WO2024042681A1 - 加工システム - Google Patents

加工システム Download PDF

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Publication number
WO2024042681A1
WO2024042681A1 PCT/JP2022/032062 JP2022032062W WO2024042681A1 WO 2024042681 A1 WO2024042681 A1 WO 2024042681A1 JP 2022032062 W JP2022032062 W JP 2022032062W WO 2024042681 A1 WO2024042681 A1 WO 2024042681A1
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WO
WIPO (PCT)
Prior art keywords
hood
optical system
irradiation optical
processing
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
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PCT/JP2022/032062
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English (en)
French (fr)
Japanese (ja)
Inventor
壮史 松田
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Nikon Corp
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Nikon Corp
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Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2024542531A priority Critical patent/JPWO2024042681A1/ja
Priority to PCT/JP2022/032062 priority patent/WO2024042681A1/ja
Publication of WO2024042681A1 publication Critical patent/WO2024042681A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring

Definitions

  • the present invention relates, for example, to the technical field of processing systems capable of processing objects.
  • Patent Document 1 describes a processing system that processes an object by irradiating the object with laser light. This type of processing system is required to process objects appropriately.
  • a processing system capable of processing an object by irradiating the object with an energy beam
  • the system comprising: an exit optical system capable of emitting the energy beam; a plurality of irradiation optical systems capable of irradiating the object with an energy beam and attachable to the exit side of the exit optical system; a plurality of hoods attachable to the exit side of the irradiation optical system; one of the irradiation optical systems can be attached to the exit side of the exit optical system, and one hood of the plurality of hoods is attached to the exit side of the one irradiation optical system.
  • a processing system is provided that includes an attachable attachment device.
  • a processing system capable of processing an object by irradiating the object with an energy beam, comprising: an irradiation optical system capable of irradiating the object with the energy beam; a plurality of hoods that can be attached to the side, an attachment device that can attach one hood of the plurality of hoods to the exit side of the irradiation optical system, and a control device, the control device
  • the control device controls the processing of the object based on the processing information
  • the control device controls the mounting device to attach one of the plurality of hoods to the exit side of the irradiation optical system based on the processing information.
  • a controlling processing system is provided.
  • a processing system capable of processing an object by irradiating the object with an energy beam, the irradiation optical system capable of irradiating the object with the energy beam, and the irradiation using force.
  • a processing system is provided that includes a hood attachably attached to an optical system.
  • a processing system capable of processing an object by irradiating the object with an energy beam, comprising: an irradiation optical system capable of irradiating the object with the energy beam;
  • a processing system is provided that includes a plurality of hoods that can be attached to the side, and a mounting device that can attach one of the hoods to the exit side of the irradiation optical system.
  • FIG. 1 is a cross-sectional view schematically showing an example of the configuration of a processing system in this embodiment.
  • FIG. 2 is a block diagram showing an example of the configuration of the processing system in this embodiment.
  • FIG. 3 is a block diagram showing the configuration of the processing head in this embodiment.
  • FIG. 4 is a sectional view showing the optical configuration of the processing head in this embodiment.
  • FIG. 5 is a sectional view conceptually showing an example of the configuration of the mounting device.
  • FIG. 6 is a cross-sectional view showing the configuration of a processing head in which the irradiation optical system and hood are replaceable.
  • FIG. 7 is a cross-sectional view showing the configuration of a processing head in which the irradiation optical system and hood are replaceable.
  • FIG. 8 is a cross-sectional view showing the configuration of a head housing for replacing the irradiation optical system.
  • FIGS. 9(a) to 9(c) is a cross-sectional view showing the process of attaching the irradiation optical system to the exit optical system.
  • FIG. 9(a) to 9(c) is a cross-sectional view showing the process of attaching the irradiation optical system to the exit optical system.
  • FIG. 9(a) to 9(c) is a cross-
  • FIGS. 10 is a sectional view showing the structure of a replaceable hood.
  • FIG. 11 is a perspective view showing the structure of a replaceable hood.
  • FIGS. 12(a) to 12(b) is a cross-sectional view showing the process of attaching the hood to the irradiation optical system.
  • FIGS. 13(a) to 13(b) is a cross-sectional view showing the process of attaching the hood to the irradiation optical system.
  • FIGS. 14(a) to 14(b) is a cross-sectional view showing the process of removing the hood from the irradiation optical system.
  • FIGS. 15(a) to 15(j) is a cross-sectional view showing an example of the irradiation optical system.
  • FIGS. 16(a) to 16(b) is a sectional view showing an example of a hood.
  • FIGS. 17(a) to 17(d) is a sectional view showing an example of a hood.
  • FIGS. 18(a) to 18(e) is a cross-sectional view showing an example of a hood.
  • FIGS. 19(a) to 19(d) is a sectional view showing an example of a hood.
  • FIGS. 20(a) to 20(b) is a sectional view showing an example of a hood.
  • FIGS. 21(a) to 21(b) is a sectional view showing an example of a hood.
  • FIGS. 22(a) to 22(b) is a sectional view showing an example of a hood.
  • FIGS. 23(a) to 23(b) is a cross-sectional view showing an example of a hood attached to the irradiation optical system.
  • FIGS. 24(a) to 24(c) is a cross-sectional view showing an example of a hood attached to the irradiation optical system.
  • FIGS. 25(a) to 25(b) is a cross-sectional view showing an example of a hood attached to the irradiation optical system.
  • FIG. 26(a) to 26(c) is a cross-sectional view showing an example of a hood attached to the irradiation optical system.
  • FIG. 27 shows table information showing the correspondence between the type of irradiation optical system and the type of hood to be attached to the irradiation optical system.
  • FIGS. 28(a) to 28(b) is a cross-sectional view showing an example of a hood attached to the irradiation optical system.
  • FIG. 29 shows table information showing the correspondence between the type of processing and the type of hood to be attached to the irradiation optical system.
  • FIGS. 30(a) to 30(b) is a cross-sectional view showing an example of a hood attached to the irradiation optical system.
  • FIG. 31 is a flowchart showing an example of the flow of a hood replacement operation for replacing the hood.
  • FIG. 32 shows table information showing the correspondence between the type of processing, the type of irradiation optical system, and the type of hood to be attached to the irradiation optical system.
  • FIG. 33 is a flowchart showing an example of the flow of a hood replacement operation for replacing the hood.
  • FIG. 34 is a block diagram showing an example of the configuration of a processing system in the first modification.
  • FIG. 35 is a block diagram showing an example of the configuration of a processing system in the second modification.
  • FIG. 36 is a sectional view showing the configuration of a hood in the third modification.
  • each of the X-axis direction and the Y-axis direction is a horizontal direction (that is, a predetermined direction within a horizontal plane), and the Z-axis direction is a vertical direction (that is, a direction perpendicular to the horizontal plane). (and substantially in the vertical direction).
  • the rotation directions (in other words, the tilt directions) around the X-axis, Y-axis, and Z-axis are referred to as the ⁇ X direction, the ⁇ Y direction, and the ⁇ Z direction, respectively.
  • the Z-axis direction may be the direction of gravity.
  • the XY plane may be set in the horizontal direction.
  • FIG. 1 is a cross-sectional view schematically showing an example of the configuration of the processing system SYS in this embodiment.
  • FIG. 2 is a block diagram showing an example of the configuration of the processing system SYS in this embodiment.
  • the processing system SYS includes a processing unit 1 and a control unit 2.
  • the processing unit 1 may be called a processing device, and the control unit 2 may be called a control device.
  • At least a portion of the processing unit 1 may be accommodated in the internal space SP1 of the housing 3.
  • the internal space SP1 of the housing 3 may be purged with a purge gas (that is, gas) such as nitrogen gas, or may not be purged with a purge gas.
  • the internal space SP1 of the housing 3 may or may not be evacuated.
  • the processing unit 1 does not have to be accommodated in the internal space SP1 of the housing 3.
  • a local space surrounding only a part of the processing unit 1 may be purged with a purge gas or may be evacuated.
  • the processing unit 1 is capable of processing a workpiece W, which is a workpiece (which may also be referred to as a base material), under the control of the control unit 2.
  • the workpiece W may be made of metal, an alloy (such as duralumin), a semiconductor (such as silicon), a resin, or a CFRP. It may be a composite material such as (Carbon Fiber Reinforced Plastic), a paint (as an example, a paint layer applied to a base material), a glass, or any other material. It may also be an object made of material.
  • the processing unit 1 irradiates the workpiece W with processing light EL in order to process the workpiece W.
  • the processing light EL may be any type of light as long as the workpiece W can be processed by being irradiated onto the workpiece W. In this embodiment, the description will proceed using an example in which the processing light EL is a laser beam, but the processing light EL may be a different type of light than a laser beam.
  • the wavelength of the processing light EL may be any wavelength as long as the workpiece W can be processed by being irradiated with the processing light EL.
  • the processing light EL may be visible light or invisible light (for example, at least one of infrared light, ultraviolet light, extreme ultraviolet light, etc.).
  • the processing light EL may include pulsed light. Alternatively, the processing light EL may not include pulsed light. In other words, the processing light EL may be continuous light. Note that since the light is an example of an energy beam, the processing light EL may also be referred to as a processing beam.
  • the processing unit 1 may perform removal processing on the workpiece W. That is, the processing unit 1 may perform removal processing to remove a part of the workpiece W. In this embodiment, the processing unit 1 may perform removal processing using the principle of non-thermal processing (for example, ablation processing). That is, the processing unit 1 may perform non-thermal processing (for example, ablation processing) on the workpiece W. In order to perform non-thermal processing, the processing unit 1 may use light with high photon density (in other words, fluence) as the processing light EL. As an example, the processing unit 1 may use, as the processing light EL, light including pulsed light with a light emission time of nanoseconds or less, picoseconds or less, or femtoseconds or less.
  • the processing light EL light including pulsed light with a light emission time of nanoseconds or less, picoseconds or less, or femtoseconds or less.
  • the processing unit 1 may use, as the processing light EL, light containing pulsed light with a pulse width of nanoseconds or less, picoseconds or less, or femtoseconds or less.
  • the material constituting the energy transfer portion of the workpiece W to which the energy of the processing light EL is transferred instantaneously evaporates and scatters. That is, the material constituting the energy transfer portion of the workpiece W evaporates and scatters within a sufficiently shorter time than the thermal diffusion time of the workpiece W.
  • the material constituting the energy transfer portion of the workpiece W may sublimate without going through a molten state. In this case, the material constituting the energy transfer portion of the work W may be released from the work W as at least one of ions, atoms, radicals, molecules, clusters, and solid pieces.
  • the processing unit 1 may perform additional processing on the workpiece W. That is, the processing unit 1 may perform additional processing to form a shaped object on the workpiece W. In this case, the processing unit 1 may be considered capable of functioning as a 3D printer.
  • the processing unit 1 may perform melt processing that melts the surface of the workpiece W and solidifies the melted surface. Note that melt processing may also be referred to as remelt processing.
  • the processing unit 1 may perform flat processing to make the surface of the workpiece W closer to a flat surface than before the melt processing by performing melt processing.
  • the processing unit 1 may perform melt processing using the principle of thermal processing. That is, the processing unit 1 may perform thermal processing on the workpiece W.
  • the processing unit 1 may use light containing pulsed light of milliseconds or more or nanoseconds or more as the processing light EL.
  • the processing unit 1 may use continuous light as the processing light EL.
  • the machining unit 1 when the machining unit 1 performs both non-thermal machining and thermal machining, the machining unit 1 includes a machining light source 11 that generates machining light EL used for non-thermal machining, and a machining light source that generates machining light EL used for non-thermal machining.
  • a processing light source that generates the processing light EL to be used may be provided separately.
  • a processing light source that generates processing light EL used for non-thermal processing may be arranged inside the processing head 13.
  • the processing unit 1 may perform marking processing to form a desired mark on the surface of the workpiece W.
  • the processing unit 1 may perform surface modification processing to change the characteristics of the surface of the workpiece W.
  • the processing unit 1 may perform peening processing to change the surface characteristics of the workpiece W.
  • the processing unit 1 may perform a peeling process to peel off the surface of the workpiece W.
  • the processing unit 1 may perform welding processing to join one work W and another work W.
  • the processing unit 1 may perform cutting processing to cut the workpiece W.
  • the processing unit 1 may form a desired structure on the surface of the workpiece W by processing the workpiece W. However, the processing unit 1 may perform processing different from the processing for forming a desired structure on the surface of the workpiece W.
  • An example of a process different from the process for forming a desired structure on the surface of the work W may be flattening of the work W.
  • the flattening of the workpiece W may include grinding and flattening the surface of the workpiece W.
  • the riblet structure may include a structure capable of reducing resistance (particularly, at least one of frictional resistance and turbulent flow frictional resistance) on the surface of the work W against fluid. For this reason, the riblet structure may be formed on the workpiece W having a member installed (in other words, located) in the fluid.
  • the term "fluid” used herein means a medium (for example, at least one of gas and liquid) flowing toward the surface of the workpiece W. For example, if the surface of the workpiece W moves relative to the medium while the medium itself is stationary, this medium may be referred to as a fluid.
  • the state in which the medium is stationary may mean a state in which the medium is not moving relative to a predetermined reference object (for example, the ground surface).
  • An example of the workpiece W on which the riblet structure is formed is at least one of an aircraft, a windmill, an engine turbine, and a power generation turbine.
  • the workpiece W becomes easier to move relative to the fluid. Therefore, the resistance that prevents movement of the workpiece W relative to the fluid is reduced, leading to energy savings.
  • the resistance that impedes movement (typically, rotation) of the windmill is reduced, so that the efficiency of the windmill can be improved.
  • the workpiece W is an engine turbine (for example, at least a part of the engine turbine)
  • the resistance that prevents movement (typically, rotation) of the engine turbine is reduced; This leads to higher efficiency or energy saving of engine turbines.
  • the workpiece W is a power generation turbine (for example, at least a part of the power generation turbine)
  • the resistance that prevents movement (typically, rotation) of the power generation turbine is reduced; This leads to higher efficiency of power generation turbines (in other words, improved power generation efficiency).
  • Processing Unit 1 is committed to achieving Goal 13 of the Sustainable Development Goals (SDGs) led by the United Nations: ⁇ Take urgent action to combat climate change and its impacts.'' It has the potential to contribute to ⁇ 13.2.2 Reduction of Total Greenhouse Gas Emissions per Year'', which is one of the goals set forth in ⁇ and its impact''.
  • SDGs Sustainable Development Goals
  • Another example of the desired structure is a hole structure.
  • Another example of the desired structure is a carved structure.
  • the processing unit 1 is further capable of measuring the measurement object M under the control of the control unit 2.
  • the processing unit 1 irradiates the measurement object M with measurement light ML for measuring the measurement object M, in order to measure the measurement object M. That is, the processing unit 1 measures the measurement object M using a measurement method using the measurement light ML. Specifically, the processing unit 1 irradiates the measurement object M with the measurement light ML, and detects at least a portion of the return light RL that returns from the measurement object M irradiated with the measurement light ML ( In other words, the object M to be measured is measured by receiving light.
  • the return light RL returning from the measurement object M irradiated with the measurement light ML is light from the measurement object M generated by the irradiation of the measurement light ML.
  • the processing unit 1 may measure the measurement object M using a measurement method different from the measurement method using the measurement light ML.
  • the measurement light ML may be any type of light as long as the measurement target M can be measured by being irradiated onto the measurement target M.
  • the description will proceed using an example in which the measurement light ML is a laser light.
  • the measurement light ML may be a different type of light from laser light.
  • the wavelength of the measurement light ML may be any wavelength as long as the measurement target M can be measured by being irradiated onto the measurement target M.
  • the measurement light ML may be visible light or invisible light (for example, at least one of infrared light, ultraviolet light, extreme ultraviolet light, etc.).
  • the measurement light ML may include pulsed light (for example, pulsed light whose emission time is picoseconds or less). Alternatively, the measurement light ML does not need to include pulsed light. In other words, the measurement light ML may be continuous light. Note that since light is an example of an energy beam, the measurement light ML may also be referred to as a measurement beam.
  • the processing unit 1 may be able to measure the characteristics of the measurement target M using the measurement light ML.
  • the characteristics of the measurement target M include, for example, the position of the measurement target M, the shape of the measurement target M, the reflectance of the measurement target M, the transmittance of the measurement target M, the temperature of the measurement target M, and the measurement It may include at least one of the surface roughness of the object M.
  • the measurement object M may include, for example, a workpiece W that is processed by the processing unit 1.
  • the measurement object M may include, for example, any object placed on a stage 15, which will be described later.
  • the measurement object M may include a stage 15, for example.
  • the processing unit 1 includes a processing light source 11, a measurement light source 12, a processing head 13, a head drive system 14, a stage 15, and a stage drive system 16. , a mounting device 17 , a gas supply source 18 , and a gas suction source 19 .
  • the processing light source 11 generates processing light EL.
  • the processing light source 11 may include, for example, a laser diode.
  • the processing light source 11 may be a light source capable of pulse oscillation. In this case, the processing light source 11 can generate pulsed light as the processing light EL.
  • the processing light source 11 may be a CW light source that generates CW (continuous wave).
  • the measurement light source 12 generates measurement light ML.
  • the measurement light source 12 may include, for example, a laser diode.
  • the measurement light source 12 may be a light source capable of pulse oscillation.
  • the measurement light source 12 can generate pulsed light as the processing light EL.
  • the measurement light source 12 may be a CW light source that generates CW (continuous wave).
  • the processing head 13 irradiates the workpiece W with the processing light EL generated by the processing light source 11 and irradiates the measurement object M with the measurement light ML generated by the measurement light source 12.
  • the machining head 13 has an injection optical system as shown in FIG. 3, which is a block diagram showing the configuration of the machining head 13. 130, an irradiation optical system 135, and a hood 136.
  • the exit optical system 130 is an optical system into which the processing light EL generated by the processing light source 11 and the measurement light ML generated by the measurement light source 12 enter.
  • the emission optical system 130 is an optical system capable of emitting each of the processing light EL and the measurement light ML.
  • the exit optical system 130 includes a processing optical system 131, a measurement optical system 132, a combining optical system 133, and a deflection optical system 134, as shown in FIG. It may also have the following. However, the exit optical system 130 does not need to include at least one of the processing optical system 131, the measurement optical system 132, the synthesis optical system 133, and the deflection optical system 134. Note that the processing optical system 131, measurement optical system 132, synthesis optical system 133, and deflection optical system 134 will be described in detail later with reference to FIG. 4 and the like.
  • the irradiation optical system 135 is an optical system that can irradiate the workpiece W with each of the processing light EL and the measurement light ML. Note that the irradiation optical system 135 may also be referred to as an objective optical system.
  • the hood 136 may function as a protection member (in other words, a cover member) for protecting at least a portion of the processing head 13, as will be described in detail later.
  • the hood 136 may function as a gas supply member for supplying gas to a gas supply target, as will be described in detail later.
  • the hood 136 may function as a gas suction member for sucking gas from a gas suction target, as will be described in detail later. .
  • the hood 136 may function as a member having other functions.
  • the head drive system 14 moves the processing head 13.
  • the head drive system 14 may be referred to as a moving device.
  • the head drive system 14 may move the processing head 13 (that is, linearly move) along a movement axis along at least one of the X-axis direction, the Y-axis direction, and the Z-axis direction, for example.
  • the head drive system 14 moves the processing head 13 along at least one of the ⁇ X direction, the ⁇ Y direction, and the ⁇ Z direction, in addition to or instead of at least one of the X-axis direction, Y-axis direction, and Z-axis direction. may be moved.
  • the head drive system 14 has a rotation axis along the X-axis direction (that is, the A-axis), a rotation axis along the Y-axis direction (that is, the B-axis), and a rotation axis along the Z-axis direction (that is, the C-axis).
  • the processing head 13 may be rotated (that is, rotated) around at least one rotation axis among the rotational axes).
  • the processing unit 1 may process the workpiece W while moving the processing head 13. Specifically, the processing unit 1 may process the desired position of the workpiece W by moving the processing head 13 so that the desired position of the workpiece W is irradiated with the processing light EL.
  • the head drive system 14 moves the processing head 13
  • the relative positional relationship between the processing head 13 and the stage 15 changes. Therefore, the relative positional relationship between the workpiece W and the irradiation position MA where the processing head 13 irradiates the measurement light ML changes. That is, the irradiation position MA at which the processing head 13 irradiates the measurement light ML with respect to the workpiece W moves.
  • the processing unit 1 may measure the workpiece W while moving the processing head 13. Specifically, the processing unit 1 may measure the desired position of the workpiece W by moving the processing head 13 so that the desired position of the workpiece W is irradiated with the measurement light ML.
  • the stage 15 may be referred to as a mounting device. Specifically, the workpiece W is placed on a placement surface 151 that is at least a portion of the upper surface of the stage 15 .
  • the stage 15 can support the work W placed on the stage 15.
  • the stage 15 may be able to hold the work W placed on the stage 15.
  • the stage 15 may include at least one of a mechanical chuck, a magnetic chuck, an electrostatic chuck, a vacuum chuck, etc. to hold the workpiece W.
  • a jig for holding the work W may hold the work W, and the stage 15 may hold the jig holding the work W.
  • the stage 15 does not need to hold the work W placed on the stage 15. In this case, the workpiece W may be placed on the stage 15 without a clamp.
  • the stage drive system 16 moves the stage 15. For this reason, the stage drive system 16 may be referred to as a moving device.
  • the stage drive system 16 may move the stage 15 (that is, linearly move) along a movement axis along at least one of the X-axis direction, the Y-axis direction, and the Z-axis direction, for example.
  • the stage drive system 16 moves the stage 15 along at least one of the ⁇ X direction, the ⁇ Y direction, and the ⁇ Z direction, in addition to or instead of at least one of the X-axis direction, Y-axis direction, and Z-axis direction. You may move it.
  • the stage drive system 16 has a rotation axis along the X-axis direction (namely, the A-axis), a rotation axis along the Y-axis direction (namely, the B-axis), and a rotation axis along the Z-axis direction (namely, the C-axis).
  • the stage 15 may be rotated (that is, rotated) around at least one rotation axis among the rotational axes).
  • the processing unit 1 may process the work W while moving the stage 15. Specifically, the processing unit 1 may process the desired position of the workpiece W by moving the stage 15 so that the desired position of the workpiece W is irradiated with the processing light EL.
  • the processing unit 1 may measure the workpiece W while moving the stage 15. Specifically, the processing unit 1 may measure the desired position of the workpiece W by moving the stage 15 so that the desired position of the workpiece W is irradiated with the measurement light ML.
  • the mounting device 17 is a device that allows the irradiation optical system 135 included in the processing head 13 to be replaced.
  • the attachment device 17 may remove the irradiation optical system 135 attached to the processing head 13.
  • the attachment device 17 may attach the irradiation optical system 135 to the processing head 13 to which the irradiation optical system 135 is not attached.
  • the attachment device 17 removes the first irradiation optical system 135 attached to the processing head 13 and then installs a second irradiation optical system 135 different from the first irradiation optical system 135 on the processing head 13. may be attached.
  • the attachment device 17 may replace the first irradiation optical system 135 attached to the processing head 13 with the second irradiation optical system 135. For this reason, the irradiation optical system 135 may be attachable to the processing head 13. In other words, the irradiation optical system 135 may be attachable to and detachable from the processing head 13.
  • the mounting device 17 is also a device that allows the hood 136 of the processing head 13 to be replaced.
  • the attachment device 17 may remove the hood 136 attached to the processing head 13.
  • the attachment device 17 may attach the hood 136 to the processing head 13 to which the hood 136 is not attached.
  • the attachment device 17 may remove the first hood 136 attached to the processing head 13 and then attach a second hood 136 different from the first hood 136 to the processing head 13. That is, the attachment device 17 may replace the first hood 136 attached to the processing head 13 with the second hood 136.
  • the hood 136 may be attachable to the processing head 13.
  • the hood 136 may be attachable to and detachable from the processing head 13.
  • the gas supply source 18 can supply gas to the processing head 13.
  • the gas supplied by the gas supply source 18 may be supplied to the gas supply target via the hood 136 that can function as a gas supply member. That is, the hood 136, which can function as a gas supply member, may supply the gas supplied from the gas supply source 18 to the gas supply target.
  • the gas supply source 18 may supply gas to the gas supply target via the hood 136 that can function as a gas supply member.
  • the gas supplied by the gas supply source 18 may be supplied to the gas supply target without using the hood 136.
  • the gas supplied by the gas supply source 18 may be supplied to the gas supply target via a gas supply member different from the hood 136.
  • the gas supply source 18 may be capable of supplying inert gas, which is an example of gas.
  • An example of the inert gas is at least one of argon gas and nitrogen gas.
  • the gas supply source 18 may be capable of supplying CDA (Clean Dry Air), which is another example of gas.
  • the processing system SYS may include a gas supply source 18 capable of supplying an inert gas and a gas supply source 18 capable of supplying CDA.
  • gas supplied by the gas supply source 18 may be used as a purge gas for purging the internal space SP1 of the housing 3.
  • gas supplied by a gas supply source different from the gas supply source 18 may be used as the purge gas for purging the internal space SP1 of the housing 3.
  • the gas suction source 19 is capable of suctioning gas from a gas suction target via a hood 136 that can function as a gas suction member. That is, the hood 136, which can function as a gas suction member, may suck gas from a gas suction target. However, the gas suction source 19 may suck gas without using the hood 136. The gas suction source 19 may suck gas through a gas suction member different from the hood 136. Note that the gas suction source 19 is typically a vacuum source.
  • the gas suction source 19 may suction at least a portion of the gas supplied by the gas supply source 18 via the hood 136.
  • the gas suction source 19 may suction a different gas from the gas supplied by the gas supply source 18 via the hood 136.
  • the gas suction source 19 may suck at least a portion of the gas supplied by a gas supply source different from the gas supply source 18 via the hood 136.
  • the gas suction source 19 may collect gas by suctioning the gas.
  • the gas suction source 19 may suction at least a portion of the gas supplied by the gas supply source 18 via the hood 136.
  • the gas suction source 19 may collect a gas different from the gas supplied by the gas supply source 18 via the hood 136.
  • the gas suction source 19 may recover at least a portion of the gas supplied by a gas supply source different from the gas supply source 18 via the hood 136.
  • the control unit 2 controls the operation of the processing unit 1.
  • the control unit 2 may control the operation of the processing head 13 included in the processing unit 1.
  • the control unit 2 may control the operation of at least one of the processing optical system 131, the measurement optical system 132, the combining optical system 133, the deflection optical system 134, and the irradiation optical system 135 included in the processing head 13.
  • the control unit 2 may control the operation of the head drive system 14 included in the processing unit 1 (for example, movement of the processing head 13).
  • the control unit 2 may control the operation of the stage drive system 16 included in the processing unit 1 (for example, movement of the stage 15).
  • the control unit 2 may control the operation of the attachment device 17 included in the processing unit 1.
  • the control unit 2 may control the processing unit 1 based on processing information that the control unit 2 can use to control the processing unit 1.
  • the processing information may include information regarding the type of processing performed by the processing unit 1.
  • the processing information may include information indicating whether the processing performed by the processing unit 1 is removal processing, addition processing, melt processing, or other processing.
  • the processing information may be a file.
  • the processing information may be stored in the control unit 2.
  • the processing information may be stored in the storage device of the control unit 2.
  • the processing information may be stored in any storage medium (for example, a hard disk or a semiconductor memory) that is built into the control unit 2 or that can be externally attached to the control unit 2.
  • the processing information may be stored in a server outside the processing system SYS. In this case, the control unit 2 may acquire processing information from the server.
  • the control unit 2 may control the operation of the processing unit 1 based on the measurement results of the measurement target M by the processing unit 1. Specifically, the control unit 2 generates measurement data of the measurement object M (for example, data regarding at least one of the position and shape of the measurement object M) based on the measurement results of the measurement object M, and The operation of the processing unit 1 may be controlled based on the measured data. For example, based on the measurement results of the workpiece W, which is an example of the measurement target object M, the control unit 2 may generate measurement data of at least a portion of the workpiece W (for example, data regarding at least one of the position and shape of at least a portion of the workpiece W). data) may be generated, and the operation of the processing unit 1 may be controlled to process the workpiece W based on the measurement data.
  • the control unit 2 may generate measurement data of at least a portion of the workpiece W (for example, data regarding at least one of the position and shape of at least a portion of the workpiece W). data) may be generated, and the operation of the
  • the control unit 2 may control the attachment device 17 to replace the irradiation optical system 135 attached to the processing head 13. For example, the control unit 2 may select one of the plurality of irradiation optical systems 135 as the irradiation optical system 135 to be attached to the processing head 13. The control unit 2 may control the attachment device 17 to attach the selected one irradiation optical system 135 to the processing head 13. If another irradiation optical system 135 different from the selected one irradiation optical system 135 is already attached to the processing head 13, the control unit 2 controls the other irradiation optical system 135 attached to the processing head 13.
  • the attachment device 17 may be controlled so as to remove the irradiation optical system 135 from the injection optical system 130 and then attach the selected irradiation optical system 135 to the processing head 13. That is, the control unit 2 may control the attachment device 17 to replace the selected irradiation optical system 135 with another irradiation optical system 135 attached to the processing head 13.
  • the control unit 2 may control the attachment device 17 to replace the hood 136 attached to the processing head 13.
  • the control unit 2 may select one of the plurality of hoods 136 as the hood 136 to be attached to the processing head 13.
  • the control unit 2 may control the attachment device 17 to attach the selected one hood 136 to the processing head 13. If another hood 136 different from the selected one hood 136 is already attached to the processing head 13, the control unit 2 causes the irradiation optical system 135 to remove the other hood 136 attached to the processing head 13.
  • the attachment device 17 may be controlled to remove and then attach the selected one hood 136 to the processing head 13. That is, the control unit 2 may control the attachment device 17 to replace the selected hood 136 with another hood 136 attached to the processing head 13.
  • the control unit 2 may include, for example, a calculation device and a storage device.
  • the arithmetic device may include, for example, at least one of a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit).
  • the storage device may include, for example, memory.
  • the control unit 2 functions as a device that controls the operation of the processing unit 1 by a calculation device executing a computer program.
  • This computer program is a computer program for causing the arithmetic device to perform (that is, execute) the operation to be performed by the control unit 2, which will be described later. That is, this computer program is a computer program for causing the control unit 2 to function so as to cause the processing unit 1 to perform the operations described below.
  • the computer program executed by the arithmetic device may be recorded in a storage device (that is, a recording medium) provided in the control unit 2, or may be stored in any storage device built into the control unit 2 or externally attachable to the control unit 2. It may be recorded on a medium (for example, a hard disk or a semiconductor memory). Alternatively, the computing device may download the computer program to be executed from a device external to the control unit 2 via the network interface.
  • a storage device that is, a recording medium
  • the computing device may download the computer program to be executed from a device external to the control unit 2 via the network interface.
  • the control unit 2 does not need to be provided inside the processing unit 1.
  • the control unit 2 may be provided outside the processing unit 1 as a server or the like.
  • the control unit 2 and the processing unit 1 may be connected via a wired and/or wireless network (or a data bus and/or a communication line).
  • a wired network for example, a network using a serial bus type interface represented by at least one of IEEE1394, RS-232x, RS-422, RS-423, RS-485, and USB may be used.
  • a network using a parallel bus interface may be used.
  • a network using an interface compliant with Ethernet typified by at least one of 10BASE-T, 100BASE-TX, and 1000BASE-T may be used.
  • a network using radio waves may be used.
  • An example of a network using radio waves is a network compliant with IEEE802.1x (for example, at least one of a wireless LAN and Bluetooth (registered trademark)).
  • a network using infrared rays may be used.
  • a network using optical communication may be used as the wireless network.
  • the control unit 2 and the processing unit 1 may be configured to be able to transmit and receive various information via a network.
  • control unit 2 may be able to transmit information such as commands and control parameters to the processing unit 1 via a network.
  • the processing unit 1 may include a receiving device that receives information such as commands and control parameters from the control unit 2 via the network.
  • the processing unit 1 may include a transmitting device (that is, an output device outputting information to the control unit 2) that transmits information such as commands and control parameters to the control unit 2 via the network. good.
  • a first control device that performs some of the processing performed by the control unit 2 is provided inside the processing unit 1, while a second control device that performs another part of the processing performed by the control unit 2 is provided inside the processing unit 1.
  • the control device may be provided outside the processing unit 1.
  • a calculation model that can be constructed by machine learning may be implemented by a calculation device executing a computer program.
  • An example of a calculation model that can be constructed by machine learning is a calculation model that includes a neural network (so-called artificial intelligence (AI)).
  • learning the computational model may include learning parameters (eg, at least one of weights and biases) of the neural network.
  • the control unit 2 may control the operation of the processing unit 1 using the calculation model. That is, the operation of controlling the operation of the processing unit 1 may include the operation of controlling the operation of the processing unit 1 using a calculation model.
  • the control unit 2 may be equipped with an arithmetic model that has been constructed by offline machine learning using teacher data.
  • the calculation model installed in the control unit 2 may be updated by online machine learning on the control unit 2.
  • the control unit 2 may use a calculation model installed in a device external to the control unit 2 (that is, a device provided outside the processing unit 1) in addition to or in place of the calculation model installed in the control unit 2. may be used to control the operation of the processing unit 1.
  • the recording medium for recording the computer program executed by the control unit 2 includes CD-ROM, CD-R, CD-RW, flexible disk, MO, DVD-ROM, DVD-RAM, DVD-R, DVD+R, and DVD.
  • At least one of optical disks such as RW, DVD+RW and Blu-ray (registered trademark), magnetic media such as magnetic tape, magneto-optical disks, semiconductor memories such as USB memory, and any other arbitrary medium capable of storing programs is used. It's okay to be hit.
  • the recording medium may include a device capable of recording a computer program (for example, a general-purpose device or a dedicated device in which a computer program is implemented in an executable state in the form of at least one of software and firmware).
  • each process or function included in the computer program may be realized by a logical processing block that is realized within the control unit 2 when the control unit 2 (that is, the computer) executes the computer program, or It may be realized by hardware such as a predetermined gate array (FPGA (Field Programmable Gate Array), ASIC (Application Specific Integrated Cricut)) included in the control unit 2, or by a logical processing block and hardware. Some of It may also be realized in a mixed format with partial hardware modules that realize the elements.
  • FPGA Field Programmable Gate Array
  • ASIC Application Specific Integrated Cricut
  • FIG. 4 is a sectional view showing an example of the optical configuration of the processing head 13.
  • the optical configuration of the processing head 13 may mean the configuration of the injection optical system 130 and the irradiation optical system 135 that the processing head 13 is equipped with.
  • processing light EL generated by the processing light source 11 is incident on the processing head 13 via a light transmission member 111 such as an optical fiber.
  • the processing light EL may be incident on the processing head 13 by spatial transmission using a mirror.
  • the processing light source 11 may be placed outside the processing head 13.
  • the processing light source 11 may be arranged inside the processing head 13.
  • the processing head 13 includes the exit optical system 130 including the processing optical system 131, the measurement optical system 132, the synthesis optical system 133, and the deflection optical system 134. Furthermore, the processing head 13 includes the irradiation optical system 135, as described above.
  • the processing optical system 131 is an optical system into which the processing light EL from the processing light source 11 is incident.
  • the processing optical system 131 is an optical system that emits the processing light EL that has entered the processing optical system 131 toward the combining optical system 133.
  • the processing light EL emitted by the processing optical system 131 is irradiated onto the workpiece W via the combining optical system 133, the deflection optical system 134, and the irradiation optical system 135.
  • the processing optical system 131 may include, for example, a position adjustment optical system 1311, an angle adjustment optical system 1312, and a galvanometer mirror 1313. However, the processing optical system 131 does not need to include at least one of the position adjustment optical system 1311, the angle adjustment optical system 1312, and the galvanometer mirror 1313.
  • the position adjustment optical system 1311 can adjust the emission position of the processing light EL from the processing optical system 131.
  • the position adjustment optical system 1311 may include, for example, a parallel plane plate that can be tilted with respect to the traveling direction of the processing light EL, and change the emission position of the processing light EL by changing the inclination angle of the parallel plane plate.
  • the angle adjustment optical system 1312 can adjust the emission angle (that is, the emission direction) of the processing light EL from the processing optical system 131.
  • the angle adjustment optical system 1312 may include, for example, a mirror that can be tilted with respect to the traveling direction of the processing light EL, and the emission angle of the processing light EL may be changed by changing the inclination angle of this mirror.
  • the galvanometer mirror 1313 is a deflection optical system that deflects the processing light EL (that is, changes the exit angle of the processing light EL).
  • the galvanometer mirror 1313 changes the focusing position of the processing light EL in a plane intersecting the optical axis EX of the irradiation optical system 135 (that is, in a plane along the XY plane) by deflecting the processing light EL.
  • the processing head 13 irradiates the workpiece W with the processing light EL in a state where the optical axis EX and the surface of the workpiece W intersect.
  • the irradiation position PA of the processing light EL on the surface of the workpiece W is changed in the direction along the surface of the workpiece W. (i.e. move). That is, the irradiation position PA of the processing light EL is changed along at least one of the X-axis direction and the Y-axis direction.
  • the galvano mirror 1313 can change the irradiation position PA of the processing light EL, it may be called a position changing optical system or a position changing device.
  • the galvanometer mirror 1313 includes an X scanning mirror 1313X and a Y scanning mirror 1313Y.
  • Each of the X scanning mirror 1313X and the Y scanning mirror 1313Y is a variable tilt angle mirror whose angle with respect to the optical path of the processing light EL incident on the galvanometer mirror 1313 is changed.
  • the X scanning mirror 1313X deflects the processing light EL so as to change the irradiation position PA of the processing light EL on the workpiece W along the X-axis direction.
  • the X scanning mirror 1313X may be rotatable or swingable around the Y axis.
  • the galvanometer mirror 1313 changes the irradiation position PA of the processing light EL on the workpiece W along the X-axis direction by changing the position of the X-scanning mirror 1313X in the ⁇ Y direction (or the posture around the Y-axis). It may be changeable.
  • the Y scanning mirror 1313Y deflects the processing light EL so as to change the irradiation position PA of the processing light EL on the workpiece W along the Y-axis direction.
  • the Y scanning mirror 1313Y may be rotatable or swingable around the X axis.
  • the galvanometer mirror 1313 changes the irradiation position PA of the processing light EL on the workpiece W along the Y-axis direction by changing the position of the Y-scanning mirror 1313Y in the ⁇ X direction (or the posture around the X-axis). It may be changeable.
  • the processing light EL emitted from the processing optical system 131 enters the combining optical system 133.
  • the combining optical system 133 includes a beam splitter (eg, a polarizing beam splitter) 1331.
  • the beam splitter 1331 emits the processing light EL that has entered the beam splitter 1331 toward the deflection optical system 134 .
  • the processing light EL incident on the beam splitter 1331 is emitted toward the deflection optical system 134 by passing through the polarization separation surface of the beam splitter 1331. Therefore, in the example shown in FIG.
  • the processing light EL is polarized by the beam splitter 1331 in a state where it has a polarization direction that can pass through the polarization separation surface (for example, a polarization direction that becomes p-polarized light with respect to the polarization separation surface). incident on the surface.
  • a polarization direction that can pass through the polarization separation surface for example, a polarization direction that becomes p-polarized light with respect to the polarization separation surface.
  • the processing light EL emitted from the synthesis optical system 133 enters the deflection optical system 134.
  • the deflection optical system 134 emits the processing light EL that has entered the deflection optical system 134 toward the irradiation optical system 135 .
  • the deflection optical system 134 includes a galvanometer mirror 1341.
  • the processing light EL that has entered the deflection optical system 134 enters the galvano mirror 1341.
  • the galvanometer mirror 1341 deflects the processing light EL (that is, changes the emission angle of the processing light EL).
  • the galvanometer mirror 1341 changes the focusing position of the processing light EL in a plane intersecting the optical axis EX of the irradiation optical system 135 (that is, in a plane along the XY plane) by deflecting the processing light EL.
  • the processing head 13 irradiates the workpiece W with the processing light EL in a state where the optical axis EX and the surface of the workpiece W intersect.
  • the irradiation position PA of the processing light EL on the surface of the workpiece W is changed in the direction along the surface of the workpiece W. (i.e. move). That is, the irradiation position PA of the processing light EL is changed along at least one of the X-axis direction and the Y-axis direction.
  • the galvano mirror 1341 can change the irradiation position PA of the processing light EL, it may be called a position changing optical system or a position changing device.
  • the galvanometer mirror 1341 includes an X scanning mirror 1341X and a Y scanning mirror 1341Y.
  • Each of the X scanning mirror 1341X and the Y scanning mirror 1341Y is a variable tilt angle mirror whose angle with respect to the optical path of the processing light EL incident on the galvanometer mirror 1341 is changed.
  • the X scanning mirror 1341X deflects the processing light EL so as to change the irradiation position PA of the processing light EL on the workpiece W along the X-axis direction.
  • the X scanning mirror 1341X may be rotatable or swingable around the Y axis.
  • the galvanometer mirror 1341 changes the irradiation position PA of the processing light EL on the workpiece W along the X-axis direction by changing the position of the X-scanning mirror 1341X in the ⁇ Y direction (or the posture around the Y-axis). It may be changeable.
  • the Y scanning mirror 1341Y deflects the processing light EL so as to change the irradiation position PA of the processing light EL on the workpiece W along the Y-axis direction.
  • the Y scanning mirror 1341Y may be rotatable or swingable around the X axis.
  • the galvanometer mirror 1341 changes the irradiation position PA of the processing light EL on the workpiece W along the Y-axis direction by changing the position in the ⁇ X direction (or the posture around the X-axis) of the Y-scanning mirror 1341Y. It may be changeable.
  • the processing light EL emitted from the deflection optical system 134 enters the irradiation optical system 135.
  • the irradiation optical system 135 is an optical system that can irradiate the workpiece W with the processing light EL.
  • the irradiation optical system 135 includes an f ⁇ lens 1351 that can function as an objective optical system. Processing light EL emitted from the deflection optical system 134 enters the f ⁇ lens 1351 .
  • the f ⁇ lens 1351 irradiates the work W with the processing light EL emitted from the deflection optical system 134.
  • the f ⁇ lens 1351 emits the processing light EL in a direction along the optical axis EX of the irradiation optical system 135.
  • the processing light EL emitted by the f ⁇ lens 1351 enters the workpiece W by traveling along the direction along the optical axis EX.
  • the optical axis EX of the irradiation optical system 135 may be the optical axis of the f ⁇ lens 1351.
  • the f ⁇ lens 1351 may focus the processing light EL from the galvano mirror 1341 onto the workpiece W.
  • the processing light EL emitted from the f ⁇ lens 1351 may be irradiated onto the work W without passing through another optical element (in other words, an optical member, such as a lens) having power.
  • the f ⁇ lens 1351 is the optical element having the final stage power (that is, the optical element closest to the workpiece W) among the plurality of optical elements arranged on the optical path of the processing light EL, so the f ⁇ lens 1351 is the final optical element. It may also be called an element.
  • the power of the optical element may be the reciprocal of the focal length of the optical element.
  • the processing light EL from the galvanometer mirror 1341 may be a parallel light beam.
  • the irradiation optical system 135 may include an objective optical system having a projection characteristic different from f ⁇ .
  • At least one of the X scanning mirror 1341X and Y scanning mirror 1341Y that constitute the galvano mirror 1341, and the X scanning mirror 1313X and Y scanning mirror 1313Y that constitute the galvano mirror 1313 is an f ⁇ lens as an irradiation optical system. 1351 and/or its conjugate position. At least one of the X scanning mirror 1341X and the Y scanning mirror 1341Y, and the X scanning mirror 1313X and the Y scanning mirror 1313Y may be arranged at a position optically conjugate with the entrance pupil position of the f ⁇ lens 1351. .
  • a relay optical system for making each scanning mirror optically conjugate with each other may be arranged between the scanning mirrors.
  • the measurement light ML generated by the measurement light source 12 is incident on the processing head 13 via an optical transmission member 121 such as an optical fiber.
  • the measurement light ML may be incident on the processing head 13 by spatial transmission using a mirror.
  • the measurement light source 12 may be placed outside the processing head 13.
  • the measurement light source 12 may be placed inside the processing head 13.
  • the measurement light source 12 may include an optical comb light source.
  • An optical comb light source is a light source that can generate pulsed light containing frequency components arranged at equal intervals on a frequency axis (hereinafter referred to as an "optical frequency comb").
  • the measurement light source 12 emits pulsed light including frequency components arranged at equal intervals on the frequency axis as the measurement light ML.
  • the measurement light source 12 may include a light source different from the optical comb light source.
  • the processing system SYS includes a plurality of measurement light sources 12.
  • the processing system SYS may include a measurement light source 12#1 and a measurement light source 12#2.
  • the plurality of measurement light sources 12 may each emit a plurality of measurement lights ML that are phase-synchronized and coherent with each other.
  • the plurality of measurement light sources 12 may have different oscillation frequencies. Therefore, the plurality of measurement lights ML emitted by the plurality of measurement light sources 12 are different from each other in pulse frequency (for example, the number of pulsed lights per unit time, which is the reciprocal of the pulsed light emission period). It may be .
  • the processing system SYS may include a single measurement light source 12.
  • the measurement light ML emitted from the measurement light source 12 enters the measurement optical system 132.
  • the measurement optical system 132 is an optical system that emits the measurement light ML that has entered the measurement optical system 132 toward the synthesis optical system 133.
  • the measurement light ML emitted by the measurement optical system 132 is irradiated onto the measurement target M via the synthesis optical system 133, the deflection optical system 134, and the irradiation optical system 135.
  • the measurement optical system 132 includes, for example, a mirror 1320, a beam splitter 1321, a beam splitter 1322, a detector 1323, a beam splitter 1324, a mirror 1325, a detector 1326, a mirror 1327, and a galvano mirror 1328. Be prepared.
  • the measurement light ML emitted from the measurement light source 12 enters the beam splitter 1321.
  • measurement light ML emitted from measurement light source 12 #1 (hereinafter referred to as “measurement light ML #1”) enters beam splitter 1321.
  • Measurement light ML emitted from measurement light source 12#2 (hereinafter referred to as “measurement light ML#2”) enters beam splitter 1321 via mirror 1320.
  • Beam splitter 1321 emits measurement lights ML#1 and ML#2 that have entered beam splitter 1321 toward beam splitter 1322. In other words, the beam splitter 1321 emits the measurement lights ML#1 and ML#2, which are incident on the beam splitter 1321 from different directions, in the same direction (that is, the direction in which the beam splitter 1322 is arranged).
  • Beam splitter 1322 reflects measurement light ML#1-1, which is a part of measurement light ML#1 incident on beam splitter 1322, toward detector 1323. Beam splitter 1322 emits measurement light ML#1-2, which is another part of measurement light ML#1 that has entered beam splitter 1322, toward beam splitter 1324. Beam splitter 1322 reflects measurement light ML#2-1, which is part of measurement light ML#2 that has entered beam splitter 1322, toward detector 1323. Beam splitter 1322 emits measurement light ML#2-2, which is another part of measurement light ML#2 that has entered beam splitter 1322, toward beam splitter 1324.
  • the detector 1323 receives (that is, detects) measurement light ML#1-1 and measurement light ML#2-1.
  • the detector 1323 receives interference light generated by interference between measurement light ML#1-1 and measurement light ML#2-1.
  • the operation of receiving interference light generated by interference between measurement light ML#1-1 and measurement light ML#2-1 is performed by measurement light ML#1-1 and measurement light ML#2-1. may be considered to be equivalent to the operation of receiving light.
  • the detection result of the detector 1323 is output to the control unit 2.
  • Beam splitter 1324 emits at least a portion of measurement light ML#1-2 that has entered beam splitter 1324 toward mirror 1325.
  • Beam splitter 1324 emits at least a portion of measurement light ML#2-2 that has entered beam splitter 1324 toward mirror 1327.
  • Measurement light ML#1-2 emitted from beam splitter 1324 enters mirror 1325.
  • Measurement light ML#1-2 incident on mirror 1325 is reflected by a reflective surface of mirror 1325 (the reflective surface may be referred to as a reference surface).
  • the mirror 1325 reflects the measurement light ML#1-2 that has entered the mirror 1325 toward the beam splitter 1324. That is, the mirror 1325 emits the measurement light ML#1-2 that has entered the mirror 1325 toward the beam splitter 1324 as the measurement light ML#1-3 that is reflected light.
  • measurement lights ML#1-3 may be referred to as reference lights.
  • Measurement light ML#1-3 emitted from mirror 1325 enters beam splitter 1324.
  • the beam splitter 1324 emits the measurement lights ML#1-3 that have entered the beam splitter 1324 toward the beam splitter 1322. Measurement light ML#1-3 emitted from beam splitter 1324 enters beam splitter 1322. Beam splitter 1322 emits measurement light ML#1-3 that has entered beam splitter 1322 toward detector 1326.
  • measurement light ML#2-2 emitted from beam splitter 1324 enters mirror 1327.
  • Mirror 1327 reflects measurement light ML#2-2 that has entered mirror 1327 toward galvano mirror 1328.
  • the mirror 1327 emits the measurement light ML#2-2 that has entered the mirror 1327 toward the galvanometer mirror 1328.
  • the galvanometer mirror 1328 deflects the measurement light ML#2-2 (that is, changes the emission angle of the measurement light ML#2-2).
  • the galvanometer mirror 1328 deflects the measurement light ML#2-2 in a plane intersecting the optical axis EX of the irradiation optical system 135 (that is, in a plane along the XY plane). Change the light focusing position.
  • the processing head 13 directs the measurement beam ML to the measurement object M in a state where the optical axis EX intersects the surface of the measurement object M (in the example shown in FIG. 4, the workpiece W). Irradiate #2-2.
  • the irradiation position MA of measurement light ML#2-2 on the surface of measurement target M changes It is changed (that is, moved) in the direction along the surface of the object M. That is, the irradiation position MA of the measurement light ML#2-2 is changed along at least one of the X-axis direction and the Y-axis direction.
  • the galvano mirror 1328 can change the irradiation position MA of the measurement light ML#2-2, and therefore may be referred to as a position changing optical system or a position changing device.
  • the galvanometer mirror 1328 includes an X scanning mirror 1328X and a Y scanning mirror 1328Y.
  • Each of the X scanning mirror 1328X and the Y scanning mirror 1328Y is a variable tilt angle mirror whose angle with respect to the optical path of the measurement light ML#2-2 incident on the galvanometer mirror 1328 is changed.
  • the X scanning mirror 1328X deflects the measurement light ML#2-2 so as to change the irradiation position MA of the measurement light ML#2-2 on the measurement target M along the X-axis direction.
  • the X scanning mirror 1328X may be rotatable or swingable around the Y axis.
  • the galvanometer mirror 1328 changes the irradiation position MA of the measurement light ML#2-2 on the measurement object M by changing the position of the X scanning mirror 1328X in the ⁇ Y direction (or the posture around the Y axis). It may be changeable along the X-axis direction.
  • the Y scanning mirror 1328Y deflects the processing light EL so as to change the irradiation position MA of the measurement light ML#2-2 on the measurement object M along the Y-axis direction.
  • the Y scanning mirror 1328Y may be rotatable or swingable around the X axis.
  • the galvanometer mirror 1328 changes the irradiation position MA of the measurement light ML#2-2 on the measurement target M by changing the position in the ⁇ X direction (or the posture around the X axis) of the Y scanning mirror 1328Y. It may be changeable along the Y-axis direction.
  • Measurement light ML#2-2 emitted from the measurement optical system 132 enters the synthesis optical system 133.
  • the beam splitter 1331 of the combining optical system 133 emits the measurement light ML#2-2 that has entered the beam splitter 1331 toward the deflection optical system 134.
  • the measurement light ML#2-2 that has entered the combining optical system 133 is reflected by the polarization separation surface and is emitted toward the deflection optical system 134. Therefore, in the example shown in FIG.
  • the measurement light ML#2-2 is transmitted to the beam splitter in a state where it has a polarization direction that can be reflected by the polarization separation surface (for example, a polarization direction that becomes s-polarized light with respect to the polarization separation surface).
  • the light is incident on the polarization separation surface of 1331.
  • the processing light EL enters the beam splitter 1331 in addition to the measurement light ML#2-2. That is, both the measurement light ML#2-2 and the processing light EL pass through the beam splitter 1331.
  • the beam splitter 1331 directs the processing light EL and the measurement light ML#2-2, which have entered the beam splitter 1331 from different directions, in the same direction (that is, toward the same deflection optical system 134). Therefore, the beam splitter 1331 substantially functions as a combining optical member that combines the processing light EL and the measurement light ML#2-2.
  • the combining optical system 133 may include a dichroic mirror instead of the beam splitter 1331 as a combining optical member. Even in this case, the combining optical system 133 uses a dichroic mirror to combine the processing light EL and the measurement light ML#2-2 (that is, the optical path of the processing light EL and the measurement light ML#2-2). can be combined with the optical path).
  • Measurement light ML#2-2 emitted from the combining optical system 133 enters the deflection optical system 134.
  • the deflection optical system 134 emits the measurement light ML#2-2 that has entered the deflection optical system 134 toward the irradiation optical system 135.
  • the measurement light ML#2-2 that entered the deflection optical system 134 enters the galvanometer mirror 1341.
  • the galvanometer mirror 1341 deflects the measurement light ML#2-2 in the same way as when deflecting the processing light EL. Therefore, the galvanometer mirror 1341 can change the irradiation position MA of the measurement light ML#2-2 on the surface of the measurement object M in the direction along the surface of the measurement object M. In other words, the galvanometer mirror 1341 changes the irradiation position MA of the measurement light ML#2-2 on the measurement target M by changing the position of the X scanning mirror 1341X in the ⁇ Y direction (or the posture around the Y axis). It may be changeable along the X-axis direction.
  • the galvanometer mirror 1341 changes the irradiation position MA of the measurement light ML#2-2 on the measurement target M on the Y axis by changing the position in the ⁇ X direction (or the posture around the X axis) of the Y scanning mirror 1341Y. It may be changeable along the direction. In this way, the galvano mirror 1341 can change the irradiation position MA of the measurement light ML#2-2, and therefore may be referred to as a position changing optical system or a position changing device.
  • the processing light EL is incident on the galvanometer mirror 1341 in addition to the measurement light ML#2-2. That is, the processing light EL and measurement light ML#2-2 combined by the beam splitter 1331 enter the galvanometer mirror 1341. Therefore, both the measurement light ML#2-2 and the processing light EL pass through the same galvanometer mirror 1341. Therefore, the galvanometer mirror 1341 can synchronize and change the irradiation position PA of the processing light EL and the irradiation position MA of the measurement light ML#2-2. In other words, the galvanometer mirror 1341 can change the irradiation position PA of the processing light EL and the irradiation position MA of the measurement light ML#2-2 in conjunction with each other.
  • the processing system SYS can use the galvanometer mirror 1328 to move the irradiation position MA of the measurement light ML#2-2 independently with respect to the irradiation position PA of the processing light EL. That is, the processing system SYS can use the galvanometer mirror 1328 to change the relative positional relationship between the irradiation position PA of the processing light EL and the irradiation position MA of the measurement light ML#2-2.
  • the processing system SYS uses the galvanometer mirror 1328 to determine the relative positional relationship between the irradiation position PA of the processing light EL and the irradiation position MA of the measurement light ML#2-2. It can be changed along the direction intersecting the irradiation direction (in the example shown in FIG. 4, at least one of the X-axis direction and the Y-axis direction).
  • the processing system SYS can use the galvanometer mirror 1313 to move the irradiation position PA of the processing light EL independently with respect to the irradiation position MA of the measurement light ML#2-2. That is, the processing system SYS can use the galvanometer mirror 1313 to change the relative positional relationship between the irradiation position PA of the processing light EL and the irradiation position MA of the measurement light ML#2-2.
  • the processing system SYS uses a galvanometer mirror 1328 to adjust the relative positional relationship between the irradiation position PA of the processing light EL and the irradiation position MA of the measurement light ML#2-2, such that the direction intersects the irradiation direction of the processing light EL. (in the example shown in FIG. 4, at least one of the X-axis direction and the Y-axis direction).
  • Measurement light ML#2-2 emitted from the deflection optical system 134 enters the irradiation optical system 135.
  • the irradiation optical system 135 is an optical system that can irradiate the measurement object M (workpiece W in the example shown in FIG. 4) with the measurement light ML#2-2.
  • the f ⁇ lens 1351 irradiates the measurement object M with the measurement light ML#2-2 emitted from the deflection optical system 134.
  • the f ⁇ lens 1351 emits the measurement light ML#2-2 in a direction along the optical axis EX of the irradiation optical system 135.
  • the measurement light ML#2-2 emitted by the f ⁇ lens 1351 travels in the direction along the optical axis EX and enters the measurement target M.
  • the f ⁇ lens 1351 may focus the measurement light ML#2-2 emitted from the deflection optical system 134 onto the measurement target M.
  • the measurement light ML#2-2 emitted from the f ⁇ lens 1351 reaches the measurement target M without passing through another optical element having power (in other words, an optical member such as a lens). It may be irradiated.
  • the f ⁇ lens 1351 is the optical element having the power of the final stage (that is, the optical element closest to the workpiece W) among the plurality of optical elements arranged on the optical path of the measurement light ML#2-2. Therefore, it may also be referred to as the final optical element.
  • the measurement light ML#2-2 that is emitted from the deflection optical system 134 and enters the f ⁇ lens 1351 may be a parallel light beam.
  • the measurement object M When the measurement object M is irradiated with the measurement light ML#2-2, light resulting from the irradiation of the measurement light ML#2-2 is generated from the measurement object M. That is, when the measurement object M is irradiated with the measurement light ML#2-2, light resulting from the irradiation of the measurement light ML#2-2 is emitted from the measurement object M.
  • the light caused by the irradiation of the measurement light ML#2-2 (in other words, the light emitted from the measurement object M due to the irradiation of the measurement light ML#2-2) is reflected by the measurement object M.
  • Measurement light ML#2-2 (that is, reflected light), measurement light ML#2-2 scattered by measurement object M (that is, scattered light), measurement light ML#2-2 that was diffracted by measurement object M 2 (that is, diffracted light) and measurement light ML#2-2 (that is, transmitted light) that has passed through the measurement object M.
  • the optical path of the measurement light ML#2-2 that is emitted from the irradiation optical system 135 and enters the measurement object M, and the optical path of the return light RL that is emitted from the measurement object M and enters the irradiation optical system 135. may be the same.
  • the return light RL that has entered the irradiation optical system 135 enters the deflection optical system 134 via the f ⁇ lens 1351.
  • the return light RL that has entered the deflection optical system 134 enters the combining optical system 133 via the galvano mirror 1341.
  • the beam splitter 1331 of the combining optical system 133 emits the return light RL that has entered the beam splitter 1331 toward the measurement optical system 132.
  • the return light RL that has entered the beam splitter 1331 is reflected on the polarization separation surface and is emitted toward the measurement optical system 132. Therefore, in the example shown in FIG. 3, the returned light RL enters the polarization separation surface of the beam splitter 1331 in a state where it has a polarization direction that can be reflected by the polarization separation surface.
  • the return light RL emitted from the beam splitter 1331 enters the galvanometer mirror 1328 of the measurement optical system 132.
  • the galvano mirror 1328 emits the return light RL that has entered the galvano mirror 1328 toward the mirror 1327.
  • Mirror 1327 reflects the return light RL that has entered mirror 1327 toward beam splitter 1324 .
  • Beam splitter 1324 emits at least a portion of the return light RL that has entered beam splitter 1324 toward beam splitter 1322 .
  • Beam splitter 1322 emits at least a portion of the return light RL that has entered beam splitter 1322 toward detector 1326 .
  • the measurement light ML#1-3 enters the detector 1326 in addition to the return light RL. That is, the return light RL directed toward the detector 1326 via the measurement target M and the measurement light ML#1-3 directed toward the detector 1326 without passing through the measurement target M enter the detector 1326.
  • the detector 1326 receives (that is, detects) the measurement light ML#1-3 and the return light RL.
  • the detector 1326 receives interference light generated by interference between measurement light ML#1-3 and return light RL.
  • the operation of receiving interference light generated by interference between measurement light ML#1-3 and return light RL is equivalent to the operation of receiving measurement light ML#1-3 and return light RL. It may be considered as
  • the detection result of the detector 1326 is output to the control unit 2.
  • the control unit 2 acquires the detection results of the detector 1323 and the detection results of the detector 1326.
  • the control unit 2 generates measurement data of the measurement object M (for example, measurement data regarding at least one of the position and shape of the measurement object M) based on the detection results of the detector 1323 and the detection result of the detector 1326. It's okay.
  • the pulse frequency of measurement light ML#1 and the pulse frequency of measurement light ML#2 are different, the pulse frequency of measurement light ML#1-1 and the pulse frequency of measurement light ML#2-1 are different. different. Therefore, the interference light between measurement light ML#1-1 and measurement light ML#2-1 is such that the pulsed light forming measurement light ML#1-1 and the pulsed light forming measurement light ML#2-1 are different from each other. At the same time, pulsed light appears in synchronization with the timing of incidence on the detector 1323, resulting in interference light. Similarly, the pulse frequency of the measurement lights ML#1-3 and the pulse frequency of the return light RL are different.
  • the interference light between the measurement light ML#1-3 and the return light RL is generated at the timing when the pulsed light forming the measurement light ML#1-3 and the pulsed light forming the return light RL simultaneously enter the detector 1326.
  • the result is interference light in which pulsed light appears in synchronization with .
  • the position (position on the time axis) of the pulsed interference light detected by the detector 1326 varies depending on the positional relationship between the processing head 13 and the measurement target M. This is because the interference light detected by the detector 1326 includes the return light RL that goes to the detector 1326 via the measurement object M, and the measurement light ML#1-3 that goes to the detector 1326 without going through the measurement object M.
  • the position (position on the time axis) of the pulsed interference light detected by the detector 1323 is determined by the positional relationship between the processing head 13 and the measurement target M (that is, the position between the processing head 13 and the measurement object M). It does not change depending on the positional relationship with the object M). Therefore, the time difference between the pulsed interference light detected by the detector 1326 and the pulsed interference light detected by the detector 1323 indirectly indicates the positional relationship between the processing head 13 and the measurement target M. I can say that.
  • the time difference between the pulsed interference light detected by the detector 1326 and the pulsed interference light detected by the detector 1323 is determined by the time difference in the direction along the optical path of the measurement light ML (that is, the direction along the optical path of the measurement light ML). It can be said that the distance between the processing head 13 and the measurement object M in the direction (along the direction) is indirectly indicated. Therefore, the control unit 2 controls the direction along the optical path of the measurement light ML (for example, based on the time difference between the pulsed interference light detected by the detector 1326 and the pulsed interference light detected by the detector 1323 The distance between the processing head 13 and the object to be measured M in the Z-axis direction can be calculated.
  • the control unit 2 can calculate the position of the measurement target object M in the direction (for example, the Z-axis direction) along the optical path of the measurement light ML. More specifically, the control unit 2 can calculate the distance between the processing head 13 and the irradiated portion of the measurement target M that is irradiated with the measurement light ML#2-2. The control unit 2 can calculate the position of the irradiated portion in the direction along the optical path of the measurement light ML (for example, the Z-axis direction). Furthermore, since the irradiation position of the measurement light ML#2-2 on the measurement target M is determined by the driving states of the galvano mirrors 1341 and 1328, the control unit 2 controls the driving states of the galvano mirrors 1341 and 1328.
  • the control unit 2 can generate measurement data indicating the position of the irradiated portion in the measurement coordinate system based on the processing head 13 (for example, the position in a three-dimensional coordinate space).
  • the processing head 13 may irradiate measurement light ML#2-2 onto multiple parts of the measurement target M.
  • at least one of the galvanometer mirrors 1341 and 1328 is configured to irradiate the measurement light ML#2 on the measurement target M so that the processing head 13 irradiates the measurement light ML#2-2 onto multiple parts of the measurement target M.
  • -2 irradiation position may be changed.
  • at least one of the processing head 13 and the stage 15 may be moved so that the processing head 13 irradiates the measurement light ML#2-2 onto a plurality of parts of the measurement target M.
  • the control unit 2 can generate measurement data indicating the positions of the plurality of parts of the measurement object M.
  • the control unit 2 can generate measurement data indicating the shape of the measurement target M based on measurement data indicating the positions of the plurality of parts. For example, the control unit 2 calculates, as the shape of the measurement object M, a three-dimensional shape composed of a virtual plane (or curved surface) connecting a plurality of parts whose positions have been specified. Measurement data indicating the shape of M can be generated.
  • FIG. 5 is a sectional view conceptually showing an example of the configuration of the mounting device 17.
  • the mounting device 17 includes a storage device 171, a transport device 172, and a housing 173.
  • the housing device 171 can house the irradiation optical system 135 that can be attached to the processing head 13.
  • the housing device 171 may be capable of housing a plurality of irradiation optical systems 135, each of which can be attached to the processing head 13.
  • the housing device 171 includes N (N is a variable representing an integer of 2 or more) irradiation optical systems 135 (specifically, irradiation optical systems 135#1 to 135). #N) is accommodated.
  • the accommodation device 171 may accommodate only one irradiation optical system 135.
  • the processing system SYS may include only one irradiation optical system 135.
  • the housing device 171 may be capable of housing the irradiation optical system 135 housed in the head housing 138.
  • the housing device 171 may be capable of housing the head housing 138 in which the irradiation optical system 135 is housed.
  • the housing device 171 includes N head housings 138 (specifically, head housings 138#1 to 135#N) housing N irradiation optical systems 135#1 to 135#N, respectively.
  • the head housing 138#N) is housed therein.
  • the housing device 171 may house only one head housing 138.
  • the processing system SYS may include only one head housing 138.
  • the housing device 171 can house a hood 136 that can be attached to the processing head 13.
  • the housing device 171 may be capable of housing a plurality of hoods 136, each of which can be attached to the processing head 13.
  • the storage device 171 stores M (here, M is a variable representing an integer greater than or equal to 2) hoods 136 (specifically, hoods 136#1 to 136#M). ing.
  • the housing device 171 may house only one hood 136.
  • the processing system SYS may include only one hood 136.
  • the mounting device 17 may include a housing device 171 in which a plurality of irradiation optical systems 135 and a plurality of hoods 136 are housed. That is, a plurality of irradiation optical systems 135 and a plurality of hoods 136 may be housed in the same housing device 171.
  • the mounting device 17 may include a first housing device 171 in which a plurality of irradiation optical systems 135 are housed, and a second housing device 171 in which a plurality of hoods 136 are housed. That is, a plurality of irradiation optical systems 135 and a plurality of hoods 136 may be housed in two different housing devices 171, respectively.
  • the transport device 172 can transport the irradiation optical system 135 between the mounting device 17 and the processing head 13. Specifically, the transport device 172 may take out the irradiation optical system 135 housed in the housing device 171 from the housing device 171 . Thereafter, the transport device 172 may transport the irradiation optical system 135 taken out from the storage device 171 from the storage device 171 to the processing head 13. Thereafter, the transport device 172 may attach the irradiation optical system 135 transported to the processing head 13 to the processing head 13. Furthermore, the transport device 172 may remove the irradiation optical system 135 attached to the processing head 13 from the processing head 13.
  • the transport device 172 may transport the irradiation optical system 135 removed from the processing head 13 from the processing head 13 to the storage device 171. Thereafter, the transport device 172 may store the irradiation optical system 135 transported to the storage device 171 in the storage device 171.
  • the control unit 2 controls which irradiation optical system 135 out of the plurality of irradiation optical systems 135 should be attached to the processing head 13. It may be selected as the optical system 135. For example, the control unit 2 selects any one of the plurality of irradiation optical systems 135 as the irradiation optical system 135 to be attached to the processing head 13 based on instructions from the user of the processing system SYS. It's okay.
  • control unit 2 selects any one of the plurality of irradiation optical systems 135 as the one irradiation optical system 135 to be attached to the processing head 13 based on the processing mode performed by the processing system SYS. You may choose.
  • the control unit 2 controls any one of the plurality of irradiation optical systems 135 on the processing head 13 based on the processing information that the control unit 2 can use to control the processing unit 1. It may be selected as one of the irradiation optical systems 135 to be attached to.
  • the control unit 2 selects any one of the plurality of irradiation optical systems 135 as the one irradiation optical system 135 to be attached to the processing head 13 based on the measurement mode performed by the processing system SYS. You may choose. Thereafter, the transport device 172 may transport the irradiation optical system 135 selected by the control unit 2 from the storage device 171 to the processing head 13.
  • the transport device 172 can further transport the hood 136 between the mounting device 17 and the processing head 13. Specifically, the transport device 172 may take out the hood 136 accommodated in the accommodation device 171 from the accommodation device 171. Thereafter, the transport device 172 may transport the hood 136 taken out from the storage device 171 from the storage device 171 to the processing head 13. Thereafter, the transport device 172 may attach the hood 136 transported to the processing head 13 to the processing head 13. Furthermore, the transport device 172 may remove the hood 136 attached to the processing head 13 from the processing head 13. Thereafter, the transport device 172 may transport the hood 136 removed from the processing head 13 from the processing head 13 to the storage device 171. Thereafter, the transport device 172 may store the hood 136 transported to the storage device 171 in the storage device 171.
  • the control unit 2 may select any one of the hoods 136 as the hood 136 to be attached to the processing head 13. good.
  • the control unit 2 may select any one of the plurality of hoods 136 as the hood 136 to be attached to the processing head 13 based on instructions from the user of the processing system SYS.
  • the control unit 2 may select any one of the plurality of hoods 136 as the one hood 136 to be attached to the processing head 13 based on the processing mode performed by the processing system SYS.
  • the control unit 2 determines which one of the plurality of hoods 136 should be attached to the processing head 13 based on processing information available to the control unit 2 to control the processing unit 1.
  • the hood 136 may be selected as the hood 136.
  • the control unit 2 may select any one of the plurality of hoods 136 as the one hood 136 to be attached to the processing head 13 based on the measurement mode performed by the processing system SYS.
  • the control unit 2 selects one hood 136 of the plurality of hoods 136 to be attached to the processing head 13 based on the type of the irradiation optical system 135 attached to the processing head 13. You may also select it as Thereafter, the transport device 172 may transport the hood 136 selected by the control unit 2 from the storage device 171 to the processing head 13.
  • the transport device 172 includes a transport arm 1721 capable of holding (for example, grasping or suctioning) at least one of the irradiation optical system 135 and the hood 136 in order to transport each of the irradiation optical system 135 and the hood 136. You can leave it there.
  • the transport device 172 may transport each of the irradiation optical system 135 and the hood 136 between the mounting device 17 and the processing head 13 using the transport arm 1721.
  • the transport device 172 may include a transport arm 1721 capable of holding the irradiation optical system 135 and the hood 136. That is, the transport device 172 may transport the irradiation optical system 135 and the hood 136 using the same transport arm 1721. Alternatively, the transport device 172 may include a first transport arm 1721 that can hold the irradiation optical system 135 and a second transport arm 1721 that can hold the hood 136. That is, the transport device 172 may use two different transport arms 1721 to transport the irradiation optical system 135 and the hood 136, respectively.
  • a magazine-type auto tool changer (ATC: Auto Tool Changer) used in machine tools is used as the mounting device 17.
  • ATC Auto Tool Changer
  • the storage device 171 may be referred to as a magazine.
  • a magazine of an auto tool changer may be used as the storage device 171.
  • the cutting tools that are normally housed in the magazine may not be housed in the magazine that functions as the housing device 171 for housing the multiple irradiation optical systems 135 and the multiple hoods 136.
  • a turret-type auto tool changer used in machine tools may be used as the mounting device 17.
  • the storage device 171 may function as a tool pot (registered trademark) having a drum shape.
  • a tool pot of an auto tool changer may be used as the storage device 171.
  • the cutting tool that is normally housed in the tool pot may not be housed in the tool pot that functions as the housing device 171 for housing the multiple irradiation optical systems 135 and the multiple hoods 136.
  • the transport device 172 directly rotates the tool pot used as the storage device 171 so that the desired irradiation optical system 135 or the desired hood 136 is located closest to the transport device 172.
  • the irradiation optical system 135 or the hood 136 located closest to the irradiation optical system 172 may be held.
  • the tool pot used as the storage device 171 may be rotated without using the force of the transport device 172 so that the desired irradiation optical system 135 or the desired hood 136 is located at a desired position.
  • the tool pot used as the storage device 171 is rotated so that a desired irradiation optical system 135 or a desired hood 136 to be attached to the processing head 13 is located closest to the +Y side. You may.
  • the desired irradiation optical system 135 or desired hood 136 moves so as to protrude from the transport port 1731 toward the +Y side, and the irradiation optical system 135 or hood 136 that protrudes from the transport port 1731 can be attached to the processing head 13.
  • the processing head 13 may approach the irradiation optical system 135 or the hood 136 protruding from the transport port 1731 so that
  • the machining system SYS may be manufactured using the machine tool.
  • a machine tool with the machining head 13 attached to the main shaft may be manufactured as the machining system SYS.
  • a device inside the housing of a machine tool that has already been designed, developed, or mass-produced may be used as a component of the processing system SYS.
  • a stage of a machine tool may be used as the stage 15 of the processing system SYS.
  • a guide mechanism of a machine tool may be used as at least one of the head drive system 14 and the stage drive system 16 of the processing system SYS.
  • the device inside the housing of the machine tool may be at least partially improved, and the partially improved device may be used as a component of the machining system SYS.
  • the cost of the processing system SY can be reduced compared to the case where the components of the processing system SYS are newly designed from scratch.
  • the housing 173 accommodates at least a portion of the storage device 171 and the transport device 172. Specifically, at least a portion of the storage device 171 and the transport device 172 are stored in a storage space 1730 inside the housing 173.
  • a transport port 1731 may be formed in the casing 173.
  • the transport device 172 may transport the irradiation optical system 135 and the hood 136 between the mounting device 17 and the processing head 13 via the transport port 1731.
  • a gas supply port 1732 may be formed in the housing 173. Purge gas may be supplied to the accommodation space 1730 inside the housing 173 through the gas supply port 1732. That is, the processing system SYS may supply purge gas to the accommodation space 1730 inside the housing 173 via the gas supply port 1732.
  • the air pressure in the housing space 1730 is connected to the air pressure in the space outside the housing 173 (specifically, the internal space SP1 of the housing 3 housing the processing unit 1) through the gas supply port 1732.
  • the purge gas may be supplied so as to be higher than the above. That is, purge gas is supplied to the accommodation space 1730 through the gas supply port 1732 so that the air pressure in the accommodation space 1730 is higher than the air pressure in the internal space SP1 in which the workpiece W is placed on the stage 15. Good too.
  • purge gas may be supplied to the accommodation space 1730 via the gas supply port 1732 so that the air pressure in the accommodation space 1730 is higher than the air pressure in the internal space SP1 in which the workpiece W is processed.
  • the attachment device 17 can prevent unnecessary substances from adhering to the irradiation optical system 135 and the hood 136 housed in the accommodation space 1730.
  • unnecessary substances solid debris generated when a part of the workpiece W is removed.
  • Another example of unnecessary substances is gaseous fume generated when a part of the workpiece W is removed.
  • the purge gas supplied to the accommodation space 1730 through the gas supply port 1732 prevents unnecessary substances generated due to processing of the workpiece W from adhering to the irradiation optical system 135 accommodated in the accommodation space 1730. It may be used for In this case, the purge gas supplied to the accommodation space 1730 through the gas supply port 1732 may function as at least one of an air curtain and an air blow. As a result, unnecessary substances are prevented from adhering to the irradiation optical system 135 housed in the housing space 1730.
  • the purge gas may be supplied toward the irradiation optical system 135 housed in the accommodation space 1730 via the gas supply port 1732.
  • the purge gas may be supplied through the gas supply port 1732 toward at least one of the plurality of irradiation optical systems 135 accommodated in the accommodation space 1730.
  • the purge gas supplied toward the irradiation optical system 135 will cause the unnecessary substances to adhere to the irradiation optical system 135. unnecessary substances are removed. Therefore, the attachment device 17 can prevent unnecessary substances from adhering to the irradiation optical system 135 housed in the accommodation space 1730.
  • the purge gas supplied to the accommodation space 1730 through the gas supply port 1732 is used to prevent unnecessary substances generated due to processing of the workpiece W from adhering to the hood 136 accommodated in the accommodation space 1730. may be used.
  • the purge gas supplied to the accommodation space 1730 through the gas supply port 1732 may function as at least one of an air curtain and an air blow. As a result, unnecessary substances are prevented from adhering to the hood 136 accommodated in the accommodation space 1730.
  • the purge gas may be supplied toward the hood 136 accommodated in the accommodation space 1730 via the gas supply port 1732.
  • the purge gas may be supplied through the gas supply port 1732 toward at least one of the plurality of hoods 136 accommodated in the accommodation space 1730.
  • the attachment device 17 can prevent unnecessary substances from adhering to the hood 136 accommodated in the accommodation space 1730.
  • At least one of the irradiation optical system 135 (head housing 138) and the hood 136 housed in the housing space 1730 may be located in the purge gas flow path from the gas supply port 1732 to the transport port 1731.
  • unnecessary substances generated during processing of the workpiece W in the internal space SP1 which is the processing space where the workpiece W is processed, are transferred to the irradiation optical system 135 (head housing 138) and the hood 136 through the transport port 1731. The probability of reaching at least one is reduced.
  • FIG. 6 is a sectional view showing the overall configuration of the processing head 13 in which the irradiation optical system 135 and the hood 136 are replaceable.
  • FIG. 7 is a sectional view showing the processing head 13 shown in FIG. 6 in a state where the injection optical system 130, the irradiation optical system 135, and the hood 136 are separated from each other.
  • the injection optical system 130 may be housed in a head housing 137 of the processing head 13.
  • the exit optical system 130 may be housed in a housing space 137SP inside the head housing 137.
  • the irradiation optical system 135 may be housed in a head housing 138 of the processing head 13 that is different from the head housing 137.
  • the irradiation optical system 135 may be housed in a housing space 138SP inside the head housing 138.
  • at least one of the head housings 137 and 138 may be referred to as a lens barrel.
  • the head housing 138 can be attached to the head housing 137.
  • the head housing 138 attached to the head housing 137 is removable from the head housing 137.
  • the irradiation optical system 135 housed in the head housing 138 can be attached to the emission optical system 130 housed in the head housing 137.
  • Illumination optics 135 attached to exit optics 130 may be considered removable from exit optics 130. That is, attaching the head housing 138 to the head housing 137 may be considered to be equivalent to attaching the irradiation optical system 135 to the exit optical system 130. Removing the head housing 138 from the head housing 137 may be considered equivalent to removing the irradiation optical system 135 from the exit optical system 130.
  • the head housing 137 may be formed with an exit port 137AP through which each of the processing light EL and the measurement light ML emitted from the exit optical system 130 can pass.
  • an exit port 137AP which is a through hole passing through the partition wall, may be formed in the partition wall of the head housing 137 located on the exit side of the exit optical system 130.
  • the exit side of the exit optical system 130 may mean the side from which the processing light EL and the measurement light ML are exited from the exit optical system 130. In the examples shown in FIGS. 6 and 7, the exit side of the exit optical system 130 is the ⁇ Z side of the exit optical system 130.
  • the head housing 138 may be formed with an entrance port 138AP1 through which each of the processing light EL and the measurement light ML emitted from the injection optical system 130 can pass.
  • the partition wall of the head housing 138 located on the incident side of the irradiation optical system 135 may be formed with an entrance port 138AP1, which is a through hole passing through the partition wall.
  • the incident side of the irradiation optical system 135 may mean the side where the processing light EL and the measurement light ML enter the irradiation optical system 135.
  • the exit side of the irradiation optical system 135 is the +Z side of the irradiation optical system 135.
  • the head housing 138 may be attachable to the head housing 137 so that the injection port 137AP and the entrance port 138AP1 are connected.
  • the head housing 138 may be attachable to the head housing 137 so that the exit port 137AP and the entrance port 138AP1 are connected to each other on the exit side of the exit optical system 130.
  • the head housing 138 may be attachable to the head housing 137 so that the exit port 137AP and the entrance port 138AP1 are connected to each other on the entrance side of the irradiation optical system 135. In other words, when the head housing 138 is attached to the head housing 137, the head housing 138 is aligned with the head housing 137 so that the injection port 137AP and the entrance port 138AP1 are connected.
  • the irradiation optical system 135 may be considered to be attachable to the exit side of the exit optical system 130.
  • each of the processing light EL and the measurement light ML emitted from the exit optical system 130 enters the irradiation optical system 135 housed in the head housing 138 via the exit port 137AP and the entrance port 138AP1.
  • the head housing 138 may be directly attachable to the head housing 137.
  • the state where the head housing 138 is directly attached to the head housing 137 is the state where the head housing 138 is attached to the head housing 137 so that the head housing 137 supports the head housing 138. May contain.
  • the state in which the head casing 138 is directly attached to the head casing 137 refers to the state in which the head casing 138 is attached to the head casing 137 so that the head casing 138 is in contact with the head casing 137. May contain.
  • the head housing 138 may be indirectly attachable to the head housing 137.
  • Head housing 138 does not need to be directly attachable to head housing 137.
  • the state in which the head housing 138 is indirectly attached to the head housing 137 means that the head housing 138 supported by a support member different from the head housing 137 is aligned with the head housing 137. It may include the state of being.
  • the state in which the head housing 138 is indirectly attached to the head housing 137 means that the head housing 138 that is in contact with a support member different from the head housing 137 is aligned with the head housing 137. It may also include the state of
  • the hood 136 can be attached to the head housing 138.
  • the hood 136 attached to the head housing 138 is removable from the head housing 138.
  • the hood 136 may be considered to be attachable to the irradiation optical system 135 housed in the head housing 138.
  • a hood 136 attached to the illumination optics 135 may be considered removable from the illumination optics 135. That is, attaching the hood 136 to the head housing 138 may be considered to be equivalent to attaching the hood 136 to the irradiation optical system 135. Removing the hood 136 from the head housing 138 may be considered equivalent to removing the hood 136 from the irradiation optical system 135.
  • the hood 136 includes a hood member 1361.
  • the hood member 1361 may be a cylindrical member.
  • the hood member 1361 may be a cylindrical member with a circular or elliptical cross section.
  • the hood member 1361 may be a rectangular cylindrical member with a polygonal cross section.
  • the hood member 1361 has a cross-sectional shape of a first portion of the hood member 1361 located on the head housing 138 side, and a cross-sectional shape of a second portion of the hood member 1361 located on the workpiece W side. It may be a cylindrical member having a different shape.
  • the hood member 1361 may have a shape in which at least one of the inner diameter and the outer diameter of the hood member 1361 changes along the direction in which the tube constituting the hood member 1361 extends. .
  • the inner diameter and outer diameter of the hood member 1361 at one position in the Z-axis direction where the cylinder constituting the hood member 1361 extends increases as the one position is farther away from the head housing 138. It's getting smaller. That is, in the example shown in FIGS. 6 and 7, the shape of the hood member 136 is tapered off-shape. However, the shape of the hood 136 is limited to the tapered shape shown in FIGS. 6 and 7.
  • the hood 136 may have any shape that can function as the protection member described above.
  • the hood 136 may have any shape capable of functioning as the gas supply member described above.
  • the hood 136 may have any shape capable of functioning as the gas suction member described above.
  • the inner diameter of the hood member 1361 changes continuously along the Z-axis direction.
  • the inner diameter of the hood member 1361 does not need to change continuously along the Z-axis direction.
  • the inner diameter of the hood member 1361 may change stepwise along the Z-axis direction.
  • the inner diameter of the first portion of the hood member 1361 closest to the head housing 138 may be smaller than the inner diameter of the second portion of the hood member 1361 closest to the workpiece W.
  • the outer diameter of the hood member 1361 changes continuously along the Z-axis direction.
  • the outer diameter of the hood member 1361 does not need to change continuously along the Z-axis direction.
  • the outer diameter of the hood member 1361 may change stepwise along the Z-axis direction.
  • the outer diameter of the first portion of the hood member 1361 closest to the head housing 138 may be smaller than the outer diameter of the second portion of the hood member 1361 closest to the workpiece W.
  • At least a portion of the internal space 136SP surrounded by the hood member 1361 may be used as a space through which each of the processing light EL and the measurement light ML can pass.
  • the head housing 138 may be formed with an exit port 138AP2 through which each of the processing light EL and the measurement light ML emitted from the irradiation optical system 135 can pass.
  • the partition wall of the head housing 138 located on the exit side of the irradiation optical system 135 may be formed with an exit port 138AP2, which is a through hole passing through the partition wall.
  • the exit side of the irradiation optical system 135 may mean the side from which the processing light EL and the measurement light ML exit from the irradiation optical system 135.
  • the exit side of the irradiation optical system 135 is the ⁇ Z side of the irradiation optical system 135.
  • the hood member 1361 may be formed with an entrance port 136AP1 through which the processing light EL and the measurement light ML emitted from the irradiation optical system 135 can each enter the internal space 136SP.
  • one end of the cylinder constituting the hood member 1361 may be an open end forming the entrance port 136AP1.
  • the hood 136 may be attachable to the head housing 138 so that the exit port 138AP2 and the entrance port 136AP1 are connected.
  • the hood 136 may be attachable to the head housing 138 so that the exit port 138AP2 and the entrance port 136AP1 are connected to each other on the exit side of the irradiation optical system 135.
  • the hood 136 may be aligned with respect to the head housing 138 so that the injection port 138AP2 and the entrance port 136AP1 are connected.
  • the hood 136 may be considered to be attachable to the exit side of the irradiation optical system 135.
  • each of the processing light EL and the measurement light ML emitted from the irradiation optical system 135 enters the internal space 136SP of the hood 136 via the exit port 138AP2 and the entrance port 136AP1.
  • the hood member 1361 may be formed with an exit port 136AP2 through which each of the processing light EL and the measurement light ML incident on the internal space 136SP of the hood 136 can pass.
  • the other end of the cylinder constituting the hood member 1361 may be an open end forming the injection port 136AP2.
  • Each of the processing light EL and the measurement light ML that entered the internal space 136SP of the hood 136 may pass through the internal space 136SP and be emitted to the outside of the hood 136 via the exit port 136AP2. That is, the hood 136 may emit each of the processing light EL and the measurement light ML via the exit port 136AP2.
  • the workpiece W may be irradiated with the processing light EL emitted from the hood 136.
  • the measurement light ML emitted from the hood 136 may be irradiated onto the measurement target M.
  • the shape of the internal space 136SP of the hood 136 does not have to be similar to the external shape of the hood member 1361.
  • the hood 136 may be directly attachable to the head housing 138.
  • the state where the hood 136 is directly attached to the head housing 138 may include the state where the hood 136 is attached to the head housing 138 so that the head housing 138 supports the hood 136.
  • the state where the hood 136 is directly attached to the head housing 138 may include the state where the hood 136 is attached to the head housing 138 such that the hood 136 is in contact with the head housing 138.
  • the hood 136 may be indirectly attachable to the head housing 138.
  • the hood 136 does not have to be directly attachable to the head housing 138.
  • a state where the hood 136 is indirectly attached to the head housing 138 includes a state where the hood 136 supported by a support member different from the head housing 138 is aligned with the head housing 138. It's okay to stay.
  • a state in which the hood 136 is indirectly attached to the head housing 138 is a state in which the hood 136 is in contact with a support member different from the head housing 138 and is aligned with the head housing 138. May contain.
  • the hood 136 may function as a protection member for protecting the irradiation optical system 135 to which the hood 136 is attached. Specifically, the hood 136 may function as a protection member for protecting the irradiation optical system 135 by contacting an obstacle before the obstacle contacts the irradiation optical system 135.
  • the hood 136 when the hood 136 can function as a gas supply member, the hood 136 is attached to the irradiation optical system 135 so that the gas supplied by the gas supply source 18 is supplied to the hood 136. It's okay.
  • An example of a configuration for supplying gas from the gas supply source 18 to the hood 136 will be described below with reference to FIGS. 6 and 7. Note that a configuration different from the configuration shown in FIGS. 6 and 7 may be used as a configuration for supplying the gas supplied by the gas supply source 18 to the hood 136.
  • the gas supply source 18 may supply gas to the processing head 13 via a gas supply pipe 1811.
  • the end of the gas supply pipe 1811 is connected to a gas supply port 1822 formed in a support member 1821 fixed to the lower end (or the vicinity thereof) of the side surface of the head housing 137 of the processing head 13 .
  • the end of the gas supply pipe 1811 is inserted into the gas supply port 1822.
  • the gas supply port 1822 is a through hole that penetrates the support member 1821.
  • a support member 1823 in which a gas supply port 1824 is formed is fixed to the upper end (or the vicinity thereof) of the side surface of the head housing 138.
  • the gas supply port 1824 is a through hole that penetrates the support member 1823.
  • One end of a gas supply pipe 1812 extending downward from the gas supply port 1824 is connected to the gas supply port 1824 .
  • one end of the gas supply pipe 1812 is inserted into the gas supply port 1824.
  • another support member 1825 for supporting the gas supply pipe 1812 may be fixed to the side surface of the head housing 138.
  • Head housing 138 is attached to head housing 137 so that gas supply port 1822 and gas supply port 1824 are connected.
  • the head housing 138 is aligned with respect to the head housing 137 so that the gas supply port 1822 and the gas supply port 1824 are connected. may be done.
  • the gas supplied to the gas supply pipe 1811 by the gas supply source 18 is supplied to the gas supply pipe 1812 via the gas supply ports 1822 and 1824.
  • the hood 136 may include a protruding member 1362 that protrudes laterally from the side surface of the hood member 1361.
  • a gas supply port 1831 is formed on the upper surface of the protruding member 1362.
  • Hood 136 is attached to head housing 138 such that the other end of gas supply pipe 1812 is connected to gas supply port 1831.
  • the end of the gas supply pipe 1812 is inserted into the gas supply port 1831. That is, when the hood 136 is attached to the head housing 138, the hood 136 is attached to the head housing 138 such that the other end of the gas supply pipe 1812 is connected to the gas supply port 1831. May be aligned.
  • the gas supply port 1831 into which the gas supply pipe 1812 is inserted may be referred to as an insertion port.
  • the gas supplied by the gas supply source 18 to the gas supply pipe 1811 is supplied to the hood 136 via the gas supply port 1822, the gas supply port 1824, the gas supply pipe 1812, and the gas supply port 1831.
  • the end of the gas supply pipe 1812 may be inserted into the gas supply port 1831 at the timing when the hood 136 is attached to the head housing 138.
  • the end of gas supply tube 1812 may be manually inserted into gas supply port 1831 by an operator of processing system SYS.
  • the end of the gas supply tube 1812 may be mechanically and automatically inserted into the gas supply port 1831 by a device for inserting the gas supply tube 1812 into the gas supply port 1831.
  • the end of the gas supply pipe 1812 may be removed from the gas supply port 1831 at the same time as the hood 136 is removed from the head housing 138.
  • the end of gas supply tube 1812 may be manually removed from gas supply port 1831 by an operator of processing system SYS.
  • the end of the gas supply tube 1812 may be mechanically and automatically removed from the gas supply port 1831 by a device for removing the gas supply tube 1812 from the gas supply port 1831.
  • the gas supply pipe 1812 When the gas supply pipe 1812 is inserted into and removed from the gas supply port 1831, the gas supply pipe 1812 may include plastic piping. In this case, if the gas supply pipe 1812 is unintentionally deformed by the force used to insert the gas supply pipe 1812 into the gas supply port 1831, it may not be possible to easily insert the gas supply pipe 1812 into the gas supply port 1831. It may not be possible. Similarly, if the gas supply pipe 1812 is unintentionally deformed by the force used to remove the gas supply pipe 1812 from the gas supply port 1831, it may not be possible to easily remove the gas supply pipe 1812 from the gas supply port 1831. There is sex. For this reason, the gas supply pipe 1812 may include plastic piping. At least a portion of the gas supply pipe 1812 may be plastic piping.
  • the hood 136 is further formed with a gas supply port 1832 for supplying the gas supplied to the hood 136 to the gas supply target.
  • a gas supply port 1832 is formed on the inner wall surface of the hood 136 facing the internal space 136SP.
  • the gas supplied from the gas supply port 1832 is discharged to the outside of the hood 136 (for example, the space below the hood 136, in other words, the space above the work W) via the internal space 136SP of the hood 136. may be done.
  • the position where the gas supply port 1832 is formed is not limited to the position shown in FIG. 6.
  • the gas supply port 1832 may be formed at a position different from the inner wall surface of the hood 136 facing the internal space 136SP.
  • the gas supply port 1832 is connected to the gas supply port 1831 via a gas supply pipe 1833 formed inside the hood 136. Therefore, the gas supplied to the gas supply port 1831 of the hood 136 via the gas supply pipe 1812 is supplied to the gas supply target via the gas supply pipe 1833 and the gas supply port 1832. That is, the gas supply source 18 can supply gas to the gas supply target via the hood 136.
  • the gas supply source 18 may also be referred to as a gas supply device.
  • a device including at least one of the gas supply source 18, the gas supply pipe 1811, and the gas supply pipe 1812 may be referred to as a gas supply device.
  • a device including at least one of the gas supply source 18, the gas supply pipe 1811, the gas supply pipe 1812, the support member 1821, the support member 1823, and the support member 1825 may be referred to as a gas supply device.
  • connection part since the other end of the gas supply pipe 1812 is connected to the gas supply port 1831 of the hood 136, it may be referred to as a connection part. Since the gas supply port 1831 of the hood 136 is connected to the other end of the gas supply pipe 1812, it may be referred to as a connection portion.
  • the gas supplied from the gas supply source 18 through the hood 136 (that is, the gas supplied from the gas supply port 1832 of the hood 136, the same applies hereinafter) is used as a purge gas for purging the internal space SP1 of the housing 3. It's okay to be hit.
  • the gas supply source 18 may supply gas to the internal space SP1, which is an example of the gas supply target, via the hood 136. That is, the hood 136 may supply the gas supplied from the gas supply source 18 to the internal space SP1.
  • the gas supplied from the gas supply source 18 through the hood 136 may be used to prevent unnecessary substances generated due to processing of the workpiece W from adhering to the irradiation optical system 135.
  • the gas supply source 18 may supply the gas to the irradiation optical system 135, which is an example of the gas supply target, through the hood 136. That is, the hood 136 may supply the gas supplied from the gas supply source 18 to the irradiation optical system 135.
  • the gas supplied from the gas supply source 18 to the irradiation optical system 135 via the hood 136 may function as at least one of an air curtain and an air blow. As a result, unnecessary substances are prevented from adhering to the irradiation optical system 135.
  • the irradiation optical system 135 can appropriately irradiate the workpiece W with each of the processing light EL and the measurement light ML without being affected by unnecessary substances. Therefore, the processing unit 1 can appropriately process the workpiece W and appropriately measure the workpiece W without being affected by unnecessary substances.
  • the gas supplied from the gas supply source 18 through the hood 136 may be used to prevent unnecessary substances from adhering to the workpiece W.
  • the gas supply source 18 may supply the gas to the workpiece W, which is an example of the gas supply target, via the hood 136. That is, the hood 136 may supply the workpiece W with the gas supplied from the gas supply source 18.
  • the gas supplied from the gas supply source 18 to the workpiece W via the hood 136 may function as at least one of an air curtain and an air blow.
  • unnecessary substances are prevented from adhering to the work W.
  • the processing unit 1 can appropriately irradiate the workpiece W with each of the processing light EL and the measurement light ML without being affected by unnecessary substances. Therefore, the processing unit 1 can appropriately process the workpiece W and appropriately measure the workpiece W without being affected by unnecessary substances.
  • the gas supplied from the gas supply source 18 through the hood 136 may be used to remove unnecessary substances attached to the irradiation optical system 135.
  • the gas supply source 18 may supply the gas to the irradiation optical system 135, which is an example of the gas supply target, via the hood 136. That is, the hood 136 may supply the gas supplied from the gas supply source 18 to the irradiation optical system 135.
  • the gas supplied from the gas supply source 18 to the irradiation optical system 135 via the hood 136 may blow away unnecessary substances attached to the irradiation optical system 135. As a result, unnecessary substances attached to the irradiation optical system 135 are removed.
  • the irradiation optical system 135 can appropriately irradiate the workpiece W with each of the processing light EL and the measurement light ML without being affected by unnecessary substances. Therefore, the processing unit 1 can appropriately process the workpiece W and appropriately measure the workpiece W without being affected by unnecessary substances.
  • the gas supplied from the gas supply source 18 through the hood 136 may be used to remove unnecessary substances attached to the workpiece W.
  • the gas supply source 18 may supply the gas to the workpiece W, which is an example of the gas supply target, via the hood 136. That is, the hood 136 may supply the workpiece W with the gas supplied from the gas supply source 18.
  • the gas supplied to the workpiece W via the gas supply source 18 hood 136 may blow away unnecessary substances attached to the workpiece W.
  • unnecessary substances attached to the workpiece W are removed.
  • the processing unit 1 can appropriately irradiate the workpiece W with each of the processing light EL and the measurement light ML without being affected by unnecessary substances. Therefore, the processing unit 1 can appropriately process the workpiece W and appropriately measure the workpiece W without being affected by unnecessary substances.
  • the gas supplied from the gas supply source 18 through the hood 136 may be used to prevent unnecessary substances from entering the clean space SP2 in the processing system SYS.
  • the clean space SP2 is a space in which it is undesirable for unnecessary substances to enter.
  • the clean space SP2 may include at least a portion of the space SP21 between the irradiation optical system 135 and the workpiece W.
  • the clean space SP2 may include at least a portion of the space SP22 including the optical path of at least one of the processing light EL and the measurement light ML.
  • clean space SP2 may include at least a portion of interior space 136SP of hood 136.
  • the clean space SP2 may include at least a portion of the internal space SP1 of the housing 3.
  • the gas supply source 18 may supply gas to the clean space SP2, which is an example of the gas supply target, via the hood 136. That is, the hood 136 may supply the gas supplied from the gas supply source 18 to the clean space SP2.
  • the gas supplied from the gas supply source 18 to the clean space SP2 via the hood 136 may function as at least one of an air curtain and an air blow.
  • unnecessary substances are prevented from entering the clean space SP2.
  • unnecessary substances are prevented from remaining in the clean space SP2.
  • the processing unit 1 can appropriately irradiate the workpiece W with each of the processing light EL and the measurement light ML without being affected by unnecessary substances. Therefore, the processing unit 1 can appropriately process the workpiece W and appropriately measure the workpiece W without being affected by unnecessary substances.
  • the gas supplied from the gas supply source 18 through the hood 136 may be used to remove unnecessary substances that have entered the clean space SP2 from the clean space SP2.
  • the gas supply source 18 may supply gas to the clean space SP2, which is an example of the gas supply target, via the hood 136. That is, the hood 136 may supply the gas supplied from the gas supply source 18 to the clean space SP2.
  • the gas supplied from the gas supply source 18 to the clean space SP2 via the hood 136 may blow away unnecessary substances that have entered the clean space SP2.
  • unnecessary substances that have entered the clean space SP2 are removed. In other words, unnecessary substances are prevented from remaining in the clean space SP2.
  • the processing unit 1 can appropriately irradiate the workpiece W with each of the processing light EL and the measurement light ML without being affected by unnecessary substances. Therefore, the processing unit 1 can appropriately process the workpiece W and appropriately measure the workpiece W without being affected by unnecessary substances.
  • the gas supply source 18 may supply gas to the accommodation space 137SP inside the head housing 137.
  • the gas supplied to the housing space 137SP may be supplied to the housing space 138SP of the head housing 138 via the injection port 137AP of the head housing 137 and the entrance port 138AP of the head housing 138.
  • the gas supply source 18 may supply gas to the housing space 138SP of the head housing 138 without supplying gas to the housing space 137SP inside the head housing 137. That is, the gas supply source 18 may supply gas to the housing space 138SP of the head housing 138 without passing through the housing space 137SP inside the head housing 137.
  • the gas supplied to the housing spaces 137SP and 138SP may be used to prevent unnecessary substances from adhering to the optical members housed in the housing spaces 137SP and 138SP. As a result, the possibility that the optical member will be contaminated by unnecessary substances is reduced. Furthermore, the gas supplied to the housing spaces 137SP and 138SP may be used to stabilize the temperature of the optical members housed in the housing spaces 137SP and 138SP.
  • the hood 136 when the hood 136 can function as a gas suction member, the hood 136 allows the gas suctioned (that is, collected) through the hood 136 to be suctioned by the gas suction source 19 ( In other words, it may be attached to the irradiation optical system 135 so that it can be collected.
  • the gas suction source 19 In other words, it may be attached to the irradiation optical system 135 so that it can be collected.
  • FIGS. 6 and 7 an example of a configuration for sucking gas sucked through the hood 136 by the gas suction source 19 will be described with reference to FIGS. 6 and 7. Note that a configuration different from the configuration shown in FIGS. 6 and 7 may be used as a configuration for sucking the gas sucked through the hood 136 with the gas suction source 19.
  • the hood 136 is further formed with a gas suction port 1932 for sucking (that is, collecting) gas.
  • a gas suction port 1932 is formed on the inner wall surface of the hood 136 facing the internal space 136SP.
  • the position where the gas suction port 1932 is formed is not limited to the position shown in FIGS. 6 and 7. That is, the gas suction port 1932 may be formed at a position different from the inner wall surface of the hood 136 facing the internal space 136SP.
  • the gas suction port 1942 is connected to the gas suction port 1931 via a gas suction pipe 1933 formed inside the hood 136.
  • the gas suction port 1931 may be formed on the upper surface of a protrusion member 1363 that protrudes laterally from the side surface of the hood member 1361.
  • One end of the gas suction pipe 1912 is connected to the gas suction port 1931.
  • one end of the gas suction tube 1912 is inserted into the gas suction port 1931.
  • the hood 136 is attached to the head housing 138 such that one end of the gas suction tube 1912 is connected to the gas suction port 1931. That is, when the hood 136 is attached to the head housing 138, the hood 136 is attached to the head housing 138 such that one end of the gas suction pipe 1912 is connected to the gas suction port 1931. May be aligned.
  • the end of the gas suction tube 1912 may be inserted into the gas suction port 1931 at the timing when the hood 136 is attached to the head housing 138.
  • the end of gas suction tube 1912 may be manually inserted into gas suction port 1931 by an operator of processing system SYS.
  • the end of the gas suction tube 1912 may be mechanically and automatically inserted into the gas suction port 1931 by a device for removing the gas supply tube 1912 from the gas suction port 1931.
  • the end of the gas suction tube 1912 may be removed from the gas suction port 1931 at the same time as the hood 136 is removed from the head housing 138.
  • the end of gas suction tube 1912 may be manually removed from gas suction port 1931 by an operator of processing system SYS.
  • the end of the gas suction tube 1912 may be mechanically and automatically removed from the gas suction port 1931 by a device for removing the gas suction tube 1912 from the gas suction port 1931.
  • the other end of the gas suction tube 1912 is connected to a gas suction port 1924 of a support member 1923 fixed to the upper end (or the vicinity thereof) of the side surface of the head housing 138.
  • the other end of gas suction tube 1912 is inserted into gas suction port 1924 .
  • the gas suction port 1924 is a through hole that penetrates the support member 1923.
  • another support member 1925 for supporting the gas suction tube 1912 may be fixed to the side surface of the head housing 138.
  • a support member 1921 in which a gas suction port 1922 is formed is fixed to the lower end (or the vicinity thereof) of the side surface of the head housing 137 of the processing head 13 .
  • Head housing 138 is attached to head housing 137 so that gas suction port 1922 and gas suction port 1924 are connected. That is, when the head housing 138 is attached to the head housing 137, the head housing 138 is aligned with respect to the head housing 137 so that the gas suction port 1922 and the gas suction port 1924 are connected. may be done.
  • a gas suction pipe 1911 connected to the gas suction source 19 is connected to the gas suction port 1922.
  • a gas suction tube 1911 is inserted into a gas suction port 1922.
  • the gas suction source 19 can move the gas suction target through the gas suction port 1932, the gas suction pipe 1933, the gas suction port 1931, the gas suction pipe 1912, the gas suction port 1924, the gas suction port 1922, and the gas suction pipe 1911. Gas can be sucked from. That is, the gas suction source 19 can suction gas from the gas suction target via the hood 136.
  • the gas suction source 19 may also be referred to as a gas suction device.
  • a device including at least one of the gas suction source 19, the gas suction tube 1911, and the gas suction tube 1912 may be referred to as a gas suction device.
  • a device including at least one of the gas suction source 19, the gas suction tube 1911, the gas suction tube 1912, the support member 1921, the support member 1923, and the support member 1925 may be referred to as a gas suction device.
  • one end of the gas suction tube 1912 is connected to the gas suction port 1931 of the hood 136, it may be referred to as a connecting portion. Since the gas suction port 1931 of the hood 136 is connected to one end of the gas suction pipe 1912, it may also be referred to as a connection portion.
  • the gas suction source 19 may suction at least a portion of the gas supplied to the irradiation optical system 135 by the gas supply source 18 via the hood 136.
  • the gas suction source 19 may suction gas from the housing space 138SP of the head housing 138 in which the irradiation optical system 135 is housed, via the hood 136.
  • at least one of the irradiation optical system 135 and the housing space 138SP of the head housing 138 may be the target for gas suction.
  • the gas suction source 19 may suck at least a portion of the gas supplied to the workpiece W by the gas supply source 18 via the hood 136.
  • the gas suction source 19 may suck gas from the space around the workpiece W via the hood 136.
  • at least one of the workpiece W and the space around the workpiece W may be a gas suction target.
  • the gas suction source 19 may suck at least a portion of the gas supplied by the gas supply source 18 to the internal space SP1 of the housing 3 via the hood 136.
  • the internal space SP1 may be the target of gas suction.
  • the gas suction source 19 may suck at least a portion of the gas supplied to the clean space SP2 by the gas supply source 18 via the hood 136.
  • the clean space SP2 may be the gas suction target.
  • the flow rate of gas sucked from the gas suction port 1932 may be smaller than the flow rate of gas supplied from the gas supply port 1832.
  • the flow rate of the gas sucked from the gas suction port 1932 may be the same as the flow rate of the gas supplied from the gas supply port 1832.
  • the flow rate of the gas sucked from the gas suction port 1932 may be greater than the flow rate of the gas supplied from the gas supply port 1832.
  • the gas suction source 19 may collect unnecessary substances by suctioning gas through the hood 136.
  • the gas suction source 19 may collect unnecessary substances staying in the internal space SP1 via the hood 136.
  • the gas suction source 19 may collect unnecessary substances staying in the clean space SP2 via the hood 136.
  • the processing unit 1 can appropriately irradiate the workpiece W with each of the processing light EL and the measurement light ML without being affected by unnecessary substances. Therefore, the processing unit 1 can appropriately process the workpiece W and appropriately measure the workpiece W without being affected by unnecessary substances.
  • FIGS. 6 and 7 show an example of a hood 136 that can function as both a gas supply member and a gas suction member.
  • the hood 136 does not have to be capable of functioning as a gas suction member.
  • the gas suction port 1931, the gas suction port 1932, and the gas suction pipe 1933 may not be formed in the hood 136.
  • the hood 136 does not need to be able to function as a gas supply member.
  • the gas supply port 1831, the gas supply port 1832, and the gas supply pipe 1833 may not be formed in the hood 136.
  • FIG. 8 is a cross-sectional view showing the configuration of the head housing 138 for replacing the irradiation optical system 135 together with the configuration of the head housing 137 to which the head housing 138 is attached.
  • the lower surface of the head housing 137 (specifically, the surface facing the ⁇ Z side) may be used as a mounting surface 1370 to which the head housing 138 is attached. That is, the head housing 138 may be attached to the head housing 137 such that the attachment surface 1380, which is the upper surface of the head housing 138, faces the attachment surface 1370.
  • At least one attachment pin 1371 may be formed on the attachment surface 1370 of the head housing 137.
  • At least one attachment pin 1372 may be formed on the side surface of each attachment pin 1371. As shown in the enlarged view of the mounting pin 1371 on the right side of FIG. 8, each mounting pin 1372 is housed inside the mounting pin 1371. 1371) and a state in which each mounting pin 1372 is not housed inside the mounting pin 1371 (as a result, each mounting pin 1372 protrudes from the side of the mounting pin 1371). It may be switchable.
  • each mounting pin 1372 can be determined by using the force that moves the mounting pin 1372, such as a state where each mounting pin 1372 is accommodated inside the mounting pin 1371, and a state where each mounting pin 1372 is accommodated inside the mounting pin 1371. It is possible to switch between the state where it is not
  • the force that moves the attachment pin 1372 may be a force applied to the attachment pin 1372 from the head housing 138.
  • the attachment pin 1372 may come into contact with the surface of the head housing 138 (for example, a surface forming an attachment hole 1381, which will be described later).
  • a force is applied to the mounting pin 1372 that pushes out the mounting pin 1372 from the surface of the head housing 138.
  • the attachment pin 1372 may be moved by a force applied from the surface of the head housing 138 that pushes out the attachment pin 1372.
  • the mounting pin 1372 may be housed inside the mounting pin 1371 by a force applied from the surface of the head housing 138 that pushes out the mounting pin 1372.
  • the curvature of at least a portion of the surface of the mounting pin 1372 may be set to an appropriate curvature so that force is appropriately applied to the mounting pin 1372 from the surface of the head housing 138.
  • At least a portion of the surface of the attachment pin 1372 may be a curved surface.
  • the surface of the mounting pin 1372 does not have to be a curved surface.
  • the force that moves the mounting pin 1372 may be, for example, a force caused by gas (for example, air).
  • the force that moves the attachment pin 1372 may be, for example, a force due to gas (eg, air) pressure.
  • a pneumatic device supplying gas may move the mounting pin 1372.
  • a purge gas may be used as the gas for moving the attachment pin 1372, or a gas different from the purge gas may be used.
  • the two mounting pins 1371 are arranged on a straight line intersecting the optical axis EX of the irradiation optical system 135.
  • the number of attachment pins 1371 is not limited to two.
  • a single mounting pin 1371 may be formed.
  • Three or more attachment pins 1371 may be formed.
  • a mounting hole 1381 into which the mounting pin 1371 of the head casing 137 can be inserted may be formed in the mounting surface 1380 of the head casing 138.
  • the number of attachment holes 1381 formed in the head housing 138 may be the same as the number of attachment pins 1371 formed in the head housing 137.
  • the mounting hole 1381 may be connected to a mounting hole 1382 into which a mounting pin 1372 of the head housing 137 can be inserted.
  • the number of attachment holes 1382 connected to each attachment hole 1381 may be the same as the number of attachment pins 1372 formed in each attachment pin 1371.
  • each attachment pin 1372 is such that each attachment pin 1372 is housed inside the attachment pin 1371, as shown in FIG. The state may be switched.
  • the mounting device 17 holds the head housing 138 using the holding member 1722 of the transfer arm 1721, and also positions the head housing 138 at a position below the head housing 137. You may move it.
  • the holding member 1722 holds the head housing 138 by gripping the head housing 138 in a sandwiching manner. Retaining member 1722 may be considered an end effector capable of retaining an object.
  • each attachment pin 1371 and each attachment hole 1381 may be used as a mark for aligning the head housing 138 with respect to the head housing 137.
  • the state of each mounting pin 1372 may be switched to a state in which each mounting pin 1372 is not housed inside the mounting pin 1371.
  • the mounting pin 1372 is inserted into the mounting hole 1382, and the head housing 138 is fixed to the head housing 137. That is, the head housing 138 is attached to the head housing 137.
  • the attachment device 17 may control the holding member 1722 of the transport arm 1721 so that the holding member 1722 separates the head housing 138.
  • each mounting pin 1372 may be switched to a state in which each mounting pin 1372 is housed inside the mounting pin 1371. Thereafter, each mounting pin 1371 may be removed from each mounting hole 1381, as shown in FIG. 9(a). As a result, the head housing 138 is removed from the head housing 137, as shown in FIG. 9(a). In other words, the irradiation optical system 135 is removed from the exit optical system 130.
  • a groove may be formed in at least one of the mounting surface 1380 of the head housing 138 and the mounting surface 1370 of the head housing 137.
  • the groove may be evacuated.
  • the control unit 2 may determine whether the head housing 138 is properly attached to the head housing 137 based on the air pressure of the evacuated groove.
  • the force that moves the attachment pin 1372 may include a force caused by a spring (or any elastic body) in addition to the force caused by the gas described above.
  • the state of the mounting pin 1372 may be set such that the mounting pin 1372 protrudes from the side surface of the mounting pin 1371 due to a force applied to the mounting pin 1372 from a spring. In this state, the state of the mounting pin 1372 may be switched to a state in which the mounting pin 1372 is housed inside the mounting pin 1371 by a force caused by the gas.
  • the mounting pin 1372 when the pneumatic device is in the OFF state, the mounting pin 1372 protrudes from the side surface of the mounting pin 1371, while when the pneumatic device is in the ON state, the mounting pin 1372 protrudes from the side surface of the mounting pin 1371. 1372 may be housed inside the mounting pin 1371. In this case, even if the pneumatic device breaks down due to an unexpected situation (that is, even if the pneumatic device is turned off), the head housing 138 It will never deviate from 137. Therefore, damage to the irradiation optical system 135 due to falling can be prevented. Therefore, the mounting pin 1371 and the mounting hole 1381 can function as a fall prevention mechanism that prevents the head housing 138 from falling from the head housing 137.
  • the attachment pin 1371 and the attachment hole 1381 can function as a drop-off prevention mechanism that prevents the head housing 138 from falling off the head housing 137.
  • the processing head 13 may include other fall prevention mechanisms (drop-off prevention mechanisms) in addition to the fall prevention mechanisms (drop-off prevention mechanisms) including the mounting pins 1371 and the attachment holes 1381.
  • the shape of the mounting surface 1380 of the head housing 138 may be such that the mounting surface 1380 protrudes from the side surface of the head housing 138 in the direction along the XY plane.
  • the mounting surface 1380 of the head housing 138 may have a flange shape.
  • the mounting hole 1381 described above may be formed in a portion of the mounting surface 1380 that protrudes from the side surface of the head housing 138.
  • FIG. 10 is a cross-sectional view showing the structure of the replaceable hood 136 together with the structure of the head housing 138 to which the hood 136 is attached.
  • FIG. 11 is a perspective view showing the structure of the replaceable hood 136.
  • the lower surface of the head housing 138 (specifically, the surface facing the ⁇ Z side) may be used as a mounting surface 1383 to which the hood 136 is attached.
  • the upper surface of the hood 136 (specifically, the surface facing the +Z side) may be used as a mounting surface 1360 that is attached to the head housing 138.
  • Attachment surface 1360 may include at least a portion of the top surface of hood member 1361.
  • Attachment surface 1360 may include at least a portion of the top surface of flange member 1364 that is part of hood 136.
  • the flange member 1364 is a member that protrudes from the side surface of the hood member 1361 in the direction along the XY plane.
  • the flange member 1364 is a member that protrudes from the upper end of the side surface of the hood member 1361 in the direction along the XY plane.
  • the hood 136 may be attached to the head housing 138 such that the attachment surface 1360 of the hood 136 faces the attachment surface 1383.
  • At least one attachment hole 1385 may be formed in the attachment surface 1383 of the head housing 138.
  • at least one magnetic body 1386 may be disposed on the mounting surface 1383 of the head housing 138. At least one magnetic body 1386 may be arranged on the mounting surface 1383 such that the magnetic body 1386 does not protrude downward from the mounting surface 1383.
  • the head housing 138 may be formed of a magnetic material.
  • at least one magnetic body 1386 may not be arranged in the head housing 138.
  • at least a portion of the head housing 138 made of a magnetic material may also be used as the magnetic material 1386.
  • At least one attachment pin 1365 may be formed on the attachment surface 1360 of the hood 136.
  • the attachment pin 1365 is a member that can be inserted into the attachment hole 1385 of the head housing 138.
  • the attachment pin 1365 is a member that can be inserted into the attachment hole 1385 of the head housing 138 when the hood 136 is attached to the head housing 138.
  • each mounting pin 1365 and each mounting hole 1385 may be used as a mark for positioning the hood 136 with respect to the head housing 138.
  • the number of attachment pins 1365 formed in the hood 136 may be the same as the number of attachment holes 1385 formed in the head housing 138. In the example shown in FIG. 11, three attachment pins 1365 are formed on the hood 136. Therefore, in this case, three attachment holes 1385 may be formed in the head housing 138.
  • the plurality of attachment pins 1365 may be formed at equal intervals.
  • the plurality of mounting holes 1385 corresponding to the plurality of mounting pins 1365 may also be arranged at equal intervals.
  • the plurality of attachment pins 1365 may be formed at arbitrary formation positions.
  • the plurality of attachment holes 1385 may be formed at arbitrary positions.
  • At least one magnet 1366 may be arranged on the attachment surface 1360 of the hood 136.
  • the magnet 1366 is a member that can face the magnetic body 1386 disposed on the head housing 138 when the hood 136 is attached to the head housing 138.
  • the magnet 1366 is a member that can face the magnetic body 1386 disposed in the head housing 138 in a state where each of the above-described mounting pins 1365 is inserted into each mounting hole 1385. Therefore, the magnets 1366 and the magnetic bodies 1386 are arranged in appropriate positions such that each magnet 1366 faces the magnetic body 1386 corresponding to each magnet 1366 when each mounting pin 1365 is inserted into each mounting hole 1385.
  • the hood 136 when the hood 136 is attached to the head housing 138, there is a magnetic force between the magnet 1366 of the hood 136 and the magnetic body 1386 of the head housing 138 that attracts the magnet 1366 and the magnetic body 1386 to each other. act. In this embodiment, the hood 136 is attached to the head housing 138 using this magnetic force.
  • the number of magnets 1366 arranged in the hood 136 may be the same as the number of magnetic bodies 1386 arranged in the head housing 138. In the example shown in FIG. 11, three magnets 1366 are arranged in the hood 136. Therefore, in this case, three magnetic bodies 1386 may be arranged in the head housing 138.
  • the magnet 1366 may be lighter than the magnetic body 1386.
  • each magnet 1366 may be lighter than its corresponding magnetic body 1386.
  • the weight of the hood 136 can be reduced compared to the case where the magnetic material 1386, which is heavier than the magnet 1366, is placed in the hood 136.
  • the plurality of magnets 1366 may be arranged at equal intervals.
  • the plurality of magnetic bodies 1386 corresponding to the plurality of magnets 1366 may also be arranged at equal intervals.
  • the plurality of magnets 1366 may be arranged in any arrangement pattern.
  • the plurality of magnetic bodies 1386 may be arranged in any arrangement pattern.
  • the hood 136 may be formed of a magnet.
  • at least one magnet 1366 may not be located on the hood 136.
  • at least a portion of the head housing 138 formed of a magnet may also be used as the magnet 1366.
  • an inclined surface 1387 that is inclined with respect to the mounting surface 1383 may be formed on the outside of the mounting surface 1383 of the head housing 138.
  • the inclined surface 1387 may be inclined relative to the mounting surface 1383 so as to form a recess relative to the mounting surface 1383.
  • an inclined surface 1367 that is inclined with respect to the mounting surface 1360 may be formed on the outside of the mounting surface 1360 of the hood 136.
  • the inclined surface 1367 may be inclined relative to the mounting surface 1360 so as to form a depression relative to the mounting surface 1360.
  • a gap G is formed between the head housing 138 and the hood 136.
  • This gap G may be used to remove the hood 136 from the head housing 138, as will be described in detail later with reference to FIGS. 14(a) to 14(b).
  • the inclined surface 1387 does not have to be formed around the entire outer circumference of the mounting surface 1380. Further, the inclined surface 1367 does not need to be formed all around the outside of the mounting surface 1360.
  • the mounting device 17 holds the hood 136 using the holding member 1722 of the transfer arm 1721, and moves the hood 136 to a position below the head housing 138. Good too.
  • the holding member 1722 holds the head housing 138 by supporting the flange member 1364 of the hood 136 from below.
  • the hood 136 may be aligned with the head housing 138 so that each mounting pin 1365 is inserted into each mounting hole 1385.
  • each magnet 1366 faces a magnetic body 1386 corresponding to each magnet 1366. Therefore, a magnetic force acts between the magnet 1366 of the hood 136 and the magnetic body 1386 of the head housing 138, which attracts the magnet 1366 and the magnetic body 1386 to each other. Therefore, the hood 136 is attached to the head housing 138 by this magnetic force. Thereafter, the attachment device 17 may control the holding member 1722 of the transport arm 1721 so that the holding member 1722 releases the hood 136.
  • the gas supply pipe 1812 is connected to the gas supply port 1831. Therefore, as shown in FIG. 13A, which shows the positional relationship between the gas supply pipe 1812 and the gas supply port 1831 in the process of attaching the hood 136 to the head housing 138, the attachment device 17
  • the hood 136 may be positioned relative to the head housing 138 such that the hood 136 is connected to (typically inserted into) the gas supply port 1831.
  • the gas supply pipe 1812 and the gas supply port 1831 may be used as marks for positioning the hood 136 with respect to the head housing 138, similar to the mounting pin 1365 and the mounting hole 1385.
  • the gas supply pipe 1812 is connected to the gas supply port 1831, as shown in FIG. 13(b).
  • the -Z side end surface (that is, the gas outlet side end surface) of the gas supply pipe 1812 may be located at the same position as the mounting surface 1383 of the housing 138 in the Z-axis direction. That is, the ⁇ Z side end surface of the gas supply pipe 1812 may be flush with the mounting surface 1383 of the housing 138 in the Z-axis direction. Even in this case, if the flatness of the mounting surface 1383 of the casing 138 and the mounting surface 1360 of the hood member 136 is high, the mounting surface 1383 of the casing 138 and the mounting surface 1360 of the hood member 136 may be in close contact with each other. This improves airtightness and ensures practically sufficient airtightness.
  • an O-ring 18331 may be disposed in the gas supply pipe 1833 connected to the gas supply port 1831.
  • O-ring 18331 may be used to fix gas supply pipe 1812 inserted into gas supply port 1831.
  • the O-ring 18331 may be used to ensure airtightness of a series of gas supply pipes including the gas supply pipe 1833 and the gas supply pipe 1812.
  • the gas suction pipe 1912 is opened while the hood 136 is attached to the head housing 138. is connected to the gas suction port 1931. Therefore, as shown in FIG. 13A, which shows the positional relationship between the gas suction pipe 1912 and the gas suction port 1931 in the process of attaching the hood 136 to the head housing 138, the attachment device 17 is attached to the gas suction pipe 1912 and the gas suction port 1931.
  • the hood 136 may be positioned relative to the head housing 138 such that the hood 136 is connected to (typically inserted into) the gas suction port 1931 .
  • the gas suction pipe 1912 and the gas suction port 1931 may be used as marks for positioning the hood 136 with respect to the head housing 138, similar to the mounting pin 1365 and the mounting hole 1385.
  • the gas suction tube 1912 is connected to the gas suction port 1931, as shown in FIG. 13(b).
  • the -Z side end surface (that is, the gas inlet side end surface) of the gas suction tube 1912 may be located at the same position as the mounting surface 1383 of the housing 138 in the Z-axis direction. In other words, the -Z side end surface of the gas suction tube 1912 may be flush with the mounting surface 1383 of the housing 138 in the Z-axis direction. Even in this case, if the flatness of the mounting surface 1383 of the housing 138 and the mounting surface 1360 of the hood member 136 is high, the close contact between the mounting surface 1383 of the housing 138 and the mounting surface 1360 of the hood member 136 This improves airtightness and ensures practically sufficient airtightness.
  • an O-ring 19331 may be disposed in the gas suction pipe 1933 connected to the gas suction port 1931.
  • O-ring 19331 may be used to fix gas suction tube 1912 inserted into gas suction port 1931.
  • O-ring 19331 may be used to ensure airtightness of a series of gas suction tubes including gas suction tube 1933 and gas suction tube 1912.
  • the attachment device 17 may hold the hood 136 using the holding member 1722 of the transport arm 1721.
  • the mounting device 17 attaches the insertion member 1723 of the transfer arm 1721 to the inclined surface 1367 of the hood 136 and the inclined surface of the head housing 138 on the outside of the mounting surface 1383 and the mounting surface 1360. It may be inserted into the gap G formed by 1387.
  • the insertion member 1723 may be considered to be an end effector that can be inserted into the gap G.
  • the attachment device 17 may move the insertion member 1723 of the transport arm 1721 so that it is inserted into the boundary between the hood 136 and the head housing 138 through the gap G. That is, the attachment device 17 may move the insertion member 1723 of the transport arm 1721 so that the insertion member 1723 is inserted into the boundary between the hood 136 and the irradiation optical system 135 via the gap G.
  • a force is applied by the insertion member 1723 to the inclined surface 1367 of the hood 136 and the inclined surface 1387 of the head housing 138 to separate the inclined surfaces 1367 and 1387 from each other. Therefore, as shown in FIG. 14(b), the hood 136, which was attached to the head housing 138 by magnetic force, is removed from the head housing 138.
  • the mounting device 17 when the gap G is formed between the mounting surface 1383 and the mounting surface 1360, the mounting device 17 is , the insertion member 1723 of the transport arm 1721 can be easily inserted into the boundary between the hood 136 and the head housing 138. Therefore, the attachment device 17 can relatively easily remove the hood 136 from the head housing 138.
  • the gap G does not necessarily have to be formed. That is, the inclined surface 1367 does not need to be formed on the hood 136, and the inclined surface 1387 does not need to be formed on the head housing 138. Even in this case, the mounting device 17 can remove the hood 136 from the head housing 138 by inserting the insertion member 1723 of the transport arm 1721 into the boundary between the hood 136 and the head housing 138. good.
  • the housing device 171 of the mounting device 17 may house a plurality of irradiation optical systems 135.
  • the housing device 171 may house a plurality of irradiation optical systems 135 of different types. Examples of a plurality of different types of irradiation optical systems 135 are shown in FIGS. 15(a) to 15(j).
  • FIGS. 15(a) to 15(j) each show ten different types of irradiation optical systems 135.
  • the housing device 171 accommodates a plurality of irradiation optical systems 135 having different numerical apertures NA (Numerial Aperture) on the workpiece W side, good.
  • NA numerical aperture
  • NA numerical aperture
  • the numerical aperture NA of the irradiation optical system 135 increases, processing accuracy and measurement accuracy become higher, but the possibility that the irradiation optical system 135 collides with the workpiece W (or the object to be measured M) increases.
  • the accommodation device 171 has the effect of improving processing accuracy and measurement accuracy (hereinafter referred to as accuracy improvement effect), and the effect of preventing collision between the irradiation optical system 135 and the workpiece W (or the measurement target M). (hereinafter referred to as collision prevention effect), a plurality of irradiation optical systems 135 having different numerical apertures NA may be accommodated.
  • a plurality of irradiation optical systems 135 with mutually different numerical apertures NA can be considered equivalent to a plurality of irradiation optical systems 135 with mutually different working distances.
  • the working distance may be the distance along the optical axis EX from the final optical element of the irradiation optical system 135 to the focusing position of the processing light EL.
  • the working distance may be the distance along the optical axis EX from the optical element disposed closest to the exit side among the one or more optical elements constituting the irradiation optical system 135 to the condensing position of the processing light EL. .
  • the working distance may be the distance along the direction parallel to the optical axis EX from the part of the head housing 138 that accommodates the irradiation optical system 135 located closest to the workpiece W to the condensing position of the processing light EL. good.
  • the focusing position of the processing light EL may be the rear focal position of the irradiation optical system 135.
  • a plurality of irradiation optical systems 135 having different working distances can be considered to be equivalent to a plurality of irradiation optical systems 135 having different focal lengths.
  • the plurality of irradiation optical systems 135 having different working distances may be considered to be equivalent to the plurality of irradiation optical systems 135 having different focal positions.
  • the housing device 171 may house an irradiation optical system 135-1 in which the numerical aperture NA is set to the first numerical aperture NA1 in order to achieve both an accuracy improvement effect and a collision prevention effect.
  • the housing device 171 in addition to or in place of the irradiation optical system 135-1, the housing device 171 has a numerical aperture NA larger than the first numerical aperture NA1 in order to give priority to the accuracy improvement effect over the collision prevention effect.
  • An irradiation optical system 135-2 set to a second numerical aperture NA2 may be accommodated.
  • the housing device 171 may have a first numerical aperture NA in order to prioritize the collision prevention effect over the accuracy improvement effect.
  • An irradiation optical system 135-3 may be accommodated, which is set to a third numerical aperture NA3 smaller than the numerical aperture NA1. Note that when the numerical aperture of the irradiation optical system 135 on the side of the workpiece W is variable, the above-mentioned numerical aperture may mean the maximum value of the variable numerical aperture.
  • the processing system SYS when the irradiation optical system 135-1 is attached to the processing head 13, the processing system SYS reduces the possibility of collision between the irradiation optical system 135 and the work W (or the measurement target M). It is possible to process the workpiece W with the first processing accuracy while also measuring the measurement target M with the first measurement accuracy. Further, when the irradiation optical system 135-2 is attached to the processing head 13, the processing system SYS processes the workpiece W with a second processing accuracy higher than the first processing accuracy, and The measurement target M can be measured with a second measurement accuracy higher than the measurement accuracy of .
  • the processing system SYS when the irradiation optical system 135-3 is attached to the processing head 13, compared to the case where the irradiation optical system 135-1 is attached to the processing head 13, the processing system SYS Collision between the workpiece 135 and the workpiece W (or the measurement object M) can be further prevented. Furthermore, since the working distance becomes longer, as shown in FIG. 15(c), the processing system SYS appropriately processes the workpiece W so as to form a deep hole in the workpiece W, and It is possible to properly measure the inside of a deep hole formed in a hole.
  • the housing device 171 may house a plurality of irradiation optical systems 135 having different apertures R1.
  • the accommodation device 171 accommodates an irradiation optical system 135-4 whose aperture R1 is a first aperture, and an irradiation optical system 135-5 whose aperture R1 is a second aperture larger than the first aperture. may have been done.
  • the aperture R1 of the irradiation optical system 135 may also mean the aperture of the f ⁇ lens 1351.
  • the aperture R1 of the f ⁇ lens 1351 may mean the size (so-called width or diameter) of the f ⁇ lens 1351 in a direction intersecting the irradiation directions of the processing light EL and the measurement light ML.
  • the diameter R1 of the irradiation optical system 135 is the size of the head housing 138 in the direction intersecting the irradiation direction of the processing light EL and the measurement light ML. (so-called width or diameter).
  • an irradiation optical system 135-4 may be accommodated.
  • the processing system SYS can insert a The irradiation optical system 135-4 can be advanced. Therefore, the processing system SYS can appropriately process the workpiece W to form a deep hole in the workpiece W, and can appropriately measure the inside of the deep hole formed in the measurement target M.
  • the housing device 171 may house an irradiation optical system 135-6 specialized for processing the workpiece W using the processing light EL.
  • the housing device 171 may house an irradiation optical system 135-6 that prioritizes improving processing accuracy over improving measurement accuracy.
  • the housing device 171 may house the irradiation optical system 135-6 designed only to improve processing accuracy without giving any consideration to improving measurement accuracy. In this case, when the irradiation optical system 135-6 is attached to the processing head 13, the processing system SYS can process the workpiece W more appropriately.
  • the housing device 171 may house an irradiation optical system 135-7 specialized for measuring the measurement target M using the measurement light ML.
  • the housing device 171 may house an irradiation optical system 135-7 that prioritizes improving measurement accuracy over improving processing accuracy.
  • the housing device 171 may house the irradiation optical system 135-7 designed only to improve measurement accuracy without giving any consideration to improving processing accuracy. In this case, when the irradiation optical system 135-7 is attached to the processing head 13, the processing system SYS can measure the measurement object M more appropriately.
  • the housing device 171 includes processing light EL and measurement light ML in a direction intersecting the optical axis EX of the irradiation optical system 135 (for example, the optical axis of the f ⁇ lens 1351).
  • An irradiation optical system 135-8 capable of emitting at least one of these may be housed.
  • the irradiation optical system 135-8 changes the traveling direction of at least one of the processing light EL and measurement light ML emitted from the f ⁇ lens 1351.
  • a mirror 1352 that can reflect at least one of the MLs may be included.
  • the mirror 1352 may be rotatable around the optical axis EX of the irradiation optical system 135 (for example, the optical axis of the f ⁇ lens 1351).
  • the processing system SYS emits processing light onto the surface of the workpiece W or measurement target M along the optical axis EX of the irradiation optical system 135.
  • EL or measurement light ML can be irradiated.
  • the housing device 171 has a plurality of head housings 138 each housed in a plurality of head housings 138 each having a mounting surface 1383 to which the hood 136 is attached, each having a different shape.
  • An irradiation optical system 135 may be accommodated.
  • the housing device 171 may house an irradiation optical system 135-9 housed in a head housing 138 having a circular mounting surface 1383.
  • the housing device 171 may house an irradiation optical system 135-10 housed in a head housing 138 having a polygonal mounting surface 1383.
  • the housing device 171 of the attachment device 17 may accommodate a plurality of hoods 136.
  • the housing device 171 may house a plurality of hoods 136 of different types.
  • An example of a plurality of hoods 136 of different types will be described below.
  • hood 136 For example, as shown in FIG. A plurality of hoods 136 having different lengths L may be accommodated in the hood 136 .
  • the housing device 171 may house a hood 136-1 whose length L is the first length L1.
  • the housing device 171 may house a hood 136-2 whose length L is a second length L2 that is longer than the first length L1.
  • the housing device 171 may house a hood 136 whose length L is a third length longer than the first length L1.
  • the length L of the hood 136 may refer to the size of the hood 136 along the direction in which the tube forming the hood member 1361 extends.
  • the length L of the hood 136 may mean the size of the hood 136 along the traveling direction of the processing light EL and the measurement light ML.
  • the length L of the hood 136 may mean the size of the hood 136 along the optical axis EX of the irradiation optical system 135.
  • the length L of the hood 136 may mean the size of the hood 136 along the Z-axis direction.
  • control unit 2 may select one hood 136 that satisfies predetermined hood selection criteria from among the plurality of hoods 136 having different lengths L as the hood 136 to be attached to the irradiation optical system 135. Specifically, the control unit 2 selects one hood 136 whose length L is a desired length based on predetermined hood selection criteria from among the plurality of hoods 136 having different lengths L to the irradiation optical system 135. It may be selected as the hood 136 to be attached. Note that the food selection criteria will be detailed later.
  • the plurality of hoods 136 having different aspect ratios may be accommodated in the storage device 171.
  • the aspect ratio of the hood 136 is the ratio of the size of the hood 136 along the traveling direction of the processing light EL and the measurement light ML to the size of the hood 136 along the direction intersecting the traveling direction of the processing light EL and the measurement light ML. It may also mean
  • hood 136 For example, as shown in FIGS. may house a plurality of hoods 136 with different achievable functions.
  • the housing device 171 may house a hood 136-3 that can function as a gas supply member but cannot function as a gas suction member.
  • the hood 136-3 is a hood 136 in which a gas supply port 1831, a gas supply port 1832, and a gas supply pipe 1833 used for supplying gas are formed.
  • the hood 136-3 is a hood 136 in which a gas suction port 1931, a gas suction port 1932, and a gas suction pipe 1933 used for suctioning gas are not formed. Note that the hood 136-3 may or may not function as a protection member.
  • the housing device 171 may house a hood 136-4 that can function as a gas suction member but cannot function as a gas supply member.
  • the hood 136-4 is a hood 136 in which a gas suction port 1931, a gas suction port 1932, and a gas suction pipe 1933 used for suctioning gas are formed.
  • the hood 136-4 is a hood 136 in which a gas supply port 1831, a gas supply port 1832, and a gas supply pipe 1833 used for supplying gas are not formed. Note that the hood 136-4 may or may not function as a protection member.
  • the housing device 171 may house a hood 136-5 that can function as a gas supply member and a gas suction member.
  • the hood 136-5 is a hood 136 in which a gas supply port 1831, a gas supply port 1832, and a gas supply pipe 1833 used for supplying gas are formed.
  • the hood 136-5 is a hood 136 in which a gas suction port 1931, a gas suction port 1932, and a gas suction pipe 1933 used for suctioning gas are formed. Note that the hood 136-5 may or may not function as a protection member.
  • the housing device 171 may house a hood 136-3 that is neither capable of functioning as a gas supply member nor functioning as a gas suction member.
  • the hood 136-6 is a hood 136 in which a gas supply port 1831, a gas supply port 1832, and a gas supply pipe 1833 used for supplying gas are not formed.
  • the hood 136-6 is a hood 136 in which a gas suction port 1931, a gas suction port 1932, and a gas suction pipe 1933 used for suctioning gas are not formed.
  • the hood 136-5 may or may not function as a protection member.
  • control unit 2 may select one hood 136 that satisfies predetermined hood selection criteria as the hood 136 to be attached to the irradiation optical system 135 from among the plurality of hoods 136 with different achievable functions. Specifically, the control unit 2 selects one hood 136 that can realize a function based on a predetermined hood selection criterion from among a plurality of hoods 136 with different achievable functions, and selects one hood 136 to be attached to the irradiation optical system 135. 136 may be selected.
  • hood 136 For example, as shown in FIG. 18(a) to FIG. may house a plurality of hoods 136 for different gas supply targets.
  • the housing device 171 may house a hood 136-7 that can supply gas to the internal space 136SP of the hood 136, which is an example of the gas supply target.
  • the hood 136-7 may be a hood 136 capable of supplying gas toward the internal space 136SP.
  • the hood 136-7 may be a hood 136 in which a gas supply port 1832 is formed at a position of the hood 136 facing the internal space 136SP.
  • the hood 136-7 is a hood 136 in which a gas supply port 1832 is formed on the inner wall surface of the hood 136 facing the internal space 136SP.
  • the gas supplied to the internal space 136SP by the hood 136-7 may flow out of the hood 136-7 via the entrance port 136AP1 of the hood 136-7.
  • the gas flowing out of the hood 136-7 through the entrance port 136AP1 may be supplied to at least one of the accommodation space 138SP of the head housing 138 and the irradiation optical system 135.
  • the hood 136-7 may be considered to be a hood 136 that can supply gas to at least one of the accommodation space 138SP of the head housing 138 and the irradiation optical system 135 in addition to the internal space 136SP.
  • the entrance port 136AP1 may be regarded as a gas supply port capable of supplying gas to at least one of the accommodation space 138SP of the head housing 138 and the irradiation optical system 135.
  • the gas supplied to the internal space 136SP by the hood 136-7 may flow out of the hood 136-7 via the injection port 136AP2 of the hood 136-7.
  • the gas flowing out of the hood 136-7 through the injection port 136AP2 is transmitted to the internal space SP1 of the housing 3, the space SP21 between the irradiation optical system 135 and the workpiece W, and at least one of the processing light EL and the measurement light ML. may be supplied to at least one of the space SP22 and the workpiece W including the optical path.
  • the hood 136-7 may be considered to be a hood 136 that can supply gas to at least one of the internal space SP1, the space SP21, the space SP22, and the workpiece W in addition to the internal space 136SP.
  • the injection port 136AP2 may be considered to be a gas supply port capable of supplying gas to at least one of the internal space SP1, the space SP21, the space SP22, and the workpiece W.
  • the gas supplied to the internal space 136SP by the hood 136-7 may form a spiral flow in the internal space 136SP by using the inner wall surface of the hood 136-7, as shown in FIG. 18(b). good. That is, the gas supplied to the internal space 136SP by the hood 136-7 may form a spiral swirl flow in the internal space 136SP.
  • the gas forming the spiral flow may flow out of the hood 136-7 via the injection port 136AP2 of the hood 136-7.
  • the gas flowing out of the hood 136-7 through the injection port 136AP2 is transmitted to the internal space SP1 of the housing 3, the space SP21 between the irradiation optical system 135 and the workpiece W, and at least one of the processing light EL and the measurement light ML.
  • the hood 136-7 may be supplied to at least one of the space SP22 and the workpiece W including the optical path. That is, the hood 136-7 may supply gas to at least one of the internal space SP1, the space SP21, the space SP22, and the workpiece W in a spiral shape. In this case, the hood 136-7 may be considered to be a hood 136 that can supply gas to at least one of the internal space SP1, the space SP21, the space SP22, and the workpiece W in addition to the internal space 136SP.
  • the storage device 171 includes a hood 136 that can supply gas to at least one of the internal space SP1, space SP21, space SP22, and workpiece W, which are examples of gas supply targets. 8 may be accommodated.
  • the hood 136-8 may be a hood 136 capable of supplying gas to at least one of the internal space SP1, the space SP21, the space SP22, and the workpiece W.
  • the hood 136-8 may be a hood 136 in which a gas supply port 1832 is formed at a position facing at least one of the internal space SP1, the space SP21, the space SP22, and the workpiece W.
  • a gas supply port 1832 is formed at a position facing at least one of the internal space SP1, the space SP21, the space SP22, and the workpiece W.
  • the hood 136-8 is a hood 136 in which a gas supply port 1832 is formed on the lower surface of the hood 136 facing at least one of the internal space SP1, the space SP21, the space SP22, and the workpiece W. It is.
  • the housing device 171 may house a hood 136-9 that can supply gas to the irradiation optical system 135, which is an example of a gas supply target.
  • the hood 136-9 may be a hood 136 capable of supplying gas toward the irradiation optical system 135.
  • the hood 136-9 may be a hood 136 capable of supplying gas toward the accommodation space 138SP of the head housing 138 in which the irradiation optical system 135 is accommodated.
  • the hood 136-9 may be a hood 136 in which a gas supply port 1832 is formed at a position of the hood 136 facing the irradiation optical system 135.
  • the hood 136-9 is a hood 136 in which a gas supply port 1832 facing the accommodation space 138SP of the head housing 138 in which the irradiation optical system 135 is accommodated is formed. .
  • the housing device 171 houses a hood 136-10 in which a plurality of gas supply ports 1832 are formed, each of which can supply gas to a plurality of different gas supply targets.
  • the hood 136-10 has a gas supply port 1832 that can supply gas to the internal space 136SP, and a gas supply port 1832 that can supply gas to at least one of the internal space SP1, SP21, SP22, and workpiece W.
  • the hood 136 is formed with a gas supply port 1832 that can supply gas.
  • control unit 2 may select one hood 136 that satisfies predetermined hood selection criteria as the hood 136 to be attached to the irradiation optical system 135 from among the plurality of hoods 136 to which gas is supplied to different objects. Specifically, the control unit 2 selects one hood 136 capable of supplying gas to a desired gas supply target from among a plurality of hoods 136 for different gas supply targets as the hood 136 to be attached to the irradiation optical system 135. You may.
  • the plurality of hoods 136 to which gas is supplied to different targets are equivalent to the plurality of hoods 136 to which gas is supplied from the gas supply port 1832 in different directions. It may be considered. In other words, it may be assumed that the storage device 171 accommodates a plurality of hoods 136 that supply gas from the gas supply ports 1832 in different directions. In this case, the control unit 2 selects one hood 136 that satisfies the predetermined hood selection criteria from among the plurality of hoods 136 that supply gas from the gas supply port 1832 in different directions.
  • control unit 2 selects one hood 136 capable of supplying gas in a desired direction from among the plurality of hoods 136 that supply gas from the gas supply port 1832 in different directions, to the irradiation optical system 135. It may be selected as the hood 136 to be attached to the hood 136.
  • multiple hoods 136 to which gas is supplied to different objects may be considered to be equivalent to multiple hoods 136 having different positions of gas supply ports 1832.
  • the housing device 171 accommodates a plurality of hoods 136 with gas supply ports 1832 at different positions.
  • the control unit 2 selects one hood 136 that satisfies the predetermined hood selection criteria as the hood 136 to be attached to the irradiation optical system 135 from among the plurality of hoods 136 having different positions of the gas supply ports 1832. You may.
  • control unit 2 selects one hood 136 capable of supplying gas to a desired gas supply target from among a plurality of hoods 136 having different positions of gas supply ports 1832 to the irradiation optical system 135. It may be selected as the hood 136 to be attached.
  • the housing device 171 may house a hood 136 that can supply gas to at least two different gas supply targets. That is, one hood 136 may be able to supply gas to at least two different gas supply targets.
  • the storage device 171 stores a hood 136 that is substantially obtained by combining at least two of the plurality of hoods 136 shown in FIGS. 18(a) to 18(e). Good too.
  • the housing device 171 may house the hoods 136 that can function as each of at least two hoods 136 of the plurality of hoods 136 shown in FIGS. 18(a) to 18(e). .
  • hood 136 may house a plurality of hoods 136 for different gas suction targets.
  • the housing device 171 may house a hood 136-11 that can suck gas from the internal space 136SP of the hood 136, which is an example of a gas suction target.
  • the hood 136-11 may be a hood 136 in which a gas suction port 1932 is formed at a position of the hood 136 facing the internal space 136SP.
  • the hood 136-11 is a hood 136 in which a gas suction port 1932 is formed on the inner wall surface of the hood 136 facing the internal space 136SP.
  • the storage device 171 includes a hood 136 that can suck gas from at least one of the internal space SP1, space SP21, space SP22, and workpiece W, which are examples of gas suction targets. 12 may be accommodated.
  • the hood 136-12 may be a hood 136 in which a gas suction port 1932 is formed at a position facing at least one of the internal space SP1, the space SP21, the space SP22, and the workpiece W.
  • a gas suction port 1932 is formed at a position facing at least one of the internal space SP1, the space SP21, the space SP22, and the workpiece W.
  • the hood 136-12 is a hood 136 in which a gas suction port 1932 is formed on the lower surface of the hood 136 facing at least one of the internal space SP1, the space SP21, the space SP22, and the workpiece W. It is.
  • the housing device 171 may house a hood 136-13 that can suck gas from the irradiation optical system 135, which is an example of a gas suction target.
  • the hood 136-13 may be a hood 136 capable of sucking gas from the accommodation space 138SP of the head housing 138 in which the irradiation optical system 135 is accommodated.
  • the hood 136-13 may be a hood 136 in which a gas suction port 1932 is formed at a position of the hood 136 facing the irradiation optical system 135.
  • the hood 136-13 is a hood 136 in which a gas suction port 1932 facing the accommodation space 138SP of the head housing 138 in which the irradiation optical system 135 is accommodated is formed. .
  • the housing device 171 houses a hood 136-14 in which a plurality of gas suction ports 1932 are formed, each of which can suck gas from a plurality of different gas suction targets.
  • the hood 136-14 has a gas suction port 1932 that can suck gas from the internal space 136SP, and a gas suction port 1932 that can suck gas from at least one of the internal space SP1, SP21, SP22, and workpiece W.
  • the hood 136 is formed with a gas suction port 1932 that can be sucked.
  • control unit 2 may select one hood 136 that satisfies predetermined hood selection criteria as the hood 136 to be attached to the irradiation optical system 135 from among the plurality of hoods 136 for different gas suction targets. Specifically, the control unit 2 selects one hood 136 capable of suctioning gas from a desired gas suction target from among the plurality of hoods 136 for different gas suction targets as the hood 136 to be attached to the irradiation optical system 135. You may choose.
  • the plurality of hoods 136 with different gas suction targets are equivalent to the plurality of hoods 136 with different gas suction directions from the gas suction port 1932. It may be considered. In other words, it may be assumed that the housing device 171 accommodates a plurality of hoods 136 that suck gas from the gas suction ports 1932 in different directions. In this case, the control unit 2 selects one hood 136 that satisfies the predetermined hood selection criteria from among the plurality of hoods 136 that have different gas suction directions from the gas suction port 1932.
  • control unit 2 attaches to the irradiation optical system 135 one hood 136 capable of sucking gas from a desired direction from among the plurality of hoods 136 that suck gas from the gas suction port 1932 in different directions.
  • the hood 136 may be selected as the desired hood 136.
  • multiple hoods 136 with different gas suction targets may be considered to be equivalent to multiple hoods 136 with different positions of gas suction ports 1932.
  • the housing device 171 accommodates a plurality of hoods 136 having gas suction ports 1932 at different positions.
  • the control unit 2 selects one hood 136 that satisfies the predetermined hood selection criteria as the hood 136 to be attached to the irradiation optical system 135 from among the plurality of hoods 136 having gas suction ports 1932 at different positions. Good too.
  • control unit 2 should attach one hood 136 capable of sucking gas from a desired gas suction target to the irradiation optical system 135 from among the plurality of hoods 136 having gas suction ports 1932 at different positions. It may also be selected as the hood 136.
  • the housing device 171 may house a hood 136 that can suck gas from at least two different gas suction targets. That is, one hood 136 may be capable of sucking gas from at least two different gas suction targets.
  • the storage device 171 stores a hood 136 that is substantially obtained by combining at least two of the plurality of hoods 136 shown in FIGS. 19(a) to 19(d). Good too.
  • the housing device 171 may house hoods 136 that can function as each of at least two hoods 136 among the plurality of hoods 136 shown in FIGS. 19(a) to 19(d). .
  • hood 136 may house a plurality of hoods 136 whose exit ports 136AP2 from which the processing light EL and the measurement light ML are emitted have different cross-sectional shapes.
  • the housing device 171 may house a hood 136-15 whose injection port 136AP2 has a circular cross-sectional shape.
  • the housing device 171 may house a hood 136-16 whose injection port 136AP2 has a polygonal cross-sectional shape.
  • the cross-sectional shape of the injection port 136AP2 may refer to the shape of a cross-section that intersects with the direction in which the cylinder constituting the hood member 1361 extends.
  • the cross-sectional shape of the exit port 136AP2 may mean the shape of a cross-section intersecting the traveling direction of the processing light EL and the measurement light ML.
  • the cross-sectional shape of the exit port 136AP2 may mean the shape of a cross-section intersecting the optical axis EX of the irradiation optical system 135.
  • the cross-sectional shape of the injection port 136AP2 may mean the shape of a cross-section intersecting the Z-axis direction.
  • the cross-sectional shape of the injection port 136AP2 which is the opening on the injection side of the hood member 1361, is rectangular, while the external shape on the injection side of the hood member 1361 is circular.
  • the outer shape of the injection side of the hood member 1361 may be similar to the shape of the injection port 136AP2. That is, the outer shape of the injection side of the hood member 1361 may be rectangular.
  • the control unit 2 selects one hood 136 that satisfies the predetermined hood selection criteria as the hood 136 to be attached to the irradiation optical system 135 from among the plurality of hoods 136 whose exit ports 136AP2 have different cross-sectional shapes. Good too. Specifically, the control unit 2 selects one hood 136 having an injection port 136AP2 having a desired shape based on predetermined hood selection criteria from among the plurality of hoods 136 having injection ports 136AP2 having different cross-sectional shapes. , may be selected as the hood 136 to be attached to the irradiation optical system 135.
  • hood 136 may accommodate a plurality of hoods 136 having different diameters R2.
  • the diameter R2 may mean the diameter of the hood member 136 on the head housing 138 side.
  • the housing device 171 may house a hood 136-17 whose diameter R2 is the third diameter.
  • the housing device 171 may house a hood 136-18 whose diameter R2 is a fourth diameter different from the third diameter.
  • the diameter R2 may mean the diameter or width of the entrance port 136AP1 of the hood 136.
  • the diameter R2 may mean the diameter or width of the hood 136.
  • control unit 2 may select one hood 136 that satisfies a predetermined hood selection criterion as the hood 136 to be attached to the irradiation optical system 135 from among the plurality of hoods 136 having different diameters R2. Specifically, the control unit 2 should attach to the irradiation optical system 135 one hood 136 whose aperture R2 is a desired aperture based on predetermined hood selection criteria from among the plurality of hoods 136 having different apertures R2. It may also be selected as the hood 136.
  • the housing device 171 may house a plurality of hoods 136 in which the caliber of the hood member 136 on the workpiece W side (that is, the caliber of the injection port 136AP2) is different from each other.
  • hood 136 may house a plurality of hoods 136 in which the mounting surface 1360 of the hood 136 has a different shape.
  • the housing device 171 may house a hood 136-19 having a circular mounting surface 1360.
  • the housing device 171 may house a hood 136-20 having a polygonal mounting surface 1360.
  • a rectangle is illustrated as an example of a polygon, but the polygon is not limited to a rectangle and may be, for example, a hexagon or an octagon.
  • control unit 2 may select one hood 136 that satisfies the predetermined hood selection criteria as the hood 136 to be attached to the irradiation optical system 135 from among the plurality of hoods 136 whose mounting surfaces 1360 have different shapes. good. Specifically, the control unit 2 selects one hood 136 having a desired shape of the mounting surface 1360 based on predetermined hood selection criteria from among the plurality of hoods 136 with mounting surfaces 1360 having different shapes, and selects one hood 136 with the irradiation optical system. It may be selected as the hood 136 to be attached to the hood 135.
  • the hood selection criteria may include a first hood selection criteria based on the type of illumination optics 135 to which the hood 136 is attached.
  • the hood selection criteria may include a first hood selection criteria based on the type of irradiation optical system 135 attached to the exit optical system 130.
  • the operation of selecting one hood 136 to be attached to the irradiation optical system 135 based on the first hood selection criterion is to select one hood 136 to be attached to the irradiation optical system 135 based on the type of the irradiation optical system 135. It may be considered to be equivalent to the action of selecting.
  • the control unit 2 selects the first type of hood 136 as one hood 136 to be attached to the irradiation optical system 135. may be selected.
  • the control unit 2 As the two hoods 136, a second type of hood 136 different from the first type of hood 136 may be selected.
  • the control unit 2 uses the first type of irradiation optical system 135 as one hood 136 to be attached to the irradiation optical system 135.
  • a hood 136 may also be selected.
  • the first hood selection criterion may include a criterion based on the numerical aperture NA of the irradiation optical system 135.
  • the operation of selecting one hood 136 to be attached to the irradiation optical system 135 based on the first hood selection criterion is to select one hood 136 to be attached to the irradiation optical system 135 based on the numerical aperture NA of the irradiation optical system 135.
  • 136 may be considered to be equivalent to the operation of selecting 136.
  • FIG. 23(a) shows a hood 136 attached to the irradiation optical system 135 whose numerical aperture NA is the first numerical aperture NA11.
  • the length L of the hood 136 attached to the irradiation optical system 135 is such that the condensing position of the processing light EL and the measurement light ML can be set on the surface of the work W or the measurement target M. It is assumed that the length is the same. Under this situation, the irradiation optical system 135 changes from the irradiation optical system 135 whose numerical aperture NA is the first numerical aperture NA11 to the second numerical aperture NA12 whose numerical aperture NA is larger than the first numerical aperture NA11.
  • the condensing positions of the processing light EL and the measurement light ML approach the irradiation optical system 135.
  • the processing unit 1 may irradiate the workpiece W or the measurement target M with the processing light EL and the measurement light ML that are in a defocused state. Therefore, if the hood 136 is not replaced, the processing unit 1 may not be able to properly process the workpiece W. Similarly, the processing unit 1 may not be able to properly measure the measurement object M.
  • the control unit 2 uses the criterion that the length L of the hood 136 attached to the irradiation optical system 135 changes depending on the numerical aperture NA of the irradiation optical system 135 as the first hood selection criterion. may be selected. For example, when the numerical aperture NA of the irradiation optical system 135 attached to the injection optical system 130 is the first numerical aperture NA11, the control unit 2 controls the hood 136 whose length L is the first length L11. You may choose.
  • the control unit 2 You may select the hood 136 having a second length L12 different from the length L11.
  • the control unit 2 uses a criterion as the first hood selection criterion that the larger the numerical aperture NA of the irradiation optical system 135, the shorter the length L of the hood 136 attached to the irradiation optical system 135. Then, the hood 136 may be selected. For example, as shown in FIG. 24(a), when the numerical aperture NA of the irradiation optical system 135 attached to the injection optical system 130 is the first numerical aperture NA11, the control unit 2 controls the length L to be the first numerical aperture NA11. A hood 136 having a length L11 of 1 may be selected. For example, as shown in FIG.
  • the control The unit 2 may select the hood 136 in which the length L is a second length L12 that is shorter than the first length L11. For example, as shown in FIG. 24(c), if the numerical aperture NA of the irradiation optical system 135 attached to the exit optical system 130 is the third numerical aperture NA13, which is smaller than the first numerical aperture NA11, the control The unit 2 may select the hood 136 in which the length L is a third length L13 that is longer than the first length L11.
  • the processing unit 1 can appropriately process the workpiece W and can appropriately measure the measurement object M.
  • the processing unit 1 processes the workpiece W appropriately.
  • the object M to be measured can be measured appropriately.
  • the plurality of irradiation optical systems 135 having mutually different numerical apertures NA may be considered to be equivalent to the plurality of irradiating optical systems 135 having mutually different working distances.
  • the criterion based on the numerical aperture NA of the irradiation optical system 135 may be considered to be equivalent to the criterion based on the working distance of the irradiation optical system 135.
  • the operation of selecting one hood 136 to be attached to the irradiation optical system 135 based on the numerical aperture NA of the irradiation optical system 135 is the operation of selecting one hood 136 to be attached to the irradiation optical system 135 based on the working distance of the irradiation optical system 135.
  • 136 may be considered to be equivalent to the operation of selecting 136.
  • the control unit 2 uses the criterion that the length L of the hood 136 attached to the irradiation optical system 135 changes depending on the working distance of the irradiation optical system 135 as the first hood selection criterion. may be selected. For example, if the working distance of the irradiation optical system 135 attached to the injection optical system 130 is the first working distance, the control unit 2 may select the hood 136 whose length L is the first length. good. For example, when the working distance of the irradiation optical system 135 attached to the injection optical system 130 is a second working distance different from the first working distance, the control unit 2 determines that the length L is the same as the first length. The hood 136 may be selected to have a different second length.
  • the control unit 2 uses, as the first hood selection criterion, the criterion that the shorter the working distance of the irradiation optical system 135, the shorter the length L of the hood 136 attached to the irradiation optical system 135.
  • hood 136 may be selected. For example, as shown in FIG. 24(a), when the working distance of the irradiation optical system 135 attached to the injection optical system 130 is the first working distance, the control unit 2 determines that the length L is the first working distance.
  • a hood 136 having length L11 may be selected. For example, as shown in FIG.
  • the control unit 2 when the working distance of the irradiation optical system 135 attached to the injection optical system 130 is a second working distance shorter than the first working distance, the control unit 2 , a hood 136 whose length L is a second length L12 shorter than the first length L11 may be selected.
  • a hood 136 when the working distance of the irradiation optical system 135 attached to the injection optical system 130 is a third working distance longer than the first working distance, the control unit 2 , a hood 136 may be selected in which the length L is a third length L13 that is longer than the first length L11.
  • the processing unit 1 can appropriately process the workpiece W and can appropriately measure the measurement object M.
  • the processing unit 1 can process the workpiece W appropriately. , and the object M to be measured can be measured appropriately.
  • the plurality of irradiation optical systems 135 having mutually different working distances may be considered to be equivalent to the plurality of irradiating optical systems 135 having mutually different focal lengths.
  • the criterion based on the working distance of the irradiation optical system 135 may be considered equivalent to the criterion based on the focal length of the irradiation optical system 135.
  • the operation of selecting one hood 136 to be attached to the irradiation optical system 135 based on the working distance of the irradiation optical system 135 is to select the one hood 136 to be attached to the irradiation optical system 135 based on the focal length of the irradiation optical system 135. may be considered to be equivalent to the operation of selecting .
  • the control unit 2 uses the criterion that the length L of the hood 136 attached to the irradiation optical system 135 changes depending on the focal length of the irradiation optical system 135 as the first hood selection criterion. may be selected. For example, if the focal length of the irradiation optical system 135 attached to the exit optical system 130 is the first focal length, the control unit 2 may select the hood 136 whose length L is the first length. good. For example, when the focal length of the irradiation optical system 135 attached to the injection optical system 130 is a second focal length different from the first focal length, the control unit 2 determines that the length L is the same as the first length. The hood 136 may be selected to have a different second length.
  • the control unit 2 uses, as the first hood selection criterion, the criterion that the shorter the focal length of the irradiation optical system 135, the shorter the length L of the hood 136 attached to the irradiation optical system 135.
  • hood 136 may be selected.
  • the control unit 2 controls the length L to be the first focal length.
  • a hood 136 having length L11 may be selected. For example, as shown in FIG.
  • the control unit 2 when the focal length of the irradiation optical system 135 attached to the injection optical system 130 is a second focal length shorter than the first focal length, the control unit 2 , a hood 136 whose length L is a second length L12 shorter than the first length L11 may be selected.
  • a hood 136 when the focal length of the irradiation optical system 135 attached to the injection optical system 130 is a third focal length longer than the first focal length, the control unit 2 , a hood 136 may be selected in which the length L is a third length L13 that is longer than the first length L11.
  • the processing unit 1 can appropriately process the workpiece W and can appropriately measure the measurement object M.
  • the processing unit 1 can process the workpiece W appropriately. , and the object M to be measured can be measured appropriately.
  • the plurality of irradiation optical systems 135 having mutually different working distances may be considered to be equivalent to the plurality of irradiating optical systems 135 having mutually different focal positions.
  • the reference based on the working distance of the irradiation optical system 135 may be considered to be equivalent to the reference based on the focal position of the irradiation optical system 135.
  • the operation of selecting one hood 136 to be attached to the irradiation optical system 135 based on the working distance of the irradiation optical system 135 is to select the one hood 136 to be attached to the irradiation optical system 135 based on the focal position of the irradiation optical system 135. may be considered to be equivalent to the operation of selecting .
  • the control unit 2 uses the criterion that the length L of the hood 136 attached to the irradiation optical system 135 changes depending on the focal position of the irradiation optical system 135 as the first hood selection criterion. may be selected.
  • the control unit 2 determines the length L of the hood 136 attached to the irradiation optical system 135 according to the distance between the irradiation optical system 135 and the focal position of the irradiation optical system 135 as a first hood selection criterion.
  • the hood 136 may be selected using the variable criteria.
  • the distance between the irradiation optical system 135 and the focal position of the irradiation optical system 135 may be considered to be substantially equivalent to the focal length described above. Therefore, a detailed explanation of the criterion that the length L of the hood 136 attached to the irradiation optical system 135 changes depending on the focal position of the irradiation optical system 135 will be omitted.
  • the processing unit 1 can appropriately process the workpiece W and can appropriately measure the measurement object M.
  • the processing unit 1 can process the workpiece W appropriately. , and the object M to be measured can be measured appropriately.
  • the first hood selection criteria may include a criterion based on the aperture R1 of the irradiation optical system 135 in addition to or in place of the criterion based on the numerical aperture NA of the irradiation optical system 135.
  • the operation of selecting one hood 136 to be attached to the irradiation optical system 135 based on the first hood selection criterion is to select one hood 136 to be attached to the irradiation optical system 135 based on the aperture R1 of the irradiation optical system 135. may be considered to be equivalent to the operation of selecting .
  • FIG. 25(a) shows a hood 136 attached to the irradiation optical system 135 whose aperture R1 is the first aperture R11.
  • FIG. 25A it is assumed that the aperture R2 of the hood 136 attached to the irradiation optical system 135 matches the aperture R1 of the irradiation optical system 135.
  • the irradiation optical system 135 changes from the irradiation optical system 135 whose aperture R1 is the first aperture R11 to the irradiation optical system 135 whose aperture R1 is the second aperture R12, which is larger than the first aperture R11.
  • An example of exchange will be explained.
  • the processing unit 1 may not be able to properly process the workpiece W. Similarly, the processing unit 1 may not be able to properly measure the measurement object M.
  • the control unit 2 selects the hood 136 using the first hood selection criterion that the diameter R2 of the hood 136 attached to the irradiation optical system 135 changes depending on the diameter R1 of the irradiation optical system 135. You may. For example, when the aperture R1 of the irradiation optical system 135 attached to the injection optical system 130 is the first aperture R11, the control unit 2 may select the hood 136 whose aperture R2 is the first aperture R21. good. For example, when the aperture R1 of the irradiation optical system 135 attached to the injection optical system 130 is a second aperture R12 different from the first aperture R11, the control unit 2 determines that the aperture R2 is the first aperture R21. You may select a hood 136 having a different second diameter R22.
  • the control unit 2 uses as a first hood selection criterion that the larger the diameter R1 of the irradiation optical system 135, the larger the diameter R2 of the hood 136 attached to the irradiation optical system 135.
  • a hood 136 may also be selected. For example, as shown in FIG. 26(a), when the aperture R1 of the irradiation optical system 135 attached to the injection optical system 130 is the first aperture R11, the control unit 2 controls the aperture R2 to be the first aperture. You may select the hood 136 that is R21.
  • the first diameter R21 may be the same as the first diameter R11. For example, as shown in FIG.
  • a hood 136 may be selected in which the diameter R2 is a second diameter R22 that is larger than the first diameter R21.
  • the second diameter R22 may be the same as the second diameter R12.
  • a hood 136 whose diameter R2 is a third diameter R23 smaller than the first diameter R21 may be selected.
  • the third diameter R23 may be the same as the third diameter R13.
  • the processing unit 1 can appropriately process the workpiece W and can appropriately measure the measurement object M.
  • the processing unit 1 can process the workpiece W appropriately. , and the object M to be measured can be measured appropriately.
  • the first hood selection criterion is based on the shape of the mounting surface 1383 of the head housing 138 that accommodates the irradiation optical system 135. It may also include criteria based on. In this case, the operation of selecting one hood 136 to be attached to the irradiation optical system 135 based on the first hood selection criterion is performed based on the shape of the mounting surface 1383 of the head housing 138 that accommodates the irradiation optical system 135. This may be considered to be equivalent to the operation of selecting one hood 136 to be attached to the optical system 135.
  • the control unit 2 selects, as a first hood selection criterion, a hood 136 having a mounting surface 1360 having the same shape as the mounting surface 1383 of the head housing 138 that houses the irradiation optical system 135.
  • the hood 136 may be selected using this criterion. For example, when the shape of the mounting surface 1383 of the head housing 138 that accommodates the irradiation optical system 135 attached to the injection optical system 130 is circular (see FIG. 15(i)), the control unit 2 A hood 136 (FIG. 22(a)) having a circular shape may be selected.
  • the control unit 2 A hood 136 (FIG. 22(b)) having a polygonal shape 1360 may be selected.
  • the processing unit 1 can appropriately process the workpiece W and can appropriately measure the measurement object M.
  • the processing unit 1 Even if the shape of the mounting surface 1383 of the head housing 138 that accommodates the irradiation optical system 135 attached to the injection optical system 130 changes due to the replacement of the irradiation optical system 135, the processing unit 1 The hood 136 can be properly attached to the head housing 138.
  • the processing unit 1 is capable of appropriately processing the workpiece W and appropriately measuring the measurement target M.
  • the control unit 2 may select the hood 136 in accordance with the replacement of the irradiation optical system 135. . That is, the control unit 2 may select the hood 136 at the timing when the irradiation optical system 135 is replaced. In other words, the control unit 2 may select the hood 136 to be attached to the irradiation optical system 135 at the timing of selecting the irradiation optical system 135 to be attached to the emission optical system 130.
  • the mounting device 17 may replace the hood 136 at the same time as the irradiation optical system 135.
  • the attachment device 17 may attach the hood 136 to the irradiation optical system 135 attached to the emission optical system 130 after attaching the irradiation optical system 135 to the emission optical system 130. That is, in the mounting device 17, the hood 136 may be replaced after the irradiation optical system 135 is replaced.
  • the attachment device 17 may attach the irradiation optical system 135 to which the hood 136 is attached to the exit optical system 130. That is, the mounting device 17 may replace the irradiation optical system 135 after replacing the hood 136.
  • control unit 2 may prohibit the processing unit 1 from starting processing the workpiece W until the hood 136 is attached to the irradiation optical system 135.
  • the control unit 2 may prohibit the processing unit 1 from starting measurement of the measurement target M until the hood 136 is attached to the irradiation optical system 135.
  • the control unit 2 may allow the processing unit 1 to start processing the workpiece W after the attachment of the hood 136 to the irradiation optical system 135 is completed.
  • the processing unit 1 may start processing the workpiece W after the attachment of the hood 136 to the irradiation optical system 135 is completed.
  • the control unit 2 may allow the processing unit 1 to start measuring the measurement target M after the attachment of the hood 136 to the irradiation optical system 135 is completed.
  • the processing unit 1 may start measuring the measurement target M after the attachment of the hood 136 to the irradiation optical system 135 is completed. The same applies when a food selection criterion different from the first food selection criterion is used.
  • the control unit 2 determines the type of the irradiation optical system 135 and the type of hood 136 to be attached to the irradiation optical system 135.
  • the food 136 may be selected based on the table information 201 showing the correspondence with the type.
  • An example of the table information 201 is shown in FIG. 27.
  • the control unit 2 may select the hood 136 based on the optical system information (lens information) indicating the type of the irradiation optical system 135 attached to the exit optical system 130 and the table information 201.
  • the table information may be a file.
  • the table information may be stored in the control unit 2.
  • the table information may be stored in the storage device of the control unit 2.
  • the table information may be stored in any storage medium (for example, a hard disk or a semiconductor memory) that is built into the control unit 2 or that can be externally attached to the control unit 2.
  • the table information may be stored in a server outside the processing system SYS. In this case, the control unit 2 may acquire table information from the server.
  • the processing unit 1 appropriately processes the workpiece W using the hood 136 selected according to the type of the irradiation optical system 135 to which the hood 136 is attached.
  • the object to be measured M can be processed and measured appropriately.
  • the focusing position of the processing light EL is located on the surface of the workpiece W.
  • the focusing position of the processing light EL may be located at a position separated from the surface of the workpiece W by a predetermined amount.
  • the first food selection criterion may be used. That is, the processing system SYS may perform the above-described operation using the first food selection criterion.
  • the state in which "the condensing position of the processing light EL is located a predetermined amount away from the surface of the workpiece W" means a state in which the defocus amount of the processing light EL is smaller than the mechanical working distance. Good too.
  • the mechanical working distance may mean the distance between the hood 136 (for example, the tip of the hood 136) and the workpiece W.
  • the food selection criteria may include a second food selection criteria based on the type of processing performed by the processing unit 1. That is, the food selection criteria may include a second food selection criteria based on the type of processing performed by the processing system SYS.
  • the operation of selecting one hood 136 to be attached to the irradiation optical system 135 based on the second hood selection criterion is to select one hood 136 to be attached to the irradiation optical system 135 based on the type of processing performed by the processing unit 1.
  • 136 may be considered to be equivalent to the operation of selecting 136.
  • control unit 2 may control the processing unit 1 based on processing information including information regarding the type of processing performed by the processing unit 1.
  • the control unit 2 may select the hood 136 based on processing information used to control the processing unit 1. That is, the control unit 2 may specify the type of processing performed by the processing unit 1 based on the processing information, and select the hood 136 based on the specified type of processing.
  • the control unit 2 may select the first type of hood 136. For example, when the processing unit 1 performs a second type of processing that is different from the first type of processing, the control unit 2 uses a second type of hood 136 that is different from the first type of hood 136. You may choose. However, even if the processing unit 1 performs a second type of processing that is different from the first type of processing, the control unit 2 may select the first type of hood 136.
  • the processing unit 1 may perform at least one of removal processing, addition processing, melt processing, remelting processing, marking processing, surface modification processing, peening processing, peeling processing, welding processing, and cutting processing. That's right.
  • the first type of processing includes at least one of removal processing, addition processing, melt processing, remelting processing, marking processing, surface modification processing, peening processing, peeling processing, welding processing, and cutting processing.
  • the second type of processing may include at least one of removal processing, addition processing, melt processing, remelting processing, marking processing, surface modification processing, peening processing, peeling processing, welding processing, and cutting processing. good.
  • the processing unit 1 can perform melt processing using the principle of thermal processing, as described above.
  • the processing unit 1 forms a local purge space purged with a purge gas at and near the irradiation position of the processing light EL in order to prevent oxidation of the surface of the workpiece W caused by thermal processing.
  • the control unit 2 may select the hood 136 that can form a purge space.
  • the purge space can be formed by gas (eg, purge gas) supplied from at least one of the gas supply port 1832 and the injection port 136AP2 of the hood 136.
  • the control unit 2 may select the hood 136 that can realize a state in which at least one of the gas supply port 1832 and the injection port 136AP2 is located near the workpiece W.
  • the control unit 2 in order to realize a state in which at least one of the gas supply port 1832 and the injection port 136AP2 is located near the workpiece W, the control unit 2 is configured such that the length L is relatively You may select the hood 136 having the first length L21 which is longer than the first length L21.
  • the processing unit 1 can supply gas (for example, purge gas) to the vicinity of the workpiece W via at least one of the gas supply port 1832 and the injection port 136AP2.
  • the processing unit 1 can form a local purge space purged with the purge gas at the irradiation position of the processing light EL and in the vicinity thereof.
  • the processing unit 1 can perform removal processing using the principle of non-thermal processing, as described above. In this case, compared to the case where melt processing, which is thermal processing, is performed, it is less necessary to form a local purge space at the irradiation position of the processing light EL and in the vicinity thereof.
  • the control unit 2 may select the hood 136 whose length L is a second length L22 that is shorter than the first length L21. As a result, the possibility that the distance between the hood 136 and the workpiece W becomes shorter than necessary is reduced. Therefore, the processing unit 1 can process the workpiece W while reducing the possibility that the hood 136 and the workpiece W will collide.
  • the control unit 2 A hood 136 having a length L21 may be selected.
  • machining unit 1 includes, as removal machining, simple removal machining, standard removal machining with higher machining accuracy than simple removal machining, and machining accuracy higher than standard removal machining.
  • High-precision removal processing may also be performed.
  • the control unit 2 is equipped with a hood that can function as a gas supply member and a gas suction member. 136 may be selected.
  • the control unit 2 can function as a gas supply member in order to simplify the configuration of the hood 136 while avoiding deterioration of processing accuracy due to unnecessary substances to some extent.
  • a hood 136 that does not need to be able to function as a gas suction member may be selected.
  • the control unit 2 functions as a gas supply member in order to give priority to simplifying the configuration of the hood 136 rather than avoiding deterioration of processing accuracy due to unnecessary substances. It is possible to select a hood 136 that can function as a protection member, although it does not have to be possible and does not have to be able to function as a gas suction member.
  • the length L of the hood 136 which does not need to be able to function as a gas supply member or a gas suction member, is the same as the length L of the hood 136, which can function as at least one of a gas supply member and a gas suction member. It may be shorter than the length L. This is because the hood 136, which does not need to be able to function as a gas supply member or a gas suction member, does not need to supply gas to the work W to be prevented from adhering to unnecessary substances. It is from.
  • the processing unit 1 processes the workpiece W by irradiating the processing light EL in a defocused state onto the workpiece W, as shown in FIG. It may be located inside.
  • the processing unit 1 may perform remelt processing by irradiating the workpiece W with the processing light EL in a defocused state. Therefore, when the processing unit 1 performs remelt processing, the focusing position of the processing light EL may be located inside the hood 136, as shown in FIG. 23(b).
  • the control unit 2 may change the type of gas that the gas supply source 18 supplies to the hood 136 in accordance with the change in the type of processing. For example, when the processing unit 1 performs melt processing, the control unit 2 controls the gas supply so as to supply inert gas to the hood 136 in order to prevent oxidation of the surface of the workpiece W caused by thermal processing. source 18 may be controlled. As a result, the gas supply source 18 can prevent the surface of the workpiece W from being oxidized by supplying inert gas to the irradiation position of the processing light EL and its vicinity through the hood 136.
  • the control unit 2 uses a gas other than an inert gas (for example, CDA) because there is little need to prevent oxidation of the surface of the workpiece W.
  • the gas source 18 may be controlled to supply the hood 136 with the following:
  • the control unit 2 determines the type of processing performed by the processing unit 1 and the type of processing attached to the irradiation optical system 135.
  • the food 136 may be selected based on the table information 202 indicating the correspondence with the type of food 136 to be selected.
  • An example of the table information 202 is shown in FIG. In this case, the control unit 2 may select the hood 136 based on the processing information indicating the type of processing performed by the processing unit 1 and the table information 202.
  • the processing unit 1 can appropriately process the workpiece W using the hood 136 selected according to the type of processing performed by the processing unit 1. I can do it.
  • the second hood standard includes a standard based on the type of operation performed by the processing unit 1, in addition to or in place of the standard based on the type of processing performed by the processing unit 1 (that is, the type of processing operation). Good too.
  • the control unit 2 may select the first type of hood 136.
  • the control unit 2 may select a second type of hood 136 different from the first type of hood 136. good.
  • the control unit 2 may select the first type of hood 136.
  • the processing unit 1 performs a processing operation for processing the workpiece W and a measurement operation for measuring the workpiece W, as described above.
  • the control unit 2 may select the first type of hood 136.
  • the control unit 2 may select a second type of hood 136 that is different from the first type of hood 136.
  • the control unit 2 may select the first type of hood 136.
  • the hood selection criteria may include a third hood selection criteria based on the desired functionality of the hood 136.
  • the operation of selecting one hood 136 to be attached to the irradiation optical system 135 based on the third hood selection criterion is the operation of selecting one hood 136 to be attached to the irradiation optical system 135 based on the function required of the hood 136.
  • 136 may be considered to be equivalent to the operation of selecting 136.
  • the control unit 2 may select the hood 136 that can function as a gas supply member. For example, if the hood 136 is required to function as a gas suction member, the control unit 2 may select the hood 136 that can function as a gas suction member. For example, if the hood 136 is required to function as a protection member, the control unit 2 may select the hood 136 that can function as a protection member.
  • machining unit 1 performs simple removal machining, standard removal machining with higher machining accuracy than simple removal machining, and high-precision machining with higher machining accuracy than standard removal machining.
  • a removal process may be performed.
  • the hood 136 may be required to function as both a gas supply member and a gas suction member in order to avoid deterioration of processing accuracy due to unnecessary substances as much as possible.
  • the control unit 2 may select the hood 136 that can function as a gas supply member and as a gas suction member.
  • the hood 136 is provided with a gas supply member that functions as a gas supply member. As mentioned above, although this is required, it is not required to function as a gas suction member. In this case, the control unit 2 may select the hood 136 that can function as a gas supply member but does not need to function as a gas suction member.
  • the hood 136 is equipped with a gas supply member and a gas suction member in order to prioritize the simplification of the hood 136 over avoiding deterioration of processing accuracy due to unnecessary substances. As mentioned above, it is not necessary to function as a In this case, the control unit 2 does not need to be able to function as a gas supply member and a gas suction member, but may select a hood 136 that can function as a protection member.
  • the processing unit 1 appropriately processes the workpiece W using the hood 136 that has the required functions, and also processes the measurement target object. M can be measured appropriately.
  • the food selection criteria may include a fourth food selection criteria based on the type of gas supply target to which the processing system SYS should supply gas.
  • the operation of selecting one hood 136 to be attached to the irradiation optical system 135 based on the fourth hood selection criterion is performed based on the type of gas supply target to which the processing system SYS should supply gas to the irradiation optical system 135. This may be considered to be equivalent to the operation of selecting one hood 136 to be attached to.
  • the control unit 2 may select a hood 136 that can supply gas to a desired gas supply target. For example, if the processing system SYS should supply gas to the irradiation optical system 135, the control unit 2 may select the hood 136 that can supply the gas to the irradiation optical system 135. For example, if the processing system SYS should supply gas to the workpiece W, the control unit 2 may select the hood 136 that can supply gas to the workpiece W. For example, if the processing system SYS should supply gas to the internal space 136SP of the hood 136, the control unit 2 may select a hood 136 that can supply gas to the internal space 136SP of the hood 136.
  • control unit 2 may select the hood 136 that can supply gas to the internal space SP1 of the housing 3. For example, when the processing system SYS should supply gas to the clean space SP2, the control unit 2 may select the hood 136 that can supply gas to the clean space SP2.
  • the length L of the hood 136 that can supply gas to the irradiation optical system 135 may be different from the length L of the hood 136 that can supply gas to the workpiece W.
  • the length L of the hood 136 that can supply gas to the irradiation optical system 135 may be shorter than the length L of the hood 136 that can supply gas to the workpiece W. This is because the hood 136 that can supply gas to the irradiation optical system 135 (particularly the hood 136 that does not need to supply gas to the workpiece W) does not need to introduce gas into the vicinity of the workpiece W. For example, as shown in FIG.
  • the control unit 2 may select a hood 136 whose length L is the first length L31 as the hood 136 capable of supplying gas to the workpiece W.
  • the control unit 2 uses a second hood 136 whose length L is shorter than the first length L31 as a hood 136 capable of supplying gas to the irradiation optical system 135.
  • a hood 136 having length L32 may be selected.
  • the length L of the hood 136 that can supply gas to the irradiation optical system 135 is different from the length L of the hood 136 that can supply gas to the space SP21 between the irradiation optical system 135 and the workpiece W. You can leave it there.
  • the length L of the hood 136 that can supply gas to the irradiation optical system 135 may be shorter than the length L of the hood 136 that can supply gas to the space SP21.
  • the processing unit 1 uses the hood 136 that can supply gas to the desired gas supply target while supplying gas to the desired gas supply target. , it is possible to appropriately process the workpiece W and to appropriately measure the measurement object M.
  • the hood selection criteria may include a fifth hood selection criteria based on the type of gas suction target from which the processing system SYS should aspirate gas.
  • the operation of selecting one hood 136 to be attached to the irradiation optical system 135 based on the fifth hood selection criterion is performed based on the type of gas suction target to which the processing system SYS is to suction gas. This may be considered to be equivalent to the operation of selecting one hood 136 to be attached to.
  • the control unit 2 may select the hood 136 that is capable of sucking gas from a desired gas suction target. For example, when the processing system SYS should suck gas from the irradiation optical system 135 (for example, the housing space 138SP of the head housing 138 in which the irradiation optical system 135 is housed), the control unit 2 A hood 136 that can suck gas from (for example, the housing space 138SP of the head housing 138) may be selected. For example, if the processing system SYS should suck gas from the workpiece W (for example, the space around the workpiece W), the control unit 2 can suck the gas from the workpiece W (for example, the space around the workpiece W).
  • a hood 136 may be selected. For example, if the processing system SYS should suck gas from the internal space 136SP of the hood 136, the control unit 2 may select the hood 136 that can suck gas from the internal space 136SP of the hood 136. For example, when the processing system SYS should suck gas from the internal space SP1 of the housing 3, the control unit 2 may select the hood 136 that can suck gas from the internal space SP1 of the housing 3. For example, when the processing system SYS should suck gas from the clean space SP2, the control unit 2 may select the hood 136 that can suck gas from the clean space SP2.
  • the processing unit 1 uses the hood 136 capable of sucking gas from the desired gas suction target while sucking gas from the desired gas suction target. , it is possible to appropriately process the workpiece W and to appropriately measure the measurement object M.
  • FIG. 31 is a flowchart showing an example of the flow of the hood exchange operation.
  • the flow of the hood exchange operation including the operation of selecting the hood 136 based on the above-mentioned first and second hood selection criteria will be described. That is, the flow of the hood exchange operation including the operation of selecting the hood 136 based on the type of the irradiation optical system 135 and the type of processing performed by the processing unit 1 will be described below. However, the flow of the hood exchange operation that includes the operation of selecting the hood 136 based on hood selection criteria different from the first and second hood selection criteria also includes selecting the hood 136 based on the first and second hood selection criteria. The flow of the hood exchange operation including the operation of selecting the hood may be the same as that of the hood exchange operation.
  • control unit 2 first determines whether a new machining start instruction has been input to the control unit 2 (step S11).
  • the new machining start instruction may mean an instruction to process a new workpiece W.
  • step S11 if it is determined that a new machining start instruction has been input to the control unit 2 (step S11: Yes), the machining unit 1 assumes that machining of a new workpiece W will be newly started. be done. In this case, the control unit 2 acquires machining information indicating the type of machining to be started in response to the new machining start instruction (step S13). That is, the control unit 2 acquires processing information indicating the type of processing performed by the processing unit 1 based on the new processing start instruction (step S13).
  • step S11 if it is determined that a new machining start instruction has not been input to the control unit 2 (step S11: No), the machining unit 1 It is assumed that W will continue to be processed. In this case, the control unit 2 determines whether or not the processing conditions are changed (step S12).
  • the processing conditions may include conditions regarding the type of processing performed by the processing unit 1. In this case, when the type of machining performed by the machining unit 1 is changed, the control unit 2 may determine that the machining conditions are changed.
  • step S12 if it is determined that the machining conditions will be changed (step S12: Yes), the machining unit 1 assumes that a new machining process that is different in type from the machining process that has been performed so far will be started. be done. In this case, the control unit 2 acquires processing information indicating the type of processing newly started by the processing unit 1 (step S13). As a result, the control unit 2 can specify the type of machining that the machining unit 1 newly starts.
  • step S12 determines whether the machining conditions are changed as a result of the determination in step S12 (step S12: No).
  • the control unit 2 may identify the type of processing performed by the processing unit 1 by referring to previously acquired processing information.
  • control unit 2 determines whether the irradiation optical system 135 attached to the injection optical system 130 has been replaced (step S14). In particular, the control unit 2 determines whether the irradiation optical system 135 attached to the injection optical system 130 has been newly replaced after the hood 136 was selected and replaced last time (step S14).
  • step S14 if it is determined that the irradiation optical system 135 has been newly replaced (step S14: Yes), the control unit 2 provides optical system information ( lens information) (step S15). As a result, the control unit 2 can specify the type of the irradiation optical system 135 after replacement (that is, the irradiation optical system 135 attached to the exit optical system 130). On the other hand, if it is determined that the irradiation optical system 135 has not been newly replaced as a result of the determination in step S14 (step S14: No), the control unit 2 refers to previously acquired optical system information. By doing so, the type of irradiation optical system 135 attached to the exit optical system 130 may be specified.
  • the control unit 2 selects the hood 136 to be attached to the irradiation optical system 135 (step S16). Specifically, the control unit 2 uses the processing information obtained in step S13, the optical system information obtained in step S15, the type of processing, the type of irradiation optical system 135, and the hood to be attached to the irradiation optical system 135. The hood 136 to be attached to the irradiation optical system 135 is selected based on the table information 203 indicating the correspondence with the types of the hoods 136.
  • FIG. 32 An example of the table information 203 is shown in FIG. 32.
  • the control unit 2 controls the gas supply member and the gas suction member based on the table information 203. It is also possible to select a hood 136 that does not have to be capable of functioning as a hood. More specifically, as shown in FIG. 32, the processing information indicates that the processing unit 1 performs simple removal processing, and the optical system information indicates that the working distance (WD) is 100 mm, the shape of the mounting surface 1383 is circular, and the diameter R1 is 200 mm. When indicating that the irradiation optical system 135 is attached to the exit optical system 130, the control unit 2 enters the information in the table information 203.
  • the hood 136A is selected, in which the length L is 20 mm, the shape of the mounting surface 1360 is circular, the diameter R2 is 200 mm, and the hood 136A does not need to be able to function as a gas supply member and a gas suction member. It's okay.
  • the processing information indicates that the processing unit 1 performs simple removal processing, and the optical system information indicates that the working distance is 200 mm and the shape of the mounting surface 1383 is circular.
  • the control unit 2 determines that the length L is 20 mm and the attachment A hood 136A may be selected in which the surface 1360 has a circular shape, the diameter R2 is 200 mm, and the hood 136A does not need to be able to function as a gas supply member or a gas suction member.
  • the processing information indicates that the processing unit 1 performs simple removal processing, and the optical system information indicates that the working distance is 300 mm and the shape of the mounting surface 1383 is circular.
  • the control unit 2 determines that the length L is 20 mm and that the irradiation optical system 135 is attached to the exit optical system 130 based on the table information 203.
  • a hood 136B may be selected in which the surface 1360 has a circular shape, the diameter R2 is 100 mm, and the hood 136B does not need to be able to function as a gas supply member and a gas suction member.
  • the processing information indicates that the processing unit 1 performs simple removal processing, and the optical system information indicates that the working distance is 100 mm and the shape of the mounting surface 1383 is rectangular.
  • the control unit 2 determines the length based on the table information 203.
  • a hood whose length L is 20 mm, the shape of the mounting surface 1360 is a rectangle, and the diameter R2 is 200 mm (horizontal) x 100 mm (vertical), and which does not need to be able to function as a gas supply member and a gas suction member.
  • 136C may also be selected.
  • the control unit 2 when the processing information indicates that the processing unit 1 performs standard removal processing, the control unit 2 functions as a gas supply member based on the table information 203.
  • a hood 136 that is possible and does not need to be able to function as a gas suction member may be selected.
  • the processing information indicates that the processing unit 1 performs standard removal processing
  • the optical system information indicates that the working distance is 100 mm and the mounting surface
  • the control unit 2 determines the length L based on the table information 203.
  • the processing information indicates that the processing unit 1 performs standard removal processing, and the optical system information indicates that the working distance is 200 mm and the shape of the mounting surface 1383 is circular. If the irradiation optical system 135 with an aperture R1 of 200 mm is attached to the injection optical system 130, the control unit 2 determines that the length L is 190 mm and that the irradiation optical system 135 is attached to the exit optical system 130, and the aperture R1 is 200 mm.
  • a hood 136E is selected in which the shape of the surface 1360 is circular, the diameter R2 is 200 mm, the tip shape is thick, and the hood 136E can function as a gas supply member, but does not need to be able to function as a gas suction member. It's okay.
  • the processing information indicates that the processing unit 1 performs standard removal processing, and the optical system information indicates that the working distance is 300 mm and the shape of the mounting surface 1383 is circular.
  • the control unit 2 determines that the length L is 290 mm and the attachment A hood 136F is selected in which the shape of the surface 1360 is circular, the diameter R2 is 100 mm, the tip shape is thick, and the hood 136F can function as a gas supply member, but does not need to function as a gas suction member. It's okay.
  • the processing information indicates that processing unit 1 performs standard removal processing, and the optical system information indicates that the working distance is 100 mm and the shape of the mounting surface 1383 is rectangular.
  • the control unit 2 determines the length based on the table information 203.
  • the length L is 90 mm
  • the shape of the mounting surface 1360 is a rectangle
  • the diameter R2 is 200 mm (horizontal) x 100 mm (vertical)
  • the tip shape is thick, and it can function as a gas supply member
  • a hood 136G that does not need to be able to function as a gas suction member may be selected.
  • the control unit 2 controls the gas supply member based on the table information 203. Also, a hood 136 that can function as a gas suction member may be selected. More specifically, as shown in FIG. 32, the processing information indicates that the processing unit 1 performs high-precision removal processing, and the optical system information indicates that the working distance is 100 mm and the mounting surface is When the shape of 1383 is circular and indicates that the irradiation optical system 135 with an aperture R1 of 200 mm is attached to the exit optical system 130, the control unit 2 determines the length L based on the table information 203.
  • the processing information indicates that the processing unit 1 performs high-precision removal processing
  • the optical system information indicates that the working distance is 200 mm and the shape of the mounting surface 1383 is circular. If the irradiation optical system 135 with an aperture R1 of 200 mm is attached to the injection optical system 130, the control unit 2 determines that the length L is 190 mm and that the irradiation optical system 135 is attached to the exit optical system 130, and the aperture R1 is 200 mm.
  • a hood 136I may be selected in which the surface 1360 has a circular shape, the diameter R2 is 200 mm, and the hood 136I can function as a gas supply member and a gas suction member.
  • the processing information indicates that the processing unit 1 performs high-precision removal processing
  • the optical system information indicates that the working distance is 300 mm and the shape of the mounting surface 1383 is circular.
  • the control unit 2 determines that the length L is 290 mm and the attachment A hood 136J may be selected in which the surface 1360 has a circular shape, the diameter R2 is 100 mm, and the hood 136J can function as a gas supply member and a gas suction member.
  • the processing information indicates that the processing unit 1 performs high-precision removal processing
  • the optical system information indicates that the working distance is 100 mm and the shape of the mounting surface 1383 is rectangular.
  • the control unit 2 determines the length based on the table information 203. Select a hood 136K whose length L is 90 mm, the shape of the mounting surface 1360 is a rectangle, the diameter R2 is 200 mm (horizontal) x 100 mm (vertical), and which can function as a gas supply member and a gas suction member. You may.
  • the control unit 2 can function as a gas supply member based on the table information 203. , and a hood 136 that does not need to be able to function as a gas suction member may be selected. More specifically, as shown in FIG. 32, the processing information indicates that the processing unit 1 performs melt processing, and the optical system information indicates that the working distance is 100 mm and the shape of the mounting surface 1383. When indicating that the irradiation optical system 135 is circular and the aperture R1 is 200 mm is attached to the exit optical system 130, the control unit 2 determines that the length L is 95 mm based on the table information 203.
  • the hood 136L has a mounting surface 1360 having a circular shape, a diameter R2 of 200 mm, a slender tip shape, and can function as a gas supply member, but does not need to be able to function as a gas suction member. may be selected.
  • the processing information indicates that the processing unit 1 performs melt processing
  • the optical system information indicates that the working distance is 200 mm
  • the shape of the mounting surface 1383 is circular
  • the control unit 2 determines that the length L is 195 mm and the mounting surface 1360 is attached based on the table information 203.
  • a hood 136M may be selected, which has a circular shape, has a diameter R2 of 200 mm, has a narrow tip shape, can function as a gas supply member, and does not need to be able to function as a gas suction member.
  • the processing information indicates that the processing unit 1 performs melt processing
  • the optical system information indicates that the working distance is 300 mm
  • the shape of the mounting surface 1383 is circular
  • the control unit 2 determines that the length L is 295 mm and the mounting surface 1360 is attached based on the table information 203.
  • a hood 136N may be selected which has a circular shape, has a diameter R2 of 100 mm, has a narrow tip shape, can function as a gas supply member, and does not need to be able to function as a gas suction member. . As shown in FIG.
  • the processing information indicates that the processing unit 1 performs melt processing
  • the optical system information indicates that the working distance is 100 mm
  • the shape of the mounting surface 1383 is rectangular
  • the control unit 2 determines that the length L is 95 mm
  • the shape of the mounting surface 1360 is a rectangle
  • the diameter R2 is 200 mm (horizontal) x 100 mm (vertical)
  • the tip shape is slender, and it can function as a gas supply member
  • the gas suction member It is also possible to select a hood 136O that does not have to be capable of functioning as a hood.
  • control unit 2 then controls the attachment device 17 to attach the hood 136 selected in step S16 to the irradiation optical system 135 (step S17). That is, the attachment device 17 replaces the hood 136.
  • FIG. 33 is a flowchart showing the flow of the operation of attaching the hood 136 to the irradiation optical system 135 in step S17 of FIG. 31.
  • control unit 2 determines whether the irradiation optical system 135 has been attached to the injection optical system 130 (step S171).
  • step S171 if it is determined that the irradiation optical system 135 is not attached to the emission optical system 130 (step S171: No), the hood 136 cannot be attached to the irradiation optical system 135.
  • the control unit 2 may set a processing prohibition flag for prohibiting the processing unit 1 from starting processing the workpiece W (step S177). If the machining prohibition flag is set, the machining unit 1 does not start machining the workpiece W.
  • step S171 if it is determined that the irradiation optical system 135 has been attached to the exit optical system 130 (step S171: Yes), the hood 136 before replacement is removed from the irradiation optical system 135. It is determined whether it has been completed (step S172).
  • step S172 if it is determined that the hood 136 before replacement has not been removed from the irradiation optical system 135 (step S172: No), the control unit 2 removes the hood 136 before replacement from the irradiation optical system 135.
  • the attachment device 17 is controlled so as to remove it from the base (step S173).
  • the control unit 2 controls the attachment device 17 to attach the hood 136 selected in step S16 of FIG. 31 to the irradiation optical system 135 (step S174).
  • step S172 if it is determined that the hood 136 before replacement has been removed from the irradiation optical system 135 (step S172: Yes), the control unit 2 removes the hood 136 before replacement. It is not necessary to control the attachment device 17 to remove it from the irradiation optical system 135. In this case, the control unit 2 controls the attachment device 17 to attach the hood 136 selected in step S16 of FIG. 31 to the irradiation optical system 135 (step S174).
  • the control unit 2 determines whether the attachment of the hood 136 is completed (step S175). As a result of the determination in step S175, if it is determined that the attachment of the hood 136 is not completed (step S175: No), the control unit 2 prohibits the machining unit 1 from starting machining the workpiece W. A processing prohibition flag is set for this purpose (step S177). On the other hand, if it is determined that the attachment of the hood 136 is completed as a result of the determination in step S175 (step S175: Yes), the control unit 2 allows the machining unit 1 to start machining the workpiece W. A processing permission flag is set for the processing (step S176). If the machining permission flag is set, the machining unit 1 may start machining the workpiece W.
  • the attachment device 17 may remove the hood 136 from the irradiation optical system 135 attached to the injection optical system 130.
  • the attachment device 17 may remove the hood 136 from the irradiation optical system 135 that has been removed from the injection optical system 130.
  • at least one step in the flowchart shown in FIG. 33 may be omitted depending on the timing at which the attachment device 17 removes the hood 136.
  • the order of performing at least two steps in the flowchart shown in FIG. 33 may be changed.
  • a new step may be added to the flowchart shown in FIG. 33.
  • the attachment device 17 may attach the hood 136 to the irradiation optical system 135 attached to the injection optical system 130.
  • the attachment device 17 may attach the hood 136 to the irradiation optical system 135 that has been removed from the injection optical system 130.
  • at least one step in the flowchart shown in FIG. 33 may be omitted depending on the timing at which the attachment device 17 attaches the hood 136.
  • the order of performing at least two steps in the flowchart shown in FIG. 33 may be changed.
  • a new step may be added to the flowchart shown in FIG. 33.
  • the processing system SYS uses one irradiation optical system 135 that matches the processing purpose to more appropriately target the workpiece W. It can be processed into Furthermore, compared to the case where the irradiation optical system 135 attached to the processing head 13 cannot be replaced, the processing system SYS uses one irradiation optical system 135 that matches the measurement purpose to more easily measure the measurement target M. Can be measured appropriately.
  • the hood 136 attached to the processing head 13 can be replaced. Therefore, compared to the case where the hood 136 attached to the processing head 13 cannot be replaced, the processing system SYS can process the workpiece W more appropriately by using one hood 136 that matches the processing purpose. I can do it. Furthermore, compared to the case where the hood 136 attached to the processing head 13 cannot be replaced, the processing system SYS measures the object M more appropriately by using one hood 136 that matches the measurement purpose. be able to.
  • the processing system SYS can appropriately process the workpiece W using one hood 136 that is appropriately selected according to the type of irradiation optical system 135 to which the hood 136 is attached. That is, the processing system SYS can appropriately process the workpiece W using one hood 136 that is appropriately selected in accordance with the replacement of the irradiation optical system 135 to which the hood 136 is attached. For example, the processing system SYS can appropriately process the workpiece W using one hood 136 that is appropriately selected according to the numerical aperture NA of the irradiation optical system 135. For example, the processing system SYS can appropriately process the workpiece W using one hood 136 that is appropriately selected according to the aperture R1 of the irradiation optical system 135.
  • the processing system SYS can appropriately process the workpiece W using one hood 136 that is appropriately selected according to the working distance (or focal length or focal position) of the irradiation optical system 135.
  • the processing system SYS can appropriately process the workpiece W using one hood 136 that is appropriately selected according to the aperture R1 of the irradiation optical system 135.
  • the processing system SYS can appropriately process the workpiece W using one hood 136 that is appropriately selected according to the shape of the mounting surface 1383 of the head housing 138 that houses the irradiation optical system 135. .
  • the measurement object M is measured.
  • the processing system SYS can appropriately process the workpiece W using one hood 136 that is appropriately selected according to the type of processing performed by the processing system SYS.
  • the processing system SYS can appropriately process the workpiece W using one hood 136 suitable for performing removal processing.
  • the processing system SYS can appropriately process the workpiece W using one hood 136 suitable for performing melt processing.
  • the processing system SYS of this embodiment can attach the hood 136 to the head housing 138 using the magnetic force acting between the magnet 1366 and the magnetic body 1386. That is, the processing system SYS can attach the hood 136 to the irradiation optical system 135 using the magnetic force acting between the magnet 1366 and the magnetic body 1386. Therefore, in the processing system SYS, the hood 136 can be easily attached to the irradiation optical system 135, and the hood 136 can be easily removed from the irradiation optical system 135.
  • the hood 136 when the hood 136 is attached to the irradiation optical system 135 using magnetic force, the hood 136 tends to come off from the irradiation optical system 135 when an impact is applied to the hood 136. Therefore, the possibility that the impact applied to the hood 136 will be transmitted to the irradiation optical system 135 via the hood 136 is reduced. For example, the possibility that an impact applied to the hood 136 due to the hood 136 colliding with an obstacle is transmitted to the irradiation optical system 135 via the hood 136 is reduced. Therefore, the possibility that the irradiation optical system 135 will be displaced due to the impact applied to the hood 136 is reduced.
  • the magnet 1366 placed in the hood 136 is lighter than the magnetic body 1386 placed in the head housing 138. That is, the magnet 1366, which is lighter than the magnetic material 1386, is placed in the hood 136, and the magnetic material 1386, which is heavier than the magnet 1366, is placed in the head housing 138. Therefore, the weight of the hood 136 can be reduced. As a result, when an impact is applied to the hood 136, the hood 136 easily comes off from the irradiation optical system 135. Therefore, the possibility that the impact applied to the hood 136 will be transmitted to the irradiation optical system 135 via the hood 136 is reduced. Therefore, the possibility that the irradiation optical system 135 will be displaced due to the impact applied to the hood 136 is reduced.
  • the magnet 1366 placed in the hood 136 does not have to be lighter than the magnetic body 1386 placed in the head housing 138.
  • the magnet 1366 placed in the hood 136 may be heavier than the magnetic body 1386 placed in the head housing 138.
  • the magnet 1366, which is lighter than the magnetic material 1386 may be placed in the head housing 138, and the magnetic material 1386, which is heavier than the magnet 1366, may be placed in the hood 136.
  • FIG. 34 is a block diagram showing an example of the configuration of the first modified example of the processing system SYS.
  • the first modification of the processing system SYS will be referred to as the "processing system SYSa.”
  • the processing system SYSa of the first modification differs from the processing system SYS described above in that it includes a processing unit 1a instead of the processing unit 1.
  • Other characteristics of the processing system SYSa may be the same as other characteristics of the processing system SYS.
  • the processing unit 1a differs from the processing unit 1 in that it includes two mounting devices 17 (specifically, a mounting device 17a-1 and a mounting device 17a-2). Other features of the processing unit 1a may be the same as other features of the processing unit 1.
  • the attachment device 17a-1 differs from the attachment device 17 in that the irradiation optical system 135 is replaceable, but the hood 136 does not have to be replaceable. That is, compared to the mounting device 17, the mounting device 17a-1 can attach the irradiation optical system 135 to the injection optical system 130, but does not have to be able to attach the hood 136 to the irradiation optical system 135. They differ in some respects.
  • the attachment device 17a-1 is different from the attachment device 17 in that the irradiation optical system 135 is removable from the injection optical system 130, but the hood 136 does not have to be removable from the irradiation optical system 135. different.
  • Other features of attachment device 17a-1 may be the same as other features of attachment device 17.
  • the attachment device 17a-2 differs from the attachment device 17 in that while the hood 136 is replaceable, the irradiation optical system 135 does not have to be replaceable.
  • the mounting device 17a-2 can attach the hood 136 to the irradiation optical system 135, but does not have to be able to attach the irradiation optical system 135 to the exit optical system 130. They differ in some respects.
  • the attachment device 17a-2 is different from the attachment device 17 in that while the hood 136 can be removed from the irradiation optical system 135, the irradiation optical system 135 does not have to be removable from the exit optical system 130. different.
  • Other features of attachment device 17a-2 may be the same as other features of attachment device 17.
  • the processing system SYSa uses two different attachment devices 17a-1 and 17a-2 to replace the irradiation optical system 135 and the hood 136, respectively.
  • the processing system SYSa of the first modification example can also enjoy the same effects as the above-mentioned processing system SYS.
  • FIG. 35 is a block diagram showing an example of the configuration of the second modified example of the processing system SYS.
  • the second modification of the processing system SYS will be referred to as a "processing system SYSb.”
  • the processing system SYSb of the second modification differs from at least one of the processing systems SYS and SYSa described above in that it includes a processing unit 1b instead of the processing unit 1. .
  • Other characteristics of the processing system SYSb may be the same as at least one other characteristic of the processing systems SYS and SYSa.
  • the processing unit 1b differs from at least one of the processing units 1 and 1a in that it further includes a vibration prevention device 4b.
  • Other features of processing unit 1b may be the same as at least one other feature of processing units 1 and 1a.
  • the vibration prevention device 4b is a device that can prevent vibrations generated based on the gas supplied from the gas supply source 18 to the hood 136.
  • the vibration prevention device 4b may be a device that can prevent vibrations generated based on the gas supplied from the gas supply source 18 to the hood 136 from being transmitted to the irradiation optical system 135.
  • the vibration prevention device 4b may be a device that can prevent vibrations generated based on the gas supplied from the gas supply source 18 to the hood 136 from being transmitted to the f ⁇ lens 1351 of the irradiation optical system 135. good.
  • the vibration prevention device 4b may be a device that can prevent vibrations generated based on the gas supplied from the gas supply source 18 to the hood 136 from being transmitted to the injection optical system 130.
  • the vibrations generated based on the gas supplied to the hood 136 from the gas supply source 18 may include vibrations generated in the hood 136 based on the gas supplied from the gas supply source 18 to the hood 136. That is, the vibrations generated based on the gas supplied to the hood 136 from the gas supply source 18 may include the vibrations of the hood 136 generated based on the gas supplied to the hood 136 from the gas supply source 18.
  • the vibration prevention device 4b may be a device capable of preventing vibration of the hood 136.
  • the vibration prevention device 4b may be a device that can prevent vibrations of the hood 136 from being transmitted to the irradiation optical system 135.
  • the vibration prevention device 4b may be a device that can prevent the vibration of the hood 136 from being transmitted to the f ⁇ lens 1351 of the irradiation optical system 135.
  • the vibration prevention device 4b may be a device capable of preventing vibrations of the hood 136 from being transmitted to the injection optical system 130.
  • the vibration prevention device 4b may include a passive vibration prevention device.
  • the passive vibration prevention device may be a device that prevents transmission of vibrations by absorbing the vibrations transmitted to the vibration prevention device using an elastic body included in the vibration prevention device.
  • An example of a passive vibration prevention device is a vibration prevention device that includes an elastic body. Examples of the elastic body include at least one of a spring and rubber.
  • the vibration prevention device 4b may include an accumulator that absorbs vibrations of the gas itself, that is, pressure fluctuations itself.
  • the vibration prevention device 4b may include an active type vibration prevention device.
  • the passive vibration prevention device may be a device that prevents the transmission of vibrations by generating vibrations in the opposite direction that cancel out the vibrations transmitted to the vibration prevention device.
  • An example of an active vibration prevention device is a vibration prevention device that includes an actuator that can generate vibrations.
  • the vibration prevention device 4b may include both a passive type signal prevention device and an active type vibration prevention device.
  • the vibration prevention device 4b may be a vibration prevention device obtained by combining a passive type signal prevention device and an active type vibration prevention device.
  • the processing system SYSb of the second modification example can enjoy the same effects as the processing system SYS described above. Furthermore, the processing system SYSb can prevent vibrations generated based on the gas supplied from the gas supply source 18 to the hood 136. Therefore, the processing system SYSb can process the workpiece W and measure the measurement object M while reducing the influence of vibrations generated based on the gas supplied from the gas supply source 18 to the hood 136. As an example, the processing system SYSb processes and measures the workpiece W while reducing the possibility that vibrations generated based on the gas supplied from the gas supply source 18 to the hood 136 unintentionally displace the f ⁇ lens 1351. The object M can be measured.
  • the processing system SYSb may include a vibration generator in addition to or in place of the vibration prevention device 4b.
  • the vibration generator may be capable of vibrating the stage 15.
  • the vibration generator may be capable of vibrating and moving the stage 15.
  • the vibration generator is configured to cancel fluctuations in the irradiation position of the processing light EL caused by, for example, vibrations generated based on the gas supplied from the gas supply source 18 to the hood 136 being transmitted to the irradiation optical system 135.
  • the stage 15 may be moved by vibrating.
  • the processing system SYSb processes the workpiece W and measures the measurement object M while reducing the influence of vibrations generated based on the gas supplied from the gas supply source 18 to the hood 136. be able to.
  • the processing system SYSc of the third modification differs from at least one of the processing systems SYS, SYSa, and SYSb described above in that it includes a processing unit 1c instead of the processing unit 1.
  • Other features of the processing system SYSc may be the same as at least one other feature of the processing systems SYS, SYSa, and SYSb.
  • the processing unit 1c differs from at least one of the processing units 1, 1a, and 1b in that a hood 136c may be attachable to the irradiation optical system 135.
  • the hood 136c may be accommodated in the accommodation device 171 of the attachment device 17, or the hood 136c may be attached to the irradiation optical system 135 in the attachment device 17.
  • Other features of processing unit 1c may be the same as at least one other feature of processing units 1, 1a and 1b. Therefore, the hood 136c in the third modification will be described below with reference to FIG. 36.
  • FIG. 36 is a sectional view showing the configuration of a hood 136c in a third modification.
  • the hood 136c is different from the above-described hood 136 in that the hood 136c includes at least one of partition members 1368c and 1369c that can divide the internal space 136SP of the hood 136c into a plurality of spaces. They are different in this respect.
  • Other features of hood 136c may be the same as other features of hood 136.
  • the partition member 1368c divides the internal space 136SP into a gas supply space 136SP-1 through which the gas supplied from the gas supply source 18 passes, and a light passage space 136SP-2 through which the processing light EL and measurement light ML pass. It's okay. However, the hood 136c does not need to include the partition wall member 1368c. In other words, the internal space 136SP does not need to be divided into the gas supply space 136SP-1 and the light passage space 136SP-2.
  • the partition member 1369c divides the internal space 136SP into a gas suction space 136SP-3 through which the gas suctioned from the gas suction source 19 passes, and a light passage space 136SP-2 through which the processing light EL and measurement light ML pass. It's okay. However, the hood 136c does not need to include the partition member 1369c. In other words, the internal space 136SP does not need to be divided into the gas suction space 136SP-3 and the light passage space 136SP-2.
  • the light passage space 136SP-2 may be located on the center side of the hood 136c.
  • at least one of the gas supply space 136SP-1 and the gas suction space 136SP-3 may be located outside the light passage space 136SP-2.
  • the processing system SYSc of the third modification example can enjoy the same effects as those of the processing system SYS described above.
  • the irradiation optical system 135 is replaceable. That is, the irradiation optical system 135 can be attached to the exit optical system 130 and can be removed from the exit optical system 130.
  • the irradiation optical system 135 does not have to be replaceable. That is, the irradiation optical system 135 does not need to be attachable to the exit optical system 130, and the irradiation optical system 135 does not need to be detachable from the exit optical system 130.
  • the processing system SYS is capable of measuring the measurement object M.
  • the processing system SYS does not need to be able to measure the measurement target M.
  • the processing system SYS does not need to include the measurement light source 12, the measurement optical system 132, and the synthesis optical system 133.
  • the processing system SYS includes the head drive system 14. In other words, the processing head 13 is movable. However, the processing system SYS does not need to include the head drive system 14. That is, the processing head 13 does not need to be movable.
  • the processing system SYS includes the stage drive system 16. In other words, the stage 15 is movable. However, the processing system SYS does not need to include the stage drive system 16. That is, the stage 15 does not need to be movable.
  • the processing system SYS includes the gas supply source 18.
  • the processing system SYS may not include the gas supply source 18. That is, the processing system SYS does not need to be able to supply gas to the gas supply target.
  • the processing system SYS does not need to include the gas supply pipe 1811, the gas supply pipe 1812, the support member 1821, the support member 1823, and the support member 1825 shown in FIGS. 6 and 7.
  • the processing system SYS includes the gas suction source 19.
  • the processing system SYS does not need to include the gas suction source 19. That is, the processing system SYS does not need to be able to suck gas from the gas suction target.
  • the processing system SYS does not need to include the gas suction pipe 1911, the gas suction pipe 1912, the support member 1921, the support member 1923, and the support member 1925 shown in FIGS. 6 and 7.
  • the processing system SYS includes one processing unit 1.
  • the processing system SYS may include a plurality of processing units 1.
  • the processing system SYS may include a plurality of control units 2 that control the plurality of processing units 1, respectively.
  • the processing system SYS controls a first processing unit 1, a second processing unit 1, a first control unit 2 that controls the first processing unit 1, and a second processing unit 1. It may also include a second control unit 2.
  • the processing system SYS may include a control unit 2 that controls at least two of the plurality of processing units 1.
  • the processing system SYS includes a first processing unit 1, a second processing unit 1, and one control unit 2 that controls the first processing unit 1 and controls the second processing unit 2. You may be prepared.
  • the processing system SYS processes the workpiece W by irradiating the workpiece W with the processing light EL.
  • the processing system SYS processes the workpiece W by irradiating the workpiece W with an energy beam in the form of light.
  • the processing system SYS may process the workpiece W by irradiating the workpiece W with an arbitrary energy beam different from light.
  • arbitrary energy beams include at least one of charged particle beams and electromagnetic waves.
  • An example of a charged particle beam is at least one of an electron beam and an ion beam.
  • the processing system SYS processes the workpiece W by irradiating the workpiece W with the measurement light ML.
  • the processing system SYS may measure the workpiece W by irradiating the workpiece W with an arbitrary energy beam different from light.
  • a processing system capable of processing an object by irradiating the object with an energy beam, an exit optical system capable of emitting the energy beam; a plurality of irradiation optical systems capable of irradiating the object with the energy beam emitted from the emission optical system and attachable to the exit side of the exit optical system; a plurality of hoods that can be attached to the exit side of the irradiation optical system; One irradiation optical system of the plurality of irradiation optical systems can be attached to the exit side of the exit optical system, and one hood of the plurality of hoods can be attached to the exit side of the one irradiation optical system.
  • a processing system comprising a mounting device that can be mounted on the side.
  • the attachment device replaces one hood selected from the plurality of hoods with another hood among the plurality of hoods attached to the exit side of the irradiation optical system.
  • processing system [Additional note 3]
  • the control device controls processing of the object based on processing information,
  • the control device controls the mounting device to select one hood to be attached to the exit side of the irradiation optical system from the plurality of hoods based on the type of the irradiation optical system. processing system.
  • the control device may cause the first hood of the plurality of hoods to controlling the mounting device so that it is mounted on the exit side of the first irradiation optical system;
  • the control device According to any one of Supplementary Notes 3 to 5, the attachment device is controlled so that a second hood different from the first hood is attached to the exit side of the second irradiation optical system.
  • the numerical aperture of the first irradiation optical system is different from the numerical aperture of the second irradiation optical system, The processing system according to appendix 6, wherein the size of the first hood along the traveling direction of the energy beam is different from the size of the second hood along the traveling direction.
  • the numerical aperture of the first irradiation optical system is larger than the numerical aperture of the second irradiation optical system, The processing system according to appendix 6 or 7, wherein the size of the first hood along the traveling direction of the energy beam is smaller than the size of the second hood along the traveling direction.
  • the control device may cause the third hood of the plurality of hoods to controlling the mounting device so that it is mounted on the exit side of the third irradiation optical system;
  • the control device The attachment device is controlled so that a fourth hood different from the third hood among the hoods is attached to the exit side of the fourth irradiation optical system. processing system.
  • the aperture of the third irradiation optical system is different from the aperture of the fourth irradiation optical system, The processing system according to appendix 9, wherein the size of the third hood along the direction intersecting the traveling direction of the energy beam is different from the size of the fourth hood along the direction intersecting the traveling direction.
  • the aperture of the third irradiation optical system is larger than the aperture of the fourth irradiation optical system, The processing system according to appendix 9 or 10, wherein the size of the third hood along the direction intersecting the traveling direction of the energy beam is larger than the size of the fourth hood along the direction intersecting the traveling direction.
  • the control device may cause the fifth hood of the plurality of hoods to controlling the mounting device so that it is mounted on the exit side of the fifth irradiation optical system;
  • the control device The attachment device is controlled so that a sixth hood different from the fifth hood among the hoods is attached to the exit side of the sixth irradiation optical system. processing system.
  • the working distance of the fifth irradiation optical system is different from the working distance of the sixth irradiation optical system, The processing system according to appendix 12, wherein the size of the fifth hood along the traveling direction of the energy beam is different from the size of the sixth hood along the traveling direction.
  • the working distance of the fifth irradiation optical system is longer than the working distance of the sixth irradiation optical system, The processing system according to appendix 12 or 13, wherein the size of the fifth hood along the traveling direction of the energy beam is longer than the size of the sixth hood along the traveling direction.
  • the control device controls the mounting device so that a seventh hood of the plurality of hoods is mounted on the exit side of the irradiation optical system.
  • control When the processing system performs a second type of processing that is different from the first type of processing, the control device controls an eighth hood that is different from the seventh hood among the plurality of hoods.
  • the processing system according to any one of Supplementary Notes 3 to 14, wherein the attachment device is controlled so that the attachment device is attached to the irradiation optical system.
  • the first type of processing includes removal processing that removes a part of the object
  • the second type of processing includes melt processing in which a part of the object is melted and then solidified
  • the processing system according to appendix 15, wherein the size of the seventh hood along the traveling direction of the energy beam is smaller than the size of the eighth hood along the traveling direction.
  • the processing system further includes a gas supply device, The processing system according to any one of Supplementary Notes 1 to 16, wherein the gas supplied from the gas supply device can be supplied to the supply target via the hood attached to the exit side of the irradiation optical system.
  • the gas supply device includes a first connection part, At least one of the plurality of hoods includes a second connection part connectable to the first connection part, When at least one of the plurality of hoods is attached to the exit side of the irradiation optical system, the gas supplied from the gas supply device passes through the first connection part and the second connection part,
  • the processing system according to any one of Supplementary Notes 17 to 19, which can be supplied to the supply target.
  • At least one of the plurality of hoods includes a first space through which the gas supplied from the gas supply device passes, The processing system according to any one of appendices 17 to 21, wherein the energy beam is irradiated onto the object through the first space.
  • At least one of the plurality of hoods includes a second space through which the gas supplied from the gas supply device passes, The processing system according to any one of attachments 17 to 21, wherein the energy beam is irradiated onto the object through a first space different from the front second space.
  • the first space is located on the center side of the hood, The processing system according to attachment 23, wherein the second space is located outside the first space.
  • the control device controls a tenth hood different from the ninth hood among the plurality of hoods to 28.
  • the processing system according to any one of appendices 25 to 27, wherein the attachment device is controlled so that the attachment device is attached to the exit side of the irradiation optical system.
  • the first supply target includes the irradiation optical system
  • the second supply target includes at least one of the object and a space between the irradiation optical system and the object
  • the processing system according to attachment 28 wherein the size of the ninth hood along the traveling direction of the energy beam is smaller than the size of the tenth hood along the traveling direction.
  • Gas supplied from the ninth hood to at least a portion of the irradiation optical system prevents substances generated during processing of the object from adhering to the irradiation optical system; According to appendix 29, the gas supplied from the tenth hood to the object and at least a portion of the space prevents at least one of the substance from adhering to the object and the substance from staying in the space. processing system.
  • At least two of the plurality of hoods each include a gas supply port, and are capable of supplying the gas to the supply target via the gas supply port,
  • the control device selects one hood from the at least two hoods in which the gas supply port has a different shape, and adjusts the mounting so that the selected one hood is attached to the exit side of the irradiation optical system.
  • the processing system according to any one of appendices 25 to 30, which controls the device.
  • At least two of the plurality of hoods each include a gas supply port, and are capable of supplying the gas to the supply target via the gas supply port,
  • the control device selects one hood from the at least two hoods having different gas supply directions from the gas supply port, and the selected one hood is attached to the exit side of the irradiation optical system.
  • the processing system according to any one of Supplementary Notes 25 to 31, wherein the mounting device is controlled so as to be controlled.
  • the control device controls the gas supply device so as to change the type of gas supplied from the gas supply device to the hood based on the type of processing performed by the processing system.
  • the control device controls the gas flow rate so that the gas supply device supplies the first gas to the hood. control the feeding device, When the processing system performs removal processing to remove a part of the object, the control device controls the gas supply device so that the gas supply device supplies the second gas to the hood.
  • the first gas includes an inert gas
  • the processing system further includes a suction device capable of sucking gas, The processing system according to any one of Supplementary Notes 1 to 35, wherein at least one of the plurality of hoods includes a third space connected to a suction port of the suction device.
  • the attachment device attaches one of the plurality of irradiation optical systems to the exit side of the exit optical system, and then attaches the plurality of irradiation optical systems to the exit side of the irradiation optical system attached to the exit side of the exit optical system.
  • the processing system according to any one of appendices 1 to 36.
  • the attachment device attaches one of the plurality of hoods to the exit side of the irradiation optical system, and then attaches the irradiation optical system to which the one hood is attached to the exit side of the exit optical system.
  • the processing system according to any one of Supplementary Notes 1 to 37.
  • the mounting device includes: a first attachment device capable of attaching one of the plurality of irradiation optical systems to the exit optical system; 39.
  • a processing system capable of processing an object by irradiating the object with an energy beam, an irradiation optical system capable of irradiating the object with the energy beam; a plurality of hoods that can be attached to the exit side of the irradiation optical system; a mounting device capable of mounting one of the plurality of hoods on the exit side of the irradiation optical system; Equipped with a control device and The control device controls processing of the object based on processing information, The processing system, wherein the control device controls the attachment device to attach one of the plurality of hoods to the exit side of the irradiation optical system based on the processing information.
  • a processing system capable of processing an object by irradiating the object with an energy beam, an irradiation optical system capable of irradiating the object with the energy beam;
  • a processing system comprising: a hood attachable to the irradiation optical system using magnetic force.
  • a magnetic body on which a magnetic force acts for attaching the hood is attached to the irradiation optical system on the exit side of the irradiation optical system, A magnet that generates a magnetic force for attaching the hood to the exit side of the irradiation optical system is attached to the hood, The processing system according to attachment 41, wherein the hood is attachably attached to the exit side of the irradiation optical system using magnetic force acting between the magnetic body and the magnet.
  • the processing system further includes a mounting device capable of replacing the hood attached to the irradiation optical system
  • the attachment device includes a holding member that can hold the hood, and an insertion member that can be inserted into a boundary between the irradiation optical system to which the hood is attached and the hood. Processing system described.
  • the attachment device removes the hood from the irradiation optical system by inserting the insertion member into the boundary between the irradiation optical system and the hood while holding the hood using the holding member. Processing system described.
  • a supply pipe for supplying gas supplied from a gas supply device to the hood is attached to the irradiation optical system,
  • a processing system capable of processing an object by irradiating the object with an energy beam, an irradiation optical system capable of irradiating the object with the energy beam; a plurality of hoods that can be attached to the exit side of the irradiation optical system; and a mounting device capable of mounting one of the plurality of hoods on the exit side of the irradiation optical system.
  • a processing method capable of processing an object by irradiating the object with an energy beam comprising: Emitting the energy beam from an emission optical system; Attaching one irradiation optical system of a plurality of irradiation optical systems that can be attached to the exit side of the exit optical system to the exit side of the exit optical system; irradiating the object with the energy beam emitted from the exit optical system using the one irradiation optical system attached to the exit side of the exit optical system;
  • a processing method comprising: attaching one hood of a plurality of hoods that can be attached to the exit side of the one irradiation optical system to the exit side of the one irradiation optical system.
  • a processing method capable of processing an object by irradiating the object with an energy beam comprising: irradiating the object with the energy beam using an irradiation optical system; controlling processing of the object based on processing information;
  • a processing method comprising: attaching one hood among a plurality of hoods that can be attached to an exit side of the irradiation optical system to the exit side of the irradiation optical system based on the processing information.
  • a processing method capable of processing an object by irradiating the object with an energy beam comprising: irradiating the object with the energy beam using an irradiation optical system; A processing method comprising: attaching a hood to the irradiation optical system using magnetic force.
  • a processing method capable of processing an object by irradiating the object with an energy beam the method comprising: irradiating the object with the energy beam using an irradiation optical system; A processing method comprising: attaching one hood of a plurality of hoods that can be attached to an exit side of the irradiation optical system to the exit side of the irradiation optical system.

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  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
PCT/JP2022/032062 2022-08-25 2022-08-25 加工システム Ceased WO2024042681A1 (ja)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025203554A1 (ja) * 2024-03-29 2025-10-02 株式会社ニコン 加工システム、制御方法及びコンピュータプログラム

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002131606A (ja) * 2000-10-27 2002-05-09 Minolta Co Ltd レンズの取付け装置
JP2004237081A (ja) * 2003-01-14 2004-08-26 Morita Mfg Co Ltd 診断用撮影器
WO2021024480A1 (ja) * 2019-08-08 2021-02-11 株式会社ニコン 加工装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002131606A (ja) * 2000-10-27 2002-05-09 Minolta Co Ltd レンズの取付け装置
JP2004237081A (ja) * 2003-01-14 2004-08-26 Morita Mfg Co Ltd 診断用撮影器
WO2021024480A1 (ja) * 2019-08-08 2021-02-11 株式会社ニコン 加工装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025203554A1 (ja) * 2024-03-29 2025-10-02 株式会社ニコン 加工システム、制御方法及びコンピュータプログラム

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