WO2024080118A1 - Procédé d'éjection de gouttes de liquide et dispositif d'éjection de gouttes de liquide - Google Patents

Procédé d'éjection de gouttes de liquide et dispositif d'éjection de gouttes de liquide Download PDF

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Publication number
WO2024080118A1
WO2024080118A1 PCT/JP2023/034698 JP2023034698W WO2024080118A1 WO 2024080118 A1 WO2024080118 A1 WO 2024080118A1 JP 2023034698 W JP2023034698 W JP 2023034698W WO 2024080118 A1 WO2024080118 A1 WO 2024080118A1
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WO
WIPO (PCT)
Prior art keywords
droplet
droplet ejection
nozzle
electrostatic
nozzles
Prior art date
Application number
PCT/JP2023/034698
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English (en)
Japanese (ja)
Inventor
和広 村田
Original Assignee
株式会社Ｓｉｊテクノロジ
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Publication of WO2024080118A1 publication Critical patent/WO2024080118A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/06—Ink jet characterised by the jet generation process generating single droplets or particles on demand by electric or magnetic field

Definitions

  • the present invention relates to a droplet ejection method and a droplet ejection device.
  • Patent Document 1 discloses an electrostatic ejection inkjet recording device.
  • the cross section of the structure formed generally has an arc shape because it is affected by the surface tension of the ink used as the droplet and the wettability of the substrate.
  • One of the objectives of the present invention is to form structures with new cross-sectional shapes using an electrostatic ejection inkjet head.
  • a droplet ejection method including: using a multi-nozzle head including a plurality of electrostatic droplet ejection nozzles arranged at a predetermined nozzle interval in a first direction and ejecting droplets; ejecting a first droplet from a first electrostatic droplet ejection nozzle of the plurality of electrostatic droplet ejection nozzles to a first droplet ejection position on a target object; scanning the multi-nozzle head in the first direction at a predetermined scanning speed; ejecting a second droplet from a second electrostatic droplet ejection nozzle of the plurality of electrostatic droplet ejection nozzles to the first droplet ejection position; and ejecting a first droplet from the first electrostatic droplet ejection nozzle to the second droplet ejection position, wherein a shape of a first structure formed by the first droplet and the second droplet at the first droplet ejection position is different from a shape of
  • the predetermined nozzle spacing may be 20 ⁇ m or more and 500 ⁇ m or less.
  • the predetermined scanning speed may be greater than or equal to 0.00001 meters per second and less than or equal to 1 meter per second.
  • the viscosity of the solvent in the droplets may be 0.1 cps or more and 10,000 cps or less.
  • the amount of droplets ejected from the electrostatic droplet ejection nozzle at one time may be 0.00001 picoliters or more and 50 picoliters or less.
  • the multiple electrostatic droplet ejection nozzles may include three or more electrostatic droplet ejection nozzles.
  • the first structure and the second structure are connected to form a third structure, and the third structure may have a rectangular cross-sectional shape when viewed from the first direction.
  • the end of the third structure may have an arc-shaped cross-sectional shape when viewed from a second direction intersecting the first direction.
  • a droplet ejection device including a multi-nozzle head including a plurality of electrostatic droplet ejection nozzles arranged at a predetermined nozzle interval in a first direction for ejecting droplets, and a control unit that ejects a first droplet from a first electrostatic droplet ejection nozzle of the plurality of electrostatic droplet ejection nozzles to a first droplet ejection position on a target object, scans the multi-nozzle head in the first direction at a predetermined scanning speed, ejects a second droplet from a second electrostatic droplet ejection nozzle of the plurality of electrostatic droplet ejection nozzles to the first droplet ejection position, and ejects the first droplet from the first electrostatic droplet ejection nozzle to the second droplet ejection position.
  • the predetermined nozzle spacing may be greater than or equal to 20 ⁇ m and less than or equal to 500 ⁇ m.
  • the plurality of electrostatic droplet ejection nozzles may include three or more electrostatic droplet ejection nozzles.
  • control unit may control the scanning speed based on the material of the droplets.
  • FIG. 1 is a schematic diagram of a droplet ejection device according to an embodiment of the present invention.
  • FIG. 2 is a plan view of a multi-nozzle head.
  • FIG. 2 is an enlarged plan view of a portion of the multi-nozzle head.
  • FIG. 2 is an enlarged top view of a droplet ejection nozzle.
  • FIG. 2 is an enlarged cross-sectional view of a droplet ejection nozzle.
  • 1A to 1C are diagrams illustrating a method for discharging droplets.
  • FIG. 4 is a schematic diagram of a discharged droplet.
  • FIG. 4 is a schematic diagram of a discharged droplet.
  • 1A to 1C are diagrams illustrating a method for discharging droplets.
  • FIG. 4 is a schematic diagram of a discharged droplet.
  • FIG. 4 is a schematic diagram of a discharged droplet.
  • FIG. 4 is a schematic diagram of a discharged droplet.
  • FIG. 2 is a schematic diagram of a structure according to one embodiment of the present invention.
  • FIG. 2 is a schematic diagram of a structure according to one embodiment of the present invention.
  • FIG. 2 is a plan view of a multi-nozzle head.
  • 3 is a functional block diagram of a control unit of the droplet ejection device according to the embodiment of the present invention.
  • FIG. 1 is an example of a dataset.
  • FIG. 4 is a photograph of a multi-nozzle head attached to a mounting portion in this embodiment.
  • 1 is a plan view of a structure formed in this example. 1 is a cross-sectional profile image of a structure formed in this example.
  • FIG. 2 is a schematic diagram of a structure according to one embodiment of the present invention.
  • FIG. 1 is a schematic diagram of a droplet ejection device 100 according to one embodiment of the present invention.
  • the droplet ejection device 100 includes a control unit 110, a memory unit 120, a power supply unit 125, a drive unit 130, a mounting unit 140, an ink supply unit 145, a multi-nozzle head 150, a display unit 170, an operation unit 180, an adjustment unit 190, an object holding unit 200, and a housing 210.
  • the control unit 110, the memory unit 120, the power supply unit 125, the drive unit 130, the mounting unit 140, the ink supply unit 145, the multi-nozzle head 150, the display unit 170, the operation unit 180, the adjustment unit 190, and the object holding unit 200 are electrically connected by a wiring bus and are provided inside the housing 210.
  • the display unit 170, the operation unit 180, and the adjustment unit 190 do not necessarily have to be provided.
  • the control unit 110 includes a CPU (Central Processing Unit), an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array), or other arithmetic processing circuit.
  • the control unit 110 uses a preset droplet ejection program to control the droplet ejection process by the multi-nozzle head 150.
  • the storage unit 120 functions as a database that stores the droplet ejection program and various information used in the droplet ejection program.
  • the storage unit 120 is made of a memory, an SSD, or a memory-capable element.
  • the power supply unit 125 applies a voltage to the multi-nozzle head 150 based on a signal input from the control unit 110.
  • the power supply unit 125 applies a pulsed voltage (1000V in this example) to the multi-nozzle head 150.
  • the voltage is not limited to a pulsed voltage, and a constant voltage may be applied all the time.
  • the driving unit 130 is composed of driving members such as a motor, a belt, and gears. Based on instructions from the control unit 110, the driving unit 130 moves the multi-nozzle head 150 in one direction (in this example, the second direction D2) relative to the object 220. The driving unit 130 may also move the object holding unit 200.
  • the mounting unit 140 mounts the multi-nozzle head 150.
  • the mounting unit 140 mounts the multi-nozzle head 150 by adhering to the plate portion of the multi-nozzle head 150.
  • the mounting unit 140 may mount the multi-nozzle head 150 using a jig, adhesive, or the like.
  • the ink supply unit 145 (also called an ink tank or ink cartridge) is provided away from the mounting unit 140.
  • the ink supply unit 145 stores ink.
  • the ink supply unit 145 supplies the stored ink to the multi-nozzle head 150. It is preferable to use ink made of a solvent and a solute or pigment, and more preferably, the solute or pigment component is based on an inorganic substance or metal, and even more preferably, it is preferable to use ultrafine metal particle ink.
  • the multi-nozzle head 150 is provided away from the ink supply unit 145.
  • the configuration of the multi-nozzle head 150 will be described later.
  • the display unit 170 displays control information (text information or image information) based on the control of the control unit 110. At this time, the display unit 170 may display the control information via a GUI (Graphical User Interface). The display unit 170 may also display information about the multi-nozzle head 150.
  • control information text information or image information
  • GUI Graphic User Interface
  • the operation unit 180 includes operable members.
  • the operation unit 180 includes buttons, levers, and a numeric keypad.
  • the operation unit 180 is used to perform operations such as moving up, down, left, right, pressing, or rotating, or to input numerical values, and information based on the operations is acquired by the control unit 110.
  • the display unit 170 may be used as a touch panel.
  • the adjustment unit 190 may adjust the position and inclination of the multi-nozzle head 150. Specifically, the adjustment unit 190 can adjust the inclination of the tip 153a of the droplet ejection nozzle 153 of the multi-nozzle head 150 and the orientation of the multi-nozzle head.
  • the adjustment unit 190 may use a ⁇ stage or a goniostage.
  • the object holding unit 200 has the function of holding the object 220.
  • a stage is used as the object holding unit 200.
  • the mechanism by which the object holding unit 200 holds the object 220 There are no particular limitations on the mechanism by which the object holding unit 200 holds the object 220, and a general holding mechanism is used.
  • the object 220 is vacuum-adsorbed to the object holding unit 200.
  • the object holding unit 200 may hold the object 220 using a fixture.
  • Fig. 2A is a plan view of the multi-nozzle head 150.
  • Fig. 2B is an enlarged plan view of a portion of the multi-nozzle head.
  • Fig. 3A is an enlarged top view of the droplet ejection nozzle.
  • Fig. 3B is an enlarged cross-sectional view of the droplet ejection nozzle.
  • the multi-nozzle head 150 includes a plate portion 151 and multiple droplet ejection nozzles 153 (also called electrostatic droplet ejection nozzles).
  • the plate portion 151 is formed in a plate shape.
  • the plate portion 151 extends in the first direction D1.
  • the plate portion 151 is made of a metal material such as stainless steel.
  • the droplet discharge nozzles 153 are provided on one surface of the plate portion 151.
  • the droplet discharge nozzles 153 are arranged in a line in the first direction D1.
  • the droplet discharge nozzles 153-1, 153-2, ..., 153-(N-1), and 153-N are provided on the plate portion 151.
  • N is a natural number equal to or greater than 3.
  • the multi-nozzle head 150 includes 10 droplet discharge nozzles 153.
  • droplet discharge nozzles 153-1 also referred to as the first electrostatic droplet discharge nozzle
  • 153-2 also referred to as the second electrostatic droplet discharge nozzle
  • ..., 153-(N-1), and 153-N they will be described as the droplet discharge nozzles 153.
  • a metallic material such as nickel is used for the droplet discharge nozzles 153.
  • the droplet discharge nozzles 153 have a tapered shape.
  • the plate portion 151 has a through hole 151o having an inner diameter r151o larger than the inner diameter r153a of the discharge port (opening portion 153ao of the tip portion 153a of the droplet discharge nozzle 153) of the droplet discharge nozzle 153 in a portion corresponding to the droplet discharge nozzle 153 (overlapping portion).
  • the inner diameter of the through hole 151o of the plate portion 151 may be 1 ⁇ m or more and 100 ⁇ m or less.
  • the inner diameter of the tip portion 153a of the droplet discharge nozzle 153 may be several hundred nm or more and 50 ⁇ m or less, preferably 1 ⁇ m or more and 15 ⁇ m or less, and more preferably 5 ⁇ m or more and 12 ⁇ m or less.
  • a voltage may be applied to the droplet discharge nozzle 153, a voltage may be applied to the plate portion 151 (or the ink supply portion 145), or a voltage may be applied to the ink.
  • an electrode may be provided.
  • the electrodes may be made of tungsten, nickel, molybdenum, titanium, gold, silver, copper, platinum, or the like. In this case, multiple electrodes may be provided so that a voltage is applied uniformly to the entire plate portion 151.
  • a voltage may be applied to a jig that holds the multi-nozzle head 150.
  • adjacent droplet ejection nozzles 153 have a predetermined interval (distance S1 between nozzles). From the viewpoint of controlling the shape of the structure to be formed, it is desirable that the distance S1 between adjacent nozzles is 20 ⁇ m or more and 500 ⁇ m or less. In this example, the distance S1 between each droplet ejection nozzle 153 is 200 ⁇ m.
  • the shape of the structure can be controlled based on the size of the ejected droplets and the distance between adjacent nozzles.
  • FIGS. 4 to 9 are schematic diagrams showing the droplet ejection method in the droplet ejection device.
  • the multi-nozzle head 150 described above is used to scan the multi-nozzle head 150 in the first direction D1 in which the droplet ejection nozzles 153 are arranged. From the viewpoint of the drying speed of the droplets, it is desirable that the scanning speed of the multi-nozzle head 150 is 0.00001 m/sec or more and 1 m/sec or less.
  • a first droplet 157-1 is ejected from the first droplet ejection nozzle 153-1 of the multiple droplet ejection nozzles 153 to the first droplet ejection position P1 using ink supplied by the ink supply unit 145.
  • the amount of droplet ejection is 0.00001 picoliters or more and 50 picoliters or less.
  • more particles in the ink remain at the ends of the first droplet 157-1 compared to the center portion during the drying process of the first droplet 157-1 (for example, the coffee ring phenomenon). This forms a structure in which the ends of the first droplet 157-1 are raised, as shown in FIG. 6.
  • the second droplet discharge nozzle 153-2 moves to the first droplet discharge position P1 in accordance with the scanning of the multi-nozzle head 150 in the first direction D1.
  • the second droplet 157-2 is discharged from the second droplet discharge nozzle 153-2 to the first droplet discharge position P1.
  • a structure is formed in which the end of the second droplet 157-2 is raised, and ink particles accumulate in the central groove formed by the first droplet 157-1 as shown in FIG. 9 (the first structure 158-1 is formed).
  • the first droplet 157-1 is ejected from the first droplet ejection nozzle 153-1 using ink supplied from the ink supply unit 145 at the second droplet ejection position P2, which is provided in the direction in which the multi-nozzle head 150 moves (first direction D1) with respect to the first droplet ejection position P1, as shown in FIG. 10.
  • the structure (158-1) formed at the first droplet ejection position P1 and the structure (2nd structure 158-2) formed at the second droplet ejection position P2 have different shapes depending on the number of ejected droplets.
  • the first structure 158-1 and the second structure 158-2 approach a rectangle (trapezoid) as the number of droplet ejections increases.
  • a predetermined number of times is exceeded, the shape of the first structure 158-1 and the shape of the second structure 158-2 may become the same.
  • first structure 158-1 and the second structure 158-2 are connected when a predetermined condition is satisfied. Specifically, when the distance between the first droplet discharge position P1 and the second droplet discharge position P2 is equal to or less than a predetermined distance, the first structure 158-1 and the second structure 158-2 are connected (a third structure is formed). The same applies to the droplet discharge positions after the second droplet discharge position P2.
  • the third droplet ejection nozzle 153-3 and subsequent droplet ejection nozzles 153 which are arranged in the opposite direction of the first direction D1 from the second droplet ejection nozzle 153-2, also eject droplets sequentially to the first droplet ejection position P1 and the second droplet ejection position P2. The same applies to the droplet ejection positions after the second droplet ejection position P2, which are arranged in the first direction D1.
  • FIG. 11A is a schematic cross-sectional view of the structure 159 formed in this embodiment when viewed from a first direction D1.
  • FIG. 11B is a schematic cross-sectional view of the structure 159 when viewed from a second direction D2.
  • droplets are repeatedly ejected at each droplet ejection position, so that the groove in the center is filled while the side edges have a curved shape.
  • a linear structure having a rectangular (trapezoidal) cross-sectional shape when viewed from the first direction D1 is formed without going through a lithography process.
  • the droplet size is smaller and the drying speed is faster than droplets discharged from a piezoelectric type inkjet nozzle. Also, in this embodiment, the distance between adjacent electrostatic discharge type droplet discharge nozzles and the scanning speed are controlled. Furthermore, droplets are discharged multiple times at the same droplet discharge position. This forms a linear structure having a rectangular cross-sectional shape as described above.
  • this embodiment it is possible to form a structure having a new cross-sectional shape that has not been seen before using an electrostatic ejection inkjet head. Since the structure has such a shape, it can also be used as a partition wall, and structures formed by inkjet printing can be used for new purposes.
  • Second Embodiment a droplet ejection device different from that in the first embodiment will be described. Specifically, an example of a multi-nozzle head in which droplet ejection nozzles are arranged two-dimensionally will be described. For convenience of explanation, some members will be omitted.
  • FIG. 12 is a schematic top view of the multi-nozzle head 150A.
  • the droplet ejection nozzles 153 are arranged in a first direction D1 and may also be arranged in a second direction D2.
  • multiple linear structures can be formed by ejecting droplets while scanning in the first direction.
  • FIG. 13 shows the internal configuration of the control unit 110B. It is a functional block diagram.
  • the control unit 110B has an acquisition unit 111, a setting unit 113, and a drive control unit 115.
  • the acquisition unit 111 acquires data input by the user via the operation unit 180 or data stored in the storage unit 120.
  • FIG. 14 is an example of a data set 500 acquired by the acquisition unit 111.
  • the data set 500 includes a material name 500a, a material viscosity 500b, an adjacent nozzle distance 500c, a temperature 500d, and a discharge amount 500e. Note that the data set 500 may not include some of the data.
  • the setting unit 113 sets the scanning speed of the multi-nozzle head 150 based on the data set 500 acquired by the acquisition unit 111.
  • the drive control unit 115 controls the drive unit 130 using the set scanning speed.
  • FIG. 15 is a flowchart for setting the scanning speed of the multi-nozzle head 150 when ejecting droplets.
  • control unit 110 acquires information about the multi-nozzle head 150 and information about the material (S110, S120).
  • the information about the multi-nozzle head 150 and information about the material are input by the user via the operation unit 180 or are acquired from the storage unit 120.
  • the acquired information is processed as an input data set as shown in FIG. 13.
  • control unit 110 sets the scanning speed of the multi-nozzle head 150 based on the acquired information about the multi-nozzle head 150 and information about the material (S130). At this time, the control unit 110 may select from a group of previously prepared scanning speed data for the information about the multi-nozzle head 150 and the information about the material. The control unit 110 may also perform machine learning based on previously acquired teacher data to set the scanning speed.
  • the control unit 110 outputs the set scanning speed information to the driving unit 130 and drives the driving unit 130 (S140).
  • the user can input material information to set the optimal multi-nozzle head scanning speed for forming a structure with a rectangular cross-sectional shape.
  • the control unit 110 may set the ejection amount of droplets along with the scanning speed of the multi-nozzle head 150.
  • Figure 16 is a photograph of an example multi-nozzle head.
  • Figure 17 is a photograph of the multi-nozzle head attached to the attachment section.
  • the multi-nozzle head used to form the structure in this example is provided with 5 rows x 20 (100) droplet ejection nozzles. In this case, one line is drawn by five nozzles.
  • Figure 18 is a plan view of the structure formed in this example.
  • Figure 19 is a cross-sectional profile image of the structure formed in this example.
  • the pattern line width of the structure is 36.485 ⁇ m. As shown in Figure 19, it was confirmed that the structure had a rectangular cross-sectional shape.
  • the droplet ejection device may include an inspection device.
  • the inspection device inspects the inclination of the multi-nozzle head 150 mounted on the mounting unit 140.
  • the inspection device can inspect the inclination of the tip 153a of the adjacent droplet ejection nozzle 153 in the multi-nozzle head 150 and the shape of the pattern.
  • an imaging device or a step gauge is used for the inspection device.
  • a CCD (Charge Coupled Device) type camera or a CMOS (Complementary Metal Oxide Semiconductor) type camera may be used as the imaging device.
  • Information acquired by the inspection device may be sent to the control unit 110 and the memory unit 120 to control the scanning speed.
  • the inclination between the adjacent droplet ejection nozzles 153 may be adjusted according to the shape of the pattern.
  • FIG. 20 is a schematic diagram of structure 159C.
  • Structure 159C has a rectangular cross-sectional shape when viewed from the first direction D1, but as shown in FIG. 20, the ends of structure 159C may have an arc cross-sectional shape when viewed from the second direction D2, depending on the number of droplets ejected, if the number of droplets ejected is less than the center of structure 159C.

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  • Ink Jet (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

L'invention concerne un procédé d'éjection de gouttes de liquide consistant à : utiliser une tête à buses multiples comportant une pluralité de buses d'éjection de gouttes de liquide électrostatique qui sont disposées à un intervalle de buse prescrit dans une première direction et éjectent des gouttes de liquide ; éjecter une première goutte de liquide d'une première buse d'éjection de goutte de liquide électrostatique de la pluralité de buses d'éjection de goutte de liquide électrostatique au niveau d'une première position d'éjection de goutte de liquide de l'objet cible ; balayer la tête à buses multiples dans la première direction à une vitesse de balayage prescrite ; éjecter une seconde goutte de liquide d'une seconde buse d'éjection de goutte de liquide de la pluralité de buses d'éjection de goutte de liquide électrostatique au niveau de la première position d'éjection de goutte de liquide ; et éjecter une première goutte de liquide de la première buse d'éjection de goutte de liquide au niveau d'une seconde position d'éjection de goutte de liquide. La forme d'une première structure formée par la première goutte de liquide et la seconde goutte de liquide au niveau de la première position et la forme d'une seconde structure formée par la première goutte de liquide au niveau de la seconde position diffèrent.
PCT/JP2023/034698 2022-10-11 2023-09-25 Procédé d'éjection de gouttes de liquide et dispositif d'éjection de gouttes de liquide WO2024080118A1 (fr)

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JP2022-163524 2022-10-11
JP2022163524A JP2024056547A (ja) 2022-10-11 2022-10-11 液滴吐出方法および液滴吐出装置

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Publication number Priority date Publication date Assignee Title
JPS5849271A (ja) * 1981-09-17 1983-03-23 Fuji Photo Film Co Ltd インクジエツトプリンタ
JP2002211011A (ja) * 2001-01-17 2002-07-31 Ricoh Co Ltd インクジェット記録装置及びプリンタドライバ
JP2003182071A (ja) * 2001-12-17 2003-07-03 Seiko Epson Corp インクジェットヘッド及びその製造方法並びにインクジェット記録装置及びその製造方法、カラーフィルタの製造装置及びその製造方法、並びに電界発光基板製造装置及びその製造方法
JP2005305962A (ja) * 2004-04-26 2005-11-04 Fuji Photo Film Co Ltd インクジェット記録方法
JP2006253482A (ja) * 2005-03-11 2006-09-21 Konica Minolta Holdings Inc 静電吸引型インクジェット用基板、パターン形成方法及びパターン付基板
WO2020217755A1 (fr) * 2019-04-25 2020-10-29 株式会社Ｓｉｊテクノロジ Dispositif de distribution de gouttelettes et procédé de distribution de gouttelettes
WO2021065435A1 (fr) * 2019-10-02 2021-04-08 株式会社Ｓｉｊテクノロジ Dispositif de décharge de gouttelettes et procédé de décharge de gouttelettes

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5849271A (ja) * 1981-09-17 1983-03-23 Fuji Photo Film Co Ltd インクジエツトプリンタ
JP2002211011A (ja) * 2001-01-17 2002-07-31 Ricoh Co Ltd インクジェット記録装置及びプリンタドライバ
JP2003182071A (ja) * 2001-12-17 2003-07-03 Seiko Epson Corp インクジェットヘッド及びその製造方法並びにインクジェット記録装置及びその製造方法、カラーフィルタの製造装置及びその製造方法、並びに電界発光基板製造装置及びその製造方法
JP2005305962A (ja) * 2004-04-26 2005-11-04 Fuji Photo Film Co Ltd インクジェット記録方法
JP2006253482A (ja) * 2005-03-11 2006-09-21 Konica Minolta Holdings Inc 静電吸引型インクジェット用基板、パターン形成方法及びパターン付基板
WO2020217755A1 (fr) * 2019-04-25 2020-10-29 株式会社Ｓｉｊテクノロジ Dispositif de distribution de gouttelettes et procédé de distribution de gouttelettes
WO2021065435A1 (fr) * 2019-10-02 2021-04-08 株式会社Ｓｉｊテクノロジ Dispositif de décharge de gouttelettes et procédé de décharge de gouttelettes

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