WO2024004677A1 - 半導体レーザ素子 - Google Patents

半導体レーザ素子 Download PDF

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Publication number
WO2024004677A1
WO2024004677A1 PCT/JP2023/022238 JP2023022238W WO2024004677A1 WO 2024004677 A1 WO2024004677 A1 WO 2024004677A1 JP 2023022238 W JP2023022238 W JP 2023022238W WO 2024004677 A1 WO2024004677 A1 WO 2024004677A1
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Prior art keywords
face
reflectance
film
semiconductor
semiconductor laser
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English (en)
French (fr)
Japanese (ja)
Inventor
篤範 持田
啓 大野
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Panasonic Holdings Corp
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Panasonic Holdings Corp
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Priority to JP2024530686A priority Critical patent/JPWO2024004677A1/ja
Publication of WO2024004677A1 publication Critical patent/WO2024004677A1/ja
Priority to US18/983,467 priority patent/US20250118946A1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
    • H01S5/0287—Facet reflectivity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/02208—Mountings; Housings characterised by the shape of the housings
    • H01S5/02212—Can-type, e.g. TO-CAN housings with emission along or parallel to symmetry axis
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure

Definitions

  • the present disclosure relates to a semiconductor laser device.
  • Laser processing technology is one of the processing technologies for processing materials such as metal, wood, and synthetic resin.
  • higher output laser light is required.
  • a method for increasing the output of laser light and realizing a narrow beam a method has been proposed that uses a semiconductor laser element (so-called laser array element) having a plurality of light emitting points as a light source.
  • a combining optical system is constructed to combine a plurality of laser beams from a semiconductor laser element, and an external resonator is formed by the semiconductor laser element and a mirror placed apart from the semiconductor laser element.
  • an external resonator type laser device for example, in order to increase the resonance efficiency of the laser light by the external resonator, it is important to suppress the resonance of the laser light (so-called internal resonance) within the semiconductor laser element. Therefore, in a semiconductor laser element used in an external cavity type laser device, it is required to realize a low reflectance at the end facet on the laser beam emission side and to maintain the low reflectance for a long period of time.
  • Patent Document 1 discloses a multi-wavelength semiconductor laser that includes a plurality of edge-emitting semiconductor light emitting sections that emit light at different wavelengths.
  • a semiconductor laser device includes a semiconductor laminated body that emits laser light, and a first end face that is disposed on a laser beam emitting side end face of the semiconductor laminated body and from which the laser light is emitted. a side protective layer, and a non-emission side protective layer that is disposed on a non-emission side end face opposite to the laser beam emitting side end face of the semiconductor laminate and reflects the laser beam, and a non-emission side protective layer that reflects the laser beam;
  • the reflectance at the oscillation wavelength of the laser beam in the emission-side protective layer before the silicon-containing oxide is attached is the reflectance of the laser beam in the emission-side protection layer after the oxide is attached to the first end surface. higher than the reflectance at the oscillation wavelength.
  • a laser device includes a semiconductor stack that emits a laser beam, and an output side that is disposed on a laser beam output side end face of the semiconductor stack and has a first end face from which the laser beam is output. a protective layer; and a non-emission side protective layer that is disposed on a non-emission side end face opposite to the laser beam emitting side end face of the semiconductor laminate and reflects the laser beam, and silicon is provided on the first end face.
  • the reflectance at the oscillation wavelength of the laser beam in the emission-side protective layer before the oxide is attached to the emission-side protective layer is the reflectance at the oscillation wavelength of the laser beam in the emission-side protection layer after the oxide is attached to the first end surface.
  • the semiconductor laser device includes a semiconductor laser element having a reflectance higher than the reflectance at the wavelength, an intake port and an exhaust port, a housing portion that accommodates the semiconductor laser device, and a filter provided at the intake port that adsorbs siloxane.
  • a schematic cross-sectional view showing a configuration example of a semiconductor laser device according to a first embodiment Graph showing the wavelength dependence of the end face reflectance of the semiconductor laser device according to the first embodiment
  • Graph showing the wavelength dependence of the end face reflectance of a semiconductor laser device Diagram showing an example of the relationship between front end face reflectance and operating current value
  • Diagram showing an example of the configuration of an optical system equipped with a semiconductor laser element A schematic cross-sectional view showing a configuration example of a semiconductor laser device according to a second embodiment Graph showing the wavelength dependence of the end face reflectance of the semiconductor laser device according to the second embodiment Graph showing the wavelength dependence of the end face reflectance of the semiconductor laser device according to the second embodiment Graph showing the wavelength dependence of the end face reflectance of the semiconductor laser device according to the third embodiment Graph showing the wavelength dependence of the end face reflectance of the semiconductor laser device according to the third embodiment Graph showing the wavelength dependence of the end face reflectance of the semiconductor laser device according to the fourth embodiment Graph showing the wavelength dependence of the end face reflectance of the semiconductor laser device according to the fourth embodiment
  • SiO x derived from siloxane contained in the atmosphere may be deposited on the laser beam output side end face of the semiconductor laser element due to laser beam emission.
  • SiO x When SiO x is deposited, the reflectance of the emission side end face of the semiconductor laser device changes, and it may not be possible to maintain a low reflectance.
  • Non-limiting embodiments of the present disclosure contribute to providing a semiconductor laser device that can maintain low reflectance over a long period of time.
  • the terms “upper” and “lower” do not refer to the upper direction (vertically upward) or the lower direction (vertically downward) in absolute spatial recognition, but are based on the stacking order in the stacked structure. Used as a term defined by the relative positional relationship. Additionally, the terms “upper” and “lower” are used not only when two components are spaced apart and there is another component between them; This also applies when they are placed in contact with each other.
  • a combining optical system is constructed to combine a plurality of laser beams emitted from a semiconductor laser element.
  • Methods for synthesizing multiple laser beams include, for example, a spatial synthesis method that spatially synthesizes multiple laser beams, and a wavelength synthesis method that focuses multiple laser beams with different wavelengths onto the same optical axis. be.
  • a wavelength combining method that focuses multiple laser beams on the same optical axis is better than a spatial combining method in which multiple optical axes are different from each other. is preferred.
  • a laser array element can be used as a semiconductor laser element to generate laser beams of a plurality of different wavelengths.
  • a plurality of laser array elements may be used to generate more laser light.
  • a laser array element may also be referred to as a semiconductor laser array element.
  • FIG. 1 is a schematic cross-sectional view showing a configuration example of a semiconductor laser device 2 according to the first embodiment.
  • FIG. 1 shows a cross section of a semiconductor stack 50 included in the semiconductor laser element 2 along the stacking direction (vertical direction in FIG. 1) and the resonance direction of laser light (horizontal direction in FIG. 1).
  • the semiconductor laser device 2 includes a semiconductor stack 50, an end face protection film 1F, an end face protection film 1R, a first electrode 56, and a second electrode 57.
  • the side of the end face protection film 1F from which the laser light of the semiconductor laser element 2 is emitted may be referred to as the "front side", and the side of the end face protection film 1R opposite to the end face protection film 1F may be referred to as the "rear side”. be.
  • the semiconductor laser element 2 is a semiconductor light emitting element that emits a plurality of laser beams.
  • the semiconductor laser element 2 is, for example, a semiconductor laser element that outputs blue laser light in the 390 nm to 480 nm band, or a semiconductor laser element that outputs green laser light in the 480 nm to 530 nm band.
  • the laser beam is output from the front end face of the end face protection film 1F.
  • the semiconductor laser device 2 may be called a laser array device or a laser bar.
  • SiO x derived from siloxane is deposited on the front side end face protection film 1F due to the operation of the semiconductor laser (laser light emission).
  • the semiconductor laser laser light emission
  • the energy of the laser light is high, so low-molecular-weight siloxane floating in the air reacts with oxygen through a photochemical reaction caused by the laser light, and is deposited in the form of SiO x . do.
  • SiO x may be deposited with green laser light as well.
  • the semiconductor laminated body 50 is a laminated body in which a plurality of semiconductor layers constituting the semiconductor laser element 2 are laminated. As shown in FIG. 1, the semiconductor stack 50 has a resonator end face 50F and a resonator end face 50R facing the resonator end face 50F. An end face protective film 1F and an end face protective film 1R are arranged on the resonator end face 50F and the resonator end face 50R, respectively.
  • the semiconductor stack 50 includes a substrate 51, a first semiconductor layer 52, an active layer 53, a second semiconductor layer 54, and a contact layer 55.
  • the semiconductor stack 50 is made of, for example, a gallium nitride-based material.
  • the semiconductor laser element 2 can emit laser light in a wavelength range of about 390 nm or more and 530 nm or less, for example.
  • the substrate 51 is a plate-like member that becomes the base material of the semiconductor stack 50.
  • the substrate 51 is, for example, a GaN single crystal substrate with a thickness of about 100 ⁇ m.
  • the thickness of the substrate 51 is not limited to 100 ⁇ m, and may be, for example, 50 ⁇ m or more and 120 ⁇ m or less.
  • the material forming the substrate 51 is not limited to GaN single crystal, but may be sapphire, SiC, GaAs, InP, Si, or the like.
  • the first semiconductor layer 52 is a first conductivity type semiconductor layer disposed above the substrate 51.
  • the first semiconductor layer 52 is an n-type semiconductor layer disposed on one main surface of the substrate 51, and includes an n-type cladding layer.
  • the n-type cladding layer is a layer made of n-Al 0.2 Ga 0.8 N and has a thickness of 1 ⁇ m.
  • the configuration of the n-type cladding layer is not limited to this.
  • the thickness of the n-type cladding layer may be 0.5 ⁇ m or more, and the composition may be n-Al x Ga 1-x N (0 ⁇ x ⁇ 1).
  • an n-type Al x In y Ga 1-x-y N (0 ⁇ x+y ⁇ 1) guide layer and an undoped Al x In y Ga 1-x-y N (0 ⁇ x+y ⁇ 1) A guide layer may be provided.
  • the active layer 53 is a light emitting layer disposed above the first semiconductor layer 52.
  • the active layer 53 is, for example, a quantum well active layer in which 5 nm thick well layers made of In 0.18 Ga 0.82 N and 10 nm thick barrier layers made of GaN are alternately laminated. It has a well layer of layers. By including such an active layer 53, the semiconductor laser element 2 can emit blue laser light with a wavelength of about 440 nm.
  • the configuration of the active layer 53 is not limited to this, but includes a well layer made of In x Ga 1-x N (0 ⁇ x ⁇ 1) and a well layer made of Al x In y Ga 1-x-y N (0 ⁇ x+y ⁇ 1). ) may be used as long as it is a quantum well active layer in which barrier layers consisting of
  • the active layer 53 may include a guide layer formed above or below the quantum well active layer.
  • the number of well layers is two, but the number may be one or more and four or less.
  • the In composition of the well layer may be appropriately selected so as to generate light of a desired wavelength from 390 nm to 530 nm.
  • the second semiconductor layer 54 is a second conductivity type semiconductor layer disposed above the active layer 53.
  • the second conductivity type is a conductivity type different from the first conductivity type.
  • the second semiconductor layer 54 is a p-type semiconductor layer and includes a p-type cladding layer.
  • the p-type cladding layer is, for example, a superlattice layer in which 100 3-nm-thick layers made of p-Al 0.2 Ga 0.8 N and 100 3-nm-thick layers made of GaN are stacked alternately. be.
  • the structure of the p-type cladding layer is not limited to this, and may be a layer made of Al x Ga 1-x N (0 ⁇ x ⁇ 1) and having a thickness of 0.3 ⁇ m or more and 1 ⁇ m or less.
  • the p-type cladding layer may be a bulk cladding layer made of Al x Ga 1-x N (0 ⁇ x ⁇ 1) instead of a superlattice layer.
  • the p-type cladding layer may have a structure including a plurality of layers of Al x Ga 1-x N (0 ⁇ x ⁇ 1) having different Al compositions.
  • the p-type cladding layer may be made of a material other than AlGaN that has a refractive index suitable for confining light in the active layer 53.
  • the p-type cladding layer is formed of a transparent dielectric oxide film, such as an ITO film, In 2 O 3 , Ga 2 O 3 , SnO, or InGaO 3 , which is a layer that absorbs little light at the laser oscillation wavelength. It's okay.
  • a p-type Al x In y Ga 1-x-y N (0 ⁇ x+y ⁇ 1) guide layer and an undoped Al x In y Ga 1-x-y N (0 ⁇ x+y ⁇ 1) A plurality of guide layers may be provided.
  • the contact layer 55 is a second conductivity type semiconductor layer that makes ohmic contact with the second electrode 57 .
  • the contact layer 55 is, for example, a p-type semiconductor layer, and is a layer made of p-GaN and has a thickness of 10 nm.
  • the contact layer 55 may be, for example, a layer made of p-In x Ga 1-x N (0 ⁇ x ⁇ 1).
  • the structure of the contact layer 55 is not limited to these.
  • the thickness of the contact layer 55 may be 5 nm or more.
  • One or more ridge portions are formed in the second semiconductor layer 54 and the contact layer 55.
  • a region of the active layer 53 corresponding to each ridge portion (a region of the active layer 53 located below each ridge portion) serves as a light emitting point, and laser light is emitted.
  • the semiconductor laser device 2 has a plurality of ridge portions, a plurality of active layers corresponding to the plurality of ridge portions serve as light emitting points, and laser light is emitted from each light emitting point.
  • the first electrode 56 is an electrode arranged on the lower main surface of the substrate 51 (the main surface on which the first semiconductor layer 52 etc. are not arranged).
  • the first electrode 56 is a laminated film in which Ti, Pt, and Au are laminated in order from the substrate 51 side.
  • the configuration of the first electrode 56 is not limited to this.
  • the first electrode 56 may be a laminated film in which Ti and Au are laminated.
  • the second electrode 57 is an electrode placed on the contact layer 55.
  • the second electrode 57 includes, for example, a p-side electrode in ohmic contact with the contact layer 55, and a pad electrode disposed on the p-side electrode.
  • the p-side electrode is a laminated film in which Pd and Pt are laminated in order from the contact layer 55 side.
  • the configuration of the p-side electrode is not limited to this.
  • the p-side electrode may be a single layer film or a multilayer film formed of at least one of Cr, Ti, Ni, Pd, Pt, and Au, for example.
  • a transparent oxide electrode such as an ITO film, In 2 O 3 , Ga 2 O 3 , SnO, InGaO 3 or the like may be used.
  • the pad electrode is a pad-shaped electrode placed above the p-side electrode.
  • the pad electrode is, for example, a laminated film in which Ti and Au are laminated in order from the p-side electrode side, and is arranged in and around the ridge portion.
  • the structure of the pad electrode is not limited to this, for example, it may be made of only Au, or may be a laminated film of Ti, Pt, and Au, or a laminated film of Ni and Au. Further, the pad electrode may be a laminated film of other metals.
  • the semiconductor stack 50 may further include an insulating film such as an SiO 2 film or a SiN film that covers the sidewalls of the ridge portion, etc., in addition to the above-mentioned layers.
  • an insulating film such as an SiO 2 film or a SiN film that covers the sidewalls of the ridge portion, etc., in addition to the above-mentioned layers.
  • the semiconductor stack 50 is formed of a GaN-based material
  • this embodiment is also applicable to cases where it is formed of a GaAs-based or InP-based material.
  • the semiconductor laser element 2 may be a single-emission laser element.
  • the end face protection film 1F is arranged on the resonator end face 50F on the front side of the semiconductor stacked body 50. In other words, the end face protection film 1F is arranged on the end face of the semiconductor stack 50 on the laser beam emission side.
  • the end face protection film 1F includes a first dielectric layer 30 and a second dielectric layer 40.
  • the end face protection film 1F protects the resonator end face 50F on the front side of the semiconductor stack 50, and reduces the end face reflectance of the laser beam at the resonator end face 50F.
  • the end face protection film 1F may be referred to as an output side protection layer, for example.
  • FIGS. 2A and 2B are graphs showing the wavelength dependence of the end face reflectance of the semiconductor laser device 2 according to the first embodiment.
  • FIG. 2B is an enlarged graph of the wavelength 400 nm to 500 nm portion of FIG. 2A.
  • the end face reflectance of the end face protection film 1F of the semiconductor laser element 2 is set to 0.5% or more and 1.0% or less at a laser oscillation wavelength of 440 nm, for example, as shown in the initial waveform W2a in FIGS. 2A and 2B. be done.
  • the end face reflectance at the laser oscillation wavelength when SiO x is not deposited on the end face protection film 1F of the semiconductor laser device 2 is set to 0.5% or more and 1.0% or less.
  • the state of the semiconductor laser device 2 in which SiO x is not deposited may be referred to as an initial state.
  • An example of the initial state is the state at the time of shipment of the semiconductor laser element 2.
  • the external cavity type laser device includes a semiconductor laser element 2 and a partial reflection mirror disposed outside the end face protection film 1F of the semiconductor laser element 2.
  • a laser device 90 in FIG. 5 includes semiconductor laser elements 2a and 2b and a partial reflection mirror 97.
  • the semiconductor laser element 2 can form an internal resonator between the resonator end face 50F and the resonator end face 50R (internal resonance mode).
  • an external resonator can be formed between the resonator end face 50R and a partial reflection mirror 97 (see FIG. 5, which will be described later). For example, by reducing the light reflectance in the end face protection film 1F (to 1.0% or less), internal resonance can be suppressed and laser oscillation by the external resonator can be easily generated.
  • the external resonator type laser device improves the external resonance efficiency and can emit laser light with high optical intensity. It can be emitted stably. In other words, it is preferable that the reflectance of the end face on the front side is low.
  • siloxane floating in the air causes a photochemical reaction by laser light in the blue-violet to green wavelength band of 390 nm to 530 nm.
  • SiO x is deposited mainly near the active layer 53 of a semiconductor laser device that outputs laser light in such a wavelength range and is not hermetically sealed.
  • the reflectance of the front end face of the semiconductor laser device 2 changes depending on the deposition of SiO x .
  • the front side end face reflectance is set to 0.5% or more and 1.0% or less at a laser oscillation wavelength of 440 nm
  • the deposition of SiO x caused by the operation of the semiconductor laser device 2 will cause the
  • the initial waveform W2a changes to a deposition waveform W2b, and further changes to a deposition waveform W2c.
  • the front end face reflectance changes from the initial waveform W2a to the deposited waveform W2b. As shown in , it will go down once. Thereafter, when SiO x is further deposited to a thickness of 20 nm, the front end face reflectance at a laser oscillation wavelength of 440 nm increases as shown in the deposition waveform W2c.
  • the end face reflectance on the front side is 0% or more and 1.0% for a deposition of SiO x of 20 nm or less in a bandwidth of 20 nm or more including the oscillation wavelength of the laser beam (for example, centered around the oscillation wavelength of 440 nm). It varies within a range of % or less.
  • the end facet at a laser oscillation wavelength of 440 nm will be damaged due to the deposition of SiO x .
  • the end face reflectance at a laser oscillation wavelength of 440 nm changes by more than 2.0%, as shown in waveform W3b. Therefore, in the external resonator type laser device, the efficiency of external resonance characteristics is significantly reduced.
  • the end face reflectance at the laser oscillation wavelength of the semiconductor laser device 2 in the initial state where SiO x is not deposited is maximized.
  • set it to a slightly higher value add an offset. For example, it is set to 0.5% or more and 1.0% or less, which increases the efficiency of external resonance.
  • the end face reflectance at the laser oscillation wavelength of the semiconductor laser element 2 in the initial state is 0.5% or more, which is larger than the minimum end face reflectance, and the efficiency of external resonance is high. Set to 1.0% or less.
  • the state change such as a decrease and increase in the reflectance of the end face at the laser oscillation wavelength, which is caused by the deposition of SiO Achieve reflectance.
  • the end face reflectance in the initial state at a laser oscillation wavelength of 440 nm is set to 0.62%.
  • the end face reflectance decreases to 0.15%, as shown in the deposition waveform W2b.
  • the end face reflectance becomes 0.76%, as shown in the deposition waveform W2c.
  • the front end face reflectance can be suppressed to within 1.0%.
  • the end face reflectance exceeds 2.0%.
  • the end face reflectance is suppressed to within 1.0%, as described above. Since the semiconductor laser device 2 has a reduced end face reflectance change due to SiO x deposition, an external cavity type laser device using the semiconductor laser device 2 can obtain stable external resonance characteristics.
  • FIG. 4 is a diagram showing an example of the relationship between the front side end face reflectance and the operating current value.
  • the operating current value of the semiconductor laser device 2 increases.
  • the change in the operating current value with respect to the end face reflectance becomes large. Therefore, in the case of a low reflectance structure, changes in the operating current value (ie, laser characteristics) become large with respect to changes in reflectance.
  • a standard reflectance of about 5-18% for example, even if the reflectance changes slightly, the change in the operating current value is small and the curve is gentle, so there is little change in the laser characteristics. Therefore, the structure of the present disclosure that suppresses reflectance fluctuations is more effective at low reflectance.
  • first dielectric layer of end face protection film 1F The first dielectric layer 30 is arranged on the front side resonator end face 50F.
  • the first dielectric layer 30 suppresses deterioration such as damage caused by laser light on the resonator end face 50F of the semiconductor stack 50.
  • the first dielectric layer 30 may include at least one dielectric film made of at least one of a nitride film and an oxynitride film. Thereby, oxygen diffusion from the resonator end face 50F toward the semiconductor stack 50 is reduced, and deterioration such as damage caused by laser light on the resonator end face 50F of the semiconductor stack 50 can be suppressed. Therefore, long-term operation of the semiconductor laser device 2 is possible.
  • the first dielectric layer 30 is directly connected to the resonator end face 50F of the semiconductor stack 50. That is, the first dielectric layer 30 is formed in contact with the resonator end face 50F. Therefore, by using a nitride film or an oxynitride film having the same crystallinity as the semiconductor stack 50 as the first dielectric layer 30, the protection performance of the resonator end face 50F can be improved.
  • the first dielectric layer 30 includes, for example, an AlON film. More specifically, the first dielectric layer 30 is a single layer film made of an AlON film with a thickness of about 20 nm. Note that the configuration of the first dielectric layer 30 is not limited to this.
  • the first dielectric layer 30 may be, for example, another oxynitride film such as SiON, or may be a nitride film such as an AlN film or a SiN film.
  • the first dielectric film 30 may include multiple layers from two to four layers instead of one layer.
  • the layer directly connected to the resonator end face 50F may be a nitride film or an oxynitride film.
  • the layer directly connected to the resonator end face 50F may be an AlON film, a SiON film, an AlN film, or a SiN film.
  • the layer that is not directly connected to the resonator end face 50F does not have to be a nitride film or an oxynitride film.
  • an AlON film, a SiON film, an AlN film, a SiN film, an Al 2 O 3 film, or a SiO 2 film may be used.
  • the second dielectric layer 40 is a dielectric layer laminated on the front side of the first dielectric layer 30.
  • the second dielectric layer 40 includes a first layer 41 , a second layer 42 , and a third layer 43 .
  • the second dielectric layer 40 is made of an oxide film, an oxynitride film, or a nitride film, and plays a role in adjusting the end face reflectance. Therefore, the second dielectric layer 40 is formed so as to obtain a desired reflectance.
  • the second dielectric layer 40 is formed by multiple layers.
  • the refractive index n2 of the second layer 42 is set higher than the refractive index n1 of the first layer 41 and the refractive index n3 of the third layer 43 with respect to the wavelength of the laser light emitted from the resonator end face 50F.
  • an end face protection film 1F having a reflectance of 1.0% or less over a wide range, for example, in a wavelength band of 50 nm or more, centered around the 440 nm oscillation wavelength of the laser beam.
  • the first layer 41 is, for example, an Al 2 O 3 film with a thickness of about 100 nm.
  • the first layer 41 may be any dielectric film having a lower refractive index than the second layer 42, and may include, for example, at least one of an SiO 2 film, an AlON film, and a SiON film. Thereby, the first layer 41 having a relatively low refractive index can be realized.
  • the second layer 42 is, for example, a ZrO 2 film with a thickness of about 50 nm.
  • the second layer 42 may be a dielectric film having a higher refractive index than the first layer 41 and the third layer 43.
  • the second layer 42 may include at least one of an AlN film, an AlON film, a SiN film, a SiON film, a TiO 2 film, a Nb 2 O 5 film, a Ta 2 O 5 film, and an HfO 2 film. Thereby, the second layer 42 having a relatively high refractive index can be realized.
  • the third layer 43 is, for example, a SiO 2 film with a thickness of about 100 nm.
  • the third layer 43 may be any dielectric film having a lower refractive index than the second layer 42, and may include, for example, at least one of an Al 2 O 3 film, an AlON film, and a SiON film. Thereby, the third layer 43 having a relatively low refractive index can be realized.
  • the end face reflectance of the end face protection film 1F in the initial state at the laser oscillation wavelength (the end face reflectance on the front side of the semiconductor laser element 2) is set to 0.5% or more and 1.0% or less, which is larger than the minimum end face reflectance.
  • This can be set by adjusting the film thickness and film thickness ratio of the dielectric film used for the first layer 41 and/or the third layer 43 in the second dielectric layer 40.
  • the thickness can be set by increasing the thickness of the first layer 41 by several nm and decreasing the thickness of the third layer 43 by several nm.
  • the end face reflectance at the laser oscillation wavelength is kept within 1.0% by depositing 20 nm of SiO Not limited to.
  • a strain relaxation layer of 1 to 20 nm may be inserted into the end face protection film 1F. Even in this case, the end face reflectance can be maintained within 1.0%, and the effect of suppressing the end face reflectance and the effect of reducing stress can be obtained.
  • the strain relaxation layer a thin film such as SiO 2 that has a small coefficient of thermal expansion and that absorbs little light at the laser oscillation wavelength may be used, for example.
  • the film thickness is preferably a thin film that does not affect the end face reflectance, and is preferably about 1 nm or more and 20 nm or less.
  • the end face protection film 1R is arranged on the rear resonator end face 50R of the semiconductor stacked body 50. In other words, the end face protection film 1R is arranged on the non-emission side end face of the semiconductor stacked body 50, which is opposite to the laser light emitting side end face.
  • the end face protection film 1R has a function of protecting the resonator end face 50R of the semiconductor stacked body 50 and increasing the end face reflectance of the laser beam at the resonator end face 50R.
  • the end face protection film 1R may be referred to as a non-emission side protection layer, for example.
  • the end face protection film 1R is, for example, a multilayer film in which a plurality of pairs of SiO 2 films and AlON films having a thickness of about ⁇ /(4n) are laminated, where the wavelength of the laser light is ⁇ .
  • n represents the refractive index of each dielectric film.
  • the configuration of the end face protection film 1R is not limited to the above, and may include a SiO 2 film and a ZrO 2 film, a SiO 2 film and a Ta 2 O 5 film, a SiO 2 film, and a SiO 2 film as long as the desired reflectance can be obtained.
  • a stacked structure may also be used.
  • an Al 2 O 3 film may be used as the low refractive index film.
  • the end face protection film 1R may also include at least one of a nitride film and an oxynitride film, similarly to the end face protection film 1F.
  • the semiconductor stack 50 is made of, for example, a gallium nitride-based material.
  • the semiconductor laser element 2 can emit laser light in a wavelength range of about 390 nm or more and 530 nm or less, for example.
  • the semiconductor laser device 2 Since the semiconductor laser device 2 is not hermetically sealed, SiO x derived from siloxane is exposed to the outside of the end face protection film 1F during laser operation, especially in the blue-violet to green semiconductor laser device in the 390 nm to 530 nm band. May accumulate.
  • the end face reflectance at the laser oscillation wavelength of the semiconductor laser element 2 in the initial state is set to, for example, 0.5% or more, which is larger than the minimum end face reflectance, and the external resonance efficiency is Set it to 1.0% or less. Thereby, changes in end face reflectance due to deposition of SiO x on the outside of the end face protection film 1F can be reduced. Further, even if SiO x is deposited to a thickness of, for example, 20 nm, the end face reflectance can be suppressed to 1.0% or less, and stable external resonance characteristics can be realized in an external cavity type laser device.
  • the end face protection film 1F reduces oxygen diffusion to the front side resonator end face 50F. Therefore, deterioration of the semiconductor laser element 2 can be suppressed.
  • the semiconductor laser device 2 is formed of a gallium nitride-based material, and the laser light emitted from the semiconductor laser device 2 is a blue-violet to green laser light having a wavelength in a band of approximately 390 nm or more and 530 nm or less.
  • the present embodiment may be applied to a semiconductor laser element in which the semiconductor stack is formed of an AlGaInP-based material and outputs laser light in the red wavelength band (band from 600 nm to 700 nm).
  • the present invention may be applied to a semiconductor laser element in which the semiconductor stack is formed of a gallium arsenide-based material and outputs laser light in an infrared wavelength band (band of 750 nm or more and 1100 nm or less). Further, the present invention may be applied to a semiconductor laser element in which the semiconductor stack is formed of an InP-based material and outputs laser light in a wavelength band of 1 ⁇ m.
  • the deposition of SiO x from siloxane is greater in the case of gallium nitride based materials. Therefore, the effects of this embodiment are greater in the semiconductor laser element 2 made of gallium nitride-based material.
  • a semiconductor stack 50 is formed.
  • a substrate 51 is prepared, and a first semiconductor layer 52, an active layer 53, a second semiconductor layer 54, and a contact layer 55 are stacked in this order.
  • a first semiconductor layer 52 as an n-type cladding layer, an active layer 53, a second semiconductor layer 54 as a p-type cladding layer, and a contact layer 55 are sequentially stacked on a substrate 51.
  • Each layer is formed by, for example, metal organic chemical vapor deposition (MOCVD).
  • MOCVD metal organic chemical vapor deposition
  • a ridge portion is formed in the second semiconductor layer 54 and the contact layer 55.
  • the ridge portion is formed by, for example, ICP (Inductive Coupled Plasma) type reactive ion etching.
  • the semiconductor stacked body 50 is formed.
  • an insulating film such as a SiO 2 film is formed by, for example, a plasma CVD method. At least a portion of the upper surface of the ridge portion of the insulating film is removed by wet etching or the like. At this time, it may be formed using a solid source ECR (Electron Cyclotron Resonance) sputter plasma film forming apparatus or the like, or an insulating film such as a SiN film may be formed using a similar manufacturing method.
  • ECR Electro Cyclotron Resonance
  • the second electrode 57 is formed on the ridge portion by, for example, a vacuum evaporation method.
  • a first electrode 56 is formed on the lower surface of the substrate 51 by, for example, a vacuum evaporation method.
  • the semiconductor wafer is firstly cleaved using, for example, a laser scribing device and a breaking device, and the laser resonator end face is formed. Create.
  • an end face protection film 1F and an end face protection film 1R are formed on the front side resonator end face 50F and the rear side resonator end face 50R of the semiconductor stack 50, respectively.
  • a solid source ECR (Electron Cyclotron Resonance) sputter plasma film forming apparatus is used to form each dielectric film on the resonator end face 50F and the resonator end face 50R, respectively. This makes it possible to suppress damage to each end face when forming the dielectric film.
  • the semiconductor laser device 2 is manufactured.
  • FIG. 5 is a diagram showing a configuration example of a laser device 90 including a semiconductor laser element 2. As shown in FIG.
  • the laser device 90 includes semiconductor laser elements 2a and 2b, optical lenses 91a and 91b, a diffraction grating 95, and a partial reflection mirror 97.
  • Each of the semiconductor laser elements 2a and 2b is the semiconductor laser element 2 described above.
  • the semiconductor laser elements 2a and 2b each have N light-emitting points E 11 to E 1N (N is an integer of 2 or more) and N light-emitting points E 21 to E 2N .
  • Each of these light emitting points emits laser light.
  • the wavelength of the laser light emitted from each light emitting point is determined by the wavelength selection effect of an external resonator including a diffraction grating 95, which will be described later.
  • the semiconductor laser element 2a emits laser beams having different wavelengths ⁇ 11 to ⁇ 1N from light emitting points E 11 to E 1N , respectively.
  • the semiconductor laser element 2b emits laser beams having different wavelengths ⁇ 21 to ⁇ 2N from light emitting points E 21 to E 2N , respectively.
  • the semiconductor laser elements 2a and 2b are arranged so that each laser beam propagates within the same plane.
  • Optical lenses 91a and 91b are provided corresponding to semiconductor laser elements 2a and 2b, respectively.
  • the optical lenses 91a and 91b are optical elements that focus the respective laser beams emitted from the semiconductor laser elements 2a and 2b onto the diffraction grating 95.
  • the optical lenses 91a and 91b may have a function of collimating each laser beam.
  • the laser device 90 may include a collimating lens that collimates each laser beam, in addition to the optical lenses 91a and 91b.
  • the diffraction grating 95 is a wavelength dispersion element that combines multiple laser beams with different wavelengths.
  • the diffraction grating 95 combines a plurality of laser beams with different propagation directions onto almost the same optical axis by appropriately setting the wavelengths and incidence angles of the plurality of incident laser beams and the slit intervals. .
  • the partial reflection mirror 97 is a mirror that forms an external resonator with the rear end face protection film 1R of the semiconductor laser elements 2a and 2b, and functions as an output coupler that emits laser light.
  • the reflectance and transmittance of the partial reflection mirror 97 are appropriately set according to the gains of the semiconductor laser elements 2a, 2b, etc.
  • Each of the semiconductor laser elements 2a and 2b emits N laser beams when supplied with current.
  • N laser beams emitted from the semiconductor laser element 2a are focused on a focal point on the diffraction grating 95 by the optical lens 91a.
  • N laser beams emitted from the semiconductor laser element 2b are focused on a focal point on the diffraction grating 95 by an optical lens 91b.
  • Each laser beam focused on the diffraction grating 95 is diffracted by the diffraction grating 95 and directed toward the partial reflection mirror 97 on substantially the same optical axis.
  • a portion of each laser beam directed toward the partial reflection mirror 97 is reflected by the partial reflection mirror 97, returns to each semiconductor laser element 2a, 2b via the diffraction grating 95 and optical lenses 91a, 91b, and returns to each semiconductor laser element 2a, 2b. It is reflected by the end face protection film 1R on the rear side of 2a and 2b.
  • an external resonator is formed between the rear side end face protection film 1R of each semiconductor laser element 2a, 2b and the partial reflection mirror 97.
  • the laser light transmitted through the partial reflection mirror 97 becomes the output light of the laser device 90.
  • the output light of the laser device 90 becomes a high-power laser light through, for example, an optical fiber arranged on the optical axis of the output light.
  • the reflectance of the end face protection film 1F disposed on the front side resonator end face 50F is 1.0% or less.
  • Examples of light synthesis methods include a wavelength synthesis method used in the laser device 90 shown in FIG. 5 and a spatial synthesis method that spatially synthesizes light. To achieve beam narrowing, a wavelength synthesis method in which light of different wavelengths is focused on the same optical axis is preferable to a spatial synthesis method.
  • the laser light of the wavelength ⁇ 11 of the semiconductor laser element 2a and the laser light of the wavelength ⁇ 1N are different in optical path length and angle of incidence on the diffraction grating 95.
  • the laser beam with the wavelength ⁇ 21 and the laser beam with the wavelength ⁇ 2N have different optical path lengths and different incident angles to the diffraction grating 95.
  • the optical output of the laser beam output from the laser device 90 is increased.
  • laser beams of more wavelengths are prepared.
  • each of the semiconductor laser elements 2a and 2b has a plurality of light emitting points. Each of the plurality of light emitting points emits laser light.
  • a compact laser light source that can emit multiple laser beams is realized.
  • a compact laser device 90 can be realized by using the semiconductor laser elements 2a and 2b.
  • the laser device 90 is provided with two semiconductor laser elements 2a and 2b.
  • the number of semiconductor laser devices included in the laser device 90 is not limited to this, and may be three or more. It may be. As the number of semiconductor laser elements 2 increases, the optical output of the laser device 90 can be increased.
  • a plurality of laser devices 90 that perform wavelength synthesis may be used, and the beams may be synthesized by a spatial synthesis method. This allows the optical output of the laser beam to be increased.
  • each semiconductor laser element 2a, 2b has a plurality of light emitting points, but each semiconductor laser element 2a, 2b may have a single light emitting point. Even with a semiconductor laser element having a single light emitting point, according to this embodiment, it is possible to improve the optical output.
  • FIG. 6 is a diagram showing a configuration example of an optical system including the semiconductor laser element 2.
  • the optical system 100 includes a laser device 90.
  • the laser device 90 includes a plurality of semiconductor laser elements 2 (not shown), an optical lens (not shown), a unit 98 for outputting laser light, a diffraction grating 95, and a partial reflection mirror 97.
  • the optical system 100 combines the plurality of laser beams output from the unit 98 and outputs the combined laser beam.
  • the optical system 100 is, for example, an external resonance type laser processing device.
  • the optical system 100 has a housing section 110 that houses the laser device 90.
  • the housing section 110 includes an intake section 120, an exhaust section 130, and a siloxane adsorption filter 140.
  • the housing section 110 is a hollow housing and houses the laser device 90.
  • the housing section 110 includes an intake section 120 and an exhaust section 130.
  • Arrows A6a and A6b shown in FIG. 6 each indicate the flow of supply gas and exhaust gas. Gas is taken in through the intake section 120 and exhausted through the exhaust section 130. The gas may be circulated.
  • the internal space of the housing part 110 is, for example, filled with the atmosphere and contains at least one of oxygen, hydrogen, argon, and halogen gas.
  • the interior space may be filled with dry air from which moisture has been removed from the atmosphere.
  • the intake section 120 of the storage section 110 is equipped with a siloxane adsorption filter 140.
  • the siloxane adsorption filter 140 adsorbs (reduces) siloxane contained in the gas taken in from the intake section 120.
  • the internal space of the housing portion 110 may be filled with the atmosphere and may contain siloxane, for example. Due to siloxane contained in the atmosphere, SiO x may be deposited on the end face protection film 1F of the semiconductor laser element 2 during operation of the laser device 90 in the housing section 110. Therefore, the optical system 100 includes a siloxane adsorption filter 140 in the intake section 120 of the housing section 110 to reduce siloxane contained in the gas introduced from the outside. Thereby, deposition of SiO x on the end face protection film 1F of the semiconductor laser device 2 can be suppressed.
  • the semiconductor laser element 2 includes the semiconductor stack 50 that emits laser light, the end face protection film 1F disposed on the laser light emitting side end face of the semiconductor stack 50, and the semiconductor stack 50 that emits laser light. It has an end face protection film 1R that is disposed on the non-emission side end face opposite to the emission side end face and reflects the laser beam.
  • the reflectance at the oscillation wavelength of the laser beam in the end face protection film 1F is higher than the reflectance after an oxide containing silicon is attached to the first end face (front end face) from which the laser light of the end face protection film 1F is emitted. set high.
  • the reflectance of the end face protection film 1F at the oscillation wavelength of the laser beam is set to 0.5% or more.
  • the reflectance of the end face protection film 1F at the oscillation wavelength of the laser beam decreases as SiO x is deposited and then increases, so that the semiconductor laser element 2 maintains low reflection for a long period of time. rate can be maintained.
  • the semiconductor laser element 2 since the semiconductor laser element 2 includes a step in which the change in reflectance decreases and then increases, it is possible to maintain a reflectance lower than the reflectance set in the initial state for a long period of time.
  • the semiconductor laser element 2 can maintain a low reflectance for a long period of time, variations in reflectance at low reflectance can be suppressed.
  • the reflectance of the end face protection film 1F at the oscillation wavelength of the laser beam is set to 1.0% or less.
  • ⁇ Second embodiment> A semiconductor laser device according to a second embodiment will be described below.
  • the wavelength bandwidth of the bottom part of the end face reflectance on the front side (the bottom part of the concave waveform indicating the wavelength dependence of the end face reflectance) at the laser oscillation wavelength is the same as the wavelength bandwidth of the first end face reflectance.
  • a case where the bandwidth is narrower than that of the embodiment (narrow band case) will be described. Below, descriptions of the same contents as in the first embodiment may be omitted.
  • FIG. 7 is a schematic cross-sectional view showing a configuration example of a semiconductor laser device 2 according to the second embodiment.
  • FIG. 7 shows a cross section of the semiconductor stack 50 included in the semiconductor laser element 2 along the stacking direction (vertical direction in FIG. 7) and the resonance direction of the laser light (horizontal direction in FIG. 7).
  • the semiconductor laser element 2 includes a semiconductor stack 50, an end face protection film 1F, an end face protection film 1R, a first electrode 56, and a second electrode 57.
  • the semiconductor stack 50 shown in FIG. 7 is the same as the semiconductor stack 50 described in the first embodiment, and therefore will be omitted.
  • the end face protection film 1F is arranged on the resonator end face 50F on the front side of the semiconductor stacked body 50.
  • the end face protection film 1F includes a first dielectric layer 30 and a second dielectric layer 40.
  • the end face protection film 1F protects the resonator end face 50F on the front side of the semiconductor stack 50 and reduces the reflectance of the laser beam at the resonator end face 50F.
  • FIGS. 8A and 8B are graphs showing the wavelength dependence of the end face reflectance of the semiconductor laser device 2 according to the second embodiment.
  • FIG. 8B is an enlarged graph of the wavelength 400 nm to 500 nm portion of FIG. 8A.
  • the end face reflectance has a low reflectance bandwidth that is the bottom (valley) bandwidth of the end face reflectance.
  • the low reflectance bandwidth at the laser oscillation wavelength of the semiconductor laser device 2 according to the second embodiment is the same as the low reflectance bandwidth of the semiconductor laser device 2 according to the first embodiment shown in FIGS. 2A and 2B. Narrower.
  • the low reflectance bandwidth of the semiconductor laser device 2 according to the first embodiment is wider than the low reflectance bandwidth of the semiconductor laser device 2 according to the second embodiment. This is because the semiconductor laser device 2 includes the second layer 42.
  • the second layer 42 has a refractive index higher than the refractive index n1 of the first layer 41 and the refractive index n3 of the third layer 43 at the wavelength of the laser light emitted from the resonator end face 50F.
  • the end face reflectance of the end face protection film 1F of the semiconductor laser element 2 is set to 0.5% or more and 1.0% or less at a laser oscillation wavelength of 440 nm, for example, as shown in the initial waveform W8a in FIGS. 8A and 8B. be done.
  • the end face reflectance at the laser oscillation wavelength when SiO x is not deposited on the end face protection film 1F of the semiconductor laser device 2 is set to 0.5% or more and 1.0% or less.
  • the semiconductor laser element 2 can form an internal resonator between the resonator end face 50F and the resonator end face 50R (internal resonance mode). Further, in the external resonator type laser device, an external resonator can be formed between the resonator end face 50R and a partial reflection mirror 97 (see FIG. 5, which will be described later). For example, by reducing the light reflectance in the end face protection film 1F (to 1.0% or less), internal resonance can be suppressed and laser oscillation by the external resonator can be easily generated.
  • the external resonator type laser device improves the external resonance efficiency and can emit laser light with high optical intensity. It can be emitted stably. In other words, it is preferable that the reflectance of the end face on the front side is low.
  • siloxane floating in the air causes a photochemical reaction by laser light in the blue-violet to green wavelength band of 390 nm to 530 nm.
  • SiO x is deposited mainly near the active layer 53 of a semiconductor laser device that outputs laser light in such a wavelength range and is not hermetically sealed.
  • the reflectance of the front end face of the semiconductor laser device 2 changes depending on the deposition of SiO x .
  • the front side end face reflectance is set to 0.5% or more and 1.0% or less at a laser oscillation wavelength such as 440 nm
  • the deposition of SiO x caused by the operation of the semiconductor laser device 2 will cause the
  • the initial waveform W8a in FIG. 8B changes to a deposition waveform W8b, and further changes to a deposition waveform W8c.
  • the front end face reflectance changes from the initial waveform W8a to the deposited waveform W8b. As shown in , it will go down once. Thereafter, when SiO x is further deposited to a thickness of 20 nm, the front end face reflectance at a laser oscillation wavelength of 440 nm increases as shown in the deposition waveform W8c.
  • the end face reflectance on the front side is 0% or more and 1.0% for a deposition of SiO x of 20 nm or less in a bandwidth of 20 nm or more including the oscillation wavelength of the laser beam (for example, centered around the oscillation wavelength of 440 nm). It varies within a range of % or less.
  • the end facet at a laser oscillation wavelength of 440 nm will be damaged due to the deposition of SiO x .
  • the end face reflectance at a laser oscillation wavelength of 440 nm changes by more than 2.0%, as shown in waveform W3b. Therefore, in the external resonator type laser device, the efficiency of external resonance characteristics is significantly reduced.
  • the end face reflectance at the laser oscillation wavelength of the semiconductor laser device 2 in the initial state in which no SiO x is deposited is maximized.
  • it is set to 0.5% or more and 1.0% or less, which increases the efficiency of external resonance.
  • the end face reflectance at the laser oscillation wavelength of the semiconductor laser element 2 in the initial state is 0.5% or more, which is larger than the minimum end face reflectance, and the efficiency of external resonance is high. Set to 1.0% or less.
  • the state change such as a decrease and increase in the reflectance of the end face at the laser oscillation wavelength, which is caused by the deposition of SiO Achieve reflectance.
  • the end face reflectance in the initial state at a laser oscillation wavelength of 440 nm is set to 0.57%.
  • the end face reflectance decreases to 0.03%, as shown in the deposition waveform W8b.
  • the end face reflectance becomes 0.73%, as shown in the deposition waveform W8c.
  • the front end face reflectance can be suppressed to within 1.0%.
  • the end face reflectance exceeds 2.0%.
  • the end face reflectance is suppressed to within 1.0%, as described above. Since the semiconductor laser device 2 has a reduced end face reflectance change due to SiO x deposition, an external cavity type laser device using the semiconductor laser device 2 can obtain stable external resonance characteristics.
  • the operating current value of the semiconductor laser device 2 increases. Further, as shown in FIG. 4, when the end face reflectance is 1.0% or less, the change in the operating current value with respect to the end face reflectance becomes large. Therefore, in the case of a low reflectance structure, changes in the operating current value (ie, laser characteristics) become large with respect to changes in reflectance. On the other hand, in the case of a standard reflectance of about 5-18%, for example, even if the reflectance changes slightly, the change in the operating current value is small and the curve is gentle, so there is little change in the laser characteristics. Therefore, the structure of the present disclosure that suppresses reflectance fluctuations is more effective at low reflectance.
  • first dielectric layer of end face protection film 1F Configuration example of first dielectric layer of end face protection film 1F>
  • the first dielectric layer 30 is arranged on the front side resonator end face 50F.
  • the first dielectric layer 30 suppresses deterioration such as damage caused by laser light on the resonator end face 50F of the semiconductor stack 50.
  • the first dielectric layer 30 includes at least two dielectric films.
  • the first dielectric layer 30 includes a dielectric film made of at least one of a nitride film and an oxynitride film on the side of the resonator end face 50F.
  • the first dielectric layer 30 includes a dielectric film made of any one of a nitride film, an oxynitride film, and an oxide film on the second dielectric layer 40 side.
  • a nitride film or an oxynitride film having the same crystallinity as the semiconductor stack 50 is used as the first dielectric layer of the first dielectric layer 30 directly connected to the front side resonator end face 50F. Thereby, the protection performance of the resonator end face 50F can be improved.
  • the first layer of the first dielectric layer 30 is made of, for example, an AlON film with a thickness of about 20 nm. Note that the configuration of the first layer of the first dielectric layer 30 is not limited to this.
  • the first layer of the first dielectric layer 30 may be, for example, another oxynitride film such as SiON, or may be a nitride film such as an AlN film or a SiN film.
  • a dielectric film made of any one of a nitride film, an oxynitride film, and an oxide film is used. This reduces oxygen diffusion from the front side resonator end face 50F toward the semiconductor stack 50.
  • the second layer of the first dielectric layer 30 is made of, for example, an Al 2 O 3 film with a thickness of about 10 nm. Note that the configuration of the second layer of the first dielectric layer 30 is not limited to this.
  • the second layer of the first dielectric layer 30 may be, for example, an oxynitride film such as AlON or SiON, or a nitride film such as an AlN film or a SiN film.
  • the first dielectric film 30 may include multiple layers from three to four layers instead of two layers.
  • the layer directly connected to the resonator end face 50F may be a nitride film or an oxynitride film.
  • the layer directly connected to the resonator end face 50F may be an AlON film, a SiON film, an AlN film, or a SiN film.
  • Other layers that are not directly connected to the resonator end face 50F may not be nitride films or oxynitride films.
  • an AlON film, a SiON film, an AlN film, a SiN film, an Al 2 O 3 film, or a SiO 2 film may be used.
  • the second dielectric layer 40 is a dielectric layer laminated on the front side of the first dielectric layer 30.
  • the second dielectric layer 40 includes a first layer 41 and a second layer 42a.
  • the second dielectric layer 40 is made of an oxide film, an oxynitride film, or a nitride film, and plays a role in adjusting the end face reflectance. Therefore, the second dielectric layer 40 is formed so as to obtain a desired reflectance.
  • the film thickness of the second dielectric layer 40 in order to achieve an end face reflectance of 1.0% or less for a laser beam oscillation wavelength of 440 nm, for example, the film thickness of the second dielectric layer 40 must be and adjust the film thickness ratio.
  • the first layer 41 is, for example, an Al 2 O 3 film with a thickness of about 100 nm.
  • the first layer 41 may be any dielectric film that has low light absorption at the oscillation wavelength of the laser beam, such as a SiO 2 film, an AlON film, a SiON film, or a high refractive index film such as an AlN film, an AlON film, or a SiN film.
  • the film may be a SiON film, a TiO 2 film, a Nb 2 O 5 film, a Ta 2 O 5 film, a ZrO 2 film, or a HfO 2 film.
  • the second layer 42a is a SiO 2 film with a thickness of about 100 nm.
  • the third layer 43 may also be any dielectric material that has low light absorption at the oscillation wavelength of the laser beam, such as an Al 2 O 3 film, an AlON film, a SiON film, a high refractive index film such as an AlN film, an AlON film, It may be a SiN film, a SiON film, a TiO 2 film, a Nb 2 O 5 film, a Ta 2 O 5 film, a ZrO 2 film, or an HfO 2 film.
  • the second dielectric layer 40 is a two-layer film, but the present invention is not limited to this.
  • the second dielectric layer 40 may be one layer as long as it achieves an end face reflectance of 1.0% or less at the oscillation wavelength of the laser beam.
  • the second dielectric layer 40 may be an Al 2 O 3 film with a thickness of about 50 nm, or may be not limited to the Al 2 O 3 film but may be an SiO 2 film.
  • the second dielectric layer 40 may be an AlON film, an AlN film, a SiON film, a SiN film, a TiO 2 film, a Nb 2 O 5 film, a ZrO 2 film, a Ta 2 O 5 film, or an HfO 2 film. good.
  • the second dielectric layer 40 is A layer with a high refractive index is not essential, and may be composed of a layer with a low refractive index.
  • the end face reflectance of the end face protection film 1F in the initial state at the laser oscillation wavelength (the end face reflectance on the front side of the semiconductor laser element 2) is set to 0.5% or more and 1.0% or less, which is larger than the minimum end face reflectance.
  • This can be set by adjusting the film thickness and film thickness ratio of the dielectric films used for the first layer 41 and the second layer 42a of the second dielectric layer 40. For example, it can be set by reducing the thickness of the second layer 42a by several nm.
  • a strain relaxation layer of 1 to 20 nm may be inserted into the end face protection film 1F. Even in this case, the end face reflectance can be maintained within 1.0%, and the effect of suppressing the end face reflectance and the effect of reducing stress can be obtained.
  • the strain relaxation layer a thin film such as SiO 2 that has a small coefficient of thermal expansion and that absorbs little light at the laser oscillation wavelength may be used, for example.
  • the film thickness is preferably a thin film that does not affect the end face reflectance, and is preferably about 1 to 20 nm, for example.
  • the same effects as in the first embodiment can be obtained.
  • the end face protection film 1F does not include the second layer 42 described in the first embodiment, and the wavelength bandwidth at the bottom of the end face reflectance on the front side is a narrow band. Even in this case, the same effects as in the first embodiment can be obtained.
  • ⁇ Third embodiment> A semiconductor laser device according to a third embodiment will be described below.
  • the end face reflectance of the semiconductor laser element 2 having a wide low reflectance bandwidth is set to 0.5% or more and 1.0% or less at the laser oscillation wavelength.
  • the ratio is set to 0.5% or more and 2.0% or less. Below, descriptions of the same contents as in the first embodiment may be omitted.
  • end face protection film 1F is arranged on the resonator end face 50F on the front side of the semiconductor stack 50.
  • the end face protection film 1F includes a first dielectric layer 30 and a second dielectric layer 40.
  • the end face protection film 1F protects the resonator end face 50F on the front side of the semiconductor stack 50, and reduces the end face reflectance of the laser beam at the resonator end face 50F.
  • FIGS. 9A and 9B are graphs showing the wavelength dependence of the end face reflectance of the semiconductor laser device 2 according to the third embodiment.
  • FIG. 9B is an enlarged graph of the wavelength 400 nm to 500 nm portion of FIG. 9A.
  • the end face reflectance of the end face protection film 1F of the semiconductor laser element 2 is set to 0.5% or more and 2.0% or less at a laser oscillation wavelength of 440 nm, for example, as shown in the initial waveform W9a of FIGS. 9A and 9B. be done.
  • the end face reflectance at the laser oscillation wavelength when SiO x is not deposited on the end face protection film 1F of the semiconductor laser element 2 is set to 0.5% or more and 2.0% or less.
  • the semiconductor laser element 2 can form an internal resonator between the resonator end face 50F and the resonator end face 50R (internal resonance mode). Further, in the external resonator type laser device, an external resonator can be formed between the resonator end face 50R and a partial reflection mirror 97 (see FIG. 5, which will be described later). For example, by reducing the light reflectance in the end face protection film 1F (to 2.0% or less), internal resonance can be suppressed and laser oscillation by the external resonator can be easily generated.
  • the external resonator type laser device can improve the external resonance efficiency and emit laser light with high optical intensity. It can be emitted stably. In other words, it is preferable that the reflectance of the end face on the front side is low.
  • siloxane floating in the air causes a photochemical reaction by laser light in the blue-violet to green wavelength band of 390 nm to 530 nm.
  • SiO x is deposited mainly near the active layer 53 of a semiconductor laser device that outputs laser light in such a wavelength range and is not hermetically sealed.
  • the reflectance of the front end face of the semiconductor laser device 2 changes depending on the deposition of SiO x .
  • the front side end face reflectance is set to 0.5% or more and 2.0% or less at a laser oscillation wavelength of 440 nm
  • the deposition of SiO x caused by the operation of the semiconductor laser device 2 will cause the
  • the initial waveform W9a in FIG. 9B changes to a deposition waveform W9b, and further changes to a deposition waveform W9c.
  • the front end face reflectance changes from the initial waveform W9a to the deposited waveform W9b. As shown in , it will go down once. Thereafter, when SiO x is further deposited to a thickness of 35 nm, the front end face reflectance at a laser oscillation wavelength of 440 nm increases as shown by the deposition waveform W9c.
  • the front side end face reflectance changes in the range of 0% to 2.0% for a deposition of SiO x of 35 nm or less in a 40 nm bandwidth that includes the oscillation wavelength of the laser beam (e.g., oscillation wavelength of 440 nm). do.
  • the end facet at a laser oscillation wavelength of 440 nm will be damaged due to the deposition of SiO x .
  • the end face reflectance at a laser oscillation wavelength of 440 nm changes by more than 2.0%, as shown in waveform W3b. Therefore, in the external resonator type laser device, the efficiency of external resonance characteristics is significantly reduced.
  • the end face reflectance at the laser oscillation wavelength of the semiconductor laser device 2 in the initial state where SiO x is not deposited is Rather than setting the end face reflectance to a low value, for example, it is set to 0.5% or more and 2.0% or less, which increases the efficiency of external resonance.
  • the end face reflectance at the laser oscillation wavelength of the semiconductor laser element 2 in the initial state is 0.5% or more, which is larger than the minimum end face reflectance, and the efficiency of external resonance is high. Set to 2.0% or less.
  • the state change such as a decrease and increase in the reflectance of the end face at the laser oscillation wavelength, which is caused by the deposition of SiO Achieve reflectance.
  • the end face reflectance in the initial state at a laser oscillation wavelength of 440 nm is set to 2.00%.
  • the end face reflectance decreases to 0.01%, as shown in the deposition waveform W9b.
  • the end face reflectance becomes 1.92%, as shown in the deposition waveform W9c.
  • the front end face reflectance can be suppressed to within 2.0%.
  • the end face reflectance exceeds 2.0%.
  • the end face reflectance is suppressed to within 2.0% even when 35 nm is deposited, as described above. Since the semiconductor laser device 2 has a reduced end face reflectance change due to SiO x deposition, an external cavity type laser device using the semiconductor laser device 2 can obtain stable external resonance characteristics.
  • the end face reflectance of the end face protection film 1F in the initial state at the laser oscillation wavelength (the end face reflectance on the front side of the semiconductor laser element 2) is set to 0.5% or more and 2.0% or less, which is larger than the minimum end face reflectance.
  • This can be set by adjusting the film thickness and film thickness ratio of the dielectric film used for the first layer 41 and/or the third layer 43 of the second dielectric layer 40.
  • the thickness can be set by increasing the thickness of the first layer 41 by several tens of nanometers and decreasing the thickness of the third layer 43 by several nanometers.
  • the semiconductor stack 50 is made of, for example, a gallium nitride-based material.
  • the semiconductor laser element 2 can emit laser light in a wavelength range of approximately 390 nm or more and 530 nm or less, for example.
  • the semiconductor laser device 2 Since the semiconductor laser device 2 is not hermetically sealed, SiO x derived from siloxane is exposed to the outside of the end face protection film 1F during laser operation, especially in the blue-violet to green semiconductor laser device in the 390 nm to 530 nm band. May accumulate.
  • the end face reflectance at the laser oscillation wavelength of the semiconductor laser element 2 in the initial state is set to, for example, 0.5% or more, which is larger than the minimum end face reflectance, and the external resonance efficiency is Set it to 2.0% or less. This makes it possible to reduce the change in end face reflectance caused by the deposition of SiO x on the outside of the end face protection film 1F. Further, even if SiO x is deposited to a thickness of, for example, 35 nm, the end face reflectance can be suppressed to 2.0% or less, and stable external resonance characteristics can be realized in an external cavity type laser device.
  • the end face protection film 1F reduces oxygen diffusion to the front side resonator end face 50F. Therefore, deterioration of the semiconductor laser element 2 can be suppressed.
  • the semiconductor laser device 2 is formed of a gallium nitride-based material, and the laser light emitted from the semiconductor laser device 2 is a blue-violet to green laser light having a wavelength in a band of approximately 390 nm or more and 530 nm or less.
  • the present embodiment may be applied to a semiconductor laser element in which the semiconductor stack is formed of an AlGaInP-based material and outputs laser light in the red wavelength band (band from 600 nm to 700 nm).
  • the present invention may be applied to a semiconductor laser element in which the semiconductor stack is formed of a gallium arsenide-based material and outputs laser light in an infrared wavelength band (band of 750 nm or more and 1100 nm or less). Further, the present invention may be applied to a semiconductor laser element in which the semiconductor stack is formed of an InP-based material and outputs laser light in a wavelength band of 1 ⁇ m.
  • the deposition of SiO x from siloxane is greater in the case of gallium nitride based materials. Therefore, the effects of this embodiment are greater in the semiconductor laser element 2 made of gallium nitride-based material.
  • Example of overall configuration> ⁇ Example of configuration of semiconductor laminate and electrodes>, ⁇ Example of configuration of first dielectric layer of edge protection film 1F>, ⁇ Second dielectric layer of edge protection film 1F, according to the third embodiment
  • Example of structure of body layer>, ⁇ Example of structure of end face protection film 1R>, ⁇ Manufacturing method>, and ⁇ Example of application> are the same as in ⁇ 1-1. described in the first embodiment.
  • Overall configuration example> ⁇ 1-1-1.
  • Configuration example of second dielectric layer of end face protection film 1F>, ⁇ 1-1-3 Configuration example of end face protection film 1R>, ⁇ 1-3 Manufacturing method>, and ⁇ 1-4 Application example> the explanation thereof will be omitted.
  • the reflectance at the oscillation wavelength of the laser beam in the end face protection film 1F is set to 0.5% or more and 2.0% or less. With this also, the same effects as in the first embodiment can be obtained.
  • the laser characteristics can be maintained up to 35 nm deposition compared to 20 nm deposition (first embodiment), it is possible to realize a longer laser operation time.
  • a semiconductor laser device will be described below.
  • the end face reflectance of the semiconductor laser element 2 having a narrow low reflectance bandwidth is set to 0.5% or more and 1.0% or less at the laser oscillation wavelength.
  • the ratio is set to 0.5% or more and 2.0% or less. Below, descriptions of the same contents as those in the second embodiment may be omitted.
  • end face protection film 1F Configuration example of end face protection film 1F> As shown in FIG. 7, the end face protection film 1F is arranged on the resonator end face 50F on the front side of the semiconductor stacked body 50.
  • the end face protection film 1F includes a first dielectric layer 30 and a second dielectric layer 40.
  • the end face protection film 1F protects the resonator end face 50F on the front side of the semiconductor stack 50 and reduces the reflectance of the laser beam at the resonator end face 50F.
  • FIGS. 10A and 10B are graphs showing the wavelength dependence of the end face reflectance of the semiconductor laser device 2 according to the fourth embodiment.
  • FIG. 10B is an enlarged graph of the wavelength 400 nm to 500 nm portion of FIG. 10A.
  • the end face reflectance has a low reflectance bandwidth that is the bottom (valley) bandwidth of the end face reflectance.
  • the low reflectance bandwidth at the laser oscillation wavelength of the semiconductor laser device 2 according to the fourth embodiment is the same as the low reflectance bandwidth of the semiconductor laser device 2 according to the third embodiment shown in FIGS. 9A and 9B. Narrower.
  • the reason why the low reflectance bandwidth of the semiconductor laser device 2 according to the third embodiment is wider than the low reflectance bandwidth of the semiconductor laser device 2 according to the fourth embodiment is because the second layer 42 is provided. It is.
  • the second layer 42 has a refractive index n1 of the first layer 41 and a refractive index of the third layer 43 at the wavelength of the laser light emitted from the cavity end face 50F in the semiconductor laser device 2 according to the third embodiment. It has a higher refractive index than n3.
  • the end face reflectance of the end face protection film 1F of the semiconductor laser element 2 is set to 0.5% or more and 2.0% or less at a laser oscillation wavelength of 440 nm, for example, as shown in the initial waveform W10a in FIGS. 10A and 10B. be done.
  • the end face reflectance at the laser oscillation wavelength when SiO x is not deposited on the end face protection film 1F of the semiconductor laser element 2 is set to 0.5% or more and 2.0% or less.
  • the semiconductor laser element 2 can form an internal resonator between the resonator end face 50F and the resonator end face 50R (internal resonance mode). Further, in the external resonator type laser device, an external resonator can be formed between the resonator end face 50R and a partial reflection mirror 97 (see FIG. 5, which will be described later). For example, by reducing the light reflectance in the end face protection film 1F (to 2.0% or less), internal resonance can be suppressed and laser oscillation by the external resonator can be easily generated.
  • the external resonator type laser device can improve the external resonance efficiency and emit laser light with high optical intensity. It can be emitted stably. In other words, it is preferable that the reflectance of the end face on the front side is low.
  • siloxane floating in the air causes a photochemical reaction by laser light in the blue-violet to green wavelength band of 390 nm to 530 nm.
  • SiO x is deposited mainly near the active layer 53 of a semiconductor laser device that outputs laser light in such a wavelength range and is not hermetically sealed.
  • the reflectance of the front end face of the semiconductor laser device 2 changes depending on the deposition of SiO x .
  • the front side end face reflectance is set to 0.5% or more and 2.0% or less at a laser oscillation wavelength such as 440 nm
  • the deposition of SiO x caused by the operation of the semiconductor laser device 2 will cause the
  • the initial waveform W10a in FIG. 10B changes to a deposited waveform W10b, and further changes to a deposited waveform W10c.
  • the front end face reflectance changes from the initial waveform W10a to the deposited waveform W10b. As shown in , it will go down once. Thereafter, when SiO x is further deposited to a thickness of 35 nm, the front end face reflectance at a laser oscillation wavelength of 440 nm increases as shown in the deposition waveform W10c.
  • the end face reflectance on the front side changes in the range of 0% or more and 2.0% or less for a deposition of SiO x of 35 nm or less at the oscillation wavelength of the laser beam.
  • the end facet at a laser oscillation wavelength of 440 nm will be damaged due to the deposition of SiO x .
  • the end face reflectance at a laser oscillation wavelength of 440 nm changes by more than 2.0%, as shown in waveform W3b. Therefore, in the external resonator type laser device, the efficiency of external resonance characteristics is significantly reduced.
  • the end face reflectance at the laser oscillation wavelength of the semiconductor laser device 2 in the initial state where SiO x is not deposited is maximized.
  • it is set to 0.5% or more and 2.0% or less, which increases the efficiency of external resonance.
  • the end face reflectance at the laser oscillation wavelength of the semiconductor laser element 2 in the initial state is 0.5% or more, which is larger than the minimum end face reflectance, and the efficiency of external resonance is high. Set to 2.0% or less.
  • the state change such as a decrease and increase in the reflectance of the end face at the laser oscillation wavelength, which is caused by the deposition of SiO Achieve reflectance.
  • the end face reflectance in the initial state at a laser oscillation wavelength of 440 nm is set to 1.83%.
  • the end face reflectance decreases to 0.03%, as shown in the deposition waveform W10b.
  • the end face reflectance becomes 1.88%, as shown in the deposition waveform W10c.
  • the front end face reflectance can be suppressed to within 2.0%.
  • the end face reflectance exceeds 2.0%.
  • the end face reflectance is suppressed to within 2.0%, as described above. Since the semiconductor laser device 2 has a reduced end face reflectance change due to SiO x deposition, an external cavity type laser device using the semiconductor laser device 2 can obtain stable external resonance characteristics.
  • the end face reflectance of the end face protection film 1F in the initial state at the laser oscillation wavelength (the end face reflectance on the front side of the semiconductor laser element 2) is set to 0.5% or more and 2.0% or less, which is larger than the minimum end face reflectance.
  • This can be set by adjusting the film thickness and film thickness ratio of the dielectric films used for the first layer 41 and the second layer 42a of the second dielectric layer 40. For example, it can be set by reducing the thickness of the second layer 42a by several nm.
  • the end face reflectance at the laser oscillation wavelength is within 2.0% by depositing 35 nm of SiO Not limited to.
  • Example of overall configuration> ⁇ Example of configuration of semiconductor stack and electrodes>, ⁇ Example of configuration of first dielectric layer of edge protection film 1F>, ⁇ Second dielectric layer of edge protection film 1F, according to the fourth embodiment
  • Example of configuration of body layer> ⁇ Example of configuration of end face protection film 1R>, ⁇ Manufacturing method>, and ⁇ Example of application> are the same as in ⁇ 2-1. described in the second embodiment.
  • Overall configuration example> ⁇ 2-1-1. Configuration example of semiconductor laminate and electrode>, ⁇ 2-1-2-1. Configuration example of first dielectric layer of end face protection film 1F>, ⁇ 2-1-2-2. Configuration example of second dielectric layer of end face protection film 1F>, ⁇ 2-1-3 Configuration example of end face protection film 1R>, ⁇ 2-3 Manufacturing method>, and ⁇ 2-4 Application example> , the explanation thereof will be omitted.
  • the reflectance at the oscillation wavelength of the laser beam in the end face protection film 1F is set to 0.5% or more and 2.0% or less. . With this also, the same effects as in the second embodiment can be obtained.
  • the laser characteristics can be maintained until 35 nm is deposited compared to when 20 nm is deposited (the second embodiment), it is possible to realize a longer laser operation time.
  • the front side end face protection film 1F and the rear side end face protection film 1R may be made of any film, composition, or combination of oxide film, nitride film, or oxynitride film. may be used.
  • each embodiment may be applied to a semiconductor laser element in which the semiconductor stack is formed of an AlGaInP-based material and outputs laser light in the red wavelength band (band from 600 nm to 700 nm). Further, each embodiment may be applied to a semiconductor laser element in which the semiconductor stack is formed of a gallium arsenide-based material and outputs laser light in an infrared wavelength band (band of 750 nm or more and 1100 nm or less). Furthermore, each embodiment may be applied to a semiconductor laser element in which the semiconductor stack is formed of an InP-based material and outputs laser light in the 1 ⁇ m wavelength band.
  • the end face protection film may be formed using sputtering equipment, vapor deposition equipment, etc. other than solid source ECR sputter plasma film deposition equipment, or may be formed by ablation using PLD (Pulse Laser Deposition), ALD (Atomic Layer Deposition), etc. It may be formed using a film device, an epitaxial growth device using MOCVD, or the like.
  • the wavelength dispersion element is not limited to this.
  • a prism, a reflective diffraction grating, or the like may be used as the wavelength dispersion element.
  • the substance deposited on the end face protection film 1F by laser emission may be an oxide containing silicon.
  • Oxides containing silicon include the above-mentioned SiO x .
  • SiO x may include SiO 2 .
  • the semiconductor laser device can maintain low reflectance for a long period of time.
  • the semiconductor laser device of the present disclosure can be used, for example, in industrial laser equipment such as industrial lighting, facility lighting, vehicle headlamps, and laser processing machines that require a high output of W class, and can also be used in laser It can be used as a light source for image display devices such as displays and projectors.
  • 1F, 1R End face protection film 30 First dielectric layer 40 Second dielectric layer 41 First layer 42 Second layer 43 Third layer 50 Semiconductor laminate 50F, 50R Resonator end face

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007088066A (ja) * 2005-09-20 2007-04-05 Aisin Seiki Co Ltd レーザ光源装置
JP2009021548A (ja) * 2007-06-13 2009-01-29 Sharp Corp 発光素子及び発光素子の製造方法
JP2012064637A (ja) * 2010-09-14 2012-03-29 Sanyo Electric Co Ltd 半導体レーザ素子、半導体レーザ装置およびこれを用いた光装置
WO2021187081A1 (ja) * 2020-03-17 2021-09-23 パナソニック株式会社 半導体レーザ素子
WO2021200328A1 (ja) * 2020-03-30 2021-10-07 ヌヴォトンテクノロジージャパン株式会社 窒化物半導体レーザ素子

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007088066A (ja) * 2005-09-20 2007-04-05 Aisin Seiki Co Ltd レーザ光源装置
JP2009021548A (ja) * 2007-06-13 2009-01-29 Sharp Corp 発光素子及び発光素子の製造方法
JP2012064637A (ja) * 2010-09-14 2012-03-29 Sanyo Electric Co Ltd 半導体レーザ素子、半導体レーザ装置およびこれを用いた光装置
WO2021187081A1 (ja) * 2020-03-17 2021-09-23 パナソニック株式会社 半導体レーザ素子
WO2021200328A1 (ja) * 2020-03-30 2021-10-07 ヌヴォトンテクノロジージャパン株式会社 窒化物半導体レーザ素子

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