the direction opposite to that of FIG. 13.
  • Figure 15 is a cross-sectional perspective view of a portion where the first coupling hole 1519a and the second coupling hole 1519b are formed. Referring to FIGS. 14 and 15 , the coupling surface 151b and the first coupling portion 156 and the second coupling portion 157 provided on the coupling surface 151b will be described in more detail.
  • first coupling portion 156 and the second coupling portion 157 are left and right symmetrical.
  • One of the configurations of the first coupling portion 156 and the second coupling portion 157 will be described to replace the description of the other. Meanwhile, even if the first coupling portion 156 and the second coupling portion 157 are not symmetrical, a person skilled in the art will be able to derive various structures having the same effect as the described embodiment.
  • the sealing plate 150 has a third height H3 as a whole.
  • the first coupling portion 156 is formed at a position spaced apart from the bottom of the sealing plate 150 by a fourth height (H4, see further in FIG. 18).
  • the fourth height H4 is set in consideration of the height H3 of the first seating portion 112.
  • the fourth height H4 is a factor that determines the height at which the sealing plate 150 is positioned in relation to the third height H3. In an embodiment, the fourth height H4 is equal to the third height H3.
  • the first coupling portion 156 has a fifth height H5.
  • the fifth height H5 of the first coupling portion 156 is a factor that determines the length of engagement with the first clamping portion 1112a or 1112b of the fixing block 110.
  • a first coupling hole 1519a is formed in the first coupling portion 156.
  • the first coupling hole 1519a is formed by penetrating the first coupling portion 156 in the vertical direction.
  • the first coupling hole 1519a may include a 1-1 coupling hole 1519aa and a 1-2 coupling hole 1519ab.
  • the 1-1 coupling hole (1519aa) and the 1-2 coupling hole (1519ab) are located on the same axis.
  • the diameter of the 1-1 coupling hole (1519aa) is larger than the diameter of the 1-2 coupling hole (1519ab).
  • the fastening member seating portion is formed by the diameter difference between the 1-1 coupling hole (1519aa) and the 1-2 coupling hole (1519ab).
  • the head of the fastening member eg, a bolt penetrating the first coupling hole 1519a is placed in the 1-1 coupling hole 1519aa, and the body part penetrates the 1-2 coupling hole 1519ab.
  • a second coupling hole 1519b is formed in the second coupling portion 157.
  • the 2-1 coupling hole 1519ba and the 2-2 coupling hole 1519bb of the second coupling portion 157 are replaced with the description of the first coupling hole 1519a described above.
  • first coupling portion 156 of the first sealing plate 120 and the first coupling portion 156 of the second sealing plate 130 directly face each other.
  • the second coupling portion 157 of the first sealing plate 120 and the first coupling portion 157 of the second sealing plate 130 directly face each other.
  • a receiving groove 158 is formed between the first coupling portion 156 and the second coupling portion 157.
  • the receiving groove 158 accommodates a portion protruding forward or backward of the support portion 111.
  • Figure 16 is a top view of the sealing plate 150. The engaging portion will be described with reference to Figure 16.
  • the first coupling portion 156 may protrude outward from the coupling surface 151b by a fifth length L5.
  • First engaging portions 156a and 156b are formed in the first coupling portion 156.
  • the first engaging portions 156a and 156b may be defined by the shape of the first coupling portion 156.
  • the first engaging portions 156a and 156b engage with the first clamping portions 1112a or 1112b (see further Figure 9).
  • a second engaging portion is formed in the second coupling portion 157, and engages with the second clamping portion 1113a or 1113b (see FIG. 9 further).
  • the description of the second engaging portion of the second engaging portion 157 is replaced with a description of the first engaging portions 156a and 156b.
  • the first engaging portions 156a, 156b receive the first clamping portions 1112a or 1112b (see further Figure 9).
  • the first engaging portions 156a, 156b receive the first clamping portions 1112a or 1112b (see further Figure 9).
  • the first engaging portions 156a and 156b are formed to extend in the vertical direction.
  • the first engaging portions 156a and 156b include a protrusion 156a and a groove 156b.
  • a protrusion 156a may be formed to relatively define a groove 156b.
  • the protrusion 156b may protrude a sixth length L6 in the center direction.
  • Figure 17 is a bottom view of the sealing plate 150.
  • the receiving groove 158 will be described with reference to FIG. 17 .
  • the receiving groove 158 accommodates a portion that protrudes forward or backward from the support portion 111.
  • the receiving groove 158 is formed to have a depth equal to the seventh length L7.
  • the seventh length (L7) is substantially the same as the first length (L1), the second length (L2), the third length (L3), and the fourth length (L4).
  • a portion of the support portion 111 is accommodated in the receiving groove 158, so that the lower position of the sealing plate 150 can be set to the correct position.
  • the receiving groove 158 may be defined by a side surface (158b) in contact with the side surface of the support part 111 and an inner surface (158a) in contact with the front surface of the support part 111.
  • Figure 18 is a cross-sectional view taken along line II' of Figure 16. Referring to FIG. 18, the first coupling portion 156 and the receiving groove 158 will be further described.
  • the first coupling portion 156 is formed to protrude outward from the coupling surface 151b of the sealing plate 150.
  • the bottom surface 156c of the first coupling portion 156 is located at a position spaced apart from the bottom surface of the sealing plate 150 by the fourth height H4.
  • the thickness of the sealing plate 150 may have an eighth length L8.
  • the thickness of the portion of the sealing plate 150 where the receiving groove 158 is formed may have a ninth length L9. The ninth length L9 is shorter than the eighth length L8.
  • Figure 19 is a diagram for explaining the combination of the fixing block 110 and the second sealing plate 130.
  • the fixing block 110 and the second sealing plate 130 are each shown in cross-sectional perspective.
  • Figure 20 is a diagram for explaining the combination of the fixing block 110 and the first sealing plate 120, and the combination of the fixing block 110 and the second sealing plate 130.
  • a cross-sectional perspective view of the gate plate 1100 is shown.
  • first seating portion 112 and the second seating portion 113 are left and right symmetrical shapes. If you understand that the first seating portion 112 has a symmetrical shape with the second seating portion 113, the structure of the first seating portion 112 can be understood just by explaining the second seating portion 113 clearly visible in FIG. 20. will be.
  • a 2-1 fastening hole 1192b and a 2-2 fastening hole 1193b are formed in the second seating portion 113.
  • the first sealing plate 120 is coupled to the fixing block 110.
  • the second fastening hole 1219b is located on the same axis as the 2-1 fastening hole 1192b.
  • the fastening member 192b penetrates the second fastening hole 1219b and is inserted into the 2-1 fastening hole 1192b to couple the first sealing plate 120 and the fixing block 110.
  • the second sealing plate 130 is coupled to the fixing block 110.
  • the second fastening hole 1319b is located on the same axis as the 2-2 fastening hole 1193b.
  • the fastening member 193b penetrates the second fastening hole 1319b and is inserted into the 2-2 fastening hole 1193b to couple the second sealing plate 130 and the fixing block 110.
  • Figure 21 is a cross-sectional view showing the gate plate 1100 coupled to the valve rod 200 according to an embodiment.
  • the gate plate 1100 is coupled to the valve rod 200 and the fastening member 191. It will be more easily understood by further referring to FIG. 12.
  • FIG. 22 is a diagram explaining the operation of the gate valve 1000 according to one embodiment. Drawing numbers are not indicated in (b), (c), and (d), but can be understood by referring to (a). The operation of the gate valve 1000 will be described with reference to FIG. 22.
  • the gate plate 1100 is accommodated in the internal space 14d of the valve housing 14.
  • the valve housing 14 includes a first side wall 14a and a second side wall 14b.
  • a first gate 14aa is formed on the first sidewall 14a.
  • the area around the first gate 14aa inside the first side wall 14a is called the first valve seat 14ab.
  • the first seal 125 contacts the first valve seat 14ab to close the first gate 14aa.
  • a second gate 14ba is formed on the second sidewall 14b.
  • the area around the second gate 14ba inside the second side wall 14b is called the second valve seat 14bb.
  • the second seal 135 contacts the second valve seat 14bb to close the second gate 14ba.
  • the substrate passes through the first gate 14aa and the second gate 14ba. That is, the first gate 14aa and the second gate 14ba form a movement path for the substrate.
  • TM may be located toward the first gate 14aa
  • PM may be located toward the second gate 14ba.
  • PM may be located toward the first gate 14aa
  • TM may be located toward the second gate 14ba.
  • Gate plate 1100 is positioned in the first position. In the first position, the gate plate 1100 does not contact any walls. Additionally, when the gate plate 1100 is positioned at the first position, the first gate 14aa and the second gate 14ba form a movement path for the substrate.
  • Gate plate 1100 is positioned in the second position. In the second position, the gate plate 1100 does not contact any walls. When the gate plate 1100 is positioned at the second position, the space between the first gate 14aa and the second gate 14ba is blocked, thereby blocking the movement path of the substrate.
  • Gate plate 1100 is positioned in the third position. In the third position, the gate plate 1100 contacts the first side wall 14a. The sealing of the first valve seat 14ab and the gate plate 1100 contacts. In the third position, gate plate 1100 closes first gate 14aa.
  • Gate plate 1100 is located in the fourth position. In the fourth position, the gate plate 1100 contacts the second side wall 14b. The sealing of the second valve seat 14bb and the gate plate 1100 contacts. In the fourth position, the gate plate 1100 closes the second gate 14ba.
  • movement to the second and third positions may be achieved by movement in the horizontal direction. In an embodiment, movement to the second and fourth positions may be achieved by movement in the horizontal direction.
  • the gate plate 1100 minimizes shaking in the left and right directions by using a combination structure.
  • the sealing can be prevented from being worn by friction rubbing in the up and down direction. .
  • wear of the sealing particles inside the vacuum atmosphere can be reduced.
  • FIG. 23 is a diagram illustrating a method of replacing the sealing plate of the gate plate 1100 according to an embodiment. Referring to FIG. 23, as an example, a method of replacing the first sealing plate 120 that has reached its replacement cycle will be described.
  • the upper wall 14c of the valve housing 14 is removable.
  • the upper wall 14c of the valve housing 14 may be coupled to the first side wall 14a and the second side wall 14b through a fastening member.
  • the gate plate 1100 is placed in the third position.
  • the TM when the TM is located in the direction of the first gate 14aa, when the gate plate 1100 is located at the third position, the TM may be maintained in a vacuum state. Even if maintenance work to replace the sealing plate 150, which will be described later, is performed, the vacuum atmosphere of the TM can be maintained. Once the operation of the semiconductor manufacturing equipment is controlled, the operation of the semiconductor manufacturing equipment can be maintained using other PMs.
  • the sealing plate 150 can be separated from the upper side.
  • the sealing plate 150 when the sealing plate 150 is coupled, the position is set by being guided by the fixing block 110.
  • a fixing effect can be achieved with only two or more fastening members, allowing quick replacement work.
  • the exchange operation is convenient. If the sealing is worn, the sealing can be conveniently replaced by replacing the sealing plate (150).
  • the sealing is bonded to the plate, and the sealing is not easily separated from the plate, thereby achieving a stable sealing effect.
  • since the left-right shaking of the sealing plate is minimized and in-position coupling is easily achieved, wear can be reduced when the sealing contacts the valve seat in a gate valve that closes the gate with L-motion movement.
  • Figure 25 is a diagram for explaining the position and operation of the gate valve 2000 according to an embodiment of the present invention.
  • the gate valve 2000 described here differs from the gate valve 1000 described above only in the gate plate 1200, so the gate plate 1200 will be described later. Any other explanation shall be replaced with the previous explanation.
  • Figure 26 is a perspective view of the gate plate 1200 according to an embodiment of the present invention as seen from a first direction.
  • Figure 27 is a perspective view of the gate plate 1200 according to an embodiment of the present invention as seen from a second direction (opposite to the first direction). With reference to FIGS. 26 and 27 , the gate plate 1200 will be described.
  • the gate plate 1200 includes a fixing block 2110 and a sealing plate 2150.
  • the sealing plate 2150 is coupled to the fixing block 2110.
  • Sealing plate 2150 includes a plate 2151 and a sealing ring 2155.
  • Figure 28 is a perspective view of a fixed block 2110 according to an embodiment of the present invention.
  • the fixed block 2110 will be described with reference to FIG. 28.
  • the fixed block 2110 includes a support portion 2111, a first seating portion 2112, and a second seating portion 2113.
  • a first seating portion 2112 and a second seating portion 2113 are located on both sides of the support portion 2111.
  • the support portion 2111 has a sixth height H6.
  • a rod fastening hole 21191 is formed in the support portion 2111.
  • the rod fastening hole 21191 penetrates the support portion 2111 in the vertical direction.
  • the direction may be marked on the upper surface 2111a of the support portion 2111.
  • Directional notation can use the module name.
  • a first clamping part 21112a and a second clamping part 21113a are provided on the left and right sides of the support part 2111.
  • the first clamping part 21112a and the second clamping part 21113a protrude outward from other parts of the left and right sides of the support part 2111.
  • the front surface 2111b of the support part 2111 may protrude further forward than the first seating part 2112 and the second seating part 2113.
  • the first seating portion 2112 is located on one of the left and right sides of the support portion 2111.
  • the upper surface 2112a of the first seating part 2112 is located at a lower position than the upper surface 2111a of the support part 2111.
  • the first seating portion 2112 has a seventh height H7.
  • the seventh height (H7) is lower than the sixth height (H6).
  • a sealing plate 2150 is placed on the upper surface 2112a of the first seating portion 2112.
  • the first seating portion 2112 supports the sealing plate 150.
  • a first fastening hole 21192a is formed in the first seating portion 2112.
  • the first fastening hole 21192a is formed on the upper surface of the first seating portion 2112.
  • the first fastening hole 21192a is formed vertically downward from the upper surface of the first seating portion 112.
  • a first support surface 2111c is located behind the first seating portion 2112.
  • the first support surface 2111c faces the coupling surface of the sealing plate 2150.
  • the second seating portion 2113 is located on the other of the left and right sides of the support portion 2111.
  • the upper surface 2113a of the second seating part 2113 is located at a lower position than the upper surface 2111a of the support part 2111.
  • the second seating portion 2113 has an eighth height H8.
  • the eighth height (H8) is a lower height than the sixth height (H6).
  • the eighth height H8 and the seventh height H7 may be the same.
  • a sealing plate 2150 is placed on the upper surface 2113a of the second seating portion 2113.
  • the second seating portion 2113 supports the sealing plate 2150.
  • a second fastening hole 21193b is formed in the second seating portion 2113.
  • the second fastening hole 21193b is formed on the upper surface of the second seating portion 2113.
  • the second fastening hole 21193b is formed vertically downward from the upper surface of the second seating portion 2113.
  • a second support surface 2111d is located behind the second seating portion 2113.
  • the second support surface 2111d faces the coupling surface of the sealing plate 2150.
  • first seating portion 2112 and the second seating portion 2113 may be formed by cutting the support portion 2111 from the upper surface downward to their respective heights.
  • Figure 29 is a perspective view of the sealing plate 2120 according to an embodiment of the present invention as seen from the coupling surface.
  • the sealing plate 2120 will be described with reference to FIG. 29.
  • the plate 2151 has a first surface 2151a and a second surface 2151b that is opposite to the first surface.
  • the first surface 2151a may be referred to as a sealing surface 2151a. Sealing surface 2151a is shown in detail in Figure 26.
  • the second surface 2151b may be referred to as a coupling surface 2151b.
  • the coupling surface 2151b is provided with a first coupling part 2156 and a second coupling part 2157. Since the first coupling portion 2156 and the first coupling portion 2156 are generally similar to the first coupling portion 156 and the second coupling portion 157 of the first embodiment, similar descriptions will be replaced with the first embodiment.
  • a first coupling hole 21519a is formed in the first coupling portion 2156.
  • the first coupling hole 21519a is a hole that penetrates the first coupling portion 2156 in the vertical direction.
  • a second coupling hole 21519b is formed in the second coupling portion 2157.
  • the second coupling hole 21519b is a hole that penetrates the second coupling portion 2157 in the vertical direction.
  • first coupling portion 2156 and the second coupling portion 2157 are formed in a symmetrical shape.
  • first coupling portion 2156 and the second coupling portion 2157 will be described to replace the description of the other. Meanwhile, even if the first coupling portion 2156 and the second coupling portion 2157 are not symmetrical, a person skilled in the art will be able to derive various structures having the same effect as the described embodiment.
  • the sealing plate 2150 has an overall ninth height H9.
  • the first coupling portion 2156 is formed at a position spaced apart from the bottom of the sealing plate 2150 by the tenth height H10.
  • the tenth height H10 is set in consideration of the height H8 of the first seating portion 2112.
  • the tenth height H10 is a factor that determines the height at which the sealing plate 2150 is positioned in relation to the eighth height H8. In an embodiment, the tenth height H10 is equal to the eighth height H8.
  • the first coupling portion 2156 has an 11th height H11.
  • the eleventh height H11 of the first coupling part 2156 is a factor that determines the length of engagement with the first clamping part 21112a of the fixing block 2110.
  • the length of the first clamping part 21112a is the first coupling part 2156 and the first clamping part ( 21112a) is the path that intersects.
  • the thickness of the first clamping part 21112a is thicker than in the first embodiment.
  • the length L10 of the portion of the first coupling portion 2156 that accommodates the first clamping portion 21112a is formed to be longer than that of the first embodiment.
  • a receiving groove 2158 is formed on the engaging surface 2151b.
  • the receiving groove 2158 accommodates the portion protruding from the support portion 2111.
  • the depth of the portion of the sealing plate 2150 where the receiving groove 2158 is formed may have an eleventh length L11. Unlike the first embodiment, the depth L11 of the receiving groove 2158 is different from the length L10 of the portion of the first coupling portion 2156 that accommodates the first clamping portion 21112a.
  • the sealing plate 2150 can be separated from the upper side. Additionally, according to the embodiment, when the sealing plate 2150 is coupled, its position is set by being guided by the fixing block 2110. When the sealing plate 2150 and the fixing block 2110 are combined, a fixing effect can be achieved with only two or more fastening members, allowing quick exchange work. Additionally, the exchange operation is convenient. If the sealing is worn, the sealing can be conveniently replaced by replacing the sealing plate (2150). The sealing is bonded to the plate, and the sealing is not easily separated from the plate, thereby achieving a stable sealing effect. In addition, according to the embodiment, since the left-right shaking of the sealing plate is minimized and in-position coupling is easily achieved, wear can be reduced when the sealing contacts the valve seat in a gate valve that closes the gate with L-motion movement.

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Abstract

La présente invention concerne un robinet-vanne, et un procédé de fixation d'une plaque d'étanchéité. Le robinet-vanne selon un mode de réalisation de la présente invention a une structure permettant un remplacement pratique si le matériau d'étanchéité, qui est un matériau consommable, nécessite un remplacement. De plus, le frottement du matériau d'étanchéité peut être réduit et le cycle de remplacement (extension de durée de vie) du matériau d'étanchéité peut être augmenté. En outre, une chambre de transfert et d'autres chambres de traitement peuvent rester en fonctionnement pendant la maintenance pour remplacer une plaque d'étanchéité. Dans un mode de réalisation de la présente invention, un bloc fixe et une plaque d'étanchéité sont disposés dans un robinet-vanne d'un dispositif de fabrication de semi-conducteur de façon à former une plaque de grille couplée à une tige de vanne.
PCT/KR2023/012174 2022-10-28 2023-08-17 Robinet-vanne, et procédé de fixation d'une plaque d'étanchéité WO2024090756A1 (fr)

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KR20220141683 2022-10-28
KR10-2022-0141683 2022-10-28
KR10-2023-0002270 2023-01-06
KR1020230002270A KR102522874B1 (ko) 2022-10-28 2023-01-06 게이트 밸브 및 씰링 플레이트 체결 방법

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KR102522874B1 (ko) * 2022-10-28 2023-04-19 주식회사 퓨젠 게이트 밸브 및 씰링 플레이트 체결 방법

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KR20040055587A (ko) * 2002-12-16 2004-06-26 에스엠시 가부시키가이샤 게이트 밸브
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KR20180110380A (ko) * 2017-03-29 2018-10-10 김동용 반도체 제조 설비용 슬릿 밸브
KR20200113543A (ko) * 2019-03-25 2020-10-07 (주) 엔피홀딩스 게이트 밸브 및 이를 갖는 기판 처리 시스템
KR102522874B1 (ko) * 2022-10-28 2023-04-19 주식회사 퓨젠 게이트 밸브 및 씰링 플레이트 체결 방법

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KR102551853B1 (ko) * 2021-06-30 2023-07-07 주식회사 씰테크 클램프 부재를 포함하는 반도체 진공용 밸브 구조

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JP2002195424A (ja) * 2000-12-27 2002-07-10 Smc Corp ゲートバルブ
KR20040055587A (ko) * 2002-12-16 2004-06-26 에스엠시 가부시키가이샤 게이트 밸브
KR20110046313A (ko) * 2009-10-27 2011-05-04 배트 홀딩 아게 진공밸브를 위한 폐쇄 유닛
KR20180110380A (ko) * 2017-03-29 2018-10-10 김동용 반도체 제조 설비용 슬릿 밸브
KR20200113543A (ko) * 2019-03-25 2020-10-07 (주) 엔피홀딩스 게이트 밸브 및 이를 갖는 기판 처리 시스템
KR102522874B1 (ko) * 2022-10-28 2023-04-19 주식회사 퓨젠 게이트 밸브 및 씰링 플레이트 체결 방법

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