KR20250073238A - 천장 주행차 시스템 - Google Patents

천장 주행차 시스템 Download PDF

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Publication number
KR20250073238A
KR20250073238A KR1020257012641A KR20257012641A KR20250073238A KR 20250073238 A KR20250073238 A KR 20250073238A KR 1020257012641 A KR1020257012641 A KR 1020257012641A KR 20257012641 A KR20257012641 A KR 20257012641A KR 20250073238 A KR20250073238 A KR 20250073238A
Authority
KR
South Korea
Prior art keywords
driving
track
rail
wheel
overhead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020257012641A
Other languages
English (en)
Korean (ko)
Inventor
마샤요시 토라자와
Original Assignee
무라다기카이가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 무라다기카이가부시끼가이샤 filed Critical 무라다기카이가부시끼가이샤
Publication of KR20250073238A publication Critical patent/KR20250073238A/ko
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B13/00—Other railway systems
    • B61B13/02—Rack railways
    • H01L21/67733—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B13/00—Other railway systems
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3221—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B3/00—Elevated railway systems with suspended vehicles
    • B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H01L21/6773—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3218—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transportation (AREA)
  • Platform Screen Doors And Railroad Systems (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
KR1020257012641A 2022-09-29 2023-08-16 천장 주행차 시스템 Pending KR20250073238A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2022-156082 2022-09-29
JP2022156082 2022-09-29
PCT/JP2023/029636 WO2024070301A1 (ja) 2022-09-29 2023-08-16 天井走行車システム

Publications (1)

Publication Number Publication Date
KR20250073238A true KR20250073238A (ko) 2025-05-27

Family

ID=90477235

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020257012641A Pending KR20250073238A (ko) 2022-09-29 2023-08-16 천장 주행차 시스템

Country Status (7)

Country Link
US (1) US20260048768A1 (https=)
EP (1) EP4556344A1 (https=)
JP (1) JPWO2024070301A1 (https=)
KR (1) KR20250073238A (https=)
CN (1) CN119183430A (https=)
IL (1) IL318809A (https=)
WO (1) WO2024070301A1 (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837973Y1 (https=) * 1970-09-14 1973-11-10
KR20110005978A (ko) * 2009-07-13 2011-01-20 삼성전자주식회사 교차로 주행 시스템
JP5440870B2 (ja) * 2010-08-19 2014-03-12 株式会社ダイフク 物品搬送設備
JP6168476B2 (ja) * 2015-03-19 2017-07-26 村田機械株式会社 搬送台車と搬送台車システム
JP6946965B2 (ja) * 2017-11-22 2021-10-13 村田機械株式会社 搬送システム
JP7070704B2 (ja) 2018-11-28 2022-05-18 村田機械株式会社 走行車システム

Also Published As

Publication number Publication date
JPWO2024070301A1 (https=) 2024-04-04
WO2024070301A1 (ja) 2024-04-04
IL318809A (en) 2025-04-01
CN119183430A (zh) 2024-12-24
EP4556344A1 (en) 2025-05-21
TW202417352A (zh) 2024-05-01
US20260048768A1 (en) 2026-02-19

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