WO2024082467A1 - 一种钙钛矿太阳能电池的制备方法 - Google Patents

一种钙钛矿太阳能电池的制备方法 Download PDF

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WO2024082467A1
WO2024082467A1 PCT/CN2023/071851 CN2023071851W WO2024082467A1 WO 2024082467 A1 WO2024082467 A1 WO 2024082467A1 CN 2023071851 W CN2023071851 W CN 2023071851W WO 2024082467 A1 WO2024082467 A1 WO 2024082467A1
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film
preparation
oxygen
transport layer
perovskite
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French (fr)
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李卫东
赵政晶
赵志国
赵东明
秦校军
蔡子贺
刘云
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中国华能集团清洁能源技术研究院有限公司
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/50Photovoltaic [PV] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells

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  • the present invention relates to the technical field of organic-inorganic hybrid perovskite solar cells, and more specifically, to a method for preparing a perovskite solar cell.
  • Organic-inorganic hybrid perovskite solar cells have attracted much attention due to their excellent photoelectric performance and convenient preparation. Their photoelectric conversion efficiency has rapidly increased from 3.8% to 25.7% in just ten years, and they are expected to become the third generation of commercial solar cells.
  • the organic-inorganic hybrid perovskite layer is an ionic crystal material. The ionic components are easily polarized under light, electricity, and heat conditions, which leads to the deterioration of the perovskite layer and the failure of the device. Perovskite can react with water vapor to form hydrates, and the perovskite film will decompose rapidly under the erosion of liquid water.
  • the A-site cations (FA + , MA + ) in perovskite are unstable at high temperatures and have the greatest impact on thermal stability. Compared with wet stability and thermal stability, light stability is more important. First, light induction will cause oxidation of the perovskite active layer, and the other part is light-induced segregation of film components, both of which will lead to degradation and failure of the perovskite layer.
  • the purpose of the present invention is to provide a method for preparing a perovskite solar cell.
  • the preparation method provided by the present invention uses oxygen-deficient non-stoichiometric VO2 as an electron transport layer material, which can effectively absorb ultraviolet light and reflect near-infrared light, achieve effective shielding, reduce the light contact and temperature rise of the perovskite absorption layer, and play a role in protecting the perovskite layer and the device.
  • the present invention provides a method for preparing a perovskite solar cell, comprising the following steps:
  • An electron transport layer, a perovskite active layer, a hole transport layer and a counter electrode are sequentially formed on the surface of a transparent conductive substrate to obtain a perovskite solar cell;
  • the electron transport layer is an oxygen-deficient VO2 film.
  • the transparent conductive substrate is ITO glass, FTO glass, AZO glass or conductive PET.
  • the oxygen-deficient VO 2 film is obtained by coating a precursor solution containing oxygen-deficient VO 2 and then heating it to form a film, or by treating a stoichiometric VO 2 film in an oxygen-deficient state.
  • the method for preparing the hypoxic VO2 is specifically as follows:
  • VOSO 4 powder is added to deionized water, and then hydrazine hydrate solution is added, and stirred in a water bath at 60°C to 70°C to form a brown suspension.
  • 1 mol/L NaOH aqueous solution is added dropwise to adjust the pH of the suspension to 8 to 12; then the suspension is washed, redispersed in deionized water, and transferred to a reactor, heated to 200°C to 240°C and kept warm for 45h to 50h; after natural cooling, a black powder is obtained; the black powder is washed with deionized water, ethanol, isopropanol, and acetone in turn, and vacuum dried at 55°C to 65°C for 10h to 15h to obtain oxygen-deficient VO 2 .
  • the hydrazine hydrate solution is an aqueous solution of 70wt% to 90wt% hydrazine hydrate;
  • the VOSO 4 powder is added into deionized water with 10 to 30 times the mass, and the volume ratio of the hydrazine hydrate solution to the deionized water is 1: (30 to 90).
  • the coating is performed by a coating machine with a rotation speed of 1000 rpm to 8000 rpm for more than 10 seconds; the temperature of the heating film is 60° C. to 200° C. for more than 3 minutes.
  • the method for preparing the stoichiometric VO2 film is specifically as follows:
  • the chamber is evacuated to a pressure of 1 ⁇ 10 -5 Pa to 1 ⁇ 10 -3 Pa, the sample stage is heated to 150°C to 550°C, and then the molecular pump suction is adjusted and argon gas is introduced until the pressure in the chamber is stabilized at 0.5Pa to 5Pa; during the sputtering process, the total flow rate of O 2 gas and Ar gas is 40sccm to 60sccm, wherein the oxygen-argon ratio is 1:(39 to 59), the sputtering time is 1min to 5min, the DC vanadium target power is fixed at 30W to 180W, the sample is taken out and moved to a vacuum rapid thermal treatment furnace at 400°C to 550°C, the air partial pressure is 100Pa to 5000Pa, and annealing is performed for 30s to 3000s to obtain a stoichiometric VO 2 thin film.
  • the process of the hypoxic state treatment is specifically as follows:
  • the stoichiometric VO2 film was transferred to a three-necked flask containing 0.5M-1.5M ascorbic acid solution, and nitrogen was introduced for protection. The film was kept at 70°C-120°C for 1h-3h. The film sample was taken out and cleaned with ethanol, isopropanol and acetone for 25min-35min respectively, and dried with a nitrogen gun to obtain an oxygen-deficient VO2 film.
  • the perovskite active layer has an ABX 3 type crystal structure, wherein A is an organic cation and/or an inorganic cation, B is Pb 2+ or Sn 2+ , and X is one or more of I ⁇ , Br ⁇ and Cl ⁇ .
  • the hole transport layer is a Spiro-OMeTAD layer, a NiOx layer or a CuOx layer.
  • the present invention provides a method for preparing a perovskite solar cell, comprising the following steps: sequentially forming an electron transport layer, a perovskite active layer, a hole transport layer and a counter electrode on the surface of a transparent conductive substrate, to the perovskite solar cell; the electron transport layer is an oxygen-deficient VO 2 film.
  • the preparation method provided by the present invention introduces oxygen-deficient VO 2 into the interior of the perovskite solar cell to prepare a perovskite solar cell with ultraviolet-near-infrared optical shielding and transmission.
  • oxygen-deficient non-stoichiometric VO 2 as the electron transport layer material, it can effectively absorb ultraviolet light and reflect near-infrared light, achieve effective shielding, reduce the light contact and temperature rise of the perovskite absorption layer, and play a role in protecting the perovskite layer and the device.
  • the preparation method provided by the present invention has simple process, mild conditions, easy control, and broad application prospects.
  • FIG1 is a schematic structural diagram of a perovskite solar cell provided in an embodiment of the present invention.
  • FIG2 is a diagram showing the light transmittance test results of the perovskite solar cell provided in Example 1 of the present invention.
  • FIG3 is a curve showing the change of current density versus voltage of the perovskite solar cell provided in Example 1 of the present invention.
  • FIG4 is a diagram showing the transmittance test results of the perovskite solar cell provided in Example 2 of the present invention.
  • FIG5 is a curve showing the change in current density versus voltage of the perovskite solar cell provided in Example 2 of the present invention.
  • the present invention provides a method for preparing a perovskite solar cell, comprising the following steps:
  • An electron transport layer, a perovskite active layer, a hole transport layer and a counter electrode are sequentially formed on the surface of a transparent conductive substrate to obtain a perovskite solar cell;
  • the electron transport layer is an oxygen-deficient VO2 film.
  • FIG. 1 is a schematic diagram of the structure of a perovskite solar cell provided in an embodiment of the present invention.
  • the transparent conductive substrate is preferably ITO glass, FTO glass, AZO glass Or conductive PET, more preferably ITO glass.
  • the present invention has no special restrictions on the source of the transparent conductive substrate, and commercially available products known to those skilled in the art can be used.
  • the transparent conductive substrate is preferably cleaned with ethanol, isopropyl alcohol (IPA) and acetone for 20 minutes to 40 minutes respectively before use, and blown dry with a nitrogen gun.
  • IPA isopropyl alcohol
  • the electron transport layer is an oxygen-deficient VO2 film, wherein the oxygen-deficient VO2 does not have the color-changing property of conventional stoichiometric VO2 ;
  • the oxygen-deficient VO2 film is preferably obtained by coating a precursor solution containing oxygen-deficient VO2 and then heating it to form a film, or by treating a stoichiometric VO2 film in an oxygen-deficient state; wherein the oxygen-deficient VO2 is prepared by a one-step method, while the oxygen-deficient VO2 film obtained by treating a stoichiometric VO2 film in an oxygen-deficient state is prepared by a two-step method.
  • the oxygen-deficient VO 2 thin film is obtained by coating a precursor solution containing oxygen-deficient VO 2 and then heating it to form a film.
  • the method for preparing the hypoxic VO2 is preferably as follows:
  • VOSO 4 powder is added to deionized water, and then hydrazine hydrate solution is added, and stirred in a water bath at 60°C to 70°C until a brown suspension is formed. After the color is stable, 1 mol/L NaOH aqueous solution is added dropwise to adjust the pH of the suspension to 8 to 12; then the suspension is washed, redispersed in deionized water, and transferred to a reactor, heated to 200°C to 240°C and kept warm for 45h to 50h; after natural cooling, a black powder is obtained; the black powder is washed with deionized water, ethanol, isopropanol, and acetone in turn, and vacuum dried at 55°C to 65°C for 10h to 15h to obtain oxygen-deficient VO 2 ;
  • VOSO 4 powder is added to deionized water, and then hydrazine hydrate solution is added, and stirred in a water bath at 65°C until a brown suspension is formed. After the color is stable, 1 mol/L NaOH aqueous solution is added dropwise to adjust the pH of the suspension to 8-12; then the suspension is washed, redispersed in deionized water, and transferred to a reactor, heated to 220°C and kept warm for 48 hours; after natural cooling, a black powder is obtained; the black powder is washed with deionized water, ethanol, isopropanol, and acetone in turn, and vacuum dried at 60°C for 12 hours to obtain oxygen-deficient VO 2 .
  • the present invention has no particular limitation on the source of the VOSO 4 powder, and commercially available products known to those skilled in the art may be used.
  • the hydrazine hydrate solution is preferably an aqueous solution of 70wt% to 90wt% hydrazine hydrate, more preferably an aqueous solution of 80wt% hydrazine hydrate.
  • the present invention has no particular restrictions on the source of the hydrazine hydrate solution, and commercial products or self-made products known to those skilled in the art can be used.
  • the VOSO 4 powder is preferably added to deionized water of 10 to 30 times its mass. More preferably, it is added to 20 times the mass of deionized water; the volume ratio of the hydrazine hydrate solution to the above deionized water is preferably 1: (30-90), more preferably 1: 60; in a preferred embodiment of the present invention, the amount of the VOSO 4 powder is 1.5g, added to 30g (30ml) of deionized water, and the amount of the hydrazine hydrate solution is 0.5ml.
  • the present invention uses the above-mentioned ratio of hydrazine hydrate solution to ensure that it is sufficient relative to the VOSO 4 powder, ensuring that the subsequent product is in an anoxic state; that is, by controlling the excess of hydrazine hydrate, the defect effect is achieved.
  • the above-mentioned heating temperature cannot be higher than 250° C., also to ensure that the product obtained subsequently is in an oxygen-deficient state.
  • the method for preparing the precursor solution containing hypoxic VO2 is preferably as follows:
  • the anoxic VO 2 was dispersed in anhydrous ethanol and ultrasonically dispersed for 12 hours to obtain a highly dispersed solution, and then PCBM and chlorobenzene were added and stirred evenly to obtain a precursor solution containing the anoxic VO 2 .
  • the usage ratio of the anoxic VO 2 , anhydrous ethanol, PCBM and chlorobenzene is preferably (4mg-6mg):1ml:(8mg-12mg):1ml, more preferably 5mg:1ml:10mg:1ml.
  • the coating is preferably carried out using a coating machine
  • the rotation speed is preferably 1000rpm ⁇ 8000rpm, more preferably 3000rpm ⁇ 5000rpm
  • the time is preferably more than 10s, more preferably 20s ⁇ 40s
  • the temperature of heating to form a film is preferably 60°C ⁇ 200°C, more preferably 110°C ⁇ 130°C
  • the time is preferably more than 3min, more preferably 8min ⁇ 12min.
  • the oxygen-deficient VO 2 film is obtained by subjecting a stoichiometric VO 2 film to an oxygen-deficient treatment.
  • the method for preparing the stoichiometric VO2 film is preferably as follows:
  • Magnetron sputtering is used, the chamber is evacuated to a pressure of 1 ⁇ 10 -5 Pa to 1 ⁇ 10 -3 Pa, the sample stage is heated to 150°C to 550°C, and then the molecular pump suction is adjusted and argon gas is introduced until the pressure in the chamber is stabilized at 0.5Pa to 5Pa; during the sputtering process, the total flow rate of O 2 gas and Ar gas is 40sccm to 60sccm, wherein the oxygen-argon ratio is 1:(39 to 59), the sputtering time is 1min to 5min, the DC vanadium target power is fixed at 30W to 180W, the sample is taken out and moved to a vacuum rapid heat treatment furnace at 400°C to 550°C, the air partial pressure is 100Pa to 5000Pa, and annealing is performed for 30s to 3000s to obtain a stoichiometric VO 2 film;
  • Magnetron sputtering was used, the chamber was evacuated to a pressure of 1 ⁇ 10 -4 Pa, the sample stage was heated to 400°C ⁇ 500°C, then the molecular pump suction was adjusted and argon gas (purity 99.9993%) was introduced until the pressure in the chamber stabilized at 0.5Pa ⁇ 1.5Pa; the total flow rate of O 2 gas and Ar gas during the sputtering process was 50sccm, the oxygen-argon ratio was 1:49, the sputtering time was 3min, the DC vanadium target power was fixed at 80W ⁇ 90W, the sample was taken out and moved to a vacuum rapid thermal treatment furnace at 450°C ⁇ 550°C, air partial pressure 900Pa ⁇ 1100Pa, and annealing was performed for 550s ⁇ 650s to obtain a stoichiometric VO 2 film.
  • the process of the anoxic state treatment is preferably specifically as follows:
  • the stoichiometric VO2 film was transferred to a three-necked flask containing 1M ascorbic acid solution, and nitrogen was introduced for protection. The film was kept at 80°C-90°C for 2h. The film sample was taken out and cleaned with ethanol, isopropanol and acetone for 30min each, and dried with a nitrogen gun to obtain an oxygen-deficient VO2 film.
  • the present invention forms an electron transport layer on the surface of the transparent conductive substrate; in the present invention, the thickness of the electron transport layer is preferably 10nm to 50nm, more preferably 20nm to 30nm.
  • the present invention further forms a perovskite active layer on the surface of the formed electron transport layer; the present invention has no special restrictions on the method for forming the perovskite active layer, and a technical solution for preparing a perovskite active layer well known to those skilled in the art can be used.
  • the perovskite active layer preferably has an ABX 3 type crystal structure, wherein A is an organic cation and/or an inorganic cation, B is Pb 2+ or Sn 2+ , and X is one or more of I ⁇ , Br ⁇ and Cl ⁇ .
  • the thickness of the perovskite active layer is preferably 100 nm to 900 nm, more preferably 300 nm to 500 nm.
  • the hole transport layer is preferably a Spiro-OMeTAD layer, a NiOx layer or a CuOx layer, and more preferably a Spiro-OMeTAD layer.
  • the present invention has no particular restrictions on the method for forming the hole transport layer on the perovskite active layer, and a preparation method of the hole transport layer well known to those skilled in the art can be used.
  • the thickness of the hole transport layer is preferably 10 nm to 100 nm, more preferably 40nm ⁇ 60nm.
  • the present invention has no special restrictions on the type and formation method of the counter electrode, and a technical solution for forming a counter electrode on a hole transport layer that is well known to those skilled in the art can be used.
  • the hole transport layer is transferred to a thermal evaporation device, and an electrode (Au) is evaporated under a vacuum condition of 1 ⁇ 10 -5 Pa with a thickness of 100 nm; it is then placed in an oxygen glove box for one night for oxidation to obtain a perovskite solar cell.
  • the preparation method provided by the present invention introduces oxygen-deficient VO2 into the interior of a perovskite solar cell to prepare a perovskite solar cell with ultraviolet-near-infrared optical shielding and transmission.
  • oxygen-deficient non-stoichiometric VO2 as an electron transport layer material, it can effectively absorb ultraviolet light and reflect near-infrared light, achieve effective shielding, reduce the light contact and temperature rise of the perovskite absorption layer, and play a role in protecting the perovskite layer and the device.
  • the preparation method provided by the present invention has a simple process, mild conditions, easy control, and broad application prospects.
  • the present invention provides a method for preparing a perovskite solar cell, comprising the following steps: sequentially forming an electron transport layer, a perovskite active layer, a hole transport layer and a counter electrode on the surface of a transparent conductive substrate to obtain a perovskite solar cell; the electron transport layer is an oxygen-deficient VO2 film.
  • the preparation method provided by the present invention introduces oxygen-deficient VO2 into the interior of the perovskite solar cell to prepare a perovskite solar cell with ultraviolet-near-infrared optical shielding and transmission.
  • oxygen-deficient non-stoichiometric VO2 as an electron transport layer material, it can effectively absorb ultraviolet light and reflect near-infrared light, achieve effective shielding, reduce the light contact and temperature rise of the perovskite absorption layer, and play a role in protecting the perovskite layer and the device.
  • the preparation method provided by the present invention has simple process, mild conditions, easy control, and broad application prospects.
  • ITO indium tin oxide
  • PbI2 lead iodide
  • CsI cesium iodide
  • DMF N,N-dimethylformamide
  • DMSO dimethyl sulfoxide
  • FI formamidine hydroiodide
  • MACl methylamine chloride
  • 60 ⁇ L of solution B was evenly spread on the surface of the electron transport layer film after annealing, and the parameters of the spreader were set to 2000 rpm for 30 s; then it was placed on a 75°C hot stage for 1 min to form a coating; 80 ⁇ L of solution C was evenly spread on the surface of the coating formed after the prepared solution B, and the parameters of the spreader were set to 3000 rpm for 30 s; then it was placed on a 150°C hot stage for annealing for 15 min to obtain a perovskite film (400 nm).
  • Li-TFSI lithium bis(trifluoromethanesulfonyl)imide
  • CAN acetonitrile
  • Spiro-MeOTAD 2,2,7,7-tetrakis[N,N-di(4-methoxyphenyl)amino]-9,9-spirobifluorene
  • TBP 4-tert-butylpyridine
  • the hole transport layer solution 50 ⁇ L was evenly spread on the surface of the above perovskite film, and the parameters of the coating machine were set to a speed of 3000 rpm and a time of 30 s to obtain a hole transport layer (50 nm).
  • the hole transport layer was transferred to a thermal evaporation device, and the electrode (Au) was evaporated to a thickness of 100 nm under a vacuum condition of 1 ⁇ 10 -5 Pa. It was then placed in an oxygen glove box for one night for oxidation to obtain a perovskite solar cell.
  • the current density-voltage (JV) curve of the perovskite solar cell prepared in Example 1 was tested using the PCE test.
  • the test was completed on a Kethley 2400 system.
  • the test conditions were: simulated light intensity of 100 mW cm -2 (AM 1.5G), scan rate of 0.1 V s -1 (step size of 0.02 V, time delay of 200 ms), and scan interval of 1.2 V.
  • the power output of the xenon lamp is calibrated by a NERL (National Renewable Energy Laboratory) standard KG5 Si cell.
  • the transmittance test was performed using an Agilent Carry Series UV-Vis-NIR spectrometer with a wavelength range of 200nm to 2000nm.
  • test results are shown in Table 1 and Figures 2 to 3, wherein Figure 2 is a transmittance test result diagram of the perovskite solar cell provided in Example 1 of the present invention, and Figure 3 is a current density versus voltage curve of the perovskite solar cell provided in Example 1 of the present invention.
  • ITO indium tin oxide
  • the cleaned substrate was fixed on the magnetron sputtering sample stage and placed in the magnetron sputtering equipment; the magnetron sputtering chamber was evacuated to a pressure of 1 ⁇ 10-4 Pa, the sample stage was heated to 450°C, and then the molecular pump suction was adjusted and argon gas (purity 99.9993%) was introduced until the pressure in the chamber stabilized at 1Pa; during the sputtering process, the total flow rate of O2 gas and Ar gas was 50sccm (oxygen-argon ratio was 1:49), the sputtering time was 3min, the DC (vanadium target) power was fixed at 85W, the sample was taken out and moved to a vacuum rapid thermal treatment furnace, 500°C, air partial pressure 1000Pa, annealing for 600s, and a substrate of a stoichiometric VO2 film (thickness 20nm) was obtained; the above film was transferred to a three-necked bottle of 1M ascorbic acid solution
  • PbI2 lead iodide
  • CsI cesium iodide
  • DMF N,N-dimethylformamide
  • DMSO dimethyl sulfoxide
  • 60 ⁇ L of solution B was evenly spread on the surface of the electron transport layer film after annealing, and the parameters of the coating machine were set to 2000 rpm for 30 s; then it was placed on a 75°C hot plate for 1 min to form a coating; 80 ⁇ L of solution C was evenly spread on the surface of the coating formed after the prepared solution B, and the parameters of the coating machine were set to 3000 rpm for 30 s; then it was placed on a 150°C hot plate for annealing for 15 min to obtain a perovskite film. (400nm).
  • Li-TFSI lithium bis(trifluoromethanesulfonyl)imide
  • CAN acetonitrile
  • Spiro-MeOTAD 2,2,7,7-tetrakis[N,N-di(4-methoxyphenyl)amino]-9,9-spirobifluorene
  • TBP 4-tert-butylpyridine
  • the hole transport layer solution 50 ⁇ L was evenly spread on the surface of the above perovskite film, and the parameters of the coating machine were set to a speed of 3000 rpm and a time of 30 s to obtain a hole transport layer (50 nm).
  • the hole transport layer was transferred to a thermal evaporation device, and the electrode (Au) was evaporated to a thickness of 100 nm under a vacuum condition of 1 ⁇ 10 -5 Pa. It was then placed in an oxygen glove box for one night for oxidation to obtain a perovskite solar cell.
  • test results are shown in Table 2 and Figures 4 to 5, wherein Figure 4 is a transmittance test result diagram of the perovskite solar cell provided in Example 2 of the present invention, and Figure 5 is a current density versus voltage curve of the perovskite solar cell provided in Example 2 of the present invention.

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Abstract

本发明提供了一种钙钛矿太阳能电池的制备方法,包括以下步骤:在透明导电基底表面依次形成电子传输层、钙钛矿活性层、空穴传输层和对电极,得到钙钛矿太阳能电池;所述电子传输层为缺氧态VO2薄膜。与现有技术相比,本发明提供的制备方法将缺氧态VO2引入钙钛矿太阳能电池内部,制备得到紫外-近红外光学屏蔽透过的钙钛矿太阳能电池,通过采用缺氧态非化学计量比VO2作为电子传输层材料,能够有效吸收紫外光和反射近红外光,实现有效遮挡,降低钙钛矿吸收层光接触与温度升高,起到保护钙钛矿层和器件的作用。

Description

一种钙钛矿太阳能电池的制备方法
本申请要求于2022年10月17日提交中国专利局、申请号为202211265588.4、发明名称为“一种钙钛矿太阳能电池的制备方法”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。
技术领域
本发明涉及有机-无机杂化钙钛矿太阳能电池技术领域,更具体地说,是涉及一种钙钛矿太阳能电池的制备方法。
背景技术
有机-无机杂化钙钛矿太阳能电池凭借其优异的光电性能以及制备方便等特征而备受瞩目,其光电转化效率在短短的十年间由3.8%迅速提升至25.7%,有望成为第三代商用太阳能电池。有机无机杂化钙钛矿层为离子晶体材料,离子成分容易在光、电、热条件下发生极化,进而导致钙钛矿层变质和器件失效。钙钛矿能够和水汽作用形成水合物,钙钛矿在液态水的侵蚀下薄膜会迅速分解。钙钛矿中的A位阳离子(FA+、MA+)在高温下不稳定,对热稳定性的影响最大。相比湿稳定性和热稳定性,光稳定性更为重要,首先,光诱导会导致钙钛矿活性层氧化,另一部分是光诱导薄膜组分偏析,二者均会导致钙钛矿层降解和失效。
发明内容
有鉴于此,本发明的目的在于提供一种钙钛矿太阳能电池的制备方法,本发明提供的制备方法采用缺氧态非化学计量比VO2作为电子传输层材料,能够有效吸收紫外光和反射近红外光,实现有效遮挡,降低钙钛矿吸收层光接触与温度升高,起到保护钙钛矿层和器件的作用。
本发明提供了一种钙钛矿太阳能电池的制备方法,包括以下步骤:
在透明导电基底表面依次形成电子传输层、钙钛矿活性层、空穴传输层和对电极,得到钙钛矿太阳能电池;
所述电子传输层为缺氧态VO2薄膜。
优选的,所述透明导电基底为ITO玻璃、FTO玻璃、AZO玻璃或导电PET。
优选的,所述缺氧态VO2薄膜由含有缺氧态VO2的前驱液涂布后加热成膜得到,或由化学计量比VO2薄膜经缺氧态处理得到。
优选的,所述缺氧态VO2的制备方法具体为:
VOSO4粉体加入去离子水中,再加入水合肼溶液,在60℃~70℃水浴搅拌至形成棕色的悬浊液,待颜色稳定后逐滴滴加1mol/L NaOH水溶液,调节悬浊液的pH至8~12;然后将悬浊液清洗,重新分散在去离子水中,并转移至反应釜中,升温至200℃~240℃保温45h~50h;待自然冷却后,获得黑色粉体;将上述黑色粉体依次使用去离子水、乙醇、异丙醇、丙酮洗涤,55℃~65℃真空干燥10h~15h,得到缺氧态VO2
优选的,所述水合肼溶液为70wt%~90wt%的水合肼的水溶液;
所述VOSO4粉体加入到10倍~30倍质量的去离子水中,所述水合肼溶液与上述去离子水的体积比为1:(30~90)。
优选的,所述涂布采用匀胶机,转度为1000rpm~8000rpm,时间为10s以上;加热成膜的温度为60℃~200℃,时间为3min以上。
优选的,所述化学计量比VO2薄膜的制备方法具体为:
采用磁控溅射,腔室抽真空至压强为1×10-5Pa~1×10-3Pa,样品台升温至150℃~550℃,之后调整分子泵抽力并通入氩气,直至腔室内压强稳定为0.5Pa~5Pa;溅射过程中O2气和Ar气的总流量为40sccm~60sccm,其中氧氩比为1:(39~59),溅射时间为1min~5min,直流钒靶功率固定为30W~180W,取出样品移至真空快速热处理炉,400℃~550℃,空气分压100Pa~5000Pa,退火30s~3000s,得到化学计量比VO2薄膜。
优选的,所述缺氧态处理的过程具体为:
将化学计量比VO2薄膜转移至0.5M~1.5M抗坏血酸溶液的三口瓶,通入氮气保护,70℃~120℃保温1h~3h,取出薄膜样品分别用乙醇、异丙醇和丙酮各清洗25min~35min,用氮气枪吹干,得到缺氧态VO2薄膜。
优选的,所述钙钛矿活性层具有ABX3型晶体结构,其中,A为有机阳离子和/或无机阳离子,B为Pb2+或Sn2+,X为I-、Br-和Cl-中的一种或多种。
优选的,所述空穴传输层为Spiro-OMeTAD层、NiOx层或CuOx层。
本发明提供了一种钙钛矿太阳能电池的制备方法,包括以下步骤:在透明导电基底表面依次形成电子传输层、钙钛矿活性层、空穴传输层和对电极,得 到钙钛矿太阳能电池;所述电子传输层为缺氧态VO2薄膜。与现有技术相比,本发明提供的制备方法将缺氧态VO2引入钙钛矿太阳能电池内部,制备得到紫外-近红外光学屏蔽透过的钙钛矿太阳能电池,通过采用缺氧态非化学计量比VO2作为电子传输层材料,能够有效吸收紫外光和反射近红外光,实现有效遮挡,降低钙钛矿吸收层光接触与温度升高,起到保护钙钛矿层和器件的作用。
另外,本发明提供的制备方法工艺简单,条件温和、易控,应用前景广阔。
附图说明
图1为本发明实施例提供的钙钛矿太阳能电池的结构示意图;
图2为本发明实施例1提供的钙钛矿太阳能电池的透光率测试结果图;
图3为本发明实施例1提供的钙钛矿太阳能电池的电流密度随电压变化曲线;
图4为本发明实施例2提供的钙钛矿太阳能电池的透光率测试结果图;
图5为本发明实施例2提供的钙钛矿太阳能电池的电流密度随电压变化曲线。
具体实施方式
下面将结合本发明实施例,对本发明的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。
本发明提供了一种钙钛矿太阳能电池的制备方法,包括以下步骤:
在透明导电基底表面依次形成电子传输层、钙钛矿活性层、空穴传输层和对电极,得到钙钛矿太阳能电池;
所述电子传输层为缺氧态VO2薄膜。
请参阅图1,图1为本发明实施例提供的钙钛矿太阳能电池的结构示意图。
在本发明中,所述透明导电基底优选为ITO玻璃、FTO玻璃、AZO玻璃 或导电PET,更优选为ITO玻璃。本发明对所述透明导电基底的来源没有特殊限制,采用本领域技术人员熟知的市售商品即可。在本发明中,所述透明导电基底使用前优选分别经过乙醇、异丙醇(IPA)和丙酮各清洗20min~40min,用氮气枪吹干。
在本发明中,所述电子传输层为缺氧态VO2薄膜,其中,缺氧态VO2不具备常规化学计量比VO2的变色性质;所述缺氧态VO2薄膜优选由含有缺氧态VO2的前驱液涂布后加热成膜得到,或由化学计量比VO2薄膜经缺氧态处理得到;其中,所述缺氧态VO2采用一步法制备,而由化学计量比VO2薄膜经缺氧态处理得到的缺氧态VO2薄膜经过两步法制备而成。
在本发明一个优选的实施例中,所述缺氧态VO2薄膜由含有缺氧态VO2的前驱液涂布后加热成膜得到。
在本发明中,所述缺氧态VO2的制备方法优选具体为:
VOSO4粉体加入去离子水中,再加入水合肼溶液,在60℃~70℃水浴搅拌至形成棕色的悬浊液,待颜色稳定后逐滴滴加1mol/L NaOH水溶液,调节悬浊液的pH至8~12;然后将悬浊液清洗,重新分散在去离子水中,并转移至反应釜中,升温至200℃~240℃保温45h~50h;待自然冷却后,获得黑色粉体;将上述黑色粉体依次使用去离子水、乙醇、异丙醇、丙酮洗涤,55℃~65℃真空干燥10h~15h,得到缺氧态VO2
更优选为:
VOSO4粉体加入去离子水中,再加入水合肼溶液,在65℃水浴搅拌至形成棕色的悬浊液,待颜色稳定后逐滴滴加1mol/L NaOH水溶液,调节悬浊液的pH至8~12;然后将悬浊液清洗,重新分散在去离子水中,并转移至反应釜中,升温至220℃保温48h;待自然冷却后,获得黑色粉体;将上述黑色粉体依次使用去离子水、乙醇、异丙醇、丙酮洗涤,60℃真空干燥12h,得到缺氧态VO2
本发明对所述VOSO4粉体的来源没有特殊限制,采用本领域技术人员熟知的市售商品即可。
在本发明中,所述水合肼溶液优选为70wt%~90wt%的水合肼的水溶液,更优选为80wt%的水合肼的水溶液。本发明对所述水合肼溶液的来源没有特殊限制,采用本领域技术人员熟知的市售商品或自制品均可。
在本发明中,所述VOSO4粉体优选加入到10倍~30倍质量的去离子水中, 更优选加入到20倍质量的去离子水中;所述水合肼溶液与上述去离子水的体积比优选为1:(30~90),更优选为1:60;在本发明优选的实施例中,所述VOSO4粉体的用量为1.5g,加入到30g(30ml)质量的去离子水中,水合肼溶液的用量为0.5ml。本发明采用上述配比的水合肼溶液,能够保证相对于VOSO4粉体是足量的,确保后续得到的产物为缺氧态;即通过控制水合肼过量,实现缺陷化效果。
在本发明中,上述升温温度不能高于250℃,同样是为了确保后续得到的产物为缺氧态。
在本发明中,所述含有缺氧态VO2的前驱液的制备方法优选具体为:
将缺氧态VO2分散到无水乙醇中,超声分散10h~15h,获得高分散溶液,再加入PCBM和氯苯,搅拌均匀,得到含有缺氧态VO2的前驱液;
更优选为:
将缺氧态VO2分散到无水乙醇中,超声分散12h,获得高分散溶液,再加入PCBM和氯苯,搅拌均匀,得到含有缺氧态VO2的前驱液。
在本发明中,所述缺氧态VO2、无水乙醇、PCBM和氯苯的用量比优选为(4mg~6mg):1ml:(8mg~12mg):1ml,更优选为5mg:1ml:10mg:1ml。
在本发明中,所述涂布优选采用匀胶机,转度优选为1000rpm~8000rpm,更优选为3000rpm~5000rpm,时间优选为10s以上,更优选为20s~40s;加热成膜的温度优选为60℃~200℃,更优选为110℃~130℃,时间优选为3min以上,更优选为8min~12min。
在本发明另一个优选的实施例中,所述缺氧态VO2薄膜由化学计量比VO2薄膜经缺氧态处理得到。
在本发明中,所述化学计量比VO2薄膜的制备方法优选具体为:
采用磁控溅射,腔室抽真空至压强为1×10-5Pa~1×10-3Pa,样品台升温至150℃~550℃,之后调整分子泵抽力并通入氩气,直至腔室内压强稳定为0.5Pa~5Pa;溅射过程中O2气和Ar气的总流量为40sccm~60sccm,其中氧氩比为1:(39~59),溅射时间为1min~5min,直流钒靶功率固定为30W~180W,取出样品移至真空快速热处理炉,400℃~550℃,空气分压100Pa~5000Pa,退火30s~3000s,得到化学计量比VO2薄膜;
更优选为:
采用磁控溅射,腔室抽真空至压强为1×10-4Pa,样品台升温至400℃~500℃,之后调整分子泵抽力并通入氩气(纯度99.9993%),直至腔室内压强稳定为0.5Pa~1.5Pa;溅射过程中O2气和Ar气的总流量为50sccm,其中氧氩比为1:49,溅射时间为3min,直流钒靶功率固定为80W~90W,取出样品移至真空快速热处理炉,450℃~550℃,空气分压900Pa~1100Pa,退火550s~650s,得到化学计量比VO2薄膜。
在本发明中,所述缺氧态处理的过程优选具体为:
将化学计量比VO2薄膜转移至0.5M~1.5M抗坏血酸溶液的三口瓶,通入氮气保护,70℃~120℃保温1h~3h,取出薄膜样品分别用乙醇、异丙醇和丙酮各清洗25min~35min,用氮气枪吹干,得到缺氧态VO2薄膜;
更优选为:
将化学计量比VO2薄膜转移至1M抗坏血酸溶液的三口瓶,通入氮气保护,80℃~90℃保温2h,取出薄膜样品分别用乙醇、异丙醇和丙酮各清洗30min,用氮气枪吹干,得到缺氧态VO2薄膜。
本发明按照上述缺氧态VO2薄膜的具体制备方法,在透明导电基底表面形成电子传输层;在本发明中,所述电子传输层的厚度优选为10nm~50nm,更优选为20nm~30nm。
之后,本发明在形成的电子传输层表面进一步形成钙钛矿活性层;本发明对所述钙钛矿活性层的形成方法没有特殊限制,采用本领域技术人员熟知的制备钙钛矿活性层的技术方案即可。
在本发明中,所述钙钛矿活性层优选具有ABX3型晶体结构,其中,A为有机阳离子和/或无机阳离子,B为Pb2+或Sn2+,X为I-、Br-和Cl-中的一种或多种。
在本发明中,所述钙钛矿活性层的厚度优选为100nm~900nm,更优选为300nm~500nm。
在本发明中,所述空穴传输层优选为Spiro-OMeTAD层、NiOx层或CuOx层,更优选为Spiro-OMeTAD层。本发明对所述空穴传输层在钙钛矿活性层上形成的方法没有特殊限制,采用本领域技术人员熟知的空穴传输层的制备方法即可。
在本发明中,所述空穴传输层的厚度优选为10nm~100nm,更优选为 40nm~60nm。
本发明对所述对电极的种类和形成方式没有特殊限制,采用本领域技术人员熟知的在空穴传输层上形成对电极的技术方案即可。在本发明优选的实施例中,将空穴传输层转移到热蒸镀设备中,真空度达到1×10-5Pa的条件下开始蒸镀电极(Au),厚度为100nm;随后置于氧气手套箱中放置一晚,进行氧化,得到钙钛矿太阳能电池。
本发明提供的制备方法将缺氧态VO2引入钙钛矿太阳能电池内部,制备得到紫外-近红外光学屏蔽透过的钙钛矿太阳能电池,通过采用缺氧态非化学计量比VO2作为电子传输层材料,能够有效吸收紫外光和反射近红外光,实现有效遮挡,降低钙钛矿吸收层光接触与温度升高,起到保护钙钛矿层和器件的作用;同时,本发明提供的制备方法工艺简单,条件温和、易控,应用前景广阔。
本发明提供了一种钙钛矿太阳能电池的制备方法,包括以下步骤:在透明导电基底表面依次形成电子传输层、钙钛矿活性层、空穴传输层和对电极,得到钙钛矿太阳能电池;所述电子传输层为缺氧态VO2薄膜。与现有技术相比,本发明提供的制备方法将缺氧态VO2引入钙钛矿太阳能电池内部,制备得到紫外-近红外光学屏蔽透过的钙钛矿太阳能电池,通过采用缺氧态非化学计量比VO2作为电子传输层材料,能够有效吸收紫外光和反射近红外光,实现有效遮挡,降低钙钛矿吸收层光接触与温度升高,起到保护钙钛矿层和器件的作用。
另外,本发明提供的制备方法工艺简单,条件温和、易控,应用前景广阔。
为了进一步说明本发明,下面通过以下实施例进行详细说明。
实施例1
取1.5g VOSO4粉体加至30ml去离子水中,加入500μl水合肼溶液(80wt%的水溶液)(水合肼溶液要足量,确保产物为缺氧态),并65℃水浴搅拌至形成棕色悬浊液,待颜色稳定后逐滴滴加1mol/L NaOH水溶液,调节悬浊液pH至8~12;将悬浊液清洗,重新分散于40ml去离子水中,并转移至50ml反应釜中,室温升温至220℃(温度不能高于250℃,确保其为缺氧态)并保温48h;待自然冷却后,获得黑色粉体;将上述黑色粉体依次使用去离子水、乙醇、异丙醇、丙酮洗涤,60℃真空干燥12h,获得黑色VO2纳米粉体。
将5mg上述VO2纳米粉体分散到1ml无水乙醇中,超声分散12h,获得高分散溶液,再加入10mg PCBM和1ml氯苯,搅拌均匀,得到电子传输层前驱液A。
将1.5cm×1.5cm氧化铟锡(ITO)玻璃(玻璃厚度2mm,ITO膜层厚度100nm)分别经过乙醇、异丙醇(IPA)和丙酮各清洗30分钟,用氮气枪吹干。
取40μL电子传输层前驱液A均匀铺在ITO导电玻璃表面,匀胶机参数设置为,转度4000rpm,时间30s;随后置于120℃热台上退火10min,得到缺氧态VO2薄膜电子传输层(30nm)。
称量6g碘化铅(PbI2)和60mg碘化铯(CsI)溶解于9mL N,N-二甲基甲酰胺(DMF)和1mL二甲基亚砜(DMSO)溶液中,70℃加热搅拌使之充分溶解,得到PbI2前驱体溶液B;将80mg甲脒氢碘酸盐(FAI)、8mg氯化甲胺(MACl)溶解于1mL的IPA溶液中,搅拌使之充分溶解,得到有机盐溶液C。
取60μL的溶液B均匀铺在上述退火后的电子传输层薄膜表面,匀胶机参数设置为,速度2000rpm时间30s;随后置于75℃热台1min,形成涂层;取80μL的溶液C均匀铺在制备好的溶液B后形成的涂层表面,匀胶机参数设置为,速度3000rpm,时间30s;随后置于150℃热台退火15min,得到钙钛矿薄膜(400nm)。
称量260mg双三氟甲烷磺酰亚胺锂盐(Li-TFSI)溶于1mL乙腈(CAN)中,充分搅拌后得到Li-TFSI溶液;然后称量80mg 2,2,7,7-四[N,N-二(4-甲氧基苯基)氨基]-9,9-螺二芴(Spiro-MeOTAD)溶于1mL氯苯中,充分搅拌待溶解;再加入30μL 4-叔丁基吡啶(TBP)溶液和35μL Li-TFSI溶液,充分搅拌后得到空穴传输层溶液。
取50μL的空穴传输层溶液均匀铺在上述钙钛矿薄膜表面,匀胶机参数设置为,速度3000rpm,时间30s,得到空穴传输层(50nm)。
将空穴传输层转移到热蒸镀设备中,真空度达到1×10-5Pa的条件下开始蒸镀电极(Au),厚度为100nm;随后置于氧气手套箱中放置一晚,进行氧化,得到钙钛矿太阳能电池。
性能测试:
采用PCE测试实施例1制备的钙钛矿太阳能电池的电流密度-电压(JV)曲线,测试在kethley 2400系统测试完成;测试条件:模拟光强为100mW cm-2(AM 1.5G)扫描速率为0.1V s-1(步长为0.02V,时间延迟为200ms),扫描区间为1.2V 到-0.2V,氙灯的功率输出由NERL(National Renewable Energy Laboratory)标准的KG5标准Si电池校准。
采用安捷伦Carry Series UV-Vis-NIR光谱仪测试进行透过率测试,波长测试范围为200nm~2000nm。
测试结果参见表1及图2~3所示,其中,图2为本发明实施例1提供的钙钛矿太阳能电池的透光率测试结果图,图3为本发明实施例1提供的钙钛矿太阳能电池的电流密度随电压变化曲线。
表1实施例1制备的钙钛矿太阳能电池的性能检测结果
实施例2
将1.5cm×1.5cm氧化铟锡(ITO)玻璃(玻璃厚度2mm,ITO膜层厚度100nm)分别经过乙醇、异丙醇(IPA)和丙酮各清洗30分钟,用氮气枪吹干。
将清洗好的基片固定于磁控溅射样品台上,并放置到磁控溅射设备中;磁控溅射腔室抽真空至压强为1×10-4Pa,样品台升温至450℃,之后调整分子泵抽力并通入氩气(纯度99.9993%)直至腔室内压强稳定1Pa;溅射过程中O2气和Ar气的总流量为50sccm(氧氩比为1:49),溅射时间为3min,直流(钒靶)功率固定为85W,取出样品移至真空快速热处理炉,500℃,空气分压1000Pa,退火600s,获得化学计量比VO2薄膜(厚度20nm)的基底;将上述薄膜转移至1M抗坏血酸溶液的三口瓶,通入氮气保护,80℃保温2h,取出薄膜样品分别用乙醇、异丙醇(IPA)和丙酮各清洗30分钟,用氮气枪吹干,得到缺氧态VO2薄膜电子传输层。
称量6g碘化铅(PbI2)和60mg碘化铯(CsI)溶解于9mL N,N-二甲基甲酰胺(DMF)和1mL二甲基亚砜(DMSO)溶液中,70℃加热搅拌使之充分溶解,得到PbI2前驱体溶液B;将80mg甲脒氢碘酸盐(FAI)、8mg氯化甲胺(MACl)溶解于1mL的IPA溶液中,搅拌使之充分溶解,得到有机盐溶液C。
取60μL的溶液B均匀铺在上述退火后的电子传输层薄膜表面,匀胶机参数设置为,速度2000rpm时间30s;随后置于75℃热台1min,形成涂层;取80μL的溶液C均匀铺在制备好的溶液B后形成的涂层表面,匀胶机参数设置为,速度3000rpm,时间30s;随后置于150℃热台退火15min,得到钙钛矿薄膜 (400nm)。
称量260mg双三氟甲烷磺酰亚胺锂盐(Li-TFSI)溶于1mL乙腈(CAN)中,充分搅拌后得到Li-TFSI溶液;然后称量80mg 2,2,7,7-四[N,N-二(4-甲氧基苯基)氨基]-9,9-螺二芴(Spiro-MeOTAD)溶于1mL氯苯中,充分搅拌待溶解;再加入30μL 4-叔丁基吡啶(TBP)溶液和35μL Li-TFSI溶液,充分搅拌后得到空穴传输层溶液。
取50μL的空穴传输层溶液均匀铺在上述钙钛矿薄膜表面,匀胶机参数设置为,速度3000rpm,时间30s,得到空穴传输层(50nm)。
将空穴传输层转移到热蒸镀设备中,真空度达到1×10-5Pa的条件下开始蒸镀电极(Au),厚度为100nm;随后置于氧气手套箱中放置一晚,进行氧化,得到钙钛矿太阳能电池。
测试结果参见表2及图4~5所示,其中,图4为本发明实施例2提供的钙钛矿太阳能电池的透光率测试结果图,图5为本发明实施例2提供的钙钛矿太阳能电池的电流密度随电压变化曲线。
表2实施例2制备的钙钛矿太阳能电池的性能检测结果
以上所述仅是本发明的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本发明的保护范围。

Claims (10)

  1. 一种钙钛矿太阳能电池的制备方法,包括以下步骤:
    在透明导电基底表面依次形成电子传输层、钙钛矿活性层、空穴传输层和对电极,得到钙钛矿太阳能电池;
    所述电子传输层为缺氧态VO2薄膜。
  2. 根据权利要求1所述的制备方法,其特征在于,所述透明导电基底为ITO玻璃、FTO玻璃、AZO玻璃或导电PET。
  3. 根据权利要求1所述的制备方法,其特征在于,所述缺氧态VO2薄膜由含有缺氧态VO2的前驱液涂布后加热成膜得到,或由化学计量比VO2薄膜经缺氧态处理得到。
  4. 根据权利要求3所述的制备方法,其特征在于,所述缺氧态VO2的制备方法具体为:
    VOSO4粉体加入去离子水中,再加入水合肼溶液,在60℃~70℃水浴搅拌至形成棕色的悬浊液,待颜色稳定后逐滴滴加1mol/L NaOH水溶液,调节悬浊液的pH至8~12;然后将悬浊液清洗,重新分散在去离子水中,并转移至反应釜中,升温至200℃~240℃保温45h~50h;待自然冷却后,获得黑色粉体;将上述黑色粉体依次使用去离子水、乙醇、异丙醇、丙酮洗涤,55℃~65℃真空干燥10h~15h,得到缺氧态VO2
  5. 根据权利要求4所述的制备方法,其特征在于,所述水合肼溶液为70wt%~90wt%的水合肼的水溶液;
    所述VOSO4粉体加入到10倍~30倍质量的去离子水中,所述水合肼溶液与上述去离子水的体积比为1:(30~90)。
  6. 根据权利要求3所述的制备方法,其特征在于,所述涂布采用匀胶机,转度为1000rpm~8000rpm,时间为10s以上;加热成膜的温度为60℃~200℃,时间为3min以上。
  7. 根据权利要求3所述的制备方法,其特征在于,所述化学计量比VO2薄膜的制备方法具体为:
    采用磁控溅射,腔室抽真空至压强为1×10-5Pa~1×10-3Pa,样品台升温至150℃~550℃,之后调整分子泵抽力并通入氩气,直至腔室内压强稳定为 0.5Pa~5Pa;溅射过程中O2气和Ar气的总流量为40sccm~60sccm,其中氧氩比为1:(39~59),溅射时间为1min~5min,直流钒靶功率固定为30W~180W,取出样品移至真空快速热处理炉,400℃~550℃,空气分压100Pa~5000Pa,退火30s~3000s,得到化学计量比VO2薄膜。
  8. 根据权利要求3所述的制备方法,其特征在于,所述缺氧态处理的过程具体为:
    将化学计量比VO2薄膜转移至0.5M~1.5M抗坏血酸溶液的三口瓶,通入氮气保护,70℃~120℃保温1h~3h,取出薄膜样品分别用乙醇、异丙醇和丙酮各清洗25min~35min,用氮气枪吹干,得到缺氧态VO2薄膜。
  9. 根据权利要求1所述的制备方法,其特征在于,所述钙钛矿活性层具有ABX3型晶体结构,其中,A为有机阳离子和/或无机阳离子,B为Pb2+或Sn2+,X为I-、Br-和Cl-中的一种或多种。
  10. 根据权利要求1所述的制备方法,其特征在于,所述空穴传输层为Spiro-OMeTAD层、NiOx层或CuOx层。
PCT/CN2023/071851 2022-10-17 2023-01-12 一种钙钛矿太阳能电池的制备方法 WO2024082467A1 (zh)

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