WO2024029971A1 - Dispositif de saisie - Google Patents

Dispositif de saisie Download PDF

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Publication number
WO2024029971A1
WO2024029971A1 PCT/KR2023/011444 KR2023011444W WO2024029971A1 WO 2024029971 A1 WO2024029971 A1 WO 2024029971A1 KR 2023011444 W KR2023011444 W KR 2023011444W WO 2024029971 A1 WO2024029971 A1 WO 2024029971A1
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WO
WIPO (PCT)
Prior art keywords
unit
coupled
picker
permanent magnets
suction passage
Prior art date
Application number
PCT/KR2023/011444
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English (en)
Korean (ko)
Inventor
유홍준
이용식
Original Assignee
(주)제이티
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Filing date
Publication date
Application filed by (주)제이티 filed Critical (주)제이티
Publication of WO2024029971A1 publication Critical patent/WO2024029971A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/912—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems with rectilinear movements only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles

Definitions

  • the present invention relates to a picker mounted on a pick and place device that adsorbs and transports elements, etc. by vacuum pressure.
  • a picker is a device that is generally installed in a pick and place device that picks up an element and then moves it to place it in a predetermined seating position to adsorb the element.
  • a suction passage to which vacuum pressure is applied is formed inside, and the element is adsorbed at one end.
  • a rod to which the adsorption unit is coupled and a vertical drive unit to move the rod in the vertical direction are provided.
  • the upper and lower driving unit is operated by pneumatics and consists of a cylinder that provides a space where pneumatic pressure is applied, and a piston that slides within the cylinder by pneumatic pressure. And the piston and rod of the upper and lower driving part are coupled, and as the piston slides inside the cylinder, the coupled rod moves in the vertical direction.
  • the conventional picker picks up the element by forming vacuum pressure, that is, negative pressure, on the adsorption unit when picking up the element at the pickup position, and releases the vacuum pressure on the adsorption unit to load the element at the loading position.
  • conventional pickers generally create positive pressure in the adsorption section for rapid loading of elements at the loading position.
  • the positive pressure or negative pressure on the adsorption head of the picker is formed by the pneumatic pressure transmission line.
  • the time of positive or negative pressure formation through the pneumatic pressure transmission line is determined by the length of the pneumatic pressure transmission line. There is a limit to minimizing the length of the pneumatic transmission line in order to shorten the forming time, which ultimately limits the processing speed of the device.
  • the size of the picker for device transfer becomes smaller, raising various issues such as convenience of attachment and detachment, convenience of maintenance, and increased durability.
  • the picker for transporting devices as a picker performance also provides faster movement from the pickup position to the loading position and faster device pickup and device loading. They are demanding it.
  • Patent Documents 1 and 2 are characterized in that they are linearly driven by a linear driving force generated by the application of electricity.
  • Patent Documents 1 and 2 are relatively large in size when configured for linear driving, so there is a limit to minimizing the size.
  • Patent Document 1 KR 10-1754627 B1
  • Patent Document 2 KR 10-2016-0110244 A
  • the purpose of the present invention is to provide a picker with a structure that can minimize the linear movement structure for linear driving of the load for element pickup, in order to solve the problems of the prior art described above.
  • the present invention was created to achieve the object of the present invention as described above, and the present invention is to form a suction passage 210 on the inside of which vacuum pressure is applied, and an adsorption portion 220 at one end of which the element 10 is adsorbed. ) is coupled and a load portion 200 on which a plurality of permanent magnets 230 are installed; a magnetic flux change forming unit 100 that drives linear movement of the load unit 200 by forming a magnetic flux change with respect to the plurality of permanent magnets 230;
  • the direction in which the adsorption unit 220 is coupled is assumed to be forward, one or more moving blocks are fixedly coupled to at least one of the front and rear of the rod unit 200 in a state of being coupled to the magnetic flux change forming unit 100.
  • a picker is disclosed that is coupled to the moving blocks (250, 260) and includes guide rails (350, 360) that guide linear movement of the rod unit (200) in the longitudinal direction.
  • the rod unit 200 includes a hollow cylinder 240 to which the adsorption unit 220 is coupled at one end and forms a part of the suction passage 210, and the two or more permanent magnets 230 are, It may be composed of a hollow permanent magnet that is sequentially coupled to the other end of the hollow cylinder 240 and forms the suction passage 210 together with the hollow cylinder 240.
  • the rod unit 200 is installed on at least one end of the plurality of permanent magnets 230 and forms the suction passage 210 together with the plurality of permanent magnets 230. 251, 252) may be additionally included.
  • the suction passage forming portions 251 and 252 are formed between the first suction passage forming portion 251 inserted from the side to which the adsorption portion 220 is coupled, and the plurality of permanent magnets 230. It may include a second suction passage forming portion 252 that is inserted from the side opposite to the suction passage forming portion 251 and fixes the plurality of permanent magnets 230 together with the first suction passage forming portion 251. .
  • It may include a main body portion 300 to which the magnetic flux change forming portion 100 and the guide rails 350 and 360 are fixedly coupled.
  • the main body 300 is provided with a pneumatic tube connection part 421 to which a pneumatic transmission tube for transmitting vacuum pressure from the outside is coupled, and the rod part 200 is a flexible tube connected to the pneumatic tube connection part 421. Vacuum pressure can be transmitted through the pipe 420.
  • the magnetic flux change forming unit 100 is installed adjacent to the permanent magnet 230 and generates a linear driving force for the rod unit 200 by interacting with the permanent magnet 230 by applying electricity. It may include some (110).
  • the coil unit 110 may include a bobbin 111 having an inner peripheral surface spaced apart from the outer peripheral surface of the plurality of permanent magnets 230, and a winding coil 112 wound around the bobbin 111.
  • the coil unit 110 may include a coil block 130 coupled to the main body 300 and forming an insertion hole into which the bobbin 111 on which the winding coil 112 is wound is inserted.
  • the coil block 130 may be formed with an installation groove 138 in which a coil control PCB 139 for controlling the winding coil 112 is installed parallel to the installation direction of the load unit 200. there is.
  • a linear encoder 430 for measuring the linear movement distance of the load unit 200, and the linear encoder 430 is connected to any one of the moving blocks 250 and 260 and the main body 300.
  • a fixed scale member 431 may include a detection unit 432 that is fixed to the remaining one of the moving blocks 250 and 260 and the main body 300 and detects the movement of the scale member 431.
  • the picker according to the present invention has the advantage of minimizing the size by integrally combining the permanent magnet with the rod in a linear movement configuration consisting of a coil and a permanent magnet, and further minimizing its own weight to facilitate its drive control. .
  • the picker according to the present invention in guiding the vertical movement of the rod, is configured to move linearly by combining it with a moving block and a guide rail that guides the linear movement, thereby enabling more precise linear movement and picking up and carrying out high-load members. It has the advantage of being portable.
  • FIG. 1 is a perspective view showing a picker according to the present invention.
  • FIG. 2 is a longitudinal cross-sectional view of the picker of FIG. 1.
  • Figure 3 is an enlarged cross-sectional view of portion A in Figure 2.
  • Figure 4 is an enlarged cross-sectional view of part B in Figure 2.
  • Figure 5 is an enlarged cross-sectional view of part C in Figure 2.
  • FIG. 6 is a longitudinal cross-sectional view showing the coil portion of the picker of FIG. 1.
  • FIG. 7 is a cross-sectional view of the coil portion of FIG. 6.
  • Figure 8 is a plan view showing the main body and guide rail of the picker of Figure 1.
  • FIG. 9 is a cross-sectional view taken in the direction IX-IX in FIG. 8.
  • the picker according to the present invention has a suction passage 210 on which vacuum pressure is applied, and an adsorption portion 220 on which the element 10 is adsorbed is attached to one end.
  • the direction in which the adsorption unit 220 is coupled is assumed to be forward, one or more moving blocks 250 and 260 are fixedly coupled to at least one of the front and rear of the rod unit 200; It includes guide rails (350, 360) that are coupled to the moving blocks (250, 260) and guide linear movement of the rod unit (200) in the longitudinal direction.
  • the rod unit 200 has a suction passage 210 on which vacuum pressure is applied, an adsorption unit 220 to which the element 10 is adsorbed is formed at one end, and a plurality of permanent magnets 230 are installed.
  • a suction passage 210 on which vacuum pressure is applied
  • an adsorption unit 220 to which the element 10 is adsorbed is formed at one end
  • a plurality of permanent magnets 230 are installed.
  • Various configurations are possible.
  • the rod unit 200 is equipped with an adsorption unit 220 coupled to one end and a flexible pipe 420 coupled to the other end, and a plurality of permanent magnets 230 installed inside along the longitudinal direction. It may include a hollow cylinder 240.
  • the hollow cylinder 240 is configured to have the suction part 220 coupled to one end and the flexible pipe 420 to the other end, and various configurations are possible.
  • the hollow cylinder 240 may be made of various materials such as metal materials such as stainless steel or engineering plastic.
  • the hollow cylinder 240 has various structures such as a step structure and a thin tube so that the plurality of permanent magnets 230 can be located at a position corresponding to the magnetic flux change forming portion 100. Permanent magnets 230 may be installed inside.
  • the plurality of permanent magnets 230 are installed at a position corresponding to the magnetic flux change forming part 100 inside the hollow cylinder 240, and are hollow so as to form a part of the suction passage 210. It can have a structure.
  • the plurality of permanent magnets 230 may have a cylindrical shape that is closely installed on the inner peripheral surface of the hollow cylinder 240.
  • the installed number of the plurality of permanent magnets 230 can be appropriately selected according to the linear movement distance of the load unit 200, linear driving force, etc.
  • the plurality of permanent magnets 230 are sequentially arranged with different magnetic poles along the longitudinal direction, and the length of the rod portion 200 is changed by the mutual magnetic flux action of the magnetic flux change forming portion 100 installed on the outer circumference side.
  • Direction that is, a linear driving force in the Z-axis direction can be generated.
  • permanent magnets having different polarities may be integrally joined through an adhesive.
  • At least one of the inner and outer peripheral surfaces may be structurally reinforced with a film (not shown) made of a carbon sheet or the like.
  • the rod unit 200 is installed on at least one end of the plurality of permanent magnets 230 and forms the suction passage 210 together with the plurality of permanent magnets 230.
  • Units 251 and 252 may additionally be included.
  • the suction passage forming parts 251 and 252 are installed on at least one end of the plurality of permanent magnets 230 and form the suction passage 210 together with the plurality of permanent magnets 230.
  • it may be made of various materials such as metal and plastic.
  • the suction passage forming portions 251 and 252 form the suction passage 210 together with the plurality of permanent magnets 230 of the hollow structure when the plurality of permanent magnets 230 have a hollow structure. It can have a hollow pipe structure to do this.
  • suction passage forming portions 251 and 252 are formed between the first suction passage forming portion 251 inserted from the side to which the adsorption portion 220 is coupled, and the plurality of permanent magnets 230. It may include a second suction passage forming portion 252 that is inserted from the side opposite to the first suction passage forming portion 251 and fixes the plurality of permanent magnets 230 together with the first suction passage forming portion 251. there is.
  • the first suction passage forming portion 251 is a component that is inserted from the side to which the adsorption portion 220 is coupled to form a suction passage 210 connected to the plurality of permanent magnets 230. It may have a cylindrical shape formed in the longitudinal direction corresponding to the cylindrical shape of the permanent magnet 230.
  • the second suction passage forming portion 252 is inserted from the side opposite to the first suction passage forming portion 251 with the plurality of permanent magnets 230 in between, thereby forming the first suction passage forming portion 251.
  • a configuration for fixing the plurality of permanent magnets 230 various configurations are possible depending on the fixing structure of the permanent magnets 230.
  • the second suction passage forming portion 252 is a component that forms the suction passage 210 connected to the plurality of permanent magnets 230, and is formed in the cylindrical shape of the plurality of permanent magnets 230. It may have a cylindrical shape correspondingly formed in the longitudinal direction.
  • one end of the second suction passage forming portion 252 is in close contact with the permanent magnet 230, and the other end may be coupled with a pipe connection member 253 for connection to the flexible pipe 420.
  • the pipe connection member 253 is a component that is coupled to one end of the rod portion 200 and the flexible pipe 420, and may be configured as a member for connecting a general pipe.
  • the pipe connecting member 253 when the pipe connecting member 253 is coupled with the flexible pipe 420, it interferes with the second moving block 260, which will be described later, rather than being coupled in the longitudinal direction of the rod portion 200.
  • the rod unit 200 be coupled to the flexible pipe 420 perpendicular to its longitudinal direction, particularly in a vertical direction opposite to the second guide rail 360, which will be described later.
  • the pipe connection member 253 may have a coupling portion 429 coupled to the flexible pipe 420 protruding in a vertical direction opposite to the second guide rail 360, which will be described later.
  • the rod unit 200 is installed to be movable in the Z-axis direction while coupled to the main body unit 300, which will be described later.
  • the main body portion 300 may have a thin rectangular parallelepiped structure so that the rod portion 200 can be installed to enable linear movement, and the rod portion 200 may be oriented in the longitudinal direction to enable linear movement.
  • Penetrating holes 310 may be formed at intervals.
  • the through holes 310 are formed at intervals in the longitudinal direction so that the rod portion 200 can move linearly, and are spaced at appropriate intervals to support the linear movement distance and outer circumferential surface of the rod portion 200. can be formed.
  • the through hole 310 may be provided with a sleeve bearing 311 supporting the outer peripheral surface of the rod unit 200, that is, the outer peripheral surface of the hollow cylinder 240, to enable stable linear movement of the rod unit 200. there is.
  • the sleeve bearing 311 is a member installed in the through hole 310 for stable movement of the hollow cylinder 240, and can have various configurations.
  • the adsorption unit 220 is coupled to one end of the rod unit 200 and is a component that picks up the element 10 by vacuum pressure formed in the suction passage 210, and the pickup target is depending on the element 10.
  • Various configurations are possible.
  • the magnetic flux change forming unit 100 is a component that drives linear movement of the load unit 200 by forming a magnetic flux change with respect to the plurality of permanent magnets 230, and various configurations are possible.
  • the magnetic flux change forming unit 100 is installed adjacent to the permanent magnet 230 and generates a linear driving force for the rod unit 200 by interacting with the permanent magnet 230 by applying electricity. It may include a coil unit 110 that generates electricity.
  • the coil unit 110 is a component that generates a magnetic flux change by applying electricity and linearly moves the plurality of permanent magnets 230 according to the magnetic flux change, depending on the longitudinal arrangement and linear movement method of the permanent magnets 230. Therefore, various configurations are possible.
  • the coil unit 110 includes a bobbin 111 having an inner peripheral surface spaced apart from the external peripheral surface of the rod unit 200, particularly the plurality of permanent magnets 230, and a coil wound around the bobbin 111. It may be composed of a winding coil 112.
  • the bobbin 111 is a structure in which a winding coil 112, that is, a copper wire, is wound, and various configurations are possible depending on the winding method of the winding coil 112.
  • the bobbin 111 includes a winding part 111a that has a cylindrical shape so that the rod part 200 described above can be installed through it, and a flange part extending radially from both ends of the winding part 111a. It may be composed of (111b).
  • the winding coil 112 is a component that generates magnetic flux changes by power applied by the coil control PCB 139, which will be described later, and generates a linear driving force through mutual magnetic action with the permanent magnet 230. It can be wound by various winding methods.
  • a coil control PCB 139 for controlling the winding coil 112 may be arranged parallel to the installation direction of the load unit 200, and in this case, the coil block 130 is the coil control PCB ( An installation groove 138 may be formed for installation of 139).
  • the installation groove 138 may have a thin cross-sectional shape corresponding to the shape.
  • the coil control PCB 139 is a component for electrical connection to the winding coil 112 and for supplying power to each winding coil 111 when it is composed of a plurality of winding coils 111, and various configurations are possible.
  • the coil control PCB 139 may be installed for electrical connection to each winding coil 111.
  • the coil unit 110 may be formed integrally with the main body 300, which will be described later, or may be detachably coupled to the main body 300 to form a single rectangular parallelepiped.
  • the coil unit 110 may include a coil block 130 in which an insertion hole 137 is formed into which the bobbin 111 on which the winding coil 112 is wound is inserted.
  • the coil block 130 is a block in which an insertion hole is formed into which the bobbin 111 on which the winding coil 112 is wound is inserted, and various configurations are possible depending on the coupling structure of the main body 300.
  • the coil block 130 has a cross-sectional shape corresponding to the cross-section inner peripheral surface of the main body 300, considering the shape and internal shape of the main body 300 having a thin rectangular shape, for example, As shown in FIG. 7, it may have a rectangular shape.
  • the structure of the picker can be simplified by combining the main body 300 and the coil block 130.
  • a main PCB 136 for receiving power supply and control signals from the outside may be coupled to one side of the coil block 130.
  • the main PCB 136 is coupled to one side of the coil block 130 to receive power from the outside and receive control signals, and various configurations are possible.
  • main PCB 136 may be installed with a part of the linear encoder 430 for detecting the linear movement distance and direction of the load unit 200, for example, a detection unit 432.
  • the main PCB 136 is connected to an external control device such as a power supply terminal 135a, a control signal reception terminal 135b, and a detection and transmission terminal 135c of the movement details (distance, direction) of the load unit 200.
  • an external control device such as a power supply terminal 135a, a control signal reception terminal 135b, and a detection and transmission terminal 135c of the movement details (distance, direction) of the load unit 200.
  • Multiple terminals can be installed for connection
  • the terminals may be configured in shape, size, and color so that the user can easily identify them.
  • the picker according to the present invention includes a main body portion 300 to which the magnetic flux change forming portion 100 and the guide rails 350 and 360 are fixedly coupled.
  • the main body part 300 is a structure to which the magnetic flux change forming part 100 is fixedly coupled and guides the rod part 200 to enable linear movement in its longitudinal direction, and is used for linear movement guides and transfer tools, etc.
  • Various configurations are possible depending on the bonding structure.
  • the main body portion 300 has a coupling side 301 coupled to a structure such as a transfer tool (not shown), an opposing side 302 opposite the coupling side 301, and the rod portion 200 described above.
  • a body block 370 having a lower side 303 with a through hole 310 penetrating therethrough, an upper side 304 opposite the lower side 303, an upper surface of the side body portion 360, and It may be composed of one or more covering parts 380 that are coupled to at least one of the bottom surfaces and cover the interior.
  • the main body portion 300 is combined with the magnetic flux change forming portion 100 described above, and its overall shape forms a rectangular parallelepiped, and various configurations are possible, such as being composed of one or more blocks.
  • the portion of the rod portion 200 to which the adsorption portion 220 is coupled is exposed through the through hole 310 on the lower side 303, and a pneumatic pipe connection portion 421 to be described later. ) may be installed on the upper side 304 and the interior may be configured to be sealed.
  • the main body portion 300 may be hermetically coupled with a sealing member interposed between the coupling structure of the main body portion 300 itself and the coil block 130.
  • the main body portion 300 may be formed by processing with one of the upper and lower surfaces covered so that a portion of the upper and lower sides is exposed when forming the side body portion.
  • the main body portion 300 is provided with a pneumatic pipe connection portion 421 to which a pneumatic transmission pipe for transmitting vacuum pressure from the outside is coupled, and the rod portion 200 is connected to the pneumatic pipe connection portion 421. It can be configured to receive vacuum pressure through the flexible pipe 420.
  • the picker having the above configuration minimizes the movement of the pneumatic transmission pipe by embedding the flexible piping 420, which bends when the rod portion 200 moves up and down, in the main body portion 300. Shanghai movement can be performed more smoothly.
  • the pneumatic pressure transmission pipe is affected by the vertical movement of the rod unit 200, and the deformation of the pneumatic transmission pipe increases, which may interfere with the vertical movement of the rod unit 200. .
  • the picker having the above configuration minimizes the movement of the pneumatic transmission pipe by embedding the flexible pipe 420, which bends when the rod portion 200 moves up and down, in the main body portion 300 and adjusts the pitch. By only horizontal movement, the up and down movement of the load unit 200 can be performed more smoothly.
  • the main body portion 300 preferably has an installation space (AS) formed between the coil portion 100 and the upper side 304 for installation of the flexible pipe 420.
  • AS installation space
  • the installation space (AS) is a space provided in the main body 300 for installation of the flexible pipe 420 between the coil unit 100 and the upper side 304 and can be formed by various structures. .
  • the moving blocks 250 and 260 are fixedly coupled to at least one of the front and rear of the rod unit 200, assuming that the direction in which the suction unit 220 is coupled is forward. 200) Various configurations are possible depending on the combination structure.
  • the moving blocks 250 and 260 are a first moving block 250 installed on the front side of the coil unit 100 for stable movement of the rod unit 200, and a rear of the coil unit 100. It may include a second moving block 260 installed on the side.
  • the first movable block 250 and the second movable block 260 may be the same or different from each other depending on the coupling position with respect to the load unit 200, and it is preferable that they have the same structure for productivity.
  • first moving block 250 and the second moving block 260 are coupled to guide rails 350 and 360, which will be described later, and are moved along the guide rails 350 and 360.
  • a guide block 271 ), and a coupling block ( 272) may be included.
  • guide block 271 and the coupling block 272 have been described as separate members, but of course they can be formed as one block depending on the structure.
  • the guide block 271 is coupled to the guide rails 350 and 360, which will be described later, and moves along the guide rails 350 and 360, and has various configurations depending on the coupling structure with the guide rails 350 and 360. This is possible.
  • the guide block 271 may be configured as part of a linear guide structure presented in a general machine parts list.
  • the coupling block 272 is fixedly coupled to the rod unit 200 and is also fixedly coupled to the guide block 271 to prevent the linear movement of the rod unit 200 when the rod unit 200 moves linearly.
  • a guiding configuration various configurations are possible depending on the coupling structure with the rod unit 200.
  • the coupling block 272 may have various structures, such as a clamping structure that is firmly coupled to the rod portion 200 by being tightened by a bolt 273 after the rod portion 200 is inserted.
  • the guide rails (350, 360) are combined with the moving blocks (250, 260) to guide the longitudinal linear movement of the rod unit (200), and determine the position of the moving blocks (250, 260). and is installed in correspondence with the structure.
  • the guide rails 350 and 360 include a first guide rail 350 installed on the front side of the coil unit 100 corresponding to the first moving block 250, and the second moving block ( 260), and may include a second guide rail 260 installed on the rear side of the coil unit 100.
  • the stable coupling of the moving blocks 250, 260 and the second guide rail 260 that guides their movement and the linear movement guide ensure the stability of the rod unit 200 coupled to the moving blocks 250, 260. Linear movement becomes possible.
  • the picker according to the present invention may additionally include a linear encoder 430 for measuring the linear movement distance of the load unit 200.
  • the linear encoder 430 is a component for measuring the linear movement distance of the load unit 200, and various configurations are possible.
  • the linear encoder 430 is a magnetic linear encoder, and includes a scale member 431 fixed to one of the moving blocks 250 and 260 and the main body 300; It may include a detection unit 432 that is fixed to the remaining one of the moving blocks 250 and 260 and the main body 300 and detects the movement of the scale member 431.
  • the scale member 431 is a component fixed to one of the moving blocks 250 and 260, for example, the second moving block 260 and the main body 300, and has a magnetization pattern in a preset pattern. It may be composed of this formed magnetized sheet.
  • the moving blocks 250 and 260 may be coupled to the scale member coupling member 511 to which the scale member 431 is coupled.
  • the scale member coupling member 511 is a configuration to which the scale member 431 is coupled, and includes a plate-shaped portion coupled to the bottom of the scale member 431, and a guide rod ( As the vertical movement of 510 is performed, the vertical movement distance of the load unit 200 is measured by interaction with the scale member 431 and the detection unit 432 coupled thereto.
  • the detection unit 432 is fixed to the remaining one of the moving blocks 250 and 260, for example, the second moving block 260 and the main body 300, and detects the movement of the scale member 431.
  • it may be composed of a coil that detects an electric signal according to the linear movement of the scale member 431.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Linear Motors (AREA)

Abstract

La présente invention concerne un dispositif de saisie monté sur un dispositif de saisie et de mise en place qui aspire un élément, etc, à l'aide d'une dépression et transporte celui-ci. Est divulgué ici un dispositif de saisie caractérisé en ce qu'il comprend : une partie tige (200) ayant en son sein un passage d'aspiration (210) à travers lequel est appliquée une dépression, et comprenant, accouplée à une extrémité, une partie d'adsorption (220) au niveau de laquelle un élément (10) est aspiré, une pluralité d'aimants permanents (230) étant installés sur la partie tige ; une partie de formation de variation de flux magnétique (100) qui génère une variation de flux magnétique dans la pluralité d'aimants permanents (230) et entraîne un mouvement linéaire de la partie tige (200) ; un ou plusieurs blocs de mouvement (250, 260) qui sont accouplés à demeure à l'avant et/ou à l'arrière de la partie tige (200), l'avant étant la direction dans laquelle est accouplée la partie d'adsorption (220) ; et des rails de guidage (350, 360) qui sont accouplés aux blocs de mouvement (250, 260) et guident le mouvement linéaire de la partie tige (200) dans la direction longitudinale.
PCT/KR2023/011444 2022-08-03 2023-08-03 Dispositif de saisie WO2024029971A1 (fr)

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KR10-2022-0096717 2022-08-03

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120112338A (ko) * 2010-01-15 2012-10-11 맥슨 모터 아게 선형 구동장치
KR101339394B1 (ko) * 2012-07-13 2014-01-10 (주) 티피씨 메카트로닉스 픽커 및 픽커 모듈
KR20190078975A (ko) * 2017-12-27 2019-07-05 서기원 중공홀을 가지는 모듈타입 축을 구비하는 소형 엑츄에이터
KR20200114577A (ko) * 2019-03-29 2020-10-07 (주)포인트엔지니어링 미소 소자 흡착 픽커
KR102350553B1 (ko) * 2015-06-09 2022-01-14 세메스 주식회사 반도체 칩을 픽업하기 위한 피커

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120112338A (ko) * 2010-01-15 2012-10-11 맥슨 모터 아게 선형 구동장치
KR101339394B1 (ko) * 2012-07-13 2014-01-10 (주) 티피씨 메카트로닉스 픽커 및 픽커 모듈
KR102350553B1 (ko) * 2015-06-09 2022-01-14 세메스 주식회사 반도체 칩을 픽업하기 위한 피커
KR20190078975A (ko) * 2017-12-27 2019-07-05 서기원 중공홀을 가지는 모듈타입 축을 구비하는 소형 엑츄에이터
KR20200114577A (ko) * 2019-03-29 2020-10-07 (주)포인트엔지니어링 미소 소자 흡착 픽커

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