WO2024029970A1 - Préhenseur - Google Patents

Préhenseur Download PDF

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Publication number
WO2024029970A1
WO2024029970A1 PCT/KR2023/011441 KR2023011441W WO2024029970A1 WO 2024029970 A1 WO2024029970 A1 WO 2024029970A1 KR 2023011441 W KR2023011441 W KR 2023011441W WO 2024029970 A1 WO2024029970 A1 WO 2024029970A1
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WO
WIPO (PCT)
Prior art keywords
unit
picker
rod
permanent magnets
suction passage
Prior art date
Application number
PCT/KR2023/011441
Other languages
English (en)
Korean (ko)
Inventor
유홍준
이용식
Original Assignee
(주)제이티
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)제이티 filed Critical (주)제이티
Publication of WO2024029970A1 publication Critical patent/WO2024029970A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/912—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems with rectilinear movements only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles

Definitions

  • the present invention relates to a picker mounted on a pick and place device that adsorbs and transports elements, etc. by vacuum pressure.
  • a picker is a device that is generally installed in a pick and place device that picks up an element and then moves it to place it in a predetermined seating position to adsorb the element.
  • a suction passage to which vacuum pressure is applied is formed inside, and the element is adsorbed at one end.
  • a rod to which the adsorption unit is coupled and a vertical drive unit to move the rod in the vertical direction are provided.
  • the upper and lower driving unit is operated by pneumatics and consists of a cylinder that provides a space where pneumatic pressure is applied, and a piston that slides within the cylinder by pneumatic pressure. And the piston and rod of the upper and lower driving part are coupled, and as the piston slides inside the cylinder, the coupled rod moves in the vertical direction.
  • the conventional picker picks up the element by forming vacuum pressure, that is, negative pressure, on the adsorption unit when picking up the element at the pickup position, and releases the vacuum pressure on the adsorption unit to load the element at the loading position.
  • conventional pickers generally create positive pressure in the adsorption section for rapid loading of elements at the loading position.
  • the positive pressure or negative pressure on the adsorption head of the picker is formed by the pneumatic pressure transmission line.
  • the time of positive or negative pressure formation through the pneumatic pressure transmission line is determined by the length of the pneumatic pressure transmission line. There is a limit to minimizing the length of the pneumatic transmission line in order to shorten the forming time, which ultimately limits the processing speed of the device.
  • the size of the picker for device transfer becomes smaller, raising various issues such as convenience of attachment and detachment, convenience of maintenance, and increased durability.
  • the picker for transporting devices as a picker performance also provides faster movement from the pickup position to the loading position and faster device pickup and device loading. They are demanding it.
  • Patent Documents 1 and 2 are characterized in that they are linearly driven by a linear driving force generated by the application of electricity.
  • Patent Documents 1 and 2 are relatively large in size when configured for linear driving, so there is a limit to minimizing the size.
  • Patent Document 1 KR 10-1754627 B1
  • Patent Document 2 KR 10-2016-0110244 A
  • the purpose of the present invention is to provide a picker with a structure that can minimize the linear movement structure for linear driving of the load for element pickup, in order to solve the problems of the prior art described above.
  • the present invention was created to achieve the object of the present invention as described above, and the present invention is to form a suction passage 210 on the inside of which vacuum pressure is applied, and an adsorption portion 220 at one end of which the element 10 is adsorbed. ) is coupled and a load portion 200 on which a plurality of permanent magnets 230 are installed; Disclosed is a picker that includes a magnetic flux change forming unit 100 that drives linear movement of the load unit 200 by forming a magnetic flux change with respect to the plurality of permanent magnets 230.
  • the rod unit 200 includes a hollow cylinder 240 to which the adsorption unit 220 is coupled at one end and forms a part of the suction passage 210, and the two or more permanent magnets 230 are, It may be composed of a hollow permanent magnet that is sequentially coupled to the other end of the hollow cylinder 240 and forms the suction passage 210 together with the hollow cylinder 240.
  • the rod unit 200 is installed on at least one end of the plurality of permanent magnets 230 and forms the suction passage 210 together with the plurality of permanent magnets 230. 251, 252) may be additionally included.
  • the suction passage forming portions 251 and 252 are formed between the first suction passage forming portion 251 inserted from the side to which the adsorption portion 220 is coupled, and the plurality of permanent magnets 230. It may include a second suction passage forming portion 252 that is inserted from the side opposite to the suction passage forming portion 251 and fixes the plurality of permanent magnets 230 together with the first suction passage forming portion 251. .
  • the magnetic flux change forming unit 100 may be fixedly coupled, and may include a main body unit 300 that guides the rod unit 200 to enable linear movement in its longitudinal direction.
  • the main body portion 300 is provided with a pneumatic pipe connection portion 421 to which a pneumatic transmission pipe for transmitting vacuum pressure from the outside is coupled, and the rod portion 200 is a flexible cable connected to the pneumatic pipe connection portion 421. Vacuum pressure can be transmitted through the pipe 420.
  • the magnetic flux change forming unit 100 is installed adjacent to the permanent magnet 230 and generates a linear driving force for the rod unit 200 by interacting with the permanent magnet 230 by applying electricity. It may include some (110).
  • the coil unit 110 may include a bobbin 111 having an inner peripheral surface spaced apart from the outer peripheral surface of the plurality of permanent magnets 230, and a winding coil 112 wound around the bobbin 111.
  • the coil unit 110 includes a coil block 130 that is fixedly coupled to the main body 300 and has an insertion hole into which the bobbin 111 on which the winding coil 112 is wound is inserted.
  • the block 130 may be formed with a first connection part 131 and a second connection part 132 in which the second through hole 320 and the auxiliary through hole 330 are formed, respectively.
  • the picker according to the present invention may be installed on the main body 100 and coupled to the rod unit 200, and may include rotation prevention means to prevent rotation of the rod unit 200 during linear movement.
  • the rotation prevention means may include a guide rod 510 that moves linearly together with the linear movement of the rod unit 200.
  • It includes a linear encoder 430 for measuring the linear movement distance of the rod unit 200, and the linear encoder 430 is fixed to one of the guide rod 510 and the main body 300.
  • a scale member 431 It may include a detection unit 432 that is fixed to the remaining one of the guide rod 510 and the main body 300 and detects the movement of the scale member 431.
  • the picker according to the present invention has the advantage of minimizing the size by integrally combining the permanent magnet with the rod in a linear movement configuration consisting of a coil and a permanent magnet, and further minimizing its own weight to facilitate its drive control. .
  • FIG. 1 is a perspective view showing a picker according to the present invention.
  • Figure 2 is an exploded perspective view of the picker of Figure 1 with the side cover member removed.
  • FIG. 3 is a cross-sectional view of the picker shown in FIG. 1.
  • Figure 4 is a partial perspective view showing the load part and the magnetic flux change forming part of the picker of Figure 1.
  • Figure 5 is an enlarged cross-sectional view of portion A in Figure 3.
  • Figure 6 is an enlarged cross-sectional view of part B in Figure 3.
  • FIG. 7 is a cross-sectional view taken in the VII-VII direction in FIG. 4.
  • the picker according to the present invention has a suction passage 210 on which vacuum pressure is applied, and an adsorption portion 220 on which the element 10 is adsorbed is attached to one end.
  • the rod unit 200 has a suction passage 210 on which vacuum pressure is applied, an adsorption unit 220 to which the element 10 is adsorbed is formed at one end, and a plurality of permanent magnets 230 are installed.
  • a suction passage 210 on which vacuum pressure is applied
  • an adsorption unit 220 to which the element 10 is adsorbed is formed at one end
  • a plurality of permanent magnets 230 are installed.
  • Various configurations are possible.
  • the rod unit 200 is equipped with an adsorption unit 220 coupled to one end and a flexible pipe 420 coupled to the other end, and a plurality of permanent magnets 230 installed inside along the longitudinal direction. It may include a hollow cylinder 240.
  • the hollow cylinder 240 is configured to have the suction part 220 coupled to one end and the flexible pipe 420 to the other end, and various configurations are possible.
  • the hollow cylinder 240 may be made of various materials such as metal materials such as stainless steel or engineering plastic.
  • the hollow cylinder 240 has various structures such as a step structure and a thin tube so that the plurality of permanent magnets 230 can be located at a position corresponding to the magnetic flux change forming portion 100. Permanent magnets 230 may be installed inside.
  • the plurality of permanent magnets 230 are installed at a position corresponding to the magnetic flux change forming part 100 inside the hollow cylinder 240, and are hollow so as to form a part of the suction passage 210. It can have a structure.
  • the plurality of permanent magnets 230 may have a cylindrical shape that is closely installed on the inner peripheral surface of the hollow cylinder 240.
  • the installed number of the plurality of permanent magnets 230 can be appropriately selected according to the linear movement distance of the load unit 200, linear driving force, etc.
  • the plurality of permanent magnets 230 are sequentially arranged with different magnetic poles along the longitudinal direction, and the length of the rod portion 200 is changed by the mutual magnetic flux action of the magnetic flux change forming portion 100 installed on the outer circumference side.
  • Direction that is, a linear driving force in the Z-axis direction can be generated.
  • permanent magnets having different polarities may be integrally joined through an adhesive.
  • At least one of the inner and outer peripheral surfaces may be structurally reinforced with a film (not shown) made of a carbon sheet or the like.
  • the rod unit 200 is installed on at least one end of the plurality of permanent magnets 230 and forms the suction passage 210 together with the plurality of permanent magnets 230. It may additionally include parts 251 and 252.
  • the suction passage forming parts 251 and 252 are installed on at least one end of the plurality of permanent magnets 230 and form the suction passage 210 together with the plurality of permanent magnets 230.
  • it may be made of various materials such as metal and plastic.
  • the suction passage forming portions 251 and 252 form the suction passage 210 together with the plurality of permanent magnets 230 of the hollow structure when the plurality of permanent magnets 230 have a hollow structure. It can have a hollow pipe structure to do this.
  • suction passage forming portions 251 and 252 are formed between the first suction passage forming portion 251 inserted from the side to which the adsorption portion 220 is coupled, and the plurality of permanent magnets 230. It may include a second suction passage forming portion 252 that is inserted from the side opposite to the first suction passage forming portion 251 and fixes the plurality of permanent magnets 230 together with the first suction passage forming portion 251. there is.
  • the first suction passage forming portion 251 is a component that is inserted from the side to which the adsorption portion 220 is coupled to form a suction passage 210 connected to the plurality of permanent magnets 230. It may have a cylindrical shape formed in the longitudinal direction corresponding to the cylindrical shape of the permanent magnet 230.
  • the second suction passage forming portion 252 is inserted from the side opposite to the first suction passage forming portion 251 with the plurality of permanent magnets 230 in between, thereby forming the first suction passage forming portion 251.
  • a configuration for fixing the plurality of permanent magnets 230 various configurations are possible depending on the fixing structure of the permanent magnets 230.
  • the second suction passage forming portion 252 is a component that forms the suction passage 210 connected to the plurality of permanent magnets 230, and is formed in the cylindrical shape of the plurality of permanent magnets 230. It may have a cylindrical shape correspondingly formed in the longitudinal direction.
  • one end of the second suction passage forming portion 252 is in close contact with the permanent magnet 230, and the other end may be coupled with a pipe connection member 253 for connection to the flexible pipe 420.
  • the pipe connection member 253 is a component that is coupled to one end of the rod portion 200 and the flexible pipe 420, and may be configured as a member for connecting a general pipe.
  • the rod unit 200 is installed to be movable in the Z-axis direction while coupled to the main body unit 300, which will be described later.
  • the main body portion 300 may have a thin rectangular parallelepiped structure so that the rod portion 200 can be installed to enable linear movement, and the rod portion 200 may be oriented in the longitudinal direction to enable linear movement.
  • First through holes 310 and second through holes 320 may be formed at intervals.
  • the first through hole 310 and the second through hole 320 are formed through the rod portion 200 at intervals in the longitudinal direction to enable linear movement of the rod portion 200. It can be formed at appropriate intervals to support the distance and outer circumference.
  • first through hole 310 and the second through hole 320 are formed on the outer peripheral surface of the rod unit 200, that is, the outer peripheral surface of the hollow cylinder 240, so as to enable stable linear movement of the rod unit 200.
  • a supporting first bush 311 and a second bush 321 may be installed.
  • the first bush (311) is a member installed in the first through hole (310) for stable movement of the hollow cylinder (240), and various configurations are possible.
  • the second bush 321 is a member installed in the second through hole 320 for stable movement of the hollow cylinder 240, and can have various configurations.
  • the second through hole 320 can be installed in an appropriate position and member to support the linear movement of the rod portion 200, such as being formed in a coil block 130 to be described later instead of the main body portion 300. there is.
  • the adsorption unit 220 is coupled to one end of the rod unit 200 and is a component that picks up the element 10 by vacuum pressure formed in the suction passage 210, and the pickup target is depending on the element 10.
  • Various configurations are possible.
  • the magnetic flux change forming unit 100 is a component that drives linear movement of the load unit 200 by forming a magnetic flux change with respect to the plurality of permanent magnets 230, and various configurations are possible.
  • the magnetic flux change forming unit 100 is installed adjacent to the permanent magnet 230 and generates a linear driving force for the rod unit 200 by interacting with the permanent magnet 230 by applying electricity. It may include a coil unit 110 that generates electricity.
  • the coil unit 110 is a component that generates a magnetic flux change by applying electricity and linearly moves the plurality of permanent magnets 230 according to the magnetic flux change, depending on the longitudinal arrangement and linear movement method of the permanent magnets 230. Therefore, various configurations are possible.
  • the coil unit 110 includes a bobbin 111 having an inner peripheral surface spaced apart from the external peripheral surface of the rod unit 200, particularly the plurality of permanent magnets 230, and a coil wound around the bobbin 111. It may be composed of a winding coil 112.
  • the bobbin 111 is a structure in which a winding coil 112, that is, a copper wire, is wound, and various configurations are possible depending on the winding method of the winding coil 112.
  • the bobbin 111 may be composed of a cylindrical winding part so that the rod part 200 described above can be installed through it, and a flange part extending radially from both ends of the winding part.
  • the winding coil 112 is a component that generates magnetic flux changes by power applied by the coil control PCB 139, which will be described later, and generates a linear driving force through mutual magnetic action with the permanent magnet 230. It can be wound by various winding methods.
  • the coil unit 110 may be formed integrally with the main body 300, which will be described later, or may be detachably coupled to the main body 300 to form a single rectangular parallelepiped.
  • the coil unit 110 may include a coil block 130 in which an insertion hole is formed into which the bobbin 111 on which the winding coil 112 is wound is inserted.
  • the coil block 130 is a block in which an insertion hole is formed into which the bobbin 111 on which the winding coil 112 is wound is inserted, and various configurations are possible depending on the coupling structure of the main body 300.
  • the coil block 130 may be formed with a first connection part 131 and a second connection part 132 in which the second through hole 320 and the auxiliary through hole 330 described above are formed, respectively. .
  • the first connection portion 131 extends laterally from the coil block 130 in the When combined with the part 300, the overall shape can form a thin rectangular parallelepiped.
  • first connection portion 131 may be installed inside the main body 300, which will be described later.
  • the second connection portion 132 extends laterally from the coil block 130 in the When combined with (300), the overall shape can form a thin rectangular parallelepiped shape.
  • the auxiliary through hole 330 is a through hole formed so that the rod part 200 penetrates the second connection part 132 formed at a distance from the first connection part 131, and the first through hole ( 310) and the second through hole 320, it is characterized in that it is arranged to form a straight line, that is, a straight line in the Z-axis direction.
  • auxiliary through hole 330 may be provided with a bush 331 for stable movement of the hollow cylinder 240.
  • connection portion 132 may be installed inside the main body 300, which will be described later.
  • connection part 132 is formed at an appropriate distance between the first connection part 131 and the bobbin 111.
  • At least one of the first connection part 131 and the second connection part 132 has an encoder installation part 133 extending in the Z-axis direction for installing the detection part 432 of the linear encoder 430, which will be described later. can be formed.
  • the encoder installation unit 133 is a configuration for installing the detection unit 432 of the linear encoder 430, which will be described later, and has a plate-shaped shape considering that the detection unit 432 of the linear encoder 430 is installed as a substrate structure. You can.
  • At least one of the first connection part 131 and the second connection part 132 is a Z-axis direction extension part ( 134) may be formed additionally.
  • the Z-axis direction extension part 134 is a part extending in the Z-axis direction for stable installation inside the main body 300, which will be described later, and is partially shaped like a rectangular parallelepiped and is screwed to the inner peripheral surface of the main body 300. It can be fixedly combined by .
  • the first connection part 131 may also be formed with a fixed coupling part 135 that is fixedly coupled to the inner peripheral surface of the main body 300 by screws.
  • the second connection portion 132 is installed on the side opposite to the bobbin 111 to be in contact with the outer peripheral surface of the rod portion 200 and includes a static electricity removal plate ( 290) can be installed.
  • the static electricity removal plate 290 is installed on the side opposite to the bobbin 111 in contact with the outer peripheral surface of the rod unit 200 to remove static electricity generated in the rod unit 200, and can be configured in various ways.
  • the picker according to the present invention includes a main body portion 300 to which the magnetic flux change forming portion 100 is fixedly coupled and which guides the rod portion 200 to enable linear movement in the longitudinal direction.
  • the main body portion 300 is fixedly coupled to the magnetic flux change forming portion 100 and guides the rod portion 200 to enable linear movement in its longitudinal direction, and is coupled to a linear movement guide and a transfer tool.
  • various configurations are possible.
  • the main body portion 300 has a coupling side 301 coupled to a structure such as a transfer tool (not shown), an opposing side 302 opposite the coupling side 301, and the rod portion 200 described above.
  • a side body portion 360 having a lower side 303 formed with a first through hole 310 passing therethrough, an upper side 304 facing the lower side 303, and the side body portion 360. It may be composed of one or more covering parts (320, upper covering parts and/or lower covering parts) that are combined with at least one of the upper and lower surfaces of and cover the interior.
  • the main body portion 300 is combined with the magnetic flux change forming portion 100 described above, and its overall shape forms a rectangular parallelepiped, and various configurations are possible, such as being composed of one or more blocks.
  • the portion of the rod portion 200 to which the adsorption portion 220 is coupled is exposed through the first through hole 310 on the lower side 303, and a pneumatic pipe connection portion to be described later. (421) and the terminal connection portion 411 may be installed on the upper side 304 and the interior may be sealed.
  • the main body portion 300 may be hermetically coupled with a sealing member interposed between the coupling structure of the main body portion 300 itself and the coil block 130.
  • the main body portion 300 may be formed by processing with one of the upper and lower surfaces covered so that a portion of the upper and lower sides is exposed when forming the side body portion.
  • the main body portion 300 is provided with a pneumatic pipe connection portion 421 to which a pneumatic transmission pipe for transmitting vacuum pressure from the outside is coupled, and the rod portion 200 is connected to the pneumatic pipe connection portion 421. It can be configured to receive vacuum pressure through the flexible pipe 420.
  • the picker having the above configuration minimizes the movement of the pneumatic transmission pipe by embedding the flexible piping 420, which bends when the rod portion 200 moves up and down, in the main body portion 300. Shanghai movement can be performed more smoothly.
  • the pneumatic pressure transmission pipe is affected by the vertical movement of the rod unit 200, and the deformation of the pneumatic transmission pipe increases, which may interfere with the vertical movement of the rod unit 200. .
  • the picker having the above configuration minimizes the movement of the pneumatic transmission pipe by embedding the flexible pipe 420, which bends when the rod portion 200 moves up and down, in the main body portion 300 and adjusts the pitch. By only horizontal movement, the up and down movement of the load unit 200 can be performed more smoothly.
  • the main body portion 300 preferably has an installation space (AS) formed between the above-described first connection portion 131 and the upper side 304 for installation of the flexible pipe 420.
  • AS installation space
  • the installation space (AS) is a space provided in the main body 300 for installation of the flexible piping 420 between the first connection part 131 and the upper side 304 described above, and is formed by various structures. It can be.
  • the main PCB 410 is installed with the terminal connection part 411 electrically connected through the upper side 304, and a partition member is installed to prevent interference with the flexible pipe 420. (429) can be installed.
  • the partition member 429 is installed with a main PCB 410 to which the terminal connection part 411 is electrically connected through the upper side 304, and is installed to prevent interference with the flexible pipe 420.
  • a configuration for dividing the space (AS) various configurations are possible, such as being coupled to the main PCB 410 as a plate-shaped member.
  • the terminal connection part 411 is a terminal for transmitting power supply and control signals for driving the magnetic flux change forming unit 100, and may have various configurations depending on power supply and signal transmission.
  • the main PCB 410 is a configuration for driving and controlling the magnetic flux change forming unit 100, and is a circuit concept rather than a physical concept, and various configurations are possible.
  • the main PCB 410 may be equipped with a magnetic flux change forming unit 100, that is, a power transmission unit 420 for transmitting electrical signals of the winding coil 112.
  • the power transmission unit 420 is a component for transmitting electric signals from the magnetic flux change forming unit 100, that is, the winding coil 112, and can have various configurations depending on the number of winding coils 112.
  • a rotation prevention means that is coupled to the rod unit 200 to prevent rotation when the rod unit 200 moves linearly. It is desirable to do so.
  • the rotation prevention means is combined with the rod unit 200 to prevent rotation of the rod unit 200 during linear movement, and can be configured in various ways.
  • the rotation prevention means includes a guide rod 510 that moves linearly together when the rod unit 200 linearly moves, and the guide rod 510 moves linearly together when the rod unit 200 linearly moves. It may include a guide rod 510 and a fixed connection portion 530 that is fixedly coupled to the rod portion 200, particularly the hollow cylinder 240.
  • the guide rod 510 is a configuration that moves linearly together with the linear movement of the rod unit 200, and any configuration is possible as long as it can linearly move together with the linear movement of the rod unit 200.
  • the guide rod 510 is disposed in parallel with the rod unit 200 and moves linearly with the rod unit 200, thereby preventing linear movement of the rod unit 200.
  • the guide rod 510 may be installed to be linearly movable inside the main body 300 using various structures.
  • first connection part 131 and the second connection part 132 described above include a first guide through hole 350 and a second guide through hole 340 through which the guide rod 510 penetrates. Each of these can be formed.
  • guide bushes 351 and 341 may be installed in each of the first guide through hole 350 and the second guide through hole 340.
  • the guide rod 510 may be equipped with a sensor member (not shown) to confirm the moving direction of the rod unit 200.
  • the sensor member is installed on the guide rod 510 to detect upward or downward movement of the rod unit 200, and may be made of a magnet or the like.
  • the guide rod 510 may be coupled to a scale member coupling member 511 to which a scale member 431, which will be described later, is coupled.
  • the scale member coupling member 511 is a configuration to which the scale member 431, which will be described later, is coupled. By moving up and down the guide rod 510, which moves together with the rod unit 200, the scale member coupled thereto ( The vertical movement distance of the load unit 200 is measured by interaction with the 431) and the detection unit 432.
  • the detection unit 432 may be installed with a detection means for measuring the magnetic force of the sensor member.
  • the fixed connection portion 530 is fixed to the guide rod 510 and the rod portion 200, especially the hollow cylinder 240, so that the guide rod 510 moves linearly together with the linear movement of the rod portion 200.
  • various configurations are possible depending on the coupling structure between the guide rod 510 and the rod unit 200.
  • the fixed connection portion 530 has one end formed with a fitting groove 531 into which the rod portion 200 is inserted from the side, and the other end portion into which the guide rod 510 is inserted into the through hole 532. It may be composed of a block with a cutout portion 533 for fixing it with a screw 534.
  • the fixed connection part 530 may have a first buffer ring member 536 installed on the surface facing the second connection part 132 for cushioning.
  • the first buffer ring member 636 may be installed on the surface facing the second connection portion 132 by being inserted into the guide rod 510.
  • a second buffer ring member 537 close to the fixed connection portion 530 may be installed on the outer peripheral surface of the hollow cylinder 240 so as to face the first through hole 310.
  • the second buffer ring member 637 may be installed on the side of the fixed connection part 530 facing the first connection part 132 by being inserted into the hollow cylinder 240.
  • the picker according to the present invention may additionally include a linear encoder 430 for measuring the linear movement distance of the load unit 200.
  • the linear encoder 430 is a component for measuring the linear movement distance of the load unit 200, and various configurations are possible.
  • the linear encoder 430 is a magnetic linear encoder, and includes a scale member 431 fixed to one of the guide rod 510 and the main body 300; It may include a detection unit 432 that is fixed to the remaining one of the guide rod 510 and the main body 300 and detects the movement of the scale member 431.
  • the scale member 431 is fixed to either the guide rod 510 or the main body 300, and may be made of a magnetized sheet with a magnetization pattern formed in a preset pattern.
  • the detection unit 432 is fixed to the other one of the guide rod 510 and the main body 300 and detects the movement of the scale member 431, and is responsible for the linear movement of the scale member 431. It may be composed of a coil that detects electrical signals.
  • the rod unit 200 is linearly moved in its longitudinal direction by a linear driving force due to a magnetic flux action between the plurality of permanent magnets 230 and the magnetic flux change forming unit 100.
  • one or more elastic members 470 are added to the main body 300 to cushion the element 10 and apply a restoring force in one direction. ) can be installed.
  • the elastic member 470 is a component that buffers and/or applies a restoring force in one direction to the element 10 when the rod unit 200 moves linearly in the direction toward the element 10, and is used in various structures. It can be implemented by:
  • the elastic member 470 may be configured as a coil spring installed between the fixed connection part 530 and the coil block 130 into which the rod part 200 is inserted.
  • the rod unit 200 moves in the direction toward the element 10 by the magnetic flux action between the plurality of permanent magnets 230 and the magnetic flux change forming unit 100.
  • elastic deformation is allowed to alleviate the impact on the element 10.
  • the coil spring may be installed to apply elastic force in the opposite direction.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Linear Motors (AREA)

Abstract

La présente invention concerne un préhenseur monté sur un dispositif de saisie et de pose pour adsorber et transporter un élément ou similaire au moyen d'une pression négative. La présente invention propose un préhenseur comprenant : une unité de charge (200) ayant un passage d'aspiration (210) formé dans celle-ci, une pression négative étant appliquée à travers le passage d'aspiration, ayant une extrémité avec laquelle est couplée une unité d'adsorption (200) à laquelle un élément (10) est adsorbé, et ayant une pluralité d'aimants permanents (230) installés à l'intérieur de celle-ci ; et une unité de formation de variation de flux magnétique (100) pour former une variation de flux magnétique par rapport à la pluralité d'aimants permanents (230) afin de générer un mouvement linéaire de l'unité de charge (200).
PCT/KR2023/011441 2022-08-03 2023-08-03 Préhenseur WO2024029970A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020220096716A KR20240018871A (ko) 2022-08-03 2022-08-03 픽커
KR10-2022-0096716 2022-08-03

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WO2024029970A1 true WO2024029970A1 (fr) 2024-02-08

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KR (1) KR20240018871A (fr)
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120112338A (ko) * 2010-01-15 2012-10-11 맥슨 모터 아게 선형 구동장치
KR101339394B1 (ko) * 2012-07-13 2014-01-10 (주) 티피씨 메카트로닉스 픽커 및 픽커 모듈
KR20190078975A (ko) * 2017-12-27 2019-07-05 서기원 중공홀을 가지는 모듈타입 축을 구비하는 소형 엑츄에이터
KR20200114577A (ko) * 2019-03-29 2020-10-07 (주)포인트엔지니어링 미소 소자 흡착 픽커
KR102350553B1 (ko) * 2015-06-09 2022-01-14 세메스 주식회사 반도체 칩을 픽업하기 위한 피커

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120112338A (ko) * 2010-01-15 2012-10-11 맥슨 모터 아게 선형 구동장치
KR101339394B1 (ko) * 2012-07-13 2014-01-10 (주) 티피씨 메카트로닉스 픽커 및 픽커 모듈
KR102350553B1 (ko) * 2015-06-09 2022-01-14 세메스 주식회사 반도체 칩을 픽업하기 위한 피커
KR20190078975A (ko) * 2017-12-27 2019-07-05 서기원 중공홀을 가지는 모듈타입 축을 구비하는 소형 엑츄에이터
KR20200114577A (ko) * 2019-03-29 2020-10-07 (주)포인트엔지니어링 미소 소자 흡착 픽커

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