WO2024057868A1 - Hydrodynamic bearing, hydrodynamic bearing device, and motor - Google Patents

Hydrodynamic bearing, hydrodynamic bearing device, and motor Download PDF

Info

Publication number
WO2024057868A1
WO2024057868A1 PCT/JP2023/030575 JP2023030575W WO2024057868A1 WO 2024057868 A1 WO2024057868 A1 WO 2024057868A1 JP 2023030575 W JP2023030575 W JP 2023030575W WO 2024057868 A1 WO2024057868 A1 WO 2024057868A1
Authority
WO
WIPO (PCT)
Prior art keywords
dynamic pressure
sintered body
bearing
groove
hill
Prior art date
Application number
PCT/JP2023/030575
Other languages
French (fr)
Japanese (ja)
Inventor
慎治 小松原
Original Assignee
Ntn株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ntn株式会社 filed Critical Ntn株式会社
Publication of WO2024057868A1 publication Critical patent/WO2024057868A1/en

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/12Both compacting and sintering
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C17/00Sliding-contact bearings for exclusively rotary movement
    • F16C17/02Sliding-contact bearings for exclusively rotary movement for radial load only
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C17/00Sliding-contact bearings for exclusively rotary movement
    • F16C17/04Sliding-contact bearings for exclusively rotary movement for axial load only
    • F16C17/08Sliding-contact bearings for exclusively rotary movement for axial load only for supporting the end face of a shaft or other member, e.g. footstep bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C17/00Sliding-contact bearings for exclusively rotary movement
    • F16C17/10Sliding-contact bearings for exclusively rotary movement for both radial and axial load
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02Parts of sliding-contact bearings
    • F16C33/04Brasses; Bushes; Linings
    • F16C33/06Sliding surface mainly made of metal
    • F16C33/10Construction relative to lubrication
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02Parts of sliding-contact bearings
    • F16C33/04Brasses; Bushes; Linings
    • F16C33/06Sliding surface mainly made of metal
    • F16C33/12Structural composition; Use of special materials or surface treatments, e.g. for rust-proofing
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02Parts of sliding-contact bearings
    • F16C33/04Brasses; Bushes; Linings
    • F16C33/06Sliding surface mainly made of metal
    • F16C33/14Special methods of manufacture; Running-in
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K7/00Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08Structural association with bearings

Definitions

  • the present invention relates to a hydrodynamic bearing.
  • a dynamic pressure bearing is a cylindrical bearing member with dynamic pressure grooves formed on its inner peripheral surface.
  • the hydrodynamic bearing and the shaft member inserted into its inner circumference rotate relative to each other, the pressure of the fluid film generated in the radial bearing gap between the outer circumference of the shaft member and the inner circumference of the hydrodynamic bearing is reduced by the hydrodynamic groove.
  • This pressure allows the shaft member to be relatively rotatably supported in a non-contact manner. Due to its excellent rotational accuracy and quietness, fluid dynamic bearing devices having the above-mentioned hydrodynamic bearings and shaft members are used in spindle motors of HDD disk drives, polygon scanner motors of laser beam printers, and electronic devices. It is suitably used to support the rotating shaft of a cooling fan motor, etc.
  • dynamic pressure groove sizing As a method for forming dynamic pressure grooves on the inner circumferential surface of a hydrodynamic bearing, so-called dynamic pressure groove sizing is known, in which dynamic pressure grooves are molded on the inner circumferential surface of a cylindrical sintered body.
  • a sizing pin is inserted into the inner circumference of the sintered compact, and the sintered compact is press-fitted into the inner circumference of the die while being compressed in the axial direction by an upper punch and a lower punch.
  • the inner peripheral surface of the body is pressed against a mold formed on the outer peripheral surface of the sizing pin. As a result, the shape of the mold is transferred to the inner circumferential surface of the sintered body, and dynamic pressure grooves are formed (see, for example, Patent Document 1).
  • FIG. 14 and 15 are diagrams showing the shapes (profiles) of dynamic pressure grooves of dynamic pressure bearings formed under the same conditions.
  • the maximum diameter difference between each dynamic pressure groove and the adjacent hill portion on one side in the circumferential direction is defined as the depth of each dynamic pressure groove (hereinafter also referred to as "groove depth") Hf1 to Hf6.
  • the groove depths Hf1 to Hf6 have small variations (the difference between the maximum groove depth and the minimum groove depth is about 0.3 ⁇ m), and as shown in Fig. 15, the groove depths Hf1 to Hf6 are small.
  • an object of the present invention is to stably supply a hydrodynamic bearing with high bearing rigidity.
  • the inner peripheral surface of the sintered body 28 is pressed against a mold 35 formed on the outer peripheral surface of the core rod 31, and the sintering process is performed.
  • the material (meat) of the body 28 is introduced into the recess 35a of the mold 35.
  • the ratio h'/Hf' between the circumferential width h' [mm] and the depth Hf' [ ⁇ m] of the recess 35a is too small, that is, the circumferential width h' of the recess 35a is too small, If the depth Hf' of the recess 35a is too deep, it becomes difficult for the material of the sintered body 28 to enter the recess 35a. Therefore, it becomes difficult to fill the entire area of the recess 35a with the material of the sintered body 28, and the molding accuracy of the hill portion and, ultimately, the molding accuracy of the dynamic pressure groove decreases.
  • the ratio (flatness) h'/Hf' between the circumferential width h' [mm] and the depth Hf' [ ⁇ m] of the concave portion of the mold is made larger than 0.1. This makes it easier for the material of the sintered body to penetrate into the corners of the recesses, so we can stably supply products with variations in the height of multiple hills, that is, the depth of multiple dynamic pressure grooves, of 1 ⁇ m or less. can do.
  • the shape of the concave part of the core rod is transferred to the hill part between the dynamic pressure grooves formed in the sintered body, so the circumferential width h [mm] and the height (the circumferential direction of the concave part) of each hill part are
  • the ratio (flatness) h/Hf to the depth (depth) Hf [ ⁇ m] of the dynamic pressure groove adjacent to one side (flatness) becomes larger than 0.1.
  • the ratio h'/Hf' between the circumferential width h' [mm] and the depth Hf' [ ⁇ m] of the concave part of the mold that is, the circumferential width h [mm] and the height of the hill part of the sintered body. It is preferable that the ratio h/Hf to the height Hf [ ⁇ m] be smaller than a predetermined value, and specifically, it is preferable to be smaller than 0.65.
  • the present invention provides a hydrodynamic bearing including a sintered body in which a hydrodynamic pressure generating part is molded on the inner peripheral surface.
  • the dynamic pressure generating portion has a plurality of dynamic pressure grooves extending in a direction inclined with respect to the circumferential direction, and a plurality of inclined hill portions provided between the plurality of dynamic pressure grooves in the circumferential direction,
  • the ratio h/Hf of the circumferential width h [mm] of each inclined hill portion to the depth Hf [ ⁇ m] of the dynamic pressure groove adjacent to one circumferential side of the inclined hill portion is 0.1 ⁇ h /Hf ⁇ 0.65, It can be characterized as a hydrodynamic bearing in which the variation in depth Hf of the plurality of hydrodynamic grooves is 1 ⁇ m or less.
  • the density of the sintered body is low, when forming dynamic pressure grooves by pressing the sintered body from the outside diameter side, it will be difficult to apply pressure to the inner peripheral surface of the sintered body, so the dynamic pressure grooves will not be formed. It becomes difficult to mold with high precision. Therefore, it is preferable to set the density of the sintered body to be high. Specifically, the density ratio of the sintered body (density of the sintered body/density assuming that the sintered body has no pores) is set to a high value. It is preferably 80% or more.
  • the density of the sintered body is too high, the pores formed inside the sintered body will be too small, impairing the circulation of lubricating fluid through the internal pores, so the density ratio of the sintered body will be 95% or less. It is preferable that
  • the corner of the outer diameter end of the mold for the core rod interferes with the hill formed on the inner circumference of the sintered body, causing the hill of the sintered body to There is a risk of being destroyed.
  • the cross-sectional shape of the dynamic pressure groove is a perfect rectangle, and the more the groove is out of the rectangle, the more the dynamic pressure decreases. Therefore, if the corners of the outer diameter end of the mold are rounded as described above, the bottom corners of the dynamic pressure groove formed with this mold will be rounded and will collapse from the rectangular shape, so a drop in dynamic pressure can be avoided. I can't do it.
  • the corner on the side (one axial side) that interferes with the dynamic pressure groove when pulled out from the inner periphery of the sintered body is It is preferable to round off the corners of the other side).
  • the corner on one axial side of the groove bottom of the dynamic pressure groove is rounded more than the corner on the other axial side.
  • FIG. 2 is an axial cross-sectional view of the fluid dynamic bearing device incorporated in the fan motor of FIG. 1.
  • FIG. 3 is an axial cross-sectional view of a bearing sleeve (dynamic bearing) of the fluid dynamic bearing device of FIG. 2.
  • FIG. 4 is a cross-sectional view of the bearing sleeve taken along line XX in FIG. 3 in an axis orthogonal direction.
  • FIG. 2 is an axial cross-sectional view of the sizing mold and the sintered body, showing a state before the sintered body is inserted into the inner periphery of the die.
  • FIG. 6 is a side view of the core rod of the sizing mold of FIG.
  • FIG. 6 is a cross-sectional view of the sintered body and core rod of FIG. 5 in an axis orthogonal direction.
  • FIG. 2 is an axial cross-sectional view of the sizing mold and the sintered body, showing a state in which the sintered body is inserted into the inner periphery of the die.
  • 9 is a cross-sectional view of the sintered body and the core rod of FIG. 8 in a direction perpendicular to the axis.
  • FIG. 3 is a cross-sectional view of the sintered body and the core rod taken out from the inner periphery of the die in the direction orthogonal to the axis.
  • FIG. 2 is an axial cross-sectional view showing an example of a sintered body and a core rod taken out from the inner periphery of the die.
  • FIG. 6 is a side view showing a step of rounding the corners of the mold for the core rod.
  • FIG. 7 is an axial cross-sectional view showing another example of the sintered body and core rod taken out from the inner periphery of the die. It is a figure showing the shape (profile) of the dynamic pressure groove of a dynamic pressure bearing. It is a figure showing the shape (profile) of the dynamic pressure groove of a dynamic pressure bearing.
  • FIG. 1 conceptually shows an example of a fan motor.
  • the fan motor shown in the figure is built into, for example, a portable information device such as a notebook computer or a tablet terminal, and generates an airflow to cool a heat generating source such as a CPU.
  • This fan motor includes a fluid dynamic pressure bearing device 1, a motor base 5 constituting the stationary side of the motor, a rotor 3 fixed to a shaft member 2 of the fluid dynamic pressure bearing device 1, and blades attached to the rotor 3. 4, and a stator 6a and a magnet 6b that are arranged opposite to each other with a radial gap therebetween.
  • the stator 6a is attached to the housing 7 of the fluid dynamic bearing device 1, and the magnet 6b is attached to the rotor 3.
  • the magnet 6b and the rotor 3 rotate together.
  • an airflow is generated in an axial direction or a radially outward direction depending on the shape of the blades 4 attached to the rotor 3.
  • the fluid dynamic bearing device 1 includes a shaft member 2, a housing 7, a bearing sleeve 8 as a dynamic pressure bearing according to an embodiment of the present invention, and a seal member 9.
  • the internal space of the housing 7 is filled with lubricating oil.
  • the side where the shaft member 2 protrudes from the housing 7 in the axial direction (the upper side in FIG. 2) will be referred to as the "upper side”
  • the opposite side (the lower side in FIG. 2) will be referred to as the "lower side”.
  • this is not intended to limit the posture in which the fluid dynamic bearing device 1 is used.
  • the shaft member 2 is made of a metal material such as stainless steel. At least a region of the outer circumferential surface 2a of the shaft member 2 that faces the inner circumferential surface of the bearing sleeve 8 in the radial direction is a cylindrical surface that is not provided with irregularities such as dynamic pressure grooves. A convex spherical surface 2b is provided at the lower end of the shaft member 2. A rotor 3 is fixed to the upper end of the shaft member 2.
  • the housing 7 has a cylindrical portion 7a and a bottom portion 7b that closes the lower end opening of the cylindrical portion 7a.
  • the cylindrical portion 7a and the bottom portion 7b are integrally formed of resin or metal material.
  • a shoulder surface 7b2 arranged above the center portion is provided at the outer diameter side end of the upper end surface (inner bottom surface 7b1) of the bottom portion 7b.
  • a stator 6a and a motor base 5 are fixed to an outer circumferential surface 7a2 of the cylindrical portion 7a.
  • a thrust plate 10 is provided on the inner bottom surface 7b1 of the housing 7.
  • the thrust plate 10 is formed into a disk shape from a material that has better sliding properties than the material from which the housing 7 is formed.
  • the convex spherical surface 2b at the lower end of the shaft member 2 is supported in contact with the upper end surface of the thrust plate 10.
  • the thrust plate 10 may be omitted, and in that case, the convex spherical surface 2b of the shaft member 2 is supported in contact with the inner bottom surface 7b1 of the housing 7.
  • the seal member 9 is formed into an annular shape from a resin or metal material, and is fixed to the upper end of the inner circumferential surface 7a1 of the cylindrical portion 7a of the housing 7.
  • the lower end surface 9b of the seal member 9 is in contact with the upper end surface 8b of the bearing sleeve 8.
  • An annular seal space S is formed between the inner circumferential surface 9a of the seal member 9 and the outer circumferential surface 2a of the opposing shaft member 2.
  • this fluid dynamic pressure bearing device 1 is a so-called partial fill type in which lubricating oil and air are mixed inside the housing 7, but the present invention is not limited to this.
  • a so-called full-fill type may be used. In the case of the full-fill type, the oil level of the lubricating oil is always maintained within the axial range of the seal space S.
  • the bearing sleeve 8 is made of a cylindrical sintered body formed by sintering a compression molded body of metal powder, such as a copper-based sintered body containing copper as the main component or an iron-based sintered body containing iron as the main component. or a copper-iron sintered body whose main components are copper and iron.
  • the bearing sleeve 8 is fixed to the inner periphery of the housing 7 in an oil-impregnated state in which the internal pores of the sintered body are impregnated with lubricating oil.
  • the bearing sleeve 8 is fixed to the inner periphery of the cylindrical portion 7a of the housing 7 with its lower end surface 8c in contact with the shoulder surface 7b2 of the bottom portion 7b of the housing 7.
  • the bearing sleeve 8 is fixed to the inner circumferential surface 7a1 of the cylindrical portion 7a by press-fitting, adhesion, press-fitting adhesion (combination of press-fitting and adhesion), or the like.
  • the bearing sleeve 8 is fixed to the inner circumference of the housing 7 by sandwiching it between the seal member 9 and the shoulder surface 7b2 of the housing 7 from both sides in the axial direction. You can also.
  • a dynamic pressure generating portion is formed on the inner peripheral surface 8a of the bearing sleeve 8.
  • dynamic pressure generating portions A1 and A2 are provided at two locations in the axial direction of the inner circumferential surface 8a of the sintered body.
  • a plurality of dynamic pressure grooves G1 extending in a direction inclined with respect to the circumferential direction and arranged side by side in the circumferential direction are provided, and a plurality of dynamic pressure grooves G1 are provided between the plurality of dynamic pressure grooves G1 in the circumferential direction.
  • each of the dynamic pressure generating portions A1 and A2 includes a dynamic pressure groove G1 arranged in a herringbone shape, an annular hill portion G2, and a plurality of dynamic pressure grooves G1 extending from the annular hill portion G2 to both sides in the axial direction.
  • a plurality of inclined hill portions G3 are provided circumferentially between.
  • the inner diameter surfaces of the annular hill portion G2 and the inclined hill portion G3 are arranged on the same cylindrical surface.
  • the groove bottoms of the dynamic pressure grooves G1 are arranged on the same cylindrical surface.
  • the entire inner circumferential surface 8a of the bearing sleeve 8, including the bottom surface of the dynamic pressure groove G1, the inner diameter surfaces of the annular hill portion G2 and the inclined hill portion G3, is a molded surface formed by pressing a mold.
  • An axial groove 8d1 is formed on the outer peripheral surface 8d of the bearing sleeve 8.
  • a radial groove 8b1 and an annular groove 8b2 are formed in the upper end surface 8b of the bearing sleeve 8.
  • a radial groove 8c1 is formed in the lower end surface 8c of the bearing sleeve 8.
  • the annular groove 8b2 is provided to identify the up-down direction (ie, rotational direction) when the bearing sleeve 8 is assembled into the housing 7.
  • the axial groove 8d1 and the radial grooves 8b1 and 8c1 form a communication path that communicates the space faced by the bottom 7b of the housing 7 with the atmosphere in the fluid dynamic bearing device 1 (see FIG. 2). Note that if there is no particular need, any or all of the radial grooves 8b1 and 8c1, the annular groove 8b2, and the axial groove 8d1 may be omitted.
  • FIG. 4 is a cross-sectional view (cross-sectional view taken along line XX in FIG. 3) of the dynamic pressure groove G1 of the bearing sleeve 8 at the axial center, developed so that the circumferential direction is straight, and the radius It is a diagram with exaggerated dimensions in the direction (vertical direction in the figure).
  • the depth Hf of the dynamic pressure groove G1 is defined as the minimum diameter of the top surface (inner diameter surface) of each inclined hill portion G3 and the dynamic pressure groove adjacent to one circumferential side (left side in FIG. 4) of the inclined hill portion G3. This is the difference in diameter from the maximum diameter of the bottom surface of the pressure groove G1.
  • the circumferential width h of the inclined hill portion G3 is determined by the least square line L between the dynamic pressure groove G1 and the inclined hill portion G3 (line L of all the dynamic pressure grooves G1 in the circumferential direction in the axis orthogonal cross section shown in FIG.
  • the depths of all the dynamic pressure grooves G1 formed in the inner circumferential surface 8a of the bearing sleeve 8 are approximately uniform, and specifically, the variation in the depth Hf of each dynamic pressure groove G1 is set to be 1 ⁇ m or less. That is, the difference between the depth Hf (MAX) of the deepest dynamic pressure groove G1 and the depth Hf (MIN) of the shallowest dynamic pressure groove G1 among the plurality of dynamic pressure grooves G1 is 1 ⁇ m or less.
  • the density ratio of the bearing sleeve 8 is 80 to 95%.
  • the density ratio of the bearing sleeve 8 is a value measured in a dry state in which the internal pores of the sintered body are not impregnated with oil.
  • the variation in density ratio in the axial direction and the radial direction of the sintered body forming the bearing sleeve 8 is set to be 3% or less. Specifically, the difference in the density ratio between the three equal parts of the sintered body in the axial direction and the difference in the density ratio between the three equal parts in the radial direction of the sintered body are both 3%. The following shall apply.
  • a radial bearing gap is formed between the outer peripheral surface 2a of the shaft member 2 and the inner peripheral surface 8a of the bearing sleeve 8.
  • the pressure of the oil film generated in the radial bearing gap is increased by the dynamic pressure generating portions A1 and A2 (dynamic pressure grooves G1) formed on the inner circumferential surface 8a of the bearing sleeve 8, and this pressure (dynamic pressure action)
  • a radial bearing portion R is formed to support the member 2 in the radial direction (see FIG. 2).
  • the bearing sleeve 8 is manufactured through a compression molding process, a sintering process, and a sizing process in this order.
  • a cylindrical green compact having approximately the same shape as the bearing sleeve 8 in FIG. 3 is formed by compression molding raw material powder whose main raw material is metal powder.
  • the inner circumferential surface of the powder compact has a cylindrical shape with no irregularities.
  • An axial groove 8d1, a radial groove 8b1, and a radial groove 8c1 are formed on the outer peripheral surface, upper end surface, and lower end surface of the powder compact, respectively.
  • metal powder for example, one or more of copper-based powder (copper powder or copper-based alloy powder), iron-based powder (iron powder or iron-based alloy powder), copper-iron alloy powder ⁇ is used.
  • a mixed powder is used as the main raw material and mixed with various fillers such as molding aids and solid lubricants.
  • the green compact is heated at a predetermined sintering temperature to obtain a sintered body in which adjacent metal powder particles are bonded to each other via sintering necks.
  • the density ratio of the sintered body thus formed is 80 to 95%. Further, the variation in density ratio in the axial direction and the radial direction of the sintered body 28 is 3% or less.
  • the compression ratio in the compression molding step, the sintering temperature and time in the sintering step, etc. are set so that the density ratio of the sintered body satisfies the above.
  • the sizing mold 30 includes a core rod 31, an upper punch 32, a lower punch 33, and a die 34.
  • a mold 35 is formed on the outer peripheral surface of the core rod 31 .
  • the mold 35 has a hill portion 35c, an annular recess 35b, and an inclined recess 35a.
  • recesses 35a and 35b scattering regions are formed on the cylindrical outer peripheral surface of the core rod 31, and the region remaining between the inclined recesses 35a in the circumferential direction becomes a hill portion 35c.
  • the hill portion 35c, the annular recess 35b, and the inclined recess 35a have shapes that are the inversions of the unevenness of the dynamic pressure groove G1, the annular hill G2, and the inclined hill G3 shown in FIG. 3, respectively.
  • Each inclined recess 35a has a ratio (flatness) h'/Hf' of circumferential width h' [mm] to depth Hf' [ ⁇ m] of 0.1 ⁇ h'/Hf' ⁇ 0.65. (See Figure 7).
  • the depth Hf' of each inclined recess 35a is the maximum diameter between the bottom surface (outer diameter surface) of each inclined recess 35a and the outer diameter surface of the hill portion 35c adjacent to one side in the circumferential direction of the inclined recess 35a. It's the difference.
  • the core rod 31 is inserted into the inner circumference of the sintered body 28, and the axial width of the sintered body 28 is restrained by the upper and lower punches 32, 33. At this time, since the inner diameter of the sintered body 28 is slightly larger than the outer diameter of the core rod 31, a minute radial gap is formed between the inner peripheral surface of the sintered body 28 and the outer peripheral surface of the core rod 31. (See Figure 7).
  • the flatness h'/Hf' of the inclined recess 35a is larger than 0.1, so that the material of the sintered body 28 is pressed against the inclined recess 35a. (Meat) can enter easily. As a result, the material of the sintered body 28 can be filled up to the corners of the inclined recess 35a, so that the height of the inclined hill G3 formed in the inclined recess 35a, that is, the dynamic pressure adjacent to the inclined hill G3 is increased. The accuracy of the depth Hf of the groove G1 can be improved.
  • the depths of the dynamic pressure grooves G1 molded on the inner circumferential surface of the sintered body 28 can be made approximately uniform, and specifically, the depth Hf of all the dynamic pressure grooves G1 can be made substantially uniform.
  • the variation can be suppressed to 1 ⁇ m or less.
  • the sintered body 28, the core rod 31, and the upper and lower punches 32, 33 are raised, and the sintered body 28 and the core rod 31 are taken out from the inner periphery of the die 34.
  • the inner peripheral surface 28a of the sintered body 28 expands in diameter due to springback, and is separated from the mold 35 on the outer peripheral surface of the core rod 31 (see FIG. 10).
  • the core rod 31 is pulled out from the inner periphery of the sintered body 28 (that is, the bearing sleeve 8) in which the dynamic pressure groove G1, the annular hill portion G2, and the inclined hill portion G3 are formed on the inner circumferential surface.
  • the density ratio of the sintered body 28 is set to be high (80 to 95%), and the density ratio is substantially uniform in the axial direction and the radial direction.
  • the variation in the amount of springback is suppressed, and the diameter of the entire inner circumferential surface 28a of the sintered body 28 can be uniformly expanded.
  • the present invention is not limited to the above embodiments. Other embodiments of the present invention will be described below, but descriptions of points similar to the above embodiments will be omitted.
  • the dynamic pressure groove G1 When the core rod 31 is pulled out from the inner periphery of the sintered body 28 (bearing sleeve 8) in the axial direction (arrow direction in the figure), the corner e1 on the axial one side of the hill portion 35c is sintered. There is a risk that it will interfere with the ridges G2, G3 on the inner circumferential surface of the body 28, and the ridges G2, G3 may be damaged.
  • the corners of the outer diameter end of the mold 35 of the core rod 31 may be rounded.
  • the abrasive material 50 onto the workpiece (in this case, the core rod 31) using the spray device 55, the surface of the workpiece is polished by friction with the abrasive material 50, and the shape is formed.
  • the outer diameter end corner of the hill portion 35c of the mold 35 is rounded.
  • the core rod 31 is set to form a predetermined inclination angle with respect to the projection direction of the abrasive material 50.
  • the axis of the core rod 31 is inclined at a predetermined angle ⁇ with respect to the Y direction.
  • the end of the core rod 31 on one axial side (the opposite axial end, the right side in the figure) of the mold 35 is closer to the injection device than the end on the other axial side (the axial end, the left side in the figure).
  • the axis of the core rod 31 is inclined with respect to the Y direction perpendicular to the projection direction X of the abrasive material 50.
  • each hill portion 35c is rounded, the core rod 31 can be pulled out from the inner circumference of the sintered body 28 in the axial direction (in the direction of the arrow in FIG. 13).
  • the corner portion e1 and the hill portions G2 and G3 interfere with each other, it is possible to prevent the hill portions G2 and G3 from being bent.
  • the corner e2 on the other side in the axial direction is not rounded, the shape of the hill portions G2 and G3, and ultimately the shape of the dynamic pressure groove G1, can be approximated to a rectangular shape. can be secured.
  • the shape of the dynamic pressure groove G1 formed on the inner circumferential surface of the dynamic pressure bearing (bearing sleeve 8) is not limited to the above.
  • the dynamic pressure groove G1 inclined on one side with respect to the circumferential direction and the dynamic pressure groove G1 inclined on the other side with respect to the circumferential direction are made to be continuous, and
  • the inclined hill part G3 and the inclined hill part G3 inclined to the other side may be made to be continuous.
  • the dynamic pressure generating parts A1 and A2 may be spaced apart in the axial direction, and a cylindrical surface may be provided between them.
  • a dynamic pressure generating portion (for example, a spiral-shaped dynamic pressure groove and a hill portion) may be formed on one end surface of the dynamic pressure bearing in the axial direction.
  • the shaft member is provided with a flange portion, and the fluid film pressure generated in the thrust bearing gap between one axial end surface of the hydrodynamic bearing and the end surface of the flange portion of the shaft member is provided on the end surface of the hydrodynamic pressure bearing.
  • the shaft member is supported in a non-contact manner in the thrust direction by this pressure.
  • the hydrodynamic bearing is on the fixed side and the shaft member is on the rotating side is shown, but the present invention is not limited to this, and the shaft member may be on the fixed side and the hydrodynamic bearing on the rotating side.
  • the dynamic pressure bearing according to the present invention is not limited to the sintered oil-impregnated bearing in which the inside is impregnated with lubricating oil as described above, but can also be used in a dry state without impregnating lubricating oil. Furthermore, the fluid dynamic pressure bearing device 1 having a dynamic pressure bearing according to the present invention is applicable not only to a fan motor but also to a spindle motor of a disk drive device of an HDD and a polygon scanner motor of a laser beam printer.
  • Fluid dynamic pressure bearing device 2 Shaft member 3 Rotor 4 Vane 5 Motor base 6a Stator 6b Magnet 7 Housing 8 Bearing sleeve (dynamic pressure bearing) 9 Seal member 10 Thrust plate 28 Sintered body 30 Sizing mold 31 Core rod 32 Upper punch 33 Lower punch 34 Die 35 Molding die 35a Inclined recess 35b Annular recess 35c Hill portion 50 Abrasive material 55 Injector A1, A2 Dynamic pressure generating portion G1 Dynamic pressure groove G2 Annular hill portion G3 Inclined hill portion R Radial bearing portion S Seal space T Thrust bearing portion

Abstract

A hydrodynamic bearing (bearing sleeve 8) is equipped with a sintered body in which dynamic pressure-generating parts A1, A2 are die-formed on the inner-circumferential surface thereof. The dynamic pressure-generating parts A1, A2 have a plurality of dynamic pressure grooves G1 which extend in a direction which is angled relative to the circumferential direction, and a plurality of inclined hill sections G3 which are provided between the plurality of dynamic pressure grooves G1 in the circumferential direction. The circumferential direction width h[mm] of each inclined hill section G3 and the dynamic pressure groove G1 depth Hf[μm] adjacent to said hill section G3 on one side thereof in the circumferential direction satisfy 0.1<h/Hf<0.65, and the variation in the depth Hf of the plurality of dynamic pressure grooves G1 is no more than 1μm.

Description

動圧軸受、動圧軸受装置及びモータHydrodynamic bearings, hydrodynamic bearing devices and motors
 本発明は、動圧軸受に関する。 The present invention relates to a hydrodynamic bearing.
 動圧軸受は、内周面に動圧溝が形成された円筒状の軸受部材である。動圧軸受とその内周に挿入された軸部材とが相対回転すると、軸部材の外周面と動圧軸受の内周面との間のラジアル軸受隙間に生じる流体膜の圧力が動圧溝により高められ、この圧力(動圧作用)で軸部材が相対回転自在に非接触支持される。上記のような動圧軸受及び軸部材を有する流体動圧軸受装置は、回転精度及び静粛性に優れるという特性から、HDDのディスク駆動装置のスピンドルモータ、レーザビームプリンタのポリゴンスキャナモータ、電子機器の冷却用のファンモータ等の回転軸支持用として好適に使用される。 A dynamic pressure bearing is a cylindrical bearing member with dynamic pressure grooves formed on its inner peripheral surface. When the hydrodynamic bearing and the shaft member inserted into its inner circumference rotate relative to each other, the pressure of the fluid film generated in the radial bearing gap between the outer circumference of the shaft member and the inner circumference of the hydrodynamic bearing is reduced by the hydrodynamic groove. This pressure (dynamic pressure effect) allows the shaft member to be relatively rotatably supported in a non-contact manner. Due to its excellent rotational accuracy and quietness, fluid dynamic bearing devices having the above-mentioned hydrodynamic bearings and shaft members are used in spindle motors of HDD disk drives, polygon scanner motors of laser beam printers, and electronic devices. It is suitably used to support the rotating shaft of a cooling fan motor, etc.
 動圧軸受の内周面に動圧溝を形成する方法としては、円筒状の焼結体の内周面に動圧溝を型成形する、いわゆる動圧溝サイジングが知られている。この動圧溝サイジングでは、焼結体の内周にサイジングピンを挿入した状態で、焼結体を上パンチと下パンチとで軸方向に圧迫しながらダイの内周に圧入することで、焼結体の内周面をサイジングピンの外周面に形成された成形型に押し付ける。これにより、焼結体の内周面に成形型の形状が転写され、動圧溝が形成される(例えば、特許文献1を参照)。 As a method for forming dynamic pressure grooves on the inner circumferential surface of a hydrodynamic bearing, so-called dynamic pressure groove sizing is known, in which dynamic pressure grooves are molded on the inner circumferential surface of a cylindrical sintered body. In this dynamic pressure groove sizing, a sizing pin is inserted into the inner circumference of the sintered compact, and the sintered compact is press-fitted into the inner circumference of the die while being compressed in the axial direction by an upper punch and a lower punch. The inner peripheral surface of the body is pressed against a mold formed on the outer peripheral surface of the sizing pin. As a result, the shape of the mold is transferred to the inner circumferential surface of the sintered body, and dynamic pressure grooves are formed (see, for example, Patent Document 1).
特許第3782900号公報Patent No. 3782900
 動圧軸受では、動圧溝の寸法精度、特に、複数の動圧溝の深さのバラつきが問題となっている。図14及び15は、同一条件で形成した動圧軸受の動圧溝の形状(プロファイル)を示す図である。各動圧溝とその周方向一方側に隣接する丘部との最大径差を各動圧溝の深さ(以下、「溝深さ」とも言う。)Hf1~Hf6とする。図14のように溝深さHf1~Hf6のバラつきが小さいもの(最大の溝深さと最小の溝深さとの差が約0.3μmであるもの)や、図15のように溝深さHf1~Hf6のバラつきが大きいもの(最大の溝深さと最小の溝深さとの差が約1.5μmであるもの)があった。溝深さのバラつきが大きいと、周方向で発生する動圧力のバラつきが大きくなるため、軸受剛性が低下する。特に、動圧軸受が、様々な姿勢で使用されるモータ(例えば、タブレット型端末の冷却ファンモータ)に組み込まれる場合、軸受剛性が低いと、動圧軸受と軸とが接触し、異音の発生などの不具合が生じるおそれがある。 In hydrodynamic bearings, dimensional accuracy of the hydrodynamic grooves, particularly variations in the depth of the plurality of hydrodynamic grooves, is a problem. 14 and 15 are diagrams showing the shapes (profiles) of dynamic pressure grooves of dynamic pressure bearings formed under the same conditions. The maximum diameter difference between each dynamic pressure groove and the adjacent hill portion on one side in the circumferential direction is defined as the depth of each dynamic pressure groove (hereinafter also referred to as "groove depth") Hf1 to Hf6. As shown in Fig. 14, the groove depths Hf1 to Hf6 have small variations (the difference between the maximum groove depth and the minimum groove depth is about 0.3 μm), and as shown in Fig. 15, the groove depths Hf1 to Hf6 are small. There was one with a large variation in Hf6 (the difference between the maximum groove depth and the minimum groove depth was about 1.5 μm). If the variation in groove depth is large, the variation in dynamic pressure generated in the circumferential direction becomes large, resulting in a decrease in bearing rigidity. In particular, when a hydrodynamic bearing is incorporated into a motor that is used in various positions (for example, a cooling fan motor for a tablet device), if the bearing rigidity is low, the hydrodynamic bearing and the shaft may come into contact, causing abnormal noise. There is a risk that problems such as occurrence of malfunction may occur.
 そこで、本発明は、軸受剛性が高い動圧軸受を安定的に供給することを目的とする。 Therefore, an object of the present invention is to stably supply a hydrodynamic bearing with high bearing rigidity.
 動圧溝を型成形する際には、図7,9及び10に示すように、コアロッド31の外周面に形成された成形型35に焼結体28の内周面を押し付けることで、焼結体28の材料(肉)を成形型35の凹部35aに入り込ませる。このとき、凹部35aの周方向幅h’[mm]と深さHf’[μm]との比h’/Hf’が小さすぎると、すなわち、凹部35aの周方向幅h’が小さすぎたり、凹部35aの深さHf’が深すぎたりすると、凹部35aに焼結体28の材料が入り込みにくくなる。そのため、凹部35aの全域を焼結体28の材料で満たすことが困難となり、丘部の成形精度、ひいては動圧溝の成形精度が低下する。 When molding the dynamic pressure grooves, as shown in FIGS. 7, 9 and 10, the inner peripheral surface of the sintered body 28 is pressed against a mold 35 formed on the outer peripheral surface of the core rod 31, and the sintering process is performed. The material (meat) of the body 28 is introduced into the recess 35a of the mold 35. At this time, if the ratio h'/Hf' between the circumferential width h' [mm] and the depth Hf' [μm] of the recess 35a is too small, that is, the circumferential width h' of the recess 35a is too small, If the depth Hf' of the recess 35a is too deep, it becomes difficult for the material of the sintered body 28 to enter the recess 35a. Therefore, it becomes difficult to fill the entire area of the recess 35a with the material of the sintered body 28, and the molding accuracy of the hill portion and, ultimately, the molding accuracy of the dynamic pressure groove decreases.
 そこで、本発明では、成形型の凹部の周方向幅h’[mm]と深さHf’[μm]との比(扁平度)h’/Hf’を0.1より大きくした。これにより、凹部の隅部まで焼結体の材料が入り込みやすくなるため、複数の丘部の高さ、すなわち、複数の動圧溝の深さのバラつきが1μm以下である製品を安定的に供給することができる。この場合、焼結体に形成される動圧溝間の丘部は、コアロッドの凹部の形状が転写されるため、各丘部の周方向幅h[mm]と高さ(当該凹部の周方向一方側に隣接する動圧溝の深さ)Hf[μm]との比(扁平度)h/Hfが0.1より大きくなる。 Therefore, in the present invention, the ratio (flatness) h'/Hf' between the circumferential width h' [mm] and the depth Hf' [μm] of the concave portion of the mold is made larger than 0.1. This makes it easier for the material of the sintered body to penetrate into the corners of the recesses, so we can stably supply products with variations in the height of multiple hills, that is, the depth of multiple dynamic pressure grooves, of 1 μm or less. can do. In this case, the shape of the concave part of the core rod is transferred to the hill part between the dynamic pressure grooves formed in the sintered body, so the circumferential width h [mm] and the height (the circumferential direction of the concave part) of each hill part are The ratio (flatness) h/Hf to the depth (depth) Hf [μm] of the dynamic pressure groove adjacent to one side (flatness) becomes larger than 0.1.
 一方、成形型の凹部の周方向幅h’が大きすぎると、凹部に入り込ませる焼結体の体積が大きくなるため、焼結体を縮径させるために大きな成形圧力が必要となり、成形装置の大型化及び高コスト化を招く。また、成形型の凹部の深さHf’が浅すぎると、動圧溝が浅くなるため、動圧力が不足するおそれがある。よって、成形型の凹部の周方向幅h’[mm]と深さHf’[μm]との比h’/Hf’、すなわち、焼結体の丘部の周方向幅h[mm]と高さHf[μm]との比h/Hfは、所定値より小さくすることが好ましく、具体的には0.65より小さくすることが好ましい。 On the other hand, if the circumferential width h' of the concave part of the mold is too large, the volume of the sintered body to be inserted into the concave part will be large, and a large molding pressure will be required to reduce the diameter of the sintered body. This leads to larger size and higher cost. Furthermore, if the depth Hf' of the recessed part of the mold is too shallow, the dynamic pressure groove becomes shallow, and there is a risk that the dynamic pressure will be insufficient. Therefore, the ratio h'/Hf' between the circumferential width h' [mm] and the depth Hf' [μm] of the concave part of the mold, that is, the circumferential width h [mm] and the height of the hill part of the sintered body. It is preferable that the ratio h/Hf to the height Hf [μm] be smaller than a predetermined value, and specifically, it is preferable to be smaller than 0.65.
 以上より、本発明は、内周面に動圧発生部が型成形された焼結体を備えた動圧軸受において、
 前記動圧発生部が、周方向に対して傾斜した方向に延びる複数の動圧溝と、前記複数の動圧溝の周方向間に設けられた複数の傾斜丘部とを有し、
 各傾斜丘部の周方向幅h[mm]と、当該傾斜丘部の周方向一方側に隣接する前記動圧溝の深さHf[μm]との比h/Hfが、0.1<h/Hf<0.65を満たし、
 前記複数の動圧溝の深さHfのバラつきが1μm以下である動圧軸受として特徴づけることができる。
From the above, the present invention provides a hydrodynamic bearing including a sintered body in which a hydrodynamic pressure generating part is molded on the inner peripheral surface.
The dynamic pressure generating portion has a plurality of dynamic pressure grooves extending in a direction inclined with respect to the circumferential direction, and a plurality of inclined hill portions provided between the plurality of dynamic pressure grooves in the circumferential direction,
The ratio h/Hf of the circumferential width h [mm] of each inclined hill portion to the depth Hf [μm] of the dynamic pressure groove adjacent to one circumferential side of the inclined hill portion is 0.1<h /Hf<0.65,
It can be characterized as a hydrodynamic bearing in which the variation in depth Hf of the plurality of hydrodynamic grooves is 1 μm or less.
 焼結体の密度が低いと、焼結体を外径側から圧迫して動圧溝を型成形する際に、焼結体の内周面に圧迫力が加わりにくくなるため、動圧溝が高精度に成形されにくくなる。従って、焼結体の密度は高めに設定することが好ましく、具体的には、焼結体の密度比(焼結体の密度/当該焼結体に気孔が無いと仮定した場合の密度)を80%以上とすることが好ましい。一方、焼結体の密度が高すぎると、焼結体の内部に形成される気孔が過小となり、内部気孔を介した潤滑流体の循環性を損なうため、焼結体の密度比は95%以下とすることが好ましい。 If the density of the sintered body is low, when forming dynamic pressure grooves by pressing the sintered body from the outside diameter side, it will be difficult to apply pressure to the inner peripheral surface of the sintered body, so the dynamic pressure grooves will not be formed. It becomes difficult to mold with high precision. Therefore, it is preferable to set the density of the sintered body to be high. Specifically, the density ratio of the sintered body (density of the sintered body/density assuming that the sintered body has no pores) is set to a high value. It is preferably 80% or more. On the other hand, if the density of the sintered body is too high, the pores formed inside the sintered body will be too small, impairing the circulation of lubricating fluid through the internal pores, so the density ratio of the sintered body will be 95% or less. It is preferable that
 焼結体の各部位における密度比のバラつきが大きいと、焼結体をダイから取り出したときのスプリングバック量のバラつきが大きくなる。この場合、焼結体の内周からコアロッドを引き抜く際に、焼結体のうち、スプリングバック量が小さい部分がコアロッドの成形型と干渉することでこの丘部に毟れが生じ、焼結体の丘部の高さのバラつき、すなわち溝深さのバラつきが大きくなる。このため、焼結体の軸方向及び半径方向の密度比のバラつきを3%以下として、焼結体のスプリングバック量を均一にすることが好ましい。 If there is a large variation in the density ratio in each part of the sintered body, there will be a large variation in the amount of springback when the sintered body is taken out from the die. In this case, when the core rod is pulled out from the inner periphery of the sintered body, the part of the sintered body with a small amount of springback interferes with the mold for the core rod, causing this hill to sag, causing the sintered body to collapse. The variation in the height of the hill, that is, the variation in groove depth increases. For this reason, it is preferable that the variation in the density ratio in the axial direction and the radial direction of the sintered body be 3% or less to make the amount of springback of the sintered body uniform.
 焼結体の内周からコアロッドを引き抜く際、コアロッドの成形型の外径端の角部が焼結体の内周面に形成された丘部と干渉することにより、焼結体の丘部が毟れる恐れがある。これを回避するために、予め、コアロッドの成形型の外径端の角部を丸めておくことが好ましい。一方、動圧溝の断面形状は、完全な矩形状であることが理想的であり、矩形から崩れるほど動圧力が低下する。従って、上記のように成形型の外径端の角部を丸めると、この成形型で成形される動圧溝の溝底の隅部が丸められて矩形から崩れるため、動圧力の低下は避けられない。 When the core rod is pulled out from the inner circumference of the sintered body, the corner of the outer diameter end of the mold for the core rod interferes with the hill formed on the inner circumference of the sintered body, causing the hill of the sintered body to There is a risk of being destroyed. In order to avoid this, it is preferable to round off the corners of the outer diameter end of the mold for the core rod in advance. On the other hand, it is ideal that the cross-sectional shape of the dynamic pressure groove is a perfect rectangle, and the more the groove is out of the rectangle, the more the dynamic pressure decreases. Therefore, if the corners of the outer diameter end of the mold are rounded as described above, the bottom corners of the dynamic pressure groove formed with this mold will be rounded and will collapse from the rectangular shape, so a drop in dynamic pressure can be avoided. I can't do it.
 そこで、コアロッドの成形型の外径端の角部のうち、焼結体の内周から引き抜く際に動圧溝と干渉する側(軸方向一方側)の角部を、その反対側(軸方向他方側)の角部よりも丸めておくことが好ましい。この場合、焼結体の軸方向断面において、動圧溝の溝底の軸方向一方側の隅部が、軸方向他方側の隅部よりも丸められた状態となる。これにより、動圧溝により発生させる動圧力を確保しながら、コアロッドの成形型と焼結体の丘部との干渉を回避することができる。 Therefore, among the corners of the outer diameter end of the core rod mold, the corner on the side (one axial side) that interferes with the dynamic pressure groove when pulled out from the inner periphery of the sintered body is It is preferable to round off the corners of the other side). In this case, in the axial cross section of the sintered body, the corner on one axial side of the groove bottom of the dynamic pressure groove is rounded more than the corner on the other axial side. Thereby, it is possible to avoid interference between the molding die of the core rod and the hill portion of the sintered body while ensuring the dynamic pressure generated by the dynamic pressure groove.
 以上のように、本発明によれば、溝深さのバラつきが小さく軸受剛性が高い動圧軸受を、安定して供給することができる。 As described above, according to the present invention, it is possible to stably supply a hydrodynamic bearing with small variations in groove depth and high bearing rigidity.
ファンモータの断面図である。It is a sectional view of a fan motor. 図1のファンモータに組み込まれた流体動圧軸受装置の軸方向断面図である。FIG. 2 is an axial cross-sectional view of the fluid dynamic bearing device incorporated in the fan motor of FIG. 1. FIG. 図2の流体動圧軸受装置の軸受スリーブ(動圧軸受)の軸方向断面図である。3 is an axial cross-sectional view of a bearing sleeve (dynamic bearing) of the fluid dynamic bearing device of FIG. 2. FIG. 図3のX-X線における軸受スリーブの軸直交方向断面図である。FIG. 4 is a cross-sectional view of the bearing sleeve taken along line XX in FIG. 3 in an axis orthogonal direction. サイジング金型及び焼結体の軸方向断面図であり、焼結体をダイの内周に挿入する前の状態を示す。FIG. 2 is an axial cross-sectional view of the sizing mold and the sintered body, showing a state before the sintered body is inserted into the inner periphery of the die. 図5のサイジング金型のコアロッドを外周から見た側面図である。FIG. 6 is a side view of the core rod of the sizing mold of FIG. 5 viewed from the outer periphery. 図5の焼結体及びコアロッドの軸直交方向断面図である。FIG. 6 is a cross-sectional view of the sintered body and core rod of FIG. 5 in an axis orthogonal direction. サイジング金型及び焼結体の軸方向断面図であり、焼結体をダイの内周に挿入した状態を示す。FIG. 2 is an axial cross-sectional view of the sizing mold and the sintered body, showing a state in which the sintered body is inserted into the inner periphery of the die. 図8の焼結体及びコアロッドの軸直交方向断面図である。9 is a cross-sectional view of the sintered body and the core rod of FIG. 8 in a direction perpendicular to the axis. ダイの内周から取り出した焼結体及びコアロッドの軸直交方向断面図である。FIG. 3 is a cross-sectional view of the sintered body and the core rod taken out from the inner periphery of the die in the direction orthogonal to the axis. ダイの内周から取り出した焼結体及びコアロッドの一例を示す軸方向断面図である。FIG. 2 is an axial cross-sectional view showing an example of a sintered body and a core rod taken out from the inner periphery of the die. コアロッドの成形型の角部を丸める工程を示す側面図である。FIG. 6 is a side view showing a step of rounding the corners of the mold for the core rod. ダイの内周から取り出した焼結体及びコアロッドの他の例を示す軸方向断面図である。FIG. 7 is an axial cross-sectional view showing another example of the sintered body and core rod taken out from the inner periphery of the die. 動圧軸受の動圧溝の形状(プロファイル)を示す図である。It is a figure showing the shape (profile) of the dynamic pressure groove of a dynamic pressure bearing. 動圧軸受の動圧溝の形状(プロファイル)を示す図である。It is a figure showing the shape (profile) of the dynamic pressure groove of a dynamic pressure bearing.
 以下、本発明の実施の形態を図面に基づいて説明する。 Hereinafter, embodiments of the present invention will be described based on the drawings.
 図1に、ファンモータの一例を概念的に示す。同図に示すファンモータは、例えばノート型パソコンやタブレット型端末などの携帯情報機器に組み込まれ、CPU等の発熱源を冷却するための気流を発生させるものである。このファンモータは、流体動圧軸受装置1と、モータの静止側を構成するモータベース5と、流体動圧軸受装置1の軸部材2に固定されたロータ3と、ロータ3に取り付けられた羽根4と、径方向のギャップを介して対向配置されたステータ6a及びマグネット6bとを備える。ステータ6aは流体動圧軸受装置1のハウジング7に取り付けられ、マグネット6bはロータ3に取り付けられている。ステータ6aのコイルに通電して励磁力が発生させることで、マグネット6b及びロータ3が一体回転する。ロータ3の回転に伴い、ロータ3に取り付けられた羽根4の形態等に応じて軸方向、あるいは径方向外向きの気流が発生する。 FIG. 1 conceptually shows an example of a fan motor. The fan motor shown in the figure is built into, for example, a portable information device such as a notebook computer or a tablet terminal, and generates an airflow to cool a heat generating source such as a CPU. This fan motor includes a fluid dynamic pressure bearing device 1, a motor base 5 constituting the stationary side of the motor, a rotor 3 fixed to a shaft member 2 of the fluid dynamic pressure bearing device 1, and blades attached to the rotor 3. 4, and a stator 6a and a magnet 6b that are arranged opposite to each other with a radial gap therebetween. The stator 6a is attached to the housing 7 of the fluid dynamic bearing device 1, and the magnet 6b is attached to the rotor 3. By energizing the coil of the stator 6a and generating an excitation force, the magnet 6b and the rotor 3 rotate together. As the rotor 3 rotates, an airflow is generated in an axial direction or a radially outward direction depending on the shape of the blades 4 attached to the rotor 3.
 図2に示すように、流体動圧軸受装置1は、軸部材2と、ハウジング7と、本発明の一実施形態に係る動圧軸受としての軸受スリーブ8と、シール部材9とを備える。ハウジング7の内部空間には、潤滑油が充填される。なお、以下では、説明の便宜上、軸方向で軸部材2がハウジング7から突出した側(図2の上側)を「上側」、その反対側(図2の下側)を「下側」と言うが、流体動圧軸受装置1の使用時の姿勢を限定する趣旨ではない。 As shown in FIG. 2, the fluid dynamic bearing device 1 includes a shaft member 2, a housing 7, a bearing sleeve 8 as a dynamic pressure bearing according to an embodiment of the present invention, and a seal member 9. The internal space of the housing 7 is filled with lubricating oil. In the following, for convenience of explanation, the side where the shaft member 2 protrudes from the housing 7 in the axial direction (the upper side in FIG. 2) will be referred to as the "upper side", and the opposite side (the lower side in FIG. 2) will be referred to as the "lower side". However, this is not intended to limit the posture in which the fluid dynamic bearing device 1 is used.
 軸部材2は、ステンレス鋼等の金属材料で作製される。軸部材2の外周面2aのうち、少なくとも軸受スリーブ8の内周面と半径方向で対向する領域は、動圧溝等の凹凸が設けられていない円筒面とされる。軸部材2の下端には凸球面2bが設けられる。軸部材2の上端にはロータ3が固定される。 The shaft member 2 is made of a metal material such as stainless steel. At least a region of the outer circumferential surface 2a of the shaft member 2 that faces the inner circumferential surface of the bearing sleeve 8 in the radial direction is a cylindrical surface that is not provided with irregularities such as dynamic pressure grooves. A convex spherical surface 2b is provided at the lower end of the shaft member 2. A rotor 3 is fixed to the upper end of the shaft member 2.
 ハウジング7は、筒部7aと、筒部7aの下端開口部を閉塞する底部7bとを有する。図示例では、筒部7aと底部7bが樹脂又は金属材料で一体に形成されている。底部7bの上側端面(内底面7b1)の外径側端部には、中央部よりも上方に配された肩面7b2が設けられる。筒部7aの外周面7a2には、ステータ6a及びモータベース5が固定されている。 The housing 7 has a cylindrical portion 7a and a bottom portion 7b that closes the lower end opening of the cylindrical portion 7a. In the illustrated example, the cylindrical portion 7a and the bottom portion 7b are integrally formed of resin or metal material. A shoulder surface 7b2 arranged above the center portion is provided at the outer diameter side end of the upper end surface (inner bottom surface 7b1) of the bottom portion 7b. A stator 6a and a motor base 5 are fixed to an outer circumferential surface 7a2 of the cylindrical portion 7a.
 図示例では、ハウジング7の内底面7b1上にスラストプレート10が設けられる。スラストプレート10は、ハウジング7の形成材料よりも摺動性に優れた材料で円板状に形成される。スラストプレート10の上端面で軸部材2の下端の凸球面2bが接触支持される。尚、スラストプレート10は省略してもよく、その場合、ハウジング7の内底面7b1で軸部材2の凸球面2bが接触支持される。 In the illustrated example, a thrust plate 10 is provided on the inner bottom surface 7b1 of the housing 7. The thrust plate 10 is formed into a disk shape from a material that has better sliding properties than the material from which the housing 7 is formed. The convex spherical surface 2b at the lower end of the shaft member 2 is supported in contact with the upper end surface of the thrust plate 10. Note that the thrust plate 10 may be omitted, and in that case, the convex spherical surface 2b of the shaft member 2 is supported in contact with the inner bottom surface 7b1 of the housing 7.
 シール部材9は、樹脂又は金属材料で環状に形成され、ハウジング7の筒部7aの内周面7a1の上端部に固定されている。シール部材9の下端面9bは軸受スリーブ8の上端面8bに当接している。シール部材9の内周面9aは、対向する軸部材2の外周面2aとの間に環状のシール空間Sを形成する。 The seal member 9 is formed into an annular shape from a resin or metal material, and is fixed to the upper end of the inner circumferential surface 7a1 of the cylindrical portion 7a of the housing 7. The lower end surface 9b of the seal member 9 is in contact with the upper end surface 8b of the bearing sleeve 8. An annular seal space S is formed between the inner circumferential surface 9a of the seal member 9 and the outer circumferential surface 2a of the opposing shaft member 2.
 なお、この流体動圧軸受装置1は、ハウジング7の内部に潤滑油と空気とが混在した、いわゆるパーシャルフィルタイプであるが、これに限らず、ハウジング7の内部空間全域を潤滑油で満たした、いわゆるフルフィルタイプであってもよい。フルフィルタイプの場合、潤滑油の油面が常にシール空間Sの軸方向範囲内に保持される。 Note that this fluid dynamic pressure bearing device 1 is a so-called partial fill type in which lubricating oil and air are mixed inside the housing 7, but the present invention is not limited to this. , a so-called full-fill type may be used. In the case of the full-fill type, the oil level of the lubricating oil is always maintained within the axial range of the seal space S.
 軸受スリーブ8は、金属粉末の圧縮成形体を焼結してなる円筒状の焼結体からなり、例えば銅を主成分とする銅系焼結体、又は鉄を主成分とする鉄系焼結体、あるいは銅及び鉄を主成分とする銅鉄系焼結体からなる。軸受スリーブ8は、焼結体の内部気孔に潤滑油を含浸させた含油状態でハウジング7の内周に固定されている。図示例では、軸受スリーブ8が、下端面8cをハウジング7の底部7bの肩面7b2に当接させた状態でハウジング7の筒部7aの内周に固定されている。軸受スリーブ8は、圧入、接着又は圧入接着(圧入と接着の併用)等により筒部7aの内周面7a1に固定される。この他、軸受スリーブ8をハウジング7の内周に隙間嵌めした後、シール部材9とハウジング7の肩面7b2とで軸方向両側から挟持することにより、軸受スリーブ8をハウジング7の内周に固定することもできる。 The bearing sleeve 8 is made of a cylindrical sintered body formed by sintering a compression molded body of metal powder, such as a copper-based sintered body containing copper as the main component or an iron-based sintered body containing iron as the main component. or a copper-iron sintered body whose main components are copper and iron. The bearing sleeve 8 is fixed to the inner periphery of the housing 7 in an oil-impregnated state in which the internal pores of the sintered body are impregnated with lubricating oil. In the illustrated example, the bearing sleeve 8 is fixed to the inner periphery of the cylindrical portion 7a of the housing 7 with its lower end surface 8c in contact with the shoulder surface 7b2 of the bottom portion 7b of the housing 7. The bearing sleeve 8 is fixed to the inner circumferential surface 7a1 of the cylindrical portion 7a by press-fitting, adhesion, press-fitting adhesion (combination of press-fitting and adhesion), or the like. In addition, after the bearing sleeve 8 is loosely fitted to the inner circumference of the housing 7, the bearing sleeve 8 is fixed to the inner circumference of the housing 7 by sandwiching it between the seal member 9 and the shoulder surface 7b2 of the housing 7 from both sides in the axial direction. You can also.
 軸受スリーブ8の内周面8aには動圧発生部が形成されている。本実施形態では、図3に示すように、焼結体の内周面8aの軸方向2箇所に動圧発生部A1,A2が設けられる。各動圧発生部A1,A2には、周方向に対して傾斜した方向に延び、周方向に並べて配された複数の動圧溝G1と、複数の動圧溝G1の周方向間に設けられ、動圧溝G1の溝底よりも内径側に盛り上がった複数の丘部(クロスハッチング領域)とが設けられる。図示例では、各動圧発生部A1,A2に、ヘリングボーン形状に配列された動圧溝G1と、環状丘部G2と、環状丘部G2から軸方向両側に延び、複数の動圧溝G1の周方向間に設けられた複数の傾斜丘部G3とが設けられる。環状丘部G2及び傾斜丘部G3の内径面は、同一円筒面上に配される。動圧溝G1の溝底は、同一円筒面上に配される。軸受スリーブ8の内周面8aは、動圧溝G1の底面、環状丘部G2及び傾斜丘部G3の内径面を含む全域が、金型を押し付けて成形された成形面となっている。 A dynamic pressure generating portion is formed on the inner peripheral surface 8a of the bearing sleeve 8. In this embodiment, as shown in FIG. 3, dynamic pressure generating portions A1 and A2 are provided at two locations in the axial direction of the inner circumferential surface 8a of the sintered body. In each of the dynamic pressure generation parts A1 and A2, a plurality of dynamic pressure grooves G1 extending in a direction inclined with respect to the circumferential direction and arranged side by side in the circumferential direction are provided, and a plurality of dynamic pressure grooves G1 are provided between the plurality of dynamic pressure grooves G1 in the circumferential direction. , a plurality of hill portions (cross-hatched regions) that are raised on the inner diameter side from the groove bottom of the dynamic pressure groove G1 are provided. In the illustrated example, each of the dynamic pressure generating portions A1 and A2 includes a dynamic pressure groove G1 arranged in a herringbone shape, an annular hill portion G2, and a plurality of dynamic pressure grooves G1 extending from the annular hill portion G2 to both sides in the axial direction. A plurality of inclined hill portions G3 are provided circumferentially between. The inner diameter surfaces of the annular hill portion G2 and the inclined hill portion G3 are arranged on the same cylindrical surface. The groove bottoms of the dynamic pressure grooves G1 are arranged on the same cylindrical surface. The entire inner circumferential surface 8a of the bearing sleeve 8, including the bottom surface of the dynamic pressure groove G1, the inner diameter surfaces of the annular hill portion G2 and the inclined hill portion G3, is a molded surface formed by pressing a mold.
 軸受スリーブ8の外周面8dには軸方向溝8d1が形成される。軸受スリーブ8の上端面8bには半径方向溝8b1と環状溝8b2が形成される。軸受スリーブ8の下端面8cには半径方向溝8c1が形成される。環状溝8b2は、軸受スリーブ8をハウジング7に組み付ける際に上下方向(すなわち、回転方向)を識別するために設けられる。軸方向溝8d1及び半径方向溝8b1、8c1は、流体動圧軸受装置1において、ハウジング7の底部7bが面する空間と大気とを連通する連通路を形成する(図2参照)。なお、特に必要がなければ、半径方向溝8b1、8c1、環状溝8b2、及び軸方向溝8d1のうち、何れかあるいは全てを省略してもよい。 An axial groove 8d1 is formed on the outer peripheral surface 8d of the bearing sleeve 8. A radial groove 8b1 and an annular groove 8b2 are formed in the upper end surface 8b of the bearing sleeve 8. A radial groove 8c1 is formed in the lower end surface 8c of the bearing sleeve 8. The annular groove 8b2 is provided to identify the up-down direction (ie, rotational direction) when the bearing sleeve 8 is assembled into the housing 7. The axial groove 8d1 and the radial grooves 8b1 and 8c1 form a communication path that communicates the space faced by the bottom 7b of the housing 7 with the atmosphere in the fluid dynamic bearing device 1 (see FIG. 2). Note that if there is no particular need, any or all of the radial grooves 8b1 and 8c1, the annular groove 8b2, and the axial groove 8d1 may be omitted.
 図4は、軸受スリーブ8の動圧溝G1の軸方向中央における軸直交方向断面図(図3のX-X線断面図)を、周方向が直線状となるように展開し、且つ、半径方向(図中上下方向)寸法を誇張した図である。軸受スリーブ8の内周面8aに形成された各傾斜丘部G3の周方向幅h[mm]と、当該傾斜丘部G3の周方向一方側に隣接する動圧溝G1の深さHf[μm]との比(扁平度)h/Hfは、何れも0.1<h/Hf<0.65を満たしている。尚、動圧溝G1の深さHfとは、各傾斜丘部G3の頂面(内径面)の最小径と、当該傾斜丘部G3の周方向一方側(図4では左側)に隣接する動圧溝G1の底面の最大径との径差である。一方、傾斜丘部G3の周方向幅hは、動圧溝G1と傾斜丘部G3の最小二乗線L(図4に示す軸直交方向断面において、周方向全ての動圧溝G1の、線Lよりも外径側の総面積S1と、周方向全ての傾斜丘部G3の、線Lよりも内径側の総面積S2とが等しくなるように引いた線L)における周方向寸法である。軸受スリーブ8の内周面8aに形成される全ての動圧溝G1の深さは略均一とされ、具体的に、各動圧溝G1の深さHfのバラつきが1μm以下とされる。すなわち、複数の動圧溝G1のうち、最も深い動圧溝G1の深さHf(MAX)と最も浅い動圧溝G1の深さHf(MIN)との差が1μm以下とされる。 FIG. 4 is a cross-sectional view (cross-sectional view taken along line XX in FIG. 3) of the dynamic pressure groove G1 of the bearing sleeve 8 at the axial center, developed so that the circumferential direction is straight, and the radius It is a diagram with exaggerated dimensions in the direction (vertical direction in the figure). The circumferential width h [mm] of each inclined hill portion G3 formed on the inner circumferential surface 8a of the bearing sleeve 8, and the depth Hf [μm] of the dynamic pressure groove G1 adjacent to one circumferential side of the inclined hill portion G3. ] (flatness) h/Hf satisfies 0.1<h/Hf<0.65. The depth Hf of the dynamic pressure groove G1 is defined as the minimum diameter of the top surface (inner diameter surface) of each inclined hill portion G3 and the dynamic pressure groove adjacent to one circumferential side (left side in FIG. 4) of the inclined hill portion G3. This is the difference in diameter from the maximum diameter of the bottom surface of the pressure groove G1. On the other hand, the circumferential width h of the inclined hill portion G3 is determined by the least square line L between the dynamic pressure groove G1 and the inclined hill portion G3 (line L of all the dynamic pressure grooves G1 in the circumferential direction in the axis orthogonal cross section shown in FIG. This is the circumferential direction dimension on a line L) drawn so that the total area S1 on the outer diameter side than the line L is equal to the total area S2 on the inner diameter side of the line L of all the inclined hill portions G3 in the circumferential direction. The depths of all the dynamic pressure grooves G1 formed in the inner circumferential surface 8a of the bearing sleeve 8 are approximately uniform, and specifically, the variation in the depth Hf of each dynamic pressure groove G1 is set to be 1 μm or less. That is, the difference between the depth Hf (MAX) of the deepest dynamic pressure groove G1 and the depth Hf (MIN) of the shallowest dynamic pressure groove G1 among the plurality of dynamic pressure grooves G1 is 1 μm or less.
 軸受スリーブ8の密度比は、80~95%とされる。尚、軸受スリーブ8の密度比は、焼結体の内部気孔に油を含浸しないドライ状態で測定した値である。軸受スリーブ8を形成する焼結体の軸方向及び半径方向の密度比のバラつきは、3%以下とされる。具体的には、焼結体を軸方向に3等分した各部分の密度比の差、及び、焼結体を半径方向に3等分した各部分の密度比の差が、何れも3%以下とされる。 The density ratio of the bearing sleeve 8 is 80 to 95%. The density ratio of the bearing sleeve 8 is a value measured in a dry state in which the internal pores of the sintered body are not impregnated with oil. The variation in density ratio in the axial direction and the radial direction of the sintered body forming the bearing sleeve 8 is set to be 3% or less. Specifically, the difference in the density ratio between the three equal parts of the sintered body in the axial direction and the difference in the density ratio between the three equal parts in the radial direction of the sintered body are both 3%. The following shall apply.
 以上の構成を有する流体動圧軸受装置1において、軸部材2が回転すると、軸部材2の外周面2aと軸受スリーブ8の内周面8aとの間にラジアル軸受隙間が形成される。そして、軸受スリーブ8の内周面8aに形成された動圧発生部A1,A2(動圧溝G1)により、ラジアル軸受隙間に生じる油膜の圧力が高められ、この圧力(動圧作用)により軸部材2をラジアル方向に支持するラジアル軸受部Rが形成される(図2参照)。また、軸部材2の下端の凸球面2bがハウジング7の底部7b上に載置したスラストプレート10の上端面と摺動接触することにより、軸部材2をスラスト方向に支持(接触支持)するスラスト軸受部Tが形成される。 In the fluid dynamic bearing device 1 having the above configuration, when the shaft member 2 rotates, a radial bearing gap is formed between the outer peripheral surface 2a of the shaft member 2 and the inner peripheral surface 8a of the bearing sleeve 8. The pressure of the oil film generated in the radial bearing gap is increased by the dynamic pressure generating portions A1 and A2 (dynamic pressure grooves G1) formed on the inner circumferential surface 8a of the bearing sleeve 8, and this pressure (dynamic pressure action) A radial bearing portion R is formed to support the member 2 in the radial direction (see FIG. 2). Further, the convex spherical surface 2b at the lower end of the shaft member 2 comes into sliding contact with the upper end surface of the thrust plate 10 placed on the bottom portion 7b of the housing 7, thereby supporting the shaft member 2 in the thrust direction (contact support). A bearing portion T is formed.
 以下、軸受スリーブ8の製造方法を説明する。 Hereinafter, a method for manufacturing the bearing sleeve 8 will be explained.
 軸受スリーブ8は、圧縮成形工程、焼結工程及びサイジング工程を順に経ることで製造される。 The bearing sleeve 8 is manufactured through a compression molding process, a sintering process, and a sizing process in this order.
 圧縮成形工程では、金属粉末を主原料とする原料粉末を圧縮成形することにより、図3の軸受スリーブ8と略同形状の円筒状の圧粉体を成形する。圧粉体の内周面は、凹凸のない円筒面状とされる。圧粉体の外周面、上端面、及び下端面には、それぞれ軸方向溝8d1、半径方向溝8b1及び半径方向溝8c1が成形される。原料粉末としては、金属粉末{例えば、銅系粉末(銅粉末又は銅系合金粉末)、鉄系粉末(鉄粉末又は鉄系合金粉末)、銅鉄系合金粉末のうちの一種又は複数種}を主原料とし、これに、成形助剤や固体潤滑剤等の各種充填剤を添加・混合した混合粉末が使用される。 In the compression molding process, a cylindrical green compact having approximately the same shape as the bearing sleeve 8 in FIG. 3 is formed by compression molding raw material powder whose main raw material is metal powder. The inner circumferential surface of the powder compact has a cylindrical shape with no irregularities. An axial groove 8d1, a radial groove 8b1, and a radial groove 8c1 are formed on the outer peripheral surface, upper end surface, and lower end surface of the powder compact, respectively. As the raw material powder, metal powder {for example, one or more of copper-based powder (copper powder or copper-based alloy powder), iron-based powder (iron powder or iron-based alloy powder), copper-iron alloy powder} is used. A mixed powder is used as the main raw material and mixed with various fillers such as molding aids and solid lubricants.
 焼結工程では、所定の焼結温度で圧粉体を加熱することにより、隣接する金属粉末の粒子同士が焼結ネックを介して結合した焼結体を得る。こうして形成された焼結体の密度比は80~95%である。また、焼結体28の軸方向及び半径方向の密度比のバラつきは、何れも3%以下となっている。換言すると、焼結体の密度比が上記を満たすように、圧縮成形工程における圧縮率や、焼結工程における焼結温度及び時間等が設定される。 In the sintering process, the green compact is heated at a predetermined sintering temperature to obtain a sintered body in which adjacent metal powder particles are bonded to each other via sintering necks. The density ratio of the sintered body thus formed is 80 to 95%. Further, the variation in density ratio in the axial direction and the radial direction of the sintered body 28 is 3% or less. In other words, the compression ratio in the compression molding step, the sintering temperature and time in the sintering step, etc. are set so that the density ratio of the sintered body satisfies the above.
 サイジング工程では、図5に示すサイジング金型30により、焼結体28の内周面28aに動圧溝を型成形する。サイジング金型30は、コアロッド31と、上パンチ32及び下パンチ33と、ダイ34とを備える。コアロッド31の外周面には成形型35が形成されている。成形型35は、図6に示すように、丘部35cと、環状凹部35bと、傾斜凹部35aとを有する。図示例では、コアロッド31の円筒面状外周面に凹部35a,35b(散点領域)を形成し、傾斜凹部35aの周方向間に残った領域が丘部35cとなる。丘部35c、環状凹部35b、及び傾斜凹部35aは、それぞれ、図3に示す動圧溝G1、環状丘部G2、及び傾斜丘部G3の凹凸を反転させた形状を成している。各傾斜凹部35aは、それぞれ周方向幅h’[mm]と深さHf’[μm]との比(扁平度)h’/Hf’が0.1<h’/Hf’<0.65を満たしている(図7参照)。尚、各傾斜凹部35aの深さHf’とは、各傾斜凹部35aの底面(外径面)と、当該傾斜凹部35aの周方向一方側に隣接する丘部35cの外径面との最大径差である。 In the sizing process, dynamic pressure grooves are formed on the inner circumferential surface 28a of the sintered body 28 using a sizing mold 30 shown in FIG. The sizing mold 30 includes a core rod 31, an upper punch 32, a lower punch 33, and a die 34. A mold 35 is formed on the outer peripheral surface of the core rod 31 . As shown in FIG. 6, the mold 35 has a hill portion 35c, an annular recess 35b, and an inclined recess 35a. In the illustrated example, recesses 35a and 35b (scattering regions) are formed on the cylindrical outer peripheral surface of the core rod 31, and the region remaining between the inclined recesses 35a in the circumferential direction becomes a hill portion 35c. The hill portion 35c, the annular recess 35b, and the inclined recess 35a have shapes that are the inversions of the unevenness of the dynamic pressure groove G1, the annular hill G2, and the inclined hill G3 shown in FIG. 3, respectively. Each inclined recess 35a has a ratio (flatness) h'/Hf' of circumferential width h' [mm] to depth Hf' [μm] of 0.1<h'/Hf'<0.65. (See Figure 7). The depth Hf' of each inclined recess 35a is the maximum diameter between the bottom surface (outer diameter surface) of each inclined recess 35a and the outer diameter surface of the hill portion 35c adjacent to one side in the circumferential direction of the inclined recess 35a. It's the difference.
 まず、焼結体28の内周にコアロッド31を挿入すると共に、焼結体28の軸方向幅を上下パンチ32,33で拘束する。このとき、焼結体28の内径はコアロッド31の外径よりも僅かに大きいため、焼結体28の内周面とコアロッド31の外周面との間には微小な半径方向隙間が形成されている(図7参照)。 First, the core rod 31 is inserted into the inner circumference of the sintered body 28, and the axial width of the sintered body 28 is restrained by the upper and lower punches 32, 33. At this time, since the inner diameter of the sintered body 28 is slightly larger than the outer diameter of the core rod 31, a minute radial gap is formed between the inner peripheral surface of the sintered body 28 and the outer peripheral surface of the core rod 31. (See Figure 7).
 次に、図8に示すように、焼結体28、コアロッド31及び上下パンチ32,33の軸方向の相対位置を図5に示す状態で維持しながら、焼結体28をダイ34の内周に圧入する。これにより、焼結体28が軸方向両側及び外周から圧迫され、焼結体28の内周面28aが縮径して、コアロッド31の外周面に形成された成形型35に押し付けられる(図9参照)。その結果、焼結体28の内周面28aに成形型35の形状が転写されて、動圧溝G1及び丘部G2、G3が成形される。 Next, as shown in FIG. 8, while maintaining the relative positions of the sintered body 28, core rod 31, and upper and lower punches 32, 33 in the axial direction as shown in FIG. Press fit into. As a result, the sintered body 28 is pressed from both sides in the axial direction and from the outer circumference, and the inner circumferential surface 28a of the sintered body 28 is reduced in diameter and pressed against the mold 35 formed on the outer circumferential surface of the core rod 31 (FIG. 9 reference). As a result, the shape of the mold 35 is transferred to the inner peripheral surface 28a of the sintered body 28, and the dynamic pressure groove G1 and the hill portions G2 and G3 are formed.
 こうして焼結体28の内周面28aを成形型35に押し付けたとき、傾斜凹部35aの扁平度h’/Hf’が0.1よりも大きいことで、傾斜凹部35aに焼結体28の材料(肉)が入り込みやすくなる。これにより、傾斜凹部35aの隅部まで焼結体28の材料を満たすことができるため、傾斜凹部35aで成形される傾斜丘部G3の高さ、すなわち、当該傾斜丘部G3に隣接する動圧溝G1の深さHfの精度を高めることができる。従って、上述のように、焼結体28の内周面に型成形された動圧溝G1の深さを略均一にすることができ、具体的に、全ての動圧溝G1の深さHfのバラつきを1μm以下に抑えることができる。 When the inner circumferential surface 28a of the sintered body 28 is pressed against the mold 35 in this way, the flatness h'/Hf' of the inclined recess 35a is larger than 0.1, so that the material of the sintered body 28 is pressed against the inclined recess 35a. (Meat) can enter easily. As a result, the material of the sintered body 28 can be filled up to the corners of the inclined recess 35a, so that the height of the inclined hill G3 formed in the inclined recess 35a, that is, the dynamic pressure adjacent to the inclined hill G3 is increased. The accuracy of the depth Hf of the groove G1 can be improved. Therefore, as described above, the depths of the dynamic pressure grooves G1 molded on the inner circumferential surface of the sintered body 28 can be made approximately uniform, and specifically, the depth Hf of all the dynamic pressure grooves G1 can be made substantially uniform. The variation can be suppressed to 1 μm or less.
 その後、焼結体28、コアロッド31、及び上下パンチ32,33を上昇させ、ダイ34の内周から焼結体28及びコアロッド31を取り出す。このとき、焼結体28の内周面28aがスプリングバックにより拡径し、コアロッド31の外周面の成形型35から剥離する(図10参照)。その後、内周面に動圧溝G1、環状丘部G2、及び傾斜丘部G3が成形された焼結体28(すなわち、軸受スリーブ8)の内周からコアロッド31を引き抜く。 After that, the sintered body 28, the core rod 31, and the upper and lower punches 32, 33 are raised, and the sintered body 28 and the core rod 31 are taken out from the inner periphery of the die 34. At this time, the inner peripheral surface 28a of the sintered body 28 expands in diameter due to springback, and is separated from the mold 35 on the outer peripheral surface of the core rod 31 (see FIG. 10). Thereafter, the core rod 31 is pulled out from the inner periphery of the sintered body 28 (that is, the bearing sleeve 8) in which the dynamic pressure groove G1, the annular hill portion G2, and the inclined hill portion G3 are formed on the inner circumferential surface.
 本実施形態では、上述のように、焼結体28の密度比が高め(80~95%)に設定され、且つ、密度比が軸方向及び半径方向で略均一であるため、焼結体28のスプリングバック量のバラつきが抑えられ、焼結体28の内周面28a全体を均一に拡径させることができる。これにより、焼結体28の内周面28aに型成形された丘部G2,G3と、コアロッド31の外周面に設けられた成形型35とが干渉しにくくなるため、丘部G2,G3の毟れを回避して、全ての動圧溝G1の深さHfのバラつきをより確実に1μm以下に抑えることができる。 In this embodiment, as described above, the density ratio of the sintered body 28 is set to be high (80 to 95%), and the density ratio is substantially uniform in the axial direction and the radial direction. The variation in the amount of springback is suppressed, and the diameter of the entire inner circumferential surface 28a of the sintered body 28 can be uniformly expanded. This makes it difficult for the hill portions G2 and G3 molded on the inner circumferential surface 28a of the sintered body 28 to interfere with the mold 35 provided on the outer circumferential surface of the core rod 31, so that the hill portions G2 and G3 are It is possible to avoid sagging and more reliably suppress variations in the depths Hf of all the dynamic pressure grooves G1 to 1 μm or less.
 本発明は上記の実施形態に限られない。以下、本発明の他の実施形態を説明するが、上記の実施形態と同様の点については説明を省略する。 The present invention is not limited to the above embodiments. Other embodiments of the present invention will be described below, but descriptions of points similar to the above embodiments will be omitted.
 例えば図11に示すように、コアロッド31の外周面に形成された成形型35の丘部35cの外径端の角部e1,e2が尖っている(ピン角である)場合、動圧溝G1が成形された焼結体28(軸受スリーブ8)の内周からコアロッド31を軸方向一方側(図中矢印方向)に引き抜く際に、丘部35cの軸方向一方側の角部e1が、焼結体28の内周面の丘部G2,G3と干渉し、丘部G2,G3が毟れる恐れがある。 For example, as shown in FIG. 11, when the corners e1 and e2 at the outer diameter end of the hill portion 35c of the mold 35 formed on the outer peripheral surface of the core rod 31 are sharp (pin angle), the dynamic pressure groove G1 When the core rod 31 is pulled out from the inner periphery of the sintered body 28 (bearing sleeve 8) in the axial direction (arrow direction in the figure), the corner e1 on the axial one side of the hill portion 35c is sintered. There is a risk that it will interfere with the ridges G2, G3 on the inner circumferential surface of the body 28, and the ridges G2, G3 may be damaged.
 そこで、コアロッド31の成形型35の外径端の角部を丸める加工を施してもよい。具体的には、図12に示すように、噴射装置55でワーク(この場合、コアロッド31)に対して研磨材50を吹き付けることで、ワークの表面が研磨材50との摩擦によって研磨され、成形型35の丘部35cの外径端の角部が丸められる。特に、図示例では、研磨材50の投射方向に対して、コアロッド31は所定傾斜角度をなすように設定される。すなわち、研磨材50の投射方向をX方向とし、このX方向に直交する方向をY方向とした場合、Y方向に対してコアロッド31の軸心を所定角度αで傾斜させている。図示例では、コアロッド31の成形型35の軸方向一方側(反軸端側、図中右側)の端部が、軸方向他方側(軸端側、図中左側)の端部よりも噴射装置55に近くなるように、研磨材50の投射方向Xと直交するY方向に対してコアロッド31の軸心を傾斜させている。このように、コアロッド31の成形型35に対して斜め方向から研磨材50を吹き付けることで、図13に示すように、各丘部35cの軸方向一方側(コアロッド31の引き抜き方向下流側、図中右側)の角部e1が、各丘部35cの軸方向他方側(コアロッド31の引き抜き方向上流側、図中左側)の角部e2より丸められる。この成形型35で成形された動圧溝G1は、溝底の軸方向一方側の隅部f1が軸方向他方側の隅部f2よりも丸められている。動圧溝G1の隅部f1が隅部f2よりも丸められているか否かは、形状測定機により動圧軸受(軸受スリーブ8)の軸方向の溝形状チャート(図13参照)を取得し、縦横等倍にした状態で、隅部f1,f2の曲率を解析により読み取ることで判定することができる。 Therefore, the corners of the outer diameter end of the mold 35 of the core rod 31 may be rounded. Specifically, as shown in FIG. 12, by spraying the abrasive material 50 onto the workpiece (in this case, the core rod 31) using the spray device 55, the surface of the workpiece is polished by friction with the abrasive material 50, and the shape is formed. The outer diameter end corner of the hill portion 35c of the mold 35 is rounded. In particular, in the illustrated example, the core rod 31 is set to form a predetermined inclination angle with respect to the projection direction of the abrasive material 50. That is, when the projection direction of the abrasive material 50 is the X direction, and the direction perpendicular to the X direction is the Y direction, the axis of the core rod 31 is inclined at a predetermined angle α with respect to the Y direction. In the illustrated example, the end of the core rod 31 on one axial side (the opposite axial end, the right side in the figure) of the mold 35 is closer to the injection device than the end on the other axial side (the axial end, the left side in the figure). 55, the axis of the core rod 31 is inclined with respect to the Y direction perpendicular to the projection direction X of the abrasive material 50. In this way, by spraying the abrasive material 50 from an oblique direction onto the mold 35 of the core rod 31, as shown in FIG. The corner e1 on the middle right side is rounded more than the corner e2 on the other axial side of each hill 35c (upstream side in the direction in which the core rod 31 is pulled out, left side in the figure). In the dynamic pressure groove G1 formed by this mold 35, a corner f1 on one axial side of the groove bottom is rounded more than a corner f2 on the other axial side. To determine whether the corner f1 of the hydrodynamic groove G1 is rounder than the corner f2, obtain an axial groove shape chart (see FIG. 13) of the hydrodynamic bearing (bearing sleeve 8) using a shape measuring machine. This can be determined by analyzing and reading the curvatures of the corners f1 and f2 in a state where the size is the same both vertically and horizontally.
 上記のように、各丘部35cの軸方向一方側の角部e1が丸められていることによって、焼結体28の内周からコアロッド31を軸方向一方側(図13の矢印方向)に引き抜いたときに、この角部e1と丘部G2,G3との干渉による丘部G2,G3の毟れを防止できる。また、軸方向他方側の角部e2が丸められていないことで、丘部G2,G3の形状、ひいては動圧溝G1の形状を矩形に近づけることができるため、動圧溝G1による動圧力を確保することができる。 As described above, since the corner e1 on one axial side of each hill portion 35c is rounded, the core rod 31 can be pulled out from the inner circumference of the sintered body 28 in the axial direction (in the direction of the arrow in FIG. 13). When the corner portion e1 and the hill portions G2 and G3 interfere with each other, it is possible to prevent the hill portions G2 and G3 from being bent. Furthermore, since the corner e2 on the other side in the axial direction is not rounded, the shape of the hill portions G2 and G3, and ultimately the shape of the dynamic pressure groove G1, can be approximated to a rectangular shape. can be secured.
 尚、成形型35の角部を丸める加工は、上記のような噴射装置を用いて行う他、手作業により行ってもよい。 Note that the rounding of the corners of the mold 35 may be performed manually, in addition to using the above-mentioned injection device.
 動圧軸受(軸受スリーブ8)の内周面に形成される動圧溝G1の形状は、上記に限られない。例えば、環状丘部G2を省略して、周方向に対して一方側に傾斜した動圧溝G1と他方側に傾斜した動圧溝G1とを連続させ、且つ、周方向に対して一方側に傾斜した傾斜丘部G3と他方側に傾斜した傾斜丘部G3とを連続させてもよい。また、動圧発生部A1,A2を軸方向に離間させて、これらの間に円筒面を設けてもよい。 The shape of the dynamic pressure groove G1 formed on the inner circumferential surface of the dynamic pressure bearing (bearing sleeve 8) is not limited to the above. For example, by omitting the annular hill portion G2, the dynamic pressure groove G1 inclined on one side with respect to the circumferential direction and the dynamic pressure groove G1 inclined on the other side with respect to the circumferential direction are made to be continuous, and The inclined hill part G3 and the inclined hill part G3 inclined to the other side may be made to be continuous. Alternatively, the dynamic pressure generating parts A1 and A2 may be spaced apart in the axial direction, and a cylindrical surface may be provided between them.
 また、動圧軸受の軸方向一方の端面に動圧発生部(例えば、スパイラル形状の動圧溝及び丘部)を形成してもよい。この場合、軸部材にフランジ部を設け、動圧軸受の軸方向一方の端面と軸部材のフランジ部の端面との間のスラスト軸受隙間に生じる流体膜の圧力が、動圧軸受の端面に設けられた動圧発生部により高められ、この圧力により軸部材がスラスト方向に非接触支持される。 Furthermore, a dynamic pressure generating portion (for example, a spiral-shaped dynamic pressure groove and a hill portion) may be formed on one end surface of the dynamic pressure bearing in the axial direction. In this case, the shaft member is provided with a flange portion, and the fluid film pressure generated in the thrust bearing gap between one axial end surface of the hydrodynamic bearing and the end surface of the flange portion of the shaft member is provided on the end surface of the hydrodynamic pressure bearing. The shaft member is supported in a non-contact manner in the thrust direction by this pressure.
 以上の実施形態では、動圧軸受が固定側、軸部材が回転側である場合を示したが、これに限らず、軸部材を固定側、動圧軸受を回転側としてもよい。 In the above embodiments, the case where the hydrodynamic bearing is on the fixed side and the shaft member is on the rotating side is shown, but the present invention is not limited to this, and the shaft member may be on the fixed side and the hydrodynamic bearing on the rotating side.
 本発明に係る動圧軸受は、上記のように内部に潤滑油を含浸させた焼結含油軸受に限らず、潤滑油を含浸させないドライ状態でも使用することができる。また、本発明に係る動圧軸受を有する流体動圧軸受装置1は、ファンモータに限らず、HDDのディスク駆動装置のスピンドルモータや、レーザビームプリンタのポリゴンスキャナモータに適用することができる。 The dynamic pressure bearing according to the present invention is not limited to the sintered oil-impregnated bearing in which the inside is impregnated with lubricating oil as described above, but can also be used in a dry state without impregnating lubricating oil. Furthermore, the fluid dynamic pressure bearing device 1 having a dynamic pressure bearing according to the present invention is applicable not only to a fan motor but also to a spindle motor of a disk drive device of an HDD and a polygon scanner motor of a laser beam printer.
1     流体動圧軸受装置
2     軸部材
3     ロータ
4     羽根
5     モータベース
6a   ステータ
6b   マグネット
7     ハウジング
8     軸受スリーブ(動圧軸受)
9     シール部材
10   スラストプレート
28   焼結体
30   サイジング金型
31   コアロッド
32   上パンチ
33   下パンチ
34   ダイ
35   成形型
35a 傾斜凹部
35b 環状凹部
35c 丘部
50   研磨材
55   噴射装置
A1,A2    動圧発生部
G1   動圧溝
G2   環状丘部
G3   傾斜丘部
R     ラジアル軸受部
S     シール空間
T     スラスト軸受部
1 Fluid dynamic pressure bearing device 2 Shaft member 3 Rotor 4 Vane 5 Motor base 6a Stator 6b Magnet 7 Housing 8 Bearing sleeve (dynamic pressure bearing)
9 Seal member 10 Thrust plate 28 Sintered body 30 Sizing mold 31 Core rod 32 Upper punch 33 Lower punch 34 Die 35 Molding die 35a Inclined recess 35b Annular recess 35c Hill portion 50 Abrasive material 55 Injector A1, A2 Dynamic pressure generating portion G1 Dynamic pressure groove G2 Annular hill portion G3 Inclined hill portion R Radial bearing portion S Seal space T Thrust bearing portion

Claims (5)

  1.  内周面に動圧発生部が型成形された焼結体を備えた動圧軸受において、
     前記動圧発生部が、周方向に対して傾斜した方向に延びる複数の動圧溝と、前記複数の動圧溝の周方向間に設けられた複数の傾斜丘部とを有し、
     各傾斜丘部の周方向幅h[mm]と、当該傾斜丘部の周方向一方側に隣接する前記動圧溝の深さHf[μm]との比h/Hfが、0.1<h/Hf<0.65を満たし、
     前記複数の動圧溝の深さHfのバラつきが1μm以下である動圧軸受。
    In a dynamic pressure bearing equipped with a sintered body with a dynamic pressure generating part molded on the inner peripheral surface,
    The dynamic pressure generating portion has a plurality of dynamic pressure grooves extending in a direction inclined with respect to the circumferential direction, and a plurality of inclined hill portions provided between the plurality of dynamic pressure grooves in the circumferential direction,
    The ratio h/Hf of the circumferential width h [mm] of each inclined hill portion to the depth Hf [μm] of the dynamic pressure groove adjacent to one circumferential side of the inclined hill portion is 0.1<h /Hf<0.65,
    A hydrodynamic bearing in which a variation in depth Hf of the plurality of hydrodynamic grooves is 1 μm or less.
  2.  前記焼結体の密度比が80~95%であり、
     前記焼結体の軸方向及び半径方向の密度比のバラつきが3%以下である請求項1に記載の動圧軸受。
    The density ratio of the sintered body is 80 to 95%,
    2. The hydrodynamic bearing according to claim 1, wherein the sintered body has a density ratio variation of 3% or less in the axial direction and the radial direction.
  3.  前記焼結体の軸方向断面において、前記動圧溝の溝底の軸方向一方側の隅部が、軸方向他方側の隅部よりも丸められている請求項1又は2に記載の動圧軸受。 The dynamic pressure according to claim 1 or 2, wherein in an axial cross section of the sintered body, a corner on one axial side of the groove bottom of the dynamic pressure groove is rounded more than a corner on the other axial side. bearing.
  4.  請求項1又は2に記載の動圧軸受と、前記動圧軸受の内周に挿入された軸部材とを有する動圧軸受装置。 A hydrodynamic bearing device comprising the hydrodynamic bearing according to claim 1 or 2 and a shaft member inserted into the inner periphery of the hydrodynamic bearing.
  5.  請求項4に記載の動圧軸受装置と、ステータと、マグネットとを有するモータ。 A motor comprising the hydrodynamic bearing device according to claim 4, a stator, and a magnet.
PCT/JP2023/030575 2022-09-16 2023-08-24 Hydrodynamic bearing, hydrodynamic bearing device, and motor WO2024057868A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-148262 2022-09-16
JP2022148262A JP2024043207A (en) 2022-09-16 2022-09-16 Dynamic pressure bearing, dynamic pressure bearing device and motor

Publications (1)

Publication Number Publication Date
WO2024057868A1 true WO2024057868A1 (en) 2024-03-21

Family

ID=90200469

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2023/030575 WO2024057868A1 (en) 2022-09-16 2023-08-24 Hydrodynamic bearing, hydrodynamic bearing device, and motor

Country Status (3)

Country Link
JP (1) JP2024043207A (en)
CN (1) CN117722435A (en)
WO (1) WO2024057868A1 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05177545A (en) * 1991-12-28 1993-07-20 Konica Corp Blasting device, dynamic pressure type air bearing, and polygon mirror unit
JP2002061650A (en) * 2000-08-22 2002-02-28 Hitachi Powdered Metals Co Ltd Method for manufacturing sintered bearing with dynamic pressure groove
JP2007170577A (en) * 2005-12-22 2007-07-05 Sony Corp Method for manufacturing member for dynamic pressure bearing
JP2015064019A (en) * 2013-09-24 2015-04-09 Ntn株式会社 Sintered metal bearing and fluid dynamic pressure bearing device including the same
JP2016050648A (en) * 2014-09-01 2016-04-11 Ntn株式会社 Fluid dynamic pressure bearing device, and bearing member and shaft member used in the same
JP2018040458A (en) * 2016-09-09 2018-03-15 Ntn株式会社 Dynamic pressure bearing and manufacturing method thereof

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05177545A (en) * 1991-12-28 1993-07-20 Konica Corp Blasting device, dynamic pressure type air bearing, and polygon mirror unit
JP2002061650A (en) * 2000-08-22 2002-02-28 Hitachi Powdered Metals Co Ltd Method for manufacturing sintered bearing with dynamic pressure groove
JP2007170577A (en) * 2005-12-22 2007-07-05 Sony Corp Method for manufacturing member for dynamic pressure bearing
JP2015064019A (en) * 2013-09-24 2015-04-09 Ntn株式会社 Sintered metal bearing and fluid dynamic pressure bearing device including the same
JP2016050648A (en) * 2014-09-01 2016-04-11 Ntn株式会社 Fluid dynamic pressure bearing device, and bearing member and shaft member used in the same
JP2018040458A (en) * 2016-09-09 2018-03-15 Ntn株式会社 Dynamic pressure bearing and manufacturing method thereof

Also Published As

Publication number Publication date
CN117722435A (en) 2024-03-19
JP2024043207A (en) 2024-03-29

Similar Documents

Publication Publication Date Title
KR100619164B1 (en) Hydrodynamic type bearing and hydrodynamic type bearing unit
US8876385B2 (en) Bearing member and fluid dynamic bearing device using same
JPH1137156A (en) Manufacture of dynamic type oil-containing porous bearing
WO2018037822A1 (en) Dynamic pressure bearing and method for manufacturing same
WO2004038240A1 (en) Hydrodynamic bearing device
WO2024057868A1 (en) Hydrodynamic bearing, hydrodynamic bearing device, and motor
US9732796B2 (en) Sintered metal bearing and method for producing same
JP6877185B2 (en) Fluid dynamic bearing device and motor equipped with it
CN220850360U (en) Dynamic pressure bearing, dynamic pressure bearing device, and motor
US20190078617A1 (en) Dynamic pressure bearing and method for manufacturing same
TW202413814A (en) Dynamic pressure bearings, dynamic pressure bearing devices and motors
WO2023047938A1 (en) Dynamic bearing and fluid dynamic bearing device provide with same
JP2000087953A (en) Dynamic pressure type sintered oil-retaining bearing unit
WO2015137059A1 (en) Sintered bearing, fluid dynamic bearing device and motor comprising same, and sintered bearing manufacturing method
JP7094118B2 (en) Sintered metal dynamic pressure bearing
JP2016180427A (en) Bearing member of fluid dynamic pressure bearing device and manufacturing method thereof
JP2024053879A (en) Dynamic pressure bearing and fluid dynamic pressure bearing device equipped with same
CN117940681A (en) Dynamic pressure bearing and fluid dynamic pressure bearing device provided with same
WO2023189389A1 (en) Oil-impregnated sintered bearing and fluid dynamic bearing device including same
JP2005180707A (en) Dynamic pressure type sintered oil-impregnated bearing unit
JP6981900B2 (en) Fluid dynamic bearing device and motor equipped with it
JP5606831B2 (en) Bearing member and manufacturing method thereof
JP2004316924A (en) Dynamic pressure-type oil-impregnated sintered bearing unit
JP4451409B2 (en) Method for producing hydrodynamic sintered oil-impregnated bearing unit
WO2019065719A1 (en) Fluid dynamic pressure bearing device and motor having same