WO2024080033A1 - Dispositif de combinaison de faisceaux et machine de traitement laser - Google Patents

Dispositif de combinaison de faisceaux et machine de traitement laser Download PDF

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Publication number
WO2024080033A1
WO2024080033A1 PCT/JP2023/031964 JP2023031964W WO2024080033A1 WO 2024080033 A1 WO2024080033 A1 WO 2024080033A1 JP 2023031964 W JP2023031964 W JP 2023031964W WO 2024080033 A1 WO2024080033 A1 WO 2024080033A1
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WO
WIPO (PCT)
Prior art keywords
laser beam
guide light
light
laser
wedge prism
Prior art date
Application number
PCT/JP2023/031964
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English (en)
Japanese (ja)
Inventor
哲也 小林
陽亮 有本
Original Assignee
株式会社アマダ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社アマダ filed Critical 株式会社アマダ
Publication of WO2024080033A1 publication Critical patent/WO2024080033A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements

Definitions

  • the present invention relates to a beam combining device and a laser processing machine.
  • Laser processing machines In recent years, the laser beams used by laser processing machines to process sheet metal as a workpiece have become increasingly powerful (higher brightness). Laser processing machines sometimes superimpose two laser beams with different wavelengths emitted from two laser oscillators using optical components such as a dichroic mirror with a wavelength-selective coating to increase the power of the laser beam. Laser processing machines also have the function of irradiating the sheet metal with a guide light made of visible light in order to determine the starting position of processing and to check the processing trajectory (see Patent Document 1).
  • a dichroic mirror installed in a beam coupler, which is a beam combining device, and emit a guide light onto the same optical axis as the combined laser beam
  • at least two mirrors are required.
  • Increasing the number of optical components requires a mechanism for adjusting the position of each optical component, which makes the adjustment work more complicated and increases the size of the beam coupler.
  • the higher the power of the laser beam the more susceptible it is to the effects of thermal lenses, so it is desirable to reduce the number of optical components such as lenses and mirrors as much as possible.
  • a first aspect of one or more embodiments includes a first collimating lens that converts a first laser beam of divergent light having a first wavelength emitted from a first laser oscillator into collimated light, a second collimating lens that converts a second laser beam of divergent light having a second wavelength emitted from a second laser oscillator into collimated light, a first surface that is coated with a first coating that has a property of reflecting the first laser beam converted into collimated light by the first collimating lens and transmitting a guide light consisting of visible light, and a second collimating lens that has a property of transmitting the second laser beam converted into collimated light by the second collimating lens and reflecting the guide light.
  • the present invention provides a beam combining device that includes a wedge prism that emits a combined laser beam by combining the first laser beam reflected by the first surface with the second laser beam that has been transmitted through the second surface and the first surface in this order, and emits the guide light reflected by the second surface and transmitted through the first surface onto the same optical axis as the optical axis of the combined laser beam, and a focusing lens that focuses the combined laser beam or the guide light emitted from the wedge prism and inputs it into an optical fiber that transmits the combined laser beam or the guide light.
  • the laser beams of two wavelengths are combined by a wedge prism, and the guide light is emitted on the same optical axis as the optical axis of the combined laser beam, thereby realizing a configuration in which the combined laser beam and the guide light are emitted on the same optical axis with a small number of optical components.
  • a second aspect of one or more of the embodiments provides a laser processing machine including the first laser oscillator, the second laser oscillator, the beam combining device of the first aspect, a guide light emitting unit that emits the guide light toward the wedge prism, and a processing head that irradiates the combined laser beam or the guide light transmitted by the optical fiber onto a workpiece to be processed.
  • the laser beams of two wavelengths are combined by a wedge prism, and the guide light is emitted on the same optical axis as the optical axis of the combined laser beam, thereby realizing a configuration in which the combined laser beam and the guide light are emitted on the same optical axis with a small number of optical components.
  • the workpiece can be processed after the processing start position is determined and the processing trajectory is confirmed using the guide light.
  • the beam combining device and laser processing machine can combine laser beams of two wavelengths with a small number of optical components and emit a guide light onto the same optical axis as the optical axis of the combined laser beam.
  • FIG. 1 illustrates a beam combining device and a laser processing machine according to one or more embodiments.
  • FIG. 2A is a cross-sectional view of a position adjustment mechanism for a first collimating lens included in a beam combining device according to one or more embodiments, taken along a plane perpendicular to the Z axis.
  • FIG. 2B is a cross-sectional view of a position adjustment mechanism for a first collimating lens included in a beam combining device according to one or more embodiments, taken along a plane perpendicular to the X-axis.
  • FIG. 3 is a characteristic diagram illustrating the reflection and transmission characteristics of first and second coatings applied to the first and second surfaces of a wedge prism included in a beam combining device according to one or more embodiments.
  • the beam combining device includes a first collimating lens, a second collimating lens, a wedge prism, and a focusing lens.
  • the first collimating lens converts a first laser beam of divergent light having a first wavelength emitted from a first laser oscillator into collimated light.
  • the second collimating lens converts a second laser beam of divergent light having a second wavelength emitted from a second laser oscillator into collimated light.
  • the wedge prism includes a first surface that is coated with a first coating having a property of reflecting the first laser beam converted into collimated light by the first collimating lens and transmitting a guide light consisting of visible light, and a second surface that is coated with a second coating having a property of transmitting the second laser beam converted into collimated light by the second collimating lens and reflecting the guide light.
  • the first coating has a property of transmitting the second laser beam that has passed through the second surface.
  • the wedge prism emits a combined laser beam that combines the first laser beam reflected by the first surface with the second laser beam that has been transmitted through the second surface and the first surface in that order, and emits the guide light that has been reflected by the second surface and transmitted through the first surface onto the same optical axis as the optical axis of the combined laser beam.
  • the focusing lens focuses the combined laser beam or the guide light emitted from the wedge prism and makes it incident on the optical fiber that transmits the combined laser beam or the guide light.
  • the laser processing machine includes the first laser oscillator, the second laser oscillator, a beam combining device of the first aspect, a guide light emitting unit that emits the guide light toward the wedge prism, and a processing head that irradiates the combined laser beam or the guide light transmitted by the optical fiber onto a workpiece to be processed.
  • FIG. 1 shows a beam combining device and a laser processing machine according to one or more embodiments.
  • the laser processing machine 100 according to one or more embodiments shown in FIG. 1 includes a first laser oscillator 11, a second laser oscillator 12, a beam coupler 20 which is a beam combining device according to one or more embodiments, and a processing head 40.
  • the first laser oscillator 11 and the second laser oscillator 12 are, for example, a fiber laser oscillator, a disk laser oscillator, or a direct diode laser oscillator.
  • the connector 13c of the feeding fiber 13 that transmits the first laser beam emitted from the first laser oscillator 11 is connected to the end of the protrusion 201p in the housing 201 of the beam coupler 20.
  • the connector 14c of the feeding fiber 14 that transmits the second laser beam emitted from the second laser oscillator 12 is connected to one end of the main body 201m in the housing 201.
  • the first connector 30c1 of the process fiber 30 is connected to the other end of the main body 201m, and the second connector 30c2 is connected to the housing 401 of the processing head 40.
  • the beam coupler 20 includes a first collimating lens 21, a second collimating lens 22, a wedge prism 23, and a focusing lens 24 in a housing 201.
  • a guide light emitting unit 26 is provided on the outside of the beam coupler 20, which emits guide light consisting of visible light for determining the processing start position and checking the processing trajectory.
  • the guide light emitting unit 26 is attached to the outer surface of the housing 201, and irradiates the guide light shown by the dashed line to the wedge prism 23 through an opening provided in the housing 201.
  • the guide light emitting unit 26 may be provided inside the housing 201.
  • the first surface 23a of the wedge prism 23 is coated with a first coating, which will be described later.
  • the second surface 23b, which faces the first surface 23a of the wedge prism 23, is coated with a second coating, which will be described later.
  • the first laser beam emitted from the first laser oscillator 11 has a wavelength ⁇ 1
  • the second laser beam emitted from the second laser oscillator 12 has a wavelength ⁇ 2 that is shorter than the wavelength ⁇ 1.
  • the first laser beam, the second laser beam, and the combined laser beam described below are indicated by dashed dotted lines.
  • the guide light has a wavelength ⁇ 3, and has a relationship of ⁇ 1> ⁇ 2> ⁇ 3.
  • the wavelength ⁇ 1 and the wavelength ⁇ 2 are 1030 nm to 1090 nm
  • the wavelength ⁇ 3 is 600 nm to 700 nm.
  • the first laser beam emitted from the first laser oscillator 11 is transmitted to the beam coupler 20 by the feeding fiber 13.
  • the second laser beam emitted from the second laser oscillator 12 is transmitted to the beam coupler 20 by the feeding fiber 14.
  • the first collimating lens 21 converts the first laser beam of diverging light emitted from the end of the feeding fiber 13 into collimated light.
  • the first laser beam converted into collimated light is incident on the first surface 23a of the wedge prism 23.
  • the second collimating lens 22 converts the second laser beam of diverging light emitted from the end of the feeding fiber 14 into collimated light.
  • the second laser beam converted into collimated light is incident on the second surface 23b of the wedge prism 23.
  • the first collimating lens 21 and the second collimating lens 22 are biconvex lenses in which both the entrance surface and the exit surface of the laser beam are convex, but they may also be plano-convex lenses in which the entrance surface is flat and the exit surface is convex.
  • the lens shapes of the first collimating lens 21 and the second collimating lens 22 are not limited.
  • the focusing lens 24 and the collimating lens 41 or focusing lens 43 in the processing head 40 which will be described later, may also be biconvex lenses or plano-convex lenses, and the lens shapes are not limited.
  • FIG. 2A is a cross-sectional view of the position adjustment mechanism 50 of the first collimator lens 21 provided in the beam coupler 20, cut along a plane perpendicular to the Z axis.
  • FIG. 2B is a cross-sectional view of the position adjustment mechanism 50 of the first collimator lens 21 provided in the beam coupler 20, cut along a plane perpendicular to the X axis.
  • the position of the first collimator lens 21 is adjusted by the position adjustment mechanism 50 as shown in FIG. 2A and FIG. 2B.
  • the position of the second collimator lens 22 is also adjusted by a position adjustment mechanism similar to the position adjustment mechanism 50 shown in FIG. 2A and FIG. 2B.
  • the optical axis direction of the first laser beam emitted from the first collimator lens 21 is the Z axis, and the two orthogonal directions perpendicular to the Z axis are the X axis and the Y axis.
  • the first collimator lens 21 is a plano-convex lens.
  • the first collimator lens 21 is held in the position adjustment mechanism 50 by the lens holder 51.
  • two coil springs 53x extending in the X-axis direction apply a force in the X-axis direction to the lens holder 51
  • two coil springs 53y extending in the Y-axis direction apply a force in the Y-axis direction to the lens holder 51.
  • the position of the lens holder 51 in the X-axis direction can be adjusted by turning the X-axis adjustment screw member 52x
  • the position of the lens holder 51 in the Y-axis direction can be adjusted by turning the Y-axis adjustment screw member 52y.
  • the connector 13c is attached to a receiver 20R (not shown in FIG. 1) provided at the end of the protrusion 201p.
  • Two coil springs 53z extending in the Z-axis direction apply a force in the Z-axis direction to the lens holder 51.
  • a movable inner cylinder 54 is provided adjacent to the lens holder 51 inside the protrusion 201p.
  • a thread 54sw is formed at the end of the movable inner cylinder 54, and a thread 20sw is formed on the opposing inner circumferential surface of the protrusion 201p.
  • the first coating applied to the first surface 23a of the wedge prism 23 has the property of reflecting the first laser beam converted into collimated light. Therefore, the first laser beam is reflected by the first surface 23a and heads toward the focusing lens 24.
  • the second coating applied to the second surface 23b of the wedge prism 23 has the property of transmitting the second laser beam converted into collimated light.
  • the first coating has the property of transmitting the second laser beam that has passed through the second surface 23b. Therefore, the second laser beam passes through the second surface 23b and the first surface 23a in this order and heads toward the focusing lens 24.
  • the first coating also has the property of transmitting the guide light emitted from the guide light emission section 26.
  • the second coating also has the property of reflecting the guide light. Therefore, the guide light passes through the first surface 23a, is reflected by the second surface 23b, and passes through the first surface 23a again to proceed toward the focusing lens 24.
  • the positions of the first collimating lens 21 and the second collimating lens 22 are adjusted so that the first laser beam reflected by the first surface 23a and the second laser beam transmitted through the second surface 23b and the first surface 23a are superimposed on each other.
  • the attachment position of the guide light emitting unit 26 relative to the housing 201 and the direction in which the guide light is emitted are adjusted so that the guide light reflected by the second surface 23b travels along the same optical axis as the optical axis of the combined laser beam toward the focusing lens 24.
  • the position of the first collimator lens 21 in the X-axis, Y-axis, and Z-axis directions is adjusted by the position adjustment mechanism 50.
  • the position of the second collimator lens 22 in the X-axis, Y-axis, and Z-axis directions is adjusted by a position adjustment mechanism similar to the position adjustment mechanism 50.
  • the wedge prism 23 generates and emits a combined laser beam by combining the first laser beam and the second laser beam by superimposing them on each other.
  • the focusing lens 24 focuses the combined laser beam and makes it incident on the core of the process fiber 30.
  • the process fiber 30 is an optical fiber that transmits the combined laser beam to the processing head 40.
  • the processing head 40 includes a collimating lens 41, a bend mirror 42, and a focusing lens 43 in a housing 401.
  • the collimating lens 41 converts the divergent combined laser beam emitted from the end of the process fiber 30 into collimated light.
  • the collimating lens 41 bends the traveling direction of the combined laser beam converted into collimated light by 90 degrees.
  • the focusing lens 43 focuses the incident combined laser beam and irradiates it onto the sheet metal W to be processed.
  • the laser processing machine 100 may be a processing machine that cuts the sheet metal W, or may be a processing machine that welds the sheet metal W.
  • the sheet metal W is an example of a workpiece, and the workpiece is not limited to sheet metal.
  • the focusing lens 43 focuses the incident guide light and irradiates it on the metal sheet W.
  • the operator can determine the processing start position and check the processing trajectory. Note that in FIG. 1, the guide light shown by the dashed line is not shown as being incident on the processing head 40 and irradiated on the metal sheet W, but it is irradiated on the metal sheet W in the same way as the combined laser beam shown by the dashed line.
  • FIG. 3 is a characteristic diagram showing the reflection and transmission characteristics of the first and second coatings applied to the first surface 23a and second surface 23b of the wedge prism 23 provided in the beam coupler 20.
  • FIG. 3 shows the reflection and transmission characteristics Ca of the first coating and the reflection and transmission characteristics Cb of the second coating.
  • the reflection and transmission characteristics Ca of the first coating are characteristics that reflect the first laser beam having a wavelength ⁇ 1 and transmit the second laser beam having a wavelength ⁇ 2 and the guide light having a wavelength ⁇ 3.
  • the reflection and transmission characteristics Cb of the second coating are characteristics that reflect the wavelength ⁇ 3 and transmit the second laser beam having a wavelength ⁇ 2.
  • the beam coupler 20 equipped with the wedge prism 23 can supply a combined laser beam to the processing head 40 when the first and second laser beams are incident, and can supply the guide light to the processing head 40 when the guide light is incident.
  • the beam coupler 20 is configured so that the wedge prism 23 emits a combined laser beam obtained by superimposing the first laser beam and the second laser beam on each other, thereby enabling the laser beam to have a high output.
  • the beam coupler 20 is configured so that the wedge prism 23 emits the guide light onto the same optical axis as the optical axis of the combined laser beam, thereby realizing a configuration in which the combined laser beam and the guide light are emitted onto the same optical axis with a small number of optical components.
  • the laser processing machine 100 includes a processing head 40 that irradiates the combined laser beam transmitted by the first laser oscillator 11, the second laser oscillator 12, the beam coupler 20, and the process fiber 30 onto the metal sheet W to be processed.
  • the laser processing machine 100 can emit the combined laser beam and the guide light on the same optical axis with a small number of optical components, and the operator can process the metal sheet W after determining the processing start position and checking the processing trajectory.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

Selon la présente invention, une première surface (23a) d'un prisme en coin (23) a un premier revêtement, et une seconde surface (23b) de celui-ci a un second revêtement. Le prisme en coin (23) émet un faisceau laser combiné obtenu en superposant un premier faisceau laser réfléchi par la première surface (23a) et un second faisceau laser qui a été transmis à travers la seconde surface (23b) et la première surface (23a) dans l'ordre indiqué. Le second revêtement a la caractéristique de réfléchir la lumière de guidage. Le prisme en coin (23) émet la lumière de guidage qui a été réfléchie par la seconde surface (23b) et transmise à travers la première surface (23a), sur un axe optique qui est identique à un axe optique du faisceau laser combiné.
PCT/JP2023/031964 2022-10-12 2023-08-31 Dispositif de combinaison de faisceaux et machine de traitement laser WO2024080033A1 (fr)

Applications Claiming Priority (2)

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JP2022-164314 2022-10-12
JP2022164314A JP7377933B1 (ja) 2022-10-12 2022-10-12 ビーム結合装置及びレーザ加工機

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WO2024080033A1 true WO2024080033A1 (fr) 2024-04-18

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003225786A (ja) * 2002-01-30 2003-08-12 Uht Corp レーザー加工ユニット及び該レーザー加工ユニットを備えた加工装置
JP2003270566A (ja) * 2002-03-18 2003-09-25 Fuji Xerox Co Ltd 光源装置及びこれを用いた光学走査装置
JP2010153584A (ja) * 2008-12-25 2010-07-08 Mitsubishi Electric Corp 光モジュールおよび波長制御方法
JP2019193944A (ja) * 2018-05-01 2019-11-07 株式会社島津製作所 レーザ加工装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003225786A (ja) * 2002-01-30 2003-08-12 Uht Corp レーザー加工ユニット及び該レーザー加工ユニットを備えた加工装置
JP2003270566A (ja) * 2002-03-18 2003-09-25 Fuji Xerox Co Ltd 光源装置及びこれを用いた光学走査装置
JP2010153584A (ja) * 2008-12-25 2010-07-08 Mitsubishi Electric Corp 光モジュールおよび波長制御方法
JP2019193944A (ja) * 2018-05-01 2019-11-07 株式会社島津製作所 レーザ加工装置

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JP2024057512A (ja) 2024-04-24

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