WO2024045283A1 - Mems麦克风 - Google Patents

Mems麦克风 Download PDF

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Publication number
WO2024045283A1
WO2024045283A1 PCT/CN2022/125144 CN2022125144W WO2024045283A1 WO 2024045283 A1 WO2024045283 A1 WO 2024045283A1 CN 2022125144 W CN2022125144 W CN 2022125144W WO 2024045283 A1 WO2024045283 A1 WO 2024045283A1
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WO
WIPO (PCT)
Prior art keywords
back plate
mems microphone
reinforcing ribs
body part
microphone according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2022/125144
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English (en)
French (fr)
Inventor
王琳琳
张睿
王凯杰
赵转转
阮玉明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AAC Technologies Holdings Shenzhen Co Ltd
Original Assignee
AAC Acoustic Technologies Shenzhen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AAC Acoustic Technologies Shenzhen Co Ltd filed Critical AAC Acoustic Technologies Shenzhen Co Ltd
Priority to JP2022578986A priority Critical patent/JP7595400B2/ja
Priority to US18/091,346 priority patent/US12267650B2/en
Publication of WO2024045283A1 publication Critical patent/WO2024045283A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones

Definitions

  • the present invention relates to the field of electroacoustic conversion, and in particular to a MEMS microphone.
  • Mobile communication technology has developed rapidly in recent years, and consumers are increasingly using mobile communication devices, such as portable phones, Internet-enabled portable phones, personal digital assistants or other devices for communication in dedicated communication networks, among which microphones are among them.
  • mobile communication devices such as portable phones, Internet-enabled portable phones, personal digital assistants or other devices for communication in dedicated communication networks, among which microphones are among them.
  • One of the important components, especially the MEMS microphone is important.
  • Micro-Electro-Mechanical System (MEMS) microphone is an electric energy sound exchanger made using micromachining technology. It has the characteristics of small size, good frequency response characteristics, and low noise. With the development of compact, thin and light electronic devices, MEMS microphones are more and more widely used in these devices.
  • MEMS microphones in the related art include a substrate with a back cavity and a capacitor system disposed on the substrate.
  • the capacitor system includes a back plate and a diaphragm arranged opposite to the back plate.
  • the strength of the backplane is very important to the reliability of the MEMS microphone.
  • there are a number of through holes on the backplane which will further reduce the strength of the backplane, thereby affecting the reliability of the product.
  • the technical problem to be solved by the present invention is to provide a MEMS microphone with a higher backplane strength.
  • a MEMS microphone which includes a substrate with a back cavity and a capacitor system arranged on the substrate.
  • the capacitor system includes a back plate and a diaphragm arranged opposite to the back plate.
  • the back plate includes a body part and a fixing part connecting the body part and the base.
  • the back plate is also provided with a plurality of strip-shaped reinforcing ribs protruding from the body part.
  • each of the reinforcing ribs connects two opposite edges of the body part.
  • At least one of the reinforcing ribs passes through the center of the back plate.
  • the reinforcing ribs are centrally symmetrically arranged along the center of the back plate.
  • the reinforcing ribs extend along the radial direction of the back plate body.
  • the reinforcing ribs include a plurality of parallel and spaced apart horizontal bar reinforcing ribs and a plurality of parallel and spaced apart vertical bar reinforcing bars perpendicular to the horizontal bar reinforcing bars.
  • the back plate is further provided with a connection block located at the connection point between the fixing part and the body part, and the connection block is connected to the fixing part and the body part respectively.
  • the fixing part and the body part are perpendicular to each other, and the connecting block is wedge-shaped.
  • the reinforcing rib is located on a side of the body portion close to the base.
  • the back plate is provided with a plurality of through holes penetrating the body part.
  • the back plate is provided with a number of strip-shaped reinforcing ribs, the strength of the back plate can be enhanced and the performance of the MEMS microphone can be improved.
  • Figure 1 is a cross-sectional view of a MEMS microphone provided by the first embodiment of the present invention
  • Figure 2 is a schematic structural diagram of the backplane of the MEMS microphone provided by the first embodiment of the present invention
  • Figure 3 is a schematic structural diagram of the backplane of the MEMS microphone provided by the second embodiment of the present invention.
  • FIG. 1 and FIG. 2 is a MEMS microphone 100 according to a first embodiment of the present invention. It includes a substrate 10 with a back cavity 11 and a capacitor system 302 disposed on the substrate 10 .
  • the capacitive system 302 includes a back plate 20 and a diaphragm 30 disposed opposite to the back plate 20 .
  • the diaphragm 30 is located on a side of the back plate 20 close to the substrate 10 .
  • the back plate 20 includes a body part 21 provided with a plurality of through holes 210 and a fixing part 22 connecting the body part 21 and the base 10 .
  • the back plate 20 is also provided with a plurality of strip-shaped reinforcing ribs 23 protruding from the body portion 21 .
  • the reinforcing ribs 23 can enhance the strength of the back plate 20 and improve the reliability of the MEMS microphone 100 .
  • each reinforcing rib 23 connects two opposite edges of the main body part 21 , that is, the reinforcing rib 23 runs through the entire back panel 20 , and the two ends of the reinforcing rib 23 extend to two opposite edges of the main body part 21 respectively. .
  • at least one reinforcing rib 23 passes through the center of the back plate 20, thereby increasing the strength of the center of the back plate 20.
  • the reinforcing ribs 23 extend along the radial direction of the back plate 20 , that is, all the reinforcing ribs 23 pass through the center of the back plate 20 , and the reinforcing ribs 23 are arranged symmetrically along the center of the back plate 20 .
  • the back plate 20 is also provided with a connection block 24 located at the connection between the fixing part 22 and the body part 21 .
  • the connection block 24 is located on the side of the back plate 20 close to the base 10 and is connected to the fixing part 22 respectively. Connected to the main body 21. That is, the connecting block 24 is clamped between the fixing part 22 and the main body part 21 , which can further enhance the strength of the back plate 20 .
  • the fixing part 22 and the main body part 21 are perpendicular to each other, and the connecting block 24 is wedge-shaped.
  • the back plate 20' of the MEMS microphone As shown in Figure 3, it is the back plate 20' of the MEMS microphone according to the second embodiment of the present invention.
  • the arrangement of the reinforcing ribs 23' is different.
  • the reinforcing ribs 23' include a plurality of parallel and spaced apart horizontal bar reinforcement ribs 231' and a plurality of parallel and spaced apart vertical bar reinforcement ribs 232' perpendicular to the horizontal bar reinforcement ribs 231'.
  • the back plate is provided with a number of strip-shaped reinforcing ribs, the strength of the back plate can be enhanced and the performance of the MEMS microphone can be improved.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

本发明提供了一种MEMS麦克风，其包括具有背腔的基底及设置在所述基底上的电容系统，所述电容系统包括背板以及与所述背板相对设置的振膜，所述背板包括本体部和连接所述本体部和所述基底的固定部，所述背板还设有凸出所述本体部的若干条状加强筋。与相关技术相比，本发明提供的MEMS麦克风可以提高背板的强度。

Description

MEMS麦克风
【 技术领域】
本发明涉及电声转换领域，尤其涉及一种MEMS麦克风。
【 背景技术】
近年来移动通信技术已经得到快速发展，消费者越来越多地使用移动通信设备，例如便携式电话、能上网的便携式电话、个人数字助理或专用通信网络进行通信的其他设备，其中麦克风则是其中重要的部件之一，特别是MEMS麦克风。
微机电系统（Micro-Electro-Mechanical System，MEMS）麦克风是一种利用微机械加工技术制作出来的电能换声器，其具有体积小、频响特性好、噪声低等特点。随着电子设备的小巧化、轻薄化发展，MEMS麦克风被越来越广泛地运用到这些设备上。
相关技术中的MEMS麦克风包括具有背腔的基底以及设置在所述基底上的电容系统，所述电容系统包括背板及与所述背板相对设置的振膜。背板的强度对MEMS麦克风的可靠性很重要，另外，背板上设有若干通孔，会进一步降低背板的强度，从而影响产品的可靠性
因此，有必要提供一种改进的MEMS麦克风来解决上述问题。
【 发明内容】
本发明要解决的技术问题是提供一种背板强度较高的MEMS麦克风。
为解决上述技术问题，提供了一种MEMS麦克风，其包括具有背腔的基底及设置在所述基底上的电容系统，所述电容系统包括背板以及与所述背板相对设置的振膜，所述背板包括本体部和连接所述本体部和所述基底的固定部，所述背板还设有凸出所述本体部的若干条状加强筋。
优选的，每根所述加强筋连接所述本体部的相对设置的两个边缘。
优选的，至少一根所述加强筋经过所述背板的中心。
优选的，所述加强筋沿所述背板中心呈中心对称设置。
优选的，所述加强筋沿所述背板本体部的径向延伸。
优选的，所述加强筋包括多根平行间隔设置的横条加强筋和与所述横条加强筋垂直的多根平行间隔设置的竖条加强筋。
优选的，所述背板还设有位于所述固定部和本体部连接处的连接块，所述连接块分别与所述固定部和本体部连接。
优选的，所述固定部和所述本体部垂直，所述连接块为楔形。
优选的，所述加强筋位于所述本体部靠近所述基底的一侧。
优选的，所述背板设有若干贯穿所述本体部的通孔。
与相关技术相比，由于背板设有若干条状的加强筋，可加强背板的强度，提高MEMS麦克风的性能。
【 附图说明】
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其它的附图，其中：
图1为本发明第一实施方式提供的MEMS麦克风剖视图；
图2为本发明第一实施方式提供的MEMS麦克风的背板结构示意图；
图3为本发明第二实施方式提供的MEMS麦克风的背板结构示意图。
【 具体实施方式】
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅是本发明的一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其它实施例，都属于本发明保护的范围。
第一实施方式
请参阅图1及图2所示，为本发明第一实施方式的MEMS麦克风100，其包括具有背腔11的基底10及设置在所述基底10上的电容系统302。电容系统302包括背板20以及与所述背板20相对设置的振膜30，所述振膜30位于背板20靠近所述基底10的一侧。当声压作用于振膜30时，正对背板20与背对背板20的振膜30两面存在压强差，使得振膜30做靠近背板20或远离背板20的运动，从而引起振膜30与背板20间电容的变化，实现声音信号到电信号的转换。
所述背板20包括设有若干贯穿的通孔210的本体部21和连接所述本体部21和基底10的固定部22。在本实施方式中，背板20还设有凸出所述本体部21的若干条状加强筋23，加强筋23可以增强背板20的强度，提升MEMS麦克风100的可靠性。具体的，每根加强筋23连接所述本体部21的相对设置的两个边缘，即加强筋23贯穿整个背板20，加强筋23的两端分别延伸至本体部21的相对的两个边缘。另外，至少一根加强筋23经过背板20的中心，由此提升背板20中心的强度。
在本实施方式中，加强筋23沿背板20的径向延伸，即所有加强筋23均经过背板20的中心，并且加强筋23沿背板20中心呈中心对称设置。
进一步的，背板20还设有位于所述固定部22和本体部21连接处的连接块24，所述连接块24位于背板20靠近所述基底10一侧并且分别与所述固定部22和本体部21连接。即连接块24卡设于所述固定部22和本体部21之间，可进一步加强背板20的强度。在本实施方式中，所述固定部22和所述本体部21垂直，所述连接块24为楔形。
第二实施方式
如图3所示，为本发明的第二实施方式的MEMS麦克风的背板20’，第二实施方式与第一实施方式的区别仅在于：加强筋23’排布方式不同。在第二实施方式中，加强筋23’包括多根平行间隔设置的横条加强筋231’和与所述横条加强筋231’垂直的多根平行间隔设置的竖条加强筋232’。
与相关技术相比，由于背板设有若干条状的加强筋，可加强背板的强度，提高MEMS麦克风的性能。
以上所述的仅是本发明的实施方式，在此应当指出，对于本领域的普通技术人员来说，在不脱离本发明创造构思的前提下，还可以做出改进，但这些均属于本发明的保护范围。

Claims (10)

  1. 一种MEMS麦克风，其包括具有背腔的基底及设置在所述基底上的电容系统，所述电容系统包括背板以及与所述背板相对设置的振膜，所述背板包括本体部和连接所述本体部和所述基底的固定部，其特征在于，所述背板还设有凸出所述本体部的若干条状加强筋。
  2. 根据权利要求1所述的MEMS麦克风，其特征在于：每根所述加强筋连接所述本体部的相对设置的两个边缘。
  3. 根据权利要求2所述的MEMS麦克风，其特征在于：至少一根所述加强筋经过所述背板的中心。
  4. 根据权利要求3所述的MEMS麦克风，其特征在于：所述加强筋沿所述背板中心呈中心对称设置。
  5. 根据权利要求4所述的MEMS麦克风，其特征在于：所述加强筋沿所述背板本体部的径向延伸。
  6. 根据权利要求4所述的MEMS麦克风，其特征在于：所述加强筋包括多根平行间隔设置的横条加强筋和与所述横条加强筋垂直的多根平行间隔设置的竖条加强筋。
  7. 根据权利要求1所述的MEMS麦克风，其特征在于：所述背板还设有位于所述固定部和本体部连接处的连接块，所述连接块分别与所述固定部和本体部连接。
  8. 根据权利要求7所述的MEMS麦克风，其特征在于：所述固定部和所述本体部垂直，所述连接块为楔形。
  9. 根据权利要求7所述的MEMS麦克风，其特征在于：所述加强筋位于所述本体部靠近所述基底的一侧。
  10. 根据权利要求1所述的MEMS麦克风，其特征在于：所述背板设有若干贯穿所述本体部的通孔。
PCT/CN2022/125144 2022-09-02 2022-10-13 Mems麦克风 Ceased WO2024045283A1 (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2022578986A JP7595400B2 (ja) 2022-09-02 2022-10-13 Ｍｅｍｓマイクロフォン
US18/091,346 US12267650B2 (en) 2022-09-02 2022-12-29 MEMS microphone

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CN202222343985.0U CN218387899U (zh) 2022-09-02 2022-09-02 Mems麦克风
CN202222343985.0 2022-09-02

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US18/091,346 Continuation US12267650B2 (en) 2022-09-02 2022-12-29 MEMS microphone

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102244832A (zh) * 2010-05-12 2011-11-16 歌尔声学股份有限公司 电容式传声器芯片
CN102264019A (zh) * 2010-05-26 2011-11-30 国立清华大学 微机电电容式麦克风
CN104105040A (zh) * 2014-07-31 2014-10-15 歌尔声学股份有限公司 一种mems麦克风
CN104853300A (zh) * 2015-05-13 2015-08-19 北京卓锐微技术有限公司 一种应用柔性背极的硅电容麦克风
CN206164843U (zh) * 2016-08-31 2017-05-10 歌尔股份有限公司 一种mems麦克风
US20190110126A1 (en) * 2017-10-05 2019-04-11 Cirrus Logic International Semiconductor Ltd. Mems devices and processes
CN111131987A (zh) * 2019-12-02 2020-05-08 杭州士兰微电子股份有限公司 Mems麦克风及其制造方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102244832A (zh) * 2010-05-12 2011-11-16 歌尔声学股份有限公司 电容式传声器芯片
CN102264019A (zh) * 2010-05-26 2011-11-30 国立清华大学 微机电电容式麦克风
CN104105040A (zh) * 2014-07-31 2014-10-15 歌尔声学股份有限公司 一种mems麦克风
CN104853300A (zh) * 2015-05-13 2015-08-19 北京卓锐微技术有限公司 一种应用柔性背极的硅电容麦克风
CN206164843U (zh) * 2016-08-31 2017-05-10 歌尔股份有限公司 一种mems麦克风
US20190110126A1 (en) * 2017-10-05 2019-04-11 Cirrus Logic International Semiconductor Ltd. Mems devices and processes
CN111131987A (zh) * 2019-12-02 2020-05-08 杭州士兰微电子股份有限公司 Mems麦克风及其制造方法

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