WO2024070301A1 - 天井走行車システム - Google Patents

天井走行車システム Download PDF

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Publication number
WO2024070301A1
WO2024070301A1 PCT/JP2023/029636 JP2023029636W WO2024070301A1 WO 2024070301 A1 WO2024070301 A1 WO 2024070301A1 JP 2023029636 W JP2023029636 W JP 2023029636W WO 2024070301 A1 WO2024070301 A1 WO 2024070301A1
Authority
WO
WIPO (PCT)
Prior art keywords
running
traveling
rail
track
traveling vehicle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2023/029636
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
政佳 虎澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Priority to IL318809A priority Critical patent/IL318809A/en
Priority to CN202380040241.6A priority patent/CN119183430A/zh
Priority to EP23871543.7A priority patent/EP4556344A1/en
Priority to US19/104,499 priority patent/US20260048768A1/en
Priority to KR1020257012641A priority patent/KR20250073238A/ko
Priority to JP2024549854A priority patent/JPWO2024070301A1/ja
Publication of WO2024070301A1 publication Critical patent/WO2024070301A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B13/00—Other railway systems
    • B61B13/02—Rack railways
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B13/00—Other railway systems
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3221—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B3/00—Elevated railway systems with suspended vehicles
    • B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3218—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Definitions

  • One aspect of the present invention relates to an overhead vehicle system.
  • An overhead traveling vehicle system includes a track arranged in a lattice pattern, a running part that runs along the track, and an overhead traveling vehicle that has a main body part that is arranged below the track and suspended from the running part (see, for example, Patent Document 1).
  • the running part includes running wheels that roll on the track around a rotation shaft, and a running drive motor that drives the running wheels.
  • the running drive motor is provided below the track, and transmits driving force to the running wheels via a transmission mechanism that includes a belt or the like.
  • the dimension in the height direction from the traveling drive motor to the traveling wheels can be relatively large, making it desirable to make the traveling section more compact.
  • one aspect of the present invention aims to provide an overhead traveling vehicle system that allows for a compact running section.
  • An overhead traveling vehicle system includes a track, at least a portion of which is arranged in a grid pattern, a running section that runs along the track, and an overhead traveling vehicle having a main body section that is arranged below the track and suspended from the running section, the running section including running wheels that roll on the track around a rotation axis, and a running drive motor that drives the running wheels, the running drive motor being provided on the rotation axis of the running wheels.
  • This overhead traveling vehicle system allows the travel drive motor to be positioned by effectively utilizing the space above the track. This makes it possible to reduce the height dimension from the travel drive motor to the travel wheels, for example, and to make the travel section more compact.
  • the track has a plurality of first rails extending along a first direction and a plurality of second rails extending along a second direction intersecting the first direction, and a support wall is connected to the upper surface of each of the plurality of first rails and the plurality of second rails, and the support wall may be provided with a cutout portion that allows the travel drive motor to pass when the overhead traveling vehicle is traveling.
  • the support wall increases the strength of the track, and the cutout portion makes it possible to avoid interference of the travel drive motor with the support wall.
  • the traveling wheels are provided so as to be freely rotatable, and may include a steering drive unit for rotating the traveling wheels, and the steering drive unit may be provided below the track and below the traveling wheels.
  • the steering drive unit can be disposed in the dead space below the track and below the traveling wheels, and there is no need to dispose the steering drive unit between the top surface of the main body and the track, for example, and the height dimension of the overhead traveling vehicle can be reduced. As a result, the overhead traveling vehicle can be made compact.
  • the outer shape of the traveling drive motor may be included in the outer shape of the traveling wheel when viewed from the axial direction of the rotation shaft. In this case, it is possible to prevent the traveling part from becoming large due to the traveling drive motor.
  • the overhead traveling vehicle system described in (2) above includes a support part that rotatably supports the traveling wheels, a connecting part connected to the lower part of the support part, and a cable electrically connected to the traveling drive motor, and the track includes a plurality of intersection rails that are arranged with a gap between each of the ends of the first rail and the second rail, and the connecting part and the cable may pass through the gap and extend from above to below the track.
  • This makes it possible to increase the strength of the portion that passes through the gap and extends from above to below the track (hereinafter also referred to as the "narrow portion") compared to when a transmission mechanism such as a belt that transmits drive force to the traveling wheels is included.
  • One aspect of the present invention makes it possible to provide an overhead traveling vehicle system that allows for a compact running section.
  • FIG. 1 is a perspective view illustrating an example of an overhead traveling vehicle system according to an embodiment.
  • FIG. 2 is an exploded perspective view showing four rail units constituting the rail assembly in FIG. 1 and a connecting member connecting the rail units.
  • FIG. 3 is a side view showing the overhead traveling vehicle in FIG.
  • FIG. 4 is a perspective view showing the overhead traveling vehicle in FIG.
  • FIG. 5 is a perspective view showing only the rail portion of the rail assembly.
  • FIG. 6 is a cross-sectional view showing a connection portion between a plurality of rail units.
  • FIG. 7 is a side view showing the running unit, the wheel turning mechanism, and the track.
  • FIG. 8 is a cross-sectional view showing the running portion.
  • FIG. 9 is a perspective view showing the running unit and the wheel turning mechanism.
  • FIG. 10 is a perspective view showing the inside of the gear box in FIG. 9 exposed.
  • 11 is a cross-sectional perspective view showing the running unit and the wheel turning mechanism in FIG.
  • the overhead traveling vehicle system 1 is a grid system (transport system) for transporting an item M by an overhead traveling vehicle 2, for example, in a clean room of a semiconductor manufacturing factory.
  • the overhead traveling vehicle system 1 includes, for example, a plurality of overhead traveling vehicles 2 (hereinafter collectively referred to as "traveling vehicles 2"), a system controller 5 for controlling the plurality of traveling vehicles 2, and a track R on which the plurality of traveling vehicles 2 travel.
  • the traveling vehicles 2 move along the track R of the overhead traveling vehicle system 1.
  • the traveling vehicles 2 travel along the track R and transport items M, such as FOUPs (Front Opening Unified Pods) that house semiconductor wafers or reticle pods that house reticles.
  • FOUPs Front Opening Unified Pods
  • the traveling vehicles 2 may be referred to as carts, transport vehicles, transport carts, traveling carts, or the like.
  • the plurality of traveling vehicles 2 enables high-density transport of the items M, improving the transport efficiency of the items M.
  • the overhead traveling vehicle system 1 may include only one traveling vehicle 2.
  • the track R is provided on or near the ceiling of a building such as a clean room.
  • the track R is provided adjacent to, for example, a processing device, a stocker (automated warehouse), etc.
  • the processing device is, for example, an exposure device, a coater developer, a film forming device, an etching device, etc., and performs various processes on the semiconductor wafers in the goods M transported by the traveling vehicle 2.
  • the stocker stores the goods M transported by the traveling vehicle 2.
  • the track R is arranged in a lattice shape in a plan view (see also FIG. 5).
  • the track R extends horizontally.
  • the track R is constructed by arranging a plurality of rail units 100, each having a first rail R1, a second rail R2, and an intersection rail R3, in the X and Y directions.
  • the overhead traveling vehicle system 1 includes a plurality of rail units 100 arranged in the X and Y directions, and a plurality of connecting members 140 that connect the plurality of rail units 100 to each other.
  • the plurality of rail units 100 and the plurality of connecting members 140 form a rail assembly 200.
  • the rail assembly 200 is suspended from a ceiling (not shown) by a plurality of hanging members H at the portion where the rail units 100 are connected to each other by the connecting members 140.
  • Each rail unit 100 is a rectangular parallelepiped (frame-shaped) member and has the same configuration.
  • Each rail unit 100 includes two first rail members 110 arranged along the X direction, two second rail members 120 arranged along the Y direction, and four intersection rail members 130 arranged so that gaps are formed on the extension lines of the first rail members 110 and the second rail members 120 (i.e., the positions of the intersection points of the lattice).
  • the two parallel first rail members 110 and the two parallel second rail members 120 are arranged in a square shape, and the four intersection rail members 130 are arranged at the vertices of the square.
  • Each rail unit 100 is made of, for example, metal, and is an integrated unit formed after each part of the first rail member 110, the second rail member 120, and the cross rail member 130 is molded.
  • Each first rail member 110 includes a first beam portion 111 arranged at the upper end position of the rail unit 100 and extending in the X direction, a first rail R1 arranged at the lower end position of the rail unit 100 and extending in the X direction, and a first support wall 113 arranged between the first beam portion 111 and the first rail R1 and joined to the first beam portion 111 and the first rail R1.
  • Each second rail member 120 includes a second beam portion 121 arranged at the upper end position of the rail unit 100 and extending in the Y direction, a second rail R2 arranged at the lower end position of the rail unit 100 and extending in the Y direction, and a second support wall 123 arranged between the second beam portion 121 and the second rail R2 and joined to the second beam portion 121 and the second rail R2.
  • the multiple first beam portions 111 and the multiple second beam portions 121 form a lattice-like structure extending along the XY plane at the upper end position of the rail assembly 200.
  • the first support wall 113 extends along the XZ plane.
  • the second support wall 123 extends along the YZ plane.
  • the intersection rail member 130 includes an intersection support pillar 133 that extends along the Z direction (vertical direction) at the position where the first beam portion 111 and the second beam portion 121 are joined at a right angle, and an intersection rail R3 that is provided at the lower end of the intersection support pillar 133.
  • the first rails R1 each extend along the X direction.
  • the second rails R2 each extend along the Y direction.
  • the track R is formed in a lattice shape in a plan view by the first rails R1 and the second rails R2.
  • the track R forms a plurality of squares by the first rails R1 and the second rails R2.
  • the intersection rail R3 is disposed at a portion corresponding to the intersection of the first rail R1 and the second rail R2.
  • the intersection rail R3 is adjacent to the first rail R1 with a gap in the X direction and adjacent to the second rail R2 with a gap in the Y direction.
  • intersection rail R3 is used when the traveling vehicle 2 travels along the first rail R1, when the traveling vehicle 2 travels along the second rail R2, and when the traveling vehicle 2 travels from the first rail R1 to the second rail R2 or from the second rail R2 to the first rail R1.
  • Each rail unit 100 forms a square (or rectangular) track R corresponding to one square on the inside.
  • a plurality of first rails R1 extend in a row in the X direction
  • a plurality of second rails R2 extend in a row in the Y direction.
  • two intersecting rails R3 are arranged at intervals between one first rail R1 and another first rail R1.
  • two intersecting rails R3 are arranged at intervals between one second rail R2 and another second rail R2.
  • a plurality of first rails R1, a plurality of second rails R2, and a plurality of intersection rails R3 are arranged at a predetermined interval from each other, thereby constructing a track R. Between each of the first rails R1 and each of the intersection rails R3, a gap G corresponding to the above-mentioned interval is formed. Between each of the second rails R2 and each of the intersection rails R3, a gap G corresponding to the above-mentioned interval is formed.
  • the gap G in the track R has a constant size.
  • Each of the first rails R1 includes a first running surface R1a that is flat and horizontal on the upper surface, and the running wheels 31 of the running vehicle 2 run on the first running surface R1a in the X direction (first running direction D1).
  • Each of the second rails R2 includes a second running surface R2a that is flat and horizontal on the upper surface, and the running wheels 31 of the running vehicle 2 run on the second running surface R2a in the Y direction (second running direction D2).
  • the intersection rail R3 includes a crossing running surface R3a that is flat and horizontal on the upper surface.
  • the heights of the first running surface R1a, the second running surface R2a, and the intersection running surface R3a are equal throughout the entire track R.
  • the first running surface R1a, the second running surface R2a, and the intersection running surface R3a are arranged on the same or nearly the same horizontal plane.
  • no gaps as large as the gap G are formed between the four intersecting rails R3 described above.
  • the traveling wheels 31 of the traveling vehicle 2 run on the intersecting running surface R3a. At that time, the traveling wheels 31 pass over any two of the four intersecting rails R3 described above.
  • the traveling vehicle 2 changes its traveling direction between the rail units 100 (changing its traveling direction by 90 degrees, i.e., when steering), the traveling wheels 31 of the traveling vehicle 2 pass over the intersecting running surface R3a (while changing direction).
  • a lattice-shaped track R is formed by the first rail member 110, the second rail member 120, and the intersection rail member 130.
  • the layout of the lattice-shaped track R in the overhead traveling vehicle system 1 can be adjusted or changed as appropriate by arranging the multiple rail units 100 in any desired arrangement (including adding or deleting rail units 100).
  • each connecting member 140 includes an upper connecting member 141 and a lower connecting member 142.
  • the upper connecting member 141 which is a plate-like or frame-like member extending horizontally, is attached to the upper surface of one of the four corners of the multiple (typically four) rail units 100.
  • the upper connecting member 141 abuts near the intersection of the first beam portion 111 and the second beam portion 121 in each rail unit 100.
  • the lower connecting member 142 which is a plate-like or frame-like member extending horizontally, supports the lower surface of one of the four corners of the multiple (typically four) rail units 100.
  • the lower connecting member 142 abuts against the intersection rail R3 in each rail unit 100.
  • the upper connecting member 141 and/or the lower connecting member 142 are fixed to the rail units 100 by fastening members (not shown) or the like, thereby connecting the rail units 100 to each other.
  • a space 100e extending in the Z direction is formed between the rail units 100, and a space R3e extending in the Z direction is formed between the four intersection rails R3 adjacent in the X and Y directions (the central parts in a plan view).
  • the hanging member H is inserted into the space 100e and the space R3e, and the upper connecting member 141 and/or the lower connecting member 142 are fixed to the hanging member H.
  • the overhead traveling vehicle system 1 includes a communication system (not shown).
  • the communication system is used for communication between the traveling vehicles 2 and the system controller 5.
  • the traveling vehicles 2 and the system controller 5 are each connected to each other so that they can communicate with each other via the communication system.
  • the traveling vehicle 2 is provided so as to be able to travel along the track R.
  • the traveling vehicle 2 has a traveling carriage 20 that travels on the track R, and a main body 10 that is attached to the lower part of the traveling carriage 20 and can freely turn with respect to the traveling carriage 20.
  • the traveling carriage 20 includes a carriage unit 50, for example, rectangular, that is arranged below the track R, a running section 30 that is provided at the four corners of the carriage unit 50 in a plan view and protrudes upward from the carriage unit 50, and four wheel turning mechanisms 40 that turn each of the four running wheels 31 of the running section 30 with respect to the carriage unit 50.
  • the running section 30 and the wheel turning mechanism 40 are integrated as one unit.
  • a carriage controller (control unit) 8 is provided inside the carriage unit 50.
  • the main body 10 is disposed below the track R and suspended from the running part 30.
  • the main body 10 has a main body frame 12 formed, for example, in a cylindrical shape.
  • the main body frame 12 includes a disk-shaped top plate part 12a and a cylindrical frame 12b that hangs down from the periphery of the top plate part 12a, and has a shape with an open bottom.
  • the main body 10 is formed to a size that fits into one square (see Figure 1) on the track R in a plan view.
  • the running vehicle 2 can pass other running vehicles 2 running on the adjacent first rail R1 or second rail R2.
  • the main body 10 is equipped with a transfer device 18 disposed inside the main body frame 12.
  • the transfer device 18 is, for example, rectangular in a plan view.
  • the cylindrical frame 12b is open in a part of the circumferential direction. The range in which the open part (notch) is formed is large enough to allow the transfer device 18 to pass through. When moving horizontally, the transfer device 18 passes through an opening in the cylindrical frame
  • the main body 10 is attached to the bottom of the bogie unit 50 and can rotate freely around a rotation axis L10 in the Z direction relative to the bogie unit 50.
  • the running wheels 31 provided at the four corners of the bogie unit 50 are placed on the track R (on the first running surface R1a, the second running surface R2a, or the intersection running surface R3a).
  • the bogie unit 50 is suspended from the track R via the four running wheels 31 and the four wheel turning mechanisms 40.
  • the four running wheels 31 allow the bogie unit 50 and the main body 10 to be stably suspended, and the main body 10 to run stably.
  • the running vehicle 2 is suspended and supported by the running wheels 31 that run along the track R, and moves below the track R.
  • the transfer device 18 moves horizontally relative to the main body 10 to transfer the item M between the load port (mounting platform).
  • the transfer device 18 is provided below the top plate 12a of the main body frame 12.
  • the main body 10 including the transfer device 18 can rotate around the rotation axis L10 by a rotation drive unit such as an electric motor (not shown) provided on the top plate 12a.
  • the transfer device 18 has an item holding unit 13 that holds the item M below the track R, a lifting drive unit 14 that raises and lowers the item holding unit 13 in the vertical direction, and a slide mechanism 11 that slides the lifting drive unit 14 in the horizontal direction.
  • the slide mechanism 11 is held on the underside of the top plate 12a.
  • a rotation drive unit 16 that rotates the lifting drive unit 14 around the rotation axis L14 relative to the slide mechanism 11 is provided between the slide mechanism 11 and the lifting drive unit 14.
  • the rotation drive unit 16 is provided below the slide mechanism 11, and the lift drive unit 14 is provided below the rotation drive unit 16.
  • the item holder 13 is provided below the lift drive unit 14 via multiple hanging members 13b.
  • the load port is the transfer destination or source of the traveling vehicle 2, and is the point where the item M is handed over to and from the traveling vehicle 2.
  • the item holding part 13 holds the item M by suspending it by gripping the flange part Ma of the item M.
  • the item holding part 13 is, for example, a chuck having a claw part 13a that can move horizontally.
  • the item holding part 13 holds the item M by inserting the claw part 13a below the flange part Ma of the item M and raising the item holding part 13.
  • the item holding part 13 is connected to a hanging member 13b such as a wire or belt.
  • the lifting drive unit 14 is, for example, a hoist, which lowers the item holding unit 13 by paying out the hanging member 13b, and raises the item holding unit 13 by winding up the hanging member 13b.
  • the lifting drive unit 14 is controlled by the cart controller 8, and lowers or raises the item holding unit 13 at a predetermined speed.
  • the lifting drive unit 14 is also controlled by the cart controller 8, and holds the item holding unit 13 at a target height.
  • the slide mechanism 11 has multiple movable plates arranged, for example, stacked in the Z direction.
  • the slide mechanism 11 moves the rotation drive unit 16, the lift drive unit 14, and the item holding unit 13 attached to the lowest movable plate in any direction in the horizontal plane.
  • the direction of movement of the movable plate in the slide mechanism 11 is determined by the rotation angle of the main body 10 relative to the cart unit 50.
  • the orientation of the transfer device 18 and the main body frame 12 is set so that the direction of movement of the movable plate coincides with the position of the opening of the cylindrical frame 12b.
  • the rotation drive unit 16 includes, for example, an electric motor, and rotates the lift drive unit 14 (and the item holding unit 13) within a predetermined angle range around a rotation axis L14 extending vertically.
  • the angle at which the lift drive unit 14 can be rotated by the rotation drive unit 16 is, for example, any angle less than 180 degrees, but the upper limit is not limited to 180 degrees.
  • the rotation drive unit 16 can orient the item holding unit 13 (or the item M held by the item holding unit 13) protruding from the side in a desired direction.
  • the slide mechanism 11 and the rotation drive unit 16 are controlled by the cart controller 8.
  • the lift drive unit 14 can be rotated by the rotation drive unit 16 even when the movable plate of the slide mechanism 11 is stored without moving (as shown by the solid line in FIG. 3). In that case, for example, the rotation axis L14 of the lift drive unit 14 coincides with the rotation axis L10 of the main body unit 10.
  • the cart unit 50 has a cylindrical support member (cylindrical member) 52 at the lower end.
  • the top plate portion 12a of the main body frame 12 is rotatably attached to the underside of the support member 52.
  • a rotation drive unit (not shown), such as an electric motor, is provided on the top plate portion 12a.
  • the main body frame 12 rotates around a rotation axis L10 extending vertically to the cart unit 50.
  • the angle at which the main body frame 12 can rotate is, for example, any angle between 360 degrees and 540 degrees, but the upper limit is not limited to 540 degrees and the lower limit is not limited to 360 degrees.
  • the slide mechanism 11 is attached to the underside of the top plate portion 12a, and the top plate portion 12a supports the slide mechanism 11.
  • the main body frame 12 and the transfer device 18 are integrated, and the main body frame 12 and the transfer device 18 rotate together.
  • the traveling vehicle 2 can transfer the item M to and from the load port by using the transfer device 18.
  • a cover may be attached to the outer surface of the cylindrical frame 12b.
  • the cover surrounds the transfer device 18 and the item M held by the transfer device 18.
  • the cover is cylindrical with an open bottom end, and has a cutout at the portion where the movable plate of the slide mechanism 11 protrudes (the above-mentioned open portion).
  • the running unit 30 has four running wheels 31. Two auxiliary wheels 32 are provided for each running wheel 31. As shown in FIG. 4, the running wheels 31 are provided at the four corners of the cart unit 50 so as to protrude upward from the upper cover 51. Each running wheel 31 can rotate around a horizontal or nearly horizontal axle axis along the XY plane.
  • a running drive motor 33 is provided on the rotation axis L31 of each running wheel 31. Each running wheel 31 is driven to rotate by the driving force of the running drive motor 33.
  • the running drive motor 33 is configured to be able to switch between forward and reverse rotation, for example.
  • Each running wheel 31 rolls on the track R with the rotation axis L31 (see FIGS. 7 and 8) as the base axis.
  • Each running wheel 31 rolls on the running surfaces R1a, R2a, and R3a of the first rail R1, the second rail R2, and the intersection rail R3, causing the running car 2 to run. That is, the running unit 30 runs along the track R. Note that it is not limited to the configuration in which all of the four running wheels 31 are rotated by the driving force of the running drive motor 33, and it is also possible to configure the running wheels 31 to be rotated only in part.
  • wheel turning mechanisms 40 (steering drive units) are fixed to a frame (not shown) in the bogie unit 50, and a pedestal 34 is connected to each wheel turning mechanism 40 via the turning shaft of the wheel turning mechanism 40.
  • a running wheel 31, two auxiliary wheels 32, and one running drive motor 33 are attached to the pedestal 34 via a connecting portion 35 and a support portion 36 (support member).
  • a square-shaped top cover 51 is provided on the top surface of the housing 53, and the pedestal 34 is arranged in the notches formed in the four corners of the top cover 51.
  • the connecting portion 35, running wheels 31, auxiliary wheels 32, and running drive motor 33 are arranged above the top cover 51.
  • the connecting portion 35 connects the bogie unit 50 (specifically, the wheel turning mechanism 40 fixed in the bogie unit 50) and the running wheels 31.
  • This connecting structure places the bogie unit 50 and the main body 10 below the track R and suspended from the running portion 30.
  • the connecting portion 35 is formed to a thickness that allows it to pass through the gap G between the first rail R1 and the intersection rail R3, and between the second rail R2 and the intersection rail R3.
  • the support portion 36 is provided on the upper portion of the connecting portion 35, and rotatably supports the rotation shaft of the running wheels 31 and the rotation shaft of the auxiliary wheels 32. The support portion 36 maintains the relative positions of the running wheels 31 and the auxiliary wheels 32.
  • the running wheels 31 are rotatable about the vertically extending pivot axis L30.
  • the four pivot axes L30 are arranged at the vertices of a square in a plan view, and the rotation axis L10 is located at the center of the pivot axis L30.
  • the four pivot axes L30 are arranged at positions that are four-fold symmetrical with respect to the rotation axis L10 of the main body 10.
  • the positions of the running wheels 31 and the pivot axes L30 are different (displaced).
  • the running wheels 31 are rotated by the wheel rotation mechanism 40, and as a result, the running direction of the running vehicle 2 can be changed.
  • the auxiliary wheels 32 are arranged one each in front and behind the running wheel 31 in the running direction. Each of the auxiliary wheels 32 can rotate around a horizontal or nearly horizontal axle axis along the XY plane.
  • the lower end of the auxiliary wheel 32 is set, for example, to be higher than the lower end of the running wheel 31. Therefore, when the running wheel 31 is running on the running surfaces R1a, R2a, R3a, the auxiliary wheel 32 does not contact the running surfaces R1a, R2a, R3a.
  • auxiliary wheel 32 comes into contact with auxiliary members (not shown) provided on the first rail R1 and the second rail R2, suppressing the sagging of the running wheel 31.
  • auxiliary wheels 32 there is no limitation to providing two auxiliary wheels 32 for one running wheel 31; for example, one auxiliary wheel 32 may be provided for one running wheel 31, or no auxiliary wheel 32 may be provided.
  • the wheel turning mechanism 40 is a mechanism for turning the running wheels 31.
  • the four wheel turning mechanisms 40 are arranged, for example, at the four corners of the housing 53 of the bogie unit 50.
  • Each wheel turning mechanism 40 has a steering motor 43 and a driving force transmission unit 42 provided between the steering motor 43 and the running wheels 31.
  • the driving force transmission unit 42 is fixed to a frame (not shown) in the bogie unit 50.
  • the driving force transmission unit 42 and the base unit 34 are connected via a turning shaft.
  • Each wheel turning mechanism 40 turns the base unit 34, the connecting unit 35, the support unit 36, the running wheels 31, the auxiliary wheels 32, and the running drive motor 33 together around the turning shaft L30.
  • each running wheel 31 is turned 90 degrees around each turning shaft L30. This causes the running wheels 31 to turn on the crossing rail R3. This allows the traveling vehicle 2 to turn.
  • Turning means switching from a first state in which the traveling vehicle 2 travels in the first traveling direction D1 to a second state in which the traveling vehicle 2 travels in the second traveling direction D2, or from the second state in which the traveling vehicle 2 travels in the second traveling direction D2 to the first state in which the traveling vehicle 2 travels in the first traveling direction D1.
  • the traveling vehicle 2 turns, for example, when the traveling vehicle 2 is stopped.
  • the traveling vehicle 2 may also turn when the traveling vehicle 2 is stopped but the object M is moving (for example, turning).
  • the driving of the wheel turning mechanism 40 is controlled by the cart controller 8.
  • the bogie controller 8 performs overall control of the traveling vehicle 2.
  • the bogie controller 8 is a computer consisting of a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), etc.
  • the bogie controller 8 can be configured as software in which a program stored in the ROM is loaded onto the RAM and executed by the CPU, for example.
  • the bogie controller 8 may be configured as hardware such as electronic circuits.
  • the bogie controller 8 may be configured as a single device, or may be configured as multiple devices. When configured as multiple devices, these are connected via a communication network such as the Internet or an intranet to logically construct a single bogie controller 8.
  • the bogie controller 8 is provided in the bogie unit 50, for example.
  • the trolley controller 8 controls the traveling of the traveling vehicle 2 based on the transport command.
  • the trolley controller 8 controls the traveling of the traveling vehicle 2 by controlling the travel drive motor 33 and the steering motor 43, etc.
  • the trolley controller 8 controls, for example, the traveling speed, operations related to stopping, and operations related to changing direction.
  • the trolley controller 8 controls the transfer operation of the traveling vehicle 2 based on the transport command.
  • the trolley controller 8 controls the rotation (rotation) of the main body 10 (main body frame 12 and transfer device 18) to control the transfer direction of the transfer device 18.
  • the trolley controller 8 controls the transfer operation of the traveling vehicle 2 by controlling the transfer device 18, etc.
  • the trolley controller 8 controls the load gripping operation to grip the item M placed at the specified load port, and the unloading operation to lower the held item M to the specified load port.
  • the system controller 5 is a computer consisting of a CPU, ROM, RAM, etc.
  • the system controller 5 can be configured as software, for example, in which a program stored in the ROM is loaded onto the RAM and executed by the CPU.
  • the system controller 5 may be configured as hardware such as electronic circuits.
  • the system controller 5 may be configured as one device, or multiple devices. When configured as multiple devices, these are connected via a communication network such as the Internet or an intranet to logically construct a single system controller 5. At least some of the various controls of the system controller 5 may be executed by the trolley controller 8.
  • the system controller 5 selects one of the multiple traveling vehicles 2 capable of transporting the item M, and assigns a transport command to the selected traveling vehicle 2.
  • the transport command includes a travel command to cause the traveling vehicle 2 to travel to the load port, and a command to grab the item M placed at the load port or a command to unload the held item M to the load port.
  • Figs. 7 and 8 show an example in which the running wheel 31 runs on the intersection running surface R3a in the Y direction.
  • Fig. 8 shows a cross section of the running unit 30 along the XZ plane.
  • the running unit 30 has the running wheel 31, the running drive motor 33, the support unit 36, and the connecting unit 35.
  • the running wheel 31 rolls on the track R with the rotation axis L31 as the base axis.
  • the running wheel 31 rotates on the pivot axis L30.
  • the running wheel 31 can rotate on the intersection rail R3.
  • the running wheel 31 includes an outer wheel portion 31a and a wheel portion 31b.
  • the traveling drive motor 33 is a drive source that generates a driving force for rotating the traveling wheel 31.
  • the traveling drive motor 33 drives the traveling wheel 31.
  • the traveling drive motor 33 is arranged so that the output shaft 33a of the traveling drive motor 33 is coaxial with the rotation axis L31 of the traveling wheel 31.
  • the traveling drive motor 33 is provided on the rotation axis L31 of the traveling wheel 31. Specifically, when viewed from the direction along the rotation axis L31, the traveling drive motor 33 is arranged so that it overlaps with the rotation axis L31.
  • the output shaft 33a of the traveling drive motor 33 is connected to the wheel portion 31b of the traveling wheel 31 via a connection portion 37.
  • the connection portion 37 includes, for example, a reducer that reduces the rotation speed of the traveling drive motor 33, and an axle that transmits the driving force of the traveling drive motor 33 to the traveling wheel 31.
  • the outer diameter of the traveling drive motor 33 is smaller than the outer diameter of the traveling wheel 31.
  • the outer shape of the traveling drive motor 33 is included in the outer shape of the traveling wheel 31.
  • a cable Ca is electrically connected to the traveling drive motor 33.
  • the traveling drive motor 33 is electrically connected to the carriage controller 8, which will be described later, via the cable Ca.
  • the traveling drive motor 33 is driven based on instructions input from the carriage controller 8, thereby driving the traveling wheel 31 to rotate.
  • the support portion 36 rotatably supports the running wheel 31 and the auxiliary wheel 32.
  • the support portion 36 supports the axle of the running wheel 31 so that the running wheel 31 can rotate in a rotational direction around the rotation axis L31.
  • the support portion 36 supports the axle of the auxiliary wheel 32 so that the auxiliary wheel 32 can rotate in a rotational direction around the rotation axis of the auxiliary wheel 32.
  • the support portion 36 extends in the vertical direction, and rotatably supports the running wheel 31 via the connection portion 37, and rotatably supports the auxiliary wheel 32.
  • the connecting part 35 is connected to the lower part of the support part 36.
  • the connecting part 35 extends downward from the lower part of the support part 36 while bending inward (towards the travel drive motor 33), extends downward in a straight line, and then extends so as to bend outward (towards the travel wheel 31).
  • the cable Ca is arranged to run along the connecting part 35.
  • the base part 34 is a substantially rectangular parallelepiped part that continues to the lower part of the connecting part 35 (see FIG. 4).
  • the base part 34 is fixed at its upper end to the rotating cylinder 48.
  • a first support wall (support wall) 113 is connected to the upper surfaces of the multiple first rails R1, and a second support wall (support wall) 123 is connected to the upper surfaces of the multiple second rails R2.
  • a first cutout portion K1 is formed in the first support wall 113 and the second support wall 123. The first cutout portion K1 allows the running part 30 to pass through when the running vehicle 2 is running. For example, the first cutout portion K1 and the second cutout portion K2 allow the running wheel 31 and the running drive motor 33 to pass through.
  • the first cutout portion K1 of the first support wall 113 has a shape in which the X-direction end of the first support wall 113 is cut out so as to open outward in the X-direction when viewed from the Y-direction.
  • the first cutout portion K1 of the second support wall 123 has a shape in which the Y-direction end of the second support wall 123 is cut out so as to open outward in the Y-direction when viewed from the X-direction.
  • the first cutout portion K1 includes a first portion K11 and a second portion K12.
  • the first portion K11 and the second portion K12 are continuous with each other.
  • the first portion K11 allows a part of the side of the travel drive motor 33 opposite the travel wheel 31 to pass through.
  • the second portion K12 allows other parts of the travel drive motor 33, the connection portion 37, the support portion 36, the travel wheel 31, and the auxiliary wheel 32 to pass through.
  • a second cutout portion K2 is formed on the side of the intersection support pillar 133.
  • the second cutout portion K2 allows the running wheel 31 and the auxiliary wheel 32 to pass through.
  • the second cutout portion K2 has a shape that is cut out so as to open on the first support wall 113 or the second support wall 123 side.
  • the second cutout portion K2 is formed so as to be continuous with the first cutout portion K1. In addition, the second cutout portion K2 may not be present.
  • the wheel turning mechanism (steering drive unit) 40 will be described in detail with reference to Fig. 7 and Fig. 9 to Fig. 11.
  • the wheel turning mechanism 40 is provided below the track R and below the running wheels 31.
  • the driving force transmission unit 42 of the wheel turning mechanism 40 is a mechanism that transmits the driving force generated in the steering motor 43 to the running unit 30.
  • the driving force transmission unit 42 has a gear box 44, a housing 45, and a rotating cylinder 48.
  • the gear box 44 is provided below the base unit 34.
  • the housing 45 is disposed below the gear box 44.
  • a fixing member 45a is provided on the side of the housing 45.
  • the housing 45 is fixed to the frame 54 in the cart unit 50 via the fixing member 45a (see Fig. 7).
  • the swivel tube 48 has, for example, a cylindrical shape.
  • the swivel tube 48 has a swivel axis L30 as its axial direction, and passes through the gear box 44 and the housing 45.
  • the swivel tube 48 is provided so as to be rotatable about the swivel axis L30 relative to the gear box 44 and the housing 45.
  • the base portion 34 is connected to the upper end of the swivel tube 48.
  • the lower end of the swivel tube 48 protrudes downward from the housing 45.
  • a slip-out prevention member 49 is provided at the lower end of the swivel tube 48.
  • the outer diameter of the slip-out prevention member 49 is larger than the outer diameter of the through hole in the housing 45 through which the swivel tube 48 passes. This prevents the swivel tube 48 from slipping out upward.
  • the steering motor 43 of the wheel turning mechanism 40 is a driving source that generates the driving force for turning.
  • the steering motor 43 is disposed below the gear box 44.
  • the steering motor 43 is fixed to the housing 45.
  • the output shaft 43b of the steering motor 43 is arranged so as to be parallel to the turning axis L30.
  • the output shaft 43b is connected to the driving force transmission unit 42.
  • the gear box 44 has a first gear 46, a second gear 47, and a bearing 43c therein.
  • the first gear 46 is, for example, a spur gear.
  • the first gear 46 is arranged with the vertical direction as its axial direction.
  • the first gear 46 is coaxially connected to the output shaft 43b of the steering motor 43.
  • the second gear 47 is, for example, a sector gear.
  • the second gear 47 is arranged with the swivel axis L30 as its axial direction.
  • the second gear 47 meshes with the first gear 46.
  • the second gear 47 is engaged with the outer peripheral surface of the swivel tube 48 in the direction of rotation about the swivel axis L30.
  • a cylinder to which the inner peripheral surface of the second gear 47 is fixed can rotate in the direction of rotation about the swivel axis L30, and the inner peripheral surface of this cylinder and the outer peripheral surface of the swivel tube 48 can rotate synchronously so as to be integrated in the direction of rotation via a key groove.
  • the second gear 47 is connected to the support portion 36 via the rotating cylinder 48, the base portion 34, and the connecting portion 35.
  • the bearing 43c rotatably supports the output shaft 43b of the steering motor 43.
  • the bearing 43c is disposed below the first gear 46.
  • the wheel turning mechanism 40 configured as above, when the running wheel 31 turns, first, a driving force is generated in the steering motor 43, and the driving force is transmitted to the first gear 46 via the output shaft 43b. As a result, the first gear 46 rotates, and the second gear 47 meshing with the first gear 46 rotates about the turning axis L30. In synchronization with the rotation of the second gear 47, the turning cylinder 48 rotates, for example, 90 degrees about the turning axis L30. As a result, the base portion 34, the connecting portion 35, and the support portion 36 rotate 90 degrees about the turning axis L30, and the running wheel 31 turns 90 degrees about the turning axis L30.
  • a guide roller that abuts against the side of the intersection rail R3 may be provided between the running wheel 31 and the wheel turning mechanism 40 (for example, near the connecting portion 35). The guide roller prevents the running carriage 20 (running vehicle 2) from shifting position relative to the track R.
  • the traveling drive motor 33 that drives the traveling wheel 31 is provided on the rotation axis L31 of the traveling wheel 31 that rolls on the track R. Therefore, in the overhead traveling vehicle system 1, the traveling drive motor 33 can be arranged by effectively utilizing the space above the track R. This makes it possible to reduce the height dimension from the traveling drive motor 33 to the traveling wheel 31, for example, and make the traveling unit 30 more compact. It becomes possible to make a compact system.
  • a first support wall 113 and a second support wall 123 are connected to the upper surfaces of the multiple first rails R1 and the multiple second rails R2, respectively, and the first support wall 113 and the second support wall 123 are provided with a first cutout portion K1 that allows the travel drive motor 33 to pass through when the traveling vehicle 2 is traveling.
  • the first support wall 113 and the second support wall 123 increase the strength of the track R, and the first cutout portion K1 makes it possible to avoid interference of the travel drive motor 33 with the first support wall 113 and the second support wall 123.
  • the wheel turning mechanism 40 is provided below the track R and below the traveling wheels 31.
  • the wheel turning mechanism 40 can be arranged in the dead space below the track R and below the traveling wheels 31. This eliminates the need to arrange the wheel turning mechanism 40 between the top cover 51 of the bogie unit 50 and the track R, and the height dimension of the traveling vehicle 2 can be reduced. As a result, the traveling vehicle 2 can be made more compact.
  • the external shape of the traveling drive motor 33 is included in the external shape of the traveling wheel 31.
  • the traveling wheel 31 can be made larger in diameter to realize a well-balanced structure of the traveling section 30 in the traveling vehicle 2.
  • the traveling wheel 31 can overcome the gap G more reliably.
  • the increase in size of the traveling section 30 due to the traveling drive motor 33 can be suppressed.
  • the connecting part 35 and the cable C pass through the gap G, for example, when the traveling vehicle 2 travels on the first rail R1 and crosses the second rail R2, or when the traveling vehicle 2 travels on the second rail R2 and crosses the first rail R1. Since there is no need to provide the connecting part 35 with a transmission mechanism such as a belt that transmits driving force to the traveling wheels 31, it is possible to increase the strength of the connecting part 35, etc.
  • the overhead traveling vehicle system 1 does not require a transmission mechanism such as a belt between the traveling drive motor 33 and the traveling wheels 31, the following effects are achieved.
  • Backlash can be reduced and rigidity can be improved.
  • Stop position accuracy can be improved.
  • the size of the guide roller can be increased. The structure can be simplified and productivity can be improved.
  • the first gear 46 and the second gear 47 are provided inside the gear box 44, not in the top cover 51 of the cart unit 50. Therefore, compared to a structure in which gears such as rack gears are provided directly on the main body 10, it is possible to suppress friction between the gears caused by vibrations during traveling, etc.
  • the travel drive motor 33 is arranged so that the output shaft 33a of the travel drive motor 33 is coaxial with the rotation axis L31, but this is not limited to the above. As long as the travel drive motor 33 is arranged on the rotation axis L31, the output shaft 33a may be configured to be offset from the rotation axis L31.
  • the traveling vehicle is an overhead traveling vehicle, but the traveling vehicle may be a tracked vehicle that travels on a track installed on the ground.
  • a grid system is used as the overhead traveling vehicle system 1, but the overhead traveling vehicle system 1 is not limited to a grid system.
  • an AGV Automated Guided Vehicle
  • various known systems that travel on a grid-shaped traveling path may be used.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transportation (AREA)
  • Platform Screen Doors And Railroad Systems (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
PCT/JP2023/029636 2022-09-29 2023-08-16 天井走行車システム Ceased WO2024070301A1 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IL318809A IL318809A (en) 2022-09-29 2023-08-16 Overhead traveling vehicle system
CN202380040241.6A CN119183430A (zh) 2022-09-29 2023-08-16 空中行驶车系统
EP23871543.7A EP4556344A1 (en) 2022-09-29 2023-08-16 Overhead traveling vehicle system
US19/104,499 US20260048768A1 (en) 2022-09-29 2023-08-16 Overhead traveling vehicle system
KR1020257012641A KR20250073238A (ko) 2022-09-29 2023-08-16 천장 주행차 시스템
JP2024549854A JPWO2024070301A1 (https=) 2022-09-29 2023-08-16

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-156082 2022-09-29
JP2022156082 2022-09-29

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US (1) US20260048768A1 (https=)
EP (1) EP4556344A1 (https=)
JP (1) JPWO2024070301A1 (https=)
KR (1) KR20250073238A (https=)
CN (1) CN119183430A (https=)
IL (1) IL318809A (https=)
WO (1) WO2024070301A1 (https=)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837973Y1 (https=) * 1970-09-14 1973-11-10
US20110006026A1 (en) * 2009-07-13 2011-01-13 Samsung Electronics Co., Ltd. Intersection navigation system
JP2012040961A (ja) * 2010-08-19 2012-03-01 Daifuku Co Ltd 物品搬送設備
JP2016175506A (ja) * 2015-03-19 2016-10-06 村田機械株式会社 搬送台車と搬送台車システム
WO2019102743A1 (ja) * 2017-11-22 2019-05-31 村田機械株式会社 走行台車
JP7070704B2 (ja) 2018-11-28 2022-05-18 村田機械株式会社 走行車システム

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837973Y1 (https=) * 1970-09-14 1973-11-10
US20110006026A1 (en) * 2009-07-13 2011-01-13 Samsung Electronics Co., Ltd. Intersection navigation system
JP2012040961A (ja) * 2010-08-19 2012-03-01 Daifuku Co Ltd 物品搬送設備
JP2016175506A (ja) * 2015-03-19 2016-10-06 村田機械株式会社 搬送台車と搬送台車システム
WO2019102743A1 (ja) * 2017-11-22 2019-05-31 村田機械株式会社 走行台車
JP7070704B2 (ja) 2018-11-28 2022-05-18 村田機械株式会社 走行車システム

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JPWO2024070301A1 (https=) 2024-04-04
IL318809A (en) 2025-04-01
CN119183430A (zh) 2024-12-24
KR20250073238A (ko) 2025-05-27
EP4556344A1 (en) 2025-05-21
TW202417352A (zh) 2024-05-01
US20260048768A1 (en) 2026-02-19

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